CN111025627A - PDMS film-based all-solid-state variable-focus electrostatic driving type microlens - Google Patents
PDMS film-based all-solid-state variable-focus electrostatic driving type microlens Download PDFInfo
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Abstract
The invention relates to the technical field of optics and the field of MEMS, in particular to an all-solid-state variable-focus electrostatic driving type micro-lens based on a PDMS film, which has the following structure: the flexible polymer is placed between two glass layers of different thickness. Two ring-shaped electrode actuators are respectively connected to the lower bottom surface of the glass film connected with the polymer and support the upper bottom surface of the glass. When voltage is applied to the electrodes, coulomb force generated between the electrodes can force the glass film to bend, so that the whole lens structure is formed, and different voltages can cause the glass film to have different bending curvatures, so that the focal length of the micro lens is changed. The micro lens is a typical micron-sized MEMS integrated product and has the advantages of small volume, low power consumption, no magnetic interference, wide zooming range, quick response and the like.
Description
Technical Field
The invention relates to the field of optical technical elements and MEMS (micro electro mechanical systems), in particular to an all-solid-state variable-focus electrostatic driving type micro lens based on a PDMS (polydimethylsiloxane) film.
Background
In recent years, with the development of information technology, the performance research of a microlens-based camera has become a research hotspot in the information field at present. In a traditional camera system, the focal length of a lens is controlled to be unchanged, and the relative position between the lenses is adjusted by using a voice coil motor to realize zooming, so that the whole optical structure occupies a larger space. Therefore, the conventional microlens has the disadvantages of complicated structure, severe mechanical wear, high energy consumption, electromagnetic interference, long response time and the like, and is not favorable for miniaturization. Currently, experts and scholars at home and abroad have begun to explore microlenses that can change the focal length of the lens itself.
In the variable focus microlenses reported so far, the surface shape and refractive index profile of the microlens are changed by one or more additional controllable physical quantities (e.g., force, heat, electricity, etc.), thereby achieving a change in the focal length. For the surface shape control method, liquid is usually adopted as the main body structure of the micro lens, and the surface curvature of the micro lens is changed by utilizing the effects of pressure, electrowetting, thermal deformation and the like, so that the focal length of the lens is controlled. The liquid variable-focus micro lens has the advantage of wide zooming range, but is easy to leak liquid and influenced by gravity, and can generate electromagnetic interference when being magnetically driven, the response speed is low, the volume is large, and the driving voltage is overhigh. As a method for adjusting the refractive index, a tunable liquid crystal microlens is a typical representative of this type, and the lens is placed in a liquid crystal atmosphere, and the refractive index of the liquid crystal is adjusted by changing the applied voltage, thereby controlling the focal length of the lens. Such a micro lens is easy to realize the array, but the focal length adjustment accuracy is not high enough, and large optical distortion is caused due to non-uniformity of liquid crystal in an electric field.
Disclosure of Invention
The invention provides an all-solid-state variable-focus electro-statically driven micro-lens based on a PDMS film, which has the advantages of small volume, simple structure, low power consumption, no magnetic interference, wide focusing range and the like, overcomes the defect that the traditional micro-lens cannot be zoomed or has a small zooming range, and also solves the problems of liquid leakage, electromagnetic interference and the like of the traditional variable-focus liquid lens.
The invention is realized by adopting the following technical scheme: the utility model provides an all solid-state variable focus electrostatic drive formula microlens based on PDMS film, includes 2 ring electrodes, glass film, flexible polymer and support glass, and one of them ring electrode is connected in the lower bottom surface of glass film, and another ring electrode is connected in the last bottom surface of supporting glass, and the up end and the lower terminal surface of flexible polymer are connected respectively in the lower bottom surface of glass film and the last bottom surface of supporting glass, and the upper end and the lower extreme of flexible polymer are located the intra-annular of upper and lower ring electrode respectively, and the anchor ring of upper and lower ring electrode is relative. When positive and negative opposite voltages are applied to the two annular electrodes, the two annular electrodes are acted by coulomb force, and the two annular electrodes attract each other, so that the periphery of the glass film and the flexible polymer PDMS are driven to deform. At this time, the periphery of the glass film is deformed downward, the middle position is not deformed (corresponding to the middle part is raised), and the supporting glass is not deformed and is corresponding to a plano-convex lens.
