CN110965037B - Film coating machine capable of rapidly cooling and using method thereof - Google Patents
Film coating machine capable of rapidly cooling and using method thereof Download PDFInfo
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- CN110965037B CN110965037B CN201911184344.1A CN201911184344A CN110965037B CN 110965037 B CN110965037 B CN 110965037B CN 201911184344 A CN201911184344 A CN 201911184344A CN 110965037 B CN110965037 B CN 110965037B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
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Abstract
The invention discloses a film coating machine capable of quickly cooling, which comprises a case, a film coating cover, a temperature regulating seat, a feeding seat, a discharging seat and a discharging groove, wherein a supporting seat is arranged at the center inside the case, and a first servo motor is arranged at the center of the bottom of the supporting seat; in the film coating operation process, the operations of feeding, film coating cooling and discharging are respectively completed while the rotary seat rotates every time, the position of the limiting seat can be accurately positioned in each operation process, the accuracy of the completion of the film coating operation is ensured, the normal running of circular processing is ensured, after one film coating part is cooled every time, the third servo motor works to drive the heat conducting block to rotate, the heat conducting block which absorbs heat rotates to the position below the semiconductor refrigerating sheet, the other cooled heat conducting block moves to the position above the limiting seat, the heat absorbed by the semiconductor refrigerating sheet is transferred to the radiating sheet to be radiated out for cooling operation, the temperature reduction operation is rapidly completed on the film coating part, and the film coating efficiency is improved.
Description
Technical Field
The invention relates to the field of coating equipment, in particular to a coating machine capable of rapidly cooling and a using method thereof.
Background
The vacuum coating machine mainly refers to a coating machine which needs to be carried out under a higher vacuum degree, and specifically comprises various types, such as vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like; the main idea is to divide into evaporation and sputtering.
The existing film plating machine needs to perform one-step and one-step independent operation on the film plated part in the film plating process of the film plated part, and the whole operation process is complex and tedious; in the process of automatically and continuously coating the film-coated part, the film-coated part needs to correspond to each part for operation, and then each processing step can be ensured to be smoothly carried out; meanwhile, after the existing film-coated part is subjected to primary film coating, the part is generally cooled through natural cooling, the consumed time of the natural cooling is long, the consumed time of the film coating is greatly prolonged, and the film coating efficiency is reduced.
Disclosure of Invention
The invention aims to provide a film coating machine capable of rapidly cooling and a using method thereof, aiming at overcoming the defects that the existing film coating machine needs to independently operate the film coated parts one by one in the film coating process, and the whole operation process is complex and tedious; in the process of automatically and continuously coating the film-coated part, the film-coated part needs to correspond to each part for operation, and then each processing step can be ensured to be smoothly carried out; meanwhile, after the existing film-coated part is subjected to primary film coating, the part is generally cooled through natural cooling, the consumption time of the natural cooling is long, the film-coating consumption time is greatly prolonged, and the film-coating efficiency is reduced.
The purpose of the invention can be realized by the following technical scheme:
a film coating machine capable of rapidly cooling comprises a machine case, a film coating cover, a temperature adjusting seat, a feeding seat, a discharging seat and a discharging groove, wherein a supporting seat is installed at the center of the interior of the machine case, a first servo motor is installed at the center of the bottom of the supporting seat, a rotating seat is installed at the output end of the first servo motor and positioned at the top of the supporting seat, a limiting groove is formed in the top side of the rotating seat, a plurality of limiting holes are formed in the top of the limiting groove at equal intervals, a plurality of limiting seats are installed around the outer side of the rotating seat, and adjacent limiting seats are connected through a connecting baffle ring;
a feeding seat, a coating cover and a temperature regulating seat are respectively arranged above the limiting seat, a blanking groove is formed in the bottom of the limiting seat and positioned on the top side of the rotary seat, a connecting rod is arranged below the top wall inside the case, a supporting plate is arranged at the bottom of the connecting rod, an outer sleeve is arranged at one end of the bottom of the supporting plate, an inner sleeve is slidably arranged inside the outer sleeve, the bottom end of the inner sleeve is connected with the coating cover, an outer sleeve rod is arranged at the other end of the bottom of the supporting plate, an inner sleeve rod is slidably arranged inside the outer sleeve rod, a limiting sliding plate is arranged at the bottom of the inner sleeve rod, a limiting rod is arranged at the bottom of the limiting sliding plate, the coating cover, the temperature regulating seat and the limiting sliding plate are fixed through a connecting plate, a first hydraulic rod is arranged at the bottom of the supporting plate and positioned between the outer sleeve and the outer sleeve rod, and the telescopic end of the first hydraulic rod is fixed above the connecting plate;
a blanking seat is arranged below the rotary seat and at the bottom side of the blanking groove, a second hydraulic rod is arranged at the bottom of the blanking seat, a lifting plate is slidably arranged at the telescopic end of the second hydraulic rod and in the blanking seat, a third hydraulic rod is arranged at one side of the blanking seat, a placing groove is formed in the inner wall of the blanking seat, and a push plate is arranged at the telescopic end of the third hydraulic rod and in the placing groove;
the utility model discloses a semiconductor refrigeration piece, temperature regulation seat, including temperature regulation seat, runner, the first servo motor of temperature regulation seat top center department, the runner has been seted up to temperature regulation seat bottom, the bull stick is installed to third servo motor output, the heat conduction piece is installed to bull stick bilateral symmetry, the inside semiconductor refrigeration piece that just is located the heat conduction piece top of temperature regulation seat is installed.
As a further scheme of the invention: sealing doors are installed above and below the outer side of the case, a vacuum pump is installed at the top of the case, and the vacuum pump is in conduction connection with the case through a guide pipe.
As a further scheme of the invention: the feeding seat, the coating cover, the temperature adjusting seat and the discharging groove are arranged in a clockwise direction, the feeding seat, the coating cover, the temperature adjusting seat and the discharging groove are arranged at equal intervals, and the distance between the feeding seat and the coating cover is the same as that between the adjacent limiting seats.
As a further scheme of the invention: the limiting holes correspond to the limiting seats respectively, and the limiting holes are matched with the limiting rods for use.
As a further scheme of the invention: the ball is installed in the rolling of gag lever post bottom, the spout has been seted up to outer loop bar inside, the inside cover that is located outer loop bar outside of inner loop bar top is equipped with the spring.
As a further scheme of the invention: the semiconductor refrigeration piece top just is located temperature regulation seat internally mounted and has a plurality of fin, a plurality of louvre has been seted up to fin one side.
As a further scheme of the invention: the top of the limiting seat is provided with a coating groove, the coated parts are limited in the coating groove, and the size of the blanking groove is the same as that of the coated parts.
As a further scheme of the invention: the bottom side of the semiconductor refrigeration piece is in contact with the top side of the heat conduction block, and the size of the bottom side of the heat conduction block is larger than that of the top side of the coated part.
As a further scheme of the invention: the thickness of spacing seat and connection fender ring is the same, spacing seat and connection fender ring top side all install the first ball of a plurality of.
The using method of the film coating machine comprises the following specific steps:
the method comprises the following steps: placing a plurality of film-coated parts into the feeding seat, after a sealing door is closed, ensuring that the inside of the case is in a vacuum state through the work of a vacuum pump, driving a rotary seat to rotate by a first servo motor at the bottom of a supporting seat, and automatically dropping the film-coated parts into a film-coated groove of the feeding seat when a limiting seat sequentially passes through the bottom of the feeding seat to finish automatic feeding operation;
step two: when the coated part is positioned at the bottom of the coated cover along with the limiting seat, the coated cover automatically descends, namely the inner loop bar extends out of the outer loop bar, at the moment, the heated target material enables surface components to be evaporated in the form of atomic groups and ions, and the surface components are settled on the surface of the coated part through the coated cover along the inner loop bar and the outer loop bar to finish primary coating;
step three: when the coated part is positioned below the temperature adjusting seat along with the limiting seat, the temperature adjusting seat descends to the bottom of the heat conducting block to be in contact with the top of the coated part, heat on the top of the coated part is absorbed through the low-temperature heat conducting block to complete coating, and after one coated part is cooled each time, the third servo motor works to drive the heat conducting block to rotate, the heat conducting block which absorbs heat rotates to the position below the semiconductor refrigerating sheet, the other cooled heat conducting block moves to the position above the limiting seat, and the heat absorbed by the semiconductor refrigerating sheet is transferred to the radiating sheet to be radiated out for cooling operation;
step four: when the coated parts move to the upper part of the blanking groove along with the limiting seat, the coated parts fall onto the lifting plate of the blanking seat, after each coated part falls, the second hydraulic rod drives the lifting plate to descend by the thickness of one coated part until the coated parts are accumulated in the blanking seat, at the moment, the coating machine is stopped to coat, the sealing door at the lower part is opened, and the third hydraulic rod extends to drive the push plate in the placing groove to move so as to push out all the accumulated coated parts;
step five: the coating cover and the temperature-adjusting seat descend and ascend synchronously, namely, in the coating operation process, one-time feeding is completed while the rotary seat rotates every time, coating cooling and discharging are performed, in the rotary seat rotating process, the ball at the bottom of the limiting rod rolls in the limiting groove, when the ball rolls to the upper side of the limiting hole, the spring in the outer sleeve rod returns to the original state to drive the inner sleeve rod to stretch out from the outer sleeve rod and drive the first hydraulic rod to extend, the limiting rod is clamped into the limiting hole, namely, the coating cover and the temperature-adjusting seat are driven to descend, the limiting hole corresponds to the limiting seat, the feeding seat, the coating cover, the temperature-adjusting seat and the discharging groove are accurately positioned with the limiting seat respectively, before next rotation is performed, the first hydraulic rod contracts, the limiting rod is pulled out from the limiting hole while the spring in the outer sleeve rod compresses, and the coating cover continues to rotate along the limiting groove until the next limiting hole comes.
