CN111020520B - Method for improving treatment efficiency and safety of vapor deposition furnace - Google Patents
Method for improving treatment efficiency and safety of vapor deposition furnace Download PDFInfo
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- CN111020520B CN111020520B CN201911214767.3A CN201911214767A CN111020520B CN 111020520 B CN111020520 B CN 111020520B CN 201911214767 A CN201911214767 A CN 201911214767A CN 111020520 B CN111020520 B CN 111020520B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/52—Means for observation of the coating process
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Testing And Monitoring For Control Systems (AREA)
Abstract
The invention discloses a method for improving the treatment efficiency and safety of a vapor deposition furnace, which is characterized by comprising the following steps of: step one, starting an initial picture, and pressing a 'enter work system' key to enter a main control picture; step two, the function button is responsible for switching screens, namely atmosphere control, temperature control, heating process, historical data and event record; step three, setting a temperature control program; step four, heating control; and step five, controlling the lamp cap to move. According to the invention, the lamp cap is controlled to move, the rapid and slow speed change in the folding process is adopted to be matched with the temperature of a deposition part, so that the temperature difference of deposition of each point is the same, the thermal effect is similar, the spindle shape is avoided, the diameter shifting range is reduced, and the two ends are more uniform.
Description
Technical Field
The invention relates to the technical field of vapor deposition, in particular to a method for improving the treatment efficiency and safety of a vapor deposition furnace.
Background
Vapor deposition techniques utilize physical and chemical processes that occur in the vapor phase to form functional or decorative metallic, non-metallic, or compound coatings on the surface of a workpiece. The vapor deposition technology can be divided into chemical vapor deposition, physical vapor deposition and plasma vapor deposition according to a film forming mechanism; the existing vapor deposition process adopts OVD process to deposit, the deposition principle of 0VD is thermophoretic motion of particles, and the deposition process of the particles is a heat and mass transfer process.
The vapor deposition process mainly depends on the flow rate and temperature of the gas around the preform, and therefore heat conduction and particle deposition are the most critical issues in 0VD, such as the moving speed of the preform, the flow rate of carrier oxygen, the moving mode of the rod, etc., the deposition rate and rotating speed, the radius of the preform, the distance from the burner to the center of the preform, the radius of the burner, the jet speed of the burner, and the temperatures of the jet, air and preform surface, etc., wherein the influence of the burner movement on the vapor deposition efficiency is the most significant.
Disclosure of Invention
The invention aims to: the method for improving the treatment efficiency and the safety of the vapor deposition furnace is provided in order to solve the problem that the vapor deposition efficiency is obviously influenced by the movement of the lamp holder.
In order to achieve the purpose, the invention adopts the following technical scheme:
a method for improving the treatment efficiency and safety of a vapor deposition furnace is characterized by comprising the following steps:
starting an initial picture, pressing a 'enter work system' key to enter a main control picture, starting work, monitoring the whole system by a main control panel in the working process of the system, and reflecting main parameters of the system in operation in the main control panel;
step two, the function button is responsible for switching the screen, switching the atmosphere control to the control picture of the evacuation pipeline, switching the temperature control to the control picture related to the temperature parameter, switching the heating process to the temperature parameter setting picture, switching the historical data to the past parameter recording picture, and switching the event record to the event record information picture occurring in the past operation process;
setting a temperature control program, selecting a process curve to be operated, operating, resetting, suspending and displaying the current set value, and finishing different control functions according to set different parameters;
heating control, namely controlling the heating power supply of the power cabinet to be switched on and off, and displaying the switching condition of the three power supplies and abnormal state alarm display;
and step five, controlling the movement of the lamp cap, and matching the speed change of the lamp cap in the turning process with the temperature direction of the deposition position to ensure that the temperature difference of the deposition of each point is the same and the heat utilization effect is similar.
As a further description of the above technical solution:
in the second step, the 'atmosphere control' inflation electric butterfly valve regulator is a reverse regulator, and the evacuation electric butterfly valve regulator is a forward regulator, (1) the working states of the electric butterfly valve are displayed to comprise a servo state and a power-off state; (2) displaying the absolute pressure value in the furnace, and intercepting the pressure value within 1000Pa as the control feedback quantity for regulation; (3) controlling the set value in real time, and keeping the pressure in the furnace constant by setting the parameter, wherein the inflation butterfly valve and the evacuation butterfly valve are required to be matched for action; (4) the controller outputs an indication, and the indicator lights are gradually lightened along with the increase of the output quantity; (5) the controller manually indicates and displays the current working state of the controller; (6) the controller outputs an instruction, and the instruction progress bars are sequentially and completely lightened rightwards along with the increase of the output quantity; (7) the control button of the working state of the electric butterfly valve is pressed to serve the butterfly valve when the button displays the servo state, and displays power failure, and is pressed again, the butterfly valve is powered off and displays servo, and the two controllers are completely the same in operation.
