CN111044205A - Sensitive component clamping type film pressure sensor and manufacturing method thereof - Google Patents
Sensitive component clamping type film pressure sensor and manufacturing method thereof Download PDFInfo
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- CN111044205A CN111044205A CN201811195209.2A CN201811195209A CN111044205A CN 111044205 A CN111044205 A CN 111044205A CN 201811195209 A CN201811195209 A CN 201811195209A CN 111044205 A CN111044205 A CN 111044205A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
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Abstract
The invention discloses a sensitive component clamped film pressure sensor and a manufacturing method thereof. Due to the adoption of the split design of the elastomer and the pressure receiving piece structure, the elastomer component is sealed with the pressure receiving piece in a manner of extruding close contact. The elastomer assembly is easy to replace once having problems in the technological processes of fatigue, high and low temperature aging, lead wire, welding and the like, so that the whole product is not scrapped. Therefore, the sensitive component clamping type film pressure sensor has the advantages of high precision, good stability, high reliability, long service life, low cost and the like. The product can be applied to the fields of aerospace, weaponry, petrochemical industry, metallurgy, energy, traffic, industrial process control, Internet of things and the like.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a sensitive component clamping type film pressure sensor and a manufacturing method thereof.
Background
The sputtering film pressure sensor is a pressure sensor with excellent performance, has the advantages of high measurement precision, wide range, wide working temperature range, high reliability, good stability and the like, and is widely applied to many fields of aerospace, weaponry, petrochemical industry, metallurgy, energy, traffic, industrial process control, internet of things and the like.
The conventional method of the existing film pressure sensor product processing process is to weld the elastomer on the pressure guide nozzle, once the product has problems in the technological processes of fatigue, high and low temperature aging, lead wire, welding and the like, the whole product is scrapped, the production cost is increased in multiples, the production benefit of enterprises is influenced, and the comprehensive popularization and application of the film pressure sensor are also limited.
Therefore, it is very important to develop a snap-on film pressure sensor with a sensitive component that retains the excellent performance of the film pressure sensor and is relatively inexpensive to produce.
The sputtering film pressure sensor is a pressure sensor with excellent performance formed by adopting a vacuum atomic film deposition technology and depositing an insulating material, a strain sensitive material, a protective material and the like on the surface of an elastic body, and has the advantages of high precision, good stability, wide working temperature range, high reliability, long service life and the like. The reasonable split structure design of the sputtering film pressure sensor elastomer and the pressing piece is utilized to manufacture the sensitive component clamping type film pressure sensor, so that the problems can be well solved.
Disclosure of Invention
The invention aims to solve the problems and provides a sensitive component clamping type film pressure sensor and a manufacturing method thereof so as to realize the advantages of high measurement precision, good stability, wide working temperature range, high reliability, long service life, low product cost and the like.
In order to solve the technical problems, the technical scheme of the invention is as follows: a manufacturing method of a clamped thin film pressure sensor of a sensitive component comprises the following steps:
s1, manufacturing an inverted U-shaped cup-shaped elastic body by adopting a machining method, grinding and polishing the upper surface of the elastic body, manufacturing a strain resistor with a sensitive effect on pressure on the upper surface of the elastic body by utilizing a thin film deposition technology and a pattern transfer technology, forming a measuring circuit, and then performing high-temperature annealing treatment on the elastic body;
s2, manufacturing a compression piece with a pressure guide hole in the center, a concave cavity in the center of the upper part and communicated with the pressure guide hole, and compression threads on the periphery of the lower part by adopting a machining method;
s3, manufacturing an assembly support with an assembly through hole in the center, a key groove in the top end of the upper portion, a pressing table on the periphery of the key groove and a sealing concave portion in the middle lower portion by adopting a machining method;
s4, manufacturing a cylindrical key with a through hole in the center by adopting a machining method;
s5, extruding the processed key into a key groove of the component support;
s6, extruding the other end of the key into an inner cavity of the elastic body, enabling the lower end face of the elastic body to be matched with the upper end face of the assembly support, and realizing circumferential sealing welding at a connecting part to form a sensitive assembly;
s7, a sealing ring is arranged in a sealing concave part of the sensitive assembly;
s8, a sensitive assembly is installed from a pressure guide hole of the pressure receiving and pressing piece, a pressing table of the sensitive assembly is in close contact with a protruding surface of the pressure receiving and pressing piece, and due to the existence of a sealing ring, complete sealing is achieved between the pressure receiving and pressing piece and the sensitive assembly;
s9, leading out a lead from the lead bonding pad of the elastic body by using welding equipment, and welding the lead on a contact pin of the shell;
s10, sleeving the lower part of the shell on an upper hexagonal upper table top of the pressure receiving piece, and realizing circumferential sealing welding at a joint to manufacture the sensitive component clamping type film pressure sensor;
s11, carrying out high-low temperature and fatigue tests on the sensitive assembly clamped thin film pressure sensor product;
and S12, marking and calibrating the sensitive component clamped thin film pressure sensor product, and packaging and warehousing.