The invention has the beneficial effects that: the invention carries out the operation of feeding, coating cooling and discharging respectively while rotating the rotary seat each time in the process of coating operation through reasonable structural design, when the limiting seat sequentially passes through the bottom of the feeding seat, the coating part automatically falls into the coating groove of the feeding seat to complete automatic feeding operation, when the coating part is positioned at the bottom of the coating cover along with the limiting seat, the coating cover descends, namely the inner loop bar extends out of the outer loop bar, the surface components are evaporated in the form of atomic groups and ions by the heated target material, and are settled on the surface of the coating part through the coating cover along the inner loop bar and the outer loop bar to complete primary coating, when the coating part is positioned below the temperature-adjusting seat along with the limiting seat, the temperature-adjusting seat is lowered to the bottom, the heat conducting block is contacted with the top of the coated part, heat at the top of the coated part is absorbed through the low-temperature heat conducting block, coating is completed, and the effect of rapid cooling is achieved;
when the rotary seat rotates, the ball at the bottom of the limiting rod rolls in the limiting groove, when the ball rolls above the limiting hole, the spring in the outer sleeve rod returns to the original state to drive the inner sleeve rod to extend out of the outer sleeve rod and drive the first hydraulic rod to extend, the limiting rod is clamped into the limiting hole, namely the coating cover and the temperature adjusting seat are driven to descend, the limiting hole corresponds to the limiting seat, the feeding seat, the coating cover, the temperature adjusting seat and the discharging groove are ensured to be accurately positioned with the limiting seat respectively, before the next rotation is carried out, the first hydraulic rod contracts, the limiting rod is pulled out of the limiting hole while the spring in the outer sleeve rod is compressed, the limiting rod continues to rotate along the limiting groove until the next limiting hole arrives, the accurate positioning can be carried out on the limiting seat in each operation process, the accuracy of the coating operation is ensured, and the normal operation of the cycle processing is ensured;
after cooling a coating film part each time, the third servo motor works to drive the heat conduction block to rotate, the heat conduction block absorbing heat is rotated to the lower part of the semiconductor refrigerating sheet, the other heat conduction block after cooling is moved to the upper part of the limiting seat, the heat is absorbed by the semiconductor refrigerating sheet and transmitted to the radiating fin to be dissipated for cooling operation, the cooling operation is rapidly completed on the coating film part, and the coating film efficiency is improved.
Drawings
In order to facilitate understanding for those skilled in the art, the present invention will be further described with reference to the accompanying drawings.
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic diagram of the internal structure of the case according to the present invention;
FIG. 3 is a schematic view of a supporting seat mounting structure according to the present invention;
FIG. 4 is a top view of the support base of the present invention;
FIG. 5 is a schematic view of the internal structure of the outer casing rod according to the present invention;
FIG. 6 is a cross-sectional view of the temperature adjustment base of the present invention;
FIG. 7 is a schematic view of the internal structure of the blanking seat of the present invention.
