CN110954652A - Verification device and verification method - Google Patents

Verification device and verification method Download PDF

Info

Publication number
CN110954652A
CN110954652A CN201911027869.4A CN201911027869A CN110954652A CN 110954652 A CN110954652 A CN 110954652A CN 201911027869 A CN201911027869 A CN 201911027869A CN 110954652 A CN110954652 A CN 110954652A
Authority
CN
China
Prior art keywords
gas
preset
mixed gas
module
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201911027869.4A
Other languages
Chinese (zh)
Other versions
CN110954652B (en
Inventor
庞先海
潘瑾
李晓峰
刘振
景皓
顾朝敏
李天辉
董驰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
State Grid Corp of China SGCC
Electric Power Research Institute of State Grid Hebei Electric Power Co Ltd
State Grid Hebei Energy Technology Service Co Ltd
Original Assignee
State Grid Corp of China SGCC
Electric Power Research Institute of State Grid Hebei Electric Power Co Ltd
State Grid Hebei Energy Technology Service Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by State Grid Corp of China SGCC, Electric Power Research Institute of State Grid Hebei Electric Power Co Ltd, State Grid Hebei Energy Technology Service Co Ltd filed Critical State Grid Corp of China SGCC
Priority to CN201911027869.4A priority Critical patent/CN110954652B/en
Publication of CN110954652A publication Critical patent/CN110954652A/en
Application granted granted Critical
Publication of CN110954652B publication Critical patent/CN110954652B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0006—Calibrating gas analysers

Abstract

The invention is suitable for the field of instruments and meters, and provides a calibration device and a calibration method, wherein the device comprises: the gas mixing module, the calibration module, the tail gas module and the gas circulation module are sequentially connected through a gas pipeline; the gas circulation module and the gas mixing module are connected through a gas pipeline; the gas mixing module is used for configuring mixed gas; the checking module is used for checking the equipment to be checked through the mixed gas; the tail gas module is used for storing the mixed gas used by the verification module; and the gas circulation module is used for filling the mixed gas stored in the tail gas module into the gas mixing module for cyclic utilization. The invention can improve the precision of checking the mixed gas mixing ratio detector, improve the utilization rate of the mixed gas in the checking process and avoid polluting the environment.

Description

Verification device and verification method
Technical Field
The invention belongs to the field of instruments and meters, and particularly relates to a calibration device and a calibration method.
Background
In recent years, more and more attention is paid to the reduction of greenhouse gas emission and environmental protection at home and abroad, and in order to respond to environmental protection requirements, the emission of sulfur hexafluoride greenhouse gas is reduced in various large related industries; SF reduction also in high-voltage switch electrical equipment6Gas dosage, propulsion of mixed insulating gases for use in electrical apparatus, especially for driving SF6And N2Mixed gas or SF6And CF4And (4) using mixed gas. In use, to ensure SF6Insulation properties of the mixed gas against SF6The mixed gas is detected by the mixing ratio detection instrument, and the mixed gas mixing ratio detection instrument needs to be checked in order to ensure the accuracy of the detection result.
At present, a mixed gas mixing ratio detector is checked through standard gas, and the accuracy of a check result depends on the accuracy of the standard gas. However, the use of standard gas has the following problems: firstly, the standard gas is mixed gas prepared at one time and is stored in a closed tank body, and the volume mixing proportion of the standard gas changes along with the prolonging of the storage time and the influence of the environment, so that the calibration accuracy is reduced when the standard gas is used for calibrating the mixed gas mixing proportion detector; second, the applied standard gas is directly discharged to the environment, which not only wastes gas but also pollutes the environment.
Disclosure of Invention
In view of this, embodiments of the present invention provide a calibration apparatus and a calibration method to solve the problems of low calibration accuracy, waste of gas, and environmental pollution in the conventional calibration method.
The first aspect of the embodiment of the invention provides a calibration device, which comprises a gas mixing module, a calibration module, a tail gas module and a gas circulation module which are sequentially connected through a gas pipeline; the gas circulation module and the gas mixing module are connected through a gas pipeline;
the gas mixing module is used for configuring mixed gas;
the checking module is used for checking the equipment to be checked through the mixed gas;
the tail gas module is used for storing the mixed gas used by the verification module;
and the gas circulation module is used for filling the mixed gas stored in the tail gas module into the gas mixing module for cyclic utilization.
A second aspect of an embodiment of the present invention provides a verification method applied to the verification apparatus according to the first aspect, where the verification method includes:
configuring mixed gas through a gas mixing module;
verifying the equipment to be verified through the mixed gas;
storing the mixed gas used by the checking module through a tail gas module;
and the mixed gas stored in the tail gas module is filled into the gas mixing module through the gas circulation module for cyclic utilization.
According to the calibration device, the gas mixing module directly prepares the mixed gas, so that the problem that the volume mixing ratio of the standard gas changes along with the storage time and the environmental influence is solved, and the calibration precision is improved; the gas circulation module fills the mixed gas stored in the tail gas module into the gas mixing module for cyclic utilization, so that the utilization efficiency of the mixed gas is improved, and the use amount of the mixed gas is reduced; the tail gas module is used for storing the mixed gas after the verification module is used, so that the mixed gas is prevented from being directly discharged to the environment, and the problem of environmental pollution is solved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise.
Fig. 1 is a schematic structural diagram of a calibration apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a gas mixing module according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a verification module according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of an exhaust module according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of a gas circulation module provided in an embodiment of the present invention;
fig. 6 is a schematic flowchart of a verification method according to an embodiment of the present invention;
fig. 7 is a schematic flow chart of configuring a mixed gas according to an embodiment of the present invention.
Detailed Description
In the following description, for purposes of explanation and not limitation, specific details are set forth, such as particular system structures, techniques, etc. in order to provide a thorough understanding of the embodiments of the invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced in other embodiments that depart from these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.
In order to explain the technical means of the present invention, the following description will be given by way of specific examples.
Fig. 1 is a schematic structural diagram of a verification apparatus according to an embodiment of the present invention, and referring to fig. 1, the verification apparatus may include a gas mixing module 100, a verification module 200, an exhaust module 300, and a gas circulation module 400, which are connected in sequence by a gas pipeline; the gas circulation module 400 and the gas mixing module 100 are connected by a gas line;
the gas mixing module 100 is used for configuring mixed gas;
the verification module 200 is configured to verify the device to be verified through the mixed gas;
the tail gas module 300 is configured to store the mixed gas used by the verification module 200;
the gas circulation module 400 is configured to charge the mixed gas stored in the tail gas module 300 into the gas mixing module 100 for recycling.
In the embodiment of the application, the gas mixing module 100 directly prepares the mixed gas, so that the problem that the volume mixing ratio of the standard gas changes along with the storage time and the environmental influence is solved, and the calibration precision is improved; the gas circulation module 400 fills the mixed gas stored in the tail gas module 300 into the gas mixing module 100 for cyclic utilization, so that the utilization efficiency of the mixed gas is improved, and the usage amount of the mixed gas is reduced; the tail gas module 300 stores the mixed gas used by the verification module 200, so that the mixed gas is prevented from being directly discharged to the environment, and the problem of environmental pollution is solved.
As another embodiment of the present application, the gas mixing module may include: the gas mixing device comprises a first preset gas bottle, a second preset gas bottle, a mixed gas tank, a first self-sealing joint and a second self-sealing joint; the first preset gas bottle is connected with the mixed gas tank and used for providing first preset gas for the mixed gas tank; the second preset gas bottle is connected with the mixed gas tank and used for providing second preset gas for the mixed gas tank; the mixed gas tank is used for mixing the first preset gas and the second preset gas to form the mixed gas; the first self-sealing joint is arranged between the mixed gas tank and the verification module and used for filling the mixed gas in the mixed gas tankEntering the checking module; the second self-sealing joint is arranged between the mixed gas tank and the gas circulation module and is used for filling the mixed gas flowing through the gas circulation module into the mixed gas tank; the first predetermined gas comprises SF6A second predetermined gas comprising N2Gas or CF4A gas.
As another embodiment of the present application, the gas mixing module may further include: the first weigher is arranged at the bottom of the first preset gas bottle, the second weigher is arranged at the bottom of the second preset gas bottle, and the third weigher is arranged at the bottom of the mixed gas tank; a first relief valve, a first pressure sensor and a temperature sensor provided on the mixed gas tank; the gas mixing device comprises a first check valve, a first mass flow meter, a second check valve and a second mass flow meter, wherein the first preset gas bottle, the first check valve, the first mass flow meter and a first gas inlet of the mixed gas tank are sequentially connected through a gas pipeline; the second preset gas bottle, the second one-way valve, the second mass flow meter and a second gas inlet of the mixed gas tank are sequentially connected through a gas pipeline; the gas outlet of the mixed gas tank, the first electromagnetic valve and the first self-sealing joint are connected through a gas pipeline in sequence, and the second self-sealing joint, the second electromagnetic valve and the circulating gas inlet of the mixed gas tank are connected through a gas pipeline in sequence.
In some embodiments of the present application, referring to fig. 2, the gas mixing module 100 may include: a first predetermined gas bottle 101, a second predetermined gas bottle 109, a mixed gas tank 104, a first self-sealing joint 106, and a second self-sealing joint 107. Wherein, the first preset gas bottle 101 is filled with a first preset gas, and the second preset gas bottle 109 is filled with a second preset gas, in this embodiment, the device to be verified is a pair of SF6The mixed gas mixing ratio detector for detecting the mixing ratio of the mixed gas is correspondingly characterized in that the first preset gas is SF6Gas, the second predetermined gas is N2Gas or CF4A gas. In practical applicationThe types of the first preset gas and the second preset gas can be changed correspondingly according to the change of the instrument to be verified. The mixed gas tank 104 is connected with a first preset gas bottle 101 and a second preset gas bottle 109 respectively, and is used for mixing the first preset gas and the second preset gas to form the mixed gas. The first self-sealing joint 106 is connected with the mixed gas tank 104 through a gas pipeline, is arranged between the mixed gas tank 104 and the verification module 200, and is used for filling the mixed gas in the mixed gas tank 104 into the verification module 200. And a second self-sealing joint 107 arranged between the mixed gas tank 104 and the gas circulation module 400, for filling the mixed gas flowing through the gas circulation module 400 into the mixed gas tank 104.
In order to control the delivery of the first preset gas and the second preset gas and accurately control the mass flow of the configured mixed gas in actual operation, the gas mixing module 100 may further include a first check valve 102, a first mass flow meter 103, a second check valve 111, and a second mass flow meter 110, wherein the first preset gas bottle 101, the first check valve 102, the first mass flow meter 103, and the first gas inlet of the mixed gas tank 104 are sequentially connected through a gas pipeline. In order to monitor the mass of the mixed gas in the mixed gas tank 104, the mass of the first preset gas in the first preset gas bottle 101, and the mass of the second preset gas in the second preset gas bottle 109 when the mixed gas is configured, the gas mixing module 100 may further include a first scale 116 disposed at the bottom of the first preset gas bottle 101, a second scale 117 disposed at the bottom of the second preset gas bottle 109, and a third scale 115 disposed at the bottom of the mixed gas tank 104. The gas mixing module 100 may further include a first relief valve 113, a first pressure sensor 112, and a temperature sensor 114 provided on the mixed gas tank 104; when the gas pressure in the mixed gas tank 104 exceeds the preset pressure, the first safety valve 113 deflates the mixed gas tank 104, so that the safety risk is reduced; the first pressure sensor 112 monitors the gas pressure within the mixed gas tank 104; the temperature sensor 114 monitors the temperature within the mixed gas tank 104. To control the gas line between the first self-sealing joint 106 and the mixed gas tank 104 and the gas line between the second self-sealing joint and the mixed gas tank 104, the gas mixing module 100 may further include: the gas outlet of the mixed gas tank 104, the first electromagnetic valve 105 and the first self-sealing joint 106 are sequentially connected through a gas pipeline, and the second self-sealing joint 107, the second electromagnetic valve 108 and the circulating gas inlet of the mixed gas tank 104 are sequentially connected through a gas pipeline.
