CN109234700A - A kind of vacuum coater of automobile rear view mirror lens - Google Patents

A kind of vacuum coater of automobile rear view mirror lens Download PDF

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Publication number
CN109234700A
CN109234700A CN201811001102.XA CN201811001102A CN109234700A CN 109234700 A CN109234700 A CN 109234700A CN 201811001102 A CN201811001102 A CN 201811001102A CN 109234700 A CN109234700 A CN 109234700A
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CN
China
Prior art keywords
fixedly connected
wall
vacuum coater
main body
rear view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811001102.XA
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Chinese (zh)
Inventor
黄胜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hangzhou Jinshanghang Mirror Co Ltd
Original Assignee
Hangzhou Jinshanghang Mirror Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hangzhou Jinshanghang Mirror Co Ltd filed Critical Hangzhou Jinshanghang Mirror Co Ltd
Priority to CN201811001102.XA priority Critical patent/CN109234700A/en
Publication of CN109234700A publication Critical patent/CN109234700A/en
Pending legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/584Non-reactive treatment

Abstract

The present invention relates to technical field of vacuum plating, and disclose a kind of vacuum coater of automobile rear view mirror lens, including vacuum coater main body, the inner wall of vacuum coater main body is fixedly connected there are two the first symmetrical support plate, the opposite side of two the first support plates offers the first circular through hole, and first the hole wall of circular through hole be fixedly connected with the first rolling bearing, the inner wall of two the first rolling bearings is fixedly connected with reciprocating screw rod jointly, and the bar wall of reciprocating screw rod, which is threadedly engaged, is connected with feed screw nut.The vacuum coater of the automobile rear view mirror lens, it is fast to have the dry speed of rear view mirror lens, it can be realized rear view mirror lens fast cooling, improve the efficiency of vacuum coater plated film, and vacuum coater does not need manual handling, and it is time saving and energy saving, reduce the labor intensity of staff, avoiding device makes to collide with and damage in carrying simultaneously, has ensured that device being capable of normal use and the advantages that service life.

