CN106019474A - Mixed light combining-wavelength dividing demultiplexer based on array waveguide grating - Google Patents
Mixed light combining-wavelength dividing demultiplexer based on array waveguide grating Download PDFInfo
- Publication number
- CN106019474A CN106019474A CN201610570762.4A CN201610570762A CN106019474A CN 106019474 A CN106019474 A CN 106019474A CN 201610570762 A CN201610570762 A CN 201610570762A CN 106019474 A CN106019474 A CN 106019474A
- Authority
- CN
- China
- Prior art keywords
- waveguide
- array
- waveguide array
- input
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
Abstract
The invention discloses a mixed light combining-wavelength dividing demultiplexer based on array waveguide grating. The mixed light combining-wavelength dividing demultiplexer comprises a substrate and a wrapping layer and a wave guide layer arranged on the substrate sequentially from bottom to top, wherein the wave guide layer is a graph layer, where input waveguide, an input free transmission area, array waveguide, an output free transmission area and an output waveguide array are etched rightward with same thickness along a horizontal plane. The mixed light combining-wavelength dividing demultiplexer integrates wavelength dividing and light combining functions. During downlink communication, the mixed light combining-wavelength dividing demultiplexer can realize wavelength dividing de-multiplexing function, and during uplink communication, the mixed light combining-wavelength dividing demultiplexer can realize light combining function. The construction cost of a passive optical network (PON) can be lowered at certain level.
Description
Technical field
The invention belongs to integrated photonic device field, more particularly, to one based on Waveguide array light
Mixing combiner-the Wave decomposing multiplexer of grid.
Background technology
Along with developing rapidly of Internet technology, the demand of the network bandwidth is constantly increased by people.In order to
Meet the ever-increasing bandwidth demand of user, intelligent acess technology EPON (Passive Optical
Network, PON) it is used widely.
In existing PON, such as EPON (Ethernet Passive Optical Network) and
GPON (Gigabit Passive Optical Network) is all based on greatly time-division multiplex technology.Descending
Signal uses the mode of broadcast, by luminous power beam splitter, signal is distributed to each optical network unit
(Optical Network Unit,ONU).ONU only receives the appointment data being sent to oneself；On
The time-multiplexed mode of row, optical line terminal (Optical Line Terminal, OLT) is all
ONU distributes a time slot, and each ONU can only send data in one's own time slot, then passes through
The signal of all ONU is combined together by luminous power beam splitter, is sent to OLT.Based on time-multiplexed
PON limited bandwidth, additionally, the insertion loss of luminous power beam splitter is very big and along with the increase of ONU number
And it is continuously increased (insertion loss of the luminous power beam splitter of 1:32 is at least 15dB), therefore can be significantly
Limit ONU number and network transmission range.
In recent years, along with HDTV, the rise of the Internet service such as video request program and online game,
Traditional EPON and GPON cannot meet user's great demand to bandwidth.To this end, propose again
Wavelength-division multiplex (WDM) EPON, uses wavelength-division multiplex technique, utilizes wavelength-division multiplex/demultiplex
Replace luminous power beam splitter with device, and each ONU each distribute one special up and under
Row wavelength.During downlink transfer, by Wave decomposing multiplexer, the signal of corresponding wavelength is distributed to accordingly
ONU；During uplink, by wavelength division multiplexer by the signal integration of the different wave length of all ONU to one
Root optical fiber, sends OLT to.Therefore between OLT and all ONU, point-to-point transmission is achieved, significantly
Improve the network bandwidth.In WDM-PON, typically with array waveguide grating (Arrayed Waveguide
Grating, AWG) be used as OWDM/demultiplexer, compare use luminous power beam splitter time
Division multiplexing passive optical network network, power attenuation is substantially reduced, and loss is not the most with the increase of ONU number
Increase, therefore greatly reduce transmission range and the restriction of ONU number, and improve transmission noise
Ratio, reduces the bit error rate.
But WDM-PON needs substantial amounts of transmitter and receiver so that it is involve great expense, it is difficult to
To extensive extensively application.Therefore people propose again the various prioritization scheme that can reduce cost.Wherein,
Mixing TWDM-PON can be good at weighing performance and cost and causing extensive concern, i.e. signal downlink passes
Time defeated, identical with general WDM-PON, by Wave decomposing multiplexer, the signal of corresponding wavelength is distributed
To corresponding ONU；During signal uplink transmission, all ONU share a signal wavelength, use the time-division multiple
By technology, realize closing bundle by luminous power beam splitter.Mixing TWDM-PON is used to need to use respectively
Optical module in be accomplished by comprising independent light Wave decomposing multiplexer and luminous power bundling device, cause mould
Block size is relatively big, and structure is complicated, high in cost of production problem.
Summary of the invention
For disadvantages described above or the Improvement requirement of prior art, the invention provides a kind of based on array ripple
Mixing combiner-the Wave decomposing multiplexer of guide grating, it is intended that be used for mixing in WDM-PON,
Enable downstream signal is realized demultiplexing, upward signal is realized luminous power simultaneously and closes bundle.
Technical scheme: a kind of mixing combiner-Wave Decomposition multiplexing based on array waveguide grating
Device, including substrate (9) and the covering that is arranged in order generation on described substrate (9) from bottom to top
And ducting layer (7) (8)；
Input waveguide one (1), input waveguide two have been sequentially etched it along Z-direction on described ducting layer (7)
(2), input free transmission range (3), Waveguide array (4), export free transmission range (5) and output
Waveguide array (6), they thickness are identical；Wherein, described Y-direction refers to the direction with substrate transverse,
Described Z-direction refers to right direction along the horizontal plane, i.e. optical transmission direction；
Described input waveguide one (1) is the rectangular area that etching is formed at ducting layer, with input on the right side of it
The left side of free transmission range (3) is connected；Input waveguide two (2) is the square that etching is formed at ducting layer
Shape region, is respectively setting one near input free transmission range (3) upper left quarter and lower left quarter, all with free
Transmission range (3) is connected；The effect of input waveguide one and input waveguide two is to be guided into by the light in optical fiber
This device；
The free transmission range of described input (3) etches formation on ducting layer, is evagination to the left on the left of it
Arc i.e. rowland circular arc, be connected with input waveguide one (1)；It is outer convex i.e. light on the right side of it
Grid circular arc, its radius of curvature is the twice of described rowland circular arc, is connected with Waveguide array (4) left side,；
The effect inputting free transmission range (3) is freely transmitting for light, it is achieved Fraunhofer diffraction；Institute
State the free transmission range of output (5) and input free transmission range (3) specular on optical propagation direction,
On the right side of it, rowland circular arc is outfan, is connected with the left side of output waveguide array (6)；Grating on the left of it
Circular arc is connected with Waveguide array (4)；Export the effect of free transmission range (5) be also for light from
By transmitting, it is achieved Fraunhofer diffraction；
Described Waveguide array (4) is the one group of slab waveguide etching formation on ducting layer, each bar shaped
Waveguide two ends are rectangle, and centre is arc-shaped, and Waveguide array (4) left end is its input, its each
Slab waveguide is connected with grating circular arc, and equidistantly arranges in junction；The right side of Waveguide array is
Its outfan, each slab waveguide of its end face and the left side input grating circle exporting free transmission range (5)
Arc is connected, and equidistantly arranges in junction；
Output waveguide array (6) is by etching the one group of slab waveguide equidistantly arranged formed on ducting layer
Composition, for exporting in the fiber array optically coupling to output；Slab waveguide quantity and below
Fiber array is identical.
Further, when described mixing combiner-Wave decomposing multiplexer is used for downlink and uplink work,
Waveguide array (4), according to the length characteristic of its each slab waveguide, can be equivalent to the first Waveguide array and second
Waveguide array, adjacent bar in two Waveguide arrays (the i.e. first Waveguide array and the second Waveguide array)
The length difference of waveguide is satisfied by formula Δ L=m λ0/nc,λ0It is the centre wavelength of Wave Decomposition multiplexing,
nCIt is λ0Corresponding equivalent refractive index, m is positive integer；Wherein: in first wave guide array, m takes
Value is preferably 80-90；In second waveguide array, m value is preferably 1-3.
Further, when this multiplexer is for downlink working, the first array ripple of Waveguide array (4)
Leading identical with generic array waveguide optical grating AWG, the length difference of its adjacent bar waveguide is satisfied by formula
ΔL0=m λ0/nc, the second Waveguide array of described Waveguide array (4) meets
ΔL1=m λ0/nc, say, that the optical path difference of adjacency channel is the integral multiple of wavelength, and phase contrast is
The integral multiple of 2 π so that it is Wave Decomposition multiplexing does not produce impact, and the i.e. second Waveguide array is to downlink center
Wavelength is transparent, and its length is more much smaller than the first Waveguide array again, therefore produces downlink working hardly
Raw impact；
Downlink working is used for light wave decomposition multiplex, and during work, input waveguide one (1) receives incident many
, there is Fraunhofer diffraction through free transmission range (3), in Waveguide array (4) in the light beam of individual wavelength
Left side input end face obtain in-field far diffraction field distribution, be then coupled into Waveguide array (4)
In；Because Waveguide array (4) end face is positioned on grating circle, therefore diffractive light field arrives with identical phase place
The left side input end face of Waveguide array (4)；After Waveguide array (4) transmits, because of adjacent first
Waveguide array maintains identical length difference, and downlink working is had little to no effect by the second Waveguide array,
Thus for each wavelength of descending multiplexing, at Waveguide array (4) outfan, adjacent array ripple
The output light led maintains identical phase contrast, and for the light of different wave length, this phase contrast is different；In
It is that the light of different wave length, from Waveguide array (4) outgoing, is sent out again exporting free transmission range (5)
Raw Fraunhofer diffraction also focuses on different output waveguide (6) positions；Through output waveguide (6),
Each of which output waveguide receives and guides the light of a wavelength, each wavelength that reception is opened by dispersion
Light, it is achieved that the Wavelength Assignment of the multiple wavelength light i.e. function of down going wave decomposition multiplex.
Further, when described mixing combiner-Wave decomposing multiplexer is used for up, the second array ripple
In guide structure, each slab waveguide length is different, maximum near middle slab waveguide length, depends on to both sides
Secondary reduction, length difference is isosceles triangle shape, and middle part is the longest, and two ends are the shortest, adjacent waveguide length
Difference Δ L1By formula Δ L1=m ' λ0/nc, m '=1,2,3 determine, therefore the second Waveguide array is similar to one
Individual prism, can be divided into after two bundles shape at output array waveguide (6) output wave guide face by light beam
Becoming two-beam interference striped, fringe spacing is consistent with the input port arrangement pitches of output array waveguide,
It is achieved thereby that the function of luminous power beam splitting；Additionally, up work the first Waveguide array also needs to meet
Formula λ1=nc′ΔL0/ m ', m '=1,2,3；In order to avoid the first Waveguide array produces impact, λ to beam splitting/conjunction bundle1
For up operation wavelength, Δ L0It is the first Waveguide array adjacent waveguide length difference, nc' for be rolled over by equivalence
The equivalent refractive index of the first Waveguide array that the method for penetrating is tried to achieve；
Up work is used for realizing closing beam function, based on light path principle of reversibility, says with descending beam splitting
Bright；During work, two input waveguides two (2) receive the light beam of incident beam splitting wavelength, in input
There is Fraunhofer diffraction in free transmission range (3), and at the left side input end face of Waveguide array (4)
There is two-beam interference, be then coupled in the left side input end face of Waveguide array (4)；Due to full
Foot formula λ1=nc′ΔL0/ m ' so that the first Waveguide array is transparent to beam splitting wavelength, therefore the first array ripple
Leading and beam splitting light does not produce impact, the second Waveguide array length profile is an isosceles triangle distribution,
Therefore it is similar to an optic prism, light field is divided into two-beam up and down；These are two years old
Double light is there is in Shu Guang at output free transmission range (5) diffraction and at output array waveguide (6) input
Beam interferometer, and whole Light Energy to concentrate on more slightly larger than output waveguide array (6) scope horizontal
In size range, to control to interfere by adjusting the position of Waveguide array spacing and input waveguide two
The spacing of fringe spacing, position and output waveguide array (6) and position consistency；Through output array waveguide
(6) function of descending luminous power multichannel beam splitting is achieved after output.
Further, in described mixing combiner-Wave decomposing multiplexer, described ncAnd nc' employing etc.
Effect index method is calculated.
Further, in described mixing combiner-Wave decomposing multiplexer, described substrate is monocrystal silicon；
Described cladding thickness is 3 microns～5 microns, its material include silicon dioxide, indium phosphide, InGaAsP,
GaAs, aluminum gallium arsenide, gallium nitride, indium gallium nitrogen or aluminum gallium nitride etc. can form the medium material of planar optical waveguide
Material.
Further, in described mixing combiner-Wave decomposing multiplexer, described ducting layer material, bag
Include non-crystalline silicon, InGaAsP, GaAs, gallium nitride, indium gallium nitrogen or aluminum gallium nitride etc. and can form planar light
The dielectric material of waveguide.
Further, in described mixing combiner-Wave decomposing multiplexer, described input waveguide one (1)
Size for choosing to ensure that its single mode waveguide mode of operation is as the criterion.
Further, in described mixing combiner-Wave decomposing multiplexer, the deflection of regulation interfering beam
Angle realizes by controlling Waveguide array spacing, and then realizes the control of interference fringe spacing；Regulation output
The position of interference fringe realizes by controlling the position of input waveguide two.
Mixing combiner-Wave decomposing multiplexer based on array waveguide grating that the present invention provides, by adjusting
The thickness of whole Y-direction ducting layer adjusts the effective refractive index of each several part；Downlink working and common AWG
Function is identical, it is achieved dense wavelength division demultiplexes, and up work realizes the conjunction beam function to specific wavelength of light,
One device integrates partial wave and closes two functions of bundle.
In general, by the contemplated above technical scheme of the present invention compared with prior art, it is possible to
Obtain following beneficial effect:
(1) the up employing time-division multiplex technology due to descending employing Wave Decomposition multiplex technique, therefore under
Row transfer rate be much larger than uplink transmission rate, just in symbol reality in EPON user
Downloading rate is much larger than the situation of uploading rate.
(2) uplink uses time-division multiplex technology, and all ONU end use the laser instrument of phase co-wavelength,
Therefore the laser light source of ONU end has substitutability, is substantially reduced networking cost.
(3) mixing combiner-Wave decomposing multiplexer that the present invention provides, based on Planar Lightwave Circuit Technology,
Can be made by the standard lithographic of Planar waveguide technology and etching technics, be any can form plane light wave
The dielectric material led realizes, compatible with existing processing technology；On the other hand, up conjunction is restrainted and descending point
Wave energy one improve AWG on the basis of it is achieved that reduce device size, it is simple to collection
Become.
Accompanying drawing explanation
Fig. 1 is mixing combiner-Wave Decomposition based on array waveguide grating that the embodiment of the present invention 1 provides
The structure chart of the multiplexer equivalent length figure of structure sectional view and Waveguide array 4 (illustration be respectively)；
Fig. 2 is that mixing combiner-Wave decomposing multiplexer down going wave that the embodiment of the present invention 1 provides decomposes again
Use spectral response figure；
Fig. 3 is the beam splitting output light of mixing combiner-Wave decomposing multiplexer that the embodiment of the present invention 1 provides
Field pattern；
In the accompanying drawings, identical reference is used for representing identical element or structure, wherein: 1-inputs
Waveguide one, 2-input waveguide two, 3-inputs free transmission range, 4-Waveguide array, and 5-output is freely transmitted
District, 6-output waveguide array, 7-ducting layer, 8-covering, 9-substrate.
Detailed description of the invention
In order to make the purpose of the present invention, technical scheme and advantage clearer, below in conjunction with accompanying drawing
And embodiment, the present invention is further elaborated.Should be appreciated that described herein specifically
Embodiment only in order to explain the present invention, is not intended to limit the present invention.Additionally, it is disclosed below
Just may be used as long as technical characteristic involved in each embodiment of the present invention does not constitutes conflict each other
To be mutually combined.
Mixing combiner-Wave decomposing multiplexer based on array waveguide grating that the present invention provides, including lining
The end and the covering being arranged in order the most from bottom to top and ducting layer；
Wherein, described ducting layer is 4.7～5.3 microns along direction of growth thickness, and ducting layer makes to be had
Input/output waveguide, the free transmission range of input/output, Waveguide array；Wherein on ducting layer, making has defeated
Enter/output waveguide and Waveguide array be made by ion reaction etching, etching depth is 1.8～2.2
Micron；The free transmission range of input/output need not etching；From left to right, put in order as input waveguide
1, input waveguide 22, input free transmission range 3, Waveguide array 4, output free transmission range 5, defeated
Go out waveguide array 6；Ducting layer growth thickness affects the crosstalk between each passage, inserting of whole device
Enter the performances such as loss.
Mixing combiner-wavelength-division that being specifically described the present invention below in conjunction with Fig. 1 and embodiment 1 provides demultiplexes
Use device；Embodiment 1 provide mixing combiner-Wave decomposing multiplexer, including substrate 9, covering 8,
Ducting layer 7；Covering 8 and ducting layer 7 grow on substrate 9 the most successively；Wherein, substrate 9
Using crystalline silicon, covering 8 uses silicon dioxide, ducting layer 7 to use non-crystalline silicon；Described growing method,
The PECVD technique of maturation, i.e. plasma enhanced chemical vapor deposition method can be used.
As it is shown in figure 1, transmission direction is Z-direction, longitudinal Material growth direction is Y-direction, laterally
Diffraction of light dispersal direction is X-direction.
Wherein, ducting layer make have be arranged in order along Z-direction input waveguide 1, input waveguide 22,
Input free transmission range 3, Waveguide array 4, output free transmission range 5, output waveguide array 6；
Wherein, as shown in Figure 1, input waveguide 1, input waveguide 22, Waveguide array 4 are with defeated
Go out waveguide array 6 and be horizontal cross-section, be i.e. perpendicular to the cuboid that the plane of Y-direction is rectangular；168
The entry port of individual Waveguide array 4 and exit ports is the most equally spaced is arranged on two grating circular arcs,
32 output waveguides are equally spaced to be arranged in a Rowland circle arc and forms output waveguide array 6；Each output
Waveguide dimensions is: X-direction width is 3 microns, and Y-direction ducting layer height is 5 microns；
Anticipate as shown in fig. 1, in ducting layer, the right side output end face of input waveguide 1 and 2 and defeated
The left side input end face entering free transmission range 3 is connected；Input the right side output end face of free transmission range 3
It is connected with input end face on the left of Waveguide array 4；The right side output end face of Waveguide array 4 is with output freely
The left side input end face of transmission range 5 is connected；Export right side output end face and the output of free transmission range 5
The left side input end face of waveguide array 6 is connected；
As shown in Fig. 1 illustration, be mixing combiner-Wave decomposing multiplexer of providing of embodiment 1 its along X-Y
The sectional view in face, wherein, substrate 9 is 320 microns～350 microns along the thickness of Y-direction；Covering 8
Thickness along Y-direction is 3 microns～5 microns；Ducting layer 7 is 4.7～5.3 along Y-direction growth thickness
Micron, etching depth is 1.8～2.2 microns.
Operation principle below in conjunction with embodiment 1 is expanded on further mixing combiner-ripple that the present invention provides
Decomposition multiplex device:
Mixing combiner-Wave decomposing multiplexer that embodiment 1 provides, is functionally divided into downlink communication ripple
Decomposition multiplex and up luminous power close bundle, and downlink working is identical with common AWG function, it is achieved intensive ripple
Decomposition multiplex, up work realizes the conjunction beam function to specific wavelength of light, a device collection partial wave and conjunction
Restraint two functions
The planar waveguide that light is made up of covering 8, ducting layer 7 and air the most all the time
Structure guides；
During downlink working, input waveguide 1 receives the light beam of 32 incident wavelength, through free transmission
There is Fraunhofer diffraction in district 3, the left side input end face at Waveguide array 4 obtains the diffraction of in-field
Far-field distribution, is then coupled in Waveguide array 4；Because Waveguide array 4 end face is positioned on grating circle,
Therefore diffractive light field arrives the left side input end face of Waveguide array 4 with identical phase place；Through Waveguide array 4
After transmission, because the first adjacent Waveguide array maintains identical length difference, and the second Waveguide array pair
Downlink working has little to no effect, thus for each wavelength of descending multiplexing, at Waveguide array 4
Outfan, the output light of adjacent Waveguide array maintains identical phase contrast, for different wave length
Light, this phase contrast is different；Then, the light of different wave length is from Waveguide array 4 outgoing, in output freely
Again there is Fraunhofer diffraction and focus on different output waveguide 6 positions in transmission range 5；Through defeated
Going out waveguide 6, each of which output waveguide receives and guides the light of a wavelength, and reception is opened by dispersion
The light of 32 wavelength, it is achieved that the Wavelength Assignment of 32 wavelength light i.e. function of down going wave decomposition multiplex.
Up work is used for realizing closing beam function, based on light path principle of reversibility, says with descending beam splitting
Bright；During work, two input waveguides 22 receive the light beam of incident beam splitting wavelength, in input certainly
Fraunhofer diffraction is there is by transmission range 3, and at the double light of left side input end face generation of Waveguide array 4
Beam interferometer, is then coupled in the left side input end face of Waveguide array 4；Owing to meeting formula
λ1=nc′ΔL0/ m ' so that the first Waveguide array is transparent to beam splitting wavelength, therefore the first Waveguide array is to dividing
Shu Guang does not produce impact, and the second Waveguide array length profile is an isosceles triangle distribution, because of this type of
It is similar to an optic prism, light field is divided into two-beam up and down；This two-beam exists
Export free transmission range 5 diffraction in output array waveguide 6 input generation two-beam interference and whole
In the range of individual Light Energy concentrates on a lateral dimension more slightly larger than output waveguide array 6 scope, logical
The position crossing adjustment Waveguide array spacing and input waveguide two can control interference fringe spacing, position
Spacing and position consistency with output waveguide array (6)；Achieve after output array waveguide 6 exports
The function of descending luminous power 32 tunnel beam splitting.
In embodiment 1, Wave Decomposition multiplexing input waveguide 1 multiple wavelength optical signal inputted, under passing through
After row demultiplexing, in 32 wavelength, the light of each wavelength is respectively via 32 ripples in output waveguide array 6
Lead output；The optical signal inputted by beam splitting input waveguide 2, after beam splitting, luminous power is output ripple
Leading array 6 to divide equally, the luminous power of each road waveguide output is the 1/32 of incident power；Input and output ripple
Leading is all the cuboid of rectangle with horizontal cross-section, and X-direction width is 2.8～3.2 microns, and Y-direction is thick
Degree is 4.7～5.3 microns, and the spacing between output waveguide is 16 microns.
Input free transmission range 3 and light only limited in longitudinal Y-direction by the free transmission range 5 of output,
It is similar to light in the horizontal plane at free-space propagation, generation Fraunhofer diffraction；With input/output ripple
The contact surface led is rowland circular arc, and Rowland circle arc dia is 15.0～15.1 millimeters, with Waveguide array
Contact surface is arc surface (grating circle), and grating radius of circle is 15.0～15.1 millimeters；X-direction maximum width
Degree is 6～7 millimeters, and Y-direction thickness is 4.7～5.3 microns.
The design of Waveguide array is the most crucial in the design, and as shown in Fig. 1 illustration, length is divided into two
Part, Part I is similar to common array waveguide grating (AWG), and adjacent Waveguide array keeps
There are identical length difference 24.7～24.8 microns, are allowed to downstream signal is carried out partial wave, and to beam splitting ripple
Long transparent；Part II Waveguide array length profile is an isosceles triangle distribution, adjacent array
Length difference between waveguide is ± 0.9～0.91 micron, is therefore similar to an optic prism, will
Light field is divided into two-beam up and down, and the least to descending partial wave effect of signals. and Waveguide array is
Horizontal cross-section is the cuboid of rectangle, and X-direction width is 2.8～3.2 microns, Y-direction thickness be 4.7～
5.3 microns, the spacing between Waveguide array is 12 microns.
The following is mixing combiner-Wave Decomposition multiplexing based on array waveguide grating that embodiment 1 is provided
Device be split analog simulation test result:
Partial wave signal center wavelength is 1555.8 nanometers, totally 32 tunnel, and wavelength interval is 0.8 nanometer；
Beam splitting signal wavelength is 1307 nanometers.Use frequency domain wide-angle light beam transmission method (FD-WA-BPM) to device
Part carries out simulated measurement.
The spectral response as shown in Figure 2 of partial wave performance it can be seen that the insertion loss of 32 channels substantially
Between 2.5～3.7dB, the insertion loss of edge gateway is wanted relatively than the insertion loss of center-aisle
Larger.The crosstalk of intermediate channels is substantially at about 26dB, and the edge gateway crosstalk of both sides is substantially at 20dB
Left and right.The output light field of beam splitting performance is distributed as it is shown on figure 3, insertion loss is 2.7dB, heterogeneity
For 1.8dB.
As it will be easily appreciated by one skilled in the art that and the foregoing is only presently preferred embodiments of the present invention,
Not in order to limit the present invention, all made within the spirit and principles in the present invention any amendment, etc.
With replacement and improvement etc., should be included within the scope of the present invention.
Claims (10)
1. mixing combiner-Wave decomposing multiplexer based on array waveguide grating, it is characterized in that, the covering (8) including substrate (9) and being arranged in order generation on described substrate (9) from bottom to top and ducting layer (7)；
Being sequentially etched input waveguide one (1), input waveguide two (2) along Z-direction, inputted free transmission range (3), Waveguide array (4), the free transmission range of output (5) and output waveguide array (6) on described ducting layer (7), they thickness are identical；Wherein, described Y-direction refers to that the direction with substrate transverse, described Z-direction refer to right direction along the horizontal plane, i.e. optical transmission direction；
Described input waveguide one (1) is the rectangular area that etching is formed at ducting layer, is connected with the left side inputting free transmission range (3) on the right side of it；Input waveguide two (2) is the rectangular area that etching is formed at ducting layer, is respectively setting one near input free transmission range (3) upper left quarter and lower left quarter, is all being connected with free transmission range (3)；The effect of input waveguide one and input waveguide two is that the light in optical fiber is guided into this device；
The free transmission range of described input (3) etches formation on ducting layer, is the arc i.e. rowland circular arc of evagination to the left, is connected with input waveguide one (1) on the left of it；Being outer convex i.e. grating circular arc on the right side of it, its radius of curvature is the twice of described rowland circular arc, is connected with Waveguide array (4) left side,；The effect inputting free transmission range (3) is freely transmitting for light, it is achieved Fraunhofer diffraction；The free transmission range of described output (5) and input free transmission range (3) specular on optical propagation direction, on the right side of it, rowland circular arc is outfan, is connected with the left side of output waveguide array (6)；On the left of it, grating circular arc is connected with Waveguide array (4)；The effect exporting free transmission range (5) is freely transmitting for light, it is achieved Fraunhofer diffraction；
Described Waveguide array (4) is the one group of slab waveguide etching formation on ducting layer, each slab waveguide two ends are rectangle, and centre is arc-shaped, and Waveguide array (4) left end is its input, its each slab waveguide is connected with grating circular arc, and equidistantly arranges in junction；The right side of Waveguide array is its outfan, and each slab waveguide of its end face is connected with the left side input grating circular arc exporting free transmission range (5), and equidistantly arranges in junction；
Output waveguide array (6) is formed by etching the one group of slab waveguide equidistantly arranged formed on ducting layer, for exporting in the fiber array optically coupling to output；Slab waveguide quantity is identical with fiber array below.
Mix combiner-Wave decomposing multiplexer the most as claimed in claim 1, it is characterized in that, when downlink and uplink works, Waveguide array (4) is according to the length characteristic of its each slab waveguide, can be equivalent to the first Waveguide array and the second Waveguide array, in two Waveguide arrays, the length difference of adjacent bar waveguide is satisfied by formula Δ L=m λ0/nc,λ0It is the centre wavelength of Wave Decomposition multiplexing, nCIt is λ0Corresponding equivalent refractive index, m is positive integer.
Mixing combiner-Wave decomposing multiplexer the most as claimed in claim 1, it is characterised in that in first wave guide array, m value is 80-90；In second waveguide array, m value is 1-3.
Mix combiner-Wave decomposing multiplexer the most as claimed in claim 2 or claim 3, it is characterized in that, when this multiplexer is for downlink working, the first Waveguide array of Waveguide array (4) is identical with generic array waveguide optical grating AWG, and the length difference of its adjacent bar waveguide is satisfied by formula Δ L0=m λ0/nc,；Second Waveguide array of described Waveguide array (4) meets Δ L1=m λ0/nc, say, that the optical path difference of adjacency channel is the integral multiple of wavelength, and phase contrast is the integral multiple of 2 π, make it that Wave Decomposition multiplexing is not produced impact, i.e. second Waveguide array is transparent to downlink center wavelength, and its length is more much smaller than the first Waveguide array again, therefore downlink working is nearly free from impact；
Downlink working is used for light wave decomposition multiplex, during work, input waveguide one (1) receives the light beam of incident multiple wavelength, Fraunhofer diffraction is there is through free transmission range (3), left side input end face at Waveguide array (4) obtains the far diffraction field distribution of in-field, is then coupled in Waveguide array (4)；Because Waveguide array (4) end face is positioned on grating circle, therefore diffractive light field arrives the left side input end face of Waveguide array (4) with identical phase place；After Waveguide array (4) transmits, because the first adjacent Waveguide array maintains identical length difference, and second Waveguide array downlink working is not affected, thus for each wavelength of descending multiplexing, at Waveguide array (4) outfan, the output light of adjacent Waveguide array maintains identical phase contrast, and for the light of different wave length, this phase contrast is different；Then, from Waveguide array (4) outgoing, again there is Fraunhofer diffraction exporting free transmission range (5) and focus on different output waveguide (6) positions in the light of different wave length；Through output waveguide (6), each of which output waveguide receives and guides the light of a wavelength, receives the light of each wavelength opened by dispersion, it is achieved that the Wavelength Assignment of the multiple wavelength light i.e. function of down going wave decomposition multiplex.
5. the mixing combiner-Wave decomposing multiplexer as described in claim or 3, it is characterized in that, when up, in second arrayed waveguide structures, each slab waveguide length is different, maximum near middle slab waveguide length, is sequentially reduced to both sides, length difference is isosceles triangle shape, middle part is the longest, and two ends are the shortest, adjacent waveguide length difference Δ L1By formula Δ L1=m ' λ0/ncM '=1,2,3 determine, therefore the second Waveguide array functions as a prism, forming two-beam interference striped after light beam can be divided into two bundles at output array waveguide (6) output wave guide face, fringe spacing is consistent with the input port arrangement pitches of output array waveguide, it is achieved thereby that the function of luminous power beam splitting；Additionally, up work the first Waveguide array also needs to meet formula λ1=nc′ΔL0/ m ', m '=1,2,3；In order to avoid the first Waveguide array produces impact, λ to beam splitting/conjunction bundle1For up operation wavelength, Δ L0It is the first Waveguide array adjacent waveguide length difference, nc' for the equivalent refractive index of the first Waveguide array tried to achieve by equivalent refraction method；
Up work is used for realizing closing beam function, based on light path principle of reversibility, illustrates with descending beam splitting；During work, the light beam of incident beam splitting wavelength is received by two input waveguides two (2), Fraunhofer diffraction is there is inputting free transmission range (3), and in the left side input end face generation two-beam interference of Waveguide array (4), be then coupled in the left side input end face of Waveguide array (4)；Owing to meeting formula λ1=nc′ΔL0/ m ', making the first Waveguide array transparent to beam splitting wavelength, therefore the first Waveguide array does not produce impact to beam splitting light, and the second Waveguide array length profile is an isosceles triangle distribution, therefore it is similar to an optic prism, light field is divided into two-beam up and down；This two-beam is at output free transmission range (5) diffraction and in the generation two-beam interference of output array waveguide (6) input, and in the range of whole Light Energy concentrates on a lateral dimension more slightly larger than output waveguide array (6) scope, to control interference fringe spacing, the spacing of position and output waveguide array (6) and position consistency by adjusting the position of Waveguide array spacing and input waveguide two；The function of descending luminous power multichannel beam splitting is achieved after output array waveguide (6) exports.
Mix combiner-Wave decomposing multiplexer the most as claimed in claim 1 or 2, it is characterised in that described ncAnd nc' use effective index method to be calculated.
Mix combiner-Wave decomposing multiplexer the most as claimed in claim 1, it is characterised in that described substrate is monocrystal silicon；Described cladding thickness is 3 microns～5 microns, and its material includes silicon dioxide, indium phosphide, InGaAsP, GaAs, aluminum gallium arsenide, gallium nitride, indium gallium nitrogen or aluminum gallium nitride, and these can form the dielectric material of planar optical waveguide.
Mixing combiner-Wave decomposing multiplexer the most as claimed in claim 1, it is characterised in that described ducting layer material, including non-crystalline silicon, InGaAsP, GaAs, gallium nitride, indium gallium nitrogen or aluminum gallium nitride, these can form the dielectric material of planar optical waveguide.
Mix combiner-Wave decomposing multiplexer the most as claimed in claim 1, it is characterised in that the size of described input waveguide one (1) is for choosing to ensure that its single mode waveguide mode of operation is as the criterion.
Mix combiner-Wave decomposing multiplexer the most as claimed in claim 1, it is characterised in that the deflection angle of regulation interfering beam realizes by controlling Waveguide array spacing, and then realizes the control of interference fringe spacing；The position of regulation output interference fringe realizes by controlling the position of input waveguide two.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610570762.4A CN106019474B (en) | 2016-07-19 | 2016-07-19 | A kind of mixing combiner-Wave decomposing multiplexer based on array waveguide grating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610570762.4A CN106019474B (en) | 2016-07-19 | 2016-07-19 | A kind of mixing combiner-Wave decomposing multiplexer based on array waveguide grating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106019474A true CN106019474A (en) | 2016-10-12 |
| CN106019474B CN106019474B (en) | 2019-08-09 |
Family
ID=57116789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610570762.4A Active CN106019474B (en) | 2016-07-19 | 2016-07-19 | A kind of mixing combiner-Wave decomposing multiplexer based on array waveguide grating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106019474B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110927870A (en) * | 2019-12-26 | 2020-03-27 | 葛大江 | Array waveguide grating and preparation method, application and application product thereof |
| CN111897050A (en) * | 2020-08-24 | 2020-11-06 | 北京邮电大学 | Array waveguide grating |
| CN113466997A (en) * | 2020-03-31 | 2021-10-01 | 高雄科技大学 | Wavelength division multiplexing device for high-capacity optical transmission |
| CN113608305A (en) * | 2021-07-15 | 2021-11-05 | 苏州旭创科技有限公司 | Beam controller and beam control method |
| WO2021244259A1 (en) * | 2020-05-30 | 2021-12-09 | 华为技术有限公司 | Grating, and characteristic adjustment method and device therefor |
| CN113985603A (en) * | 2021-12-22 | 2022-01-28 | 苏州旭创科技有限公司 | Light beam scanning system |
| CN116520486A (en) * | 2023-07-04 | 2023-08-01 | 之江实验室 | Reconfigurable wavelength division multiplexer and preparation method thereof |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2583888Y (en) * | 2002-11-14 | 2003-10-29 | 武汉光迅科技有限责任公司 | Dynamic passage energy equalizer based on waveguide array grating block |
| CN1519594A (en) * | 2003-02-04 | 2004-08-11 | 富士通株式会社 | Optical appts. having panel waveguide and channel guide on substrate |
| CN1629662A (en) * | 2003-12-19 | 2005-06-22 | 日本电气株式会社 | Optical coupler, beam splitter, and arrayed waveguide grating type optical wavelength division multiplexer |
| US20050141813A1 (en) * | 2003-02-26 | 2005-06-30 | Fujitsu Limited | Arrayed waveguide wavelength multiplexing apparatus and optical transmitter |
| CN1837869A (en) * | 2006-04-24 | 2006-09-27 | 浙江大学 | Polarized non-sensitive array waveguide grating |
| CN104238008A (en) * | 2014-09-10 | 2014-12-24 | 浙江大学 | N*N array waveguide grating optical wavelength router capable of reducing frequency deviation |
| CN105607191A (en) * | 2016-03-21 | 2016-05-25 | 中国科学院半导体研究所 | Manufacturing method of time-division wavelength division multiplexing passive optical network terminal transmit-receive integrated chip |
-
2016
- 2016-07-19 CN CN201610570762.4A patent/CN106019474B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2583888Y (en) * | 2002-11-14 | 2003-10-29 | 武汉光迅科技有限责任公司 | Dynamic passage energy equalizer based on waveguide array grating block |
| CN1519594A (en) * | 2003-02-04 | 2004-08-11 | 富士通株式会社 | Optical appts. having panel waveguide and channel guide on substrate |
| US20050141813A1 (en) * | 2003-02-26 | 2005-06-30 | Fujitsu Limited | Arrayed waveguide wavelength multiplexing apparatus and optical transmitter |
| CN1629662A (en) * | 2003-12-19 | 2005-06-22 | 日本电气株式会社 | Optical coupler, beam splitter, and arrayed waveguide grating type optical wavelength division multiplexer |
| CN1837869A (en) * | 2006-04-24 | 2006-09-27 | 浙江大学 | Polarized non-sensitive array waveguide grating |
| CN104238008A (en) * | 2014-09-10 | 2014-12-24 | 浙江大学 | N*N array waveguide grating optical wavelength router capable of reducing frequency deviation |
| CN105607191A (en) * | 2016-03-21 | 2016-05-25 | 中国科学院半导体研究所 | Manufacturing method of time-division wavelength division multiplexing passive optical network terminal transmit-receive integrated chip |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110927870A (en) * | 2019-12-26 | 2020-03-27 | 葛大江 | Array waveguide grating and preparation method, application and application product thereof |
| CN110927870B (en) * | 2019-12-26 | 2021-06-04 | 葛大江 | Array waveguide grating and preparation method, application and application product thereof |
| CN113466997A (en) * | 2020-03-31 | 2021-10-01 | 高雄科技大学 | Wavelength division multiplexing device for high-capacity optical transmission |
| CN113466997B (en) * | 2020-03-31 | 2022-09-02 | 高雄科技大学 | Wavelength division multiplexing device for high-capacity optical transmission |
| WO2021244259A1 (en) * | 2020-05-30 | 2021-12-09 | 华为技术有限公司 | Grating, and characteristic adjustment method and device therefor |
| CN111897050A (en) * | 2020-08-24 | 2020-11-06 | 北京邮电大学 | Array waveguide grating |
| CN113608305A (en) * | 2021-07-15 | 2021-11-05 | 苏州旭创科技有限公司 | Beam controller and beam control method |
| CN113608305B (en) * | 2021-07-15 | 2022-06-21 | 苏州旭创科技有限公司 | Beam controller and beam control method |
| CN113985603A (en) * | 2021-12-22 | 2022-01-28 | 苏州旭创科技有限公司 | Light beam scanning system |
| CN113985603B (en) * | 2021-12-22 | 2022-04-22 | 苏州旭创科技有限公司 | Light beam scanning system |
| CN116520486A (en) * | 2023-07-04 | 2023-08-01 | 之江实验室 | Reconfigurable wavelength division multiplexer and preparation method thereof |
| CN116520486B (en) * | 2023-07-04 | 2023-09-26 | 之江实验室 | Reconfigurable wavelength division multiplexer and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106019474B (en) | 2019-08-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106019474B (en) | A kind of mixing combiner-Wave decomposing multiplexer based on array waveguide grating | |
| CN101782669B (en) | Optical communication system and arrangement converter | |
| US7447403B2 (en) | Integrated etched multilayer grating based wavelength demultiplexer | |
| US7386206B2 (en) | Optical device with slab waveguide and channel waveguides on substrate | |
| CN106164725B (en) | Adjustable grid tracking transmitter and receiver | |
| US9780903B2 (en) | Optical wavelength demultiplexer having optical interference filters connected in cascade | |
| KR101629121B1 (en) | Arrayed waveguide grating, optical module providied with said arryed waveguide grating, and optical communications system | |
| US20020015559A1 (en) | Arrayed waveguide grating type optical multiplexer/demultiplexer and optical waveguide circuit | |
| CN106125201B (en) | A kind of design method of mixed mode multiplexing device | |
| US7639908B2 (en) | Broadcasting arrayed waveguide | |
| US6836591B2 (en) | Arrayed waveguide grating type optical multiplexer/demultiplexer and optical waveguide circuit | |
| US7546011B2 (en) | Monolithically integrated optical devices with amorphous silicon arrayed waveguide gratings and InGaAsP gain | |
| WO2019028431A1 (en) | Echelle grating multiplexer or demultiplexer | |
| US6728435B2 (en) | Arrayed waveguide grating type optical multiplexer/demultiplexer and optical waveguide circuit | |
| JP7023317B2 (en) | Optical wavelength filter and wavelength separation optical circuit | |
| EP1446686B1 (en) | Optical multi/demultiplexer device, optical wavelength selective filter and method of making a filter | |
| KR101032453B1 (en) | triplexer | |
| Elrofai | Review paper of array waveguide grating (AWG) | |
| US10209444B2 (en) | Arrayed waveguide grating | |
| JEŘÁBEK et al. | The design of polymer planar optical triplexer with MMI filter and directional coupler | |
| Oh et al. | Fabrication of WDM-PON OLT source using external cavity laser | |
| KR20150100213A (en) | Hybrid optical networks apparatus and method of making the same | |
| JP2017142335A (en) | Optical multiplexing/demultiplexing element and array waveguide diffraction grating type light wavelength filter | |
| MXPA00010294A (en) | Bidirectional optical wavelength multiplexer/divider |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |