CN110954652B - Verification device and verification method - Google Patents
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- CN110954652B CN110954652B CN201911027869.4A CN201911027869A CN110954652B CN 110954652 B CN110954652 B CN 110954652B CN 201911027869 A CN201911027869 A CN 201911027869A CN 110954652 B CN110954652 B CN 110954652B
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- 238000012795 verification Methods 0.000 title claims abstract description 119
- 238000000034 method Methods 0.000 title claims abstract description 39
- 230000008569 process Effects 0.000 claims abstract description 14
- 238000004064 recycling Methods 0.000 claims abstract description 13
- 238000007789 sealing Methods 0.000 claims description 104
- 239000003463 adsorbent Substances 0.000 claims description 12
- 238000005303 weighing Methods 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 9
- 230000004044 response Effects 0.000 claims description 9
- 125000004122 cyclic group Chemical group 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 4
- 238000005086 pumping Methods 0.000 claims description 2
- 238000011084 recovery Methods 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 562
- 238000010586 diagram Methods 0.000 description 6
- 230000007613 environmental effect Effects 0.000 description 6
- 238000003912 environmental pollution Methods 0.000 description 4
- 238000010926 purge Methods 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 2
- 239000005431 greenhouse gas Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 229910018503 SF6 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0006—Calibrating gas analysers
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Abstract
The invention is applicable to the field of instruments and meters, and provides a verification device and a verification method, wherein the device comprises: the device comprises a gas mixing module, a verification module, a tail gas module and a gas circulation module which are sequentially connected through a gas pipeline; the gas circulation module is connected with the gas mixing module through a gas pipeline; the gas mixing module is used for configuring mixed gas; the verification module is used for verifying the equipment to be verified through the mixed gas; the tail gas module is used for storing the mixed gas used by the verification module; and the gas circulation module is used for filling the mixed gas stored in the tail gas module into the gas mixing module for recycling. The invention can improve the accuracy of checking the mixed gas mixing ratio detector, improve the utilization rate of the mixed gas in the checking process and avoid polluting the environment.
Description
Technical Field
The invention belongs to the field of instruments and meters, and particularly relates to a verification device and a verification method.
Background
In recent years, the device is used at home and abroadThe reduction of greenhouse gas emission and the environmental protection are increasingly important, and in order to respond to the environmental protection requirement, all the large related industries are reducing the emission of sulfur hexafluoride greenhouse gas; SF reduction in high voltage switching electrical equipment 6 Use of gas quantity for propelling mixed insulating gas in electrical equipment, in particular SF 6 And N 2 Mixed gas or SF 6 And CF (compact F) 4 And (3) using mixed gas. In use, to ensure SF 6 Insulating properties of the mixed gas, to SF 6 The mixture ratio of the mixed gas is detected, and in order to ensure the accuracy of the detection result, it is necessary to check the mixture ratio detector of the mixed gas.
At present, the mixed gas mixing ratio detector is checked through standard gas, and the accuracy of a check result depends on the accuracy of the standard gas. However, the use of a standard gas has the following problems: firstly, the standard gas is a mixed gas prepared at one time and is stored in a closed tank body, and the volume mixing ratio of the standard gas can change along with the storage time length and the environmental influence, so that the accuracy of the calibration is reduced when the standard gas is used for calibrating the mixed gas mixing ratio detector; second, the applied standard gas is directly discharged to the environment, which not only wastes the gas but also pollutes the environment.
Disclosure of Invention
In view of the above, the embodiment of the invention provides a verification device and a verification method, which are used for solving the problems of low verification accuracy, gas waste and environmental pollution of the existing verification mode.
The first aspect of the embodiment of the invention provides a verification device, which comprises a gas mixing module, a verification module, a tail gas module and a gas circulation module which are sequentially connected through a gas pipeline; the gas circulation module is connected with the gas mixing module through a gas pipeline;
the gas mixing module is used for configuring mixed gas;
the verification module is used for verifying the equipment to be verified through the mixed gas;
the tail gas module is used for storing the mixed gas used by the verification module;
and the gas circulation module is used for filling the mixed gas stored in the tail gas module into the gas mixing module for recycling.
A second aspect of an embodiment of the present invention provides a verification method applied to the verification apparatus as set forth in the first aspect, where the verification method includes:
configuring a mixed gas through a gas mixing module;
checking the equipment to be checked through the mixed gas;
storing the mixed gas used by the verification module through a tail gas module;
and the mixed gas stored in the tail gas module is filled into the gas mixing module through the gas circulation module for recycling.
According to the verification device, the gas mixing module directly prepares the mixed gas, so that the problem that the standard gas changes along with the storage time and the environmental influence volume mixing ratio is avoided, and the verification precision is improved; the gas circulation module fills the mixed gas stored in the tail gas module into the gas mixing module for cyclic utilization, so that the utilization efficiency of the mixed gas is improved, and the use amount of the mixed gas is reduced; the tail gas module stores the mixed gas after the calibration module is used, so that the mixed gas is prevented from being directly discharged into the environment, and the problem of environmental pollution is solved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a verification device according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a gas mixing module according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a verification module according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of an exhaust module according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of a gas circulation module according to an embodiment of the present invention;
FIG. 6 is a schematic flow chart of a verification method according to an embodiment of the present invention;
fig. 7 is a schematic flow chart of configuring a mixed gas according to an embodiment of the present invention.
Detailed Description
In the following description, for purposes of explanation and not limitation, specific details are set forth such as the particular system architecture, techniques, etc., in order to provide a thorough understanding of the embodiments of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced in other embodiments that depart from these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.
In order to illustrate the technical scheme of the invention, the following description is made by specific examples.
Fig. 1 is a schematic structural diagram of a verification device according to an embodiment of the present invention, referring to fig. 1, the verification device may include a gas mixing module 100, a verification module 200, an exhaust module 300, and a gas circulation module 400 sequentially connected through a gas pipeline; the gas circulation module 400 and the gas mixing module 100 are connected through a gas pipeline;
The gas mixing module 100 is configured to mix a gas;
the verification module 200 is configured to verify the device to be verified through the mixed gas;
the tail gas module 300 is configured to store the mixed gas after the use of the verification module 200;
the gas circulation module 400 is configured to charge the mixed gas stored in the tail gas module 300 into the gas mixing module 100 for recycling.
In the embodiment of the application, the gas mixing module 100 directly prepares the mixed gas, so that the problem that the standard gas changes along with the storage time and the environmental influence volume mixing ratio is avoided, and the verification accuracy is improved; the gas circulation module 400 fills the mixed gas stored in the tail gas module 300 into the gas mixing module 100 for cyclic utilization, so that the utilization efficiency of the mixed gas is improved, and the use amount of the mixed gas is reduced; the tail gas module 300 stores the mixed gas used by the calibration module 200, so that the mixed gas is prevented from being directly discharged into the environment, and the problem of environmental pollution is solved.
