CN106019474B - A kind of mixing combiner-Wave decomposing multiplexer based on array waveguide grating - Google Patents
A kind of mixing combiner-Wave decomposing multiplexer based on array waveguide grating Download PDFInfo
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- CN106019474B CN106019474B CN201610570762.4A CN201610570762A CN106019474B CN 106019474 B CN106019474 B CN 106019474B CN 201610570762 A CN201610570762 A CN 201610570762A CN 106019474 B CN106019474 B CN 106019474B
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
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Abstract
The invention discloses a kind of mixing combiner-Wave decomposing multiplexer based on array waveguide grating, covering, the ducting layer being arranged successively from bottom to top including substrate and on substrate；Ducting layer is graph layer, and it is all the same to be sequentially etched input waveguide, the free transmission range of input, Waveguide array, the free transmission range of output and output waveguide array, thickness for upper right direction along the horizontal plane；Mixing combiner-Wave decomposing multiplexer provided by the invention based on array waveguide grating integrates partial wave and closes beam, when downlink communication, it can realize that wavelength-division demultiplexes function as common array waveguide grating (AWG), when uplink communication, may be implemented to close Shu Gongneng；The construction cost of passive optical network (PON) can be reduced to a certain extent.
Description
Technical field
The invention belongs to integrated photonic device fields, more particularly, to a kind of mixed light based on array waveguide grating
Close beam-Wave decomposing multiplexer.
Background technique
With the rapid development of Internet technology, demand of the people to network bandwidth constantly increases.In order to meet user not
The disconnected bandwidth demand increased, intelligent acess technology passive optical network (Passive Optical Network, PON) obtain extensively
Using.
In existing PON, such as EPON (Ethernet Passive Optical Network) and GPON (Gigabit
Passive Optical Network) it is all based on time-division multiplex technology greatly.Downlink signal passes through light function by the way of broadcast
Signal is distributed to each optical network unit (Optical Network Unit, ONU) by rate beam splitter.ONU is only received and is sent to
The specified data of oneself；The time-multiplexed mode of uplink, optical line terminal (Optical Line Terminal, OLT) is all
ONU distributes a time slot, and each ONU can only send data in one's own time slot, then will by optical power beam splitter
The signal of all ONU is combined together, and is transmitted to OLT.It is limited based on time-multiplexed PON bandwidth, in addition, optical power beam splitter
Insertion loss it is very big and be continuously increased that (insertion loss of the optical power beam splitter of 1:32 is at least with the increase of ONU number
For 15dB), therefore ONU number and network transmission distance can be limited significantly.
In recent years, with high definition television, the rise of the Internet services such as video on demand and online game, traditional EPON and
GPON can no longer meet user to the great demand of bandwidth.For this purpose, having also been proposed wavelength-division multiplex (WDM) passive optical network, adopt
With wavelength-division multiplex technique, optical power beam splitter is replaced using Wavelength division multiplexer/demultiplexer, and each ONU is each distributed
One dedicated uplink and downlink wavelength.When downlink transfer, the signal of corresponding wavelength is distributed to by phase by Wave decomposing multiplexer
The ONU answered；When uplink, by wavelength division multiplexer by the signal integration of the different wave length of all ONU a to optical fiber, pass
Give OLT.Therefore point-to-point transmission is realized between OLT and all ONU, substantially increases network bandwidth.In WDM-PON
In, generally with array waveguide grating (Arrayed Waveguide Grating, AWG) as optical wavelength division multiplexing/demultiplexing
Device, compared to the time division multiplexing passive optical network for using optical power beam splitter, power loss is substantially reduced, and be lost substantially not with
ONU number increases and increases, therefore greatly reduces the limitation to transmission range and ONU number, and improves transmission signal-to-noise ratio,
Reduce the bit error rate.