Description

A kind of vacuum coater of automobile rear view mirror lens
Technical field
The present invention relates to technical field of vacuum plating, specially a kind of vacuum coater of automobile rear view mirror lens.
Background technique
Vacuum coating is an importance of vacuum application field, it be based on vacuum technique, using physics or Chemical method, and the series of new techniques such as electron beam, molecular beam, ion beam, plasma beam, radio frequency and magnetic control are absorbed, for science Research and actual production provide a kind of new process of film preparation.Briefly, in a vacuum metal, alloy or compound into Row evaporation or sputtering, the method for making it solidify and deposit on coated object, referred to as vacuum coating.
Existing vacuum coater, without special drying mechanism and cooling mechanism, leads to rear-view mirror after plated film Piece also needs to spontaneously dry and cool down in a device after plated film, then can just take out, and takes a long time in this process, seriously The normal work for influencing device, influences device to the efficiency of rear view mirror lens plated film, in addition, vacuum coater is needing to carry When, manual handling is mostly used greatly, and because device volume is larger, handling process is inconvenient, and is easy to bump to device, from And device is caused to damage, influence its normal use and service life.
Summary of the invention
(1) the technical issues of solving
In view of the deficiencies of the prior art, the present invention provides a kind of vacuum coater of automobile rear view mirror lens, have The dry speed of rear view mirror lens is fast, can be realized rear view mirror lens fast cooling, improves the effect of vacuum coater plated film Rate, and vacuum coater does not need manual handling, it is time saving and energy saving, the labor intensity of staff is reduced, while avoiding filling Set makes to collide with and damage in carrying, ensured device can normal use and the advantages that service life, solve existing vacuum Coating apparatus is dry and cooling rate speed is slow and vacuum coater handling process is inconvenient, and is easy to bump to device Problem.
(2) technical solution
To realize that the dry speed of above-mentioned rear view mirror lens is fast, it can be realized rear view mirror lens fast cooling, improve true The efficiency of empty coating apparatus plated film, and vacuum coater does not need manual handling, it is time saving and energy saving, reduce the labor of staff Fatigue resistance, while avoiding device makes to collide with and damage in carrying, has ensured that device is capable of the purpose of normal use and service life, The invention provides the following technical scheme: a kind of vacuum coater of automobile rear view mirror lens, including vacuum coater main body, The inner wall of the vacuum coater main body is fixedly connected there are two the first symmetrical support plate, and two described first support The opposite side of plate offers the first circular through hole, and the hole wall of the first circular through hole is fixedly connected with the first rolling bearing, The inner wall of two first rolling bearings is fixedly connected with reciprocating screw rod jointly, and the bar wall of the reciprocating screw rod is threadedly engaged company It is connected to feed screw nut, the side wall of the feed screw nut is fixedly connected with spray head, and the upper surface of the vacuum coater main body is solid Surely it is connected with driving motor and dryer, the upper surface of the vacuum coater main body offers the second circular through hole, and The hole wall of two circular through holes is fixedly connected with the second rolling bearing, the axial wall of the driving motor output shaft and the second rolling bearing Inner wall be fixedly connected, the output end of the driving motor is fixedly connected with the top of reciprocating screw rod, the output of the dryer End is fixed to be communicated with appendix, the appendix far from one end of dryer pass through vacuum coater main body roof and with spray The air inlet of head is fixedly connected, and the side wall of the vacuum coater main body is fixedly connected with the second support plate, and described second The upper surface of fagging is fixedly connected with air blower and cooler bin, and the inner wall of the cooler bin is fixedly connected with water tank, the air blast The air outlet of machine is fixed to be communicated with the first conduit, and first conduit passes through the side of cooler bin and water tank far from one end of air blower Wall simultaneously protrudes into underwater, and the upper surface fixation of the water tank is communicated with the second conduit, the described one end of second conduit far from water tank Across the side wall of cooler bin and vacuum coater main body, the lower surface of the vacuum coater main body is fixedly connected with movement Mechanism.
