CN111060725A - Semiconductor chip testing device - Google Patents
Semiconductor chip testing device Download PDFInfo
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- CN111060725A CN111060725A CN202010017448.XA CN202010017448A CN111060725A CN 111060725 A CN111060725 A CN 111060725A CN 202010017448 A CN202010017448 A CN 202010017448A CN 111060725 A CN111060725 A CN 111060725A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
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- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The invention belongs to the technical field of chip testing, in particular to a semiconductor chip testing device; the hydraulic press comprises a base, wherein a vertical slide rail is fixedly connected to the rear side surface of the base, a horizontal slide rail is arranged on the front side of the vertical slide rail, and a hydraulic rod is arranged on the front side of the horizontal slide rail; according to the invention, the protection plate is arranged at the top of the base, after the current test point is tested, the hydraulic rod and the conical probe at the bottom are driven to move directly through the work of the horizontal sliding rail, the conical probe can move upwards due to the blocking effect of the protection plate at the position of the small round platform hole when moving horizontally, the conical probe moves to the top of the protection plate and moves horizontally along the upper surface of the protection plate, the conical probe is pushed into the small round platform hole by the return spring after moving to the next small round platform hole, the conical probe cannot scratch components on a chip in the moving process, the damage of the components on the chip is avoided, and the test efficiency is ensured.
Description
Technical Field
The invention belongs to the technical field of chip testing, and particularly relates to a semiconductor chip testing device.
Background
With the rapid development of the optical communication industry, the semiconductor chip plays an extremely important role as a core component, and from data centers, mobile broadband, internet, national defense and military industry and the like, the application of optical devices is ubiquitous, and in order to meet different application requirements of people and adapt to different working environments, the performance reliability of the semiconductor chip directly influences the quality of signal transmission, the stability and the timeliness, and how to more effectively screen and test the semiconductor chip with high performance and higher reliability becomes an indispensable work.
Because the POGO-PIN probe is mainly used for testing the performance of the chip at present, namely a spring device is arranged in the probe and can freely stretch out and draw back, the head of the probe is generally in a semi-circular arc shape and directly contacts with a PAD (PAD application programmable logic), after the power-on test is carried out in the mode, in order to prevent the POGO-PIN probe from damaging components on the chip when the POGO-PIN probe horizontally moves on the chip, the POGO-PIN probe is required to be lifted by a hydraulic device and then horizontally moves to the next point to be tested, and then the probe moves downwards, and because the number of detection points of each chip is large, the POGO-PIN probe is lifted and put down for many times, the;
when the conical probe normally works, the conical probe can be forced to move upwards only by the blocking of the small circular table hole and the protective plate, and the conical probe can be bent under the action of stress concentration under the condition, so that the service life of the conical probe cannot be ensured, and the moving path of the conical probe cannot be controlled; accordingly, the present invention provides a semiconductor chip testing apparatus.
Disclosure of Invention
In view of the deficiencies of the prior art, the present invention provides a semiconductor chip testing apparatus to solve the problems set forth in the background art.
In order to achieve the purpose, the invention provides the following technical scheme: a semiconductor chip testing device comprises a base, wherein a vertical slide rail is fixedly connected to the rear side face of the base, a horizontal slide rail is installed on the front side of the vertical slide rail, a hydraulic rod is installed on the front side of the horizontal slide rail, and the output end of the hydraulic rod is fixedly connected with a mounting seat; the bottom of the mounting seat is fixedly connected with two detection assemblies, each detection assembly comprises an outer barrel, the top of the inner side of each outer barrel is fixedly connected with a return spring, the bottom end of each return spring is fixedly connected with an inner barrel, the bottom end of each inner barrel is provided with a conical probe, and each conical probe is positioned at the bottom of each outer barrel; the top of the base is provided with a protection plate, a plurality of support columns penetrate through the protection plate, the bottom ends of the support columns are fixedly connected with the base, a plurality of small circular table holes are formed in the protection plate, and the small circular table holes are matched with the conical probes;
communicated guide grooves are formed between the adjacent small circular platform holes; the guide groove is used for guiding the moving conical probe; the guide grooves form a grid shape.