As another embodiment of the present application, the gas mixing module may include: the device comprises a first preset gas bottle, a second preset gas bottle, a mixed gas tank, a first self-sealing joint and a second self-sealing joint; the first preset gas bottle is connected with the mixed gas tank and is used for providing first preset gas for the mixed gas tank; the second preset gas bottle is connected with the mixed gas tank and is used for providing second preset gas for the mixed gas tank; the mixed gas tank is used for mixing the first preset gas and the second preset gas to form the mixed gas; the first self-sealing joint is arranged between the mixed gas tank and the verification module and is used for filling the mixed gas in the mixed gas tank into the verification module; the second self-sealing joint is arranged between the mixed gas tank and the gas circulation module and is used for filling the mixed gas flowing through the gas circulation module into the mixed gas tank; the first preset gas comprises SF 6 A gas, wherein the second preset gas comprises N 2 Gas or CF 4 And (3) gas.
As another embodiment of the present application, the gas mixing module may further include: the first weighing device is arranged at the bottom of the first preset gas bottle, the second weighing device is arranged at the bottom of the second preset gas bottle, and the third weighing device is arranged at the bottom of the mixed gas tank; a first safety valve, a first pressure sensor and a temperature sensor arranged on the mixed gas tank; the first check valve, the first mass flowmeter, the second check valve and the second mass flowmeter are connected with the first air inlet of the mixed gas tank through a gas pipeline in sequence; the second preset gas bottle, the second one-way valve, the second mass flowmeter and the second gas inlet of the mixed gas tank are connected through a gas pipeline in sequence; the gas outlet of the mixed gas tank, the first electromagnetic valve and the first self-sealing joint are sequentially connected through a gas pipeline, and the second self-sealing joint, the second electromagnetic valve and the circulating gas inlet of the mixed gas tank are sequentially connected through a gas pipeline.
In some embodiments of the present application, referring to fig. 2, the gas mixing module 100 may include: a first preset gas bottle 101, a second preset gas bottle 109, a mixed gas tank 104, a first self-sealing joint 106 and a second self-sealing joint 107. Wherein the first preset gas bottle 101 is filled with a first preset gas, the second preset gas bottle 109 is filled with a second preset gas, and in this embodiment, the device to be checked is a device to be checked for SF 6 The mixed gas mixing ratio detector for detecting the mixing ratio of the mixed gas corresponds to that the first preset gas is SF 6 A gas, wherein the second preset gas is N 2 Gas or CF 4 And (3) gas. In practical applications, the types of the first preset gas and the second preset gas may be changed correspondingly according to the change of the instrument to be checked. The mixed gas tank 104 is connected to the first preset gas bottle 101 and the second preset gas bottle 109, respectively, and is used for mixing the first preset gas and the second preset gas to form the mixed gas. The first self-sealing joint 106 is connected with the mixed gas tank 104 through a gas pipeline, is arranged between the mixed gas tank 104 and the verification module 200, and is used for filling the verification module 200 with the mixed gas in the mixed gas tank 104. A second self-sealing joint 107 is disposed between the mixed gas tank 104 and the gas circulation module 400, for charging the mixed gas flowing through the gas circulation module 400 into the mixed gas tank 104.
In order to control the delivery of the first preset gas and the second preset gas and accurately control the mass flow rate of the configured mixed gas in actual operation, the gas mixing module 100 may further include a first check valve 102, a first mass flow meter 103, a second check valve 111, and a second mass flow meter 110, wherein the first preset gas bottle 101, the first check valve 102, the first mass flow meter 103, and the first gas inlet of the mixed gas tank 104 are sequentially connected through a gas pipeline. In order to monitor the mass of the mixed gas in the mixed gas tank 104, the mass of the first preset gas in the first preset gas bottle 101, and the mass of the second preset gas in the second preset gas bottle 109 when the mixed gas is configured, the gas mixing module 100 may further include a first scale 116 provided at the bottom of the first preset gas bottle 101, a second scale 117 provided at the bottom of the second preset gas bottle 109, and a third scale 115 provided at the bottom of the mixed gas tank 104. The gas mixing module 100 may further include a first relief valve 113, a first pressure sensor 112, and a temperature sensor 114 provided on the mixed gas tank 104; wherein, when the gas pressure in the mixed gas tank 104 exceeds the preset pressure, the first safety valve 113 deflates the mixed gas tank 104, thereby reducing the safety risk; the first pressure sensor 112 monitors the gas pressure within the mixed gas tank 104; the temperature sensor 114 monitors the temperature within the mixed gas canister 104. To control the gas line between the first self-sealing joint 106 and the mixed gas tank 104 and the gas line between the second self-sealing joint and the mixed gas tank 104, the gas mixing module 100 may further include: the gas outlet of the mixed gas tank 104, the first electromagnetic valve 105 and the first self-sealing joint 106 are sequentially connected through a gas pipeline, and the second self-sealing joint 107, the second electromagnetic valve 108 and the circulating gas inlet of the mixed gas tank 104 are sequentially connected through a gas pipeline.
As another embodiment of the present application, the verification module includes: the device comprises a third self-sealing joint, a high-low temperature box, a fourth self-sealing joint, a placing platform, an air inlet valve and an exhaust valve; the third self-sealing joint is connected with the gas mixing module; the high-low temperature box is used for providing the environment temperature during verification; the air inlet valve is arranged in the high-low temperature box and connected with the third self-sealing joint through an air pipeline, and is used for filling mixed gas in the gas mixing module into equipment to be checked through the third self-sealing joint for checking; the placing platform is arranged in the high-low temperature box and used for placing equipment to be checked; the tail gas valve is arranged in the high-low temperature box and is used for flowing mixed gas used in the verification process of equipment to be verified to the fourth self-sealing joint; and the fourth self-sealing joint is connected with the tail gas module and is used for filling the mixed gas exhausted through the tail gas valve into the tail gas module.
As another embodiment of the present application, the verification module further includes: the device comprises a third preset gas bottle, a pressure reducing valve, a first three-way joint, a second three-way joint and a first air release valve; the third preset gas bottle, the pressure reducing valve and a third connector in the first three-way connector are sequentially connected through a gas pipeline; the third preset gas bottle is used for containing third preset gas for zeroing the equipment to be checked; the third self-sealing joint is connected with a first joint in the first tee joint, and a second joint in the first tee joint is connected with the air inlet valve; the exhaust valve is connected with a first connector in a second three-way connector, and a second connector in the second three-way connector is connected with the fourth self-sealing connector; the first air release valve is connected with a third joint in the second three-way joint; when the equipment to be checked is zeroed, third preset gas in the third preset gas bottle flows into the equipment to be checked through the pressure reducing valve, the first three-way joint and the air inlet valve in sequence; and tail gas when the time is regulated passes through the tail gas valve, the second three-way joint and the first air release valve in sequence to be discharged.
In some embodiments of the present application, referring to fig. 3, the verification module 200 may include: a third self-sealing joint 201 connected with the gas mixing module 100; the high-low temperature box 203 is used for providing the environment temperature during verification, the controllable temperature range is-50 ℃ to 50 ℃, and the control precision is +/-0.5 ℃; the air inlet valve 207 is arranged in the high-low temperature box 303, is connected with the third self-sealing joint 201 through an air pipeline, and is used for filling mixed air in the air mixing module 100 into equipment to be checked through the third self-sealing joint 201 for checking; the placing platform 206 is arranged in the high-low temperature box 203 and is used for placing equipment to be checked; the exhaust valve 208 is arranged in the high-low temperature box 203 and is used for flowing the mixed gas used in the verification process of the equipment to be verified to the fourth self-sealing joint 205; a fourth self-sealing joint 205 is connected to the exhaust module 300, and is used for charging the exhaust module 300 with the mixed gas discharged through the exhaust valve 208. In the verification process, equipment to be verified is placed on the placement platform 206, an air inlet of the equipment to be verified is connected with the air inlet valve 207, and an air outlet of the equipment to be verified is connected with the air outlet valve 208.
