CN110987246B - Flexible sensor and preparation and use methods thereof - Google Patents
Flexible sensor and preparation and use methods thereof Download PDFInfo
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- CN110987246B CN110987246B CN201911300627.8A CN201911300627A CN110987246B CN 110987246 B CN110987246 B CN 110987246B CN 201911300627 A CN201911300627 A CN 201911300627A CN 110987246 B CN110987246 B CN 110987246B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance
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- General Physics & Mathematics (AREA)
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- Force Measurement Appropriate To Specific Purposes (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The application relates to a flexible sensor and a preparation and use method of the flexible sensor, wherein the flexible sensor comprises a containing cavity and at least two electric signal measuring devices; wherein: the accommodating cavity is filled with a liquid conductive medium; at least two electric signal measuring devices are respectively communicated with the accommodating cavity, and an included angle is formed between any two electric signal measuring devices and the connecting line between the accommodating cavity. By utilizing the fluidity of the liquid conductive medium in the accommodating cavity, when the liquid conductive medium is extruded under the action of external force in a certain direction, different amounts of liquid conductive medium can flow into the electric signal measuring device in different directions, and then the stress direction and the stress of the flexible sensor can be determined according to the inflow of the liquid conductive medium.
Description
Technical Field
The application relates to the technical field of flexible devices, in particular to a flexible sensor and a preparation and use method of the flexible sensor.
Background
Flexible electronics is being widely focused and supported in various ways as a core technology for future personalized wearable medical devices. Flexible electronic devices (including circuits, sensors, electrodes, chips, etc.) have the advantage of having good skin affinity, being stretchable, bendable, etc. as devices. The current demand for flexible electronic devices is no longer satisfied with functions such as bending and stretching, and a sensor device with directivity or directivity is also an important research part of flexible electronic sensors.
The flexible sensor based on the liquid metal deforms due to the tensile force, and the resistance change of the liquid metal is caused, so that the resistance change value of the liquid metal is detected, and the change of the tensile force can be converted. However, the existing flexible sensors are mostly based on the change of the material, and cannot have directionality or directivity, so that the application range of the flexible sensors for liquid metal is greatly limited.
Disclosure of Invention
The application provides a flexible sensor and a preparation and use method thereof, which can enable the flexible sensor to sense the magnitude and the direction of external force and expand the application range of the flexible sensor.
A flexible sensor comprising a receiving cavity and at least two electrical signal measuring devices; wherein:
the accommodating cavity is filled with a liquid conductive medium;
at least two electric signal measuring devices are respectively communicated with the accommodating cavity, and an included angle is formed between any two electric signal measuring devices and a connecting line between the accommodating cavities, and the electric signal measuring devices are used for detecting parameters of the electric signal measuring devices after liquid conductive media in the accommodating cavities are pressurized and are respectively filled into the electric signal measuring devices, and the stress direction and the stress magnitude of the flexible sensor are determined according to the parameters.
In one embodiment, the electrical signal measurement device comprises a valve structure and a capacitive sensor; the capacitive sensor comprises a first electrode cavity and a second electrode cavity; the first electrode cavity and the second electrode cavity are arranged at intervals;
the first electrode cavity and the second electrode cavity are respectively communicated with the accommodating cavity through the valve structure and are used for inducing corresponding capacitance according to the liquid conductive medium capacity entering the first electrode cavity and the second electrode cavity;
the valve structure is used for adjusting the opening of the valve according to the magnitude and the direction of the pressure;
when the flexible sensor is under pressure, the liquid conductive medium in the accommodating cavity is filled into the first electrode cavity and the second electrode cavity through the valve structure.
In an embodiment, the electrical signal measurement device further comprises a solid state electrode comprising a first electrode and a second electrode; the first electrode is connected with the first electrode cavity, and the second electrode is connected with the second electrode cavity and used for detecting the capacitance value of the capacitance sensor.
In one embodiment, the valve structure comprises a first conduit and a second conduit that are sleeved;
the first end of the first conduit is connected with the accommodating cavity, the first end of the second conduit is connected with the capacitance sensor, and the second end of the second conduit extends into the first conduit from the second end of the first conduit and is connected with the first conduit.
In an embodiment, the capacitive sensor comprises an interdigital capacitance.
In an embodiment, a plurality of support structures are provided within the receiving cavity, the support structures extending along the receiving cavity center towards the electrical signal measuring device.
In an embodiment, the included angles of the connecting lines between any two adjacent electric signal measuring devices and the accommodating cavity are equal.
A method of manufacturing a flexible sensor, the method comprising:
s1, providing a flexible substrate mould, filling a flexible substrate precursor in the flexible substrate mould, and curing to form a flexible substrate;
s2, preparing a containing cavity and at least two electric signal measuring devices on the flexible substrate, and filling a liquid conductive medium in the containing cavity; the electric signal measuring device comprises a valve structure and a capacitance sensor, the capacitance sensor is communicated with the accommodating cavity through the valve structure, and an included angle is formed between any two electric signal measuring devices and a connecting line between the accommodating cavities;
and S3, packaging the liquid conductive medium to finish the preparation of the flexible sensor.
