CN110927870B - Array waveguide grating and preparation method, application and application product thereof - Google Patents

Array waveguide grating and preparation method, application and application product thereof Download PDF

Info

Publication number
CN110927870B
CN110927870B CN201911369239.5A CN201911369239A CN110927870B CN 110927870 B CN110927870 B CN 110927870B CN 201911369239 A CN201911369239 A CN 201911369239A CN 110927870 B CN110927870 B CN 110927870B
Authority
CN
China
Prior art keywords
waveguide
array
output
coupler
input
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201911369239.5A
Other languages
Chinese (zh)
Other versions
CN110927870A (en
Inventor
葛大江
王瑞
孙鑫
陈贤
李健
李冠男
陈联
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CN201911369239.5A priority Critical patent/CN110927870B/en
Publication of CN110927870A publication Critical patent/CN110927870A/en
Application granted granted Critical
Publication of CN110927870B publication Critical patent/CN110927870B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

The invention relates to an array waveguide grating, which comprises an input waveguide, an input coupler, an array waveguide, an output coupler and an output waveguide array; the input waveguide is used for inputting light waves to the input coupler; the input coupler is used for coupling light waves into each array waveguide; the output coupler is used for carrying out interference superposition on the light waves with different phases transmitted by the arrayed waveguide; the output waveguide array is used for outputting light waves with different wavelengths transmitted by the output coupler; the waveguide width of the array waveguide satisfies the formula
Figure DDA0002339215280000011
The waveguide width of the output waveguide array satisfies the formula
Figure DDA0002339215280000012
The Fourier transformer manufactured by the scheme of the invention has better optical signal transmission performance.

Description

Array waveguide grating and preparation method, application and application product thereof
Technical Field
The invention relates to the technical field of optical communication, in particular to an array waveguide grating and a preparation method, application and product thereof.
Background
At present, the research of optical communication technology is developing towards the direction of large capacity and high speed. Data processing is still performed in an optical-electrical-optical manner at the optical communication network node, and the processing manner greatly influences the communication speed and capacity improvement. The development of the transistor is greatly limited by the large power consumption caused by the increasing number of transistors according to the moore's theorem. The scheme based on all-optical network processing enables signals to be processed only in an optical path, energy consumption is low, and communication capacity and speed can be improved greatly in theory. An optical signal processing device is required to realize the all-optical network system, and an optical signal Fourier transformer is one of the most important optical signal processing devices.
Disclosure of Invention
The fourier transform is widely applied to scientific research and engineering technology, plays an important role, and researches show that the fourier transform is a global transform, the obtained integral signal spectrum cannot express the time-frequency local characteristics of signals, the time-frequency local characteristics of the signals are very critical in the processing of non-stationary signals, and in order to process the non-stationary signals, a plurality of signal processing theories are provided: fractional fourier transform, short-time fourier transform, wavelet transform, Winger distribution, and the like. However, cross term interference occurs when the Winger distribution method analyzes and processes the linear frequency modulation signals; when the short-time Fourier transform is used for analyzing and processing the linear frequency modulation signal, although the speed is higher, the estimation precision is not very high; wavelet transformation can well complete time-frequency analysis of linear frequency modulation signals, but real-time performance is poor. The fractional Fourier transform can well analyze and process non-stationary signals, has the characteristic of being capable of observing and processing signals in a time domain and a frequency domain simultaneously as a generalized form of Fourier transform, and avoids the problem that the traditional Fourier transform can only be processed in the time domain or the frequency domain independently. Meanwhile, compared with the traditional Fourier transform, the fractional Fourier transform has one more free parameter, so that the application of the fractional Fourier transform is more flexible and the fractional Fourier transform is suitable for processing multi-component signals.
Based on the defects of the prior art, the invention provides the array waveguide grating which can realize the Fourier transform of the fractional order optical signals, the traditional Fourier transform is carried out in the electric signals, the invention realizes the purpose of directly carrying out the Fourier transform of the fractional order optical signals in the optical signals, and the communication efficiency and the capacity are greatly improved.
The invention is realized by the following technical scheme:
an array waveguide grating comprises an input waveguide, an input coupler, an array waveguide, an output coupler and an output waveguide array;
the input waveguide is used for inputting light waves to the input coupler;
the input coupler is used for coupling light waves into each array waveguide;
the output coupler is used for carrying out interference superposition on the light waves with different phases transmitted by the arrayed waveguide;
the output waveguide array is used for outputting light waves with different wavelengths transmitted by the output coupler;
the waveguide width of the array waveguide satisfies the formula
Figure BDA0002339215260000021
The waveguide width of the output waveguide array satisfies the formula
Figure BDA0002339215260000031
Where λ is the wavelength of the incident light, L is the coupler radius of curvature, and p is the order of transformation.
As a popularization form of Fourier transform, a parameter of order p is introduced and is the p-th power of a Fourier transform operator. When p is 1, the fractional order Fourier transform is the traditional Fourier transform; when p is-1, the fractional order fourier transform is the traditional inverse fourier transform; the best p-value needs to be searched for as the case may be. According to the Pasteval law, the energy of the optical pulse after fractional Fourier transform is unchanged. To avoid that too high peak power adversely affects the receiver, the value of order p should be within 0.9. P given in the examples of this application is 1/8.
In a specific embodiment of the invention, the arrayed waveguide grating is made of a polymer material without silicon.
In a specific embodiment of the invention, the substrate of the array waveguide is selected from polymethyl methacrylate, the core layer is selected from SU-8, and the cladding layer is selected from benzocyclobutene.
In a specific embodiment of the present invention, a tapered waveguide structure is disposed between the arrayed waveguide and the free transmission region and between the output waveguide and the free transmission region.
In a specific embodiment of the present invention, the tapered waveguide has a length of 18 to 25 μm. Preferably 20 μm.
The invention provides a preparation method of an array waveguide grating, which comprises the following steps:
spin coating benzocyclobutene on a polymethyl methacrylate substrate, curing to form a lower cladding, and spin coating SU-8 on the surface of the lower cladding to form a waveguide layer; forming a waveguide by drying, photoetching, drying again, crosslinking and removing glue; and spin-coating benzocyclobutene and curing to obtain the benzocyclobutene.
In one embodiment of the present invention, the thickness of the waveguide layer is selected from 3.5 to 4.5 μm. Preferably 4 μm.
The invention also provides an application, in particular to an application of the array waveguide grating in preparing a wavelength router, an optical add-drop multiplexer, a wavelength selector, a multi-wavelength light source, a multi-wavelength receiver, a spectrum analyzer, a dispersion compensator and a multi-wavelength simultaneous detection circuit.
A spectrum analyzer comprising an arrayed waveguide grating as described herein.
A wavelength division multiplexer comprising an arrayed waveguide grating as described herein.
The embodiment of the invention at least has the following advantages or beneficial effects:
the array waveguide grating designed and manufactured by the invention can realize fractional order optical signal Fourier transform of optical signals; the AWG prepared by the Si-free material is used as an auxiliary material, so that the problems of thermo-optic effect and polarization existing in the AWG prepared by the Si-containing material are solved; the Fourier transformer manufactured by the scheme of the invention has better optical signal transmission performance.
The design structure of the invention can make the refractive index change between the flat plate area and the array waveguide smoother, and reduce the light reflection; and incident light diffracted by the flat plate region can be received by the waveguide more, so that the coupling efficiency is increased. The output waveguide port is also designed with a tapered waveguide structure for connection, mainly for obtaining a larger spectral bandwidth.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a schematic diagram of the AWG structure of the present invention;
FIG. 2 is a schematic diagram of a sampling area of an input-output array waveguide according to the present invention;
FIG. 3 is a schematic diagram of the AWG manufacturing process of the present invention;
FIG. 4 is a diagram of an AWG based Fourier transformer outline;
FIG. 5 is a diagram of an input waveform in the time domain of the present invention;
FIG. 6 is a diagram of the transformed output waveform of the AWG of the present invention;
FIG. 7 is a graph of the input waveform in the time domain of comparative example 1 in accordance with the present invention;
FIG. 8 is a graph showing waveforms outputted from comparative example 1 according to the present invention;
FIG. 9 is a graph showing the transmission spectra of an arrayed waveguide grating made of a polymer material at 20 ℃ and 60 ℃ in comparative example 2 of the present invention;
FIG. 10 shows the transmission spectra of the conventional silicon material arrayed waveguide grating at 20 ℃ and 60 ℃ in comparative example 2 of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of the embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
One, discrete Fourier transform
A standard AWG structure is composed of two plate couplers connected by a set of delay lines as shown in fig. 1, and one plate coupler can be designed to have a common focal point structure so that the radius of curvature R is equal to the plate length L, which is the distance between the two surfaces as shown in fig. 2.
Analog Fourier transform scaling of the output plane amplitude distribution b (x) to the input plane amplitude a (x) for estimating the spatial spectrum x/(λ L), λ being the center wavelength
Figure BDA0002339215260000061
The input and output arrayed waveguide sampling area distributions are shown in fig. 2, and therefore, the optical signal at the m-th output waveguide can be expressed as:
Figure BDA0002339215260000062
wherein d isiAnd d0Is the width of the input and output waveguide gratings. In the foregoing expression, i have set N ═ λ L/did0The purpose is to obtain a discrete fourier transform. The design guideline for fourier transform with AWG is to simulate the corresponding conventional frequency signal splitter, which is worth studying. The main difference is that the discrete fourier transformer has N input/output ports and the AWG has N waveguide gratings. Although N is ═ λ L/did0This condition is only satisfactory for single wavelength applications, but the device can be used for broadband applications. In addition, in the flatAngular dispersion in the slab, due to the frequency dependence of the refractive index, causes a linear phase change of the optical signal as it passes through the output of the grating array, which is carefully considered in the device design. For simplicity, the case where the input slab coupler is replaced by a standard splitter in an AWG is discussed below. When the design parameter satisfies the condition N ═ lambda L/didoThe plate coupler is a 360/N hybrid with a fixed phase correlation in the region between the input and output. For example, the plate coupler is the standard 90 deg. when the input wave derivative N is set to 4.
Introducing a delay multiple of tau in the waveguide array, a transformation function of the impulse response and the mth output of the AWG instrument as
Figure BDA0002339215260000071
Figure BDA0002339215260000072
Where T τ is the symbol period. In addition equation 3 can be written by applying the sample property of the delta (t) function
Figure BDA0002339215260000073
Here rectTWhere L is the window function T, T/2 < T/2. According to the convolution theory, this transformation function can also be written as
Figure BDA0002339215260000074
Binary, discrete fractional order Fourier transform
The mth subchannel waveform in the AWG is:
Figure BDA0002339215260000075
all subcarriers are orthogonal during a symbol period T
Figure BDA0002339215260000081
Denotes the complex conjugate, δmm'Is a kronecker symbol to represent an analog signal with a discrete signal and to use a discrete Fourier transform, time domain waveform
Figure BDA0002339215260000082
Sampling is performed within t ═ n τ, and equations (7) and (8) are obtained.
In the case of a fast Fourier transform, the subcarrier waveform is
Figure BDA0002339215260000083
When the fixed coefficient has been ignored for simplicity, it is the kernel function of equation (7). In the case of m 0 and p 1/8, the spectrum of the fast fourier transform subcarrier is
Figure BDA0002339215260000084
If the parameter u is to be determinedmIs arranged as
Figure BDA0002339215260000085
The subcarriers satisfy the orthogonality condition of equation (8). The samples at t ═ n τ are:
Figure BDA0002339215260000086
and
Figure BDA0002339215260000087
if the plate parameter is set to
Figure BDA0002339215260000088
Figure BDA0002339215260000091
Figure BDA0002339215260000092
The AWG device of fig. 2 is capable of performing a fast discrete fourier transform.
By examining equation (16), it can be seen that the subcarriers are chirp signals, exhibit the same spectrum, vary in m/T and pass through the recombination factor
Figure BDA0002339215260000093
And (6) performing superposition. Arrangement in an optical fiber link
Figure BDA0002339215260000094
The chirp characteristics of the subcarriers can be used for dispersion compensation. Where D is the dispersion parameter and L is the fiber link length. P is set to 1/8 in this design.
Third, temperature and polarization insensitive polymer array waveguide grating
At present, the core layer of the Arrayed Waveguide Grating (AWG) is mainly made of silicon dioxide, and the cladding layer is mainly made of Si. Therefore, the AWG has a large thermo-optic effect, and the thermo-optic effect is that the refractive index of the AWG changes along with the change of temperature. In order to stabilize the central wavelength, a temperature control element is required to be added for temperature adjustment, and the common method is to add a material with a negative temperature coefficient into the AWG, but this method is not suitable for the arrayed waveguide grating using silicon as a material, because the AWG device has a small size and it is difficult to control the optical path difference between the arrayed waveguides. Meanwhile, in the arrayed waveguide grating, due to the size of the device and the stress action on the focusing position of the output slab waveguide, two modes of a transverse electric wave mode (TM) and a transverse magnetic wave mode (TE) are relatively shifted. In order to solve the two problems, the polymer material is adopted to replace the prior silicon material to manufacture the arrayed waveguide grating.
In the application, polymethyl methacrylate (PMMA) is selected to manufacture a substrate, SU-82005 is used to manufacture a core layer, and benzocyclobutene (BCB) is used to manufacture a cladding layer. These polymers have the advantages of low birefringence, good thermal stability and low wavelength dispersion.
Refractive index n of the core layer, e.g. at 1550nm1And the refractive index n of the cladding21.571 and 1.560 respectively. Effective refractive index difference Δ ═ n1-n2)/n10.7%. The refractive index is a physical property of the polymer and is obtained by testing. The effect of the effective index difference is to say that the light is confined to the waveguide and, colloquially, how much of the light energy goes into the cladding.
The preparation method can be specifically selected from the following steps:
benzocyclobutene (BCB) was spin-coated on a PMMA substrate and cured at 150 ℃ for 2 hours to form an under-cladding layer. Spin-coating SU-82005 with the thickness of 4 μm on the lower cladding layer to form a waveguide layer; wherein the substrate thickness is 9 μm, and the upper and lower cladding thickness are both 8 μm. At the moment, the sample wafer is firstly baked for 10 minutes at the temperature of 65 ℃, then baked for 20 minutes at the temperature of 90 ℃ to remove the solvent in the core layer material, then ultraviolet photoetching is carried out for 30 seconds by a photoetching plate, then baking is carried out for 10 minutes at the temperature of 65 ℃, then baking is carried out for 10 minutes at the temperature of 90 ℃, the ultraviolet crosslinking is realized in a light irradiation area, after glue is removed for 40 seconds in a PGMEA (propylene-monomer ethyl-acetate) developing solution, the waveguide is formed by sequentially flushing isopropanol and deionized water; and (3) hardening the film at 150 ℃ for 30 seconds to improve the adhesion between the core and the cladding, and then spin-coating BCB upper cladding to form the device after curing. The flow is shown in fig. 3.
Design of Fourier transformer based on AWG
Based on the basic working principle and theoretical model of the arrayed waveguide grating, the device can be designed with parameters, and the selection of the parameters will determine the performance of the device.
The design adopts a 1 × 8 form as an example, and the outline structure design of the converter is shown in fig. 4. In order to make the transition of the input waveguide, the output waveguide and the arrayed waveguide to the free transmission region smoother, a tapered waveguide structure of 20 μm length is introduced therebetween. The design is favorable for reducing the reflection of light, so that the refractive index change between the free transmission region and the waveguide is smoother; another object is to increase the coupling ratio so that more of the incident light diffracted by the free transmission region is received by the waveguide.
The design flow is as follows, with the center wavelength lambda0For example at 1550 nm:
1) determining the central wavelength lambda according to design requirements0Selecting λ01550nm, channel spacing Δ λ 0.8nm, number of channels Nch＝8；
2) Determining the mode effective refractive index n of slab and array waveguidess1.567 and nc＝1.563；
3) The relative refractive index difference between the waveguide core region and the cladding is 0.7%;
4) setting free transmission zone length LsrIs 460 μm;
5) the radius of curvature R was 232.23 μm according to formula (14);
6) d is obtained according to formula (15)i7.56 μm;
7) d is obtained according to formula (16)o11.79 μm;
8) the relationship between the free spectral range and the number of channels is
Figure BDA0002339215260000111
From which the maximum diffraction order can be determined
Figure BDA0002339215260000112
N in the formula (18)gIs the group refractive index of the waveguides,
Figure BDA0002339215260000121
by calculating ng＝1.673，N ch8 μm, calculated to give m as 226;
9) adjacent arrayed waveguides have a length difference of
Figure BDA0002339215260000122
So Δ L is 224.12 μm;
10) determining the array wave derivative NgAccording to the formula
Figure BDA0002339215260000123
ω0Is the equivalent width of the input waveguide mode field, N can be obtainedgIs 55.
Fifth, simulation experiment
Examples
Let the input be a gaussian laser pulse with a wavelength of 1550nm and optical power of 0dBm, as shown in fig. 5 for the input waveform over the time domain. After AWG conversion, the output waveform is shown in fig. 6.
Comparative example 1
On the basis of determining materials, the arrayed waveguide grating with the corresponding size is not prepared according to the scheme of the application and is subjected to a simulation experiment:
TABLE 1 setting of physical parameters
Figure BDA0002339215260000124
Figure BDA0002339215260000131
The simulation experiment results are shown in fig. 7 and 8, and it can be seen that the fourier transform of the optical signal cannot be obtained after the size of the arrayed waveguide grating is changed, that is, the fractional order fourier transform cannot be realized for the arrayed waveguide grating whose size is not calculated according to the formula of the scheme of the present application.
Comparative example 2
On the basis of determining the size of the arrayed waveguide grating, the device made of the traditional silicon material can also realize Fourier transform of optical signals, but the device made of the traditional silicon material has a thermo-optic effect. The thermo-optic effect is that the refractive index of the AWG changes with temperature. The device requires a stable central wavelength and therefore polymeric materials are used to solve this problem. The following simulation experiment is a graph of the transmission spectra of two materials, and FIG. 9 is the transmission spectra of an arrayed waveguide grating made of a polymeric material at 20 ℃ and 60 ℃; FIG. 10 shows the transmission spectra of the conventional silicon material arrayed waveguide grating at 20 deg.C and 60 deg.C.
It can be seen by comparing fig. 9 and 10 that the temperature shift of the conventional silicon material arrayed waveguide grating is large, and the temperature shift of the arrayed waveguide grating made of the polymer material is very small.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (6)

1. An array waveguide grating comprises an input waveguide, an input coupler, an array waveguide, an output coupler and an output waveguide array; the input waveguide is used for inputting light waves to the input coupler; the input coupler is used for coupling light waves into each array waveguide; the output coupler is used for carrying out interference superposition on the light waves with different phases transmitted by the arrayed waveguide; the output waveguide array is used for outputting light waves with different wavelengths transmitted by the output coupler; the method is characterized in that: the waveguide width of the array waveguide satisfies the formula
Figure FDA0002928152620000011
The waveguide width of the output waveguide array satisfies the formula
Figure FDA0002928152620000012
Wherein N ═ λ L/did0λ is the wavelength of the incident light, L is the coupler radius of curvature,p is the order of the transformation.
2. The arrayed waveguide grating of claim 1, wherein: the array waveguide grating is made of a polymer material without silicon.
3. The arrayed waveguide grating of claim 2, wherein: the substrate of the array waveguide is selected from polymethyl methacrylate, the core layer is selected from SU-8, and the cladding layer is selected from benzocyclobutene.
4. The arrayed waveguide grating of any one of claims 1-3, wherein the arrayed waveguide grating is used in a fabrication of a wavelength router, an optical add-drop multiplexer, a wavelength selector, a multi-wavelength light source, a multi-wavelength receiver, a spectrum analyzer, a dispersion compensator, a multi-wavelength simultaneous detection circuit.
5. A spectrum analyzer, characterized in that: comprising an arrayed waveguide grating according to any of claims 1 to 3.
6. A wavelength division multiplexer, characterized by: comprising an arrayed waveguide grating according to any of claims 1 to 3.
CN201911369239.5A 2019-12-26 2019-12-26 Array waveguide grating and preparation method, application and application product thereof Expired - Fee Related CN110927870B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201911369239.5A CN110927870B (en) 2019-12-26 2019-12-26 Array waveguide grating and preparation method, application and application product thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201911369239.5A CN110927870B (en) 2019-12-26 2019-12-26 Array waveguide grating and preparation method, application and application product thereof

Publications (2)

Publication Number Publication Date
CN110927870A CN110927870A (en) 2020-03-27
CN110927870B true CN110927870B (en) 2021-06-04

Family

ID=69861096

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201911369239.5A Expired - Fee Related CN110927870B (en) 2019-12-26 2019-12-26 Array waveguide grating and preparation method, application and application product thereof

Country Status (1)

Country Link
CN (1) CN110927870B (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106019474A (en) * 2016-07-19 2016-10-12 华中科技大学 Mixed light combining-wavelength dividing demultiplexer based on array waveguide grating
CN107611775A (en) * 2017-09-28 2018-01-19 中国科学院长春光学精密机械与物理研究所 A kind of semiconductor laser and preparation method thereof
WO2018042663A1 (en) * 2016-09-05 2018-03-08 三菱電機株式会社 Optical component and optical module
CN210347983U (en) * 2019-08-29 2020-04-17 易锐光电科技(安徽)有限公司 Wavelength controllable array waveguide grating

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017019145A1 (en) * 2015-07-24 2017-02-02 Aurrion, Inc. Phase tuning in waveguide arrays

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106019474A (en) * 2016-07-19 2016-10-12 华中科技大学 Mixed light combining-wavelength dividing demultiplexer based on array waveguide grating
WO2018042663A1 (en) * 2016-09-05 2018-03-08 三菱電機株式会社 Optical component and optical module
CN107611775A (en) * 2017-09-28 2018-01-19 中国科学院长春光学精密机械与物理研究所 A kind of semiconductor laser and preparation method thereof
CN210347983U (en) * 2019-08-29 2020-04-17 易锐光电科技(安徽)有限公司 Wavelength controllable array waveguide grating

Also Published As

Publication number Publication date
CN110927870A (en) 2020-03-27

Similar Documents

Publication Publication Date Title
CN110186577B (en) Information real-time measuring system of ultrafast light field
EP0629896A2 (en) Optical signal processor, method of its control, method of its designing, and method of its production
Takada et al. Optical low coherence method for characterizing silica-based arrayed-waveguide grating multiplexers
Sun et al. Broadband and high-resolution integrated spectrometer based on a tunable FSR-free optical filter array
Bahadoran et al. Double critical coupled ring resonator-based add–drop filters
JP4550630B2 (en) Variable dispersion compensator
CN115291321B (en) Mode insensitive polymer variable optical attenuator based on two-stage MZI structure
CN109682470B (en) Wide-spectrum high-resolution waveguide light splitting chip structure
CN113625393A (en) Tunable mode converter and preparation method thereof
JP3415267B2 (en) Design method and manufacturing method of optical signal processor
Chen et al. Monolithic multi-functional integration of ROADM modules based on polymer photonic lightwave circuit
CN114578478B (en) Wavelength division multiplexing system with power equalization function and preparation method thereof
CN112596282A (en) Broadband adjustable splitting ratio polarization rotation beam splitter based on SOI
CN111758055B (en) Waveguide type optical interferometer loop
CN115877595A (en) 1X 3 thermo-optic switch based on silicon dioxide/polymer mixed waveguide and preparation method thereof
CN110927870B (en) Array waveguide grating and preparation method, application and application product thereof
CN113406744B (en) Fourier waveguide light splitting chip
JP2000137125A (en) Method for manufacturing diffusion type optical waveguide structure onto substrate
US20230288636A1 (en) Super-compact arrayed waveguide grating (awg) wavelength division multiplexer based on sub-wavelength grating
CN116400453A (en) High-resolution low-crosstalk phased array scanning chip based on sparse matrix structure
Raghuwanshi et al. Dispersion and peak reflectivity analysis in a non-uniform FBG based sensors due to arbitrary refractive index profile
Gloge et al. Profile dispersion in multimode fibres: measurement and analysis
US6937794B2 (en) Using a transversal Filter to compensate for dispersion
US7200630B2 (en) Inverse fourier transform method, phase characterization method of optical components from transmission and group delay measurements as well as a system for performing the method
Martínez-Carrasco et al. Self-characterization method for integrated optical delay lines

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20210604

Termination date: 20211226

CF01 Termination of patent right due to non-payment of annual fee