CN211073138U

CN211073138U - High-precision grinding device for producing chip silicon

Info

Publication number: CN211073138U
Application number: CN201921581831.7U
Authority: CN
Inventors: 郭志宏
Original assignee: Datong Xincheng New Material Co Ltd
Current assignee: Datong Xincheng New Material Co Ltd
Priority date: 2019-09-23
Filing date: 2019-09-23
Publication date: 2020-07-24
Anticipated expiration: 2029-09-23

Abstract

The utility model discloses a high-precision grinding device for chip silicon production, comprising a base plate, the equal rigid coupling in bottom plate bottom surface four corners has the bracing piece of rectangle, bottom plate bottom surface below is equipped with the square backup pad, backup pad one end top surface is equipped with the rose box, rose box one side is equipped with the aspirator pump, backup pad other end top surface is equipped with the block terminal, backup pad top surface middle part is equipped with first motor, first motor the place ahead is equipped with the rotation axis, the rotation axis top is equipped with abrasive disc down, bottom plate top surface both ends all are equipped with the centre gripping subassembly, bottom plate one end top surface is equipped with the support column, the support column top is equipped with the fixed plate, the fixed plate is equipped with the light, electric telescopic handle and suction hood, the electric telescopic handle expansion end is equipped with the second motor. The utility model discloses simple structure is favorable to improving work efficiency, reduces dust pollution, environmental protection more.

Description

High-precision grinding device for producing chip silicon

Technical Field

The utility model relates to a chip silicon processing equipment technical field especially relates to a grinder is used in production of chip silicon that the precision is high.

Background

The existing wafer grinding processing equipment can generate a large amount of grinding dust in the working process, the environment is seriously polluted, after the work is finished, the large amount of dust remained on the surface of the grinding disc is inconvenient to clean, time and labor are wasted, and when the existing wafer grinding processing equipment grinds a wafer, the grinding disc usually grinds the upper surface of the wafer firstly and then overturns 180 degrees to grind the other surface, so that the labor intensity of workers is increased undoubtedly, the defect of discontinuous grinding also exists, and the grinding efficiency is reduced.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects existing in the prior art and providing a grinding device for producing chip silicon with high precision.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a grinding device for producing high-precision chip silicon comprises a bottom plate, wherein rectangular support rods are fixedly connected to four corners of the bottom surface of the bottom plate, a rectangular support plate is arranged below the bottom surface of the bottom plate, two ends of each side surface of the support plate are fixedly connected with one side surface of the corresponding support rod, a rectangular filter box is arranged on the top surface of one end of the support plate, an air suction pump is arranged on the top surface of the support plate corresponding to one side of the filter box, an air guide pipe is connected to an air outlet of the air suction pump, the other end of the air guide pipe is positioned in the filter box, a distribution box is arranged on the top surface of the other end of the support plate, a first motor is arranged in the middle of the top surface of the support plate, a rotating shaft is arranged in front of the first motor, the bottom end of the rotating shaft is rotatably connected with the top surface of the, the spout both ends all are equipped with the centre gripping subassembly, bottom plate one end top surface is equipped with the columniform support column, the support column top is equipped with the fixed plate of rectangle form, fixed plate one end bottom surface is equipped with the light, the fixed plate bottom surface that light one side corresponds is equipped with electric telescopic handle, the expansion end rigid coupling of electric telescopic handle has the protecting frame of rectangle, be equipped with the second motor in the protecting frame, protecting frame bottom surface below is equipped with the abrasive disc, the motor shaft of second motor pass the protecting bottom surface and with last abrasive disc rigid coupling, fixed plate other end bottom surface is equipped with the suction hood, the suction hood passes through the dust absorption pipe and is connected with the aspirator pump air inlet.

Preferably, rotation axis bottom rigid coupling has the bearing, the bearing is located the columniform recess of backup pad top surface, bearing inner ring surface and rotation axis bottom surface rigid coupling, rotation axis lower extreme surface rigid coupling has conical driven gear, the motor shaft top rigid coupling of first motor has conical driving gear, driven gear and driving gear meshing.

Preferably, the centre gripping subassembly includes the columniform stay tube, be equipped with the columniform movable rod in the stay tube, curved lower grip block of movable rod top rigid coupling, grip block top surface top is equipped with the grip block down, grip block side rigid coupling has the first fixed block of rectangle form down, the fixed block top surface is equipped with clamping screw, go up the second fixed block of grip block side rigid coupling rectangle form, the clamping screw upper end pass first fixed block and with fixation nut screwed connection, the equal rigid coupling all around of fixation nut surface has the round bar.

Preferably, the bottom end of the supporting tube is fixedly connected with a rectangular sliding plate, the sliding plate is located in a sliding groove in the top surface of the bottom plate, limit threaded holes are distributed in the bottom surface of the sliding groove, a limit screw rod is arranged on the top surface of one end of the sliding plate, the lower end of the limit screw rod penetrates through the sliding plate and is in threaded connection with the limit threaded holes, a fastening screw rod is arranged on one side surface of the upper end of the supporting tube, and the inner end of the fastening screw rod penetrates through the supporting tube.

Preferably, a rectangular limiting plate is fixedly connected to the outer surface of one side of the illuminating lamp, a cylindrical fixing rod is arranged on one side of the illuminating lamp, the upper end of the fixing rod is fixedly connected to the bottom surface of the fixing plate, a rectangular limiting groove is formed in the lower end of the fixing rod, the upper end of the limiting plate is located in the limiting groove, a limiting screw is arranged on one side of the limiting groove, and one end of the limiting screw sequentially penetrates through the limiting groove and the limiting plate and is in threaded connection with a corresponding limiting nut.

Preferably, the suction hood top surface is equipped with the installation piece of rectangle form, suction hood top surface top is equipped with the mounting panel of rectangle form mounting panel one side is equipped with the rotation screw rod, rotation screw rod one end passes installation piece and mounting panel in proper order and with the rotation nut screwed connection that corresponds.

Preferably, the lower extreme is equipped with the drainage in the rose box, the middle part is equipped with the filter screen in the rose box, filter screen one end is located the support inslot of the rectangle form of rose box one side inner wall, the filter screen other end is located rose box outer wall one side, rose box top surface one end is equipped with the blast pipe.

An operation method of a grinding device for producing high-precision chip silicon comprises the following steps:

s1, switching on a power supply, and opening a power switch in the distribution box;

s2, adjusting the distance between the clamping groups, and clamping the wafer;

s3, adjusting the height of the wafer, enabling the bottom surface of the wafer to be in contact with the lower grinding disc, controlling the electric telescopic rod to extend, and enabling the top surface of the wafer of the upper grinding disc to be in contact;

s4, controlling the first motor and the second motor to rotate, grinding the wafer, and turning on a switch of an illuminating lamp and an air suction pump;

s5, after grinding is finished, controlling the first motor and the second motor to stop rotating, controlling the electric telescopic rod to retract, taking the wafer out of the clamping assembly, and turning off the illuminating lamp and the air suction pump;

and S6, turning off the power supply.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the air suction pump, the dust hood and the filter box are matched, so that the grinding dust is absorbed and removed in a directional mode in the grinding process, flying of the dust is reduced, the comfort level of a working environment is improved, the environment is protected, the body health of workers is maintained, and the body damage to the workers is reduced;

2. through the matching of the first motor, the lower grinding disc, the second motor and the upper grinding disc, the front and back sides of the wafer can be simultaneously ground without manual reversal, time and labor are saved, the labor intensity of workers is reduced, and the grinding efficiency is improved;

to sum up, the utility model discloses simple structure, the operation of being convenient for are favorable to improving work efficiency, are favorable to reducing dust pollution, environmental protection more.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without undue limitation to the invention. In the drawings:

FIG. 1 is a front view of a high-precision grinding device for producing silicon chips;

FIG. 2 is a right side view of a high precision grinding apparatus for producing silicon chips according to the present invention;

FIG. 3 is a top view of a clamping assembly of a high-precision grinding apparatus for producing silicon chips;

FIG. 4 is a cross-sectional view of a filter box of a high-precision grinding device for producing chip silicon according to the present invention;

FIG. 5 is an enlarged view of the portion A in FIG. 2 of the high-precision grinding apparatus for producing silicon chips according to the present invention;

FIG. 6 is a flow chart of the operation method of the high-precision grinding device for producing the chip silicon provided by the present invention;

number in the figure: the device comprises a bottom plate 1, a support rod 11, a support plate 12, a support column 13, a fixing plate 14, a distribution box 15, a suction pump 16, a first motor 17, a driving gear 18, a clamping assembly 2, a support pipe 21, a movable rod 22, a lower clamping plate 23, an upper clamping plate 24, a fixed screw 25, a filter box 3, a filter screen 31, an exhaust pipe 32, a rotating shaft 4, a driven gear 41, a lower grinding disc 42, an electric telescopic rod 5, a second motor 51, an upper grinding disc 52, a dust hood 6, a mounting plate 61, a dust collection pipe 62, an illuminating lamp 7 and a fixing rod 71.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Example (b): referring to fig. 1-6, a high-precision grinding device for chip silicon production comprises a bottom plate 1, rectangular support rods 11 are fixedly connected to four corners of the bottom surface of the bottom plate 1, a rectangular support plate 12 is arranged below the bottom surface of the bottom plate 1, two ends of each side surface of the support plate 12 are fixedly connected to a corresponding side surface of the support rod 11, a rectangular filter box 3 is arranged on the top surface of one end of the support plate 12, an air suction pump 16 is arranged on the top surface of the support plate 12 corresponding to one side of the filter box 3, an air outlet of the air suction pump 16 is connected with an air guide tube, the other end of the air guide tube is positioned in the filter box 3, a distribution box 15 is arranged on the top surface of the other end of the support plate 12, a first motor 17 is arranged in the middle of the top surface of the support plate 12, and is fixedly connected with the lower grinding disc 42, the motor shaft of the first motor 17 is rotationally connected with the lower end of the rotating shaft 4, the middle part of the top surface of the bottom plate 1 is provided with an inverted T-shaped chute which is concave downwards, two ends of the chute are provided with clamping components 2, a cylindrical supporting column 13 is arranged on the top surface of one end of the bottom plate 1, a rectangular fixing plate 14 is arranged on the top end of the supporting column 13, the bottom surface of one end of the fixed plate 14 is provided with an illuminating lamp 7, the bottom surface of the fixed plate 14 corresponding to one side of the illuminating lamp 7 is provided with an electric telescopic rod 5, the movable end of the electric telescopic rod 5 is fixedly connected with a rectangular protective frame, a second motor 51 is arranged in the protective frame, an upper grinding disc 52 is arranged below the bottom surface of the protective frame, a motor shaft of the second motor 51 penetrates through the protective bottom surface and is fixedly connected with the upper grinding disc 52, the bottom surface of the other end of the fixed plate 14 is provided with a dust hood 6, and the dust hood 6 is connected with an air inlet of the suction pump 16 through a dust suction pipe 62.

The utility model discloses in, 1 side of bottom plate is equipped with the control switch of first motor 17, second motor 51, aspirator pump 16, electric telescopic handle 5 and light 7, and control switch passes through the wire and is connected with first motor 17, second motor 51, aspirator pump 16, electric telescopic handle 5, light 7 and block terminal 15, be equipped with switch in the block terminal 15, switch passes through the wire and is connected with external power supply, and first motor 17, second motor 51 control switch model are L W26-20.

The utility model discloses in, 4 bottom rigid couplings of rotation axis have the bearing, the bearing is located the columniform recess of backup pad 12 top surface, bearing inner ring surface and 4 bottom surface rigid couplings of rotation axis, 4 bottom surface rigid couplings of rotation axis have conical driven gear 41, the motor shaft top rigid coupling of first motor 17 has conical driving gear 18, driven gear 41 and driving gear 18 meshing.

The utility model discloses in, centre gripping subassembly 2 includes columniform stay tube 21, be equipped with columniform movable rod 22 in the

stay tube

21, 22 curved lower grip blocks 23 of movable rod top rigid coupling, grip blocks 23 top surface top is equipped with grip blocks 24 down, 23 a side rigid coupling of grip blocks has the first fixed block of rectangle form down, the fixed block top surface is equipped with clamping screw 25, go up the second fixed block of 24 a side rigid coupling rectangle forms of grip blocks, clamping screw 25 upper end pass first fixed block and with fixation nut screwed connection, the equal rigid coupling all around of fixation nut surface has the round bar.

The utility model discloses in, the slide that 21 bottom rigid couplings of stay tube have the rectangle form, the slide is located the spout of 1 top surface of bottom plate, the spout bottom surface distributes and has spacing screw hole, slide one end top surface is equipped with stop screw, the stop screw lower extreme pass the slide and with spacing screw hole screwed connection, a stay tube 21 upper end side is equipped with fastening screw, fastening screw inner pass stay tube 21 and with movable rod 22 surface pressure contact.

The utility model discloses in, the limiting plate that light 7 one side surface rigid coupling has the rectangle form, light 7 one side is equipped with columniform dead lever 71, dead lever 71 upper end and the 14 bottom surface rigid couplings of fixed plate, dead lever 71 lower extreme is equipped with the spacing groove of rectangle form, the limiting plate upper end is located the spacing inslot, spacing groove one side is equipped with stop screw, stop screw one end pass spacing groove and limiting plate in proper order and with correspond stop nut screwed connection.

The utility model discloses in, 6 top surfaces of suction hood are equipped with the installation piece of rectangle form, 6 top surfaces of suction hood top are equipped with the mounting panel 61 of rectangle form, mounting panel 61 one side is equipped with the rotation screw rod, rotate screw rod one end pass installation piece and mounting panel in proper order and with the rotation nut screwed connection that corresponds.

The utility model discloses in, the lower extreme is equipped with the drainage in the rose box 3, the middle part is equipped with filter screen 31 in the rose box 3, the support inslot of the rectangle form of filter screen 31 one end position in rose box 3 one side inner wall, the filter screen 31 other end is located 3 outer wall one sides of rose box, 3 top surface one ends of rose box are equipped with blast pipe 32.

Referring to fig. 6, an operation method of a grinding apparatus for manufacturing a high-precision chip silicon includes the steps of:

s1, switching on a power supply, and opening a power switch in the distribution box 15;

s2, adjusting the distance between the clamping group price 2, and clamping the wafer;

s3, adjusting the height of the wafer, wherein the bottom surface of the wafer is in contact with the lower grinding disc 42, controlling the electric telescopic rod 5 to extend, and the top surface of the wafer of the upper grinding disc 52 is in contact;

s4, controlling the first motor 17 and the second motor 51 to rotate, grinding the wafer, and turning on the switch of the illuminating lamp 7 and the air suction pump 16;

s5, controlling the first motor 17 and the second motor 51 to stop rotating after grinding is finished, controlling the electric telescopic rod 5 to retract, taking the wafer out of the clamping assembly 2, and turning off the illuminating lamp 7 and the air suction pump 16;

and S6, turning off the power supply.

When the utility model is used, firstly, the power switch in the distribution box 15 is opened, then the distance between the two clamping components 2 is adjusted according to the size of the wafer, the limit screw is rotated in the forward direction, the limit screw moves upwards until the clamping components 2 can move, then the sliding plate is moved, the sliding plate moves inwards, the distance between the two clamping components 2 becomes small, the outward movement distance becomes large, after the speaking distance is adjusted, the limit screw is rotated in the reverse direction until the sliding plate can not move, then the fixing nut is rotated in the forward direction, the fixing nut moves upwards, the upper clamping plate 24 moves upwards, then the wafer is placed on the top surface of the lower clamping plate 23, the upper clamping plate 24 moves downwards, the bottom surface of the upper clamping plate 24 is contacted with the wafer, then the fixing nut rotates in the reverse direction, the fixing nut moves downwards until the wafer can not move, then the fastening screw rotates in the forward direction until the movable rod 22 can move, adjusting the height of the wafer, so that the bottom surface of the wafer is in contact with the lower grinding disc 42, rotating the fastening screw rod in the reverse direction until the movable rod 22 cannot move, then controlling the electric telescopic rod 5 to extend, the electric telescopic rod 5 drives the second motor 51 to move downwards, the second motor 51 drives the upper grinding disc 52 to move downwards until the bottom surface of the upper grinding disc 52 is in contact with the wafer, then turning on the illuminating lamp 7, turning on the air suction pump 16, then controlling the first motor 17 and the second motor 51 to rotate, the first motor 17 drives the driving gear 18 to rotate, the driving gear 18 drives the driven gear 41 to rotate, the driven gear 41 drives the rotating shaft 4 to rotate, the rotating shaft 4 drives the lower grinding disc 42 to rotate, so that the lower grinding disc 42 grinds the wafer on the bottom surface, the second motor 51 drives the upper grinding disc 52 to rotate, and thereby the upper grinding disc 52 grinds the top surface of the wafer, the suction pump 16 feeds dust gas generated when the wafer is ground into the filter box 3 through the dust suction hood 6 via the dust suction pipe 62, and the gas is filtered by the filtered water and then emitted out of the filter box 3 along the exhaust pipe 32 through the filter screen.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. The utility model provides a grinder is used in production of chip silicon that precision is high, includes bottom plate (1), its characterized in that: the utility model discloses a support plate for a motor vehicle, including bottom plate (1), bottom plate (1) bottom surface four corners all rigid coupling have bracing piece (11) of rectangle, bottom plate (1) bottom surface below is equipped with backup pad (12) of rectangle, backup pad (12) every side both ends all with correspond bracing piece (11) a side rigid coupling, backup pad (12) one end top surface is equipped with rose box (3) of rectangle form, backup pad (12) top surface that rose box (3) one side corresponds is equipped with aspirator pump (16), the gas outlet of aspirator pump (16) is connected with the air duct, and the air duct other end is located rose box (3), backup pad (12) other end top surface is equipped with block terminal (15), backup pad (12) top surface middle part is equipped with first motor (17), first motor (17) the place ahead is equipped with rotation axis (4), rotation axis (4) bottom is connected with backup pad (12) top surface rotation, bottom, And with abrasive disc (42) rigid coupling down, the motor shaft of first motor (17) rotates with rotation axis (4) lower extreme to be connected, bottom plate (1) top surface middle part undercut is equipped with the spout of the shape of falling T, the spout both ends all are equipped with centre gripping subassembly (2), bottom plate (1) one end top surface is equipped with columniform support column (13), support column (13) top is equipped with fixed plate (14) of rectangle form, fixed plate (14) one end bottom surface is equipped with light (7), fixed plate (14) bottom surface that light (7) one side corresponds is equipped with electric telescopic handle (5), electric telescopic handle (5) expansion end rigid coupling has the protection frame of rectangle, be equipped with second motor (51) in the protection frame, protection frame bottom surface below is equipped with abrasive disc (52), the motor shaft of second motor (51) passes protection bottom surface, protection bottom surface, And is fixedly connected with the upper grinding disc (52), the bottom surface of the other end of the fixed plate (14) is provided with a dust hood (6), and the dust hood (6) is connected with the air inlet of the air suction pump (16) through a dust suction pipe (62).

2. The grinding device for producing the high-precision chip silicon as claimed in claim 1, wherein: rotation axis (4) bottom rigid coupling has the bearing, the bearing is located the columniform recess of backup pad (12) top surface, bearing inner ring surface and rotation axis (4) bottom surface rigid coupling, rotation axis (4) lower extreme surface rigid coupling has conical driven gear (41), the motor shaft top rigid coupling of first motor (17) has conical driving gear (18), driven gear (41) and driving gear (18) meshing.

3. The grinding device for producing the high-precision chip silicon as claimed in claim 1, wherein: centre gripping subassembly (2) include columniform stay tube (21), be equipped with columniform movable rod (22) in stay tube (21), movable rod (22) top rigid coupling curved lower grip block (23), grip block (23) top surface top is equipped with grip block (24) down, grip block (23) a side rigid coupling has the first fixed block of rectangle form down, the fixed block top surface is equipped with clamping screw (25), go up the second fixed block of grip block (24) a side rigid coupling rectangle form, clamping screw (25) upper end pass first fixed block and with fixation nut screwed connection, the equal rigid coupling all around of fixation nut surface has the round bar.

4. The grinding device for producing the high-precision chip silicon as claimed in claim 3, wherein: the bottom end of the supporting tube (21) is fixedly connected with a rectangular sliding plate, the sliding plate is located in a sliding groove in the top surface of the bottom plate (1), limiting threaded holes are distributed in the bottom surface of the sliding groove, a limiting screw rod is arranged on the top surface of one end of the sliding plate, the lower end of the limiting screw rod penetrates through the sliding plate and is in threaded connection with the limiting threaded holes, a fastening screw rod is arranged on one side face of the upper end of the supporting tube (21), and the inner end of the fastening screw rod penetrates through the supporting tube (21) and is in.

5. The grinding device for producing the high-precision chip silicon as claimed in claim 1, wherein: the lamp fixing structure is characterized in that a rectangular limiting plate is fixedly connected to the outer surface of one side of the illuminating lamp (7), a cylindrical fixing rod (71) is arranged on one side of the illuminating lamp (7), the upper end of the fixing rod (71) is fixedly connected with the bottom surface of the fixing plate (14), a rectangular limiting groove is formed in the lower end of the fixing rod (71), the upper end of the limiting plate is located in the limiting groove, a limiting screw rod is arranged on one side of the limiting groove, and one end of the limiting screw rod penetrates through the limiting groove and the limiting plate in sequence and is in threaded.

6. The grinding device for producing the high-precision chip silicon as claimed in claim 1, wherein: dust hood (6) top surface is equipped with the installation piece of rectangle form, dust hood (6) top surface top is equipped with mounting panel (61) of rectangle form mounting panel (61) one side is equipped with the rotation screw rod, rotate screw rod one end pass installation piece and mounting panel in proper order and with the rotation nut screwed connection who corresponds.

7. The grinding device for producing the high-precision chip silicon as claimed in claim 1, wherein: the lower extreme is equipped with the drainage in rose box (3), the middle part is equipped with filter screen (31) in rose box (3), filter screen (31) one end is located the support inslot of the rectangle form of rose box (3) one side inner wall, filter screen (31) other end is located rose box (3) outer wall one side, rose box (3) top surface one end is equipped with blast pipe (32).