In order to facilitate zeroing of the device to be checked, the checking module 200 may further include a third preset gas bottle 210, a pressure reducing valve 209, a first three-way joint 202, a second three-way joint 204, and a first air release valve 211; wherein, a third preset gas bottle 210, a pressure reducing valve 209 and a third joint in the first three-way joint 202 are connected by a gas pipeline in sequence; the third preset gas bottle 210 is configured to hold a third preset gas for zeroing the device to be checked, where in this embodiment, the third preset gas is N 2 Or CF (CF) 4 A gas; the third self-sealing joint 201 is connected with a first joint in the first three-way joint 202, and a second joint in the first three-way joint 202 is connected with an air inlet valve 207; the exhaust valve 208 is connected with a first connector in the second three-way connector 204, and a second connector in the second three-way connector 204 is connected with a fourth self-sealing connector 205; the first purge valve 208 is connected to a third one of the second three-way connection 204. When the equipment to be checked is zeroed, third preset gas in a third preset gas bottle flows into the equipment to be checked through a pressure reducing valve 209, a first three-way joint 202 and an air inlet valve 207 in sequence, and tail gas when zeroed is discharged through an exhaust valve 208, a second three-way joint 204 and a first air discharge valve 211 in sequence.
As another embodiment of the present application, the exhaust module may include: the fifth self-sealing joint, the tail gas tank and the sixth self-sealing joint; the fifth self-sealing joint is connected with the verification module and is used for filling the tail gas tank with the mixed gas exhausted by the verification module; the tail gas tank is connected with the fifth self-sealing joint and is used for collecting mixed gas exhausted by the verification module; and the sixth self-sealing joint is connected with the tail gas tank and is used for filling the mixed gas in the tail gas tank into the gas circulation module.
As another embodiment of the present application, the exhaust module may further include: a third electromagnetic valve arranged between the tail gas tank and the fifth self-sealing joint, and a fourth electromagnetic valve arranged between the tail gas tank and the sixth self-sealing joint; the tail gas tank, the first compressor, the third one-way valve and the mixed gas bottle are sequentially connected through a gas pipeline; the second safety valve is arranged at the top of the tail gas tank, and the second pressure sensor is arranged at the top of the tail gas tank; when the mixed gas is recovered, the mixed gas in the tail gas tank sequentially passes through the compressor and the third one-way valve to be filled into the mixed gas bottle.
In some embodiments of the present application, referring to fig. 4, an exhaust module 300 may include: a fifth self-sealing joint 301, an exhaust tank 303, and a sixth self-sealing joint 307; a fifth self-sealing joint 301, connected to the calibration module 200, for filling the mixed gas exhausted from the calibration module 200 into a tail gas tank 303; a tail gas tank 303 connected to the fifth self-sealing joint, for collecting the mixed gas exhausted from the calibration module 200; a sixth self-sealing joint 307 is connected to the tail gas tank 303 for charging the gas circulation module 400 with the mixed gas in the tail gas tank 303.
To facilitate control of the gas flowing in the gas line of the exhaust module 300, the exhaust module 300 may further include: a third solenoid valve 302 disposed between the tail gas tank 303 and the fifth self-sealing joint 301, and a fourth solenoid valve 308 disposed between the tail gas tank 303 and the sixth self-sealing joint 307. In order to recycle the mixed gas after the verification use, the tail gas module 300 may further include: the first compressor 304, the third one-way valve 305 and the mixed gas bottle 306, wherein the tail gas tank 303, the first compressor 304, the third one-way valve 305 and the mixed gas bottle 306 are sequentially connected through gas pipelines. When the mixed gas is recovered, the mixed gas in the tail gas tank 303 is sequentially filled into a mixed gas bottle 306 through the compressor 304 and the third one-way valve 305 under the action of the compressor 304. After the mixed gas is recovered, the mixed gas filled in the mixed gas bottle 306 can be reused or subjected to harmless treatment. For safety reasons, the exhaust module 300 may further comprise a second safety valve 309 arranged on the exhaust tank 303 and a second pressure sensor 310 arranged on top of the exhaust tank 303.
As another embodiment of the present application, the gas circulation module may include: a seventh self-sealing joint, a second compressor, a fourth one-way valve and an eighth self-sealing joint; the seventh self-sealing joint is connected with the tail gas module, and the second compressor is connected with the seventh self-sealing joint and is used for extracting mixed gas stored in the tail gas module through the seventh self-sealing joint; the fourth one-way valve is arranged between the second compressor and the eighth self-sealing joint and is used for transmitting the mixed gas extracted by the second compressor to the direction of the eighth self-sealing joint; and the eighth self-sealing joint is connected with the fourth one-way valve and is used for filling the mixed gas transmitted by the fourth one-way valve into the gas mixing module for recycling.
As another embodiment of the present application, the gas circulation module may further include: the third three-way joint, the fifth electromagnetic valve, the fifth three-way joint, the fourth three-way joint, the vacuum pump, the fifth one-way valve, the adsorbent tank and the second air release valve; the third three-way joint, the fifth electromagnetic valve and the fifth three-way joint are arranged between the seventh self-sealing joint and the eighth self-sealing joint and are sequentially connected through a gas pipeline; a first connector of the fourth three-way connector is connected with a third connector of the third three-way connector, a second connector of the fourth three-way connector is connected with the second compressor, and the third connector of the fourth three-way connector, the vacuum pump, the fifth one-way valve, the adsorbent tank and the second air release valve are sequentially connected through a gas pipeline; when the verification device is vacuumized, gas in the verification device sequentially passes through the seventh self-sealing joint, the third three-way joint, the fourth three-way joint, the vacuum pump, the fifth one-way valve, the adsorbent tank and the second air release valve, or gas in the verification device sequentially passes through the eighth self-sealing joint, the fifth three-way joint, the fifth electromagnetic valve, the third three-way joint, the fourth three-way joint, the vacuum pump, the fifth one-way valve, the adsorbent tank and the second air release valve.
In some embodiments of the present application, referring to fig. 5, a gas circulation module 400 may include: a seventh self-sealing joint 401, a second compressor 404, a fourth check valve 405, and an eighth self-sealing joint 407; a seventh self-sealing joint 401 connected to the exhaust module 300, and a second compressor 404 connected to the seventh self-sealing joint 401 for extracting the mixed gas stored in the exhaust module 300 through the seventh self-sealing joint 401; a fourth check valve 405, disposed between the second compressor 404 and the eighth self-sealing joint 407, for transmitting the mixed gas extracted by the second compressor 404 to the direction of the eighth self-sealing joint 407; the eighth self-sealing joint 407 is connected to the fourth one-way valve 405, and is used for charging the mixed gas transmitted by the fourth one-way valve 405 into the gas mixing module 100 for recycling. When the mixed gas is recycled, the mixed gas stored in the tail gas module 300 is filled into the gas mixing module 100 through the seventh self-sealing joint 401, the second compressor 404, the fourth one-way valve 405 and the eighth self-sealing joint 407 in sequence by the second compressor 404 for recycling.
