CN111015501A - Secondary grinding equipment for producing chip silicon - Google Patents

Secondary grinding equipment for producing chip silicon Download PDF

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Publication number
CN111015501A
CN111015501A CN201911164987.XA CN201911164987A CN111015501A CN 111015501 A CN111015501 A CN 111015501A CN 201911164987 A CN201911164987 A CN 201911164987A CN 111015501 A CN111015501 A CN 111015501A
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CN
China
Prior art keywords
plate
rigid coupling
grinding
rectangle
motor
Prior art date
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Granted
Application number
CN201911164987.XA
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Chinese (zh)
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CN111015501B (en
Inventor
姚鑫
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Datong Xincheng New Material Co Ltd
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Datong Xincheng New Material Co Ltd
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Priority to CN201911164987.XA priority Critical patent/CN111015501B/en
Publication of CN111015501A publication Critical patent/CN111015501A/en
Application granted granted Critical
Publication of CN111015501B publication Critical patent/CN111015501B/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/27Work carriers
    • B24B37/28Work carriers for double side lapping of plane surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/34Accessories
    • B24B37/345Feeding, loading or unloading work specially adapted to lapping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00Drives or gearings; Equipment therefor
    • B24B47/10Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • B24B47/12Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/06Dust extraction equipment on grinding or polishing machines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers

Abstract

The invention discloses secondary grinding equipment for producing chip silicon, which comprises a bottom plate, wherein a supporting plate is arranged below the bottom plate, the top surface of the supporting plate is provided with a distribution box, an air blower, a rotating shaft and a rotating shaft, the rotating shaft is provided with a driven gear, a supporting plate, a first electric push rod and a lower grinding plate, one side of the driven gear is meshed with a driving gear, the top surface of the bottom plate is provided with two limiting plates, a translation motor and a supporting column, the top end of the supporting column is fixedly connected with a fixing plate, the bottom surface of the fixing plate is provided with a surface detection lamp, a rotating motor and a dust blowing gun, the dust blowing gun is fixedly connected with an air guide tube, the rotating motor is provided with an upper grinding plate, the rotating motor is in transmission connection with the rotating shaft, a lead screw. The invention is easy to operate and convenient to use, and effectively improves the processing efficiency of the silicon wafer.

Description

Secondary grinding equipment for producing chip silicon
Technical Field
The invention relates to the technical field of chip silicon production equipment, in particular to secondary grinding equipment for producing chip silicon.
Background
The silicon element with the content of 25.8 percent in the crust provides an inexhaustible source for the production of monocrystalline silicon. Since silicon is one of the most abundant elements in the earth's crust, the reserve advantage is also one of the reasons that silicon is the main material for photovoltaics for solar cells, such as those products destined for large-scale market. The silicon chip is composed of silicon element.
When the existing silicon wafer grinding processing equipment grinds a wafer, the upper surface of the silicon wafer is usually ground firstly, then the other surface of the silicon wafer is ground by overturning 180 degrees, the labor intensity of workers is increased undoubtedly, the defect of discontinuous grinding is also existed, the grinding efficiency is reduced, and the existing grinding equipment can not detect and remove impurities on the surface of the silicon wafer simultaneously after grinding is finished, the silicon wafer needs to be taken down, and the detection and the impurity removal are carried out manually, so that the time and the labor are wasted.
Disclosure of Invention
The invention aims to solve the defects in the prior art and provides a secondary grinding device for producing chip silicon.
In order to achieve the purpose, the invention adopts the following technical scheme:
a secondary grinding device for producing chip silicon comprises a bottom plate, wherein the bottom plate is rectangular, rectangular support rods are fixedly connected with four corners of the bottom surface of the bottom plate, a rectangular support plate is arranged below the bottom surface of the bottom plate, two ends of two side surfaces of the support plate are fixedly connected with one side surface of the corresponding support rod, one end of the top surface of the support plate is provided with a distribution box, the other end of the top surface of the support plate is provided with an air blower, an air outlet of the air blower is fixedly connected with an air guide pipe, the middle part of the bottom surface of the bottom plate is rotatably connected with a rotating shaft, the middle part of the rotating shaft is fixedly connected with a driven gear, the top of the rotating shaft is fixedly connected with a support plate, the middle part of the top surface of the support plate is, the bottom end of the rotating shaft is rotatably connected with the supporting plate, rectangular limiting plates are arranged on the top surface and the middle part of one end of the bottom plate along the width direction, the top surface of one end of the bottom plate is provided with a translation motor, the top surface of the other end of the bottom plate is fixedly connected with a cylindrical supporting column, the top end of the supporting column is fixedly connected with a rectangular fixing plate, a surface detection lamp is arranged on the bottom surface of one end of the fixing plate, the middle part of the bottom surface of the fixing plate is fixedly connected with a fixing rod, the lower end of the fixing rod is fixedly connected with a fixing frame, a rotating motor is arranged in the fixing frame, one side of the middle part of the bottom surface of the fixing plate is provided with a dust blowing gun, an air inlet of the dust blowing gun is fixedly connected with an air outlet of, the lead screw both ends all correspond limiting plate one end side and rotate the connection, the slide bar both ends all with correspond limiting plate one end side rigid coupling, the last screwed connection of lead screw has the translation board of rectangle form, the other pot head of translation board is established on the slide bar, translation board top surface is equipped with the centre gripping frame of U-shaped, centre gripping frame one end side articulates there is the locating plate of rectangle form, bottom plate one end top surface is equipped with oval-shaped opening, go up abrasive disc and lower abrasive disc and all be located opening one end top.
Preferably, the bottom end of the rotating shaft is fixedly connected with a rotating bearing, a circular fixing groove is formed in the middle of the bottom surface of the supporting plate, and the rotating bearing is fixedly connected with the inner wall of the fixing groove.
Preferably, axis of rotation top rigid coupling driven pulley, the motor shaft upper end rigid coupling of rotating the motor has drive pulley, drive pulley passes through belt transmission with driven pulley and is connected, backup pad top surface middle part one side is equipped with support bearing, axis of rotation bottom and support bearing inner wall rigid coupling, the bottom plate top surface is equipped with spacing bearing, axis of rotation middle part outer wall and spacing bearing inner wall rigid coupling.
Preferably, fixed plate bottom surface one end fixed connection pole, the connecting rod lower extreme is equipped with the mounting groove of rectangle form, surface detection lamp top surface rigid coupling has the fixed block of rectangle form, the fixed block is located the mounting groove, and through the bolt rigid coupling.