According to the PDMS film-based all-solid-state variable-focus electrostatic driving type microlens, the zooming of the microlens is driven by static electricity, and the focal length of the microlens is controlled by controlling the magnitude of the applied voltage.
According to the all-solid-state variable-focus electrostatic driving type micro-lens based on the PDMS film, the glass film is the silica glass film, the light transmittance of the glass film is good, the glass film has good elastic deformation, the thickness of the glass film can be 50-200 micrometers, the hardness of the glass film is higher than that of a flexible polymer, and the glass film is restored to the original position when no voltage is applied.
In the all-solid-state variable focus electrostatic driven microlens based on the PDMS film, the flexible polymer is the lens body of the microlens, the material of the flexible polymer can be polymer gel, rubber, linear branched polymer or low polymer oil, and the flexible polymer has the properties of permanent elasticity, low Young modulus, chemical stability, full transparency and the like.
In the all-solid-state variable-focus electrostatic driven microlens based on the PDMS film, the material for manufacturing the flexible polymer is a PDMS solution, the PDMS solution belongs to polymer gel, and the PDMS solution is prepared by mixing a solution A and a solution B of Dow Corning SYLRARD184 in a ratio of 20: 1 weight ratio of the mixed solution.
According to the all-solid-state variable-focus electrostatic driven microlens based on the PDMS film, the prepared PDMS solution is injected into the mold to be heated and molded, so that the cylindrical PDMS flexible polymer is manufactured. The prepared polymer has high elasticity, low hardness and high light transmittance.
The all-solid-state variable-focus electrostatic driven microlens based on the PDMS film integrates the ring electrode on the glass film or the supporting glass through the photoetching process and the stripping process in the MEMS manufacturing process, and the manufacturing process comprises the following steps:
a. treatment of the surface of the support glass: ultrasonically cleaning a glass film or supporting glass by using acetone and ethanol solutions respectively, then washing by using deionized water, drying by using nitrogen, then placing in an oven for drying, and cooling for later use;
b. coating a photoresist: spin-coating the photoresist by a spin-coating method by using a spin coater;
c. pre-baking: placing the glass film or the support glass coated with the photoresist on a heating plate for heating and naturally cooling to room temperature so as to finish the pre-baking solidification of the glue layer;
d. alignment and exposure: firstly, accurately positioning or aligning the circular ring-shaped pattern above a glass film or support glass, and then transferring the circular ring-shaped pattern to a photoresist coating through exposure;
e. post-baking: the adhesive layer in the exposure area can fully generate a crosslinking reaction to form a compact structure;
f. and (3) developing: dissolving and removing the ring-shaped adhesive layer which is not irradiated by ultraviolet light through an organic solvent xylene solution;
g. hard baking: placing the glass film or the supporting glass on a heating plate for heating;
h. film coating: plating a metal film on one surface of a glass film or support glass with photoresist by a film plating method, wherein the metal film is formed on the photoresist at the position with the photoresist, and the metal film is directly formed on the glass film or the support glass at the position without the photoresist;
i. stripping: when the adhesive layer on the substrate is stripped by using a strong acid or strong alkali solution under a heating condition by adopting a wet stripping method, the unnecessary metal film falls off in a solvent along with the stripping of the adhesive layer, and the part of the metal film directly formed on the glass film or the supporting glass is remained to form the ring electrode, so that the ring electrode is integrated on the supporting glass.
