CN111061054A - Multi-MEMS micro-mirror chip optical path system - Google Patents
Multi-MEMS micro-mirror chip optical path system Download PDFInfo
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- CN111061054A CN111061054A CN201911411856.7A CN201911411856A CN111061054A CN 111061054 A CN111061054 A CN 111061054A CN 201911411856 A CN201911411856 A CN 201911411856A CN 111061054 A CN111061054 A CN 111061054A
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- mirror
- mems micro
- lens
- beam expanding
- scanning
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
The invention belongs to the technical field of scanning micro-mirrors, and particularly relates to a multi-MEMS micro-mirror chip optical path system, which comprises: four groups of imaging units and imaging screens; the imaging unit includes: the device comprises a laser, a compensation lens, a diaphragm aperture, an MEMS micro-mirror and a beam expanding lens; the light generated by the laser sequentially passes through the reflector, the compensation lens, the diaphragm aperture, the MEMS micro-mirror and the beam expanding lens; the beam expanding lens is eccentrically arranged; under the condition of ensuring that optical display is clear and free of stray light and the like, the scheme adopts the eccentric design scheme of the beam expanding lens, overcomes the characteristic that single-chip scanning content is less, enables the scanning centers of four chips to be the same, and jointly forms a maximum scanning picture, so that the scanned picture content is rich.
Description
Technical Field
The invention belongs to the technical field of scanning micromirrors, and particularly relates to a multi-MEMS micromirror chip optical path system.
Background
In the prior art, a design scheme of tilting a micromirror is used, so that a light path is tilted by a certain angle, and the maximum intersection of scanning areas of four chips is ensured. However, in this scheme, the chip mounting and positioning are complex, and a compound angle is required. Meanwhile, after the MEMS micro-mirror is reflected, light rays penetrate through the beam expanding lens, and the beam expanding lens is required to be installed at a compound angle. The positioning precision of elements in the mechanism is difficult to control, and the processing cost is high, thereby bringing certain trouble to product adjustment.
Disclosure of Invention
In order to solve the above problems in the prior art, the present invention provides a multi-MEMS micro-mirror chip optical path system. The technical problem to be solved by the invention is realized by the following technical scheme:
a multi-MEMS micro-mirror chip optical path system, comprising: four groups of imaging units and imaging screens; the imaging unit includes: the device comprises a laser, a compensation lens, a diaphragm aperture, an MEMS micro-mirror and a beam expanding lens; light rays generated by the laser sequentially pass through the compensation lens, the diaphragm small hole, the MEMS micro-mirror and the beam expanding lens, and the beam expanding lens is eccentrically arranged.
Furthermore, the laser and the compensation lens can be communicated with a light path through an entrance mirror.
Furthermore, the aperture of the aperture is matched with the size of the scanning mirror of the MEMS micro-mirror, so that the phenomenon that edge light irradiates the comb tooth microstructure on the edge of the MEMS micro-mirror to reflect diffraction stripes due to overlarge light spots is avoided.
The invention has the beneficial effects that:
utilize beam expanding lens eccentric settings in this scheme, optical system can be optimized to the principle of light refraction, and the picture that only one side was ascending can be guaranteed four chip scanning is the biggest, has avoided complicated problems such as processing, installation, debugging of the compound angle of mechanism spare, the cost is also reduced simultaneously.
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Drawings
Fig. 1 is a schematic diagram of the overall structure of the system.
Fig. 2 is a schematic structural diagram of the imaging unit of the system.
Fig. 3 is a schematic diagram of a beam expanding lens arrangement.
In the figure: 1. a laser; 2. a mirror; 3. a compensation lens; 4. a diaphragm aperture; 5. a MEMS micro-mirror; 6. a beam expanding lens; 7. an imaging screen.
Detailed Description
To further explain the technical means and effects of the present invention adopted to achieve the intended purpose, the following detailed description of the embodiments, structural features and effects of the present invention will be made with reference to the accompanying drawings and examples.
1-3, a multi-MEMS micro-mirror chip optical path system includes: four sets of imaging units and imaging screens 7; the imaging unit includes: the device comprises a laser 1, a compensation lens 3, a diaphragm aperture 4, an MEMS (micro-electromechanical system) micromirror 5 and a beam expanding lens 6; light generated by the laser 1 sequentially passes through the compensating lens 3, the diaphragm aperture 4, the MEMS micro-mirror 5 and the beam expanding lens 6, and the beam expanding lens 3 is eccentrically arranged.
In order to reduce the volume of the mechanism, the laser 1 and the compensation lens 3 can be communicated with the light path through the entrance mirror 2.
The aperture of the aperture 4 is matched with the size of the scanning lens of the MEMS micro-mirror 5, so that the phenomenon that edge light irradiates the comb tooth microstructure on the edge of the MEMS micro-mirror 5 to reflect diffraction stripes due to overlarge light spots is avoided.