Preferably, translation board top surface is equipped with second electric putter, second electric putter expansion end rigid coupling has the connecting block of rectangle form, be equipped with the connection bearing in the connecting block, a connecting block side is equipped with the spacer pin, the columniform connecting rod of centre gripping frame side middle part rigid coupling, the connecting rod other end and connection bearing inner wall rigid coupling, be equipped with the spacing hole of circular shape on the connecting rod, spacer pin the inner is located spacing downthehole, translation board one end is equipped with screw nut along length direction, screw nut and lead screw threaded connection, the translation board other end is equipped with the circular shape through-hole along length direction, the slide bar is located the through-hole.
Preferably, centre gripping frame one end side is equipped with the location screw, a locating plate side is equipped with positioning screw, positioning screw and location screw screwed connection, the concave standing groove that is equipped with the rectangle form of surface in each side of centre gripping frame, the equal rigid coupling of bottom surface has the lower grip block of rectangle form in every standing groove, and every lower grip block one end top surface all is equipped with supporting spring, and the equal rigid coupling of every supporting spring other end has last grip block, centre gripping frame each side top surface middle part all is equipped with fastening screw, and every fastening screw the inner all with correspond the contact of grip block top surface, locating plate internal surface middle part is equipped with the spacing groove of rectangle form, spacing groove both sides face all is equipped with spacing opening.
Compared with the prior art, the invention has the beneficial effects that:
1. the upper and lower surfaces of the silicon wafer are conveniently ground simultaneously by the matching of the rotating motor, the upper grinding disc, the lower grinding disc, the rotating shaft, the belt, the driving gear, the driven gear, the first electric push rod and the rotating shaft with the clamping frame, so that the grinding efficiency is effectively improved;
2. through the matching of the arranged surface detection lamp, the air blower, the dust blowing gun and the connecting block with the clamping frame, the upper surface and the lower surface of the silicon wafer can be detected and subjected to impurity removal after grinding, the processing efficiency of the silicon wafer is effectively improved, the labor intensity of workers is reduced, and time and labor are saved;
in conclusion, the silicon wafer processing device is simple in structure and convenient to use, and effectively improves the silicon wafer processing efficiency.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:
FIG. 1 is a front view of a secondary grinding apparatus for use in the production of silicon chips according to the present invention;
FIG. 2 is a left side view of a secondary grinding apparatus for use in the production of silicon chips according to the present invention;
FIG. 3 is a top view of a clamping frame of a secondary grinding apparatus for producing silicon chips according to the present invention;
FIG. 4 is a right side view of a clamping frame of a secondary grinding apparatus for producing silicon chips according to the present invention;
FIG. 5 is an enlarged view of the second grinding apparatus for producing silicon chips according to the present invention, which is shown at A in FIG. 3;
FIG. 6 is a flow chart of a method for using a secondary grinding apparatus for producing silicon chips according to the present invention;
number in the figure: the dust blowing device comprises a bottom plate 1, a supporting plate 2, a supporting column 3, an air blower 4, an air guide pipe 5, a fixing plate 6, a connecting rod 7, a surface detection lamp 8, a dust blowing gun 9, a fixing rod 10, a rotating motor 11, a fixing frame 12, a belt 13, an upper grinding disc 14, a lower grinding disc 15, a rotating shaft 16, a first electric push rod 17, a driving gear 18, a supporting disc 19, a rotating shaft 20, a driven gear 21, a distribution box 22, a translation motor 23, a limiting plate 24, a lead screw 25, a sliding rod 26, a translation plate 27, a second electric push rod 28, a connecting block 29, a clamping frame 30, a positioning plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Example (b): referring to fig. 1-5, a second grade grinding device for producing chip silicon comprises a bottom plate 1, wherein the bottom plate 1 is rectangular, rectangular support rods 38 are fixedly connected to four corners of the bottom surface of the bottom plate 1, a rectangular support plate 2 is arranged below the bottom surface of the bottom plate 1, two ends of two side surfaces of the support plate 2 are fixedly connected to one side surface of the corresponding support rod 38, a distribution box 22 is arranged at one end of the top surface of the support plate 2, an air blower 4 is arranged at the other end of the top surface of the support plate 2, the air blower 4 is of the type TD-550W, an air outlet of the air blower 4 is fixedly connected with an air duct 5, a rotating shaft 20 is rotatably connected to the middle part of the bottom surface of the bottom plate 1, a driven gear 21 is fixedly connected to the middle part of the rotating shaft 20, a support plate 19 is fixedly connected to the top surface of the support, the dust blowing device is characterized