As another embodiment of the present application, the verification module includes: the third self-sealing joint, the high-low temperature box, the fourth self-sealing joint, the placing platform, the air inlet valve and the tail gas valve; the third self-sealing joint is connected with the gas mixing module; the high-low temperature box is used for providing the environmental temperature during verification; the air inlet valve is arranged in the high-low temperature box, is connected with the third self-sealing joint through an air pipeline, and is used for filling the mixed gas in the gas mixing module into equipment to be verified through the third self-sealing joint for verification; the placing platform is arranged in the high-low temperature box and used for placing equipment to be verified; the tail gas valve is arranged in the high-low temperature box and is used for enabling mixed gas used in the verification process of the equipment to be verified to flow to the fourth self-sealing joint; and the fourth self-sealing joint is connected with the tail gas module and is used for filling the mixed gas exhausted by the tail gas valve into the tail gas module.
As another embodiment of the present application, the verification module further includes: the third preset gas bottle, the pressure reducing valve, the first three-way joint, the second three-way joint and the first air release valve; the third preset gas bottle, the pressure reducing valve and a third joint in the first three-way joint are sequentially connected through a gas pipeline; the third preset gas bottle is used for containing third preset gas for zeroing the equipment to be verified; the third self-sealing joint is connected with a first joint in the first three-way joint, and a second joint in the first three-way joint is connected with the air inlet valve; the exhaust valve is connected with a first joint in a second three-way joint, and a second joint in the second three-way joint is connected with the fourth self-sealing joint; the first air release valve is connected with a third joint in the second three-way joint; when the equipment to be verified is adjusted with zero, third preset gas in the third preset gas bottle sequentially flows into the equipment to be verified through the pressure reducing valve, the first three-way joint and the air inlet valve; and tail gas during zero adjustment is discharged through the tail gas valve, the second three-way joint and the first air release valve in sequence.
In some embodiments of the present application, referring to fig. 3, the verification module 200 may include: a third self-sealing joint 201 connected to the gas mixing module 100; the high-low temperature box 203 is used for providing the environmental temperature during verification, the temperature range can be controlled to be-50 ℃, and the control precision is +/-0.5 ℃; the air inlet valve 207 is arranged in the high-low temperature box 303, is connected with the third self-sealing joint 201 through an air pipeline, and is used for filling the mixed gas in the gas mixing module 100 into the equipment to be verified through the third self-sealing joint 201 for verification; the placing platform 206 is arranged in the high-low temperature box 203 and is used for placing equipment to be verified; the exhaust valve 208 is arranged in the high-low temperature box 203 and is used for enabling mixed gas used in the verification process of the equipment to be verified to flow to the fourth self-sealing joint 205; and a fourth self-sealing joint 205 connected to the exhaust module 300, for filling the exhaust module 300 with the mixed gas exhausted through the exhaust valve 208. During calibration, the device to be calibrated is placed on the placing platform 206, the air inlet of the device to be calibrated is connected with the air inlet valve 207, and the air outlet of the device to be calibrated is connected with the exhaust valve 208.
In order to conveniently zero the device to be verified, the verification module 200 may further include a third preset gas bottle 210, a pressure reducing valve 209, a first three-way joint 202, a second three-way joint 204, and a first deflation valve 211; wherein the third preset gas bottle 210, the pressure reducing valve 209 and a third joint of the first three-way joint 202 are connected in sequence through a gas pipeline; the third predetermined gas bottle 210 is used for containing a third predetermined gas for zeroing the device to be verified, in this embodiment, the third predetermined gas is N2Or CF4A gas; the third self-sealing joint 201 is connected with a first joint in the first three-way joint 202, and a second joint in the first three-way joint 202 is connected with the air inlet valve 207; the exhaust valve 208 is connected with a first joint in the second three-way joint 204, and a second joint in the second three-way joint 204 is connected with a fourth self-sealing joint 205; a first purge valve 208 anda third fitting in the second tee fitting 204 is connected. When the equipment to be verified is zeroed, third preset gas in the third preset gas bottle flows into the equipment to be verified sequentially through the pressure reducing valve 209, the first three-way joint 202 and the air inlet valve 207, and tail gas during zeroing is discharged sequentially through the tail gas valve 208, the second three-way joint 204 and the first air release valve 211.
As another embodiment of the present application, the exhaust module may include: the fifth self-sealing joint, the tail gas tank and the sixth self-sealing joint; the fifth self-sealing joint is connected with the calibration module and is used for filling the mixed gas discharged by the calibration module into the tail gas tank; the tail gas tank is connected with the fifth self-sealing joint and is used for collecting the mixed gas discharged by the verification module; and the sixth self-sealing joint is connected with the tail gas tank and is used for filling the mixed gas in the tail gas tank into the gas circulation module.
As another embodiment of the present application, the exhaust module may further include: the third electromagnetic valve is arranged between the tail gas tank and the fifth self-sealing joint, and the fourth electromagnetic valve is arranged between the tail gas tank and the sixth self-sealing joint; the system comprises a first compressor, a third one-way valve and a mixed gas bottle, wherein the tail gas tank, the first compressor, the third one-way valve and the mixed gas bottle are sequentially connected through a gas pipeline; the second safety valve is arranged at the top of the tail gas tank, and the second pressure sensor is arranged at the top of the tail gas tank; when mixed gas is recycled, the mixed gas in the tail gas tank is filled into the mixed gas bottle through the compressor and the third one-way valve in sequence.
In some embodiments of the present application, referring to fig. 4, the exhaust module 300 may include: a fifth self-sealing joint 301, a tail gas tank 303 and a sixth self-sealing joint 307; the fifth self-sealing joint 301 is connected with the verification module 200 and is used for filling the mixed gas discharged by the verification module 200 into the tail gas tank 303; the tail gas tank 303 is connected with the fifth self-sealing joint and is used for collecting the mixed gas discharged by the verification module 200; and a sixth self-sealing joint 307 connected with the tail gas tank 303 and used for filling the mixed gas in the tail gas tank 303 into the gas circulation module 400.
To facilitate control of the gas flowing through the gas line of the exhaust module 300, the exhaust module 300 may further include: a third electromagnetic valve 302 arranged between the tail gas tank 303 and the fifth self-sealing joint 301, and a fourth electromagnetic valve 308 arranged between the tail gas tank 303 and the sixth self-sealing joint 307. In order to recover and process the mixed gas after the verification, the exhaust module 300 may further include: the system comprises a first compressor 304, a third one-way valve 305 and a mixed gas bottle 306, wherein the tail gas tank 303, the first compressor 304, the third one-way valve 305 and the mixed gas bottle 306 are sequentially connected through a gas pipeline. When the mixed gas is recovered, the mixed gas in the tail gas tank 303 is filled into the mixed gas bottle 306 through the compressor 304 and the third one-way valve 305 in sequence under the action of the compressor 304. After the mixed gas is recovered, the mixed gas filled in the mixed gas bottle 306 may be reused or harmlessly treated. For safety reasons, the exhaust module 300 may further include a second safety valve 309 disposed on the exhaust tank 303 and a second pressure sensor 310 disposed at the top of the exhaust tank 303.
As another embodiment of the present application, the gas circulation module may include: the seventh self-sealing joint, the second compressor, the fourth one-way valve and the eighth self-sealing joint; the second compressor is connected with the seventh self-sealing joint and is used for extracting the mixed gas stored in the tail gas module through the seventh self-sealing joint; the fourth one-way valve is arranged between the second compressor and the eighth self-sealing joint and is used for transmitting the mixed gas extracted by the second compressor to the direction of the eighth self-sealing joint; and the eighth self-sealing joint is connected with the fourth one-way valve and is used for filling the mixed gas transmitted by the fourth one-way valve into the gas mixing module for cyclic utilization.
As another embodiment of the present application, the gas circulation module may further include: the third three-way joint, the fifth electromagnetic valve, the fifth three-way joint, the fourth three-way joint, the vacuum pump, the fifth one-way valve, the adsorbent tank and the second air release valve; the third three-way joint, the fifth electromagnetic valve and the fifth three-way joint are arranged between the seventh self-sealing joint and the eighth self-sealing joint and are sequentially connected through a gas pipeline; a first joint in the fourth three-way joint is connected with a third joint in the third three-way joint, a second joint in the fourth three-way joint is connected with the second compressor, and a third joint in the fourth three-way joint, the vacuum pump, the fifth one-way valve, the adsorbent tank and the second deflation valve are sequentially connected through a gas pipeline; when the checking device is vacuumized, gas in the checking device is discharged sequentially through the seventh self-sealing joint, the third three-way joint, the fourth three-way joint, the vacuum pump, the fifth one-way valve, the adsorbent tank and the second deflation valve, or gas in the checking device is discharged sequentially through the eighth self-sealing joint, the fifth three-way joint, the fifth electromagnetic valve, the third three-way joint, the fourth three-way joint, the vacuum pump, the fifth one-way valve, the adsorbent tank and the second deflation valve.
