CN110938808B - Evaporation control method and evaporation equipment - Google Patents
Evaporation control method and evaporation equipment Download PDFInfo
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- CN110938808B CN110938808B CN201911230215.1A CN201911230215A CN110938808B CN 110938808 B CN110938808 B CN 110938808B CN 201911230215 A CN201911230215 A CN 201911230215A CN 110938808 B CN110938808 B CN 110938808B
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- crucible
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- movable baffle
- evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Abstract
The invention discloses evaporation equipment and an evaporation control method, wherein the evaporation equipment comprises a vacuum cavity and a crucible positioned in the vacuum cavity; the movable baffle is arranged in the crucible in parallel with the upper surface of the crucible and is used for containing evaporation materials; the air pressure monitoring device is connected with the vacuum cavity; and the air pressure transmission device is respectively connected with the air pressure monitoring device and the movable baffle plate and is used for controlling the movable baffle plate to move upwards or downwards in the crucible. The movable baffle, the air pressure monitoring device and the air pressure transmission device are additionally arranged in the evaporation equipment, and the air pressure monitoring device and the air pressure transmission device are controlled through seamless precise linkage to change the moving direction and the moving distance of the movable baffle in the crucible so as to maintain the steam pressure unchanged and achieve the purpose of constant evaporation rate, avoid the influence of temperature change on evaporation materials and ensure that the optical characteristics of an evaporation coating layer are not invalid.
Description
Technical Field
The invention relates to the technical field of display, in particular to an evaporation control method and evaporation equipment.
Background
Vacuum evaporation coating refers to heating an evaporation material to form steam in a vacuum environment, and depositing the steam on a substrate through a mask plate to form a film structure. In order to improve the coating efficiency, the evaporation rate of the evaporation material needs to be kept constant, and the evaporation material is gradually reduced in the evaporation process, so that the internal space of the crucible is increased, the vapor pressure in the crucible is reduced along with the increase of the internal space, and the evaporation rate is reduced.
In the related art, since the evaporation rate is proportional to the heating temperature of the crucible, the evaporation rate is increased by continuously increasing the heating temperature of the crucible as the evaporation material is decreased during the evaporation process.
However, the evaporation material used for coating belongs to organic functional materials or luminescent materials, and the high temperature increases the possibility of decomposition and deterioration of the material, which leads to poor photoelectric characteristics and even failure of the thin film structure evaporated on the substrate.
Disclosure of Invention
The present invention is directed to a vapor deposition control method and a vapor deposition apparatus, which are provided to overcome the above-mentioned disadvantages of the prior art, and the object of the present invention is achieved by the following means.
A first aspect of the present invention provides an evaporation apparatus, including:
the crucible is positioned in the vacuum cavity;
the movable baffle is arranged in the crucible in parallel with the upper surface of the crucible and is used for containing evaporation materials;
the air pressure monitoring device is connected with the vacuum cavity;
and the air pressure transmission device is respectively connected with the air pressure monitoring device and the movable baffle plate and is used for controlling the movable baffle plate to move upwards or downwards in the crucible.
Optionally, the pneumatic actuator comprises: the device comprises an air source device, a control device and an actuating mechanism; the control device is respectively connected with the air source device, the actuating mechanism and the air pressure monitoring device; the actuating mechanism is connected with the movable baffle.
Optionally, the air source device comprises an air compressor and a prime mover; the prime mover is used for generating mechanical energy; the air compressor is used for converting mechanical energy generated by the prime mover into pressure energy and transmitting the pressure energy to the actuating mechanism through the control device; the actuating mechanism is used for converting the pressure energy into mechanical energy and outputting the mechanical energy to the movable baffle so as to push the movable baffle to move upwards or downwards.
Optionally, the control device includes: pressure valves, flow valves, directional valves and control elements.
Optionally, the evaporation apparatus may further include: a material supplementing device; the material supplementing device is respectively connected with the pneumatic transmission device and the vacuum cavity.
A second aspect of the present invention provides an evaporation control method applied to the evaporation apparatus according to the first aspect, the method including:
the air pressure monitoring device detects the steam pressure inside the crucible and sends the steam pressure to the air pressure transmission device;
and the pneumatic transmission device determines the moving distance and the moving direction of the movable baffle plate according to the steam pressure, and controls the movable baffle plate to move the moving distance according to the moving direction so as to change the steam pressure in the crucible.
Optionally, the pneumatic transmission device determines the moving distance and the moving direction of the movable baffle according to the steam pressure, and includes: a control device in the pneumatic transmission device determines the moving direction of the movable baffle plate according to the steam pressure and a preset stable pressure; the control device determines a first height required to be maintained between the movable baffle and the upper surface of the crucible by using the steam pressure, acquires a second height between the movable baffle and the upper surface of the crucible at present, and determines the moving distance of the movable baffle according to the first height and the second height.
Optionally, the control device determines the moving direction of the movable baffle according to the steam pressure and a preset dimensional stability pressure, and includes: if the steam pressure is lower than the stable pressure, determining that the moving direction of the movable baffle is towards the direction close to the upper surface of the crucible; and if the steam pressure is higher than the stable pressure, determining that the moving direction of the movable baffle is moving towards the direction far away from the upper surface of the crucible.
Optionally, the pneumatic actuator controls the movable barrier to move the moving distance according to the moving direction, and the method includes: and the control device in the pneumatic transmission device adjusts the direction valve according to the moving direction and adjusts the pressure valve and the flow valve according to the moving distance, so that an actuating mechanism in the pneumatic transmission device receives pressure energy which can push the movable baffle plate to move the moving distance according to the moving direction.
Optionally, before the pneumatic actuator determines the moving distance and the moving direction of the movable barrier according to the steam pressure, the method further includes: if the steam pressure is lower than the preset critical pressure, the pneumatic transmission device sends a signal for indicating the material supplement to the material supplement device; the feeding device introduces an evaporation material into the crucible based on the signal.
In the embodiment of the application, the movable baffle, the air pressure monitoring device and the air pressure transmission device are additionally arranged in the evaporation equipment, and the air pressure monitoring device and the air pressure transmission device are used for controlling through seamless precise linkage to change the moving direction and the moving distance of the movable baffle in the crucible so as to maintain the constant steam pressure and achieve the purpose of constant evaporation rate, thereby avoiding the influence on evaporation materials caused by temperature change and ensuring that the optical characteristics of an evaporation coating layer are not invalid. That is, the vapor pressure in the crucible can be directly fed back to the pneumatic transmission device, so that the pneumatic transmission device can drive the movable baffle to do mechanical motion in real time.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:
fig. 1 is a schematic structural diagram of an evaporation apparatus according to an exemplary embodiment of the present invention;
fig. 2A is a flowchart illustrating an exemplary evaporation control method according to an exemplary embodiment of the present invention;
FIG. 2B is a schematic view of a crucible according to the embodiment of FIG. 2A.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the invention, as detailed in the appended claims.
Because the evaporation material in the crucible can be less and less in the continuous evaporation process, the internal space of the crucible is increased, the vapor pressure in the crucible is reduced along with the increase of the internal space of the crucible, and the evaporation rate of the evaporation material is reduced.
Based on the above, the invention provides an evaporation device, which can achieve the purpose of maintaining the evaporation rate constant by maintaining the vapor pressure in the crucible constant on the premise of maintaining the heating temperature of the crucible constant.
The evaporation apparatus shown in fig. 1 includes: the vacuum chamber 10, the crucible 20 positioned inside the vacuum chamber 10, the movable baffle 30, the air pressure monitoring device 40 and the air pressure transmission device 50. Wherein, the movable baffle 30 is arranged in the crucible 20 in parallel with the upper surface of the crucible 20 and is used for containing evaporation materials; the air pressure monitoring device 40 is connected with the vacuum cavity 10; the pneumatic actuator 50 is connected to the pneumatic monitoring device 40 and the movable barrier 30, respectively, for controlling the movable barrier 30 to move up or down inside the crucible 20.
Among them, the movable shutter 30 needs to be made of a high temperature resistant material that does not chemically react with the vapor of the evaporation material. The vacuum chamber 10 can ensure that the crucible 20 can be evaporated in a vacuum state.