When the POGO-PIN testing device works, because the POGO-PIN probe is mainly used for testing the performance of a chip at present, namely a spring device is arranged in the probe and can freely stretch out and draw back, the head of the probe is generally in a semi-circular arc shape and directly contacts with a PAD (PAD application programmable logic), after the power-on test is carried out by adopting the mode, in order to prevent the POGO-PIN probe from damaging components on the chip when the POGO-PIN probe horizontally moves on the chip, the POGO-PIN probe is required to be lifted by a hydraulic device and then horizontally moves to the next point to be tested, and then the probe moves downwards; the specifically adopted measures and the using process are as follows: the protection plate is arranged at the top of the base, after a chip is placed on the base at the bottom of the protection plate, two conical probes are connected with an upper current voltage source meter, then the vertical slide rail is started, the conical probes are aligned to one of the small circular truncated cone holes and move down to the surface of the chip to be contacted with the chip, after the current test point is tested, the work of the horizontal slide rail is directly carried out to drive the hydraulic rod and the conical probes at the bottom to move, due to the guiding effect of the small circular truncated cone holes, the conical probes can move upwards due to the blocking effect of the protection plate at the small circular truncated cone holes when moving horizontally, so that the conical probes move to the top of the protection plate and move horizontally along the upper surface of the protection plate, the conical probes are pushed into the small circular truncated cone holes by the return springs after moving to the next small circular truncated cone holes, the conical probes cannot cut components on the chip during the moving process, and the damage, meanwhile, the testing efficiency is ensured;
when the conical probe normally works, the conical probe can be forced to move upwards only by the blocking of the small circular table hole and the protective plate, and the conical probe can be bent under the action of stress concentration under the condition, so that the service life of the conical probe cannot be ensured, and the moving path of the conical probe cannot be controlled; therefore, the guide grooves are arranged among the small circular table holes, so that the conical probe can quickly fall into the guide grooves when moving upwards to the small circular table holes, if the guide grooves are not arranged, the upwards moving distance of the conical probe can be greatly increased, the risk of bending deformation is increased, the conical probe can be easily moved into the next small circular table hole, and the moving accuracy of the conical probe is greatly improved along the fixed guide grooves.
Preferably, the protection plate is provided with an auxiliary device in a penetrating mode, the auxiliary device comprises a top plate, the top plate is arranged at the top of the protection plate and can move up and down along the supporting column, and a large circular table hole matched with the conical probe is formed in the position, corresponding to the small circular table hole, of the top plate; the bottom of the top plate is hinged with two driving plates, the two driving plates are respectively positioned at the positions of two sides of an area defined by the small circular table holes, and extension lines of the bottom ends of the two driving plates are intersected at the bottom of the protection plate; the bottoms of the two driving plates are hinged with horizontal rods, the hinged joint of the driving plates and the horizontal rods is located at the top of one end, close to the small circular table hole, of the horizontal rod, the outer side of one end, far away from the small circular table hole, of the horizontal rod is sleeved with a gas collecting cylinder, an extrusion spring is fixedly connected to one end, located inside the gas collecting cylinder, of the horizontal rod, the extrusion spring is fixedly connected with the gas collecting cylinder, the bottom of one end, far away from the small circular table hole, of the gas collecting cylinder is communicated with a conducting pipe, the conducting pipes on the two gas collecting cylinders are communicated with the same air bag, the air; the air bag at the bottom of the chip supports the chip, so that the chip is tightly attached to the lower surface of the protection plate, and the air bag can be compressed after the conical probe enters the small circular table hole and is tightly attached to the chip, so that the bottom end of the conical probe is prevented from impacting the chip under the action of inertia force when the conical probe is pushed by the return spring, and the chip is prevented from being damaged by hard force; meanwhile, in order to prevent the cone-shaped probe from being deformed downwards to extrude the chip when the cone-shaped probe downwards extrudes the protection plate under the restoring force of the return spring in the horizontal moving process, the middle part of the protection plate is deformed downwards, so that the chip can move downwards when the cone-shaped probe moves out of the small circular truncated cone hole and moves horizontally in order to protect the chip; the measures are specifically taken as follows: the roof of toper probe extrusion bottom at the in-process that removes, the roof can extrude its bottom articulated drive plate, and the drive plate can drive the horizon bar and remove, can make the space increase in the gas cylinder after the horizon bar removes, and the gas cylinder extracts gas from the gasbag, and therefore the height of gasbag reduces, and then the chip can break away from the protection shield, prevents that the deformation of protection shield from arousing the damage of chip, has improved the integrality of chip.
Preferably, two hinged plates arranged along the vertical direction are arranged in one end, close to the air bag, of the conduction pipe, the two hinged plates are hinged with the top inner wall and the bottom inner wall of the conduction pipe respectively, torsion springs are arranged at the hinged positions of the hinged plates, the free ends of the two hinged plates are connected with rubber plates, and the end parts of the two rubber plates are in contact together after inclining towards the direction far away from the air bag; after the gas in the air bag is pumped into the air collecting cylinder through the conduction pipe to enable the chip to be lowered to prevent the chip from being damaged due to deformation of the protection plate, when the conical probe horizontally moves and enters the next small round hole, the top plate is not extruded by the conical probe any more, at the moment, the extrusion spring can pull the horizontal rod to return to the original position, the horizontal rod presses the gas in the air collecting cylinder into the air bag through the conduction pipe again, at the moment, the air bag expands to push the chip to rise, and in order to prevent the chip from rising too fast and colliding with the protection plate, therefore, two hinged plates are arranged in one end of the conduction pipe close to the air bag, rubber plates are connected to free ends of the two hinged plates, the end parts of the two rubber plates are inclined in the direction far away from the air bag and then contact with each other, when the air collecting cylinder sucks air, the two hinged plates swing to expand and separate from each other, because the torsional spring restores just before and has driven articulated slab and rubber slab to get back to the normal position, the tip of two rubber slabs contacts together after to the direction slope of keeping away from the gasbag, gaseous difficult promotion articulated slab deflects to gasbag department, consequently rubber slab and articulated slab stop the gaseous gas that gets into in the gasbag, the speed in gaseous entering gasbag has been reduced, and then the speed when having reduced the gasbag and having restored, guarantee that the chip can not strike the protection shield with very fast speed, and then guaranteed the integrality of chip.
Preferably, one surface of the rubber plate, which is far away from the air bag, is provided with a plurality of magnetic blocks, and the magnetism of the magnetic blocks in the rubber plate is increased along the direction far away from the hinged plate; after the plurality of magnetic blocks are arranged on the surface, away from the air bag, of the rubber plate, the magnetic blocks on the two rubber plates can attract each other, and further the magnetic blocks on the two rubber plates can be separated from each other when the air collecting cylinder sucks air; after the gas cylinder no longer extracts gas from the air bag, the hinged plate can be quickly restored under the magnetic action of the torsion spring and the magnetic block, and is tightly sucked, on one hand, the end parts of the two rubber plates are in contact with each other after inclining towards the direction far away from the air bag, the gas entering the air bag from the conduction pipe is not easy to push the two rubber plates to deform towards the position close to the air bag, and after the attraction of the magnetic block, the separation difficulty of the two rubber plates is larger, and the blocking effect on the gas is ensured.
Preferably, the conduit away from the bladder and adjacent the hinge plate is made of a silicone material for inflating the conduit therein; when the toper probe in return spring promotion bottom extrudeed the chip, can make during the gas in the gasbag enters into the conduction pipe, because keep away from the gasbag and be close to the conduction pipe of articulated slab department and make by the silica gel material, consequently just get into the conduction pipe gas can make the conduction pipe of here rise fast, can make things convenient for the gasbag to compress fast, make the chip move down, reduce the striking of chip and toper probe, the chip no longer receives the extrusion back of toper probe simultaneously, the gas in the big conduction pipe that rises is owing to nearer with the gasbag, can be impressed in the gasbag fast, make the gasbag inflation, and then make the chip contact with the toper probe fast, guarantee the efficiency of test.
Preferably, the groove depth of the guide groove is one third of the hole depth of the small circular truncated cone hole. The depth of the groove of the guide groove is set to be one third of the depth of the hole of the small circular table hole, so that the guide groove is not influenced in normal use of the small circular table hole, the conical probe can be guaranteed to be rapidly moved out, and the possibility of bending of the conical probe is reduced.