In some embodiments of the present application, referring to fig. 5, the gas circulation module 400 may include: a seventh self-sealing joint 401, a second compressor 404, a fourth check valve 405, and an eighth self-sealing joint 407; the second compressor 404 is connected with the seventh self-sealing joint 401 and is used for extracting the mixed gas stored in the tail gas module 300 through the seventh self-sealing joint 401; a fourth check valve 405, disposed between the second compressor 404 and the eighth self-sealing joint 407, for transmitting the mixed gas extracted by the second compressor 404 to the direction of the eighth self-sealing joint 407; and the eighth self-sealing joint 407 is connected to the fourth check valve 405, and is configured to fill the mixed gas transmitted by the fourth check valve 405 into the gas mixing module 100 for recycling. When the mixed gas is recycled, the mixed gas stored in the exhaust gas module 300 is sequentially charged into the gas mixing module 100 through the seventh self-sealing joint 401, the second compressor 404, the fourth check valve 405, and the eighth self-sealing joint 407 by the second compressor 404, and is recycled.
Before the equipment is verified, the accuracy of verification can be improved by vacuumizing the verification device, and in order to conveniently vacuumize the equipment, the gas circulation module 400 may further include: a third three-way joint 402, a fifth solenoid valve 408, a fifth three-way joint 406, a fourth three-way joint 403, a vacuum pump 409, a fifth one-way valve 410, an adsorbent canister 411, and a second purge valve 412; the third three-way joint 402, the fifth electromagnetic valve 408 and the fifth three-way joint 406 are arranged between the seventh self-sealing joint 401 and the eighth self-sealing joint 407 and are sequentially connected through a gas pipeline; a first joint in the fourth three-way joint 403 is connected with a third joint in the third three-way joint 402, a second joint in the fourth three-way joint 403 is connected with the second compressor 404, and a third joint in the fourth three-way joint 403, the vacuum pump 409, the fifth one-way valve 410, the adsorbent tank 411 and the second purge valve 412 are sequentially connected through a gas pipeline; when the verification device is vacuumized, gas in the verification device is discharged sequentially through a seventh self-sealing joint 401, a third three-way joint 402, a fourth three-way joint 403, a vacuum pump 409, a fifth one-way valve 410, an adsorbent tank 411 and a second deflation valve 412, or gas in the verification device is discharged sequentially through an eighth self-sealing joint 407, a fifth three-way joint 406, a fifth electromagnetic valve 408, a third three-way joint 402, a fourth three-way joint 403, a vacuum pump 409, a fifth one-way valve 410, an adsorbent tank 411 and a second deflation valve 412.
Fig. 6 is a schematic flow chart of a verification method provided by the embodiment of the present invention, and referring to fig. 6, the verification method may include:
step S601, a mixed gas is configured by the gas mixing module.
Step S602, the equipment to be verified is verified through the mixed gas.
And step S603, storing the mixed gas used by the verification module through a tail gas module.
And step S604, filling the mixed gas stored in the tail gas module into a gas mixing module through a gas circulating module for recycling.
In the embodiment of the application, the mixed gas is directly prepared by the gas mixing module, so that the problem that the volume mixing ratio of the standard gas changes along with the storage time and the influence of the environment is solved; the equipment to be verified is verified by using the mixed gas directly prepared by the gas mixing module, and the verification precision is improved because the mixed gas is more accurate than the mixed gas in the past; the tail gas module stores the mixed gas used by the check module, so that the mixed gas is prevented from being directly discharged into the environment, and the problem of environmental pollution is solved; the mixed gas stored in the tail gas module is charged into the gas mixing module through the gas circulation module for cyclic utilization, so that the use amount of the mixed gas is reduced, and the utilization efficiency of the mixed gas is improved.
As another embodiment of the present application, the configuring of the mixed gas may include:
step S6011, calculating a target mass of the first preset gas and a target mass of the second preset gas; wherein the first predetermined gas comprises SF6A second predetermined gas comprising N2Gas or CF4A gas.
Step S6012, calculating an existing mass of the first preset gas and an existing mass of the second preset gas in a mixed gas tank in the gas mixing module.
Step S6013, calculating a configuration mass of the first preset gas and a configuration mass of the second preset gas required for preparing the mixed gas according to the target mass of the first preset gas and the target mass of the second preset gas, the existing mass of the first preset gas and the existing mass of the second preset gas.
Step S6014, filling a first preset gas and a second preset gas into the mixed gas tank according to the calculated configuration mass of the first preset gas and the calculated configuration mass of the second preset gas.
In the embodiment of the present application, how much mixed gas is configured is generally determined according to actual needs or actual conditions, and thus there is a target mass for configuring the mixed gas. The mixed gas is prepared by mixing a first preset gas and a second preset gas, so if the mixed gas with a target mass is prepared, the target mass of the first preset gas and the target mass of the second preset gas need to be calculated. In actual operation, a small amount of the first predetermined gas and the second predetermined gas must remain in the mixed gas tank, and in order to improve the accuracy of configuration, the existing mass of the first predetermined gas and the second predetermined gas remaining in the mixed gas pipe needs to be calculated. After the target mass of the first preset gas, the target mass of the second preset gas, the existing mass of the first preset gas and the existing mass of the second preset gas are obtained, the configuration mass of the first preset gas and the configuration mass of the second preset gas required for preparing the mixed gas, namely the actual required amount of the first preset gas and the second preset gas can be obtained. And filling the first preset gas and the second preset gas into the mixed gas tank according to the calculated configuration mass of the first preset gas and the calculated configuration mass of the second preset gas, and configuring to obtain the mixed gas for verification.
As another embodiment of the present application, the calculating the target mass of the first preset gas and the target mass of the second preset gas may include: according to P11＝P1C1Calculating a first gas partial pressure of the first predetermined gas according to P12＝P1(1-C1) Calculating a second gas partial pressure of the second preset gas; calculating a first gas density of the first predetermined gas based on the first predetermined model through the acquired partial pressure of the first gas, based on P12M＝kT1d12And the second gas partial pressure, calculating a second gas density of the second predetermined gas; based on
Figure BDA0002249195070000121
And the acquired first gas density, calculating the target mass of the first preset gas and based on MNC＝d12Calculating a target mass of the second predetermined gas from L and the obtained second gas density; wherein the first preset model is:
P11＝(RT1B-A)d11 2+RTd11
A＝73.882×10-5-5.132105×10-7d11
B＝2.50695×10-3-2.12283×10-6d11
R＝56.9502×10-5
in the formula, P11A first gas partial pressure, P, of the first predetermined gas12A second gas partial pressure, P, of the second predetermined gas1Preparing a target pressure of the mixed gas in the mixed gas tank, C1Is the volume ratio of the first preset gas in the mixed gas to be prepared, T1Is a measured value of the temperature sensor, L is a volume of the mixed gas tank, M is a molar mass of the second preset gas, k is an ideal gas constant, d11Is a first gas density of the first predetermined gas, d12Is a second gas density of the second predetermined gas,
Figure BDA0002249195070000122
is the target mass, M, of the first predetermined gasNCIs the target mass of the second predetermined gas.
In some embodiments of the present application, the target mass of the mixed gas is determined by a target pressure for dispensing the mixed gas in the mixed gas tank, and the respective masses of the first predetermined gas and the second predetermined gas are determined by a predetermined volume ratio, such as a predetermined C1That is, the volume ratio of the first predetermined gas in the mixed gas to be prepared can be based on T1、P1、C1And L calculating to obtain the target mass of the first preset gas and the target mass of the second preset gas, wherein T1Is the measured value of the temperature sensor, P1Preparing a target pressure of the mixed gas in the mixed gas tank, C1The volume ratio of the first preset gas in the mixed gas to be prepared is shown, and L is the volume of the mixed gas tank. The specific calculation process is as described in the above embodiments, and is not described herein again.
As another embodiment of the present application, the calculating of the existing mass of the first predetermined gas and the second predetermined gas in the mixed gas tank in the gas mixing moduleThe existing mass of the two predetermined gases may include: calculating a first existing gas partial pressure of a first preset gas existing in the mixed gas tank and a second existing gas partial pressure of a second preset gas existing in the mixed gas tank according to the existing mixed gas pressure and the existing mixed gas volume mixing ratio in the mixed gas tank; calculating a first extant gas density of a first preset gas existing in the mixed gas tank and a second extant gas density of a second preset gas existing in the mixed gas tank; calculating an existing mass of a first predetermined gas existing within a gas tank based on a first existing gas density of the existing first predetermined gas
Figure BDA0002249195070000131
Calculating an existing mass of the second predetermined gas based on a second existing gas density of the existing second predetermined gas
Figure BDA0002249195070000135
In some embodiments of the present application, the existing mixed gas pressure in the mixed gas tank may be obtained by the first pressure sensor, the existing mass of the first predetermined gas and the existing mass of the second predetermined gas may be calculated based on the temperature in the mixed gas tank, the existing mixed gas pressure in the mixed gas tank, the existing mixed gas volume mixing ratio, and the volume of the mixed gas tank, and the calculation process is the same as the process of calculating the target mass of the first predetermined gas and the target mass of the second predetermined gas described in the above embodiments, and will not be described herein again.
As another embodiment of the present application, the calculating a configured mass of a first preset gas and a configured mass of a second preset gas required for preparing the mixed gas may include: according to
Figure BDA0002249195070000133
And
Figure BDA0002249195070000132
calculating and preparing the mixed gasConfiguration quality of first predetermined gas required by body
Figure BDA0002249195070000134
And configuration mass M 'of second preset gas'NC。
In some embodiments of the present application, after the target mass of the first preset gas, the target mass of the second preset gas, the existing mass of the first preset gas, and the existing mass of the second preset gas are obtained, the configured mass of the first preset gas and the configured mass of the second preset gas required for preparing the mixed gas are obtained by subtracting the existing masses from the target mass.
As another embodiment of the present application, the filling of the first predetermined gas and the second predetermined gas into the mixed gas tank may include: and opening the first one-way valve and the second one-way valve, closing the first electromagnetic valve and the second electromagnetic valve, and filling the first preset gas and the second preset gas into the mixed gas tank according to the calculated configuration mass of the first preset gas and the calculated configuration mass of the second preset gas.