Firstly, the laser 1 emits laser beam under low power consumption driving, and the laser beam passes through the reflecting mirror 2 or directly irradiates on the compensating lens 3, and the specific light path scheme is shown in the figure. The divergence angle of the laser light is controlled by the compensating lens 3 after the laser is reflected, redundant stray light is shielded through the diaphragm small hole 4, the size of the diaphragm aperture needs to be adapted to the size of the MEMS scanning lens, and the phenomenon that edge light irradiates the comb tooth microstructure on the MEMS micromirror 5 to reflect diffraction stripes because the light spot is too large is avoided.
Secondly, the shaped light beams irradiate the fast scanning MEMS micro-mirror 5 to form a pattern according to a certain scanning rule, the pattern track is repeatedly scanned according to the visual retention time difference of human eyes, after the light is amplified by the eccentrically-installed beam expanding lens 6, the propagation direction of the light is changed by refraction, and finally a scanning pattern is formed on the imaging screen 7. The imaging unit shares an imaging screen, and the four units are spliced into an imaging module, so that a large-picture and multi-content multi-chip scanning imaging system is realized, and the picture of a scanned picture is large and rich. The scheme utilizes the deflection characteristic of the lens, so that four independent scanning optical paths are superposed together, and the maximization and the complexity scanning of the image surface are realized. And the disadvantage of single chip scanning content is overcome by using multiple chips.
The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.
Claims (3)
1. A multi-MEMS micro-mirror chip optical path system is characterized in that: the method comprises the following steps: four groups of imaging units and imaging screens (7); the imaging unit includes: the device comprises a laser (1), a compensation lens (3), a diaphragm aperture (4), an MEMS (micro-electromechanical system) micromirror (5) and a beam expanding lens (6); light rays generated by the laser (1) sequentially pass through the compensation lens (3), the diaphragm aperture (4), the MEMS micro-mirror (5) and the beam expanding lens (6); the beam expanding lens (3) is eccentrically arranged.
2. The multi-MEMS micro-mirror chip optical path system of claim 1, wherein: the laser (1) and the compensation lens (3) can be communicated with a light path through the entrance reflector (2).
3. The multi-MEMS micro-mirror chip optical path system of claim 1, wherein: the aperture of the diaphragm aperture (4) is matched with the size of the scanning lens of the MEMS micro-mirror (5), so that the phenomenon that edge light irradiates the comb microstructure on the edge of the MEMS micro-mirror (5) to reflect diffraction stripes due to overlarge light spots is avoided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911411856.7A CN111061054A (en) | 2019-12-31 | 2019-12-31 | Multi-MEMS micro-mirror chip optical path system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911411856.7A CN111061054A (en) | 2019-12-31 | 2019-12-31 | Multi-MEMS micro-mirror chip optical path system |
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| Publication Number | Publication Date |
|---|---|
| CN111061054A true CN111061054A (en) | 2020-04-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201911411856.7A Pending CN111061054A (en) | 2019-12-31 | 2019-12-31 | Multi-MEMS micro-mirror chip optical path system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112945144A (en) * | 2021-02-08 | 2021-06-11 | 西安知象光电科技有限公司 | Multi-MEMS galvanometer structured light three-dimensional scanning system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080174844A1 (en) * | 2007-01-22 | 2008-07-24 | Brother Kogyo Kabushiki Kaisha | Light Scanning Device |
| CN105807421A (en) * | 2016-05-10 | 2016-07-27 | 天津大学 | Parallel-light-emerging angle magnification MEMS scanning method and optical system |
| US20190339622A1 (en) * | 2015-07-13 | 2019-11-07 | Applied Materials, Inc. | Quarter wave light splitting |
-
2019
- 2019-12-31 CN CN201911411856.7A patent/CN111061054A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080174844A1 (en) * | 2007-01-22 | 2008-07-24 | Brother Kogyo Kabushiki Kaisha | Light Scanning Device |
| US20190339622A1 (en) * | 2015-07-13 | 2019-11-07 | Applied Materials, Inc. | Quarter wave light splitting |
| CN105807421A (en) * | 2016-05-10 | 2016-07-27 | 天津大学 | Parallel-light-emerging angle magnification MEMS scanning method and optical system |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112945144A (en) * | 2021-02-08 | 2021-06-11 | 西安知象光电科技有限公司 | Multi-MEMS galvanometer structured light three-dimensional scanning system |
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Effective date of registration: 20210428 Address after: Room 206, building A1, phase II, software new town, tianguba Road, high tech Zone, Xi'an, Shaanxi 710000 Applicant after: Xi'an Huiju yunchuang Electronic Technology Co.,Ltd. Address before: 710003 room 206, block A1, phase II, software new town, Xi'an high tech Zone, Shaanxi Province Applicant before: Jiangsu Zhiju Automobile Electronics Co.,Ltd. Xi'an Branch |
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Application publication date: 20200424 |
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