in that a driving gear 18 is meshed on one side of a driven gear 21, the driving gear 18 is fixed at the lower end of a rotating shaft 16, the bottom end of the rotating shaft 16 is rotatably connected with a supporting plate 2, rectangular limiting plates 24 are arranged on the top surface and the middle portion of one end of a bottom plate 1 in the width direction, a translation motor 23 is arranged on the top surface of one end of the bottom plate 1, a cylindrical supporting column 3 is fixedly connected to the top surface of the other end of the bottom plate 1, a rectangular fixing plate 6 is fixedly connected to the top end of the supporting column 3, a surface detection lamp 8 is arranged on the bottom surface of one end of the fixing plate 6, a fixing rod 10 is fixedly connected to the middle portion of the bottom surface of the fixing plate 6, a fixing frame 12 is fixedly connected to the lower end of the fixing rod 10, a rotating motor 11 is, the motor shaft bottom rigid coupling that rotates motor 11 has circular shape to go up abrasive disc 14, the motor shaft that rotates motor 11 is connected with the transmission of axis of rotation 16, 1 top surface one side of bottom plate is equipped with lead screw 25, the opposite side is equipped with columniform slide bar 26, the lead screw 25 both ends all correspond limiting plate 24 one end side and rotate the connection, slide bar 26 both ends all with correspond 24 one end side rigid couplings of limiting plate, threaded connection has the translation board 27 of rectangle form on the lead screw 25, the 27 other pot heads of translation board are established on slide bar 26, the 27 top surface of translation board is equipped with the centre gripping frame 30 of U-shaped, 30 one end sides of centre gripping frame articulate has the locating plate 32 of rectangle form, 1 one end top surface of bottom plate is equipped with oval-shaped opening, it all is located opening one end top with lower.
In the invention, a rotary bearing is fixedly connected to the bottom end of the rotating shaft 20, a circular fixing groove is arranged in the middle of the bottom surface of the supporting plate 2, and the rotary bearing is fixedly connected with the inner wall of the fixing groove.
In the invention, the top end of the rotating shaft 16 is fixedly connected with a driven belt pulley, the upper end of a motor shaft of the rotating motor 12 is fixedly connected with a driving belt pulley, the driving belt pulley is in transmission connection with the driven belt pulley through a belt 13, one side of the middle part of the top surface of the supporting plate 2 is provided with a supporting bearing, the bottom end of the rotating shaft 16 is fixedly connected with the inner wall of the supporting bearing, the top surface of the bottom plate 1 is provided with a limiting bearing, and the outer wall of the middle part of.
In the invention, one end of the bottom surface of a fixed plate 6 is fixedly provided with a connecting rod 7, the connecting rod 7 is provided with a rectangular mounting groove at the lower end of the connecting rod 7, a rectangular fixed block is fixedly connected to the top surface of a surface detection lamp 8, the fixed block is positioned in the mounting groove and fixedly connected through a bolt, and the type of the surface detection lamp 8 is FY-100 RC.
In the invention, a second electric push rod 28 is arranged on the top surface of the translation plate 27, a rectangular connecting block 29 is fixedly connected to the movable end of the second electric push rod 28, a connecting bearing is arranged in the connecting block 29, a limiting pin 37 is arranged on one side surface of the connecting block 29, a cylindrical connecting rod is fixedly connected to the middle of one side surface of the clamping frame 30, the other end of the connecting rod is fixedly connected to the inner wall of the connecting bearing, a circular limiting hole is arranged in the connecting rod, the inner end of the limiting pin 37 is located in the limiting hole, a screw nut is arranged at one end of the translation plate 27 along the length direction and is in threaded connection with a screw 25, a circular through hole is arranged at the other end of the translation plate 27 along.
In the invention, a positioning screw hole is arranged on one side surface of one end of the clamping frame 30, a positioning screw 36 is arranged on one side surface of the positioning plate 32, the positioning screw 36 is in screw connection with the positioning screw hole, rectangular placing grooves are concavely arranged on the inner surface of each side of the clamping frame 30, a rectangular lower clamping plate 34 is fixedly connected to the inner bottom surface of each placing groove, a supporting spring 35 is arranged on the top surface of one end of each lower clamping plate 34, an upper clamping plate 33 is fixedly connected to the other end of each supporting spring 35, a fastening screw 31 is arranged in the middle of the top surface of each side of the clamping frame 30, the inner end of each fastening screw 31 is in contact with the top surface of the corresponding upper clamping plate 33, a rectangular limiting groove is arranged in the middle of the inner surface of the positioning plate 32.