The all-solid-state variable-focus electrostatic driven microlens based on the PDMS film adopts the photoetching process to manufacture the flexible polymer mold as follows:
a. and (3) treating the surface of the glass sheet: ultrasonically cleaning the glass sheet with acetone and ethanol solution, washing with deionized water, and drying with nitrogen; then placing the mixture in a drying oven for drying and cooling for later use;
b. coating a photoresist: spin-coating the photoresist by a spin-coating method by using a spin coater;
c. pre-baking: placing the glass sheet coated with the photoresist on a heating plate, heating and naturally cooling to room temperature to finish the pre-baking solidification of the glue layer;
d. alignment and exposure: first accurately positioning or aligning a circular pattern over the surface of a glass sheet, and then transferring the pattern to a photoresist coating by exposure;
e. post-baking: the adhesive layer in the exposure area can fully generate a crosslinking reaction to form a compact structure;
f. and (3) developing: dissolving and removing the glue layer which is not irradiated by ultraviolet light through an organic solvent xylene solution, namely obtaining a through hole on the photoresist layer;
g. hard baking: placing the glass sheet on a heating plate for heating;
h. stripping: the method adopts a wet chemical stripping method, strong acid or strong base solution is used to complete stripping of the glue layer under the condition of heating without damaging the photoresist, and a flexible polymer mold is formed, wherein the mold is of a photoresist block structure with a through hole.
According to the all-solid-state variable-focus electrostatic driven microlens based on the PDMS film, the preparation process of the PDMS flexible polymer solution is as follows:
a. solutions a (prepolymer, dimethyl-methylvinylsiloxane) and B (curative, trimethylsilyl-dimethylsiloxane copolymer) of dow corning SYLRARD184 were weighed using a centrifugal scale to give a 20: 1, mixing and placing into a beaker;
b. stirring by a stirrer;
c. vacuum defoaming, namely placing the beaker into a vacuum chamber for air extraction;
d. and (4) putting the prepared solution into a refrigerator for freezing for later use.
The preparation process of the all-solid-state variable-focus electrostatic driven microlens based on the PDMS film comprises the following steps:
a. firstly, laying a layer of tinfoil on a heating plate, and then placing support glass with annular electrodes, which is manufactured in advance, on the tinfoil;
b. placing the manufactured mould at the central position of the support glass, enabling the through hole of the mould to be coaxial with the annular electrode, and then injecting the prepared solution into the mould by using an injector;
c. opening a switch of the heating plate for heating;
d. the mold was removed and the support glass and PDMS membrane were bonded together.
The PDMS flexible polymer in the invention is used for connecting the support glass and the glass film. When different voltages are applied to the ring electrodes, the glass film has different bending curvatures, so that the focal length of the micro lens is changed. The problem of variable focus microlens liquid leakage is solved and the influence of gravity on imaging is eliminated. The support glass in the present invention is a substrate for the microlens, and is a member for supporting the entire lens. The side of the support glass to which the polymer is attached does not deform, and behaves as a flat mirror.
Compared with the prior art, the invention has the following advantages:
A. the response speed is fast, the power consumption is low, and the precision is high.
B. The volume is small, the integration is easy, the zooming range is wide, and the electromagnetic interference does not exist.
C. Flexible polymers are used so there is no liquid leakage and gravity effects on the imaging.
Drawings
FIG. 1 is a schematic diagram of the various components of a variable focus microlens in the present invention.
FIG. 2 is a process diagram of the integration of a variable focus microlens-supported glass ring electrode in the present invention.
FIG. 3 is a process diagram of the present invention for making a mold for a variable focus microlens.
Fig. 4 is a schematic three-dimensional structure diagram of the variable focus microlens of the present invention.
Fig. 5 is a schematic cross-sectional view of the variable focus microlens of the present invention before voltage is applied.
Fig. 6 is a schematic cross-sectional view of the variable focus microlens of the present invention after voltage is applied.
In the figure: 1-glass film, 2-annular electrode, 3-PDMS film and 4-support glass.
Detailed Description
In order to make the technical scheme, structure and advantages of the invention more clear, the invention is described in detail below with reference to the accompanying drawings and embodiments.
In fig. 1, 1 is a glass film, 2 is a ring electrode (two pieces), 3 is a PDMS film, 4 is a support glass, one piece of the ring electrode 2 is connected to the lower bottom surface of the glass film 1, the other piece of the ring electrode 2 is connected to the upper bottom surface of the support glass 4, and the PDMS film 3 is sandwiched between the glass film 1 and the support glass 4. The glass film 1 and the PDMS film 3 can be deformed, and the support glass 4 can not be deformed.