Because the upper surface of the crucible 20 is provided with a steam diffusion outlet for the evaporation material, the internal air pressure of the crucible 20 is consistent with the air pressure of the vacuum cavity 10, the air pressure monitored by the air pressure monitoring device 40 in real time is the steam pressure inside the crucible 20, and the air pressure transmission device 50 controls the movable baffle 30 to move according to the steam pressure fed back by the air pressure monitoring device 40, so that the distance between the evaporation material and the upper surface of the crucible 20 is ensured to be unchanged, and the purpose of maintaining the steam pressure at a stable pressure is achieved.
In the evaporation process, because the evaporation material is gradually reduced, the distance between the evaporation material and the upper surface of the crucible 20 is increased, and further the steam pressure is reduced, if the air pressure transmission device 50 can control the movable baffle 30 to move upwards in a linkage manner according to the fed-back steam pressure, the distance between the evaporation material and the upper surface of the crucible 20 can be ensured to be unchanged, and further the steam pressure is ensured to be kept constant.
Even in the material replenishing process, since the evaporation materials are gradually increased, the distance between the evaporation materials and the upper surface of the crucible 20 is reduced, and the steam pressure is increased, if the pneumatic transmission device 50 can control the movable baffle 30 to move downwards in a linkage manner according to the fed-back steam pressure, the distance between the evaporation materials and the upper surface of the crucible 20 can be ensured to be unchanged, so that the steam pressure change caused by the material replenishing is maintained.
Based on the above description, the movable baffle plate is controlled by the air pressure monitoring device and the air pressure transmission device in a linkage manner to compress the space or release the space so as to change the vapor pressure environment in the crucible, thereby maintaining the vapor pressure unchanged and achieving the purpose of constant evaporation rate. Because the heating temperature of the crucible is constant, the influence on the evaporation material caused by temperature change can be avoided, and the optical characteristic of the evaporation coating layer is ensured not to lose efficacy.
In one embodiment, as shown in fig. 1, the pneumatic actuator 50 includes an air supply device 501, a control device 502, and an actuator 503. The control device 502 is respectively connected with the air source device 501, the actuating mechanism 503 and the air pressure monitoring device 40; the actuator 503 is connected to the movable barrier 30.
In one example, the air source device 501 is a compressed air generating device, and includes an air compressor and a prime mover. The prime mover is used for generating mechanical energy, and the air compressor is used for converting the mechanical energy generated by the prime mover into pressure energy and transmitting the pressure energy to the actuator 503 through the control device 502.
The actuator 503 is used to convert the pressure energy into mechanical energy and output the mechanical energy to the movable barrier 30, so as to push the movable barrier 30 to move upward or downward.
In another example, the control device 502 may include pressure valves, flow valves, directional valves, and control elements. The pressure valve is used for adjusting the pressure of the compressed air, the flow valve is used for adjusting the flow rate of the compressed air, the directional valve is used for adjusting the flow direction of the compressed air, and the control element is used for performing logic processing on the vapor pressure fed back by the air pressure monitoring device 40 and adjusting the pressure valve, the flow valve and the directional valve according to the processing result so as to realize the movement of the movable baffle 30.
It should be noted that the pneumatic actuator 50 also includes various auxiliary components, such as various filters, misters, mufflers, radiators, sensors, amplifiers, and plumbing, which play an important role in maintaining a reliable, constant temperature, and long-lasting operation of the system.
In another embodiment, the evaporation apparatus shown in fig. 1 may further include a feeding device 60. Wherein, the feeding device 60 is respectively connected with the pneumatic transmission device 50 and the vacuum chamber 10.
Illustratively, when the pneumatic actuator 50 cannot maintain the vapor pressure inside the crucible 20 at the steady-state pressure, which indicates that the evaporation material in the crucible 20 has been depleted to a certain small extent, the pneumatic actuator 50 feeds back a signal indicating replenishment to the replenishment device 60, so that the replenishment device 60 performs a replenishment process based on the signal to introduce the evaporation material into the crucible 20.
Fig. 2A is a flowchart illustrating an embodiment of an evaporation control method according to an exemplary embodiment of the present invention, and this embodiment describes the evaporation control method with reference to the evaporation apparatus illustrated in fig. 1, as illustrated in fig. 2A, where the evaporation control method includes the following steps:
step 201: the air pressure monitoring device detects the steam pressure inside the crucible and sends the steam pressure to the air pressure transmission device.
The air pressure monitoring device can detect the steam pressure inside the crucible in real time and report the steam pressure to the air pressure transmission device.