The invention has the technical effects and advantages that:
1. according to the semiconductor chip testing device provided by the invention, the protection plate is arranged at the top of the base, after the current test point is tested, the hydraulic rod and the conical probe at the bottom are directly driven to move through the work of the horizontal sliding rail, due to the guiding effect of the small round platform hole, the conical probe can move upwards under the blocking effect of the protection plate at the small round platform hole when moving horizontally, so that the conical probe moves to the top of the protection plate and moves horizontally along the upper surface of the protection plate, the conical probe is pushed into the small round platform hole by the return spring after moving to the next small round platform hole, and the conical probe cannot scratch components on a chip in the moving process, so that the components on the chip are prevented from being damaged, and the testing efficiency is ensured.
2. According to the semiconductor chip testing device provided by the invention, the air bag supports the chip, so that the chip is tightly attached to the lower surface of the protection plate, and meanwhile, after the conical probe enters the small circular platform hole and is tightly attached to the chip, the air bag can be compressed to play a buffering role; simultaneously the roof of toper probe extrusion bottom at the in-process that removes, the roof can extrude its bottom articulated drive plate, and the drive plate can drive the horizon bar and remove, can make the space increase in the gas cylinder after the horizon bar removes, and the gas cylinder extracts gas from the gasbag, and therefore the height of gasbag reduces, and then the chip can break away from the protection shield, prevents that the deformation of protection shield from arousing the damage of chip, has improved the integrality of chip.
3. According to the semiconductor chip testing device provided by the invention, the guide grooves are arranged among the small circular table holes, so that the conical probe can quickly fall into the guide grooves when moving upwards to the small circular table holes, if the guide grooves are not arranged, the upwards moving distance of the conical probe can be greatly increased, the risk of bending deformation is increased, the conical probe can be more easily moved into the next small circular table hole, and the accuracy of the movement of the conical probe is greatly improved along the fixed guide grooves.
Drawings
The invention will be further explained with reference to the drawings.
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a principal cross-sectional view of the present invention;
FIG. 3 is an enlarged view of portion A of FIG. 2;
FIG. 4 is an enlarged view of portion B of FIG. 2;
in the figure: the device comprises a base 1, a vertical sliding rail 2, a horizontal sliding rail 3, a hydraulic rod 4, a mounting seat 5, a detection assembly 6, an outer cylinder 61, a return spring 62, an inner cylinder 63, a conical probe 64, a protection plate 7, a support column 8, an auxiliary device 9, a top plate 91, a large circular table hole 92, a drive plate 93, a horizontal rod 94, a gas collecting cylinder 95, an extrusion spring 96, a conduction pipe 97, an air bag 98, a support plate 99, a small circular table hole 10, a hinged plate 11, a rubber plate 12, a magnetic block 13 and a guide groove 14.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described below with reference to the specific embodiments, and the front, the back, the left, the right, the upper and the lower of the invention are all based on the view direction of fig. 3.
As shown in fig. 1-4, the semiconductor chip testing device of the present invention comprises a base 1, wherein a vertical slide rail 2 is fixedly connected to a rear side surface of the base 1, a horizontal slide rail 3 is installed on a front side of the vertical slide rail 2, a hydraulic rod 4 is installed on a front side of the horizontal slide rail 3, and an installation base 5 is fixedly connected to an output end of the hydraulic rod 4; the bottom of the mounting seat 5 is fixedly connected with two detection components 6, each detection component 6 comprises an outer cylinder 61, the top of the inner side of each outer cylinder 61 is fixedly connected with a return spring 62, the bottom end of each return spring 62 is fixedly connected with an inner cylinder 63, the bottom end of each inner cylinder 63 is provided with a conical probe 64, and each conical probe 64 is positioned at the bottom of each outer cylinder 61; the top of the base 1 is provided with a protection plate 7, a plurality of support columns 8 penetrate through the protection plate 7, the bottom ends of the support columns 8 are fixedly connected with the base 1, a plurality of small circular table holes 10 are formed in the protection plate 7, and the small circular table holes 10 are matched with the conical probes 64;
a communicated guide groove 14 is arranged between the adjacent small circular platform holes 10; the guide groove 14 is used for guiding the moving conical probe 64; the guide grooves 14 are formed in a grid pattern.
When the POGO-PIN testing device works, because the POGO-PIN probe is mainly used for testing the performance of a chip at present, namely a spring device is arranged in the probe and can freely stretch out and draw back, the head of the probe is generally in a semi-circular arc shape and directly contacts with a PAD (PAD application programmable logic), after the power-on test is carried out by adopting the mode, in order to prevent the POGO-PIN probe from damaging components on the chip when the POGO-PIN probe horizontally moves on the chip, the POGO-PIN probe is required to be lifted by a hydraulic device and then horizontally moves to the next point to be tested, and then the probe moves downwards; the specifically adopted measures and the using process are as follows: by arranging the protection plate 7 on the top of the base 1, after a chip is placed on the base 1 at the bottom of the protection plate 7, two conical probes 64 are connected with an upper current voltage source meter, then the vertical slide rail 2 is started, the conical probes 64 are aligned to one of the small circular table holes 10 and then move down to the surface of the chip to be contacted with the chip, after the current test point is tested, the hydraulic rod 4 and the conical probes 64 at the bottom are directly driven to move through the work of the horizontal slide rail 3, due to the guiding effect of the small circular table holes 10, the conical probes 64 can move upwards due to the blocking effect of the protection plate 7 at the small circular table holes 10 when moving horizontally, so that the conical probes 64 move to the top of the protection plate 7 and move horizontally along the upper surface of the protection plate 7, the conical probes 64 are pushed into the small circular table holes 10 by the return springs 62 after moving to the next small circular table holes 10, and the conical probes 64 cannot rub against components on the chip in the moving process, the damage of components on the chip is avoided, and the testing efficiency is ensured;
when the conical probe 64 normally works, the conical probe 64 may be bent under the action of stress concentration because the blocking of the small circular table hole 10 and the protective plate 7 is required to forcibly move upwards, so that the service life of the conical probe 64 cannot be ensured, and the moving path of the conical probe 64 cannot be controlled; accordingly, the guide grooves 14 are arranged between the small circular table holes 10, so that the conical probe 64 can quickly fall into the guide grooves 14 when moving to the small circular table holes 10, if the guide grooves 14 are not arranged, the moving distance of the conical probe 64 is greatly increased, the risk of bending deformation is increased, the conical probe 64 can be moved into the next small circular table hole 10 more easily, and the moving accuracy of the conical probe 64 is greatly improved along the fixed guide grooves 14.
An auxiliary device 9 penetrates through the protection plate 7, the auxiliary device 9 comprises a top plate 91, the top plate 91 is arranged at the top of the protection plate 7, the top plate 91 can move up and down along the support column 8, and a large circular table hole 92 matched with the conical probe 64 is formed in the position, corresponding to the small circular table hole 10, at the top of the top plate 91; the bottom of the top plate 91 is hinged with two driving plates 93, the two driving plates 93 are respectively positioned at the positions of two sides of an area enclosed by the plurality of small circular table holes 10, and extension lines of the bottom ends of the two driving plates 93 are intersected at the bottom of the protection plate 7; the bottoms of the two driving plates 93 are hinged with a horizontal rod 94, the hinged point of the driving plates 93 and the horizontal rod 94 is located at the top of one end, close to the small circular table hole 10, of the horizontal rod 94, the outer side of one end, far away from the small circular table hole 10, of the horizontal rod 94 is sleeved with a gas collecting cylinder 95, one end, located inside the gas collecting cylinder 95, of the horizontal rod 94 is fixedly connected with an extrusion spring 96, the extrusion spring 96 is fixedly connected with the gas collecting cylinder 95, the bottom of one end, far away from the small circular table hole 10, of the gas collecting cylinder 95 is communicated with a conducting pipe 97, conducting pipes 97 on the two gas collecting cylinders 95 are communicated with the same gas bag 98, the gas bag 98 is located on; the air bag 98 at the bottom of the chip supports the chip, so that the chip is tightly attached to the lower surface of the protective plate 7, and meanwhile, after the conical probe 64 enters the small circular table hole 10 and is tightly attached to the chip, the air bag 98 can be compressed, so that the bottom end of the conical probe 64 is prevented from impacting the chip due to the action of inertia force when the conical probe 64 is pushed by the return spring 62, and the chip is prevented from being damaged by hard force; meanwhile, in order to prevent the cone-shaped probe 64 from being pressed downward against the protection plate 7 by the restoring force of the return spring 62 in the process of the horizontal movement of the cone-shaped probe 64, the middle part of the protection plate 7 is deformed downward and pressed against the chip, so that in order to protect the chip, the chip needs to be moved downward when the cone-shaped probe 64 is moved out of the small circular truncated cone hole 10 and moved horizontally; the measures are specifically taken as follows: toper probe 64 is at the roof 91 of the in-process extrusion bottom that removes, roof 91 can extrude its bottom articulated drive plate 93, drive plate 93 can drive horizontal rod 94 and remove, can make the space increase in the gas cylinder 95 after horizontal rod 94 removes, gas cylinder 95 extracts in from gasbag 98, consequently the height of gasbag 98 reduces, and then the chip can break away from protection shield 7, prevent the deformation of protection shield 7 and arouse the damage of chip, improved the integrality of chip.