The glass film 1 in FIG. 1 had a diameter of 4mm and a thickness of 50 u m. The ring electrode 2 has an inner diameter of 1.55mm, an outer diameter of 4mm and a thickness of 50 u m. The PDMS membrane 3 is 1.55mm in diameter and 400 u m thick. The supporting glass 4, which is not a critical lens component, has a diameter equal to or greater than the diameter of the glass film and a thickness of 200 u m a. The inner diameter of the ring electrode 2 is not less than the diameter of the PDMS flexible polymer 3, and the diameter of the glass film 1 is equal to the outer diameter of the ring electrode 2.
Example one
A variable focus microlens has a glass film 1 of silica glass having a thickness of 50 u m a and a PDMS film 3 made of Dow Corning SYLRARD 184. The glass film 1 has higher hardness than the PDMS film 3, and is less prone to deformation; the support glass 4 is ordinary glass.
Manufacturing a glass film: a circular glass film having a diameter of 4mm was cut with a laser cutter.
Manufacturing the support glass: a circular glass sheet having a diameter of 4mm was cut with a glass cutter.
MEMS is a Micro electro mechanical System (Micro electro mechanical System), which is an Electromechanical composite device with a size of several millimeters or less, and the internal structure of the MEMS is generally in the micrometer or even nanometer level, so that the MEMS is an independent intelligent System. The device mainly comprises a sensor, an actuator and a micro-energy source. Common products include microaccelerometers, micromotors, micro-displacement drives, and the like, as well as integrated products thereof. The two ring electrodes are the micro-displacement actuators which are made and are one of the important devices for deforming the glass film and the polymer to form the lens. The electrostatic drive is simple to manufacture, has low power loss and has high-speed response of microsecond level. The microlens described in this patent belongs to the integrated product of MEMS, it is to integrate the micro displacement driver on the microlens that can zoom. It has dimensions of 5mm x 0.5mm and internal structures of micron order. The application of the electrostatic driving micro-shifter replaces the traditional voice coil motor, and the electrostatic driving micro-shifter has micron-level precision, lower power consumption and no electromagnetic interference problem of the voice coil motor. The PDMS-based all-solid-state variable-focus electrostatic-driven micro lens overcomes the defects of the prior lens, has the advantages of compact and stable structure, no magnetic interference, wide zooming range, quick response and the like, and is expected to have larger application potential and wide application prospect in the near future.
The ring electrode is integrated on the surface of the supporting glass by adopting a photoetching process and a stripping process (the glass film is the same as the above), and the manufacturing process is as follows as shown in FIG. 2:
a. treatment of the surface of the support glass: cleaning and drying the glass sheet: ultrasonically cleaning the glass sheet with acetone and ethanol solution for about 10min, washing with deionized water, and blowing with nitrogen; then the mixture is placed in an oven to be dried at the temperature of 120 ℃ for 5 minutes and cooled for standby.
b. Coating SU-8 glue: the spin coating method is adopted, the rotating speed of the spin coater is set to 3500 rpm, and the duration is 2 min. The thickness of the resulting SU-8 glue was 50 u m.
c. Pre-baking: and (3) placing the glass sheet coated with the SU-8 adhesive in a spin mode on a heating plate, setting the initial temperature of the heating plate to 65 ℃, gradually raising the temperature to 95 ℃, and finishing so as to ensure that the glass sheet is naturally cooled to room temperature on the heating plate, thereby finishing the pre-baking solidification of the adhesive layer.
d. Alignment and exposure: a circular ring shaped pattern with an inner diameter of 1.55mm and an outer diameter of 4mm was first accurately positioned or aligned on the surface of the glass sheet. And secondly transferring the circular ring-shaped pattern to the SU-8 glue coating by exposure.
e. Post-baking: so that the adhesive layer in the exposure area can fully generate a crosslinking reaction to form a compact structure.
f. And (3) developing: and dissolving and removing the glue layer which is not irradiated by the ultraviolet light through an organic solvent xylene solution.
g. Hard baking: the glass sheet was heated on a hot plate for 1-2 minutes at 100 ℃ and 130 ℃.
h. Film coating: plating a metal film (silver film or gold film) on one surface of the glass sheet with the photoresist by a film plating method. Where there is a photoresist, a metal film is formed on the photoresist, and where there is no photoresist, a metal film is directly formed on the substrate glass sheet.
i. Stripping: when the glue layer on the substrate is stripped by using a high-concentration strong acid or strong base solution under a heating condition by adopting a wet stripping method, unnecessary metal falls off in a solvent along with the stripping of the glue layer, and a metal part directly formed on the substrate is reserved to form a pattern, so that the ring electrode is integrated on the glass film and the support glass.
The fabrication of the mold for PDMS film by photolithography is shown in fig. 3, and it is performed as follows:
a. treatment of glass surface: cleaning and drying the glass sheet: ultrasonically cleaning the glass sheet with acetone and ethanol solution for about 10min, washing with deionized water, and blowing with nitrogen; then the mixture is placed in an oven to be dried at the temperature of 120 ℃ for 5 minutes and cooled for standby.
b. Coating SU-8 glue: the spin coating method is adopted, the rotating speed of the spin coater is set to be 500 rpm, and the time duration is 5 min. The thickness of the resulting SU-8 glue was 400 u m.
c. Pre-baking: and (3) placing the glass sheet coated with the SU-8 adhesive in a spin mode on a heating plate, setting the initial temperature of the heating plate to 35 ℃, gradually raising the temperature to 95 ℃, and finishing so as to ensure that the glass sheet is naturally cooled to room temperature on the heating plate, thereby finishing the pre-baking solidification of the adhesive layer.
d. Alignment and exposure: a circular pattern with a diameter of 1.55mm is first accurately positioned or registered over the surface of the glass sheet. Secondly, transferring the pattern to the SU-8 glue coating by exposure (because the glue layer to be exposed is thick, the exposure needs to be avoided by using an ultraviolet light source with the wavelength less than or equal to 365 nm as much as possible).
e. Post-baking: so that the adhesive layer in the exposure area can fully generate a crosslinking reaction to form a compact structure.
f. And (3) developing: and dissolving and removing the glue layer which is not irradiated by the ultraviolet light through an organic solvent xylene solution, namely obtaining a through hole with the diameter of 1.55mm on the SU-8 glue layer.
g. Hard baking: the glass sheet was heated on a hot plate for 1-2 minutes at 100 ℃ and 130 ℃.
h. Stripping: by adopting a wet chemical stripping method, the stripping of the glue layer can be completed by using a high-concentration strong acid or strong alkali solution under the heating condition on the premise of not damaging the SU-8 structure, and the mold of the PDMS film is formed and is of an SU-8 glue block structure with a through hole.
The preparation process of the PDMS film solution is as follows:
a. solutions a (prepolymer, dimethyl-methylvinylsiloxane) and B (curative, trimethylsilyl-dimethylsiloxane copolymer) of dow corning SYLRARD184 were weighed using a centrifugal scale to give a 20: 1 weight ratio was mixed and placed in a beaker.
b. Stir with stirrer for 5 minutes.
c. Vacuum defoaming, placing the beaker into a vacuum chamber and exhausting for 20 minutes.
d. And (4) putting the prepared solution into a refrigerator for freezing for later use.
The flexible polymer was prepared as follows:
a. firstly, a layer of tinfoil is laid on a heating plate, and then the support glass with the annular electrode which is manufactured in advance is placed on the tinfoil.
b. The prepared mould is placed at the central position of the support glass, the through hole of the mould is coaxial with the annular electrode, and then the prepared solution is injected into the mould by an injector.
c. The switch of the heating plate is turned on, the temperature is set to 150 ℃, and the heating is carried out for 10 min.
d. The mold was removed and the support glass and PDMS membrane were bonded together.
Note that: the solution is injected into the mold so that the solution surface is exactly level with the mold.
As shown in FIG. 4, the lower surface of the glass film with the ring-shaped electrode is bonded to the upper end surface of the PDMS film to form the micro-lens.
As shown in fig. 5, when no voltage is applied to the ring electrode, the ring electrode is not subjected to coulomb force, and the glass film and the PDMS film are not deformed. The microlens in this case behaves as a flat mirror, the focal length of which is infinite.
As shown in fig. 6, when a voltage is applied to the ring electrodes, the ring electrodes are acted by coulomb force, and the two ring electrodes attract each other, thereby driving the periphery of the glass film and the PDMS film to deform. At the moment, the periphery of the glass film deforms downwards, the deformation of the middle position is small (equivalent to the protrusion of the middle part) equivalent to the deformation of the periphery, the support glass does not deform and is equivalent to a plano-convex lens, and the focal length of the support glass is a finite distance.
Claims (10)
1. The utility model provides an all solid-state variable focus electrostatic drive formula microlens based on PDMS film which characterized in that: the glass thin film electrode comprises 2 annular electrodes (2), a glass thin film (1), a flexible polymer and support glass (4), wherein one annular electrode (2) is connected to the lower bottom surface of the glass thin film (1), the other annular electrode (2) is connected to the upper bottom surface of the support glass (4), the upper end surface and the lower end surface of the flexible polymer are respectively connected to the lower bottom surface of the glass thin film (1) and the upper bottom surface of the support glass (4), the upper end and the lower end of the flexible polymer are respectively located in rings of the upper annular electrode and the lower annular electrode (2), and the ring surfaces of the upper annular electrode and the lower annular electrode (2) are opposite.
2. The all-solid-state variable focus electrostatic actuated microlens of claim 1, wherein: the micro lens zooming is driven by static electricity, and the focal length of the micro lens is controlled by controlling the magnitude of the applied voltage.
3. The all-solid-state variable focus electrostatic actuated microlens of claim 2, wherein: the glass film (1) is a silica glass film.
4. The all-solid-state variable focus electrostatic actuated microlens of claim 3, wherein: the flexible polymer is the lens body of the microlens, and the material of the flexible polymer can be polymer gel, rubber, linear branched polymer or low polymer oil.
5. The all-solid-state variable focus electrostatic actuated microlens of claim 4, wherein: the material from which the flexible polymer was made was a PDMS solution prepared from a solution a and a solution B of dow corning SYLRARD184 at a ratio of 20: 1 weight ratio of the mixed solution.
6. The all-solid-state variable focus electrostatic actuated microlens of claim 5, wherein: and injecting the prepared PDMS solution into a mould to heat the mould, thereby manufacturing the cylindrical PDMS film (3).
7. An all-solid-state variable focus electrostatic actuated microlens based on PDMS membrane as claimed in claim 1 or 2 or 3 or 4 or 5 or 6 wherein: the process of integrating the ring electrode on the glass film (1) or the supporting glass (4) through the photoetching process and the stripping process in the MEMS manufacturing process comprises the following steps:
a. treatment of the surface of the support glass: ultrasonically cleaning the glass film (1) or the supporting glass (4) by using acetone and ethanol solutions respectively, then washing by using deionized water, drying by using nitrogen, then placing in an oven for drying, and cooling for later use;
b. coating a photoresist: spin-coating the photoresist by a spin-coating method by using a spin coater;
c. pre-baking: placing the glass film (1) or the supporting glass (4) coated with the photoresist on a heating plate for heating and naturally cooling to room temperature so as to finish the pre-baking solidification of the glue layer;
d. alignment and exposure: firstly, accurately positioning or aligning the circular ring-shaped pattern above the glass film (1) or the support glass (4), and secondly, transferring the circular ring-shaped pattern to a photoresist coating through exposure;
e. post-baking: the adhesive layer in the exposure area can fully generate a crosslinking reaction to form a compact structure;
f. and (3) developing: dissolving and removing the ring-shaped adhesive layer which is not irradiated by ultraviolet light through an organic solvent xylene solution;
g. hard baking: placing the glass film (1) or the supporting glass (4) on a heating plate for heating;
h. film coating: plating a metal film on one surface of the glass film (1) or the support glass (4) with the photoresist by a film plating method, wherein the metal film is formed on the photoresist at the position with the photoresist, and the metal film is directly formed on the glass film (1) or the support glass (4) at the position without the photoresist;
i. stripping: when the glue layer on the substrate is stripped by using a strong acid or strong alkali solution under the heating condition by adopting a wet stripping method, the unnecessary metal film falls off in a solvent along with the stripping of the glue layer, and the part of the metal film directly formed on the glass film (1) or the supporting glass (4) is remained to form the ring electrode (2), so that the ring electrode is integrated on the supporting glass.