Step 202: and the pneumatic transmission device determines the moving distance and the moving direction of the movable baffle plate according to the steam pressure, and controls the movable baffle plate to move the moving distance according to the moving direction so as to change the steam pressure in the crucible.
In one embodiment, the pneumatic actuator as shown in fig. 1 includes a control device for performing logic processing, so that the control device in the pneumatic actuator can determine the moving direction of the movable baffle plate according to the steam pressure and a preset stability-maintaining pressure, determine a first height to be maintained between the movable baffle plate and the upper surface of the crucible by using the steam pressure, acquire a second height between the movable baffle plate and the upper surface of the crucible at present, and determine the moving distance of the movable baffle plate according to the first height and the second height.
The following is a derivation of the principle of determination of the direction of movement of the movable barrier:
as shown in the schematic view of the crucible structure in fig. 2B, the volume of the space between the movable baffle and the upper surface of the crucible:
V＝H*W*L (1)
wherein H represents the height between the upper surface of the crucible and the movable baffle, W represents the inner width of the crucible, and L represents the bottom length in the crucible;
according to the Kerbelon equation:
p V R T (formula 2)
Where P represents the vapor pressure within the crucible, V represents the volume of space between the movable shield and the upper surface of the crucible, n represents the amount of material (i.e., the amount of vapor, which is a known quantity), R represents the gas constant, and T represents the absolute temperature.
Substituting equation (1) into equation (2) can be derived:
H＝(n*R*T)/(P*L*W) (3)
as can be seen from the formula (3), H increases and the steam pressure in the crucible decreases as the evaporation material is consumed, and H can be maintained unchanged by moving the movable baffle upwards; as the evaporation material increases, H decreases and the vapor pressure in the crucible increases, and H can be maintained constant by moving the movable shutter downward.
Wherein H is the height required for the stable pressure P.
Therefore, the process that the control device determines the moving direction of the movable baffle according to the steam pressure and the preset stable pressure is achieved, and if the steam pressure is smaller than the stable pressure, the moving direction of the movable baffle is determined to move towards the direction close to the upper surface of the crucible, namely to move upwards; and if the steam pressure is higher than the stable pressure, determining the moving direction of the movable baffle plate to be the direction far away from the upper surface of the crucible, namely moving downwards.
In addition, by substituting the current pressure of the steam in the crucible into the above formula (3), it is possible to obtain a first height H1 that needs to be maintained between the movable shutter and the upper surface of the crucible, then obtain a second height H2 between the current movable shutter and the upper surface of the crucible (i.e., the height after the movable shutter was last adjusted), and determine the difference between H1 and H2 as the moving distance of the movable shutter.
In an example, for the process of controlling the movable barrier to move the moving distance according to the moving direction by the pneumatic actuator, the control device in the pneumatic actuator may adjust the direction valve according to the determined moving direction, and adjust the pressure valve and the flow valve according to the determined moving distance, so that the actuator in the pneumatic actuator receives the pressure energy capable of pushing the movable barrier to move the moving distance according to the moving direction.
It should be noted that before determining the moving distance and the moving direction of the movable baffle according to the steam pressure, the pneumatic transmission device needs to determine whether the steam pressure is saturated or not, that is, whether the evaporation material is consumed to a certain extent or not is indicated, and the steam pressure cannot be maintained at the stable pressure.
The implementation process can be as follows: and if the steam pressure is less than the preset critical pressure, indicating that the air pressure compensation is saturated, sending a signal for indicating the material supplement to the material supplement device by the air pressure transmission device, and leading the evaporation material into the crucible by the material supplement device based on the signal.
For example, the feeding device may continuously introduce the evaporation material into the crucible for a preset time period, or may continuously introduce the evaporation material into the crucible for a preset amount, and the specific introduction manner is not particularly limited in the present invention.