Preferably, the sensitive component clamped film pressure sensor is manufactured by the method.
Compared with the prior art, the invention has the beneficial effects that: due to the adoption of the split design of the elastomer and the pressure receiving piece structure, the elastomer component is sealed with the pressure receiving piece in a manner of extruding close contact. The elastomer assembly is easy to replace once having problems in the technological processes of fatigue, high and low temperature aging, lead wire, welding and the like, so that the whole product is not scrapped. Therefore, the sensitive component clamping type film pressure sensor has the advantages of high precision, good stability, high reliability, long service life, low cost and the like.
The main performance indexes of the sensitive component clamping type film pressure sensor are as follows:
measurement range: and (3) comprehensive precision of 0-1-250 MPa: 0.1% FS to 0.5% FS
Working temperature range: -196 ℃ to 350 ℃ consumption current: less than or equal to 3 mA;
zero point temperature drift: long-term stability ≦ 0.003% FS/° C: less than or equal to +/-0.1 percent of FS per year
Drawings
Fig. 1 is a schematic cross-sectional view of a sensor assembly of the present invention in a snap-on type thin film pressure sensor.
Fig. 2 is a cross-sectional view of a pressure receiving member of the pressure sensor of the present invention.
Fig. 3 is a cross-sectional view of the sensing element card-mounted thin-film pressure sensor of the present invention.
Fig. 4 is a sectional view of a component holder of the sensor component card-mounted thin-film pressure sensor of the present invention.
Fig. 5 is a schematic sectional view of an elastomer of the sensor assembly of the present invention in a snap-fit type thin film pressure sensor.
In the figure: 1. a pressing piece is connected; 2. a sensitive component; 3. a housing;
11. a pressure guide hole; 12. connecting and pressing threads; 13. hexagonal upper table-board; 14. a protruding surface; 15. a recessed cavity; 16. a joint;
21. a component holder; 22. an elastomer; 23. a key; 24. a lead wire; 25. a seal ring;
211. a component through hole; 212. a compacting table; 213. a sealing recess; 214. a keyway; 215 upper end surface;
221. a stress surface; 222. an inner cavity; 223. an upper surface; 224. a lead pad; 225. a lower end face;
31. and (6) inserting pins.
Detailed Description
The preferred embodiments of the present invention will be described below with reference to the accompanying drawings, and it should be understood that the preferred embodiments described herein are merely for purposes of illustrating and explaining the present invention and are not intended to limit the present invention.
As shown in fig. 1, 2, 3, 4, and 5, a sensitive component card-mounted thin film pressure sensor is manufactured by manufacturing an inverted U-shaped cup-shaped elastic body 22 by a machining method, grinding and polishing an upper surface 223 of the elastic body 22, manufacturing a strain resistor sensitive to pressure on the upper surface 223 of the elastic body 22 by using a thin film deposition technique and a pattern transfer technique and forming a measurement circuit, and then performing high temperature annealing treatment on the elastic body 22;
the press-connecting piece 1 is manufactured by adopting a machining method, and is provided with a pressure guide hole 11 positioned at the central position, a concave cavity 15 positioned at the upper central position and communicated with the pressure guide hole 11, and a press-connecting thread 12 positioned at the periphery of the lower part. A protruding surface 14 is reserved at the connection position of the pressure guide hole 11 and the concave position cavity 15 and plays a role in blocking when the sensitive component 2 is installed.
The assembly holder 21 having the assembly through-hole 211 at the center, the key groove 214 at the upper tip, the pressing step 212 at the periphery of the key groove 214, and the sealing recess 213 at the middle lower portion is manufactured by machining. Wherein the assembly through-hole 211 is smaller in diameter than the key slot 214.
The cylindrical key 23 having a through hole in the center is manufactured by a machining method.
The machined key 23 is pressed into the key groove 214 of the module holder 21.
The other end of the key 23 is pressed into the inner cavity 222 of the elastic body 22, the lower end surface 225 of the elastic body 22 is matched with the upper end surface 215 of the component support 21, and circumferential sealing welding is realized at the joint, so that the sensitive component 2 is formed.