In the figure: 1. a chassis; 2. a vacuum pump; 3. a supporting seat; 4. a first servo motor; 5. rotating; 6. a limiting groove; 7. a limiting hole; 8. a limiting seat; 9. connecting a baffle ring; 10. a connecting rod; 11. a support plate; 12. an outer sleeve; 13. an inner sleeve; 14. coating a film cover; 15. an outer loop bar; 16. an inner loop bar; 17. a first hydraulic lever; 18. a temperature adjusting seat; 20. a feeding seat; 21. a blanking seat; 22. a discharging groove; 23. a lifting plate; 24. a second hydraulic rod; 25. a chute; 26. a spring; 27. a limiting sliding plate; 28. a limiting rod; 29. a ball bearing; 30. a rotating rod; 31. rotating the groove; 32. a heat conducting block; 33. a semiconductor refrigeration sheet; 34. a third hydraulic lever; 35. a third servo motor; 36. a placement groove; 37. a push plate.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-7, a film coating machine capable of rapidly cooling comprises a machine case 1, a film coating cover 14, a temperature adjusting seat 18, a feeding seat 20, a discharging seat 21 and a discharging groove 22, wherein a supporting seat 3 is installed at the center inside the machine case 1, a first servo motor 4 is installed at the center of the bottom of the supporting seat 3, a rotary seat 5 is installed at the output end of the first servo motor 4 and positioned at the top of the supporting seat 3, a limiting groove 6 is formed in the top side of the rotary seat 5, a plurality of limiting holes 7 are formed in the top of the limiting groove 6 at equal intervals, a plurality of limiting seats 8 are installed around the outer side of the rotary seat 5, and adjacent limiting seats 8 are connected through a connecting retaining ring 9;
a feeding seat 20, a coating cover 14 and a temperature adjusting seat 18 are respectively arranged above the limiting seat 8, a blanking groove 22 is formed in the bottom of the limiting seat 8 and located on the top side of the rotary seat 5, a connecting rod 10 is arranged below the top wall inside the case 1, a supporting plate 11 is arranged at the bottom of the connecting rod 10, an outer sleeve 12 is arranged at one end of the bottom of the supporting plate 11, an inner sleeve 13 is arranged inside the outer sleeve 12 in a sliding manner, the bottom end of the inner sleeve 13 is connected with the coating cover 14, an outer sleeve rod 15 is arranged at the other end of the bottom of the supporting plate 11, an inner sleeve rod 16 is arranged inside the outer sleeve rod 15 in a sliding manner, a limiting sliding plate 27 is arranged at the bottom of the inner sleeve rod 16, a limiting rod 28 is arranged at the bottom of the limiting sliding plate 27, the coating cover 14, the temperature adjusting seat 18 and the limiting sliding plate 27 are fixed through a connecting plate, a first hydraulic rod 17 is arranged at the bottom of the supporting plate 11 and located between the outer sleeve 12 and the outer sleeve rod 15, and the telescopic end of the first hydraulic rod 17 is fixed above the connecting plate;
a blanking seat 21 is arranged below the rotary seat 5 and at the bottom side of the blanking groove 22, a second hydraulic rod 24 is arranged at the bottom of the blanking seat 21, a lifting plate 23 is slidably arranged at the telescopic end of the second hydraulic rod 24 and in the blanking seat 21, a third hydraulic rod 34 is arranged at one side of the blanking seat 21, a placing groove 36 is formed in the inner wall of the blanking seat 21, and a push plate 37 is arranged at the telescopic end of the third hydraulic rod 34 and in the placing groove 36;
the third servo motor 35 is installed at the center of the top of the temperature adjusting seat 18, the rotating groove 31 is formed in the bottom of the temperature adjusting seat 18, the rotating rod 30 is installed at the output end of the third servo motor 35, the heat conducting blocks 32 are symmetrically installed on two sides of the rotating rod 30, and the semiconductor refrigerating sheet 33 is installed inside the temperature adjusting seat 18 and located above the heat conducting blocks 32.
Sealing doors are arranged above and below the outer side of the case 1, a vacuum pump 2 is arranged at the top of the case 1, and the vacuum pump 2 is in conduction connection with the case 1 through a guide pipe to provide a vacuum environment in the case 1.
The feeding seat 20, the coating cover 14, the temperature adjusting seat 18 and the discharging groove 22 are arranged in the clockwise direction, the feeding seat 20, the coating cover 14, the temperature adjusting seat 18 and the discharging groove 22 are arranged at equal intervals, the distance between the feeding seat 20 and the coating cover 14 is the same as the distance between the adjacent limiting seats 8, and the feeding seat 20, the coating cover 14, the temperature adjusting seat 18 and the discharging groove 22 are accurately positioned with the limiting seats 8 respectively.
Spacing hole 7 respectively with spacing seat 8 corresponding, spacing hole 7 and gag lever post 28 cooperation are used, can be through the cooperation of spacing hole 7 and gag lever post 28 with material loading seat 20, coating film cover 14, temperature regulation seat 18 and unloading groove 22 respectively with spacing seat 8 accurate positioning.
The coating film groove has been seted up at 8 tops of spacing seat, and the coating film part is spacing inside the coating film groove, and the unloading groove 22 size is the same with the coating film part size, is convenient for carry on spacing fixed to the coating film part.
The bottom side of the semiconductor refrigeration sheet 33 is in contact with the top side of the heat conduction block 32, and the size of the bottom side of the heat conduction block 32 is larger than that of the top side of the coated part, so that heat is transferred.
The thickness of the limiting seat 8 is the same as that of the connecting baffle ring 9, and a plurality of first balls are arranged on the top sides of the limiting seat 8 and the connecting baffle ring 9, so that the limiting seat 8 and the connecting baffle ring 9 can roll and slide through the bottom sides of the feeding seat 20, the coating cover 14 and the temperature adjusting seat 18.
The using method of the film coating machine comprises the following specific steps:
the method comprises the following steps: placing a plurality of film-coated parts into the feeding seat 20, after a sealing door is closed, ensuring that the interior of the case 1 is in a vacuum state through the work of the vacuum pump 2, driving the rotary seat 5 to rotate by the first servo motor 4 at the bottom of the supporting seat 3, and automatically dropping the film-coated parts into the film-coating groove of the feeding seat 20 when the limiting seat 8 passes through the bottom of the feeding seat 20 in sequence to finish automatic feeding operation;
step two: when the coated part is positioned at the bottom of the coating cover 14 along with the limiting seat 8, the coating cover 14 automatically descends, namely the inner loop bar 16 extends out of the outer loop bar 15, at the moment, the heated target material enables surface components to be evaporated in the form of atomic groups and ions, and the surface components are settled on the surface of the coated part through the coating cover 14 along the inner loop bar 16 and the outer loop bar 15 to finish primary coating;
step three: when the coated part is positioned below the temperature-adjusting seat 18 along with the limiting seat 8, the temperature-adjusting seat 18 descends until the heat-conducting block 32 at the bottom is contacted with the top of the coated part, the heat at the top of the coated part is absorbed by the low-temperature heat-conducting block 32 to complete coating, and after one coated part is cooled each time, the third servo motor 35 works to drive the heat-conducting block 32 to rotate, the heat-conducting block 32 which absorbs the heat rotates to the position below the semiconductor chilling plate 33, and the other cooled heat-conducting block 32 moves to the position above the limiting seat 8 and is transmitted to the radiating fin to be radiated for cooling operation after the heat is absorbed by the semiconductor chilling plate 33;
step four: when the coated parts move to the upper part of the blanking groove 22 along with the limiting seat 8, the coated parts fall onto the lifting plate 23 of the blanking seat 21, after each coated part falls, the second hydraulic rod 24 drives the lifting plate 23 to descend by the thickness of one coated part until the coated parts are accumulated in the blanking seat 21, at the moment, the coating of the coating machine is stopped, the sealing door at the lower part is opened, and the third hydraulic rod 34 extends to drive the push plate 37 in the placing groove 36 to move so as to push out all the accumulated coated parts;
step five: the coating cover 14 and the temperature-adjusting base 18 descend and ascend synchronously, namely, in the coating operation process, the rotation of the rotary seat 5 at each time and the operation of one-time feeding, coating cooling and discharging are completed respectively, in the rotation process of the rotary seat 5, the ball 29 at the bottom of the limiting rod 28 rolls in the limiting groove 6, when the ball rolls above the limiting hole 7, the spring 26 in the outer sleeve 15 restores to the original state to drive the inner sleeve 16 to extend out from the outer sleeve 15 and drive the first hydraulic rod 17 to extend, the limiting rod 28 is clamped into the limiting hole 7, namely, the coating cover 14 and the temperature-adjusting base 18 are driven to descend, the limiting hole 7 corresponds to the limiting base 8, and the fact that the feeding base 20, the coating cover 14, the temperature-adjusting base 18 and the discharging groove 22 are accurately positioned with the limiting base 8 respectively is guaranteed, before the next rotation, the first hydraulic rod 17 contracts, the limiting rod 28 is pulled out from the limiting hole 7 while the spring 26 in the outer sleeve 15 compresses, and continues to rotate along the limiting groove 6 until the next limiting hole 7 comes.
The invention carries out coating operation by reasonable structural design, the operation of feeding, coating cooling and blanking is respectively completed each time when the rotating seat 5 rotates in the coating operation process, when the limiting seat 8 sequentially passes through the bottom of the feeding seat 20, the coated parts automatically fall into the coating tank of the feeding seat 20 to complete automatic feeding operation, when the coated parts are positioned at the bottom of the coating cover 14 along with the limiting seat 8, the coating cover 14 descends, namely the inner loop bar 16 extends out from the outer loop bar 15, the surface is evaporated by the heated target material, the coated parts are settled on the surface of the coated parts along the inner loop bar 16 and the outer loop bar 15 through the coating cover 14 to complete primary coating, when the coated parts are positioned below the temperature adjusting seat 18 along with the limiting seat 8, the temperature-adjusting seat 18 is lowered to the bottom of the heat-conducting block 32 to be contacted with the top of the coated part, heat on the top of the coated part is absorbed through the low-temperature heat-conducting block 32, coating is completed, and a quick cooling effect is achieved, when the coated part moves to the upper side of the blanking groove 22 along with the limiting seat 8, the coated part falls onto the lifting plate 23 of the blanking seat 21, after one coated part falls, the second hydraulic rod 24 drives the lifting plate 23 to fall by the thickness of one coated part, until the coated part is accumulated in the blanking seat 21, coating of a coating machine is stopped at the moment, a sealing door on the lower side is opened, the pushing plate 37 in the placing groove 36 is driven to move by the extension of the third hydraulic rod 34, all the accumulated coated parts are pushed out, and the coating efficiency of the coated parts is greatly improved through a circular processing mode; in the process of rotating the rotary seat 5, the ball 29 at the bottom of the limiting rod 28 rolls in the limiting groove 6, when the ball rolls above the limiting hole 7, the spring 26 in the outer sleeve rod 15 restores to the original state to drive the inner sleeve rod 16 to extend out of the outer sleeve rod 15 and drive the first hydraulic rod 17 to extend, the limiting rod 28 is clamped in the limiting hole 7 to drive the film coating cover 14 and the temperature adjusting seat 18 to descend, the limiting hole 7 corresponds to the limiting seat 8, and the feeding seat 20, the film coating cover 14, the temperature adjusting seat 18 and the discharging groove 22 are accurately positioned with the limiting seat 8 respectively; after a coated part is cooled each time, the third servo motor 35 works to drive the heat conducting block 32 to rotate, the heat conducting block 32 which absorbs heat rotates to the position below the semiconductor refrigerating sheet 33, the other cooled heat conducting block 32 moves to the position above the limiting seat 8, the heat is absorbed by the semiconductor refrigerating sheet 33 and transmitted to the radiating fin to be dissipated for cooling operation, the coated part is cooled rapidly, and the coating efficiency is improved.
The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.
