CN111043960B - Large-scale high-speed rotation equipment error measuring and separating method based on laser sensing - Google Patents

Large-scale high-speed rotation equipment error measuring and separating method based on laser sensing Download PDF

Info

Publication number
CN111043960B
CN111043960B CN201911367208.6A CN201911367208A CN111043960B CN 111043960 B CN111043960 B CN 111043960B CN 201911367208 A CN201911367208 A CN 201911367208A CN 111043960 B CN111043960 B CN 111043960B
Authority
CN
China
Prior art keywords
error
measurement
scale high
speed rotation
equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201911367208.6A
Other languages
Chinese (zh)
Other versions
CN111043960A (en
Inventor
刘永猛
谭久彬
张茂伟
孙传智
王晓明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology
Original Assignee
Harbin Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin Institute of Technology filed Critical Harbin Institute of Technology
Priority to CN201911367208.6A priority Critical patent/CN111043960B/en
Publication of CN111043960A publication Critical patent/CN111043960A/en
Application granted granted Critical
Publication of CN111043960B publication Critical patent/CN111043960B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/10—Complex mathematical operations
    • G06F17/15—Correlation function computation including computation of convolution operations

Abstract

The invention relates to a large-scale high-speed rotation equipment error measuring and separating method based on laser sensing. Analyzing errors of large-scale high-speed rotation equipment, and establishing a laser sensing-based large-scale high-speed rotation equipment error measurement model; establishing a measurement optimization objective function, and determining a solution offset error; obtaining an accurate parameter error value through measurement equipment and a realization platform according to the de-bias error, and carrying out experimental verification on the de-bias error; and correcting the solution offset error by using a correction model, repeating until the precision value is met, and finishing measurement. The invention can obtain the self measurement position error of the measurement sensor, and further can effectively compensate the error in the measurement process, thereby effectively and accurately improving the measurement precision. The measured parameters can be accurately measured, and the measurement precision is improved. Different accurate models can be established when different errors are measured, so that the measurement accuracy is further improved, and the separation of the errors is realized.

Description

Large-scale high-speed rotation equipment error measuring and separating method based on laser sensing
Technical Field
The invention relates to the technical field of error measurement and separation of large-scale high-speed rotation equipment, in particular to a laser sensing-based error measurement and separation method of large-scale high-speed rotation equipment.
Background
With the rapid development of science and technology, various measurement devices are continuously updated, and measurement methods and means are also continuously changed. The method is to realize the accurate measurement of the omnibearing stereo without the accurate calibration and alignment of the sensor so as to reduce the influence of the measurement error, thereby improving the measurement accuracy and precision of the measured physical quantity to a great extent. If the measuring equipment is installed incorrectly or the position error of the measuring equipment is large, the measured data can be distorted, and the result can be invalid. Seriously affecting the subsequent operation flow. Therefore, although the optical sensor has high measurement accuracy and can complete the measurement of full-area data at one time, the optical sensor also has a problem of large offset error in the measurement process. It is therefore imperative to reduce the pose error. Therefore, the precision of the physical quantity to be measured is higher, and the efficiency of the measuring process is higher.
Disclosure of Invention
The invention provides a method for measuring and separating errors of large-scale high-speed rotation equipment based on laser sensing, which aims to solve the problem of large final errors in the measuring process and further effectively improve the measuring precision of a rotor in the measuring process, and provides the following technical scheme:
a large-scale high-speed rotation equipment error measuring and separating method based on laser sensing comprises the following steps:
step 1: analyzing the error of the large-scale high-speed rotating equipment, and establishing a laser sensing-based large-scale high-speed rotating equipment error measurement model;
step 2: establishing a measurement optimization objective function, and determining a solution offset error;
and step 3: obtaining an accurate parameter error value through measurement equipment and a realization platform according to the de-bias error, and carrying out experimental verification on the de-bias error;
and 4, step 4: and (5) correcting the solution offset error by adopting a correction model, repeating the steps 1 to 3 until the precision value is met, and finishing measurement.
Preferably, the step 1 specifically comprises:
step 1.1: analyzing the error of the large-scale high-speed rotation equipment, determining the eccentric error of the large-scale high-speed rotation equipment, and expressing the eccentric error of the large-scale high-speed rotation equipment by the following formula:
Figure BDA0002338741540000021
wherein e isjEccentricity error, r, for large high-speed rotary equipmentijTo measure the radius, θijTo sample the angle, αjIs an eccentric angle, Δ rijJ is a different cross section for machining error;
step 1.2: determining a lateral offset error of the sensor, the lateral offset error of the sensor being represented by:
Figure BDA0002338741540000022
step 1.3: determining a vertical tilt error of the three-dimensional sensor, the vertical tilt error of the three-dimensional sensor being represented by:
Figure BDA0002338741540000023
wherein d isjIs the lateral offset error of the sensor;
determining a three-dimensional sensor arc error, the three-dimensional sensor arc error being represented by:
Figure BDA0002338741540000024
wherein d' is the arc error of the three-dimensional sensor;
step 1.3: establishing a laser sensing-based error measurement model of the large-scale high-speed rotation equipment according to the error of the large-scale high-speed rotation equipment obtained in the step 1.2, and representing the model by the following formula:
Figure BDA0002338741540000025
preferably, the step 2 specifically comprises:
step 2.1: establishing a measurement optimization objective function, and expressing the established measurement optimization objective function by the following formula:
Figure BDA0002338741540000026
wherein the content of the first and second substances,
Figure BDA0002338741540000027
optimizing the objective function for the measurement, txAngle representing positive tilt, tyIndicating the angle of lateral inclination, roIs the least square cylinder radius value, beta represents the axial inclination angle;
step 2.2: and according to the established measurement optimization objective function, estimating and solving the offset error to determine a solution offset error.
Preferably, the step 4 specifically includes: and when the solution offset error is larger than the error of the actual measurement parameter and does not meet the solution precision, re-modeling the error item by combining the established model again, establishing a correction model, and re-solving each offset error item according to the correction model until the solution offset error meets the required precision value.
Preferably, when the accuracy threshold is set to be less than 0.1 μm, the solution accuracy is satisfied.
The invention has the following beneficial effects:
the invention can obtain the self measurement position error of the measurement sensor, and further can effectively compensate the error in the measurement process, thereby effectively and accurately improving the measurement precision. The measured parameters can be accurately measured, and the measurement precision is improved. Different accurate models can be established during measurement of different errors, the action mechanism of each error is considered, and the influence of each measurement error is eliminated from the mechanism level, so that the measurement accuracy is further improved, and the separation of the errors is realized.
According to the method, a cylindrical profile model considering multiple offset errors is established according to the system errors existing in the actual measurement process; and determining an optimization target required to be solved, calculating an error value through an algorithm, finishing the algorithm if the solving precision meets the requirement, and otherwise, continuously correcting the measurement model until the solving precision is met.
Drawings
FIG. 1 is a diagram of a laser-sensing error measurement model of a large-scale high-speed rotation device;
FIG. 2 is a diagram of sensor attitude change;
FIG. 3 is a flow chart of a method for measuring and separating errors of large-scale high-speed rotation equipment based on laser sensing.
Detailed Description
The present invention will be described in detail with reference to specific examples.
The first embodiment is as follows:
referring to fig. 3, a method for measuring and separating errors of large-sized high-speed rotating equipment based on laser sensing comprises the following steps:
step 1: analyzing the error of the large-scale high-speed rotating equipment, and establishing a laser sensing-based large-scale high-speed rotating equipment error measurement model;
the step 1 specifically comprises the following steps:
step 1.1: analyzing the error of the large-scale high-speed rotation equipment, determining the eccentric error of the large-scale high-speed rotation equipment, and expressing the eccentric error of the large-scale high-speed rotation equipment by the following formula:
Figure BDA0002338741540000031
wherein e isjEccentricity error, r, for large high-speed rotary equipmentijTo measure the radius, θijTo sample the angle, αjIs an eccentric angle, Δ rijJ is a different cross section for machining error;
according to fig. 2, step 1.2: determining a lateral offset error of the sensor, the lateral offset error of the sensor being represented by:
Figure BDA0002338741540000041
step 1.3: determining a vertical tilt error of the three-dimensional sensor, the vertical tilt error of the three-dimensional sensor being represented by:
Figure BDA0002338741540000042
wherein d isjIs the lateral offset error of the sensor;
determining a three-dimensional sensor arc error, the three-dimensional sensor arc error being represented by:
Figure BDA0002338741540000043
wherein d' is the arc error of the three-dimensional sensor;
according to FIG. 1, step 1.3: establishing a laser sensing-based error measurement model of the large-scale high-speed rotation equipment according to the error of the large-scale high-speed rotation equipment obtained in the step 1.2, and representing the model by the following formula:
Figure BDA0002338741540000044
step 2: establishing a measurement optimization objective function, and determining a solution offset error;
the step 2 specifically comprises the following steps:
step 2.1: establishing a measurement optimization objective function, and expressing the established measurement optimization objective function by the following formula:
Figure BDA0002338741540000045
wherein the content of the first and second substances,
Figure BDA0002338741540000046
optimizing the objective function for the measurement, txAngle representing positive tilt, tyIndicating the angle of lateral inclination, roIs the least square cylinder radius value, beta represents the axial inclination angle;
step 2.2: and according to the established measurement optimization objective function, estimating and solving the offset error to determine a solution offset error.
And step 3: obtaining an accurate parameter error value through measurement equipment and a realization platform according to the de-bias error, and carrying out experimental verification on the de-bias error;
and 4, step 4: and (5) correcting the solution offset error by adopting a correction model, repeating the steps 1 to 3 until the precision value is met, and finishing measurement.
The step 4 specifically comprises the following steps: and when the solution offset error is larger than the error of the actual measurement parameter and does not meet the solution precision, re-modeling the error item by combining the established model again, establishing a correction model, and re-solving each offset error item according to the correction model until the solution offset error meets the required precision value. And when the accuracy threshold is set to be less than 0.1 mu m, the solving accuracy is met.
The above description is only a preferred embodiment of the error measurement and separation method for the large-sized high-speed rotating equipment based on laser sensing, and the protection range of the error measurement and separation method for the large-sized high-speed rotating equipment based on laser sensing is not limited to the above embodiments, and all technical schemes belonging to the idea belong to the protection range of the invention. It should be noted that modifications and variations which do not depart from the gist of the invention will be those skilled in the art to which the invention pertains and which are intended to be within the scope of the invention.

Claims (3)

1. A large-scale high-speed rotation equipment error measuring and separating method based on laser sensing is characterized in that: the method comprises the following steps:
step 1: analyzing the error of the large-scale high-speed rotating equipment, and establishing a laser sensing-based large-scale high-speed rotating equipment error measurement model;
step 2: establishing a measurement optimization objective function, and determining a solution offset error;
the step 2 specifically comprises the following steps:
step 2.1: establishing a measurement optimization objective function, and expressing the established measurement optimization objective function by the following formula:
Figure FDA0002947464810000011
wherein，
Figure FDA0002947464810000012
Optimizing the objective function for the measurement, txAngle representing positive tilt, tyIndicating the angle of lateral inclination, roIs the least square cylinder radius value, beta represents the axial inclination angle;
step 2.2: according to the established measurement optimization objective function, estimating and solving the offset error to determine a solution offset error;
and step 3: obtaining an accurate parameter error value through measurement equipment and an experimental platform according to the de-biasing error, and carrying out experimental verification on the de-biasing error;
and 4, step 4: correcting the solution offset error by adopting a correction model, repeating the steps 1 to 3 until the precision value is met, and finishing measurement;
the step 1 specifically comprises the following steps:
step 1.1: analyzing the error of the large-scale high-speed rotation equipment, determining the eccentric error of the large-scale high-speed rotation equipment, and expressing the eccentric error of the large-scale high-speed rotation equipment by the following formula:
Figure FDA0002947464810000013
wherein e isjEccentricity error, r, for large high-speed rotary equipmentijTo measure the radius, θijTo sample the angle, αjIs an eccentric angle, Δ rijJ is a different cross section for machining error;
step 1.2: determining a lateral offset error of the three-dimensional sensor, the lateral offset error of the three-dimensional sensor being represented by:
Figure FDA0002947464810000014
wherein d isjIs the lateral offset error of the three-dimensional sensor;
step 1.3: determining a vertical tilt error of the three-dimensional sensor, the vertical tilt error of the three-dimensional sensor being represented by:
Figure FDA0002947464810000021
wherein T is the vertical tilt error of the three-dimensional sensor;
determining a three-dimensional sensor arc error, the three-dimensional sensor arc error being represented by:
Figure FDA0002947464810000022
wherein d' is the arc error of the three-dimensional sensor;
step 1.3: establishing a laser sensing-based error measurement model of the large-scale high-speed rotation equipment according to the error of the large-scale high-speed rotation equipment obtained in the step 1.2, and representing the model by the following formula:
Figure FDA0002947464810000023
2. the method for measuring and separating the errors of the large-scale high-speed rotating equipment based on the laser sensing as claimed in claim 1, which is characterized in that: the step 4 specifically comprises the following steps: and when the solution offset error is larger than the error of the actual measurement parameter and does not meet the solution precision, re-modeling the error item by combining the established model again, establishing a correction model, and re-solving each offset error item according to the correction model until the solution offset error meets the required precision value.
3. The method for measuring and separating the errors of the large-scale high-speed rotating equipment based on the laser sensing as claimed in claim 2, which is characterized in that: and when the accuracy threshold is set to be less than 0.1 mu m, the solving accuracy is met.
CN201911367208.6A 2019-12-26 2019-12-26 Large-scale high-speed rotation equipment error measuring and separating method based on laser sensing Active CN111043960B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201911367208.6A CN111043960B (en) 2019-12-26 2019-12-26 Large-scale high-speed rotation equipment error measuring and separating method based on laser sensing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201911367208.6A CN111043960B (en) 2019-12-26 2019-12-26 Large-scale high-speed rotation equipment error measuring and separating method based on laser sensing

Publications (2)

Publication Number Publication Date
CN111043960A CN111043960A (en) 2020-04-21
CN111043960B true CN111043960B (en) 2021-04-30

Family

ID=70240309

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201911367208.6A Active CN111043960B (en) 2019-12-26 2019-12-26 Large-scale high-speed rotation equipment error measuring and separating method based on laser sensing

Country Status (1)

Country Link
CN (1) CN111043960B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115077458B (en) * 2022-06-14 2023-06-16 吉林大学 Lever ball type universal precision measuring method for rotary part section bending eccentric

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1527022A (en) * 2004-02-04 2004-09-08 哈尔滨工业大学 Self-separation method and device for spatial error of superprecise revolution reference
EP1485675A2 (en) * 2002-03-14 2004-12-15 Taylor Hobson Limited Surface profiling apparatus
WO2013169816A1 (en) * 2012-05-08 2013-11-14 Kla-Tencor Corporation Measurement model optimization based on parameter variations across a wafer
CN109960868A (en) * 2019-03-21 2019-07-02 哈尔滨工业大学 Large high-speed revolution equipment single-stage components bias data processing and run-out tolerance distribution method based on multi-parameter regulation
CN110375698A (en) * 2019-08-23 2019-10-25 河南科技大学 Inner hole circularity on-position measure method based on parameter identification
CN111475903A (en) * 2019-01-07 2020-07-31 哈尔滨工业大学 Large-scale high-speed rotation equipment multistage part dynamic characteristic step-by-step measuring, adjusting and distributing method based on multi-bias error synchronous compensation

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1485675A2 (en) * 2002-03-14 2004-12-15 Taylor Hobson Limited Surface profiling apparatus
CN1527022A (en) * 2004-02-04 2004-09-08 哈尔滨工业大学 Self-separation method and device for spatial error of superprecise revolution reference
WO2013169816A1 (en) * 2012-05-08 2013-11-14 Kla-Tencor Corporation Measurement model optimization based on parameter variations across a wafer
CN111475903A (en) * 2019-01-07 2020-07-31 哈尔滨工业大学 Large-scale high-speed rotation equipment multistage part dynamic characteristic step-by-step measuring, adjusting and distributing method based on multi-bias error synchronous compensation
CN109960868A (en) * 2019-03-21 2019-07-02 哈尔滨工业大学 Large high-speed revolution equipment single-stage components bias data processing and run-out tolerance distribution method based on multi-parameter regulation
CN110375698A (en) * 2019-08-23 2019-10-25 河南科技大学 Inner hole circularity on-position measure method based on parameter identification

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
双参数圆轮廓测量模型和特征法位置误差分离技术研究;黄景至;《中国博士学位论文全文数据库》;20180115;文章正文第22-40页、第63-85页，图4-1 *

Also Published As

Publication number Publication date
CN111043960A (en) 2020-04-21

Similar Documents

Publication Publication Date Title
EP2587214B1 (en) Determination of non-uniformities of loaded wheels by load simulation
CN101436004A (en) Method for pre-aligning silicon chip
CN110490932B (en) Method for measuring space pose of crane boom through monocular infrared coplanar cursor iteration optimization
CN102735179A (en) Device and method for measuring diameter of bearing and radius of rolling path
CN111043960B (en) Large-scale high-speed rotation equipment error measuring and separating method based on laser sensing
US20160273914A1 (en) Method For Detecting Support Surface Variations During Wheel Alignment Rolling Compensation Procedure
WO2023088471A1 (en) Pipeline defect detection method based on multi-sensing information fusion and pipeline defect positioning method based on multi-sensing information fusion
CN203687884U (en) Air floatation type table tennis diameter and eccentricity detection device based on machine vision
CN113888641A (en) Stumpage breast diameter measurement method based on machine vision and deep learning
CN109458990B (en) Instrument and equipment pose measurement and error compensation method based on mark-free anchor point detection
CN107575211B (en) Online calibration method of pumping unit indicator
CN113702928B (en) Intersection radar calibration method and equipment
CN108931808B (en) Improved ion beam vertical angle measuring method
CN102072693A (en) Method for calibrating parallelism of rotation axis of double parallel-joint coordinate measuring machine
CN113029103B (en) Inclination measuring method and system for foundation ring of wind turbine tower and storage medium
JP6197261B2 (en) Calibration method and apparatus for measuring machine
CN110360937B (en) Automatic paper roll width measurement method based on laser range finder
CN117405145B (en) Inertial navigation management method, system and storage medium based on intelligent analysis
Torres et al. A practical algorithm to correct geometrical distortion of image acquisition cameras
CN116228773B (en) Method, device and equipment for calibrating measurement data of wafer detection machine
CN114160767B (en) Arrangement method for confirming installation datum line of continuous casting equipment by adopting traversal method
CN114295095B (en) Method for determining optimal number of measuring points for free-form surface detection
CN110929353A (en) Simplex algorithm-based large-scale high-speed rotation equipment cylindrical profile error separation method
CN108491360B (en) Coal mining amount calculation method
TWI621826B (en) Metrology method and system

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant