CN110998871A - 一种微器件及其制备方法 - Google Patents
一种微器件及其制备方法 Download PDFInfo
- Publication number
- CN110998871A CN110998871A CN201980002740.XA CN201980002740A CN110998871A CN 110998871 A CN110998871 A CN 110998871A CN 201980002740 A CN201980002740 A CN 201980002740A CN 110998871 A CN110998871 A CN 110998871A
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- 238000002360 preparation method Methods 0.000 title abstract description 7
- 239000004065 semiconductor Substances 0.000 claims abstract description 177
- 239000010410 layer Substances 0.000 claims description 418
- 238000000034 method Methods 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 239000011241 protective layer Substances 0.000 claims description 9
- 239000007769 metal material Substances 0.000 claims description 8
- 229910003460 diamond Inorganic materials 0.000 claims description 6
- 239000010432 diamond Substances 0.000 claims description 6
- 239000011810 insulating material Substances 0.000 claims description 5
- 238000005229 chemical vapour deposition Methods 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 238000005240 physical vapour deposition Methods 0.000 claims description 3
- 239000002699 waste material Substances 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 239000003574 free electron Substances 0.000 description 7
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910004205 SiNX Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0075—Processes for devices with an active region comprising only III-V compounds comprising nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
- H01L33/46—Reflective coating, e.g. dielectric Bragg reflector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0025—Processes relating to coatings
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2019/119811 WO2021097736A1 (fr) | 2019-11-21 | 2019-11-21 | Microdispositif et son procédé de fabrication |
Publications (1)
Publication Number | Publication Date |
---|---|
CN110998871A true CN110998871A (zh) | 2020-04-10 |
Family
ID=70080514
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201980002740.XA Pending CN110998871A (zh) | 2019-11-21 | 2019-11-21 | 一种微器件及其制备方法 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN110998871A (fr) |
WO (1) | WO2021097736A1 (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112991966A (zh) * | 2020-04-26 | 2021-06-18 | 重庆康佳光电技术研究院有限公司 | 一种显示背板、显示装置和显示背板制作方法 |
WO2023108451A1 (fr) * | 2021-12-15 | 2023-06-22 | 厦门市芯颖显示科技有限公司 | Dispositif électroluminescent et appareil de transfert |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106782128A (zh) * | 2017-01-24 | 2017-05-31 | 深圳市华星光电技术有限公司 | 微发光二极管显示面板及其制造方法 |
US20170345867A1 (en) * | 2015-01-23 | 2017-11-30 | Vuereal Inc. | Micro device integration into system substrate |
CN107706275A (zh) * | 2017-09-29 | 2018-02-16 | 华灿光电(浙江)有限公司 | 一种发光二极管芯片、面板及其制作方法 |
CN109935599A (zh) * | 2019-03-29 | 2019-06-25 | 上海天马微电子有限公司 | 显示面板、显示装置和显示面板的制作方法 |
CN110265522A (zh) * | 2019-06-28 | 2019-09-20 | 上海天马微电子有限公司 | 显示面板、显示装置和显示面板的制造方法 |
CN110289254A (zh) * | 2019-06-27 | 2019-09-27 | 京东方科技集团股份有限公司 | 微型发光二极管及其制备方法 |
-
2019
- 2019-11-21 WO PCT/CN2019/119811 patent/WO2021097736A1/fr active Application Filing
- 2019-11-21 CN CN201980002740.XA patent/CN110998871A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20170345867A1 (en) * | 2015-01-23 | 2017-11-30 | Vuereal Inc. | Micro device integration into system substrate |
CN106782128A (zh) * | 2017-01-24 | 2017-05-31 | 深圳市华星光电技术有限公司 | 微发光二极管显示面板及其制造方法 |
CN107706275A (zh) * | 2017-09-29 | 2018-02-16 | 华灿光电(浙江)有限公司 | 一种发光二极管芯片、面板及其制作方法 |
CN109935599A (zh) * | 2019-03-29 | 2019-06-25 | 上海天马微电子有限公司 | 显示面板、显示装置和显示面板的制作方法 |
CN110289254A (zh) * | 2019-06-27 | 2019-09-27 | 京东方科技集团股份有限公司 | 微型发光二极管及其制备方法 |
CN110265522A (zh) * | 2019-06-28 | 2019-09-20 | 上海天马微电子有限公司 | 显示面板、显示装置和显示面板的制造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112991966A (zh) * | 2020-04-26 | 2021-06-18 | 重庆康佳光电技术研究院有限公司 | 一种显示背板、显示装置和显示背板制作方法 |
WO2023108451A1 (fr) * | 2021-12-15 | 2023-06-22 | 厦门市芯颖显示科技有限公司 | Dispositif électroluminescent et appareil de transfert |
Also Published As
Publication number | Publication date |
---|---|
WO2021097736A1 (fr) | 2021-05-27 |
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PB01 | Publication | ||
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Application publication date: 20200410 |