Claims (10)
1. The coating machine capable of rapidly cooling is characterized by comprising a machine case (1), a coating cover (14), a temperature adjusting seat (18), a feeding seat (20), a discharging seat (21) and a discharging groove (22), wherein a supporting seat (3) is installed at the center inside the machine case (1), a first servo motor (4) is installed at the center of the bottom of the supporting seat (3), a rotary seat (5) is installed at the output end of the first servo motor (4) and positioned at the top of the supporting seat (3), a limiting groove (6) is formed in the top side of the rotary seat (5), a plurality of limiting holes (7) are formed in the top of the limiting groove (6) at equal intervals, a plurality of limiting seats (8) are installed around the outer side of the rotary seat (5), and adjacent limiting seats (8) are connected through a connecting retaining ring (9);
a feeding seat (20), a coating cover (14) and a temperature adjusting seat (18) are respectively installed above the limiting seat (8), a blanking groove (22) is formed in the bottom of the limiting seat (8) and located on the top side of the rotary seat (5), a connecting rod (10) is installed below the top wall inside the case (1), a supporting plate (11) is installed at the bottom of the connecting rod (10), an outer sleeve (12) is installed at one end of the bottom of the supporting plate (11), an inner sleeve (13) is installed inside the outer sleeve (12) in a sliding mode, the bottom end of the inner sleeve (13) is connected with the coating cover (14), an outer sleeve (15) is installed at the other end of the bottom of the supporting plate (11), an inner sleeve (16) is installed inside the outer sleeve (15) in a sliding mode, a limiting sliding plate (27) is installed at the bottom of the inner sleeve (16), a limiting rod (28) is installed at the bottom of the limiting sliding plate (27), the coating cover (14), the temperature adjusting seat (18) and the limiting sliding plate (27) are fixed through a connecting plate, a first hydraulic rod (17) is installed at the bottom of the supporting plate (11) and located between the outer sleeve (12) and the first hydraulic rod (17) is fixed above the connecting plate;
a blanking seat (21) is arranged below the rotary seat (5) and at the bottom side of the blanking groove (22), a second hydraulic rod (24) is arranged at the bottom of the blanking seat (21), the telescopic end of the second hydraulic rod (24) is positioned in the blanking seat (21), a lifting plate (23) is slidably arranged in the blanking seat (21), a third hydraulic rod (34) is arranged at one side of the blanking seat (21), a placing groove (36) is formed in the inner wall of the blanking seat (21), a push plate (37) is arranged at the telescopic end of the third hydraulic rod (34), and the push plate (37) is positioned in the placing groove (36);
temperature adjusting seat (18) top center department installs third servo motor (35), rotary trough (31) have been seted up to temperature adjusting seat (18) bottom, bull stick (30) are installed to third servo motor (35) output, heat conduction piece (32) are installed to bull stick (30) bilateral symmetry, semiconductor refrigeration piece (33) are installed to temperature adjusting seat (18) inside and being located heat conduction piece (32) top.
2. A coating machine capable of rapidly cooling according to claim 1, characterized in that sealing doors are installed above and below the outer side of the machine case (1), a vacuum pump (2) is installed on the top of the machine case (1), and the vacuum pump (2) is in conduction connection with the machine case (1) through a conduit.
3. The coating machine capable of rapidly cooling as claimed in claim 1, wherein the feeding base (20), the coating cover (14), the temperature adjusting base (18) and the blanking slot (22) are equidistantly arranged in a clockwise direction, and the distance between the feeding base (20) and the coating cover (14) is the same as the distance between adjacent limiting bases (8).
4. The coating machine capable of rapidly cooling according to claim 1, wherein the limiting holes (7) correspond to the limiting seats (8), and the limiting holes (7) are used in cooperation with the limiting rods (28).
5. The coating machine capable of rapidly cooling according to claim 1, wherein the limiting rod (28) is provided with a rolling ball (29) at the bottom in a rolling manner, the outer loop bar (15) is provided with a sliding groove (25) inside, and the outer side of the top of the inner loop bar (16) is sleeved with a spring (26) inside the outer loop bar (15).
6. The coating machine capable of rapidly cooling according to claim 1, wherein a plurality of cooling fins are installed at the top of the semiconductor cooling fin (33) and inside the temperature adjusting seat (18), and a plurality of cooling holes are formed in one side of the plurality of cooling fins.
7. The coating machine capable of rapidly cooling as claimed in claim 1, wherein the top of the limiting seat (8) is provided with a coating tank, the coated parts are limited in the coating tank, and the size of the feeding tank (22) is the same as that of the coated parts.
8. A coater capable of fast cooling according to claim 1, wherein the bottom side of the semiconductor cooling plate (33) is in contact with the top side of the heat conducting block (32), and the size of the bottom side of the heat conducting block (32) is larger than that of the top side of the part to be coated.
9. The coating machine capable of rapidly cooling according to claim 1, wherein the thickness of the limiting seat (8) and the thickness of the connecting baffle ring (9) are the same, and a plurality of first balls are arranged on the top sides of the limiting seat (8) and the connecting baffle ring (9).
10. The use method of the coating machine capable of rapidly cooling as claimed in any one of claims 1 to 9, characterized in that the use method of the coating machine comprises the following specific steps:
the method comprises the following steps: placing a plurality of film-coated parts into a feeding seat (20), after a sealing door is closed, working by a vacuum pump (2) to ensure that the interior of a case (1) is in a vacuum state, driving a rotary seat (5) to rotate by a first servo motor (4) at the bottom of a supporting seat (3), and automatically dropping the film-coated parts into a film-coating groove of the feeding seat (20) when a limiting seat (8) sequentially passes through the bottom of the feeding seat (20) to complete automatic feeding operation;
step two: when the coated part is positioned at the bottom of the coated cover (14) along with the limiting seat (8), the coated cover (14) automatically descends, namely the inner loop bar (16) extends out of the outer loop bar (15), the surface components are evaporated out in the form of atomic groups and ions by the heated target material, and the surface components are settled on the surface of the coated part through the coated cover (14) along the inner loop bar (16) and the outer loop bar (15), so that the primary coating is finished;
step three: when the coated part is positioned below the temperature-adjusting seat (18) along with the limiting seat (8), the temperature-adjusting seat (18) descends to the position that the heat-conducting block (32) at the bottom is in contact with the top of the coated part, the heat at the top of the coated part is absorbed by the low-temperature heat-conducting block (32) to complete coating, and after one coated part is cooled each time, the third servo motor (35) works to drive the heat-conducting block (32) to rotate, the heat-conducting block (32) which absorbs the heat rotates to the position below the semiconductor chilling plate (33), the other cooled heat-conducting block (32) moves to the position above the limiting seat (8), and the heat is absorbed by the semiconductor chilling plate (33) and is transmitted to the radiating fin to be radiated for cooling operation;
step four: when the coated parts move to the upper part of the blanking groove (22) along with the limiting seat (8), the coated parts fall onto the lifting plate (23) of the blanking seat (21), after one coated part falls each time, the second hydraulic rod (24) drives the lifting plate (23) to descend by the thickness of one coated part until the coated parts are accumulated in the blanking seat (21), at the moment, the coating of the coating machine is stopped, the sealing door at the lower part is opened, and the third hydraulic rod (34) extends to drive the push plate (37) in the placing groove (36) to move so as to push out all the accumulated coated parts;
step five: the coating film cover (14) and the temperature-adjusting seat (18) synchronously descend and ascend, namely, in the coating operation process, when the rotary seat (5) rotates each time, the operations of one-time feeding, coating film cooling and discharging are respectively completed, in the rotating process of the rotary seat (5), the balls (29) at the bottom of the limiting rod (28) roll in the limiting groove (6), when the balls roll above the limiting hole (7), the spring (26) in the outer sleeve rod (15) restores to be in the original state to drive the inner sleeve rod (16) to stretch out from the outer sleeve rod (15), the first hydraulic rod (17) is driven to extend, the limiting rod (28) is clamped into the limiting hole (7), namely, the coating film cover (14) and the temperature-adjusting seat (18) are driven to descend, the limiting hole (7) and the limiting seat (8) correspond to each other, the feeding seat (20), the coating film cover (14), the temperature-adjusting seat (18) and the discharging groove (22) are ensured to be accurately positioned with the limiting seat (8) respectively, before the next rotation, the first hydraulic rod (17) contracts, and the spring (7) simultaneously retracts and the outer sleeve rod (7) and then continues to rotate along the limiting groove (6).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911184344.1A CN110965037B (en) | 2019-11-27 | 2019-11-27 | Film coating machine capable of rapidly cooling and using method thereof |
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| CN201911184344.1A CN110965037B (en) | 2019-11-27 | 2019-11-27 | Film coating machine capable of rapidly cooling and using method thereof |
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| CN110965037B true CN110965037B (en) | 2023-04-11 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107794512A (en) * | 2017-10-30 | 2018-03-13 | 无锡源代码科技有限公司 | A kind of Multi-function rolling film-coating machine based on electronics industry |
| CN207525332U (en) * | 2017-10-30 | 2018-06-22 | 无锡源代码科技有限公司 | A kind of Multi-function rolling film-coating machine based on electronics industry |
| CN209323005U (en) * | 2018-10-24 | 2019-08-30 | 深圳市亨利莱科技有限公司 | A kind of vacuum coating equipment |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107794512A (en) * | 2017-10-30 | 2018-03-13 | 无锡源代码科技有限公司 | A kind of Multi-function rolling film-coating machine based on electronics industry |
| CN207525332U (en) * | 2017-10-30 | 2018-06-22 | 无锡源代码科技有限公司 | A kind of Multi-function rolling film-coating machine based on electronics industry |
| CN209323005U (en) * | 2018-10-24 | 2019-08-30 | 深圳市亨利莱科技有限公司 | A kind of vacuum coating equipment |
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