In one embodiment, step S1 includes:
providing a rigid substrate;
printing a first die on the surface of the rigid substrate according to the corresponding shapes of the accommodating cavity and the electric signal measuring device, and solidifying to obtain the flexible substrate die;
and filling the flexible substrate precursor into the flexible substrate mould until the flexible substrate precursor is filled and cured to form the flexible substrate.
In one embodiment, step S2 includes:
printing the accommodating cavity on the flexible substrate, and printing the electric signal measuring device in at least two directions of the accommodating cavity;
and filling a liquid conductive medium into the accommodating cavity, so that the surface of the liquid conductive medium is oxidized to form a fixed shape.
In one embodiment, step S2 includes:
printing and curing a second mold on the flexible substrate and/or the flexible substrate mold according to the corresponding shapes of the accommodating cavity and the electric signal measuring device;
filling a precursor liquid material into the second die until the second die is filled and cured;
removing a second mold located within the receiving cavity and the electrical signal measuring device;
and filling a liquid conductive medium into the accommodating cavity, so that the surface of the liquid conductive medium is oxidized to form a fixed shape.
In an embodiment, the electrical signal measuring device further comprises a solid state electrode, the solid state electrode being connected to the capacitive sensor.
In one embodiment, step S3 includes:
printing an upper layer mold on the flexible substrate mold and/or the flexible substrate according to the corresponding shapes of the accommodating cavity and the electric signal measuring device, and curing;
filling the flexible substrate precursor in the upper layer die until the flexible substrate precursor is filled and cured, so that the flexible substrate precursor coats the liquid conductive medium;
and removing the flexible substrate die and the upper die to obtain the flexible sensor.
A method of using the flexible sensor described above, the method comprising:
placing a containing cavity of the flexible sensor on the surface of a to-be-measured body, and adhering a plurality of electric signal measuring devices in different directions on the surface of the to-be-measured body;
acquiring parameters of each electric signal measuring device;
and determining the stress direction and the stress magnitude of the surface of the to-be-detected body according to the parameters.
The application provides a flexible sensor and a preparation and use method of the flexible sensor, wherein the flexible sensor comprises a containing cavity and at least two electric signal measuring devices; wherein: the accommodating cavity is filled with a liquid conductive medium; the electric signal measuring devices are respectively communicated with the accommodating cavity, and an included angle is formed between any two electric signal measuring devices and a connecting line between the accommodating cavities, and the electric signal measuring devices are used for detecting parameters of the electric signal measuring devices after liquid conductive media in the accommodating cavities are pressurized and respectively filled into the electric signal measuring devices, and determining the stress direction and the stress magnitude of the flexible sensor according to the parameters. According to the flexible sensor provided by the application, the electric signal measuring devices are arranged in the plurality of directions of the accommodating cavity, and when the accommodating cavity is extruded under the action of external force, different amounts of liquid conductive media can flow into the electric signal measuring devices in different directions, so that the stress direction and the stress of the flexible sensor can be determined according to the inflow of the liquid conductive media.
Drawings
In order to more clearly illustrate the embodiments of the application or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a flexible sensor according to an embodiment;
FIG. 2 is a schematic diagram of a flexible sensor according to another embodiment;
FIG. 3 is a schematic view of a flexible sensor according to another embodiment when exposed to an external force;
FIG. 4 is a schematic view of a valve structure according to another embodiment;
FIG. 5 is a schematic illustration of the valve structure of FIG. 4 when longitudinally stretched, according to one embodiment;
FIG. 6 is a schematic view of the valve structure of FIG. 4 under lateral tension according to another embodiment;
FIG. 7 is a flow chart of a method of manufacturing a flexible sensor provided in one embodiment;
FIG. 8 is a flow chart of a method of using a flexible sensor provided in one embodiment.
Detailed Description
In order that the above objects, features and advantages of the application will be readily understood, a more particular description of the application will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, and the preferred embodiments of the present application are presented in the accompanying drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete. The present application may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the application, so that the application is not limited to the specific embodiments disclosed below.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise. In the description of the present application, the meaning of "several" means at least one, such as one, two, etc., unless specifically defined otherwise.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
FIG. 1 is a schematic structural diagram of a flexible sensor according to an embodiment of the present application, as shown in FIG. 1, a flexible sensor includes a housing cavity 110 and at least two electrical signal measuring devices 120; wherein:
the accommodating chamber 110 is filled with a liquid conductive medium. At least two electric signal measuring devices 120 are respectively communicated with the accommodating cavity 110, and the connecting line between any two electric signal measuring devices 120 and the accommodating cavity 110 has an included angle, so that after the liquid conductive medium in the accommodating cavity 110 is pressurized and is respectively filled into each electric signal measuring device 120, parameters of each electric signal measuring device 120 are detected, and the stress direction and the stress of the flexible sensor are determined according to the parameters.
The accommodating chamber 110 in the present application is used to fill a liquid conductive medium, and a hard mold of the accommodating chamber 110 can be prepared by 3D printing of a rigid material. Specifically, a filling space can be first prepared for a liquid state material of a precursor of a flexible substrate through a mold, the liquid state material of the precursor of the flexible substrate is filled into the filling space, heating and curing are performed to form the flexible substrate, then a structure of a liquid state conductive medium storage area is prepared on the flexible substrate, the liquid state conductive medium is filled into the liquid state conductive medium storage area, finally the liquid state material of the precursor of the flexible substrate is filled again on the surface of the liquid state conductive medium, and packaging of the structure of the liquid state conductive medium storage area is completed, so that the accommodating cavity 110 is formed. It will be appreciated that the receiving cavity 110 may be otherwise obtained, and the present embodiment is not limited.
The shape of the receiving chamber 110 may be circular, polygonal, elliptical, etc., and the specific shape is selected according to practical situations. In the embodiment of the application, the accommodating cavity 110 is circular, the circular accommodating cavity 110 can form more directional flow channels, and the flow of the liquid conductive medium is not influenced by the shape of the accommodating cavity 110, so that the stress direction and the stress magnitude of the flexible sensor can be more accurately judged.
The liquid conductive medium can be liquid metal, saline water, sulfuric acid solution and the like, so long as a large amount of anions and cations exist in the liquid, the liquid conductive medium is taken as the liquid metal for illustration, and the liquid metal with a certain oxidation degree is easy to form. Liquid metal refers to an amorphous metal that can be considered as a mixture of a positive ion fluid and free electron gas. Liquid metal is also a flowable liquid metal. According to the application, the liquid metal is filled into the accommodating cavity 110, and the liquid metal in the accommodating cavity 110 can flow under the extrusion of external force when the accommodating cavity 110 is subjected to the external force by utilizing the fluidity of the liquid metal. In the present application, the liquid metal filled in the accommodating cavity 110 mainly includes liquid metal such as gallium indium tin alloy (Galinstan), gallium indium alloy (EGaIn), gallium zinc alloy (GaZn) or gallium tin alloy (GaSn), and the specific composition of the liquid metal filled in the accommodating cavity 110 is not limited.
The flexible sensor provided herein includes at least two electrical signal measuring devices 120, the at least two electrical signal measuring devices 120 are respectively in communication with the accommodating cavity 110, and a connecting line between any two electrical signal measuring devices 120 and the accommodating cavity 110 has an included angle. In one embodiment, the two adjacent electrical signal measuring devices 120 are at equal angles to the line between the receiving chamber 110.
As can be seen from fig. 1, the flexible sensor includes four electrical signal measuring devices 120, the four electrical signal measuring devices 120 are disposed in different directions of the accommodating cavity 110, and connecting line included angles between any two adjacent electrical signal measuring devices 120 and the accommodating cavity 110 are equal, so that liquid metal in the accommodating cavity 110 has flow channels in multiple directions, and when the accommodating cavity 110 receives an external force, the liquid metal flows into the different electrical signal measuring devices 120 along the flow channels in different directions according to the direction and the magnitude of the received external force. The electric signal measuring device 120 senses corresponding parameters according to the flow rate of the liquid metal, and the stress direction and the stress magnitude of the flexible sensor can be determined by analyzing the parameters of the electric signal measuring devices 120. The flexible sensor provided by the application accords with the kinematic design of human body, and realizes the determination of directivity through the parameters measured by the plurality of electric signal measuring devices 120. The parameters may include electrical performance parameters such as capacitance, voltage, etc.
It will be appreciated that the number and placement of the electrical signal measuring devices 120 in fig. 1 are merely illustrative and are not limited to a particular number and placement. The number and the arrangement position of the electric signal measuring devices 120 can be freely adjusted according to the actual situation, and the number of the electric signal measuring devices 120 should be at least not less than two due to the requirement of the directivity function.
The flexible sensor provided by the embodiment of the application comprises a containing cavity 110 and at least two electric signal measuring devices 120; wherein: the accommodating chamber 110 is filled with liquid metal; the at least two electric signal measuring devices 120 are respectively communicated with the accommodating cavity 110, and the connecting line between any two electric signal measuring devices 120 and the accommodating cavity 110 has an included angle, so that after the electric signal measuring devices 120 are filled with the liquid metal in the pressure accommodating cavity 110, parameters of the at least two electric signal measuring devices 120 are detected, and the stress direction and the stress of the flexible sensor are determined according to the parameters. According to the flexible sensor provided by the application, the electric signal measuring devices 120 are arranged in the plurality of directions of the accommodating cavity 110, and when the accommodating cavity 110 is extruded under the action of external force, different amounts of liquid metal can flow into the electric signal measuring devices 120 in different directions, so that the stress direction and the stress of the flexible sensor can be determined according to the inflow of the liquid metal.
In another embodiment, as shown in FIG. 2, an electrical signal measurement device 120 includes a valve structure 121 and a capacitive sensor 122; the capacitive sensor 122 includes a first electrode cavity 1221 and a second electrode cavity 1222; the first electrode cavity 1221 is spaced apart from the second electrode cavity 1222;
the first electrode cavity 1221 and the second electrode cavity 1222 are respectively communicated with the accommodating cavity 110 through the valve structure 121, and are used for inducing corresponding capacitance according to the liquid conductive medium capacity entering the first electrode cavity 1221 and the second electrode cavity 1222;
the valve structure 121 is used for adjusting the opening of the valve according to the magnitude and direction of the pressure;
when the flexible sensor is pressurized, the liquid conductive medium in the receiving chamber 110 fills the first electrode chamber 1221 and the second electrode chamber 1222 through the valve structure 121.