8. The all-solid-state variable focus electrostatic actuated microlens of claim 6, wherein: the process of making a mold for flexible polymers using photolithography is as follows:
a. and (3) treating the surface of the glass sheet: ultrasonically cleaning the glass sheet with acetone and ethanol solution, washing with deionized water, and drying with nitrogen; then placing the mixture in a drying oven for drying and cooling for later use;
b. coating a photoresist: spin-coating the photoresist by a spin-coating method by using a spin coater;
c. pre-baking: placing the glass sheet coated with the photoresist on a heating plate, heating and naturally cooling to room temperature to finish the pre-baking solidification of the glue layer;
d. alignment and exposure: first accurately positioning or aligning a circular pattern over the surface of a glass sheet, and then transferring the pattern to a photoresist coating by exposure;
e. post-baking: the adhesive layer in the exposure area can fully generate a crosslinking reaction to form a compact structure;
f. and (3) developing: dissolving and removing the glue layer which is not irradiated by ultraviolet light through an organic solvent xylene solution, namely obtaining a through hole on the photoresist layer;
g. hard baking: placing the glass sheet on a heating plate for heating;
h. stripping: the method adopts a wet chemical stripping method, strong acid or strong base solution is used to complete stripping of the glue layer under the condition of heating without damaging the photoresist, and a flexible polymer mold is formed, wherein the mold is of a photoresist block structure with a through hole.
9. The all-solid-state variable focus electrostatic actuated microlens of claim 5, wherein: the preparation process of the PDMS film solution is as follows:
a. the daughtercard SYLRARD184 solution a and solution B were weighed by centrifugation at 20: 1, mixing and placing into a beaker;
b. stirring by a stirrer;
c. vacuum defoaming, namely placing the beaker into a vacuum chamber for air extraction;
d. and (4) putting the prepared solution into a refrigerator for freezing for later use.
10. The all-solid-state variable focus electrostatic actuated microlens of claim 8, wherein:
the flexible polymer was prepared as follows:
a. firstly, laying a layer of tinfoil on a heating plate, and then placing support glass with annular electrodes, which is manufactured in advance, on the tinfoil;
b. placing the manufactured mould at the central position of the support glass, enabling the through hole of the mould to be coaxial with the annular electrode, and then injecting the prepared solution into the mould by using an injector;
c. opening a switch of the heating plate for heating;
d. the mold was removed and the support glass and PDMS membrane were bonded together.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112162338A (en) * | 2020-11-20 | 2021-01-01 | 太原师范学院 | IPMC drive-based all-solid-state adjustable focusing micro lens |
| CN114325896A (en) * | 2022-01-10 | 2022-04-12 | 西安交通大学 | Zoom lens with radial telescopic-arch amplifying structure and working method thereof |
| CN114910984A (en) * | 2021-02-10 | 2022-08-16 | 宁波舜宇光电信息有限公司 | Lens assembly, optical lens, camera module and continuous zooming method |
| CN114924336A (en) * | 2022-04-18 | 2022-08-19 | 江苏大学 | Multi-interlayer flexible zoom lens applied to cultural relic exhibition, holographic three-dimensional display system, augmented reality system and method |
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| CN114924336A (en) * | 2022-04-18 | 2022-08-19 | 江苏大学 | Multi-interlayer flexible zoom lens applied to cultural relic exhibition, holographic three-dimensional display system, augmented reality system and method |
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