In some embodiments of the present application, referring to fig. 2, the first check valve 102 and the second check valve 111 are opened, the first solenoid valve 105 and the second solenoid valve 108 are closed, the first preset gas and the second preset gas are filled into the mixed gas tank according to the calculated configuration quality of the first preset gas and the calculated configuration quality of the second preset gas, and the opening or closing of the first check valve 102 and the second check valve 111 is controlled in real time according to the readings of the first mass flow meter, the second mass flow meter, the first weigher, the second weigher and the third weigher, so that the first preset gas and the second preset gas are accurately filled into the mixed gas tank according to the calculated configuration quality to configure the mixed gas.
As another embodiment of the present application, the verifying the device to be verified by using the mixed gas may include:
and zeroing the equipment to be verified.
Filling the mixed gas into equipment to be verified, reading an indication value of the equipment to be verified, and calculating verification parameters of the equipment to be verified according to the indication value of the equipment to be verified and a preset indication value; the preset indicating value is a mixed gas volume ratio configured by the gas mixing module, and the verification parameters comprise response time, repeatability and indicating value errors of an instrument to be verified.
In some embodiments of the present application, in order to improve the accuracy of the verification, the device to be verified needs to be zeroed for each verification. And after zero setting is finished, filling the mixed gas into the equipment to be checked, reading the indicating value of the equipment to be checked, and calculating the checking parameters of the equipment to be checked. In this embodiment, the preset indication value is a volume ratio of the mixed gas configured by the gas mixing module, that is, a standard reading that should be displayed by the device to be verified, and the verification parameters may include response time, repeatability, and indication error of the instrument to be verified.
As another embodiment of the present application, the zeroing the device to be verified includes:
closing the first solenoid valve and the third solenoid valve; and opening the pressure reducing valve and the first air release valve, opening the equipment to be verified, and filling third preset gas in a third preset gas bottle to return the indication value of the equipment to be verified to the zero point.
In some embodiments of the present application, referring to FIGS. 2, 3 and 4 in combination, the first solenoid valve 105 and the third solenoid valve 302 are closed to isolate the verification module from the gas mixing module and the exhaust module. The pressure reducing valve 209 is opened to release the third preset gas in the third preset gas bottle, the device to be verified is opened to be filled with the third preset gas, so that the indication value of the device to be verified returns to the zero point, and meanwhile, the third preset gas for zero adjustment is discharged through the first air release valve 211. In the embodiment of the present application, the third predetermined gas is N2Or CF4A gas.
As another embodiment of the present application, the filling the mixed gas into the device to be verified, reading an indication value of the device to be verified, and calculating a verification parameter of the device to be verified according to the indication value of the device to be verified and a preset indication value includes: closing the pressure reducing valve, the first air release valve and the fifth electromagnetic valveAnd a fifth check valve that opens the first solenoid valve and the third solenoid valve; introducing the mixed gas into equipment to be verified, recording the time from the moment when the mixed gas is introduced to the time when the indication value reaches 90% of the volume ratio standard value of the mixed gas, and recording the indication value when the indication value of the instrument to be verified is stable, thereby completing one-time detection; zeroing the equipment to be checked and carrying out repeated detection; according to
Figure BDA0002249195070000151
Calculating the response time of the instrument to be checked; according to
Figure BDA0002249195070000152
Calculating the repeatability of the instrument to be checked; according to
Figure BDA0002249195070000153
Calculating the indication error of the checking instrument; wherein N is the number of times of repeating the detection after the zero setting of the equipment to be verified, N is more than or equal to 3, t is the response time of the instrument to be verified, and t is the response time of the instrument to be verifiediFor the response time of the i-th detection,
Figure BDA0002249195070000154
C’ifor the indication of the i-th test when the indication of the checking apparatus is stable, SrFor reproducibility, CSAnd delta C is the indication error of the preset indication value.
In some embodiments of the present application, in order to ensure the accuracy of the verification and obtain more verification data, the device to be verified is verified for multiple times, after completing the verification of the device for one time, the device is zeroed again, the verification is performed again, and the verification is repeated for at least 3 times.
As another embodiment of the present application, the storing the mixed gas used by the verification module and the filling the mixed gas stored by the exhaust module into the gas mixing module for recycling may include: and when the difference between the air pressure in the mixed gas tank in the mixed gas mixing module and the air pressure in the tail gas tank is smaller than a first preset pressure, closing the fifth electromagnetic valve and the fifth one-way valve, opening the fourth one-way valve, starting the second compressor, and filling the gas in the tail gas tank into the mixed gas tank for recycling.
In some embodiments of the present application, referring to fig. 2, 4 and 5 in combination, when the difference between the air pressure in the mixed gas tank 104 and the air pressure in the tail gas tank 303 is less than the first preset pressure, the fifth solenoid valve 408 and the fifth check valve 410 are closed, the fourth check valve 405 is opened, the second compressor 404 is started, and the air in the tail gas tank 303 is filled into the mixed gas tank 104 for recycling. In the embodiment of the present application, the first predetermined pressure may be 0.2 Mpa.
As another embodiment of the present application, the verification method may further include:
and step S605, starting the high-low temperature box, setting a temperature value to be kept by the high-low temperature box according to the high-low temperature environment checking requirement of the instrument to be checked, repeating the steps S602 to S604 after the temperature of the high-low temperature box is stabilized, and checking the high-low temperature environment of the instrument to be checked.
As another embodiment of the present application, the verification method may further include:
step S601', before the mixed gas is configured by the gas mixing module, connecting the device to be verified to the verification module and evacuating the verification apparatus.
And step S606, after the equipment to be verified is verified, treating the mixed gas used in the verification process through the tail gas module.
Wherein the connecting the device to be verified to the verification module comprises: placing the equipment to be verified on an instrument placing platform in a high-low temperature box, communicating an air inlet of the equipment to be verified with an air inlet valve, and connecting a tail gas port of the equipment to be verified with a tail gas valve; wherein, keep examining the required preset temperature of check-up to the equipment of examining through high hypothermia case.
The evacuating the verification device may include: closing the first one-way valve, the second one-way valve, the pressure reducing valve and the first air relief valve; opening a fifth one-way valve, a first electromagnetic valve, a second electromagnetic valve, a third electromagnetic valve, a fourth electromagnetic valve, a fifth electromagnetic valve and a second air release valve; and starting the vacuum pump, so that the vacuum degree in the checking device is not more than the first preset vacuum degree, and stopping after keeping the first preset vacuum degree for the first preset time.
After the device to be verified is verified, the processing, by the exhaust module, of the mixed gas used in the verification process may include: and opening the third one-way valve, starting the first compressor, filling the mixed gas in the mixed gas tank and the tail gas tank into the mixed gas bottle, and performing recovery treatment.
In some embodiments of the present application, referring to fig. 2, 3, 4 and 5 in combination, the device to be verified is first placed on the instrument placement platform 206 inside the high and low temperature chamber 203, the inlet of the device to be verified is connected to the inlet valve 207, and the exhaust port of the device to be verified is connected to the exhaust valve 208. Before the equipment is verified, evacuating the verifying unit may improve the accuracy of the verification, and evacuating the verifying unit may include: closing the first check valve 102, the second check valve 111, the pressure reducing valve 209 and the first purge valve 211; opening the fifth check valve 410, the first solenoid valve 105, the second solenoid valve 108, the third solenoid valve 302, the fourth solenoid valve 308, the fifth solenoid valve 408 and the second purge valve 412; and starting the vacuum pump 409 to enable the vacuum degree in the checking device to be not more than the first preset vacuum degree and stop after the vacuum degree is kept for the first preset time. Wherein the first preset vacuum degree is 133Pa, and the first preset time is 30 min. After the verification is completed, the third check valve 305 is opened, the first compressor 304 is started, the mixed gas in the mixed gas tank 104 and the tail gas tank 303 is pressurized and filled into the mixed gas bottle 306, and the mixed gas filled into the mixed gas bottle 306 can be recycled or harmlessly treated.
As another embodiment of the present application, the verification method may further include: and repeating the steps S601' to S605, filling the mixed gas configured by the preset gas with different mixing ratios into the equipment to be verified, and verifying for multiple times to improve the verification accuracy.
According to the verification device and the verification method provided by the embodiment of the invention, the first preset gas and the second preset gas are used in the gas mixing module to directly prepare the mixed gas required by verification, so that the problem that the verification accuracy is reduced due to the change of the standard gas along with the temperature is avoided, and the verification accuracy is improved. When the mixed gas is configured, the mixed gas is configured in a mass weighing mode, wherein when the mass of the preset gas is calculated, different gas state equations are followed when the mass and the volume of different preset gases are converted, and the preparation precision of the mixed gas is improved. The tail gas module recovers the tail gas after the verification is finished, the tail gas is prevented from being discharged into the atmosphere, and the environment is protected. The gas circulation module recycles the mixed gas, so that the configuration amount of the mixed gas is reduced in the checking process, and the cost is reduced.
The above-mentioned embodiments are only used for illustrating the technical solutions of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not substantially depart from the spirit and scope of the embodiments of the present application and are intended to be included within the scope of the present application.