In this embodiment, the air pressure monitoring device and the air pressure transmission device change the moving direction and the moving distance of the movable baffle plate in the crucible through seamless precise linkage control, so as to maintain the steam pressure unchanged and achieve the purpose of constant evaporation rate. That is to say, the reduction of the vapor pressure in the crucible can be directly fed back to the pneumatic transmission device, so that the pneumatic transmission device can drive the movable baffle plate to do mechanical motion in real time.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (10)
1. The utility model provides an evaporation equipment, evaporation equipment includes vacuum cavity and the crucible that is located vacuum cavity inside, its characterized in that still includes:
the movable baffle is arranged in the crucible in parallel with the upper surface of the crucible and is used for containing evaporation materials;
the air pressure monitoring device is connected with the vacuum cavity;
and the air pressure transmission device is respectively connected with the air pressure monitoring device and the movable baffle plate and is used for controlling the movable baffle plate to move upwards or downwards in the crucible according to the steam pressure fed back by the air pressure monitoring device so as to maintain the steam pressure in the crucible at a stable pressure.
2. The apparatus of claim 1, wherein the pneumatic actuator comprises: the device comprises an air source device, a control device and an actuating mechanism;
the control device is respectively connected with the air source device, the actuating mechanism and the air pressure monitoring device;
the actuating mechanism is connected with the movable baffle.
3. The apparatus of claim 2, wherein the air supply means comprises an air compressor and a prime mover;
the prime mover is used for generating mechanical energy;
the air compressor is used for converting mechanical energy generated by the prime mover into pressure energy and transmitting the pressure energy to the actuating mechanism through the control device;
the actuating mechanism is used for converting the pressure energy into mechanical energy and outputting the mechanical energy to the movable baffle so as to push the movable baffle to move upwards or downwards.
4. The apparatus of claim 2, wherein the control device comprises: pressure valves, flow valves, directional valves and control elements.
5. The apparatus of claim 1, further comprising: a material supplementing device;
the material supplementing device is respectively connected with the pneumatic transmission device and the vacuum cavity.
6. An evaporation control method, which is applied to the evaporation apparatus according to any one of claims 1 to 5, the method comprising:
the air pressure monitoring device detects the steam pressure inside the crucible and sends the steam pressure to the air pressure transmission device;
and the pneumatic transmission device determines the moving distance and the moving direction of the movable baffle plate according to the steam pressure, and controls the movable baffle plate to move the moving distance according to the moving direction so as to change the steam pressure in the crucible.
7. The method of claim 6, wherein the pneumatic actuator determines a distance and a direction of movement of the movable shutter based on the steam pressure, comprising:
a control device in the pneumatic transmission device determines the moving direction of the movable baffle plate according to the steam pressure and a preset stable pressure;
the control device determines a first height required to be maintained between the movable baffle and the upper surface of the crucible by using the steam pressure, acquires a second height between the movable baffle and the upper surface of the crucible at present, and determines the moving distance of the movable baffle according to the first height and the second height.
8. The method of claim 7, wherein the determining the direction of movement of the movable barrier by the control device based on the steam pressure and a predetermined steadiness pressure comprises:
if the steam pressure is lower than the stable pressure, determining that the moving direction of the movable baffle is towards the direction close to the upper surface of the crucible;
and if the steam pressure is higher than the stable pressure, determining that the moving direction of the movable baffle is moving towards the direction far away from the upper surface of the crucible.
9. The method of claim 6, wherein said pneumatic actuator controlling said movable barrier to move said travel distance in said travel direction comprises:
and the control device in the pneumatic transmission device adjusts the direction valve according to the moving direction and adjusts the pressure valve and the flow valve according to the moving distance, so that an actuating mechanism in the pneumatic transmission device receives pressure energy which can push the movable baffle plate to move the moving distance according to the moving direction.
10. The method of claim 6, wherein before the pneumatic actuator determines the distance and direction of movement of the movable shutter based on the steam pressure, the method further comprises:
if the steam pressure is lower than the preset critical pressure, the pneumatic transmission device sends a signal for indicating the material supplement to the material supplement device;
the feeding device introduces an evaporation material into the crucible based on the signal.
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| CN113088918B (en) * | 2021-04-19 | 2022-11-25 | 辽宁分子流科技有限公司 | Intelligent evaporation coating machine |
| CN115369361B (en) * | 2021-08-26 | 2023-12-22 | 广东聚华印刷显示技术有限公司 | Vapor deposition crucible, vapor deposition apparatus, and vapor deposition method |
| CN114231912A (en) * | 2021-12-30 | 2022-03-25 | 武汉天马微电子有限公司 | Evaporation device and control method thereof |
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