A sealing ring 25 is inserted into the sealing recess 213 of the sensor assembly 2. The sensitive assembly 2 is loaded from the pressure guide hole 11 of the pressure receiving piece 1, the pressing table 212 of the sensitive assembly 2 is tightly contacted with the protruding surface 14 of the pressure receiving piece 1, and the complete sealing between the pressure receiving piece 1 and the sensitive assembly 2 is realized due to the existence of the sealing ring 25. The lead is easy to replace when problems occur in the technological processes of fatigue, high and low temperature aging, lead wire, welding and the like.
The lead 24 is led out from the lead pad 224 of the elastic body 22 and is welded on the pin 31 of the shell 3 by using welding equipment.
The lower part of the shell 3 is sleeved on the upper hexagonal upper table surface 13 of the pressure receiving piece 1, and circumferential sealing welding is realized at a joint 16, so that the sensitive component clamping type film pressure sensor is manufactured.
Carrying out high-low temperature and fatigue tests on the sensitive component clamped thin film pressure sensor product; and marking and calibrating, packaging and warehousing.
The corresponding manufacturing method of the clamped thin film pressure sensor of the sensitive component comprises the following steps:
s1, manufacturing an inverted U-shaped cup-shaped elastic body 22 by adopting a machining method, grinding and polishing the upper surface 223 of the elastic body 22, manufacturing a strain resistor with a sensitive effect on pressure on the upper surface 223 of the elastic body 22 by utilizing a thin film deposition technology and a pattern transfer technology, forming a measuring circuit, and then performing high-temperature annealing treatment on the elastic body 22;
s2, manufacturing a pressure receiving piece 1 with a pressure guide hole 11 positioned in the center, a concave cavity 15 positioned in the center of the upper part and communicated with the pressure guide hole 11, and pressure receiving threads 12 positioned on the periphery of the lower part by adopting a machining method;
s3, manufacturing the component support 21 with a component through hole 211 positioned in the center, a key groove 214 positioned at the top end of the upper portion, a pressing table 212 positioned on the periphery of the key groove 214 and a sealing concave portion 213 positioned at the middle lower portion by adopting a machining method;
s4, manufacturing a cylindrical key 23 with a through hole in the center by adopting a machining method;
s5, extruding the processed key 23 into the key groove 214 of the component support 21;
s6, extruding the other end of the key 23 into an inner cavity 222 of the elastic body 22, enabling a lower end face 225 of the elastic body 22 to be matched with an upper end face 215 of the assembly support 21, and realizing circumferential sealing welding at a joint to form the sensitive assembly 2;
s7, a sealing ring 25 is arranged in a sealing concave part 213 of the sensitive component 2;
s8, a sensitive assembly 2 is installed from a pressure guide hole 11 of the pressure receiving piece 1, so that a pressing table 212 of the sensitive assembly 2 is in close contact with a protruding surface 14 of the pressure receiving piece 1, and due to the existence of a sealing ring 25, complete sealing is realized between the pressure receiving piece 1 and the sensitive assembly 2;
s9, leading out a lead 24 from the lead pad 224 of the elastic body 22 by using welding equipment, and welding the lead on the pin 31 of the shell 3;
s10, sleeving the lower part of the shell 3 on an upper hexagonal upper table top 13 of the pressure receiving piece 1, and realizing circumferential sealing welding at a joint 16 to manufacture a sensitive assembly clamping type film pressure sensor;
s11, carrying out high-low temperature and fatigue tests on the sensitive assembly clamped thin film pressure sensor product;
and S12, marking and calibrating the sensitive component clamped thin film pressure sensor product, and packaging and warehousing.
The specific working principle of the product is as follows: the sensitive component clamping type film pressure sensor is connected to a pressure pipeline or a container to be measured through a pressure connecting thread 12, when fluid pressure passes through a pressure leading hole 11, flows through a component through hole 211, passes through a central through hole of a key 23, reaches an inner cavity 222 of an elastic body 22, acts on a stress surface 221 of the elastic body 22, and a measuring circuit on the stress surface 221 outputs an electric signal proportional to the pressure. The magnitude of the pressure value can be obtained by detecting the output signal.
The above description is only for the preferred embodiment of the present invention and should not be construed as limiting the scope of the present invention, and the scope of the claims to be claimed should not be limited thereto, and those skilled in the art can easily conceive equivalent variations based on the disclosure of the present invention.