Claims (10)

1. A calibration device is characterized by comprising a gas mixing module, a calibration module, a tail gas module and a gas circulation module which are sequentially connected through a gas pipeline; the gas circulation module and the gas mixing module are connected through a gas pipeline;
the gas mixing module is used for configuring mixed gas;
the checking module is used for checking the equipment to be checked through the mixed gas;
the tail gas module is used for storing the mixed gas used by the verification module;
and the gas circulation module is used for filling the mixed gas stored in the tail gas module into the gas mixing module for cyclic utilization.
2. The verification apparatus of claim 1, wherein the gas mixing module comprises: the gas mixing device comprises a first preset gas bottle, a second preset gas bottle, a mixed gas tank, a first self-sealing joint and a second self-sealing joint;
the first preset gas bottle is connected with the mixed gas tank and used for providing first preset gas for the mixed gas tank;
the second preset gas bottle is connected with the mixed gas tank and used for providing second preset gas for the mixed gas tank;
the mixed gas tank is used for mixing the first preset gas and the second preset gas to form the mixed gas;
the first self-sealing joint is arranged between the mixed gas tank and the verification module and is used for filling the mixed gas in the mixed gas tank into the verification module;
the second self-sealing joint is arranged between the mixed gas tank and the gas circulation module and is used for filling the mixed gas flowing through the gas circulation module into the mixed gas tank;
the first predetermined gas comprises SF6A second predetermined gas comprising N2Gas or CF4A gas;
the gas mixing module further comprises:
the first weigher is arranged at the bottom of the first preset gas bottle, the second weigher is arranged at the bottom of the second preset gas bottle, and the third weigher is arranged at the bottom of the mixed gas tank;
a first relief valve, a first pressure sensor and a temperature sensor provided on the mixed gas tank;
the gas mixing device comprises a first check valve, a first mass flow meter, a second check valve and a second mass flow meter, wherein the first preset gas bottle, the first check valve, the first mass flow meter and a first gas inlet of the mixed gas tank are sequentially connected through a gas pipeline; the second preset gas bottle, the second one-way valve, the second mass flow meter and a second gas inlet of the mixed gas tank are sequentially connected through a gas pipeline;
the gas outlet of the mixed gas tank, the first electromagnetic valve and the first self-sealing joint are connected through a gas pipeline in sequence, and the second self-sealing joint, the second electromagnetic valve and the circulating gas inlet of the mixed gas tank are connected through a gas pipeline in sequence.
3. The verification apparatus of claim 2, wherein the verification module comprises: the third self-sealing joint, the high-low temperature box, the fourth self-sealing joint, the placing platform, the air inlet valve and the tail gas valve;
the third self-sealing joint is connected with the gas mixing module;
the high-low temperature box is used for providing the environmental temperature during verification;
the air inlet valve is arranged in the high-low temperature box, is connected with the third self-sealing joint through an air pipeline, and is used for filling the mixed gas in the gas mixing module into equipment to be verified through the third self-sealing joint for verification;
the placing platform is arranged in the high-low temperature box and used for placing equipment to be verified;
the tail gas valve is arranged in the high-low temperature box and is used for enabling mixed gas used in the verification process of the equipment to be verified to flow to the fourth self-sealing joint;
the fourth self-sealing joint is connected with the tail gas module and is used for filling the mixed gas exhausted by the tail gas valve into the tail gas module;
the verification module further comprises: the third preset gas bottle, the pressure reducing valve, the first three-way joint, the second three-way joint and the first air release valve;
the third preset gas bottle, the pressure reducing valve and a third joint in the first three-way joint are sequentially connected through a gas pipeline; the third preset gas bottle is used for containing third preset gas for zeroing the equipment to be verified;
the third self-sealing joint is connected with a first joint in the first three-way joint, and a second joint in the first three-way joint is connected with the air inlet valve;
the exhaust valve is connected with a first joint in a second three-way joint, and a second joint in the second three-way joint is connected with the fourth self-sealing joint;
the first air release valve is connected with a third joint in the second three-way joint;
when the equipment to be verified is adjusted with zero, third preset gas in the third preset gas bottle sequentially flows into the equipment to be verified through the pressure reducing valve, the first three-way joint and the air inlet valve; and tail gas during zero adjustment is discharged through the tail gas valve, the second three-way joint and the first air release valve in sequence.
4. The verification device of claim 3, wherein the exhaust module comprises: the fifth self-sealing joint, the tail gas tank and the sixth self-sealing joint;
the fifth self-sealing joint is connected with the calibration module and is used for filling the mixed gas discharged by the calibration module into the tail gas tank;
the tail gas tank is connected with the fifth self-sealing joint and is used for collecting the mixed gas discharged by the verification module;
the sixth self-sealing joint is connected with the tail gas tank and is used for filling the mixed gas in the tail gas tank into the gas circulation module;
the exhaust module further includes:
the third electromagnetic valve is arranged between the tail gas tank and the fifth self-sealing joint, and the fourth electromagnetic valve is arranged between the tail gas tank and the sixth self-sealing joint;
the system comprises a first compressor, a third one-way valve and a mixed gas bottle, wherein the tail gas tank, the first compressor, the third one-way valve and the mixed gas bottle are sequentially connected through a gas pipeline;
the second safety valve is arranged at the top of the tail gas tank, and the second pressure sensor is arranged at the top of the tail gas tank;
when mixed gas is recycled, the mixed gas in the tail gas tank is filled into the mixed gas bottle through the compressor and the third one-way valve in sequence.
5. The verification apparatus of claim 4, wherein the gas circulation module comprises: the seventh self-sealing joint, the second compressor, the fourth one-way valve and the eighth self-sealing joint;
the seventh self-sealing joint is connected with the tail gas module;
the second compressor is connected with the seventh self-sealing joint and is used for extracting the mixed gas stored in the tail gas module through the seventh self-sealing joint;
the fourth one-way valve is arranged between the second compressor and the eighth self-sealing joint and is used for transmitting the mixed gas extracted by the second compressor to the direction of the eighth self-sealing joint;
the eighth self-sealing joint is connected with the fourth one-way valve and is used for filling the mixed gas transmitted by the fourth one-way valve into the gas mixing module for cyclic utilization;
the gas circulation module further comprises: the third three-way joint, the fifth electromagnetic valve, the fifth three-way joint, the fourth three-way joint, the vacuum pump, the fifth one-way valve, the adsorbent tank and the second air release valve;
the third three-way joint, the fifth electromagnetic valve and the fifth three-way joint are arranged between the seventh self-sealing joint and the eighth self-sealing joint and are sequentially connected through a gas pipeline;
a first joint in the fourth three-way joint is connected with a third joint in the third three-way joint, a second joint in the fourth three-way joint is connected with the second compressor, and a third joint in the fourth three-way joint, the vacuum pump, the fifth one-way valve, the adsorbent tank and the second deflation valve are sequentially connected through a gas pipeline;
when the checking device is vacuumized, gas in the checking device is discharged sequentially through the seventh self-sealing joint, the third three-way joint, the fourth three-way joint, the vacuum pump, the fifth one-way valve, the adsorbent tank and the second deflation valve, or gas in the checking device is discharged sequentially through the eighth self-sealing joint, the fifth three-way joint, the fifth electromagnetic valve, the third three-way joint, the fourth three-way joint, the vacuum pump, the fifth one-way valve, the adsorbent tank and the second deflation valve.
6. A verification method applied to the verification apparatus according to claim 5, the verification method comprising:
configuring mixed gas through a gas mixing module;
verifying the equipment to be verified through the mixed gas;
storing the mixed gas used by the checking module through a tail gas module;
and the mixed gas stored in the tail gas module is filled into the gas mixing module through the gas circulation module for cyclic utilization.
7. The verification method of claim 6, wherein the configuring the mixed gas comprises:
calculating a target mass of the first predetermined gas and a target mass of the second predetermined gas;