As a further description of the above technical solution:
and in the second step, the 'historical data' picture displays the occurrence time in the production process, such as the opening and closing time of a valve, the heating opening and closing time and the manual working time.
In summary, due to the adoption of the technical scheme, the invention has the beneficial effects that:
1. according to the invention, the lamp cap is controlled to move, the rapid and slow speed change in the folding process is adopted to be matched with the temperature of a deposition part, so that the temperature difference of deposition of each point is the same, the thermal effect is similar, the spindle shape is avoided, the diameter shifting range is reduced, and the two ends are more uniform.
2. In the invention, the atmosphere control in the control panel is switched to the control picture of the evacuation pipeline, the temperature control is switched to the control picture related to the temperature parameter, the heating process is switched to the temperature parameter setting picture, the historical data is switched to the past parameter recording picture, the event record is switched to the event record information picture generated in the past operation process, the atmosphere control inflation electric butterfly valve regulator is a reverse regulator, and the evacuation electric butterfly valve regulator is a forward regulator, so that the method is simple and convenient.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
A method for improving the treatment efficiency and safety of a vapor deposition furnace is characterized by comprising the following steps:
starting an initial picture, pressing a key of entering a working system to enter a main control picture, starting working, wherein a main control panel plays a role in monitoring the whole system working process, and main parameters of the system in operation are reflected in the main control panel, (1) heating the working state of a magnetic pressure regulator, and displaying two states of normal and fault; (2) the alarm scroll bar displays the power-on state and has an alarm mark; (3) displaying a real-time curve to reflect the current change rule of three temperatures and one absolute pressure along with time; (4) displaying absolute pressure value in the furnace to reflect the gas pressure in the internal work; (5) the electric butterfly valve on the inflation pipeline displays the working states of the valve, including servo, power-off state and the current opening size of the valve position; (6) displaying the temperature values of the three temperature zones in the furnace, and reflecting the temperatures of three different parts during internal work; (7) the schematic bars show the gas flow direction; the electric butterfly valve on the evacuation pipeline is used for displaying the working states of the valve, including servo, power-off states and the current opening degree of the valve position; (9) the schematic bars show the gas flow direction; (10) the No. 1 vacuum electric butterfly valve on the evacuation pipeline displays the working states of the valve including servo, power-off state and the current opening size of the valve position; (11) the 2# vacuum electric butterfly valve on the evacuation pipeline displays the working states of the valve including servo, power-off states and the current opening size of the valve position; (12) a No. 1 sliding valve pump on the evacuation pipeline, and the working states of the valve are displayed to comprise normal operation and fault states; (13) 2# slide valve pump on the evacuation pipeline, and the working state of the valve is displayed to comprise normal operation and fault state;
step two, the function button is responsible for switching screens, the atmosphere control is switched to a control picture of an evacuation pipeline, the temperature control is switched to a control picture related to temperature parameters, the heating process is switched to a temperature parameter setting picture, historical data is switched to a past parameter recording picture, event records are switched to an event recording information picture generated in the past operation process, the atmosphere control inflation electric butterfly valve regulator is a reverse regulator, the evacuation electric butterfly valve regulator is a forward regulator, and (1) the working states of the electric butterfly valve are displayed and comprise servo and power-off states; (2) displaying the absolute pressure value in the furnace, and intercepting the pressure value within 1000Pa as the control feedback quantity for regulation; (3) controlling the set value in real time, and keeping the pressure in the furnace constant by setting the parameter, wherein the inflation butterfly valve and the evacuation butterfly valve are required to be matched for action; (4) the controller outputs an indication, and the indicator lights are gradually lightened along with the increase of the output quantity; (5) the controller manually indicates and displays the current working state of the controller; (6) the controller outputs an instruction, and the instruction progress bars are sequentially and completely lightened rightwards along with the increase of the output quantity; (7) when the button displays the servo state, the button is pressed to serve the butterfly valve, displays power failure, and is pressed again, the butterfly valve is powered off and displays servo, and the two controllers operate completely the same;
setting a temperature control program, selecting a process curve to be operated, operating, resetting, pausing and displaying a current set value, and finishing different control functions according to different set parameters, wherein a 'historical data' picture displays occurrence time in the production process, such as valve opening and closing time, heating opening and closing time and manual working time;
heating control, namely controlling the heating power supply of the power cabinet to be switched on and off, and displaying the switching condition of the three power supplies and abnormal state alarm display;
and step five, controlling the movement of the lamp cap, and matching the temperature of the deposition part with the rapid and slow speed change in the folding process to ensure that the temperature difference of each point deposition is the same, the thermal effect is similar, and the spindle shape is avoided, so that the diameter shifting range is reduced, and the two ends are more uniform.