In the invention, a translation motor 23, a rotating motor 11, a first electric push rod 17, a second electric push rod 28, a surface detection lamp 8 and a control switch of an air blower 4 are arranged on one side surface of a bottom plate 1, a power switch is arranged in a distribution box 22 and is connected with an external power supply through a lead, a translation motor control switch is connected in series between the power switch and the translation motor 23 through a lead, a rotating motor control switch is connected in series between the power switch and the rotating motor 11 through a lead, the control switches of the translation motor 23 and the rotating motor 11 are both LW26-20 in types, a first electric push rod control switch is connected in series between the power switch and the first electric push rod 17, a second electric push rod control switch is connected in series between the power switch and the second electric push rod 28, and a surface detection lamp control switch is connected in series between the power switch and the surface detection lamp 8, and a blower switch is connected in series between the power switch and the blower 4 through a lead.
When the silicon wafer clamping device is used, referring to fig. 6, a power switch in a distribution box 22 is connected with an external power supply, the power switch is turned on, then a positioning screw 36 is rotated in the direction, the positioning screw 36 moves outwards until one end of a positioning plate 32 corresponding to the clamping frame 30 is separated from the clamping frame, the positioning plate 32 rotates towards the other side of the clamping frame 30, then a silicon wafer is placed in the clamping frame, the silicon wafer is placed on a corresponding lower clamping plate 34, then a fastening screw 31 is rotated in the forward direction, the fastening screw 31 moves downwards, the fastening screw 31 compresses a supporting spring 35, the supporting spring 35 drives the upper clamping plate 33 to move downwards until the bottom surface of the upper clamping plate 33 is contacted with the upper surface of the silicon wafer, then the positioning plate 32 is rotated, the inner surface of one end of the positioning plate 32 is aligned with one end of the clamping frame 30 corresponding to the clamping frame, then the positioning screw 36 is rotated in the reverse direction, the positioning screw, controlling the translation motor 23 to rotate forwards, the translation motor 23 driving the lead screw 25 to rotate, the lead screw 25 driving the translation plate 27 to move inwards, the translation plate 27 driving the second electric push rod 28 to move inwards, the second electric push rod 28 driving the connecting block 29 to move inwards, the connecting block 29 driving the clamping frame 30 to move inwards, the clamping frame 30 driving the silicon wafer to move inwards until the silicon wafer is positioned between the upper grinding disc 14 and the lower grinding disc 15, stopping the rotation of the translation motor 23, controlling the extension of the second electric push rod 28, the second electric push rod 28 driving the connecting block 29 to move upwards, the connecting block 29 driving the clamping frame 30 to move upwards, the clamping frame 30 driving the silicon wafer to move upwards until the upper surface of the silicon wafer contacts with the bottom surface of the upper grinding disc 14, controlling the second electric push rod 28 to stop extending, then controlling the extension of the first electric push rod 17, the first electric push rod 17 driving the lower grinding disc 15 to move upwards until the top surface of the, then the rotating motor 11 is controlled to rotate, the rotating motor 11 drives the upper grinding disc 14 and the driving pulley to rotate, the upper grinding disc 14 grinds the upper surface of the silicon wafer, the driving pulley drives the belt 13 to rotate, the belt 13 drives the driven pulley to rotate, the driven pulley drives the rotating shaft 16 to rotate, the rotating shaft 16 drives the driving gear 18 to rotate, the driving gear 18 drives the driven gear 21 to rotate, the driven gear 21 drives the rotating shaft 20 to rotate, the rotating shaft 20 drives the supporting disc 19 to rotate, the supporting disc 19 drives the first electric push rod 17 to rotate, the first electric push rod 17 drives the lower grinding disc 15 to rotate, the lower grinding disc 15 grinds the lower surface of the silicon wafer, after grinding is finished, the rotating motor 11 is controlled to stop rotating, then the translation motor 23 is controlled to rotate reversely, the translation motor 23 drives the screw 25 to rotate reversely, the screw 25 drives the translation plate 27, after moving suitable position, control translation motor 23 stall, then open surface detection lamp 8 and air-blower 4, take off and blow dirt rifle 9, air-blower 4 draws the air from the external world and then transmits for blowing dirt rifle 9 through the air duct, blow away the impurity of silicon chip upper surface through blowing dirt rifle 6, can find out through the light of surface detection lamp 8 whether there is mar and impurity on the silicon chip surface, after the silicon chip upper surface detects, extract spacer pin 37, reverse centre gripping frame 30, make the silicon chip lower surface be located the top, then blow away the impurity on the silicon chip lower surface and detect, after the silicon chip upper and lower surface detects, forward rotates positioning screw 36, rotate positioning plate 32, take off the silicon chip, then fix positioning plate 32, close the power.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.