Before checking the device, the accuracy of the checking can be improved by vacuumizing the checking device, and for convenience, the gas circulation module 400 may further include: a third three-way joint 402, a fifth solenoid valve 408, a fifth three-way joint 406, a fourth three-way joint 403, a vacuum pump 409, a fifth one-way valve 410, an adsorbent canister 411, and a second purge valve 412; the third three-way joint 402, the fifth electromagnetic valve 408 and the fifth three-way joint 406 are arranged between the seventh self-sealing joint 401 and the eighth self-sealing joint 407 and are sequentially connected through a gas pipeline; a first connector in the fourth three-way connector 403 is connected with a third connector in the third three-way connector 402, a second connector in the fourth three-way connector 403 is connected with the second compressor 404, and the third connector in the fourth three-way connector 403, the vacuum pump 409, the fifth one-way valve 410, the adsorbent tank 411 and the second air release valve 412 are sequentially connected through a gas pipeline; when the verification device is vacuumized, the gas in the verification device is sequentially discharged through the seventh self-sealing joint 401, the third three-way joint 402, the fourth three-way joint 403, the vacuum pump 409, the fifth one-way valve 410, the adsorbent tank 411 and the second air release valve 412, or the gas in the verification device is sequentially discharged through the eighth self-sealing joint 407, the fifth three-way joint 406, the fifth electromagnetic valve 408, the third three-way joint 402, the fourth three-way joint 403, the vacuum pump 409, the fifth one-way valve 410, the adsorbent tank 411 and the second air release valve 412.
Fig. 6 is a schematic flow chart of a verification method provided by an embodiment of the present invention, and referring to fig. 6, the verification method may include:
in step S601, the mixed gas is configured by the gas mixing module.
And step S602, checking the equipment to be checked through the mixed gas.
And step S603, storing the mixed gas used by the verification module through a tail gas module.
Step S604, the mixed gas stored in the tail gas module is filled into the gas mixing module through the gas circulation module for cyclic utilization.
In the embodiment of the application, the mixed gas is directly prepared through the gas mixing module, so that the problem that the standard gas changes along with the storage time and the environmental influence volume mixing ratio is avoided; the mixed gas directly prepared by the gas mixing module is used for checking the equipment to be checked, and compared with the prior art, the mixed gas is more accurate, so that the checking precision is improved; the tail gas module stores the mixed gas used by the verification module, so that the mixed gas is prevented from being directly discharged into the environment, and the problem of environmental pollution is solved; the mixed gas stored in the tail gas module is filled into the gas mixing module through the gas circulation module for cyclic utilization, so that the use amount of the mixed gas is reduced, and the utilization efficiency of the mixed gas is improved.
As another embodiment of the present application, the configuring the mixed gas may include:
step S6011, calculating a target mass of the first preset gas and a target mass of the second preset gas; wherein the first preset gas comprises SF 6 A gas, the second pre-treatmentThe set gas includes N 2 Gas or CF 4 And (3) gas.
Step S6012, calculating an existing mass of the first preset gas and an existing mass of the second preset gas in the mixed gas tank in the gas mixing module.
Step S6013, calculating a configuration quality of the first preset gas and a configuration quality of the second preset gas required for preparing the mixed gas according to the target quality of the first preset gas and the target quality of the second preset gas, the existing quality of the first preset gas and the existing quality of the second preset gas.
And step S6014, filling the first preset gas and the second preset gas into the mixed gas tank according to the calculated configuration quality of the first preset gas and the calculated configuration quality of the second preset gas.
In the embodiment of the present application, how much mixed gas is configured is generally determined according to actual needs or actual conditions, so there is a target quality of the configured mixed gas. The mixed gas is formed by mixing and configuring the first preset gas and the second preset gas, so that if the mixed gas with the target mass is configured, the target mass of the first preset gas and the target mass of the second preset gas need to be calculated. In actual operation, a small amount of the first preset gas and the second preset gas must remain in the mixed gas tank, and in order to improve the accuracy of the configuration, the existing mass of the first preset gas and the second preset gas remaining in the mixed gas pipe needs to be calculated. After the target mass of the first preset gas, the target mass of the second preset gas, the existing mass of the first preset gas and the existing mass of the second preset gas are obtained, the configuration mass of the first preset gas and the configuration mass of the second preset gas required for preparing the mixed gas, namely the actual required amounts of the first preset gas and the second preset gas, can be obtained. And filling the first preset gas and the second preset gas into the mixed gas tank according to the calculated configuration quality of the first preset gas and the calculated configuration quality of the second preset gas, and configuring the mixed gas for verification.
As another aspect of the present applicationIn an embodiment, the calculating the target mass of the first preset gas and the target mass of the second preset gas may include: according to P 11 ＝P 1 C 1 Calculating a first gas partial pressure of the first preset gas according to P 12 ＝P 1 (1-C 1 ) Calculating a second gas partial pressure of the second preset gas; based on a first preset model, calculating a first gas density of the first preset gas by the acquired first gas partial pressure based on P 12 M＝kT 1 d 12 And the second gas partial pressure is used for calculating the second gas density of the second preset gas; based on
And the acquired first gas density, calculating a target mass of the first preset gas, and based on M NC ＝d 12 * L and the acquired second gas density calculate the target mass of the second preset gas; wherein, the first preset model is:
P 11 ＝(RT 1 B-A)d 11 2 +RTd 11
A＝73.882×10 -5 -5.132105×10 -7 d 11
B＝2.50695×10 -3 -2.12283×10 -6 d 11
R＝56.9502×10 -5
wherein P is 11 A first gas partial pressure, P, of the first predetermined gas 12 A second partial pressure, P, of the second predetermined gas 1 Preparing target pressure of mixed gas in the mixed gas tank, C 1 T is the volume ratio of the first preset gas in the mixed gas to be prepared 1 For the measured value of the temperature sensor, L is the volume of the mixed gas tank, M is the molar mass of the second preset gas, k is the ideal gas constant, and d 11 A first gas density, d, of the first predetermined gas 12 A second gas density for the second predetermined gas,
for the target mass of the first preset gas, M NC A target mass for the second preset gas.
In some embodiments of the present application, the target mass of the mixed gas is determined by the target pressure of the mixed gas dispensed in the mixed gas tank, and the respective masses of the first and second predetermined gases are determined by a predetermined volume ratio, such as a predetermined C 1 I.e. the volume ratio of the first preset gas in the mixed gas to be prepared, the method can be based on T 1 、P 1 、C 1 And L calculating a target mass of the first preset gas and a target mass of the second preset gas, wherein T 1 P, which is the measured value of the temperature sensor 1 Preparing target pressure of mixed gas in the mixed gas tank, C 1 And L is the volume of the mixed gas tank for the volume ratio of the first preset gas in the mixed gas to be prepared. The specific calculation process is described in the foregoing embodiments, and will not be described in detail herein.
As another embodiment of the present application, the calculating the existing mass of the first preset gas and the existing mass of the second preset gas in the mixed gas tank in the gas mixing module may include: calculating a first existing gas partial pressure of a first preset gas existing in the mixed gas tank and a second existing gas partial pressure of a second preset gas existing in the mixed gas tank according to the existing mixed gas pressure and the existing mixed gas volume mixing ratio in the mixed gas tank; calculating a first existing gas density of a first preset gas existing in the mixed gas tank and a second existing gas density of a second preset gas existing in the mixed gas tank; calculating an existing mass of the first pre-set gas existing in the gas tank based on a first existing gas density of the first pre-set gas existing 
Calculating an existing mass calculation of the second pre-set gas based on a second existing gas density of the existing second pre-set gasThe existing mass of said second preset gas +.>
In some embodiments of the present application, the existing mixed gas pressure in the mixed gas tank may be obtained by the first pressure sensor, and the existing mass of the first preset gas and the existing mass of the second preset gas may be calculated based on the temperature in the mixed gas tank, the existing mixed gas pressure in the mixed gas tank, the existing mixed gas volume mixing ratio, and the volume of the mixed gas tank, and the calculation process is the same as the process for calculating the target mass of the first preset gas and the target mass of the second preset gas described in the above embodiments, which is not repeated herein.
As another embodiment of the present application, the calculating the configuration quality of the first preset gas and the configuration quality of the second preset gas required for preparing the mixed gas may include: according to
And->
Calculating the configuration quality of the first preset gas required for preparing the mixed gas>
And a configuration mass M 'of a second preset gas' NC 。
In some embodiments of the present application, after the target mass of the first preset gas, the target mass of the second preset gas, the existing mass of the first preset gas, and the existing mass of the second preset gas are obtained, the configuration mass of the first preset gas and the configuration mass of the second preset gas required to formulate the mixed gas are obtained by subtracting the target mass from the existing mass.
As another embodiment of the present application, the filling the mixed gas tank with the first preset gas and the second preset gas may include: and opening the first one-way valve and the second one-way valve, closing the first electromagnetic valve and the second electromagnetic valve, and filling the first preset gas and the second preset gas into the mixed gas tank according to the calculated configuration quality of the first preset gas and the calculated configuration quality of the second preset gas.
In some embodiments of the present application, referring to fig. 2, the first check valve 102 and the second check valve 111 are opened, the first solenoid valve 105 and the second solenoid valve 108 are closed, the first preset gas and the second preset gas are filled into the mixed gas tank according to the calculated configuration quality of the first preset gas and the calculated configuration quality of the second preset gas, and simultaneously, the opening or closing of the first check valve 102 and the second check valve 111 is controlled in real time according to the readings of the first mass flowmeter, the second mass flowmeter, the first weighing device, the second weighing device and the third weighing device, so that the first preset gas and the second preset gas are accurately filled into the mixed gas tank according to the calculated configuration quality, and the mixed gas is configured.
As another embodiment of the present application, the verifying the device to be verified by using the mixed gas may include:
zeroing the equipment to be checked.
Filling the mixed gas into equipment to be checked, reading an indication value of the equipment to be checked, and calculating a checking parameter of the equipment to be checked according to the indication value of the equipment to be checked and a preset indication value; the preset indication value is the mixed gas volume ratio configured by the gas mixing module, and the verification parameters comprise response time, repeatability and indication value error of the instrument to be verified.
In some embodiments of the present application, in order to improve the accuracy of the verification, the device to be verified needs to be zeroed when each verification is performed. And after the zeroing is completed, filling the mixed gas into equipment to be checked, reading an indicating value of the equipment to be checked, and calculating the checking parameters of the equipment to be checked. In this embodiment of the present application, the preset indication value is a mixed gas volume ratio configured by the gas mixing module, that is, a standard reading that should be displayed by the device to be verified, and the verification parameter may include response time, repeatability and indication error of the instrument to be verified.
As another embodiment of the present application, the zeroing the device to be verified includes:
Closing the first electromagnetic valve and the third electromagnetic valve; and opening the pressure reducing valve and the first air release valve, opening the equipment to be checked, and filling third preset air in the third preset air bottle to enable the indicating value of the equipment to be checked to return to the zero point.
In some embodiments of the present application, referring to fig. 2, 3, and 4 in combination, the first solenoid valve 105 and the third solenoid valve 302 are closed, isolating the verification module from the gas mixing module and the exhaust module. The pressure reducing valve 209 is opened to discharge the third preset gas of the third preset gas bottle, the equipment to be checked is opened to be filled with the third preset gas, the indication value of the equipment to be checked is returned to the zero point, and meanwhile the third preset gas for zeroing is discharged through the first air discharging valve 211. In this embodiment of the present application, the third preset gas is N 2 Or CF (CF) 4 And (3) gas.
As another embodiment of the present application, the charging the mixed gas into the device to be verified, reading an indication value of the device to be verified, and calculating a verification parameter of the device to be verified according to the indication value of the device to be verified and a preset indication value, including: closing the pressure reducing valve, the first air release valve, the fifth electromagnetic valve and the fifth one-way valve, and opening the first electromagnetic valve and the third electromagnetic valve; introducing the mixed gas into equipment to be checked, recording the time from the moment of introducing the mixed gas to the moment that the indication value reaches 90% of the standard value of the volume ratio of the mixed gas, and recording the indication value when the indication value of the instrument to be checked is stable, so as to finish one-time detection; zeroing the equipment to be checked and repeatedly detecting; according to 
Calculating response time of the instrument to be checked; according to
Calculating the repeatability of the instrument to be checked; according to->
Calculating an indication error of a checking instrument; wherein N is the repetition number of detection again after zeroing the equipment to be checked, N is more than or equal to 3, t is the response time of the instrument to be checked, t i Response time for the ith detection, +.>
C’ i For checking the indication value of the ith detection when the indication value of the equipment is stable S r For repeatability, C S And delta C is an indication error for the preset indication.
In some embodiments of the present application, in order to ensure the accuracy of the verification and obtain more verification data, the device to be verified is verified for multiple times, after the verification of the device is completed once, the device is reset again, the verification is performed again, and the process is repeated at least 3 times.
As another embodiment of the present application, the storing the mixed gas after the use of the verification module and the filling the mixed gas stored in the tail gas module into the gas mixing module for recycling may include: when the difference between the air pressure in the mixed gas tank and the air pressure in the tail gas tank in the mixed gas mixing module is smaller than a first preset pressure, closing a fifth electromagnetic valve and a fifth one-way valve, opening a fourth one-way valve, starting a second compressor, and filling the gas in the tail gas tank into the mixed gas tank for recycling.
In some embodiments of the present application, referring to fig. 2, 4 and 5 in combination, when the difference between the air pressure in the mixed gas tank 104 and the air pressure in the tail gas tank 303 is smaller than the first preset pressure, the fifth electromagnetic valve 408 and the fifth one-way valve 410 are closed, the fourth one-way valve 405 is opened, the second compressor 404 is started, and the gas in the tail gas tank 303 is filled into the mixed gas tank 104 for recycling. In this embodiment of the present application, the first preset pressure may be 0.2Mpa.
As another embodiment of the present application, the verification method may further include:
step S605, starting the high-low temperature box, setting a temperature value to be maintained by the high-low temperature box according to the high-low temperature environment verification requirement of the instrument to be verified, and repeating the steps S602 to S604 after the temperature of the high-low temperature box is stable, so as to verify the high-low temperature environment of the instrument to be verified.
As another embodiment of the present application, the verification method may further include:
in step S601', before the mixed gas is configured by the gas mixing module, the device to be verified is connected to the verification module and the verification device is vacuumized.
Step S606, after the device to be verified is verified, the mixed gas used in the verification process is processed through the tail gas module.
Wherein the connecting the device to be verified to the verification module includes: placing the equipment to be checked on an instrument placing platform in a high-low temperature box, communicating an air inlet of the equipment to be checked with an air inlet valve, and connecting an exhaust port of the equipment to be checked with an exhaust valve; and the high-low temperature box is used for keeping the preset temperature required by checking the equipment to be checked.
The vacuum pumping of the verification device may include: closing the first one-way valve, the second one-way valve, the pressure reducing valve and the first air release valve; opening a fifth one-way valve, a first electromagnetic valve, a second electromagnetic valve, a third electromagnetic valve, a fourth electromagnetic valve, a fifth electromagnetic valve and a second air release valve; and starting the vacuum pump, so that the vacuum degree in the checking device is not more than the first preset vacuum degree, and stopping after the first preset time is kept.
After the equipment to be verified is verified, the processing of the mixed gas used in the verification process through the tail gas module may include: and opening a third one-way valve, starting the first compressor, and filling the mixed gas in the mixed gas tank and the tail gas tank into the mixed gas bottle under pressure to perform recovery treatment.
In some embodiments of the present application, referring to fig. 2, 3, 4 and 5 in combination, first, the device to be checked is placed on an instrument placement platform 206 in the high-low temperature box 203, an air inlet of the device to be checked is connected to an air inlet valve 207, and an exhaust port of the device to be checked is connected to an exhaust valve 208. Before checking the equipment, the accuracy of checking can be improved by vacuumizing the checking device, and the vacuumizing the checking device can comprise: the first check valve 102, the second check valve 111, the pressure reducing valve 209, and the first purge valve 211 are closed; opening the fifth check valve 410, the first solenoid valve 105, the second solenoid valve 108, the third solenoid valve 302, the fourth solenoid valve 308, the fifth solenoid valve 408, and the second purge valve 412; the vacuum pump 409 is started to stop the vacuum degree in the checking device after the vacuum degree is not greater than the first preset vacuum degree and maintained for the first preset time. Wherein the first preset vacuum degree is 133Pa, and the first preset time is 30min. After the verification is completed, the third one-way valve 305 is opened, the first compressor 304 is started, the mixed gas in the mixed gas tank 104 and the tail gas tank 303 is pressurized and filled into the mixed gas bottle 306, and the mixed gas filled into the mixed gas bottle 306 can be reused or subjected to harmless treatment.
As another embodiment of the present application, the verification method may further include: repeating steps S601' to S605, and charging mixed gas configured by preset gases with different mixing ratios into the equipment to be checked, so as to perform multiple checks, thereby improving the accuracy of the checks.
According to the verification device and the verification method provided by the embodiment of the invention, the mixed gas required by verification is directly prepared by using the first preset gas and the second preset gas in the gas mixing module, so that the problem that the verification accuracy is reduced due to the fact that the standard gas changes along with the temperature is avoided, and the verification accuracy is improved. When the mixed gas is configured, the mixed gas is configured in a mass weighing mode, wherein when the mass of the preset gas is calculated, different gas state equations are considered to be followed when the mass and the volume of different preset gases are converted, and the preparation precision of the mixed gas is improved. The tail gas module recovers the tail gas after the verification is completed, so that the tail gas is prevented from being discharged into the atmosphere, and the environment is protected. The gas circulation module circulates the mixed gas, so that the configuration quantity of the mixed gas is reduced in the verification process, and the cost is reduced.
The above embodiments are only for illustrating the technical solution of the present application, and are not limiting; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present application, and are intended to be included in the scope of the present application.
Claims (10)
1. The verification device is characterized by comprising a gas mixing module, a verification module, a tail gas module and a gas circulation module which are sequentially connected through a gas pipeline; the gas circulation module is connected with the gas mixing module through a gas pipeline;
the gas mixing module is used for configuring mixed gas;
the verification module is used for verifying the equipment to be verified through the mixed gas;
the tail gas module is used for storing the mixed gas used by the verification module;
the gas circulation module is used for charging the mixed gas stored in the tail gas module into the gas mixing module for cyclic utilization;
the gas mixing module includes: the device comprises a first preset gas bottle, a second preset gas bottle, a mixed gas tank, a first self-sealing joint and a second self-sealing joint;
the first preset gas bottle is connected with the mixed gas tank and is used for providing first preset gas for the mixed gas tank;
the second preset gas bottle is connected with the mixed gas tank and is used for providing second preset gas for the mixed gas tank;
the mixed gas tank is used for mixing the first preset gas and the second preset gas to form the mixed gas;
The first self-sealing joint is arranged between the mixed gas tank and the verification module and is used for filling the mixed gas in the mixed gas tank into the verification module;
the second self-sealing joint is arranged between the mixed gas tank and the gas circulation module and is used for filling the mixed gas flowing through the gas circulation module into the mixed gas tank;
the gas mixing module further comprises: a temperature sensor provided on the mixed gas tank;
the first preset gas comprises SF 6 A gas, wherein the second preset gas comprises N 2 Gas or CF 4 A gas;
the configuration mixture gas includes:
calculating the target mass of the first preset gas and the target mass of the second preset gas;
calculating the existing mass of the first preset gas and the existing mass of the second preset gas in a mixed gas tank in the gas mixing module;
calculating the configuration quality of the first preset gas and the configuration quality of the second preset gas required for preparing the mixed gas according to the target quality of the first preset gas and the target quality of the second preset gas, wherein the existing quality of the first preset gas and the existing quality of the second preset gas;
Filling the first preset gas and the second preset gas into the mixed gas tank according to the calculated configuration quality of the first preset gas and the calculated configuration quality of the second preset gas;
wherein,,
the calculating the target mass of the first preset gas and the target mass of the second preset gas includes:
according to P 11 ＝P 1 C 1 Calculating a first gas partial pressure of the first preset gas according to P 12 ＝P 1 (1-C 1 ) Calculating a second gas partial pressure of the second preset gas;
based on a first preset model, calculating a first gas density of the first preset gas by the acquired first gas partial pressure based on P 12 M＝kT 1 d 12 And the second gas partial pressure is used for calculating the second gas density of the second preset gas;
based on M SF6 ＝d 11 * L and the acquired first gas density, calculating a target mass of the first preset gas, and based on M NC ＝d 12 * L and the acquired second gas density calculate the target mass of the second preset gas;
wherein, the first preset model is:
P 11 ＝(RT 1 B-A)d 11 2 +RTd 11
A＝73.882×10 -5 -5.132105×10 -7 d 11
B＝2.50695×10 -3 -2.12283×10 -6 d 11
R＝56.9502×10 -5
wherein P is 11 A first gas partial pressure, P, of the first predetermined gas 12 A second partial pressure, P, of the second predetermined gas 1 Preparing target pressure of mixed gas in the mixed gas tank, C 1 T is the volume ratio of the first preset gas in the mixed gas to be prepared 1 For the measured value of the temperature sensor, L is the volume of the mixed gas tank, M is the molar mass of the second preset gas, k is the ideal gas constant, and d 11 A first gas density, d, of the first predetermined gas 12 A second gas density, M, being the second predetermined gas SF6 For the target mass of the first preset gas, M NC A target mass for the second preset gas;
the calculating the existing mass of the first preset gas and the existing mass of the second preset gas in the mixed gas tank in the gas mixing module comprises the following steps:
calculating a first existing gas partial pressure of a first preset gas existing in the mixed gas tank and a second existing gas partial pressure of a second preset gas existing in the mixed gas tank according to the existing mixed gas pressure and the existing mixed gas volume mixing ratio in the mixed gas tank;
calculating a first existing gas density of a first preset gas existing in the mixed gas tank and a second existing gas density of a second preset gas existing in the mixed gas tank;
calculating an existing mass of the existing first preset gas in the mixed gas tank based on a first existing gas density of the existing first preset gas 
Calculating an existing mass of the second pre-set gas based on a second existing gas density of the existing second pre-set gas>
The calculating the configuration quality of the first preset gas and the configuration quality of the second preset gas required for preparing the mixed gas comprises the following steps:
according to
And->
Calculating the configuration quality M 'of a first preset gas required for preparing the mixed gas' SF6 And a configuration mass M 'of a second preset gas' NC 。
2. The verification device of claim 1, wherein said gas mixing module further comprises:
the first weighing device is arranged at the bottom of the first preset gas bottle, the second weighing device is arranged at the bottom of the second preset gas bottle, and the third weighing device is arranged at the bottom of the mixed gas tank;
a first safety valve and a first pressure sensor provided on the mixed gas tank;
the first check valve, the first mass flowmeter, the second check valve and the second mass flowmeter are connected with the first air inlet of the mixed gas tank through a gas pipeline in sequence; the second preset gas bottle, the second one-way valve, the second mass flowmeter and the second gas inlet of the mixed gas tank are connected through a gas pipeline in sequence;
The gas outlet of the mixed gas tank, the first electromagnetic valve and the first self-sealing joint are sequentially connected through a gas pipeline, and the second self-sealing joint, the second electromagnetic valve and the circulating gas inlet of the mixed gas tank are sequentially connected through a gas pipeline.
3. The verification device of claim 2, wherein the verification module comprises: the device comprises a third self-sealing joint, a high-low temperature box, a fourth self-sealing joint, a placing platform, an air inlet valve and an exhaust valve;
the third self-sealing joint is connected with the gas mixing module;
the high-low temperature box is used for providing the environment temperature during verification;
the air inlet valve is arranged in the high-low temperature box and connected with the third self-sealing joint through an air pipeline, and is used for filling mixed gas in the gas mixing module into equipment to be checked through the third self-sealing joint for checking;
the placing platform is arranged in the high-low temperature box and used for placing equipment to be checked;
the tail gas valve is arranged in the high-low temperature box and is used for flowing mixed gas used in the verification process of equipment to be verified to the fourth self-sealing joint;
The fourth self-sealing joint is connected with the tail gas module and is used for filling the mixed gas exhausted through the tail gas valve into the tail gas module;
the verification module further comprises: the device comprises a third preset gas bottle, a pressure reducing valve, a first three-way joint, a second three-way joint and a first air release valve;
the third preset gas bottle, the pressure reducing valve and a third connector in the first three-way connector are sequentially connected through a gas pipeline; the third preset gas bottle is used for containing third preset gas for zeroing the equipment to be checked;
the third self-sealing joint is connected with a first joint in the first tee joint, and a second joint in the first tee joint is connected with the air inlet valve;
the exhaust valve is connected with a first connector in a second three-way connector, and a second connector in the second three-way connector is connected with the fourth self-sealing connector;
the first air release valve is connected with a third joint in the second three-way joint;
when the equipment to be checked is zeroed, third preset gas in the third preset gas bottle flows into the equipment to be checked through the pressure reducing valve, the first three-way joint and the air inlet valve in sequence; and tail gas when the time is regulated passes through the tail gas valve, the second three-way joint and the first air release valve in sequence to be discharged.
4. The verification device of claim 3, wherein said tail gas module comprises: the fifth self-sealing joint, the tail gas tank and the sixth self-sealing joint;
the fifth self-sealing joint is connected with the verification module and is used for filling the tail gas tank with the mixed gas exhausted by the verification module;
the tail gas tank is connected with the fifth self-sealing joint and is used for collecting mixed gas exhausted by the verification module;
the sixth self-sealing joint is connected with the tail gas tank and is used for filling mixed gas in the tail gas tank into the gas circulation module;
the exhaust module further includes:
a third electromagnetic valve arranged between the tail gas tank and the fifth self-sealing joint, and a fourth electromagnetic valve arranged between the tail gas tank and the sixth self-sealing joint;
the tail gas tank, the first compressor, the third one-way valve and the mixed gas bottle are sequentially connected through a gas pipeline;
the second safety valve is arranged at the top of the tail gas tank, and the second pressure sensor is arranged at the top of the tail gas tank;
when the mixed gas is recovered, the mixed gas in the tail gas tank sequentially passes through the compressor and the third one-way valve to be filled into the mixed gas bottle.
5. The verification device of claim 4, wherein said gas circulation module comprises: a seventh self-sealing joint, a second compressor, a fourth one-way valve and an eighth self-sealing joint;
the seventh self-sealing joint is connected with the tail gas module;
the second compressor is connected with the seventh self-sealing joint and is used for extracting the mixed gas stored in the tail gas module through the seventh self-sealing joint;
the fourth one-way valve is arranged between the second compressor and the eighth self-sealing joint and is used for transmitting the mixed gas extracted by the second compressor to the direction of the eighth self-sealing joint;
the eighth self-sealing joint is connected with the fourth one-way valve and is used for filling the mixed gas transmitted by the fourth one-way valve into the gas mixing module for recycling;
the gas circulation module further includes: the third three-way joint, the fifth electromagnetic valve, the fifth three-way joint, the fourth three-way joint, the vacuum pump, the fifth one-way valve, the adsorbent tank and the second air release valve;
the third three-way joint, the fifth electromagnetic valve and the fifth three-way joint are arranged between the seventh self-sealing joint and the eighth self-sealing joint and are sequentially connected through a gas pipeline;
A first connector of the fourth three-way connector is connected with a third connector of the third three-way connector, a second connector of the fourth three-way connector is connected with the second compressor, and the third connector of the fourth three-way connector, the vacuum pump, the fifth one-way valve, the adsorbent tank and the second air release valve are sequentially connected through a gas pipeline;
when the verification device is vacuumized, gas in the verification device sequentially passes through the seventh self-sealing joint, the third three-way joint, the fourth three-way joint, the vacuum pump, the fifth one-way valve, the adsorbent tank and the second air release valve, or gas in the verification device sequentially passes through the eighth self-sealing joint, the fifth three-way joint, the fifth electromagnetic valve, the third three-way joint, the fourth three-way joint, the vacuum pump, the fifth one-way valve, the adsorbent tank and the second air release valve.