Example 2
A method for improving the treatment efficiency and safety of a vapor deposition furnace is characterized by comprising the following steps:
starting an initial picture, pressing a key of entering a working system to enter a main control picture, starting working, wherein a main control panel plays a role in monitoring the whole system working process, and main parameters of the system in operation are reflected in the main control panel, (1) heating the working state of a magnetic pressure regulator, and displaying two states of normal and fault; (2) the alarm scroll bar displays the power-on state and has an alarm mark; (3) displaying a real-time curve to reflect the current change rule of three temperatures and one absolute pressure along with time; (4) displaying absolute pressure value in the furnace to reflect the gas pressure in the internal work; (5) the electric butterfly valve on the inflation pipeline displays the working states of the valve, including servo, power-off state and the current opening size of the valve position; (6) displaying the temperature values of the three temperature zones in the furnace, and reflecting the temperatures of three different parts during internal work; (7) the schematic bars show the gas flow direction; the electric butterfly valve on the evacuation pipeline is used for displaying the working states of the valve, including servo, power-off states and the current opening degree of the valve position; (9) the schematic bars show the gas flow direction; (10) the No. 1 vacuum electric butterfly valve on the evacuation pipeline displays the working states of the valve including servo, power-off state and the current opening size of the valve position; (11) the 2# vacuum electric butterfly valve on the evacuation pipeline displays the working states of the valve including servo, power-off states and the current opening size of the valve position; (12) a No. 1 sliding valve pump on the evacuation pipeline, and the working states of the valve are displayed to comprise normal operation and fault states; (13) 2# slide valve pump on the evacuation pipeline, and the working state of the valve is displayed to comprise normal operation and fault state;
step two, the function button is responsible for switching screens, the atmosphere control is switched to a control picture of an evacuation pipeline, the temperature control is switched to a control picture related to temperature parameters, the heating process is switched to a temperature parameter setting picture, historical data is switched to a past parameter recording picture, event records are switched to an event recording information picture generated in the past operation process, the atmosphere control inflation electric butterfly valve regulator is a reverse regulator, the evacuation electric butterfly valve regulator is a forward regulator, and (1) the working states of the electric butterfly valve are displayed and comprise servo and power-off states; (2) displaying the absolute pressure value in the furnace, and intercepting the pressure value within 1000Pa as the control feedback quantity for regulation; (3) controlling the set value in real time, and keeping the pressure in the furnace constant by setting the parameter, wherein the inflation butterfly valve and the evacuation butterfly valve are required to be matched for action; (4) the controller outputs an indication, and the indicator lights are gradually lightened along with the increase of the output quantity; (5) the controller manually indicates and displays the current working state of the controller; (6) the controller outputs an instruction, and the instruction progress bars are sequentially and completely lightened rightwards along with the increase of the output quantity; (7) when the button displays the servo state, the button is pressed to serve the butterfly valve, displays power failure, and is pressed again, the butterfly valve is powered off and displays servo, and the two controllers operate completely the same;
setting a temperature control program, selecting a process curve to be operated, operating, resetting, pausing and displaying a current set value, and finishing different control functions according to different set parameters, wherein a 'historical data' picture displays occurrence time in the production process, such as valve opening and closing time, heating opening and closing time and manual working time;
heating control, namely controlling the heating power supply of the power cabinet to be switched on and off, and displaying the switching condition of the three power supplies and abnormal state alarm display;
and step five, controlling the lamp cap to move, depositing back and forth at the same speed, and when two ends are folded back, enabling the part of the cylinder burnt by flame to have high temperature, then enabling the part to enter a new high-temperature region, wherein the temperature difference is small, the thermophoresis effect is not strong, the diameters of two ends of the rod are smaller than the diameter of the middle part, and the part rapidly enters the high-temperature region to have an obvious sintering effect on original surface particles, so that the density is more compact.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (3)
1. A method for improving the treatment efficiency and safety of a vapor deposition furnace is characterized by comprising the following steps:
starting an initial picture, pressing a 'enter work system' key to enter a main control picture, starting work, monitoring the whole system by a main control panel in the working process of the system, and reflecting main parameters of the system in operation in the main control panel;
step two, the function button is responsible for switching the screen, switching the atmosphere control to the control picture of the evacuation pipeline, switching the temperature control to the control picture related to the temperature parameter, switching the heating process to the temperature parameter setting picture, switching the historical data to the past parameter recording picture, and switching the event record to the event record information picture occurring in the past operation process;
setting a temperature control program, selecting a process curve to be operated, operating, resetting, suspending and displaying the current set value, and finishing different control functions according to set different parameters;
heating control, namely controlling the heating power supply of the power cabinet to be switched on and off, and displaying the switching condition of the three power supplies and abnormal state alarm display;
and step five, controlling the movement of the lamp cap, and matching the speed change of the lamp cap in the turning process with the temperature direction of the deposition position to ensure that the temperature difference of the deposition of each point is the same and the heat utilization effect is similar.
2. The method according to claim 1, wherein in step two, the "atmosphere control" inflation electric butterfly valve regulator is a reverse regulator, the evacuation electric butterfly valve regulator is a forward regulator, and (1) the operation status of the electric butterfly valve is displayed to include a servo-off status; (2) displaying the absolute pressure value in the furnace, and intercepting the pressure value within 1000Pa as the control feedback quantity for regulation; (3) controlling the set value in real time, and keeping the pressure in the furnace constant by setting the parameter, wherein the inflation butterfly valve and the evacuation butterfly valve are required to be matched for action; (4) the controller outputs an indication, and the indicator lights are gradually lightened along with the increase of the output quantity; (5) the controller manually indicates and displays the current working state of the controller; (6) the controller outputs an instruction, and the instruction progress bars are sequentially and completely lightened rightwards along with the increase of the output quantity; (7) the control button of the working state of the electric butterfly valve is pressed to serve the butterfly valve when the button displays the servo state, and displays power failure, and is pressed again, the butterfly valve is powered off and displays servo, and the two controllers are completely the same in operation.
3. The method of claim 1, wherein the "historical data" display in step two indicates the time of occurrence in the production process.
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| CN201911214767.3A CN111020520B (en) | 2019-12-02 | 2019-12-02 | Method for improving treatment efficiency and safety of vapor deposition furnace |
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| CN201911214767.3A CN111020520B (en) | 2019-12-02 | 2019-12-02 | Method for improving treatment efficiency and safety of vapor deposition furnace |
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| CN111020520A CN111020520A (en) | 2020-04-17 |
| CN111020520B true CN111020520B (en) | 2021-02-19 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101451233A (en) * | 2007-11-28 | 2009-06-10 | 中国科学院沈阳科学仪器研制中心有限公司 | Motion control device of rectangle sample magnetron sputtering instrument and control method thereof |
| CN208087493U (en) * | 2017-12-20 | 2018-11-13 | 藤仓烽火光电材料科技有限公司 | It is set to the makeup of tolerance glass granules depositing homogeneous based on the control of OVD |
| CN211111720U (en) * | 2019-08-23 | 2020-07-28 | 藤仓烽火光电材料科技有限公司 | Loose body deposition device and OVD process equipment |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002063354A1 (en) * | 2001-01-30 | 2002-08-15 | Sumitomo Electric Industries, Ltd. | Method and apparatus for manufacturing optical fiber |
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2019
- 2019-12-02 CN CN201911214767.3A patent/CN111020520B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101451233A (en) * | 2007-11-28 | 2009-06-10 | 中国科学院沈阳科学仪器研制中心有限公司 | Motion control device of rectangle sample magnetron sputtering instrument and control method thereof |
| CN208087493U (en) * | 2017-12-20 | 2018-11-13 | 藤仓烽火光电材料科技有限公司 | It is set to the makeup of tolerance glass granules depositing homogeneous based on the control of OVD |
| CN211111720U (en) * | 2019-08-23 | 2020-07-28 | 藤仓烽火光电材料科技有限公司 | Loose body deposition device and OVD process equipment |
Non-Patent Citations (1)
| Title |
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| 面向多喷灯沉积技术的光纤预制棒外径波动控制研究;章海峰等;《现代传输》;20141231(第3期);第67-69页 * |
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