But a large amount of transmitter and receiver is needed in WDM-PON, so that it is involved great expense, it is difficult to obtain extensive extensive
Using.Therefore people propose the various prioritization schemes that can reduce cost again.Wherein, mixing TWDM-PON can be good at weighing
Performance and cost and attract extensive attention, i.e., signal downlink transmit when, it is identical as general WDM-PON, demultiplexed by wavelength-division
The signal of corresponding wavelength is distributed to corresponding ONU by device；When signal uplink is transmitted, all ONU share a signal wavelength, use
Time-division multiplex technology realizes conjunction beam by optical power beam splitter.The optical module for needing to use respectively using mixing TWDM-PON
In just need to cause module size larger comprising independent smooth Wave decomposing multiplexer and optical power bundling device, structure is complicated, at
The problems such as this is high.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, it is mixed based on array waveguide grating that the present invention provides a kind of
Combiner-Wave decomposing multiplexer is closed, it is intended that enabling to demultiplex downlink signal realization for mixing in WDM-PON
With, while optical power, which closes beam, to be realized to uplink signal.
Technical solution of the present invention: a kind of mixing combiner-Wave decomposing multiplexer based on array waveguide grating, including lining
Bottom (9) and the covering (8) and ducting layer (7) for being arranged successively generation from bottom to top on the substrate (9)；
Input waveguide one (1), input waveguide two (2), input have been sequentially etched freely along Z-direction on the ducting layer (7)
Transmission range (3), Waveguide array (4), the free transmission range (5) of output and output waveguide array (6), their thickness are identical；Wherein, institute
It states Y-direction and refers to direction with substrate transverse, the Z-direction refers to right direction along the horizontal plane, i.e. optical transmission direction；
The input waveguide one (1) is the rectangular area that etching is formed in ducting layer, right side and the free transmission range of input
(3) left side is connected；Input waveguide two (2) is the rectangular area that etching is formed in ducting layer, close to the free transmission range of input
(3) upper left quarter and lower left quarter respectively set one, are connected with free transmission range (3)；The effect of input waveguide one and input waveguide two
It is that the light guide in optical fiber is introduced into the device；
The free transmission range (3) of input etches formation on ducting layer, and left side is arc, that is, sieve of evagination to the left
Blue circular arc is connected with input waveguide one (1)；Its right side is outer convex, that is, grating circular arc, radius of curvature are sieve to the right
Twice of blue circular arc is connected with Waveguide array (4) left side；The effect for inputting free transmission range (3) is freely transmitting for light,
Realize Fraunhofer diffraction；The free transmission range (5) of output and free transmission range (3) mirror image pair on optical propagation direction of input
Claim, right side rowland circular arc is output end, is connected with the left side of output waveguide array (6)；Its left side grating circular arc and array wave
(4) are led to be connected；The effect for exporting free transmission range (5) is also freely transmitting for light, realizes Fraunhofer diffraction；
The Waveguide array (4) is one group of slab waveguide that formation is etched on ducting layer, and each slab waveguide both ends are square
Shape, centre are arc-shaped, and Waveguide array (4) left end is its input terminal, and each slab waveguide is connected with grating circular arc, and
Junction equidistantly arranges；The right side of Waveguide array is its output end, each slab waveguide in end face and the free transmission range of output
(5) left side input grating circular arc is connected, and equidistantly arranges in junction；
Output waveguide array (6) is made of one group of slab waveguide equidistantly arranged for etching formation on ducting layer, is used for
It will export optically coupling in the fiber array of output；Slab waveguide quantity is identical with subsequent fiber array.
Further, when mixing combiner-Wave decomposing multiplexer works for downlink and uplink, Waveguide array
(4) according to the length characteristic of its each slab waveguide, the first Waveguide array and second array waveguide, two Waveguide arrays can be equivalent to
The length difference of adjacent bar waveguide is all satisfied formula Δ L=m λ in (i.e. the first Waveguide array and second array waveguide)0/nc,λ0It is
The central wavelength of wavelength-division demultiplexing, nCIt is λ0Corresponding equivalent refractive index, m are positive integer；Wherein: in first wave guide array, m
Value is preferably 80-90；In second waveguide array, m value is preferably 1-3.
Further, when the multiplexer is used for downlink working, the first Waveguide array and generic array of Waveguide array (4)
Waveguide optical grating AWG is identical, and the length difference of adjacent bar waveguide is all satisfied formula Δ L0=m λ0/nc, the Waveguide array (4)
Second array waveguide meets Δ L1=m λ0/nc, that is to say, that the optical path difference of adjacency channel is the integral multiple of wavelength, and phase difference is 2
The integral multiple of π has an impact it not to wavelength-division demultiplexing, i.e. second array waveguide is transparent to downlink center wavelength, and it is grown
Degree is again more much smaller than the first Waveguide array, therefore is nearly free from influence to downlink working；
Downlink working is used for light wave decomposition multiplex, and when work, input waveguide one (1) receives the light of incident multiple wavelength
Beam occurs Fraunhofer diffraction through free transmission range (3), obtains spreading out for in-field in the left side input end face of Waveguide array (4)
Far-field distribution is penetrated, is then coupled into Waveguide array (4)；Because Waveguide array (4) end face is located on grating circle, therefore diffraction
Light field reaches the left side input end face of Waveguide array (4) with identical phase；After Waveguide array (4) transmission, because of adjacent the
An array waveguide maintains identical length difference, and second array waveguide has little effect downlink working, thus to downlink
For each wavelength of multiplexing, in Waveguide array (4) output end, the output light of adjacent Waveguide array maintains identical phase
Difference, for the light of different wave length, this phase difference is different；Then, the light of different wave length is emitted from Waveguide array (4), is being exported certainly
Fraunhofer diffraction occurs again by transmission range (5) and focuses on different output waveguides (6) position；Through output waveguide (6),
Each of which output waveguide receives and guides the light of a wavelength, receives the light for each wavelength opened by dispersion, realizes multiple
The Wavelength Assignment of wavelength light, that is, down going wave decomposition multiplex function.
Further, it is each in second array waveguiding structure when mixing combiner-Wave decomposing multiplexer is used for uplink
Slab waveguide length is different, maximum close to intermediate slab waveguide length, is sequentially reduced to two sides, and length difference is in isoceles triangle
Shape, middle part longest, both ends are most short, adjacent waveguide length difference Δ L1By formula Δ L1=m ' λ0/nc, m '=1,2,3 determine, because
This second array waveguide is similar to a prism, in output array waveguide (6) output wave after light beam being divided into two bundles
Two-beam interference striped is formed at guide face, fringe spacing is consistent with the input port of output array waveguide arrangement spacing, thus real
The function of optical power beam splitting is showed；In addition, uplink works, the first Waveguide array also needs to meet formula λ1=nc′ΔL0/m′,m′
=1,2,3；In order to avoid the first Waveguide array has an impact beam splitting/conjunction beam, λ1For uplink operation wavelength, Δ L0For the first array wave
Lead adjacent waveguide length difference, nc' for the equivalent refractive index of the first Waveguide array that is acquired by equivalent refraction method；
Uplink work is based on light path principle, is illustrated with downlink beam splitting for realizing Shu Gongneng is closed；When work,
The light beam that incident beam splitting wavelength is received by two input waveguides two (2) spreads out inputting free transmission range (3) generation fraunhofer
It penetrates, and two-beam interference occurs in the left side input end face of Waveguide array (4), be then coupled into the left side of Waveguide array (4)
In input end face；Due to meeting formula λ1=nc′ΔL0/ m ', so that the first Waveguide array is transparent to beam splitting wavelength, therefore first
Waveguide array does not have an impact beam splitting light, and second array waveguide length profile is distributed in an isosceles triangle, therefore similar
In a prism optically, light field is divided into two-beam up and down；This two-beam is exporting free transmission range (5)
Simultaneously in output array waveguide (6) input terminal two-beam interference occurs for diffraction, and entire Light Energy is concentrated on than output waveguide battle array
It arranges within the scope of a slightly larger lateral dimension of (6) range, comes by adjusting the position of Waveguide array spacing and input waveguide two
It can control the spacing and position consistency of interference fringe spacing, position and output waveguide array (6)；It is defeated through output array waveguide (6)
The function of downlink optical power multichannel beam splitting is realized after out.
Further, in mixing combiner-Wave decomposing multiplexer, the ncAnd nc' use effective index method meter
It obtains.
Further, in mixing combiner-Wave decomposing multiplexer, the substrate is monocrystalline silicon；The covering is thick
Degree is 3 microns~5 microns, and material includes silica, indium phosphide, InGaAsP, GaAs, aluminum gallium arsenide, gallium nitride, indium gallium
Nitrogen or aluminum gallium nitride etc. can form the dielectric material of planar optical waveguide
Further, in mixing combiner-Wave decomposing multiplexer, the guided wave layer material, including amorphous silicon, indium
Gallium arsenic phosphide, GaAs, gallium nitride, indium gallium nitrogen or aluminum gallium nitride etc. can form the dielectric material of planar optical waveguide.
Further, in mixing combiner-Wave decomposing multiplexer, the size of the input waveguide one (1) is choosing
It takes to be subject to and guarantees its single mode waveguide operating mode.
Further, in mixing combiner-Wave decomposing multiplexer, the deflection angle for adjusting interfering beam passes through control
Waveguide array spacing is realized, and then realizes the control of interference fringe spacing；The position for adjusting output interference fringe is defeated by controlling
It realizes the position for entering waveguide two.
Mixing combiner-Wave decomposing multiplexer provided by the invention based on array waveguide grating, by adjusting Y-direction wave
The thickness of conducting shell adjusts the effective refractive index of each section；Downlink working is identical as common AWG function, realizes dense wavelength division solution
Multiplexing, uplink work realize that the conjunction Shu Gongneng to specific wavelength of light, a device integrate partial wave and close two functions of beam.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, can obtain down and show
Beneficial effect:
(1) due to downlink using wavelength-division de-multiplexing technique and uplink uses time-division multiplex technology, downlink transmission rate
Much larger than uplink transmission rate, just the downloading rate of user is much larger than uploading rate to symbol in passive optical network in practice
Situation.
(2) uplink uses time-division multiplex technology, and all ONU ends use the laser of phase co-wavelength, therefore ONU end
Laser light source has substitutability, substantially reduces networking cost.
(3) mixing combiner-Wave decomposing multiplexer provided by the invention is based on Planar Lightwave Circuit Technology, can be by plane wave
The standard lithographic and etching technics of waveguide technology make, and are realized by any dielectric material for being capable of forming planar optical waveguide, and existing
Manufacture craft is compatible；On the other hand, uplink closes beam and downlink partial wave function can be real on the basis of an improved AWG
It is existing, device size is reduced, convenient for integrated.
Detailed description of the invention
Fig. 1 is mixing combiner-Wave decomposing multiplexer knot based on array waveguide grating that the embodiment of the present invention 1 provides
Composition (the equivalent length figure that illustration is respectively structure sectional view and Waveguide array 4)；
Fig. 2 is mixing combiner-Wave decomposing multiplexer down going wave decomposition multiplex spectral response that the embodiment of the present invention 1 provides
Figure；
Fig. 3 is mixing combiner-Wave decomposing multiplexer beam splitting output light field distribution map that the embodiment of the present invention 1 provides；
In the accompanying drawings, identical appended drawing reference is used to denote the same element or structure, in which: 1- input waveguide one, 2-
Input waveguide two, 3- input free transmission range, 4- Waveguide array, and 5- exports free transmission range, 6- output waveguide array, 7- guided wave
Layer, 8- covering, 9- substrate.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
Mixing combiner-Wave decomposing multiplexer provided by the invention based on array waveguide grating, including substrate and
The covering and ducting layer being arranged successively from bottom to top on the substrate；
Wherein, the ducting layer is along the direction of growth with a thickness of 4.7~5.3 microns, and production has input/output wave on ducting layer
It leads, the free transmission range of input/output, Waveguide array；Wherein production has input/output waveguide and Waveguide array to pass through on ducting layer
Ion reaction etching is made, and etching depth is 1.8~2.2 microns；The free transmission range of input/output does not need to etch；From
From left to right puts in order and freely passes for input waveguide 1, input waveguide 22, the free transmission range 3 of input, Waveguide array 4, output
Defeated area 5, output waveguide array 6；Ducting layer growth thickness influences the crosstalk between each channel, the insertion loss etc. of entire device
Performance.
It is specifically described below in conjunction with Fig. 1 and embodiment 1 and provided by the invention mixes combiner-Wave decomposing multiplexer；Implement
Mixing combiner-Wave decomposing multiplexer that example 1 provides, including substrate 9, covering 8, ducting layer 7；Covering 8 and ducting layer 7 are in substrate
It is successively grown from bottom to top on 9；Wherein, substrate 9 uses crystalline silicon, and covering 8 uses silica, and ducting layer 7 uses amorphous
Silicon；Mature PECVD technique, i.e. plasma enhanced chemical vapor deposition method can be used in the growing method.
As shown in Figure 1, transmission direction is Z-direction, longitudinal Material growth direction is Y-direction, the diffraction diffused sheet of lateral light
To for X-direction.
Wherein, ducting layer production has the input waveguide 1 being arranged successively along Z-direction, input waveguide 22, input freely to pass
Defeated area 3, Waveguide array 4, the free transmission range 5 of output, output waveguide array 6；
Wherein, as shown in Figure 1, input waveguide 1, input waveguide 22, Waveguide array 4 and output waveguide array 6 are
Horizontal cross-section is in the cuboid of rectangle perpendicular to the plane of Y-direction；The entry port and exit end of 168 Waveguide arrays 4
Mouthful equally spaced respectively to be arranged on two grating circular arcs, 32 output waveguides are equally spaced, and to be arranged in a rowland arc-shaped
At output waveguide array 6；Each output waveguide size are as follows: X-direction width is 3 microns, and Y-direction waveguide layer height is 5 microns；
It anticipates as shown in fig. 1, in ducting layer, the right side output end face and the free transmission range 3 of input of input waveguide 1 and 2
Left side input end face be connected；The right side output end face for inputting free transmission range 3 is connected with 4 left side input end face of Waveguide array；
The right side output end face of Waveguide array 4 is connected with the left side input end face for exporting free transmission range 5；Export free transmission range 5
Right side output end face is connected with the left side input end face of output waveguide array 6；
As shown in Fig. 1 illustration, be embodiment 1 provide mixing combiner-Wave decomposing multiplexer its along the face X-Y section view
Figure, wherein substrate 9 is along Y-direction with a thickness of 320 microns~350 microns；Covering 8 is along the micro- with a thickness of 3 microns~5 of Y-direction
Rice；Ducting layer 7 is 4.7~5.3 microns along Y-direction growth thickness, and etching depth is 1.8~2.2 microns.
The 1 working principle mixing combiner that the present invention is further explained provides-wavelength-division demultiplexing with reference to embodiments
Device:
Embodiment 1 provide mixing combiner-Wave decomposing multiplexer, be functionally divided into downlink communication wavelength-division demultiplexing and
Uplink optical power closes beam, and downlink working is identical as common AWG function, realizes dense wavelength division demultiplexing, and uplink work is realized to spy
Determine the conjunction Shu Gongneng of optical wavelength, a device integrates partial wave and closes two functions of beam
Light is the slab waveguide structures guiding being made of covering 8, ducting layer 7 and air always in vertical direction；
When downlink working, input waveguide 1 receives the light beam of 32 incident wavelength, and husband thinkling sound occurs through free transmission range 3
Standing grain fraunhofer-diffraction obtains the far diffraction field distribution of in-field in the left side input end face of Waveguide array 4, is then coupled into array wave
It leads in 4；Because 4 end face of Waveguide array is located on grating circle, therefore diffractive light field reaches the left side of Waveguide array 4 with identical phase
Input end face；After the transmission of Waveguide array 4, because the first adjacent Waveguide array maintains identical length difference, and second array
Waveguide has little effect downlink working, thus for each wavelength of downlink multiplexing, in 4 output end of Waveguide array, phase
The output light of adjacent Waveguide array maintains identical phase difference, and for the light of different wave length, this phase difference is different；Then, no
The light of co-wavelength is emitted from Waveguide array 4, and Fraunhofer diffraction occurs again in the free transmission range 5 of output and focuses on different
At 6 position of output waveguide；Through output waveguide 6, each of which output waveguide receives and guides the light of a wavelength, receives by dispersion
The light for 32 wavelength opened realizes the Wavelength Assignment i.e. function of down going wave decomposition multiplex of 32 wavelength lights.
Uplink work is based on light path principle, is illustrated with downlink beam splitting for realizing Shu Gongneng is closed；When work,
Inputting free transmission range 3 Fraunhofer diffraction occurs for the light beam that incident beam splitting wavelength is received by two input waveguides 22,
And two-beam interference occurs in the left side input end face of Waveguide array 4, then it is coupled into the left side input end face of Waveguide array 4
In；Due to meeting formula λ1=nc′ΔL0/ m ', so that the first Waveguide array is transparent to beam splitting wavelength, therefore the first Waveguide array
Beam splitting light is not had an impact, second array waveguide length profile is similar to a light in an isosceles triangle distribution
Light field is divided into two-beam up and down by the prism on；This two-beam is in free 5 diffraction of transmission range of output and defeated
Two-beam interference occurs for 6 input terminal of Waveguide array out, and entire Light Energy concentrate on it is more slightly larger than 6 range of output waveguide array
Within the scope of one lateral dimension, it can control between interference fringe by adjusting the position of Waveguide array spacing and input waveguide two
Away from, the spacing and position consistency of position and output waveguide array (6)；Downlink light function is realized after the output of output array waveguide 6
The function of 32 tunnel beam splitting of rate.
In embodiment 1, the multiple wavelength optical signal inputted by wavelength-division demultiplexing input waveguide 1, after downlink demultiplexes, 32
The light of each wavelength is respectively via 32 waveguide output in output waveguide array 6 in a wavelength；It is inputted by beam splitting input waveguide 2
Optical signal, after beam splitting, optical power is divided equally by output waveguide array 6, and the optical power per the output of waveguide all the way is incident power
1/32；Input and output waveguide is the cuboid of rectangle with horizontal cross-section, and X-direction width is 2.8~3.2 microns, and Y-direction is thick
Degree is 4.7~5.3 microns, and the spacing between output waveguide is 16 microns.
It inputs free transmission range 3 and exports free transmission range 5 and only light is limited in longitudinal Y-direction, in the horizontal plane
Similar to light in free-space propagation, Fraunhofer diffraction occurs；Contact surface with input/output waveguide is rowland circular arc, sieve
Blue arc diameter is 15.0~15.1 millimeters, and the contact surface with Waveguide array is arc surface (grating circle), and grating radius of circle is
15.0~15.1 millimeters；X-direction maximum width is 6~7 millimeters, and Y-direction is with a thickness of 4.7~5.3 microns.
The design of Waveguide array is more crucial in the design, and as shown in Fig. 1 illustration, length is divided into two parts, and first
Classification is similar to common array waveguide grating (AWG), and it is micro- that adjacent Waveguide array maintains identical length difference 24.7~24.8
Rice is allowed to carry out partial wave to downlink signal, and transparent to beam splitting wavelength；Second part Waveguide array length profile is in an isosceles
Triangle-Profile, the length difference between adjacent Waveguide array be ± 0.9~0.91 micron, therefore is similar to one optically
Light field is divided into two-beam up and down, and is horizontal cut to downlink partial wave effect of signals very little Waveguide array by prism
Face is the cuboid of rectangle, and X-direction width is 2.8~3.2 microns, Y-direction with a thickness of 4.7~5.3 microns, Waveguide array it
Between spacing be 12 microns.
It is that the mixing combiner-Wave decomposing multiplexer based on array waveguide grating provided embodiment 1 divides below
The result of beam analog simulation test:
Partial wave signal center wavelength is 1555.8 nanometers, totally 32 tunnel, and wavelength interval is 0.8 nanometer；Beam splitting signal wavelength is
1307 nanometers.Simulated measurement is carried out to device using frequency domain wide-angle light beam transmission method (FD-WA-BPM).
The spectral response as shown in Figure 2 of partial wave performance can be seen that the insertion loss of 32 channels substantially 2.5~
Between 3.7dB, the insertion loss of edge gateway is relatively larger than the insertion loss of intermediate channel.The crosstalk of intermediate channels is big
It causes in 26dB or so, the edge gateway crosstalk of two sides is substantially in 20dB or so.The output light field of beam splitting performance is distributed such as Fig. 3 institute
Show, insertion loss 2.7dB, heterogeneity 1.8dB.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (6)
1. a kind of mixing combiner-Wave decomposing multiplexer based on array waveguide grating, which is characterized in that including substrate (9) with
And it is arranged successively the covering (8) and ducting layer (7) of generation from bottom to top on the substrate (9)；
It has been sequentially etched input waveguide one (1), input waveguide two (2) along Z-direction on the ducting layer (7), has inputted and freely transmits
Area (3), Waveguide array (4), the free transmission range (5) of output and output waveguide array (6), their thickness are identical；Wherein, Y-direction
Refer to the direction with substrate transverse, the Z-direction refers to right direction along the horizontal plane, i.e. optical transmission direction；
The input waveguide one (1) is the rectangular area that etching is formed in ducting layer, right side and the free transmission range (3) of input
Left side is connected；Input waveguide two (2) is the rectangular area that etching is formed in ducting layer, left close to free transmission range (3) is inputted
Top and lower left quarter respectively set one, are connected with free transmission range (3)；The effect of input waveguide one and input waveguide two is by light
Light guide in fibre introduces the device；
The free transmission range (3) of input etches formation on ducting layer, and left side is arc, that is, Rowland circle of evagination to the left
Arc is connected with input waveguide one (1)；Its right side is outer convex, that is, grating circular arc, radius of curvature are the Rowland circles to the right
Twice of arc is connected with Waveguide array (4) left side；The effect for inputting free transmission range (3) is freely transmitting for light, is realized
Fraunhofer diffraction；The free transmission range (5) of output and free transmission range (3) mirror symmetry on optical propagation direction of input,
Its right side rowland circular arc is output end, is connected with the left side of output waveguide array (6)；Its left side grating circular arc and Waveguide array
(4) it is connected；The effect for exporting free transmission range (5) is freely transmitting for light, realizes Fraunhofer diffraction；
The Waveguide array (4) is one group of slab waveguide that formation is etched on ducting layer, and each slab waveguide both ends are rectangle, in
Between be arc-shaped, Waveguide array (4) left end be its input terminal, each slab waveguide is connected with grating circular arc, and is connecting
The equidistant arrangement in place；The right side of Waveguide array is its output end, each slab waveguide in end face and the free transmission range (5) of output
Left side inputs grating circular arc and is connected, and equidistantly arranges in junction；
Output waveguide array (6) is made of one group of slab waveguide equidistantly arranged for etching formation on ducting layer, and being used for will be defeated
Out optically coupling in the fiber array of output；Slab waveguide quantity is identical with subsequent fiber array；
When for downlink and uplink work, Waveguide array (4) can be equivalent to the first array according to the length characteristic of its each slab waveguide
Waveguide and second array waveguide, the length difference of adjacent bar waveguide is all satisfied formula Δ L=m λ in two Waveguide arrays0/nc,λ0
It is the central wavelength of wavelength-division demultiplexing, nCIt is λ0Corresponding equivalent refractive index, m are positive integer；
In first wave guide array, m value is 80-90；In second waveguide array, m value is 1-3；
When the multiplexer is used for downlink working, the first Waveguide array and the generic array waveguide optical grating AWG phase of Waveguide array (4)
Together, the length difference of adjacent bar waveguide is all satisfied formula Δ L0=m λ0/nc；The second array waveguide of the Waveguide array (4)
Meet Δ L1=m λ0/nc, that is to say, that the optical path difference of adjacency channel is the integral multiple of wavelength, and phase difference is the integral multiple of 2 π, is made
It does not have an impact wavelength-division demultiplexing, i.e. second array waveguide is transparent to downlink center wavelength, and its length compares first gust again
Train wave is led much smaller, therefore is nearly free from influence to downlink working；
Downlink working is used for light wave decomposition multiplex, and when work, input waveguide one (1) receives the light beam of incident multiple wavelength, warp
Fraunhofer diffraction occurs for free transmission range (3), obtains the far diffraction field of in-field in the left side input end face of Waveguide array (4)
Distribution, is then coupled into Waveguide array (4)；Because Waveguide array (4) end face is located on grating circle, therefore diffractive light field is with phase
Same phase reaches the left side input end face of Waveguide array (4)；After Waveguide array (4) transmission, because of the first adjacent array wave
It leads and maintains identical length difference, and second array waveguide does not influence downlink working, thus to each wave of downlink multiplexing
For length, in Waveguide array (4) output end, the output light of adjacent Waveguide array maintains identical phase difference, for difference
The light of wavelength, this phase difference are different；Then, the light of different wave length is emitted from Waveguide array (4), is exporting free transmission range (5)
Fraunhofer diffraction occurs again and focuses at different output waveguides (6) position；Through output waveguide (6), each of which is defeated
Waveguide receives and guides the light of a wavelength out, receives the light for each wavelength opened by dispersion, realizes the wave of multiple wavelength lights
Long distribution is the function of down going wave decomposition multiplex；
When for uplink, each slab waveguide length is different in second array waveguiding structure, most close to intermediate slab waveguide length
Greatly, it is sequentially reduced to two sides, length difference is in isosceles triangle shape, and middle part longest, both ends are most short, adjacent waveguide length difference Δ L1
By formula Δ L1=m ' λ0/nc, m '=1,2,3 determine, therefore second array waveguide functions as a prism, can be by one
Shu Guang forms two-beam interference striped, fringe spacing and output at output array waveguide (6) output wave guide face after being divided into two bundles
The input port arrangement spacing of Waveguide array is consistent, to realize the function of optical power beam splitting；In addition, uplink works first gust
Train wave, which is led, also needs to meet formula λ1=nc′ΔL0/ m ', m '=1,2,3；In order to avoid the first Waveguide array generates shadow to beam splitting/conjunction beam
It rings, λ1For uplink operation wavelength, Δ L0For the first Waveguide array adjacent waveguide length difference, nc' acquired by equivalent refraction method
The equivalent refractive index of first Waveguide array；
Uplink work is based on light path principle, is illustrated with downlink beam splitting for realizing Shu Gongneng is closed；When work, by two
A input waveguide two (2) receives the light beam of incident beam splitting wavelength, and Fraunhofer diffraction occurs inputting free transmission range (3),
And two-beam interference occurs in the left side input end face of Waveguide array (4), then it is coupled into the left side input of Waveguide array (4)
In end face；Due to meeting formula λ1=nc′ΔL0/ m ', so that the first Waveguide array is transparent to beam splitting wavelength, therefore the first array
Waveguide does not have an impact beam splitting light, and second array waveguide length profile is similar to one in an isosceles triangle distribution
Light field is divided into two-beam up and down by a prism optically；This two-beam is exporting free transmission range (5) diffraction
And two-beam interference occurs in output array waveguide (6) input terminal, and entire Light Energy is concentrated on than output waveguide array (6)
Within the scope of a slightly larger lateral dimension of range, it can control by adjusting the position of Waveguide array spacing and input waveguide two
Interference fringe spacing, the spacing and position consistency of position and output waveguide array (6)；It is real after output array waveguide (6) output
The function of downlink optical power multichannel beam splitting is showed.
2. mixing combiner-Wave decomposing multiplexer as described in claim 1, which is characterized in that the ncAnd nc' using equivalent
Index method is calculated.
3. mixing combiner-Wave decomposing multiplexer as described in claim 1, which is characterized in that the substrate is monocrystalline silicon；Institute
Stating cladding thickness is 3 microns~5 microns, and material includes silica, indium phosphide, InGaAsP, GaAs, aluminum gallium arsenide, nitrogen
Change gallium, indium gallium nitrogen or aluminum gallium nitride these can form the dielectric material of planar optical waveguide.
4. mixing combiner-Wave decomposing multiplexer as described in claim 1, which is characterized in that the guided wave layer material, including
Amorphous silicon, InGaAsP, GaAs, gallium nitride, indium gallium nitrogen or aluminum gallium nitride these can form the dielectric material of planar optical waveguide.
5. mixing combiner-Wave decomposing multiplexer as described in claim 1, which is characterized in that the input waveguide one (1)
Guarantee its single mode waveguide operating mode having a size of choosing to be subject to.
6. mixing combiner-Wave decomposing multiplexer as described in claim 1, which is characterized in that adjust the deflection of interfering beam
Angle is realized by control Waveguide array spacing, and then realizes the control of interference fringe spacing；Adjust the position of output interference fringe
It realizes position by controlling input waveguide two.
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| TWI719870B (en) * | 2020-03-31 | 2021-02-21 | 國立高雄科技大學 | Wave division multiplexing device for large-capacity optical transmission |
| CN111897050A (en) * | 2020-08-24 | 2020-11-06 | 北京邮电大学 | Array waveguide grating |
| CN113608305B (en) * | 2021-07-15 | 2022-06-21 | 苏州旭创科技有限公司 | Beam controller and beam control method |
| CN113985603B (en) * | 2021-12-22 | 2022-04-22 | 苏州旭创科技有限公司 | Light beam scanning system |
| CN116520486B (en) * | 2023-07-04 | 2023-09-26 | 之江实验室 | Reconfigurable wavelength division multiplexer and preparation method thereof |
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