6. A verification method applied to the verification device as claimed in claim 5, the verification method comprising:
configuring a mixed gas through a gas mixing module;
checking the equipment to be checked through the mixed gas;
Storing the mixed gas used by the verification module through a tail gas module;
the mixed gas stored in the tail gas module is filled into the gas mixing module through the gas circulation module for cyclic utilization;
the configuration mixture gas includes:
calculating the target mass of the first preset gas and the target mass of the second preset gas;
calculating the existing mass of the first preset gas and the existing mass of the second preset gas in a mixed gas tank in the gas mixing module;
calculating the configuration quality of the first preset gas and the configuration quality of the second preset gas required for preparing the mixed gas according to the target quality of the first preset gas and the target quality of the second preset gas, wherein the existing quality of the first preset gas and the existing quality of the second preset gas;
filling the first preset gas and the second preset gas into the mixed gas tank according to the calculated configuration quality of the first preset gas and the calculated configuration quality of the second preset gas;
wherein,,
the calculating the target mass of the first preset gas and the target mass of the second preset gas includes:
According to P 11 ＝P 1 C 1 Calculating a first gas partial pressure of the first preset gas according to P 12 ＝P 1 (1-C 1 ) Calculating a second gas partial pressure of the second preset gas;
based on a first preset model, calculating a first gas density of the first preset gas by the acquired first gas partial pressure based on P 12 M＝kT 1 d 12 And the second gas partial pressure is used for calculating the second gas density of the second preset gas;
based on M SF6 ＝d 11 * L and the acquired first gas density, calculating a target mass of the first preset gas, and based on M NC ＝d 12 * L and the acquired second gas density calculate the target mass of the second preset gas;
wherein, the first preset model is:
P 11 ＝(RT 1 B-A)d 11 2 +RTd 11
A＝73.882×10 -5 -5.132105×10 -7 d 11
B＝2.50695×10 -3 -2.12283×10 -6 d 11
R＝56.9502×10 -5
wherein P is 11 A first gas partial pressure, P, of the first predetermined gas 12 A second partial pressure, P, of the second predetermined gas 1 Preparing target pressure of mixed gas in the mixed gas tank, C 1 T is the volume ratio of the first preset gas in the mixed gas to be prepared 1 For the measured value of the temperature sensor, L is the volume of the mixed gas tank, M is the molar mass of the second preset gas, k is the ideal gas constant, and d 11 A first gas density, d, of the first predetermined gas 12 For the second preset gasSecond gas density of body, M SF6 For the target mass of the first preset gas, M NC A target mass for the second preset gas;
the calculating the existing mass of the first preset gas and the existing mass of the second preset gas in the mixed gas tank in the gas mixing module comprises the following steps:
calculating a first existing gas partial pressure of a first preset gas existing in the mixed gas tank and a second existing gas partial pressure of a second preset gas existing in the mixed gas tank according to the existing mixed gas pressure and the existing mixed gas volume mixing ratio in the mixed gas tank;
calculating a first existing gas density of a first preset gas existing in the mixed gas tank and a second existing gas density of a second preset gas existing in the mixed gas tank;
calculating an existing mass of the existing first preset gas in the mixed gas tank based on a first existing gas density of the existing first preset gas
Calculating an existing mass of the second pre-set gas based on a second existing gas density of the existing second pre-set gas>
The calculating the configuration quality of the first preset gas and the configuration quality of the second preset gas required for preparing the mixed gas comprises the following steps:
According to
And->
Calculating the configuration quality of the first preset gas required for preparing the mixed gas>
And a configuration mass M 'of a second preset gas' NC 。
7. The method of calibrating according to claim 6, wherein the filling the mixed gas tank with the first preset gas and the second preset gas comprises:
and opening the first one-way valve and the second one-way valve, closing the first electromagnetic valve and the second electromagnetic valve, and filling the first preset gas and the second preset gas into the mixed gas tank according to the calculated configuration quality of the first preset gas and the calculated configuration quality of the second preset gas.
8. The method according to claim 6, wherein the checking the device to be checked by the mixed gas includes:
zeroing the equipment to be checked;
filling the mixed gas into equipment to be checked, reading an indication value of the equipment to be checked, and calculating a checking parameter of the equipment to be checked according to the indication value of the equipment to be checked and a preset indication value; the preset indication value is the mixed gas volume ratio configured by the gas mixing module, and the verification parameters comprise response time, repeatability and indication value error of an instrument to be verified;
Wherein, the zeroing of the device to be verified comprises:
closing the first electromagnetic valve and the third electromagnetic valve; opening a pressure reducing valve and a first air release valve, opening equipment to be checked, and filling third preset air in a third preset air bottle to enable the indicating value of the equipment to be checked to return to a zero point;
the mixed gas is filled into the equipment to be checked, the indication value of the equipment to be checked is read, and the checking parameters of the equipment to be checked are calculated according to the indication value of the equipment to be checked and the preset indication value, and the method comprises the following steps:
closing the pressure reducing valve, the first air release valve, the fifth electromagnetic valve and the fifth one-way valve, and opening the first electromagnetic valve and the third electromagnetic valve;
introducing the mixed gas into equipment to be checked, recording the time from the moment of introducing the mixed gas to the moment that the indication value reaches 90% of the standard value of the volume ratio of the mixed gas, and recording the indication value when the indication value of the instrument to be checked is stable, so as to finish one-time detection;
zeroing the equipment to be checked and repeatedly detecting;
according to
Calculating response time of the instrument to be checked;
according to
Calculating the repeatability of the instrument to be checked;
according to
Calculating an indication error of a checking instrument;
wherein N is the repetition number of detection again after zeroing the equipment to be checked, N is more than or equal to 3, t is the response time of the instrument to be checked, t i For the response time of the ith detection,
C i for checking the indication value of the ith detection when the indication value of the equipment is stable S r For repeatability, C S And delta C is an indication error for the preset indication.
9. The method of claim 6, wherein storing the mixed gas after the use of the calibration module and recycling the mixed gas stored in the tail gas module by filling the mixed gas into the gas mixing module, comprises:
when the difference between the air pressure in the mixed gas tank and the air pressure in the tail gas tank in the mixed gas mixing module is smaller than a first preset pressure, closing a fifth electromagnetic valve and a fifth one-way valve, opening a fourth one-way valve, starting a second compressor, and filling the gas in the tail gas tank into the mixed gas tank for recycling.
10. The method of verification of claim 6, further comprising:
before the mixed gas is configured through the gas mixing module, connecting equipment to be checked to the checking module and vacuumizing a checking device;
after the equipment to be verified is verified, the mixed gas used in the verification process is treated through the tail gas module;
Wherein the connecting the device to be verified to the verification module includes:
placing the equipment to be checked on an instrument placing platform in a high-low temperature box, communicating an air inlet of the equipment to be checked with an air inlet valve, and connecting an exhaust port of the equipment to be checked with an exhaust valve;
the vacuum pumping to the checking device comprises the following steps:
closing the first one-way valve, the second one-way valve, the pressure reducing valve and the first air release valve; opening a fifth one-way valve, a first electromagnetic valve, a second electromagnetic valve, a third electromagnetic valve, a fourth electromagnetic valve, a fifth electromagnetic valve and a second air release valve; starting a vacuum pump, enabling the vacuum degree in the checking device to be not more than a first preset vacuum degree, and stopping after the first preset time is kept;
after the equipment to be verified is verified, the mixed gas used in the verification process is treated through the tail gas module, and the method comprises the following steps:
and opening a third one-way valve, starting the first compressor, and filling the mixed gas in the mixed gas tank and the tail gas tank into the mixed gas bottle under pressure to perform recovery treatment.
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