CN110998871A - 一种微器件及其制备方法 - Google Patents

一种微器件及其制备方法 Download PDF

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Publication number
CN110998871A
CN110998871A CN201980002740.XA CN201980002740A CN110998871A CN 110998871 A CN110998871 A CN 110998871A CN 201980002740 A CN201980002740 A CN 201980002740A CN 110998871 A CN110998871 A CN 110998871A
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CN
China
Prior art keywords
layer
semiconductor layer
light
micro
outer side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201980002740.XA
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English (en)
Chinese (zh)
Inventor
伍凯义
钟光韦
杨然翔
江仁杰
沈佳辉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chongqing Kangjia Photoelectric Technology Research Institute Co Ltd
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Chongqing Kangjia Photoelectric Technology Research Institute Co Ltd
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Application filed by Chongqing Kangjia Photoelectric Technology Research Institute Co Ltd filed Critical Chongqing Kangjia Photoelectric Technology Research Institute Co Ltd
Publication of CN110998871A publication Critical patent/CN110998871A/zh
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/04Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
    • H01L33/06Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005Processes
    • H01L33/0062Processes for devices with an active region comprising only III-V compounds
    • H01L33/0075Processes for devices with an active region comprising only III-V compounds comprising nitride compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/44Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/44Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
    • H01L33/46Reflective coating, e.g. dielectric Bragg reflector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0025Processes relating to coatings

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Led Devices (AREA)
CN201980002740.XA 2019-11-21 2019-11-21 一种微器件及其制备方法 Pending CN110998871A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2019/119811 WO2021097736A1 (fr) 2019-11-21 2019-11-21 Microdispositif et son procédé de fabrication

Publications (1)

Publication Number Publication Date
CN110998871A true CN110998871A (zh) 2020-04-10

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980002740.XA Pending CN110998871A (zh) 2019-11-21 2019-11-21 一种微器件及其制备方法

Country Status (2)

Country Link
CN (1) CN110998871A (fr)
WO (1) WO2021097736A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112991966A (zh) * 2020-04-26 2021-06-18 重庆康佳光电技术研究院有限公司 一种显示背板、显示装置和显示背板制作方法
WO2023108451A1 (fr) * 2021-12-15 2023-06-22 厦门市芯颖显示科技有限公司 Dispositif électroluminescent et appareil de transfert

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106782128A (zh) * 2017-01-24 2017-05-31 深圳市华星光电技术有限公司 微发光二极管显示面板及其制造方法
US20170345867A1 (en) * 2015-01-23 2017-11-30 Vuereal Inc. Micro device integration into system substrate
CN107706275A (zh) * 2017-09-29 2018-02-16 华灿光电(浙江)有限公司 一种发光二极管芯片、面板及其制作方法
CN109935599A (zh) * 2019-03-29 2019-06-25 上海天马微电子有限公司 显示面板、显示装置和显示面板的制作方法
CN110265522A (zh) * 2019-06-28 2019-09-20 上海天马微电子有限公司 显示面板、显示装置和显示面板的制造方法
CN110289254A (zh) * 2019-06-27 2019-09-27 京东方科技集团股份有限公司 微型发光二极管及其制备方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170345867A1 (en) * 2015-01-23 2017-11-30 Vuereal Inc. Micro device integration into system substrate
CN106782128A (zh) * 2017-01-24 2017-05-31 深圳市华星光电技术有限公司 微发光二极管显示面板及其制造方法
CN107706275A (zh) * 2017-09-29 2018-02-16 华灿光电(浙江)有限公司 一种发光二极管芯片、面板及其制作方法
CN109935599A (zh) * 2019-03-29 2019-06-25 上海天马微电子有限公司 显示面板、显示装置和显示面板的制作方法
CN110289254A (zh) * 2019-06-27 2019-09-27 京东方科技集团股份有限公司 微型发光二极管及其制备方法
CN110265522A (zh) * 2019-06-28 2019-09-20 上海天马微电子有限公司 显示面板、显示装置和显示面板的制造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112991966A (zh) * 2020-04-26 2021-06-18 重庆康佳光电技术研究院有限公司 一种显示背板、显示装置和显示背板制作方法
WO2023108451A1 (fr) * 2021-12-15 2023-06-22 厦门市芯颖显示科技有限公司 Dispositif électroluminescent et appareil de transfert

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WO2021097736A1 (fr) 2021-05-27

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Application publication date: 20200410