Referring to fig. 2 and 3, a valve structure 121 is disposed adjacent to the receiving chamber 110, and liquid metal in the receiving chamber 110 flows into the capacitive sensor 122 through the valve structure 121. In the use process of the flexible sensor, when a human body performs directional stretching action and performs directional stretching on the accommodating cavity 110 of the flexible sensor (such as the combined action of stretching and bending of the elbow part), the liquid metal in the accommodating cavity 110 is squeezed into the capacitance sensor 122 due to the fluidity of the liquid metal. In addition, since the valve structure 121 has flexibility, the deformation of the valve structure 121 in each direction generated by the external force in a certain direction is different, so that the blocking capability of the valve structure on the liquid metal is different, the liquid metal amount of the electric signal measuring device 120 in each direction is also different, and the stress direction and the stress are judged according to the electric signal. Specifically, the valve structure 121 in the stretching direction is stretched longitudinally, the flow channel of the valve structure 121 is elongated and thinned, which is not beneficial to the extrusion of liquid metal, while the valve structure 121 perpendicular to the stretching direction is stretched transversely, the flow channel of the valve structure 121 is increased, which is beneficial to the extrusion of liquid metal, so that under the action of directional stretching, different amounts of liquid metal are poured into the capacitance sensors 122 in different directions, and the capacitance sensed by the capacitance sensors 122 in different directions is also different.
In another embodiment, a plurality of support structures 111 are disposed within the receiving cavity 110, the support structures 111 extending toward the electrical signal measuring device 120 with the receiving cavity 110 centered.
The number of the supporting structures 111 and the number of the electrical signal measuring devices 120 may be equal, and the material of the supporting structures 111 may be the same as that of the substrate, for example, PDMS. The present embodiment can prevent the receiving chamber 110 from being blocked at the inlet position of the valve structure 121 during the pressing process by providing the supporting structure 111 in the receiving chamber 110.
In another embodiment, as shown in fig. 4, the valve structure 121 includes a flexible and sleeved first conduit 1211 and a second conduit 1212; the first end of the first conduit 1211 is connected to the receiving chamber 110, the first end of the second conduit 1212 is connected to the capacitance sensor 122, the second end of the second conduit 1212 extends from the second end of the first conduit 1211 into the first conduit 1211 and is connected thereto, and the diameters of the first conduit 1211 and the second conduit 1212 are gradually reduced in a direction extending from the first end to the second end.
When the valve structure 121 is longitudinally stretched, as shown in fig. 5, the flow channels of the first conduit 1211 and the second conduit 1212 are both in a contracted state, and the second end of the first conduit 1211 and the second end of the second conduit 1212 are pressed together, so that the opening of the valve structure 121 is narrowed, and the larger the force is applied, the smaller the opening of the valve structure 121 is until it is closed, and it is difficult for the liquid metal in the receiving chamber 110 to flow into the capacitance sensor 122 through the valve structure 121. When the accommodation chamber 110 is restored, the liquid metal flowing into the capacitance sensor 122 flows into the first conduit 1211 communicating with the accommodation chamber 110 through the second conduit 1212, and then flows into the accommodation chamber 110.
When the valve structure 121 is stretched laterally, as shown in fig. 6, the flow channels of the first conduit 1211 and the second conduit 1212 are both in an expanded state, and the second end of the second conduit 1212 is no longer pressed by the second end of the first conduit 1211, so that the valve structure 121 is in an open state, and the liquid metal in the receiving chamber 110 easily passes through the valve structure 121, so that the liquid metal more easily flows into the capacitive sensor 122. When the accommodation chamber 110 is restored, the liquid metal flowing into the capacitance sensor 122 flows into the first conduit 1211 communicating with the accommodation chamber 110 through the second conduit 1212, and then flows into the accommodation chamber 110.
The amount of liquid metal in the capacitance sensor 122 parallel to the stretching direction is small, and the amount of liquid metal in the capacitance sensor 122 perpendicular to the stretching direction is large, so that the capacitance value of the capacitance sensor 122 perpendicular to the stretching direction is high, and the capacitance value of the capacitance sensor 122 parallel to the stretching direction is low, so that the magnitude and the direction of the stress can be judged according to the magnitude of the capacitance.
The capacitive sensor 122 is a two-layer flexible substrate with a liquid metal layer injected therebetween, so that the two-layer flexible substrate can be prevented from sticking together during the manufacturing process. In another embodiment, capacitive sensor 122 includes an interdigital capacitance. The interdigital capacitor can be printed by a 3D printing method, is arranged on the flexible substrate and consists of a first electrode cavity 1221 and a second electrode cavity 1222 which are arranged in a crossing manner, the number and the distance of the interdigital can be selected according to the sensitivity requirement, and a capacitor structure is formed between the first electrode cavity 1221 and the second electrode cavity 1222 and is used for inducing a corresponding capacitor according to the liquid metal capacity. In another embodiment, the interdigital capacitor has a certain thickness, for example, 20 micrometers, so as to prevent the first electrode cavity 1221 and the second electrode cavity 1222 from being stuck. The specific thickness of the interdigital capacitor can also be selected according to practical situations, and the implementation is not particularly limited.
In another embodiment, referring to fig. 2, electrical signal measurement device 120 further includes a solid state electrode including a first electrode 131 and a second electrode 132; the first electrode 131 is connected to the first electrode cavity 1221, and the second electrode 132 is connected to the second electrode cavity 1222 for detecting the capacitance value of the capacitive sensor 122. And the solid electrode position is connected with an electric signal receiver to measure the capacitance value sensed by each capacitor, and the stress direction and the stress of the flexible sensor are determined according to the measured capacitance values. The capacitive sensor 122 and the electrical signal receiver may be connected by solid metal wires or conductive polymers.
The application also provides a preparation method of the flexible sensor, as shown in fig. 7, comprising the steps of S1 to S3, wherein:
step S1, providing a flexible substrate mould, filling a flexible substrate precursor in the flexible substrate mould, and curing to form a flexible substrate;
s2, preparing a containing cavity and at least two electric signal measuring devices on the flexible substrate, and filling a liquid conductive medium in the containing cavity; the electric signal measuring device comprises a valve structure and a capacitance sensor, the capacitance sensor is communicated with the accommodating cavity through the valve structure, and an included angle is formed between any two electric signal measuring devices and a connecting line between the accommodating cavities;
and step S3, packaging the liquid conductive medium to finish the preparation of the flexible sensor.
According to the preparation method of the flexible sensor, the accommodating cavity and the valve structure are prepared on the flexible substrate, the liquid conductive medium is filled in the accommodating cavity, the capacitance sensor is prepared in at least two directions of the accommodating cavity, the mobility of the liquid conductive medium in the accommodating cavity is utilized, when the capacitance sensor is extruded under the action of external force, different amounts of liquid conductive medium flow into the capacitance sensor in different directions, and then the stress direction and the stress magnitude of the flexible sensor can be determined according to the inflow of the liquid conductive medium.
In an embodiment, the providing a flexible substrate mold, filling a flexible substrate precursor in the flexible substrate mold and curing, forming a flexible substrate includes:
providing a rigid substrate;
printing a first die on one side of the rigid substrate according to the corresponding shapes of the accommodating cavity and the electric signal measuring device, and curing to obtain the flexible substrate die;
and filling the flexible substrate precursor into the flexible substrate mould until the flexible substrate precursor is filled and cured to form the flexible substrate.
Wherein, when printing the flexible substrate mould, the flexible substrate mould can be printed on the surface of the rigid substrate by a 3D printing technology. The material for forming the mold comprises three monomers of polyvinyl chloride PVC, polyamide PA, styrene terpolymer ABS and the like, and the flexible substrate material can be polydimethylsiloxane PDMS, polyimide PI, polymethyl methacrylate PMMA and the like.
In one embodiment, the preparing a receiving cavity and at least two electrical signal measuring devices on the flexible substrate includes:
printing the accommodating cavity on the flexible substrate, and printing the electric signal measuring device in at least two directions of the accommodating cavity;
and filling a liquid conductive medium into the accommodating cavity, so that the surface of the liquid conductive medium is oxidized to form a fixed shape.
According to the embodiment, through a 3D printing technology, the accommodating cavity is printed on the flexible substrate, the accommodating cavity is filled with liquid conductive medium, and then a plurality of electric signal measuring devices are printed in different directions of the prepared accommodating cavity, so that the accommodating cavity and the electric signal measuring devices are prepared.
In one embodiment, the preparing a receiving cavity and at least two electrical signal measuring devices on the flexible substrate includes:
printing and curing a second mold on the flexible substrate and/or the flexible substrate mold according to the corresponding shapes of the accommodating cavity and the electric signal measuring device;
filling a precursor liquid material into the second die until the second die is filled and cured;
removing a second mold located within the receiving cavity and the electrical signal measuring device;
and filling a liquid conductive medium into the accommodating cavity, so that the surface of the liquid conductive medium is oxidized to form a fixed shape.
In the preparation of the accommodating cavity and the electrical signal measuring device, the second mold is printed on the flexible substrate and/or the flexible substrate mold according to the shapes of the accommodating cavity and the electrical signal measuring device, and the flexible substrate precursor is filled into the second mold to prepare the accommodating cavity, the valve structure and the capacitance sensor. Because the hard die material is fast in solidification and the structure is not easy to collapse, the three-dimensional structure of the accommodating cavity and the electric signal measuring device prepared by using the hard die is more accurate. In addition, the different size requirements of the accommodating cavity and the electric signal measuring device can be met by controlling the height of the die or by printing a plurality of layers of dies in a stacking manner. The material of the holding cavity and the valve structure can be the same as that of the flexible substrate, and the holding cavity and the valve structure are polydimethylsiloxane PDMS, polyimide PI, polymethyl methacrylate PMMA and the like. The liquid conductive medium can be liquid metal, and it is to be noted that if only one layer of structure is provided, no special requirement is made on the oxidation degree of the liquid metal; if a hard mould is required to be printed on the surface of the upper flexible substrate of the liquid metal, the liquid metal with the oxidation degree of 1-3wt%, namely the ratio of gallium oxide to gallium is 1-3wt%, is adopted, and the liquid metal in the state is easy to form and can play a certain supporting role. The filling amount of the liquid conductive medium (the volume of the accommodating cavity) should be equal to or greater than the total volume filling all the capacitive sensors.
In one embodiment, referring to fig. 2, the electrical signal measurement device further comprises a solid state electrode connected to the capacitive sensor, the solid state electrode comprising a first electrode and a second electrode;
printing the capacitive sensor 122 in at least two directions of the accommodating cavity by a 3D printing technology, the capacitive sensor 122 including a first electrode cavity 1221 and a second electrode cavity 1222;
printing a layer of liquid conductive medium on the corresponding positions of the valve structure and the capacitive sensor through a 3D printing technology;
the first electrode 131 is placed in the first electrode cavity 1221 and the second electrode 132 is placed in the second electrode cavity 1222.
The liquid conductive medium used in the process can be liquid metal with the oxidation degree of 1.0-3.0 wt%, so that the liquid conductive medium is easier to form and can prevent the upper flexible substrate and the lower flexible substrate from being adhered during packaging; and has better interface combination with the flexible substrate and good wettability. The solid state electrode may be disposed adjacent to the valve structure 121 so as to prevent the solid state electrode from debonding from the flexible substrate during stretching.
In one embodiment, the encapsulating the liquid conductive medium includes:
printing an upper layer mold on the flexible substrate mold and/or the flexible substrate according to the corresponding shapes of the accommodating cavity and the electric signal measuring device, and curing;
filling the flexible substrate precursor in the upper layer die until the flexible substrate precursor is filled and cured, so that the flexible substrate precursor coats the liquid conductive medium;
and removing the flexible substrate die and the upper die to obtain the flexible sensor.
Specifically, when packaging is performed, an upper layer mold containing the cavity, the valve structure and the corresponding structure of the capacitance sensor is printed on the flexible substrate mold and/or the flexible substrate, and then a flexible substrate precursor is filled in the upper layer mold, so that the flexible substrate precursor coats a liquid conductive medium, and an upper layer flexible substrate is formed after curing, so that packaging of the containing cavity, the valve structure and the capacitance sensor is realized. In addition, after removing the second mold located in the accommodating cavity and the electrical signal measuring device, the upper mold of the accommodating cavity, the valve structure and the corresponding structure of the capacitance sensor may be printed on only the second mold outside the accommodating cavity, and the encapsulation may be completed by filling the flexible substrate precursor. And the second mould at the corresponding positions of the accommodating cavity and the electric signal measuring device can be removed, and when the packaging is carried out, the upper layer mould is printed on the flexible substrate mould, and the packaging is completed by filling the precursor of the flexible substrate. If the prepared flexible sensor has special shape requirements, a hard mould with a corresponding shape can be printed on the surface of the upper flexible substrate, and then a precursor of the flexible substrate is filled and solidified to form the corresponding shape.
The present application will be described by taking as an example a method of manufacturing a flexible sensor having four electrical signal measuring devices for the knee region, since there will be differences in the structure of the flexible sensor used at different locations.
The preparation method of the flexible sensor specifically comprises the following steps:
(1) By using a PVC material through a 3D printing technique, a first mold, the height of which is 20mm, is printed on a polylactic acid rigid substrate according to the corresponding shapes of the four electric signal measuring devices 120 and one receiving cavity 110 and cured, to obtain a flexible substrate mold.
(2) And filling the PDMS flexible substrate precursor liquid material into the flexible substrate mould until the flexible substrate mould is filled. And heating to 80 ℃ by a heating disc for 20min to finish curing to form the PDMS flexible substrate.
(3) The receiving cavity 110 with the support structure 111, the capacitive sensors 122, and the valve structure 121 corresponding to each capacitive sensor 122 are prepared by 3D printing on the PDMS flexible substrate using the PDMS flexible substrate precursor liquid material and cured. The second mold may be printed on the PDMS flexible substrate and/or the flexible substrate mold with PVC material and cured according to the shapes of the accommodating cavity 110, the capacitance sensor 122 and the valve structure 121, and then the second mold is filled with the liquid material of the PDMS flexible substrate precursor until the second mold is filled and cured, and then the accommodating cavity and the second mold with the corresponding shape of the electrical signal measuring device are removed. The capacitive sensor 122 area is rectangular, 4cm by 3cm. The four electrical signal measuring devices 120 form a cross shape; the receiving chamber 110 is circular and has a diameter of 7cm.
(4) The liquid conductive medium storage area of the accommodating cavity 110 is filled with liquid metal EGaIn, so that the surface of the liquid metal is naturally oxidized to form a fixed shape and a fixed area.
(5) Corresponding patterns are printed in the capacitance sensing area by a 3D printing method according to the shapes of the valve structure 121 and the capacitance sensor 122 by using EGaIn with high viscosity and oxidation degree of 1.7wt%, and the thickness is 20 micrometers.
(6) And a solid electrode is placed near the valve structure 121, and the deformation of the middle position is large and the deformation of the two sides is small during stretching, so that the solid electrode and the flexible substrate are prevented from being debonded during stretching.
(7) Printing an upper layer mould on the flexible substrate mould, refilling the liquid metal surface and the solid electrode with the liquid material of the precursor of the flexible substrate, heating and curing to complete the whole encapsulation of the flexible sensor.
(8) And removing the rigid substrate and the upper layer mould, connecting the solid electrode with an electric signal receiver, and completing the preparation of the flexible sensor.
The application also provides a use method of the flexible sensor, as shown in fig. 8, the use method of the flexible sensor comprises steps 810 to 830, wherein:
step 810, placing the accommodating cavity 110 of the flexible sensor on the surface of the object to be measured, and adhering the plurality of electrical signal measuring devices 120 to different directions on the surface of the object to be measured;
step 820, obtaining parameters of each electrical signal measuring device 120;
and step 830, determining the stress direction and the stress magnitude of the surface of the to-be-detected body according to the parameters.
The present application will be described with respect to a flexible sensor for knee region prepared as described above, and a method of using the same. Placing the prepared accommodating cavity 110 of the flexible sensor on the surface of a body to be measured, and measuring the motion signal of the human body, wherein the method specifically comprises the following steps of:
(1) Two electrical signal measuring devices 120 of the flexible sensor are adhered to the knee part in parallel with the stretching direction of the muscle, and the other two electrical signal measuring devices 120 are adhered to both sides of the knee in perpendicular to the stretching direction of the muscle. Spot bonding is performed through an adhesive dressing around the housing cavity 110 of the flexible sensor and on the electrical signal measuring device 120 to ensure that the extrusion of the housing cavity 110 and the stretching process of the electrical signal measuring device 120 are relatively independent.
(2) The knee will produce the extrusion effect to holding chamber 110 when crooked, simultaneously, when the valve structure 121 of parallel and atress direction received vertical tensile, valve structure 121 was closed, and liquid metal more difficult to gush into electric signal measuring device 120, and when the valve structure 121 of perpendicular and atress direction received horizontal tensile, valve structure 121 opening was enlarged, and liquid metal more gushed into electric signal measuring device 120 easily. The amount of liquid metal flowing into the capacitance sensors 122 in the four electrical signal measuring devices 120 is different, the amount of liquid metal in the capacitance sensors 122 parallel to the stretching direction is smaller, and the amount of liquid metal in the capacitance sensors 122 perpendicular to the stretching direction is larger, so that the capacitance value of the capacitance sensors 122 perpendicular to the stretching direction is high, and the capacitance value of the capacitance sensors 122 parallel to the capacitance sensors is low, and therefore the movement state of the knee is judged to be curved, and the greater the difference between the two capacitance values is, the greater the bending degree of the knee is. The motion state of the knee is inferred from the difference in the electrical signals.
(3) When the liquid conductive medium storage area is restored, the liquid metal easily flows out of the electrical signal measuring device 120 and returns to the accommodating cavity 110 due to the valve structure 121.
(4) Repeating the above circulation action to finish the measurement of the knee movement state.
It should be understood that, although the steps in the flowcharts of fig. 7 and 8 are shown in order as indicated by the arrows, these steps are not necessarily performed in order as indicated by the arrows. The steps are not strictly limited to the order of execution unless explicitly recited herein, and the steps may be executed in other orders. Moreover, at least some of the steps in fig. 7 and 8 may include multiple sub-steps or stages that are not necessarily performed at the same time, but may be performed at different times, nor does the order in which the sub-steps or stages are performed necessarily occur in sequence, but may be performed alternately or alternately with at least a portion of the other steps or sub-steps of other steps.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the application. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of protection of the present application is to be determined by the appended claims.
Claims (13)
1. A flexible sensor comprising a receiving cavity and at least two electrical signal measuring devices; wherein:
the accommodating cavity is filled with a liquid conductive medium;
the electric signal measuring devices are communicated with the accommodating cavity, and the connecting lines between any two electric signal measuring devices and the accommodating cavity are provided with included angles, so that after the liquid conductive medium in the accommodating cavity is pressurized and is respectively filled into the electric signal measuring devices, parameters of the electric signal measuring devices are detected, and the stress direction and the stress magnitude of the flexible sensor are determined according to the parameters;
the electric signal measuring device comprises a valve structure and a capacitance sensor; the capacitive sensor comprises a first electrode cavity and a second electrode cavity; the first electrode cavity and the second electrode cavity are arranged at intervals; the first electrode cavity and the second electrode cavity are respectively communicated with the accommodating cavity through the valve structure and are used for inducing corresponding capacitance according to the liquid conductive medium capacity entering the first electrode cavity and the second electrode cavity; the valve structure is used for adjusting the opening of the valve according to the magnitude and the direction of the pressure; when the flexible sensor is under pressure, the liquid conductive medium in the accommodating cavity is filled into the first electrode cavity and the second electrode cavity through the valve structure.
2. The flexible sensor of claim 1, wherein the electrical signal measurement device further comprises a solid state electrode comprising a first electrode and a second electrode; the first electrode is connected with the first electrode cavity, and the second electrode is connected with the second electrode cavity and used for detecting the capacitance value of the capacitance sensor.
3. The flexible sensor of claim 1, wherein the valve structure comprises a first conduit and a second conduit that are sleeved;
the first end of the first conduit is connected with the accommodating cavity, the first end of the second conduit is connected with the capacitance sensor, and the second end of the second conduit extends into the first conduit from the second end of the first conduit and is connected with the first conduit.
4. The flexible sensor of claim 1, wherein the capacitive sensor comprises an interdigital capacitance.
5. The flexible sensor of claim 1, wherein a plurality of support structures are disposed within the receiving cavity, the support structures extending along a center of the receiving cavity toward the electrical signal measurement device.
6. The flexible sensor of claim 1, wherein any two adjacent electrical signal measurement devices are at equal angles to the line between the receiving chamber.
7. A method of manufacturing a flexible sensor, characterized in that the method of manufacturing is used to manufacture the flexible sensor of any one of claims 1 to 6, the method comprising:
s1, providing a flexible substrate mould, filling a flexible substrate precursor in the flexible substrate mould, and curing to form a flexible substrate;
s2, preparing a containing cavity and at least two electric signal measuring devices on the flexible substrate, and filling a liquid conductive medium in the containing cavity; the electric signal measuring device comprises a valve structure and a capacitance sensor, the capacitance sensor is communicated with the accommodating cavity through the valve structure, and an included angle is formed between any two electric signal measuring devices and a connecting line between the accommodating cavities;
and S3, packaging the liquid conductive medium to finish the preparation of the flexible sensor.
8. The method of manufacturing a flexible sensor according to claim 7, wherein step S1 comprises:
providing a rigid substrate;
printing a first die on the surface of the rigid substrate according to the corresponding shapes of the accommodating cavity and the electric signal measuring device, and solidifying to obtain the flexible substrate die;
and filling the flexible substrate precursor into the flexible substrate mould until the flexible substrate precursor is filled and cured to form the flexible substrate.
9. The method of manufacturing a flexible sensor according to claim 7, wherein step S2 comprises:
printing the accommodating cavity on the flexible substrate, and printing the electric signal measuring device in at least two directions of the accommodating cavity;
and filling a liquid conductive medium into the accommodating cavity, so that the surface of the liquid conductive medium is oxidized to form a fixed shape.
10. The method of manufacturing a flexible sensor according to claim 7, wherein step S2 comprises:
printing and curing a second mold on the flexible substrate and/or the flexible substrate mold according to the corresponding shapes of the accommodating cavity and the electric signal measuring device;
filling a precursor liquid material into the second die until the second die is filled and cured;
removing a second mold located within the receiving cavity and the electrical signal measuring device;
and filling a liquid conductive medium into the accommodating cavity, so that the surface of the liquid conductive medium is oxidized to form a fixed shape.
11. The method of manufacturing a flexible sensor of claim 7, wherein the electrical signal measurement device further comprises a solid state electrode, the solid state electrode being coupled to the capacitive sensor.
12. The method of manufacturing a flexible sensor according to claim 7, wherein step S3 comprises:
printing an upper layer mold on the flexible substrate mold and/or the flexible substrate according to the corresponding shapes of the accommodating cavity and the electric signal measuring device, and curing;
filling the flexible substrate precursor in the upper layer die until the flexible substrate precursor is filled and cured, so that the flexible substrate precursor coats the liquid conductive medium;
and removing the flexible substrate die and the upper die to obtain the flexible sensor.
13. A method of using a flexible sensor according to any one of claims 1 to 6, wherein the method comprises:
placing the accommodating cavity of the flexible sensor on the surface of the body to be measured, and adhering a plurality of electric signal measuring devices in different directions on the surface of the body to be measured;
acquiring parameters of each electric signal measuring device;
and determining the stress direction and the stress magnitude of the surface of the to-be-detected body according to the parameters.
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| CN110987089B (en) * | 2019-12-26 | 2021-01-15 | 华中科技大学 | Multifunctional flexible metamorphic sensor with single metal layer electrode, preparation method and application |
| CN111551294B (en) * | 2020-05-21 | 2021-03-30 | 浙江大学 | Flexible pressure sensor based on liquid metal photocuring printing technology |
| US11486744B1 (en) | 2021-08-20 | 2022-11-01 | Toyota Research Institute, Inc. | Valve based deformable sensor having rigidity adjustment capability |
| CN113776699B (en) * | 2021-09-18 | 2024-01-30 | 太原理工大学 | Positive pressure insensitive interdigital capacitive strain sensor and preparation method thereof |
| CN115014590B (en) * | 2022-06-16 | 2023-10-20 | 东华大学 | Piezoelectric sensor and preparation method thereof |
| CN116237321B (en) * | 2023-03-15 | 2023-10-17 | 清华大学深圳国际研究生院 | Flexible pipeline robot |
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