Two hinged plates 11 arranged along the vertical direction are arranged in one end, close to the air bag 98, of the conduction pipe 97, the two hinged plates 11 are hinged with the top inner wall and the bottom inner wall of the conduction pipe 97 respectively, torsion springs are arranged at the hinged positions of the hinged plates 11, the free ends of the two hinged plates 11 are connected with rubber plates 12, and the end parts of the two rubber plates 12 are inclined in the direction away from the air bag 98 and then are contacted together; after the gas in the air bag 98 is pumped into the air collecting cylinder 95 through the conduction pipe 97 to lower the chip to prevent the damage of the chip caused by the deformation of the protection plate 7, when the conical probe 64 moves horizontally and enters the next small circular platform hole 10, the top plate 91 is not pressed by the conical probe 64 any more, at this time, the pressing spring 96 can pull the horizontal rod 94 to return to the original position, the horizontal rod 94 presses the gas in the air collecting cylinder 95 into the air bag 98 again through the conduction pipe 97, at this time, the air bag 98 expands to push the chip to rise, in order to prevent the chip from rising too fast and colliding with the protection plate 7, therefore, two hinged plates 11 are arranged inside one end of the conduction pipe 97 close to the air bag 98, and rubber plates 12 are connected to the free ends of the two hinged plates 11, the end parts of the two rubber plates 12 are inclined in the direction far away from the air bag 98 and then contacted together, when the air collecting cylinder 95 is opened, the, two rubber slabs 12 break away from, when gas in the gas cylinder 95 passes through the conduction pipe 97 again, because the torsional spring restores before and just drives articulated slab 11 and rubber slab 12 and gets back to the normal position, the tip of two rubber slabs 12 contacts together after the direction slope of keeping away from gasbag 98, gaseous difficult articulated slab 11 that promotes deflects to gasbag 98 department, consequently rubber slab 12 blocks the gaseous gas that gets into in gasbag 98 with articulated slab 11, the speed in gaseous entering gasbag 98 has been reduced, and then the speed when having reduced gasbag 98 and restoring, guarantee that the chip can not strike protection board 7 with very fast speed, and then guaranteed the integrality of chip.
A plurality of magnetic blocks 13 are arranged on one surface of the rubber plate 12 away from the air bag 98, and the magnetism of the magnetic blocks 13 in the rubber plate 12 is increased along the direction away from the hinged plate 11; after the plurality of magnetic blocks 13 are arranged on the surface, away from the air bag 98, of the rubber plate 12, the magnetic blocks 13 on the two rubber plates 12 can attract each other, and further, when the air collecting cylinder 95 sucks air, the magnetic blocks 13 on the two rubber plates 12 are separated from each other; after gas is no longer extracted from the air bag 98 by the gas collecting cylinder 95, the hinged plate 11 can be quickly restored and is tightly sucked with each other under the magnetic action of the torsion spring and the magnetic block 13, on one hand, the end parts of the two rubber plates 12 are inclined to the direction far away from the air bag 98 and then are contacted together, the gas entering the air bag 98 from the conduction pipe 97 is not easy to push the two rubber plates 12 to deform to the position close to the air bag 98, and after the gas is attracted by the magnetic block 13, the separation difficulty of the two rubber plates 12 is larger, and the blocking effect on the gas is ensured.
The conduit 97 away from the bladder 98 and adjacent the hinged plate 11 is made of silicone material for inflating the conduit 97 therein; when the return spring 62 pushes the conical probe 64 at the bottom to extrude the chip, the gas in the air bag 98 can enter the conduction pipe 97, and the conduction pipe 97 which is far away from the air bag 98 and close to the hinged plate 11 is made of a silica gel material, so that the gas which just enters the conduction pipe 97 can rapidly expand the conduction pipe 97 at the position, the air bag 98 can be conveniently and rapidly compressed, the chip can move downwards, the impact of the chip and the conical probe 64 is reduced, and meanwhile, after the chip is not extruded by the conical probe 64, the gas in the expanded conduction pipe 97 can be rapidly pressed into the air bag 98 due to being close to the air bag 98, so that the air bag 98 is expanded, the chip is rapidly contacted with the conical probe 64, and the testing efficiency is ensured.
The groove depth of the guide groove 14 is one third of the hole depth of the small circular truncated cone hole 10. The groove depth of the guide groove 14 is set to be one third of the hole depth of the small circular table hole 10, so that the arrangement of the guide groove 14 does not affect the normal use of the small circular table hole 10, the conical probe 64 can be ensured to be rapidly moved out, and the possibility of bending of the conical probe 64 is reduced.
When the POGO-PIN testing device works, because the POGO-PIN probe is mainly used for testing the performance of a chip at present, namely a spring device is arranged in the probe and can freely stretch out and draw back, the head of the probe is generally in a semi-circular arc shape and directly contacts with a PAD (PAD application programmable logic), after the power-on test is carried out by adopting the mode, in order to prevent the POGO-PIN probe from damaging components on the chip when the POGO-PIN probe horizontally moves on the chip, the POGO-PIN probe is required to be lifted by a hydraulic device and then horizontally moves to the next point to be tested, and then the probe moves downwards; the specifically adopted measures and the using process are as follows: by arranging the protection plate 7 on the top of the base 1, after a chip is placed on the base 1 at the bottom of the protection plate 7, two conical probes 64 are connected with an upper current voltage source meter, then the vertical slide rail 2 is started, the conical probes 64 are aligned to one of the small circular table holes 10 and then move down to the surface of the chip to be contacted with the chip, after the current test point is tested, the hydraulic rod 4 and the conical probes 64 at the bottom are directly driven to move through the work of the horizontal slide rail 3, due to the guiding effect of the small circular table holes 10, the conical probes 64 can move upwards due to the blocking effect of the protection plate 7 at the small circular table holes 10 when moving horizontally, so that the conical probes 64 move to the top of the protection plate 7 and move horizontally along the upper surface of the protection plate 7, the conical probes 64 are pushed into the small circular table holes 10 by the return springs 62 after moving to the next small circular table holes 10, and the conical probes 64 cannot rub against components on the chip in the moving process, the damage of components on the chip is avoided, and the testing efficiency is ensured.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (6)
1. A semiconductor chip testing device is characterized in that: the hydraulic press comprises a base (1), wherein a vertical sliding rail (2) is fixedly connected to the rear side surface of the base (1), a horizontal sliding rail (3) is installed on the front side of the vertical sliding rail (2), a hydraulic rod (4) is installed on the front side of the horizontal sliding rail (3), and an output end of the hydraulic rod (4) is fixedly connected with a mounting seat (5); the bottom of the mounting seat (5) is fixedly connected with two detection components (6), each detection component (6) comprises an outer barrel (61), the top of the inner side of each outer barrel (61) is fixedly connected with a return spring (62), the bottom end of each return spring (62) is fixedly connected with an inner barrel (63), the bottom end of each inner barrel (63) is provided with a conical probe (64), and each conical probe (64) is positioned at the bottom of each outer barrel (61); the top of the base (1) is provided with a protection plate (7), a plurality of support columns (8) penetrate through the protection plate (7), the bottom ends of the support columns (8) are fixedly connected with the base (1), a plurality of small circular table holes (10) are formed in the protection plate (7), and the small circular table holes (10) are matched with the conical probes (64);
guide grooves (14) which are communicated are arranged between the adjacent small circular platform holes (10); the guide groove (14) is used for guiding the moving conical probe (64); the guide grooves (14) form a grid shape.
2. The semiconductor chip testing apparatus according to claim 1, wherein: an auxiliary device (9) penetrates through the protective plate (7), the auxiliary device (9) comprises a top plate (91), the top plate (91) is arranged at the top of the protective plate (7), the top plate (91) can move up and down along the supporting column (8), and a large circular table hole (92) matched with the conical probe (64) is formed in the position, corresponding to the small circular table hole (10), at the top of the top plate (91); the bottom of the top plate (91) is hinged with two driving plates (93), the two driving plates (93) are respectively positioned at the positions of two sides of an area enclosed by the plurality of small circular table holes (10), and extension lines of the bottom ends of the two driving plates (93) are intersected at the bottom of the protection plate (7); two drive plate (93) bottom articulates there is horizontal rod (94), the pin joint of drive plate (93) and horizontal rod (94) is located horizontal rod (94) and is close to the one end top in small round platform hole (10), and gas cylinder (95) have been cup jointed in the one end outside that small round platform hole (10) was kept away from in horizontal rod (94), the one end that horizontal rod (94) are located gas cylinder (95) inside has linked firmly extrusion spring (96), extrusion spring (96) link firmly with gas cylinder (95), the one end bottom intercommunication that small round platform hole (10) were kept away from in gas cylinder (95) has conduction pipe (97), conduction pipe (97) on two gas cylinders (95) all communicate has same gasbag (98), gasbag (98) are located base (1) of protection shield (7) bottom, gasbag (98) top bonding has backup pad (99).
3. A semiconductor chip testing apparatus according to claim 2, wherein: conduction pipe (97) are close to inside being provided with two articulated slab (11) that set up along vertical direction of one end of gasbag (98), and two articulated slab (11) are articulated with conduction pipe (97) top inner wall and bottom inner wall respectively, and the articulated department of articulated slab (11) is provided with the torsional spring, and the free end of two articulated slab (11) all is connected with rubber slab (12), and the tip of two rubber slab (12) contacts together after the direction slope of keeping away from gasbag (98).
4. A semiconductor chip testing apparatus according to claim 3, wherein: a plurality of magnetic blocks (13) are arranged on one surface, away from the air bag (98), of the rubber plate (12), and the magnetism of the magnetic blocks (13) in the rubber plate (12) is increased along the direction away from the hinged plate (11).
5. A semiconductor chip testing apparatus according to claim 3, wherein: the conduction pipe (97) far away from the air bag (98) and close to the hinge plate (11) is made of a silicon gel material and is used for expanding the conduction pipe (97) at the position.
6. The semiconductor chip testing apparatus according to claim 1, wherein: the depth of the guide groove (14) is one third of the depth of the small circular truncated cone hole (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010017448.XA CN111060725A (en) | 2020-01-08 | 2020-01-08 | Semiconductor chip testing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010017448.XA CN111060725A (en) | 2020-01-08 | 2020-01-08 | Semiconductor chip testing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111060725A true CN111060725A (en) | 2020-04-24 |
Family
ID=70306694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010017448.XA Withdrawn CN111060725A (en) | 2020-01-08 | 2020-01-08 | Semiconductor chip testing device |
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| Country | Link |
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| CN (1) | CN111060725A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114089143A (en) * | 2022-01-21 | 2022-02-25 | 江苏吉泰科电气有限责任公司 | Motor controller insulation withstand voltage testing device and implementation method thereof |
| CN114486180A (en) * | 2020-10-27 | 2022-05-13 | 山东华光光电子股份有限公司 | COS wavelength testing device and testing method for semiconductor laser |
| CN117406081A (en) * | 2023-12-11 | 2024-01-16 | 武汉市富仁空调设备有限公司 | Conveying type detection device and detection method based on air conditioner panel processing |
-
2020
- 2020-01-08 CN CN202010017448.XA patent/CN111060725A/en not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114486180A (en) * | 2020-10-27 | 2022-05-13 | 山东华光光电子股份有限公司 | COS wavelength testing device and testing method for semiconductor laser |
| CN114089143A (en) * | 2022-01-21 | 2022-02-25 | 江苏吉泰科电气有限责任公司 | Motor controller insulation withstand voltage testing device and implementation method thereof |
| CN114089143B (en) * | 2022-01-21 | 2022-04-05 | 江苏吉泰科电气有限责任公司 | Motor controller insulation withstand voltage testing device and implementation method thereof |
| CN117406081A (en) * | 2023-12-11 | 2024-01-16 | 武汉市富仁空调设备有限公司 | Conveying type detection device and detection method based on air conditioner panel processing |
| CN117406081B (en) * | 2023-12-11 | 2024-03-08 | 武汉市富仁空调设备有限公司 | Conveying type detection device and detection method based on air conditioner panel processing |
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Application publication date: 20200424 |