Claims (2)
1. A manufacturing method of a sensitive component clamped film pressure sensor is characterized by comprising the following steps:
s1, manufacturing an inverted U-shaped cup-shaped elastic body (22) by adopting a machining method, grinding and polishing the upper surface (223) of the elastic body (22), manufacturing a strain resistor with a sensitive effect on pressure on the upper surface (223) of the elastic body (22) by utilizing a thin film deposition technology and a pattern transfer technology, forming a measuring circuit, and then performing high-temperature annealing treatment on the elastic body (22);
s2, manufacturing a pressure receiving piece (1) with a pressure guiding hole (11) located in the center, a concave cavity (15) located in the center of the upper portion and communicated with the pressure guiding hole (11), and pressure receiving threads (12) located on the periphery of the lower portion by adopting a machining method;
s3, manufacturing an assembly support (21) with an assembly through hole (211) located in the center, a key groove (214) located at the top end of the upper portion, a pressing table (212) located on the periphery of the key groove (214), and a sealing concave portion (213) located at the middle lower portion by adopting a machining method;
s4, manufacturing a cylindrical key (23) with a through hole in the center by adopting a machining method;
s5, extruding the processed key (23) into a key groove (214) of the component support (21);
s6, extruding the other end of the key (23) into an inner cavity (222) of the elastic body (22), enabling a lower end face (225) of the elastic body (22) to be matched with an upper end face (215) of the assembly support (21), and realizing circumferential sealing welding at a connecting part to form a sensitive assembly (2);
s7, a sealing ring (25) is arranged in a sealing concave part (213) of the sensitive component (2);
s8, a sensitive component (2) is installed from a pressure guide hole (11) of the pressure receiving piece (1), a pressing table (212) of the sensitive component (2) is in close contact with a protruding surface (14) of the pressure receiving piece (1), and due to the existence of a sealing ring (25), complete sealing is realized between the pressure receiving piece (1) and the sensitive component (2);
s9, leading out a lead (24) from a lead pad (224) of the elastic body (22) by using welding equipment, and welding the lead on a contact pin (31) of the shell (3);
s10, sleeving the lower part of the shell (3) on an upper hexagonal upper table top (13) of the pressure receiving piece (1), and realizing circumferential sealing welding at a joint (16) to manufacture a sensitive assembly clamping type film pressure sensor;
s11, carrying out high-low temperature and fatigue tests on the sensitive assembly clamped thin film pressure sensor product;
and S12, marking and calibrating the sensitive component clamped thin film pressure sensor product, and packaging and warehousing.
2. The sensor component card-mounted film pressure sensor according to claim 1, which is manufactured by the manufacturing method of the sensor component card-mounted film pressure sensor according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811195209.2A CN111044205A (en) | 2018-10-15 | 2018-10-15 | Sensitive component clamping type film pressure sensor and manufacturing method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811195209.2A CN111044205A (en) | 2018-10-15 | 2018-10-15 | Sensitive component clamping type film pressure sensor and manufacturing method thereof |
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| CN111044205A true CN111044205A (en) | 2020-04-21 |
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| CN201811195209.2A Pending CN111044205A (en) | 2018-10-15 | 2018-10-15 | Sensitive component clamping type film pressure sensor and manufacturing method thereof |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012127781A (en) * | 2010-12-15 | 2012-07-05 | Denso Corp | Dynamic quantity sensor |
| CN105765360A (en) * | 2013-11-20 | 2016-07-13 | 日立汽车系统株式会社 | Pressure sensor |
| CN206362480U (en) * | 2016-12-20 | 2017-07-28 | 歌尔科技有限公司 | A kind of integrating device and encapsulating structure of pressure sensor and gas sensor |
| CN108225627A (en) * | 2018-01-11 | 2018-06-29 | 北京中航兴盛测控技术有限公司 | Engineering machinery diaphragm pressure transducers and manufacturing method |
-
2018
- 2018-10-15 CN CN201811195209.2A patent/CN111044205A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012127781A (en) * | 2010-12-15 | 2012-07-05 | Denso Corp | Dynamic quantity sensor |
| CN105765360A (en) * | 2013-11-20 | 2016-07-13 | 日立汽车系统株式会社 | Pressure sensor |
| CN206362480U (en) * | 2016-12-20 | 2017-07-28 | 歌尔科技有限公司 | A kind of integrating device and encapsulating structure of pressure sensor and gas sensor |
| CN108225627A (en) * | 2018-01-11 | 2018-06-29 | 北京中航兴盛测控技术有限公司 | Engineering machinery diaphragm pressure transducers and manufacturing method |
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Application publication date: 20200421 |
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