calculating the existing mass of the first preset gas and the existing mass of the second preset gas in a mixed gas tank in the gas mixing module;
calculating the configuration mass of the first preset gas and the configuration mass of the second preset gas required for preparing the mixed gas according to the target mass of the first preset gas and the target mass of the second preset gas, the existing mass of the first preset gas and the existing mass of the second preset gas;
filling a first preset gas and a second preset gas into the mixed gas tank according to the calculated configuration mass of the first preset gas and the calculated configuration mass of the second preset gas;
wherein the content of the first and second substances,
the calculating the target mass of the first preset gas and the target mass of the second preset gas comprises:
according to P11＝P1C1Calculating a first gas partial pressure of the first predetermined gas according to P12＝P1(1-C1) Calculating a second gas partial pressure of the second preset gas;
calculating a first gas density of the first predetermined gas based on the first predetermined model through the acquired partial pressure of the first gas, based on P12M＝kT1d12And the second gas partial pressure, calculating a second gas density of the second predetermined gas;
based on MSF6＝d11Calculating a target mass of the first predetermined gas based on L and the acquired first gas density, and based on MNC＝d12Calculating a target mass of the second predetermined gas from L and the obtained second gas density;
wherein the first preset model is:
P11＝(RT1B-A)d11 2+RTd11
A＝73.882×10-5-5.132105×10-7d11
B＝2.50695×10-3-2.12283×10-6d11
R＝56.9502×10-5
in the formula, P11A first gas partial pressure, P, of the first predetermined gas12A second gas partial pressure, P, of the second predetermined gas1Preparing a target pressure of the mixed gas in the mixed gas tank, C1Is the volume ratio of the first preset gas in the mixed gas to be prepared, T1Is a measured value of the temperature sensor, L is a volume of the mixed gas tank, M is a molar mass of the second preset gas, k is an ideal gas constant, d11Is a first gas density of the first predetermined gas, d12Is a second gas density of the second predetermined gas,
Figure FDA0002249195060000061
is the target mass, M, of the first predetermined gasNCIs the target mass of the second predetermined gas;
calculating the existing mass of the first preset gas and the existing mass of the second preset gas in a mixed gas tank in the gas mixing module, including:
calculating a first existing gas partial pressure of a first preset gas existing in the mixed gas tank and a second existing gas partial pressure of a second preset gas existing in the mixed gas tank according to the existing mixed gas pressure and the existing mixed gas volume mixing ratio in the mixed gas tank;
calculating a first extant gas density of a first preset gas existing in the mixed gas tank and a second extant gas density of a second preset gas existing in the mixed gas tank;
calculating an existing mass of the existing first predetermined gas in the mixed gas tank based on a first existing gas density of the existing first predetermined gas
Figure FDA0002249195060000062
Calculating an extant mass of the second predetermined gas based on a second extant gas density of the extant second predetermined gas
Figure FDA0002249195060000063
The calculating the configuration mass of the first preset gas and the configuration mass of the second preset gas required for preparing the mixed gas comprises:
according to
Figure FDA0002249195060000064
And
Figure FDA0002249195060000065
calculating the configuration mass of a first preset gas required for preparing the mixed gas
Figure FDA0002249195060000066
And configuration mass M 'of second preset gas'NC；
The to fill in the mist jar first preset gas and second preset gas include:
and opening the first one-way valve and the second one-way valve, closing the first electromagnetic valve and the second electromagnetic valve, and filling the first preset gas and the second preset gas into the mixed gas tank according to the calculated configuration mass of the first preset gas and the calculated configuration mass of the second preset gas.
8. The verification method of claim 6, wherein verifying the device to be verified with the mixed gas comprises:
zeroing the equipment to be verified;
filling the mixed gas into equipment to be verified, reading an indication value of the equipment to be verified, and calculating verification parameters of the equipment to be verified according to the indication value of the equipment to be verified and a preset indication value; the preset indicating value is a mixed gas volume ratio configured by the gas mixing module, and the verification parameters comprise response time, repeatability and indicating value errors of an instrument to be verified;
wherein, treat that check-up equipment carries out zero setting, include:
closing the first solenoid valve and the third solenoid valve; opening the pressure reducing valve and the first air release valve, opening the equipment to be verified, and filling third preset gas in a third preset gas bottle to enable the indication value of the equipment to be verified to return to the zero point;
the step of filling the mixed gas into the equipment to be verified, reading the indication value of the equipment to be verified, and calculating the verification parameters of the equipment to be verified according to the indication value of the equipment to be verified and the preset indication value comprises the following steps:
closing the pressure reducing valve, the first deflation valve, the fifth electromagnetic valve and the fifth one-way valve, and opening the first electromagnetic valve and the third electromagnetic valve;
introducing the mixed gas into equipment to be verified, recording the time from the moment when the mixed gas is introduced to the time when the indication value reaches 90% of the volume ratio standard value of the mixed gas, and recording the indication value when the indication value of the instrument to be verified is stable, thereby completing one-time detection;
zeroing the equipment to be checked and carrying out repeated detection;
according to
Figure FDA0002249195060000071
Calculating the response time of the instrument to be checked;
according to
Figure FDA0002249195060000072
Calculating the repeatability of the instrument to be checked;
according to
Figure FDA0002249195060000073
Calculating the indication error of the checking instrument;
wherein N is the number of times of repeating the detection after the zero setting of the equipment to be verified, N is more than or equal to 3, t is the response time of the instrument to be verified, and t is the response time of the instrument to be verifiediFor the response time of the i-th detection,
Figure FDA0002249195060000081
C’ifor the indication of the i-th test when the indication of the checking apparatus is stable, SrFor reproducibility, CSAnd delta C is the indication error of the preset indication value.
9. The verification method according to claim 6, wherein the storing the mixed gas used by the verification module and the recycling the mixed gas stored in the exhaust module by filling the gas mixing module comprise:
and when the difference between the air pressure in the mixed gas tank in the mixed gas mixing module and the air pressure in the tail gas tank is smaller than a first preset pressure, closing the fifth electromagnetic valve and the fifth one-way valve, opening the fourth one-way valve, starting the second compressor, and filling the gas in the tail gas tank into the mixed gas tank for recycling.
10. The verification method of claim 6, further comprising:
before the mixed gas is configured through the gas mixing module, connecting equipment to be verified to the verification module and vacuumizing the verification device;
after the equipment to be verified is verified, treating mixed gas used in the verification process through the tail gas module;
wherein the connecting the device to be verified to the verification module comprises:
placing the equipment to be verified on an instrument placing platform in a high-low temperature box, communicating an air inlet of the equipment to be verified with an air inlet valve, and connecting a tail gas port of the equipment to be verified with a tail gas valve;
the evacuation of verifying attachment includes:
closing the first one-way valve, the second one-way valve, the pressure reducing valve and the first air relief valve; opening a fifth one-way valve, a first electromagnetic valve, a second electromagnetic valve, a third electromagnetic valve, a fourth electromagnetic valve, a fifth electromagnetic valve and a second air release valve; starting a vacuum pump, enabling the vacuum degree in the checking device to be not more than a first preset vacuum degree, keeping the first preset vacuum degree for a first preset time, and then stopping the vacuum pump;
after the equipment to be verified is verified, the mixed gas used in the verification process is processed through the tail gas module, and the method comprises the following steps:
and opening the third one-way valve, starting the first compressor, filling the mixed gas in the mixed gas tank and the tail gas tank into the mixed gas bottle, and performing recovery treatment.
CN201911027869.4A 2019-10-28 2019-10-28 Verification device and verification method Active CN110954652B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201911027869.4A CN110954652B (en) 2019-10-28 2019-10-28 Verification device and verification method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201911027869.4A CN110954652B (en) 2019-10-28 2019-10-28 Verification device and verification method