Claims (6)

1. The utility model provides a second grade grinding equipment that chip silicon production used, includes bottom plate (1), its characterized in that: the grinding machine is characterized in that the bottom plate (1) is rectangular, the bottom plate (1) is fixedly connected with rectangular support rods (38) at four corners of the bottom surface of the bottom plate (1), a rectangular support plate (2) is arranged below the bottom surface of the bottom plate (1), two ends of two side surfaces of the support plate (2) are fixedly connected with one side surface of the corresponding support rod (38), one end of the top surface of the support plate (2) is provided with a distribution box (22), the other end of the top surface of the support plate (2) is provided with an air blower (4), an air duct (5) is fixedly connected with an air outlet of the air blower (4), the middle part of the bottom surface of the bottom plate (1) is rotatably connected with a rotating shaft (20), the middle part of the rotating shaft (20) is fixedly connected with a driven gear (21), the top part of the rotating shaft (20) is fixedly connected with a support, driven gear (21) one side meshing has driving gear (18), driving gear (18) are fixed at axis of rotation (16) lower extreme, axis of rotation (16) bottom is rotated with backup pad (2) and is connected, bottom plate (1) one end top surface and middle part all are equipped with limiting plate (24) that are equipped with the rectangle form along width direction, bottom plate (1) one end top surface is equipped with translation motor (23), bottom plate (1) other end top surface rigid coupling has columniform support column (3), support column (3) top rigid coupling has rectangular fixed plate (6), fixed plate (6) one end bottom surface is equipped with surface detection lamp (8), fixed plate (6) bottom surface middle part rigid coupling has dead lever (10), dead lever (10) lower extreme rigid coupling has fixed frame (12), be equipped with in fixed frame (12) and rotate motor (11), fixed plate (6) bottom surface middle part one side is equipped with blows dirt rifle (9), air inlet of blowing dirt rifle (9) and the gas outlet rigid coupling of air duct (5), the motor shaft bottom rigid coupling of rotating motor (11) has circular shape and goes up abrasive disc (14), the motor shaft that rotates motor (11) is connected with axis of rotation (16) transmission, bottom plate (1) top surface one side is equipped with lead screw (25), the opposite side is equipped with columniform slide bar (26), lead screw (25) both ends all correspond limiting plate (24) one end side and rotate the connection, slide bar (26) both ends all with correspond limiting plate (24) one end side rigid coupling, threaded connection has the translation board (27) of rectangle form on lead screw (25), translation board (27) other pot head is established on slide bar (26), translation board (27) top surface is equipped with centre gripping frame (30) of U-shaped, centre gripping frame (30) one end side articulates there is locating plate (32) of rectangle form, the grinding device is characterized in that an oval opening is formed in the top face of one end of the bottom plate (1), and the upper grinding disc (14) and the lower grinding disc (15) are located above one end of the opening.
2. The secondary grinding equipment for producing chip silicon as claimed in claim 1, wherein: the bottom end of the rotating shaft (20) is fixedly connected with a rotating bearing, a circular fixing groove is formed in the middle of the bottom surface of the supporting plate (2), and the rotating bearing is fixedly connected with the inner wall of the fixing groove.
3. The secondary grinding equipment for producing chip silicon as claimed in claim 1, wherein: axis of rotation (16) top rigid coupling driven pulley, the motor shaft upper end rigid coupling that rotates motor (12) has drive pulley, drive pulley passes through belt (13) transmission with driven pulley and is connected, backup pad (2) top surface middle part one side is equipped with support bearing, axis of rotation (16) bottom and support bearing inner wall rigid coupling, bottom plate (1) top surface is equipped with spacing bearing, axis of rotation (16) middle part outer wall and spacing bearing inner wall rigid coupling.
4. The secondary grinding equipment for producing chip silicon as claimed in claim 1, wherein: fixed plate (6) bottom surface one end fixed connection pole (7), connecting rod (7) lower extreme is equipped with the mounting groove of rectangle form, surface detection lamp (8) top surface rigid coupling has the fixed block of rectangle form, the fixed block is located the mounting groove, and through the bolt rigid coupling.
5. The secondary grinding equipment for producing chip silicon as claimed in claim 1, wherein: translation board (27) top surface is equipped with second electric putter (28), second electric putter (28) expansion end rigid coupling has connecting block (29) of rectangle form, be equipped with the connection bearing in connecting block (29), a connecting block (29) side is equipped with spacer pin (37), the columniform connecting rod of centre gripping frame (30) side middle part rigid coupling, the connecting rod other end and connection bearing inner wall rigid coupling, be equipped with the spacing hole of circular shape on the connecting rod, spacer pin (37) the inner is located spacing hole, translation board (27) one end is equipped with screw nut along length direction, screw nut and lead screw (25) threaded connection, translation board (27) other end is equipped with the circular shape through-hole along length direction, slide bar (26) are located the through-hole.
6. The secondary grinding equipment for producing chip silicon as claimed in claim 5, wherein: centre gripping frame (30) one end side is equipped with the location screw, locating plate (32) one side is equipped with positioning screw (36), positioning screw (36) and location screw threaded connection, the equal concave standing groove that is equipped with the rectangle form of centre gripping frame (30) each side internal surface, the equal rigid coupling of bottom surface has lower grip block (34) of rectangle form in every standing groove, and every lower grip block (34) one end top surface all is equipped with supporting spring (35), and the equal rigid coupling of every supporting spring (35) other end has last grip block (33), centre gripping frame (30) each side top surface middle part all is equipped with fastening screw (31), and every fastening screw (31) inner all with correspond last grip block (33) top surface contact, locating plate (32) internal surface middle part is equipped with the spacing groove of rectangle form, spacing groove both sides face all is equipped with spacing opening.
CN201911164987.XA 2019-11-25 2019-11-25 Secondary grinding equipment for producing chip silicon Active CN111015501B (en)

Priority Applications (1)

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CN201911164987.XA CN111015501B (en) 2019-11-25 2019-11-25 Secondary grinding equipment for producing chip silicon

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CN111530970A (en) * 2020-05-09 2020-08-14 王洪兴 Steel band system of flattening
CN112548719A (en) * 2020-12-15 2021-03-26 钟振 Surface auxiliary treatment equipment for carbon fiber material processing
CN113814832A (en) * 2021-11-23 2021-12-21 杭州中欣晶圆半导体股份有限公司 Device for improving epitaxial thickness uniformity of large-size silicon single crystal and operation method

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CN101362308A (en) * 2007-08-09 2009-02-11 富士通株式会社 Polishing apparatus, substrate manufacturing method, and electronic apparatus manufacturing method
CN101947749A (en) * 2010-09-14 2011-01-19 西安理工大学 Numerical control machine tool capable of grinding two sides of plane by dislocation self-rotation and ultrasonic vibration
CN106625162A (en) * 2017-02-28 2017-05-10 常熟市双月机械有限公司 Grinding machine with detection function
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Publication number Priority date Publication date Assignee Title
CN111530970A (en) * 2020-05-09 2020-08-14 王洪兴 Steel band system of flattening
CN111530970B (en) * 2020-05-09 2021-12-28 扬州中孚机械有限公司 Steel band system of flattening
CN112548719A (en) * 2020-12-15 2021-03-26 钟振 Surface auxiliary treatment equipment for carbon fiber material processing
CN113814832A (en) * 2021-11-23 2021-12-21 杭州中欣晶圆半导体股份有限公司 Device for improving epitaxial thickness uniformity of large-size silicon single crystal and operation method

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