Preferably, the mobile mechanism includes the support frame being fixedly connected with vacuum coater body lower surface, described The inner wall of support frame slidably connects third support plate, and the upper surface of the third support plate is fixedly connected with electric hydaulic and pushes away The top of bar, the electric drive hydraulic thruster is fixedly connected with the lower surface of vacuum coater main body, the third support plate Lower surface four corners are fixedly connected to telescopic rod, and the bottom end of four telescopic rods is fixedly connected to universal wheel, four institutes The bar wall for stating telescopic rod is socketed with damping spring, the both ends of the four damping springs following table with third support plate respectively Face is fixedly connected with the upper surface of universal wheel.
Preferably, the feed screw nut is fixedly connected with limited block far from the side of spray head, and the limited block is far from screw rod One end of nut and the inner wall of vacuum coater main body are slidably connected, the inner wall of the vacuum coater main body offer with The limiting slot that limited block matches.
Preferably, the upper surface fixation of the water tank is communicated with water inlet pipe, and the water inlet pipe is passed through far from one end of water tank Cooler bin simultaneously extends outwardly, and the inner wall of the water inlet pipe is fixedly connected with valve.
Preferably, the two sidewalls of the third support plate are fixedly connected to sliding block, and the inner wall of the support frame offers The sliding slot to match with sliding block.
Preferably, the outer wall of the vacuum coater main body offers rectangular aperture, and rectangular aperture is side walls hinged There is door-plate, the side wall of the door-plate is fixedly connected with lockset.
Preferably, coolant liquid is equipped in the cooler bin, the inner wall of the water tank is equipped with cold water.
(3) beneficial effect
Compared with prior art, the present invention provides a kind of vacuum coaters of automobile rear view mirror lens, have following The utility model has the advantages that
1, the vacuum coater of the automobile rear view mirror lens, by being provided with dryer, air blower, cooler bin and driving Motor, after rear view mirror lens plated film in vacuum coater main body, starting dryer, dryer pass through appendix first The wind that dryer is blown is transported in spray head, and spray head enables rearview mirror flash baking to the rearview mirror blowing hot-air for just having plated film, Then restart driving motor, driving motor drives reciprocating screw rod rotation, and reciprocating screw rod drives feed screw nut's rotation, feed screw nut It drives spray head mobile, expands the drying range of spray head, which can accelerate the dry speed of rear view mirror lens by dryer, Improve the efficiency of vacuum coater plated film.
2, the vacuum coater of the automobile rear view mirror lens works as backsight by being provided with air blower, cooler bin and water tank Mirror eyeglass after dry completion, starts air blower, air blower is by the first conduit the external world in vacuum coater main body In wind to water tank, the cooling of water in cooling of the wind in this first conduit of process by coolant liquid in cooler bin and water tank, It can reduce the temperature of wind in the first conduit, then keep watch and be blown into vacuum coater main body using the second conduit, meanwhile, Rotation lockset simultaneously opens door-plate, then by air blower constant ventilation into vacuum coater main body, accelerates its internal heat dissipating, The structure accelerates the heat dissipation of vacuum coater main body, can make rear view mirror lens fast cooling, improves vacuum coating dress Set the efficiency of plated film.
3, the vacuum coater of the automobile rear view mirror lens, by being provided with electric drive hydraulic thruster, telescopic rod, damping bullet Spring and universal wheel, when needing Mobile vacuum coating apparatus, starting electric drive hydraulic thruster, electric drive hydraulic thruster are pushed first Third support plate moves down, and third support plate drives universal wheel to move down, and when universal wheel ground connection, makes vacuum coating Then device lifting pushes vacuum coater, vacuum coater is flexibly moved freely by universal wheel realization, while herein Mobile jolt, which can be substantially reduced, by telescopic rod and damping spring in the process influences device bring, and ensuring equipment can be just It is often used, which makes vacuum coater not need manual handling, and it is time saving and energy saving, the labor intensity of staff is reduced, Avoiding device makes to collide with and damage in carrying, has ensured that device is capable of the service life of normal use and device.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of the vacuum coater of automobile rear view mirror lens proposed by the present invention;
Fig. 2 is a kind of structural schematic diagram of the vacuum coater part A of automobile rear view mirror lens proposed by the present invention;
Fig. 3 is a kind of structural schematic diagram of the vacuum coater part B of automobile rear view mirror lens proposed by the present invention;
Fig. 4 is a kind of structural schematic diagram of the vacuum coater C portion of automobile rear view mirror lens proposed by the present invention.
In figure: 1 vacuum coater main body, 2 first support plates, 3 first rolling bearings, 4 reciprocating screw rods, 5 feed screw nuts, 6 spray heads, 7 driving motors, 8 dryers, 9 appendixs, 10 second support plates, 11 air blowers, 12 cooler bins, 13 water tanks, 14 first Conduit, 15 second conduits, 16 mobile mechanisms, 17 support frames, 18 third support plates, 19 electric drive hydraulic thrusters, 20 universal wheels, 21 subtract Shake spring, 22 water inlet pipes, 23 door-plates, 24 telescopic rods.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
Fig. 1-4, a kind of vacuum coater of automobile rear view mirror lens, including vacuum coater main body 1 are please referred to, very The inner wall of empty coating apparatus main body 1 is fixedly connected there are two the first symmetrical support plate 2, and two the first support plates 2 are opposite Side offer the first circular through hole, and the hole wall of the first circular through hole is fixedly connected with the first rolling bearing 3, two The inner wall of one rolling bearing 3 is fixedly connected with reciprocating screw rod 4 jointly, and the bar wall of reciprocating screw rod 4, which is threadedly engaged, is connected with screw rod spiral shell Mother 5, feed screw nut 5 is fixedly connected with limited block, limited block one end and vacuum far from feed screw nut 5 far from the side of spray head 6 The inner wall of coating apparatus main body 1 is slidably connected, and the inner wall of vacuum coater main body 1 offers the limit to match with limited block Slot, limited block can limit the rotation of feed screw nut 5, and the side wall of feed screw nut 5 is fixedly connected with spray head 6, vacuum coater master The upper surface of body 1 is fixedly connected with driving motor 7 and dryer 8, and the upper surface of vacuum coater main body 1 offers the second circle Shape through-hole, and the hole wall of the second circular through hole is fixedly connected with the second rolling bearing, the axial wall and second of 7 output shaft of driving motor The inner wall of rolling bearing is fixedly connected, and the output end of driving motor 7 is fixedly connected with the top of reciprocating screw rod 4, dryer 8 it is defeated Outlet is fixed to be communicated with appendix 9, appendix 9 far from one end of dryer 8 pass through vacuum coater main body 1 roof and with The air inlet of spray head 6 is fixedly connected, and the side wall of vacuum coater main body 1 is fixedly connected with the second support plate 10, the second support The upper surface of plate 10 is fixedly connected with air blower 11 and cooler bin 12, and the inner wall of cooler bin 12 is fixedly connected with water tank 13, cooling Coolant liquid is equipped in case 12, the inner wall of water tank 13 is equipped with cold water, and the upper surface fixation of water tank 13 is communicated with water inlet pipe 22, into Water pipe 22 passes through cooler bin 12 far from one end of water tank 13 and extends outwardly, and the inner wall of water inlet pipe 22 is fixedly connected with valve, into Water pipe 22 can carry out moisturizing to water tank 13 in time, and the air outlet fixation of air blower 11 is communicated with the first conduit 14, the first conduit 14 one end far from air blower 11 pass through the side wall of cooler bin 12 and water tank 13 and protrude into underwater, and the upper surface of water tank 13 is fixed It is communicated with the second conduit 15, the second conduit 15 passes through cooler bin 12 and vacuum coater main body 1 far from one end of water tank 13 Side wall, the lower surface of vacuum coater main body 1 are fixedly connected with mobile mechanism 16, and mobile mechanism 16 includes filling with vacuum coating The support frame 17 that 1 lower surface of main body is fixedly connected is set, the inner wall of support frame 17 slidably connects third support plate 18, third support The upper surface of plate 18 is fixedly connected with electric drive hydraulic thruster 19, the top of electric drive hydraulic thruster 19 and vacuum coater main body 1 Lower surface be fixedly connected, the lower surface four corners of third support plate 18 are fixedly connected to telescopic rod 24, four telescopic rods 24 Bottom end be fixedly connected to universal wheel 20, the bar wall of four telescopic rods 24 is socketed with damping spring 21, four damping springs 21 both ends are fixedly connected with the upper surface of the lower surface of third support plate 18 and universal wheel 20 respectively, which makes Vacuum Deposition Film device does not need manual handling, time saving and energy saving, reduces the labor intensity of staff, avoiding device make to collide in carrying and Damage, has ensured that device is capable of the service life of normal use and device, the two sidewalls of third support plate 18 are fixedly connected to Sliding block, the inner wall of support frame 17 offer the sliding slot to match with sliding block, and sliding block and sliding slot can facilitate third support plate 18 to move Dynamic, the outer wall of vacuum coater main body 1 offers rectangular aperture, and the side walls hinged of rectangular aperture has door-plate 23, door-plate 23 Side wall be fixedly connected with lockset, door-plate 23 can facilitate eyeglass to enter inside device, driving motor 7, dryer 8, air blower 11 and electric drive hydraulic thruster 19 be electrically connected by control switch and external power supply, it is the prior art that this, which is electrically connected, herein It repeats no more.
In conclusion the vacuum coater of the automobile rear view mirror lens, when rear view mirror lens are in vacuum coater master In body 1 after plated film, starting dryer 8, dryer 8 are transported to the wind that dryer 8 is blown in spray head 6 by appendix 9 first, Spray head 6 enables rearview mirror flash baking to the rearview mirror blowing hot-air for just having plated film, then restarts driving motor 7, driving electricity Machine 7 drives reciprocating screw rod 4 to rotate, and reciprocating screw rod 4 drives feed screw nut 5 to rotate, and feed screw nut 5 drives spray head 6 mobile, expands spray First 6 drying range, the structure can accelerate the dry speed of rear view mirror lens by dryer 8, improve vacuum coating dress The efficiency for setting plated film starts air blower 11, air blast after rear view mirror lens dry completion in vacuum coater main body 1 For machine 11 by the first conduit 14 in extraneous wind to water tank 13, the wind in this first conduit of process 14 passes through cooler bin 12 The cooling of water in the cooling of middle coolant liquid and water tank 13, can reduce the temperature of wind in the first conduit 14, then using second Conduit 15, which is kept watch, to be blown into vacuum coater main body 1, meanwhile, it rotates lockset and opens door-plate 23, then pass through air blower 11 The constant ventilation into vacuum coater main body 1 accelerates its internal heat dissipating, can make rear view mirror lens fast cooling, improve The efficiency of vacuum coater plated film starts electric drive hydraulic thruster 19, electricity when needing Mobile vacuum coating apparatus first Hydrodynamic pressure push rod 19 pushes third support plate 18 to move down, and third support plate 18 drives universal wheel 20 to move down, when universal When 20 ground connection of wheel, it is lifted vacuum coater, then pushes vacuum coater, vacuum coater passes through universal wheel 20 realizations flexibly move freely, while can substantially reduce movement by telescopic rod 24 and damping spring 21 in the process and jolt On device bring influence, ensuring equipment can normal use, which makes vacuum coater not need manual handling, time saving It is laborsaving, reduce the labor intensity of staff, avoiding device makes to collide with and damage in carrying, has ensured that device can normally make With the service life with device.
It should be noted that the terms "include", "comprise" or its any other variant are intended to the packet of nonexcludability Contain, so that the process, method, article or equipment for including a series of elements not only includes those elements, but also including Other elements that are not explicitly listed, or further include for elements inherent to such a process, method, article, or device. In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that including the element Process, method, article or equipment in there is also other identical elements.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding And modification, the scope of the present invention is defined by the appended.

Claims (7)

1. a kind of vacuum coater of automobile rear view mirror lens, including vacuum coater main body (1), it is characterised in that: institute The inner wall for stating vacuum coater main body (1) is fixedly connected there are two symmetrical the first support plate (2), and two described first The opposite side of support plate (2) offers the first circular through hole, and the hole wall of the first circular through hole is fixedly connected with the first rolling The inner wall of dynamic bearing (3), two first rolling bearings (3) is fixedly connected with reciprocating screw rod (4), the reciprocating screw rod jointly (4) bar wall, which is threadedly engaged, to be connected with feed screw nut (5), and the side wall of the feed screw nut (5) is fixedly connected with spray head (6), institute The upper surface for stating vacuum coater main body (1) is fixedly connected with driving motor (7) and dryer (8), the vacuum coating dress The upper surface for setting main body (1) offers the second circular through hole, and the hole wall of the second circular through hole is fixedly connected with second axis of rolling It holds, the axial wall of driving motor (7) output shaft is fixedly connected with the inner wall of the second rolling bearing, the driving motor (7) Output end is fixedly connected with the top of reciprocating screw rod (4), and the output end fixation of the dryer (8) is communicated with appendix (9), institute State air inlet of the one end of appendix (9) far from dryer (8) across the roof of vacuum coater main body (1) and with spray head (6) Mouth is fixedly connected, and the side wall of the vacuum coater main body (1) is fixedly connected with the second support plate (10), second support The upper surface of plate (10) is fixedly connected with air blower (11) and cooler bin (12), and the inner wall of the cooler bin (12) is fixedly connected with The air outlet fixation of water tank (13), the air blower (11) is communicated with the first conduit (14), and first conduit (14) is far from drum One end of blower (11) passes through the side wall of cooler bin (12) and water tank (13) and protrudes into underwater, the upper surface of the water tank (13) Fixation is communicated with the second conduit (15), and second conduit (15) passes through cooler bin (12) and vacuum far from the one end of water tank (13) The lower surface of the side wall of coating apparatus main body (1), the vacuum coater main body (1) is fixedly connected with mobile mechanism (16).
2. a kind of vacuum coater of automobile rear view mirror lens according to claim 1, it is characterised in that: the movement Mechanism (16) includes the support frame (17) being fixedly connected with vacuum coater main body (1) lower surface, the support frame (17) Inner wall slidably connects third support plate (18), and the upper surface of the third support plate (18) is fixedly connected with electric drive hydraulic thruster (19), the top of the electric drive hydraulic thruster (19) is fixedly connected with the lower surface of vacuum coater main body (1), the third The lower surface four corners of support plate (18) are fixedly connected to telescopic rod (24), and the bottom end of four telescopic rods (24) is fixed It is connected with universal wheel (20), the bar wall of four telescopic rods (24) is socketed with damping spring (21), four damping bullets The both ends of spring (21) are fixedly connected with the upper surface of the lower surface of third support plate (18) and universal wheel (20) respectively.
3. a kind of vacuum coater of automobile rear view mirror lens according to claim 1, it is characterised in that: the screw rod Nut (5) is fixedly connected with limited block far from the side of spray head (6), the one end of the limited block far from feed screw nut (5) and true The inner wall of empty coating apparatus main body (1) is slidably connected, and the inner wall of the vacuum coater main body (1) offers and limited block phase Matched limiting slot.
4. a kind of vacuum coater of automobile rear view mirror lens according to claim 1, it is characterised in that: the water tank (13) upper surface fixation is communicated with water inlet pipe (22), and the water inlet pipe (22) passes through cooler bin far from the one end of water tank (13) (12) and extend outwardly, the inner wall of the water inlet pipe (22) is fixedly connected with valve.
5. a kind of vacuum coater of automobile rear view mirror lens according to claim 2, it is characterised in that: the third The two sidewalls of support plate (18) are fixedly connected to sliding block, and the inner wall of the support frame (17) offers the cunning to match with sliding block Slot.
6. a kind of vacuum coater of automobile rear view mirror lens according to claim 1, it is characterised in that: the vacuum The outer wall of coating apparatus main body (1) offers rectangular aperture, and the side walls hinged of rectangular aperture has door-plate (23), the door-plate (23) side wall is fixedly connected with lockset.
7. a kind of vacuum coater of automobile rear view mirror lens according to claim 1, it is characterised in that: the cooling It is equipped with coolant liquid in case (12), the inner wall of the water tank (13) is equipped with cold water.
CN201811001102.XA 2018-08-30 2018-08-30 A kind of vacuum coater of automobile rear view mirror lens Pending CN109234700A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811001102.XA CN109234700A (en) 2018-08-30 2018-08-30 A kind of vacuum coater of automobile rear view mirror lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811001102.XA CN109234700A (en) 2018-08-30 2018-08-30 A kind of vacuum coater of automobile rear view mirror lens

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Publication Number Publication Date
CN109234700A true CN109234700A (en) 2019-01-18

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CN111676458A (en) * 2020-06-19 2020-09-18 段玲玲 Wafer metal sputtering equipment for chip
CN112403837A (en) * 2020-11-11 2021-02-26 上饶市光耀光学设备制造有限公司 Coating device is used in processing of high accuracy optical lens piece

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Publication number Priority date Publication date Assignee Title
CN111676458A (en) * 2020-06-19 2020-09-18 段玲玲 Wafer metal sputtering equipment for chip
CN112403837A (en) * 2020-11-11 2021-02-26 上饶市光耀光学设备制造有限公司 Coating device is used in processing of high accuracy optical lens piece
CN112403837B (en) * 2020-11-11 2022-02-08 上饶市光耀光学设备制造有限公司 Coating device is used in processing of high accuracy optical lens piece

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