Publications (2)

Publication Number Publication Date
CN110954652A true CN110954652A (en) 2020-04-03
CN110954652B CN110954652B (en) 2023-05-09

Family

ID=69975734

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201911027869.4A Active CN110954652B (en) 2019-10-28 2019-10-28 Verification device and verification method

Country Status (1)

Country Link
CN (1) CN110954652B (en)

Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000330810A (en) * 1999-05-20 2000-11-30 Fujitsu General Ltd Zero check sum device
CN101943691A (en) * 2010-04-14 2011-01-12 广西电网公司电力科学研究院 Device and method for checking SF6 gas leakage monitoring and alarming apparatuses
WO2012097488A1 (en) * 2011-01-19 2012-07-26 四川电力科学研究院 Calibration device for on-line sulfur hexafluoride humidity meters and calibration method therefor
CN103245908A (en) * 2012-02-03 2013-08-14 华北电力科学研究院有限责任公司 SF6 and SF6 mixed gas density relay verifying unit
CN103558346A (en) * 2013-11-15 2014-02-05 国家电网公司 Device for checking sulfur hexafluoride leakage alarm apparatus
CN104698372A (en) * 2013-12-04 2015-06-10 上海乐研电气科技有限公司 SF6 or mixed gas-containing density relay calibration device
CN104698371A (en) * 2013-12-04 2015-06-10 上海乐研电气科技有限公司 Multifunctional gas density relay calibration device
CN104876189A (en) * 2015-05-21 2015-09-02 国家电网公司 SF6 gas online purifying device of electrical SF6 circuit breaker and application method of SF6 gas online purifying device
CN104891449A (en) * 2015-05-21 2015-09-09 国家电网公司 Electric SF6 mutual inductor gas on-line processing apparatus and use method
CN105911224A (en) * 2016-05-13 2016-08-31 国家电网公司 Gas distribution method and gas distribution device for checking SF6 (sulfur hexafluoride) analyzer
CN107356712A (en) * 2017-08-18 2017-11-17 国网辽宁省电力有限公司电力科学研究院 A kind of SF6Analyte detector calibration equipment
CN108107355A (en) * 2017-12-20 2018-06-01 国网河北省电力有限公司电力科学研究院 A kind of SF6And SF6Mixed gas density monitor calibration equipment and method
CN109307738A (en) * 2017-11-16 2019-02-05 中国石油化工股份有限公司 A kind of chlorine alarm calibration method and calibrating installation
CN109569339A (en) * 2018-12-12 2019-04-05 云南电网有限责任公司电力科学研究院 A kind of mixed gas system and method based on pid algorithm
CN109737305A (en) * 2019-03-15 2019-05-10 国网陕西省电力公司电力科学研究院 A kind of air charging system and its operating method of sulfur hexafluoride and nitrogen mixed gas
CN110045200A (en) * 2019-03-29 2019-07-23 浙江日新电气有限公司 The test calibrating installation of SF6 transmitter
CN209204995U (en) * 2018-12-05 2019-08-06 国家电网有限公司 A kind of recyclable device of sulfur hexafluoride and nitrogen mixed gas
CN209278858U (en) * 2018-11-16 2019-08-20 河南省日立信股份有限公司 Sulfur hexafluoride and nitrogen mixed gas membrane separation device debugging tool

Patent Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000330810A (en) * 1999-05-20 2000-11-30 Fujitsu General Ltd Zero check sum device
CN101943691A (en) * 2010-04-14 2011-01-12 广西电网公司电力科学研究院 Device and method for checking SF6 gas leakage monitoring and alarming apparatuses
WO2012097488A1 (en) * 2011-01-19 2012-07-26 四川电力科学研究院 Calibration device for on-line sulfur hexafluoride humidity meters and calibration method therefor
CN103245908A (en) * 2012-02-03 2013-08-14 华北电力科学研究院有限责任公司 SF6 and SF6 mixed gas density relay verifying unit
CN103558346A (en) * 2013-11-15 2014-02-05 国家电网公司 Device for checking sulfur hexafluoride leakage alarm apparatus
CN104698372A (en) * 2013-12-04 2015-06-10 上海乐研电气科技有限公司 SF6 or mixed gas-containing density relay calibration device
CN104698371A (en) * 2013-12-04 2015-06-10 上海乐研电气科技有限公司 Multifunctional gas density relay calibration device
CN104891449A (en) * 2015-05-21 2015-09-09 国家电网公司 Electric SF6 mutual inductor gas on-line processing apparatus and use method
CN104876189A (en) * 2015-05-21 2015-09-02 国家电网公司 SF6 gas online purifying device of electrical SF6 circuit breaker and application method of SF6 gas online purifying device
CN105911224A (en) * 2016-05-13 2016-08-31 国家电网公司 Gas distribution method and gas distribution device for checking SF6 (sulfur hexafluoride) analyzer
CN107356712A (en) * 2017-08-18 2017-11-17 国网辽宁省电力有限公司电力科学研究院 A kind of SF6Analyte detector calibration equipment
CN109307738A (en) * 2017-11-16 2019-02-05 中国石油化工股份有限公司 A kind of chlorine alarm calibration method and calibrating installation
CN108107355A (en) * 2017-12-20 2018-06-01 国网河北省电力有限公司电力科学研究院 A kind of SF6And SF6Mixed gas density monitor calibration equipment and method
CN209278858U (en) * 2018-11-16 2019-08-20 河南省日立信股份有限公司 Sulfur hexafluoride and nitrogen mixed gas membrane separation device debugging tool
CN209204995U (en) * 2018-12-05 2019-08-06 国家电网有限公司 A kind of recyclable device of sulfur hexafluoride and nitrogen mixed gas
CN109569339A (en) * 2018-12-12 2019-04-05 云南电网有限责任公司电力科学研究院 A kind of mixed gas system and method based on pid algorithm
CN109737305A (en) * 2019-03-15 2019-05-10 国网陕西省电力公司电力科学研究院 A kind of air charging system and its operating method of sulfur hexafluoride and nitrogen mixed gas
CN110045200A (en) * 2019-03-29 2019-07-23 浙江日新电气有限公司 The test calibrating installation of SF6 transmitter

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
庞先海等: "《SF6-N2混合气体物性参数计算与分析》", 《河北电力技术》 *
张建飞等: "SF_6气体检测仪器尾气回收装置的研制", 《电气技术》 *
施 昌 彦等: "测量仪器特性评定", 《中华人民共和国国家计量技术规范工1F 1094- 2002》 *
罗振之等: "通用计量术语及定义", 《中华人民共和国国家计量技术规范JJF1001一1998》 *

Also Published As

Publication number Publication date
CN110954652B (en) 2023-05-09

Similar Documents

Publication Publication Date Title
CN104888635B (en) Device and method for compounding multiple cylinders of mixed gas
US8636040B2 (en) Installation for packaging NO using mass flow meters
CN103335791B (en) A kind of based on the thin leak hunting method of helium mass spectrum quantitatively determining the longest time inspection time
US20140298893A1 (en) Method for testing the integrity of a hydrophobic porous diaphragm filter
CN104865109A (en) Quantitative air inlet method of transformer oil and sample compounding device thereof
CN107091905A (en) A kind of recharging type sulfur hexafluoride on-line detector sampling degree of accuracy calibration method
CN104865354A (en) Formaldehyde gas detector verification device, system and method
CN103645013B (en) Satellite integral leakage test automatic clamping and placing sample system and pick and place quadrat method
CN111595408B (en) Equipment for measuring liquid level in constant-temperature closed container, film coating device and method for measuring liquid level
CN113358174B (en) Space free volume measuring method
CN104764862B (en) A kind of gas concentration on-the-spot test method
CN111157180B (en) System and method for measuring ground leakage of airship
CN110954652A (en) Verification device and verification method
CN103278295A (en) Helium mass spectrum fine leakage detecting method of multiple helium pressing and prefilled helium pressing
CN105427907B (en) A kind of fuel rod micro-cavities volume measuring system and method
CN106338588A (en) Testing and calibrating method and device of recharge rate of online detector of sulfur hexafluoride
JP4329921B2 (en) Inspection gas mixing apparatus and mixing method
CN114636531B (en) Device and method for testing tightness of rigid packaging container based on vacuum degree attenuation
CN204789519U (en) Formaldehyde gas detector calibrating installation and system
CN204666420U (en) Transformer oil quantitative air inlet method sample preparation device
CN104089745B (en) The test of satellite integral leakage is with picking and placeing sampling device and pick and place sample scaling method
JP2003065495A (en) Mixed gas charging method and device
CN112147033A (en) Gas content testing system and method
CN206930647U (en) A kind of recharging type sulfur hexafluoride on-line detector sampling degree of accuracy calibration platform
WO2018193444A1 (en) Combined volumetric - gravimetric system and method for preparation of gas mixtures

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant