CN110927557A - Contact type chip detection equipment and method - Google Patents

Contact type chip detection equipment and method Download PDF

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Publication number
CN110927557A
CN110927557A CN201911216429.3A CN201911216429A CN110927557A CN 110927557 A CN110927557 A CN 110927557A CN 201911216429 A CN201911216429 A CN 201911216429A CN 110927557 A CN110927557 A CN 110927557A
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CN
China
Prior art keywords
probe
mounting plate
assembly
axis
sliding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201911216429.3A
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Chinese (zh)
Inventor
彭义青
冼平东
黄明春
王量
容金波
吴述林
黄为民
周厚利
黎启造
谭建军
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Shenzhen Tektronix Photoelectric Technology Co Ltd
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Shenzhen Tektronix Photoelectric Technology Co Ltd
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Application filed by Shenzhen Tektronix Photoelectric Technology Co Ltd filed Critical Shenzhen Tektronix Photoelectric Technology Co Ltd
Priority to CN201911216429.3A priority Critical patent/CN110927557A/en
Publication of CN110927557A publication Critical patent/CN110927557A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G01R31/2808Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

The invention discloses a contact type chip detection device and a contact type chip detection method, which comprise a rack, and a jacking detection assembly, a probe assembly, a multi-axis chip bearing assembly and a camera assembly which are directly or indirectly arranged on the rack, wherein the multi-axis chip bearing assembly is used for bearing a detected chip, the jacking detection assembly is arranged at the bottom of the multi-axis chip bearing assembly, the jacking detection assembly comprises a chip detection device and can drive the chip detection device to ascend and enable the chip detection device to be in contact with the detected chip on the multi-axis chip bearing assembly, and the probe assembly can open a separation gap and enable the camera assembly to carry out camera shooting and marking on the detected chip. The contact type chip detection equipment and the method have the advantages of simple structure, low implementation cost, stable and reliable performance, high detection precision, high detection efficiency, time saving and the like which are not possessed by the prior art.

Description

Contact type chip detection equipment and method
Technical Field
The invention relates to the field of chip detection, in particular to a contact type chip detection device and a contact type chip detection method.
Background
In the field of chip detection, in the existing chip detection equipment, a chip needs to be turned on firstly when the chip is detected, and light of the chip needs to penetrate through a space or space glass and then be detected and analyzed by a chip detection device after the chip emits light; in addition, in the existing chip detection equipment, the probe assembly is closed and can not be opened, when the chip needs to be shot and positioned, the whole equipment needs to perform actions with larger amplitude and more steps to complete the whole shooting marking work, the consumed time and the cost are high, and the detection efficiency is reduced; furthermore, in the existing equipment, the probe of the probe assembly needs to move to the contact pin of the chip and conduct the chip, the contact pin is easily in poor contact in the action mode, a plurality of assemblies are required to move in a matched mode in the primary detection process, the detection action processes are multiple, a large amount of time is further consumed, the detection efficiency is further reduced, the structure of the whole equipment is more complex, the installation difficulty is higher, the implementation cost is high, and the performance stability is poor.
In view of the above, the present invention provides a new technical solution to solve the existing technical drawbacks.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a contact type chip detection device and a contact type chip detection method, which solve the technical defects of complex structure, poor performance stability, low detection precision and accuracy, more detection operation working procedures, high time cost, low detection efficiency and the like in the prior art.
The technical scheme adopted by the invention for solving the technical problems is as follows:
the utility model provides a contact chip check out test set, includes frame and directly or indirectly installs jacking determine module, probe subassembly, multiaxis chip carrier assembly, the subassembly of making a video recording in the frame, multiaxis chip carrier assembly is used for bearing and is detected the chip, jacking determine module sets up in multiaxis chip carrier assembly bottom, and jacking determine module includes that chip detection device jacking determine module can drive chip detection device and rise and make the detected chip contact on chip detection device and the multiaxis chip carrier assembly.
As an improvement of the technical proposal, the jacking detection component comprises a detection component mounting plate directly or indirectly fixed on the frame, a detection component horizontal guide rail and a detection component horizontal cylinder which are arranged on the detection component mounting plate, wherein the detection component horizontal sliding mounting plate is arranged on the detection component guide rail, the output end of the detection component horizontal cylinder is connected to the detection component horizontal sliding mounting plate and can push the detection component horizontal sliding mounting plate to slide on the detection component horizontal guide rail, a detection component vertical mounting plate is arranged on the detection component horizontal sliding mounting plate, a detection component vertical guide rail, a detection component jacking screw nut pair and a detection component jacking driving motor are arranged on the detection component vertical mounting plate, a detection component vertical sliding mounting seat is arranged on the detection component vertical guide rail, the output end of the detection component jacking driving motor is connected to one end of a screw rod of the detection component jacking screw nut pair, the nut of the detection component jacking screw nut pair is connected to a vertical sliding installation seat of the detection component, and the chip detection device is fixedly installed on the vertical sliding installation seat of the detection component.
As a further improvement of the above technical solution, the chip detection device is an integrating sphere detection device, and a transparent glass cover is arranged at an upper orifice of the integrating sphere detection device;
the horizontal cylinder of the detection assembly is fixedly arranged at the bottom of the mounting plate of the detection assembly through a horizontal cylinder mounting seat, and the output end of the horizontal cylinder of the detection assembly is fixedly connected to the horizontal sliding mounting plate of the detection assembly through a horizontal cylinder connecting block;
as a further improvement of the above technical scheme, a horizontal sliding limiting block is arranged at the side part of the horizontal sliding mounting plate of the detection assembly, a horizontal sliding limiting seat matched with the horizontal sliding limiting block is arranged at the bottom of the horizontal sliding mounting plate of the detection assembly, and an elastic limiting rod is arranged on the horizontal sliding limiting seat;
as a further improvement of the above technical scheme, the detection assembly jacking driving motor is mounted at the bottom of the detection assembly vertical mounting plate through a jacking driving motor mounting seat, and the output end of the detection assembly jacking driving motor is provided with a detection assembly coupler and is connected to one end of a screw rod of the detection assembly jacking screw nut pair through the detection assembly coupler;
as a further improvement of the above technical scheme, a detection assembly jacking sensor is arranged on the side wall of the detection assembly vertical mounting plate, and a detection assembly jacking induction sheet matched with the detection assembly jacking sensor is arranged on the detection assembly vertical sliding mounting seat;
as a further improvement of the above technical solution, the detection assembly horizontal sliding mounting plate is mounted on the detection assembly horizontal guide rail through a detection assembly horizontal sliding seat, and the detection assembly vertical sliding mounting base is mounted on the detection assembly vertical guide rail through a detection assembly vertical sliding seat;
as a further improvement of the technical scheme, a detection assembly side reinforcing plate is arranged on the side of the detection assembly vertical mounting plate.
As a further improvement of the above technical solution, the probe assembly includes a probe assembly mounting plate directly or indirectly mounted on the frame, an opening and closing slide rail is provided on the probe assembly mounting plate, a first probe slide mounting plate and a second probe slide mounting plate are provided on the opening and closing slide rail, at least one first probe module is provided on the first probe slide mounting plate, a second probe module is provided on the second probe slide mounting plate, the number of the second probe module matches the number of the first probe module, a first opening and closing driving cylinder and a second opening and closing driving cylinder are further provided on the probe assembly mounting plate, an output end of the first opening and closing driving cylinder is connected to the first probe slide mounting plate and can drive the first probe slide mounting plate to slide on the opening and closing slide rail, an output end of the second opening and closing driving cylinder is connected to the second probe slide mounting plate and can drive the second probe slide mounting plate to slide on the opening and closing slide rail .
As a further improvement of the above technical solution, the probe assembly mounting base plate has a mounting recess, and the opening and closing slide rail, the first probe slide mounting plate, the second probe slide mounting plate, the first opening and closing driving cylinder, and the second opening and closing driving cylinder are all disposed in the mounting recess;
as a further improvement of the above technical solution, the number of the opening and closing slide guide rails is two, and the first probe slide mounting plate and the second probe slide mounting plate are both arranged on the two opening and closing slide guide rails in a crossing manner through the opening and closing slide guide rail seats;
as a further improvement of the above technical solution, one end of the first probe slide mounting plate and one end of the second probe slide mounting plate are respectively and fixedly provided with a first slide mounting plate connecting block and a second slide mounting plate connecting block, an output end of the first opening and closing driving cylinder is connected to the first slide mounting plate connecting block through a first cylinder joint, an output end of the second opening and closing driving cylinder is connected to the second slide mounting plate connecting block through a second cylinder joint, the first opening and closing driving cylinder can drive the first probe slide mounting plate to slide on the opening and closing slide guide rail through the first cylinder joint and the first slide mounting plate connecting block, and the second opening and closing driving cylinder can drive the second probe slide mounting plate to slide on the opening and closing slide guide rail through the second cylinder joint and the second slide mounting plate connecting block;
as a further improvement of the above technical solution, the first probe slide mounting plate and the second probe slide mounting plate are provided with probe slide mounting plate notches through which probes of the first probe module and the second probe module pass, and the probe assembly mounting base plate is provided with base plate notches matching with the probe slide mounting plate notches;
as a further improvement of the above technical solution, the first probe sliding mounting plate is provided with a first semicircular notch at a side thereof close to the second probe sliding mounting plate, the second probe sliding mounting plate is provided with a second semicircular notch at a side thereof close to the first probe sliding mounting plate, after the first probe sliding mounting plate and the second probe sliding mounting plate are close to each other, the first semicircular notch and the second semicircular notch jointly form a probe sliding mounting plate circular notch, a circle center of the probe sliding mounting plate circular notch is located at a closed line of the first probe sliding mounting plate and the second probe sliding mounting plate, the first probe modules are uniformly distributed around the first semicircular notch, the second probe modules are uniformly distributed around the second semicircular notch, the probe assembly mounting plate is provided with a bottom plate circular notch at a position matching the probe sliding mounting plate circular notch, the size of the circular gap of the bottom plate is larger than or equal to that of the circular gap of the probe sliding mounting plate;
as a further improvement of the above technical solution, the first probe module comprises a probe mounting base plate mounted on the first probe slide mounting plate, the probe mounting base plate is provided with a probe X-axis linear bearing, the probe X-axis linear bearing is provided with a probe Y-axis linear bearing, the Y-axis linear bearing is provided with a probe middle mounting plate, the side of the probe middle mounting plate is provided with a probe Z-axis linear bearing, the side of the probe Z-axis linear bearing is provided with a probe mounting plate, and the probe mounting plate is provided with a chip probe; the probe X-axis linear bearing, the probe Y-axis linear bearing and the probe Z-axis linear bearing are respectively provided with a probe X-axis adjusting button, a probe Y-axis adjusting button and a probe Z-axis adjusting button, and the structure of the second probe module is the same as that of the first probe module.
As a further improvement of the above technical solution, the multi-axis chip carrier assembly includes a carrier assembly bottom plate directly or indirectly fixed on the rack and a carrier X-axis module disposed on the carrier assembly bottom plate, the output end of the carrier X-axis module is provided with a carrier Y-axis module capable of moving along the X-axis direction, the output end of the carrier Y-axis module is provided with a rotary carrier disc module capable of moving along the Y-axis direction, and a chip product to be detected is carried on the rotary carrier disc module.
As a further improvement of the above technical solution, the rotary carrier module includes a carrier frame, a rotary carrier bearing is disposed at a central position of the carrier frame, a rotary carrier disc is disposed on a movable ring of the rotary carrier bearing, a carrier disc rotation driving device is further disposed on the carrier frame, and the carrier disc rotation driving device can drive the rotary carrier disc to rotate and further drive a chip to be detected on the rotary carrier disc to rotate;
as a further improvement of the above technical solution, the carrier plate rotation driving device includes a rotation driving motor, a first synchronous pulley and a second synchronous pulley, which are fixedly mounted on the carrier plate frame, an output end of the rotation driving motor is provided with a driving synchronous pulley, a rotation driving synchronous belt is wound between the driving synchronous pulley and the first synchronous pulley and between the driving synchronous pulley and the second synchronous pulley, a part of an outer wall surface of the rotation driving synchronous belt, which is located between the first synchronous pulley and the second synchronous pulley, is directly or indirectly in friction contact with an outer wall surface of the rotation carrier plate, and the rotation driving motor can drive the rotation carrier plate to rotate through the driving synchronous pulley, the first synchronous pulley, the second synchronous pulley and the rotation driving synchronous belt;
as a further improvement of the above technical scheme, a synchronous belt guide wheel for guiding the rotary driving synchronous belt is arranged on the bearing disc frame, and the synchronous belt guide wheel is mounted on the bearing disc frame through a guide wheel mounting seat; a rotary sensor is arranged on the bearing disc frame, and a rotary induction sheet matched with the rotary sensor is directly or indirectly fixedly arranged on the side part of the rotary bearing disc; the bearing plate frame comprises a frame bottom shell and a frame upper shell;
as a further improvement of the above technical solution, the X-axis bearing module includes an X-axis guide rail fixedly mounted on a bottom plate of the bearing module, an X-axis driving motor, and an X-axis screw nut pair, an X-axis sliding mounting plate is disposed on the X-axis guide rail, an output end of the X-axis driving motor is connected to one end of a screw of the X-axis screw nut pair through an X-axis coupler, and a nut of the X-axis screw nut pair is connected to the X-axis sliding mounting plate and can drive the X-axis sliding mounting plate to slide on the X-axis guide rail;
as a further improvement of the above technical scheme, the X-axis sliding mounting plate is mounted on the X-axis guide rail through an X-axis guide rail sliding seat, the X-axis driving motor is mounted on the bearing component bottom plate through an X-axis motor mounting seat, and the X-axis screw nut pair is mounted on the bearing component bottom plate through an X-axis screw nut pair mounting seat;
as a further improvement of the above technical solution, the bearing Y-axis module includes a Y-axis guide rail fixedly mounted at an output end of the bearing X-axis module, a Y-axis driving motor, and a Y-axis screw nut pair, the rotating bearing disc module is disposed on the Y-axis guide rail, an output end of the Y-axis driving motor is connected to one end of a screw of the Y-axis screw nut pair through a Y-axis coupler, and a nut of the Y-axis screw nut pair is connected to the rotating bearing disc module and can drive the rotating bearing disc module to slide on the Y-axis guide rail;
as a further improvement of the technical scheme, the rotary bearing disc module is arranged on a Y-axis guide rail through a Y-axis guide rail sliding seat, the Y-axis driving motor is arranged at the output end of the bearing X-axis module through a Y-axis motor mounting seat, and the Y-axis screw rod nut pair is arranged at the output end of the bearing X-axis module through a Y-axis screw rod nut pair mounting seat.
As a further improvement of the above technical scheme, the camera assembly comprises a camera assembly bottom adjusting guide rail which is directly or indirectly fixedly arranged on the frame and a camera assembly sliding installation seat which is arranged on the camera assembly bottom adjusting guide rail, a camera assembly vertical installation plate is arranged on the camera assembly sliding installation seat, two sides of the camera assembly vertical installation plate are respectively provided with a camera assembly vertical guide rail and a camera assembly linear bearing, the camera assembly vertical sliding installation seat is arranged on the camera assembly vertical guide rail, a camera module is fixedly arranged on the camera assembly linear bearing, the camera module comprises a CCD camera, the lower end part of the camera module is fixedly connected with the camera assembly vertical sliding installation seat, a camera assembly lifting driving cylinder is directly or indirectly arranged on the camera assembly sliding installation seat, the output end of the camera assembly lifting driving cylinder is connected to the camera assembly vertical sliding installation seat and can drive the camera to take a picture Like the vertical slidable mounting base of subassembly and slide on the vertical guide rail of subassembly of making a video recording and further drive the module of making a video recording and slide on the subassembly linear bearing of making a video recording.
As a further improvement of the above technical scheme, a lifting fine-tuning device is arranged on the camera assembly vertical mounting plate, an output end of the lifting fine-tuning device is directly or indirectly fixedly connected to the camera module, and the lifting fine-tuning device is fixedly mounted on the camera assembly vertical mounting plate through a fine-tuning device mounting seat;
the camera module also comprises a camera light source which is arranged at the bottom of the CCD camera;
as a further improvement of the technical scheme, a camera module connecting plate is arranged at the bottom of the camera module vertical sliding mounting seat, a through hole is formed in the middle of the camera module connecting plate, a CCD camera of the camera module penetrates through the through hole of the camera module connecting plate, the lower part of the camera module is fixedly connected with the camera module connecting plate, and a side reinforcing connecting plate is arranged between the camera module connecting plate and the camera module vertical sliding mounting seat;
as a further improvement of the above technical solution, the camera assembly vertical sliding mounting base is mounted on the camera assembly vertical guide rail through a camera assembly vertical guide rail base, and the output end of the camera assembly lifting driving cylinder is fixedly connected to the camera assembly vertical sliding mounting base through a camera assembly cylinder connecting block and can drive the camera assembly vertical sliding mounting base to slide on the camera assembly vertical guide rail;
as a further improvement of the above technical scheme, the camera shooting assembly sliding installation base is an inverted L-shaped installation base, a bottom sliding seat plate is fixedly arranged at the bottom of the camera shooting assembly sliding installation base, and the bottom sliding seat plate is installed on the camera shooting assembly bottom adjusting guide rail through a camera shooting assembly bottom adjusting guide rail seat;
as a further improvement of the technical scheme, the end part of the camera assembly bottom adjusting guide rail is provided with a camera assembly bottom limiting block, the side part of the camera assembly bottom adjusting guide rail is provided with a mounting seat locking limiting plate, and a locking long groove is formed in the mounting seat locking limiting plate.
A method of contact chip inspection, the method comprising:
adopting a multi-axis chip bearing assembly to bear the detected chip and moving the detected chip to a preset position; after the camera shooting assembly is adopted to complete the camera shooting marking of the detected chip, the marking information is recorded; the jacking detection assembly is adopted to move to the bottom of the detected chip and jack the chip detection device, the chip detection device is directly contacted with the bottom of the detected chip after being jacked and drives the detected chip to move upwards slightly, two electrodes of the detected chip are contacted with the probe of the probe assembly and electrically conducted after the detected chip moves upwards slightly, and the conducted detected chip emits light and is detected by the chip detection device contacted with the detected chip.
The invention has the beneficial effects that: the invention provides a contact chip detection device and a method, wherein the contact chip detection device is provided with a jacking detection assembly, a probe assembly, a multi-axis chip bearing assembly and a camera assembly, and a chip detection device can be driven to be in direct contact with a detected chip through the jacking detection assembly, so that a space or space glass between the chip detection device and the detected chip is eliminated, the detection accuracy can be greatly improved, the influence of the surrounding environment on detection is reduced, and the detection result is better; in addition, the probe assembly can open a space for the camera assembly to shoot the detected chip, so that the camera assembly can quickly complete the camera work of the detected chip, the action steps of the whole equipment are fewer, the detection efficiency is improved, the time cost is saved, the structural complexity of the equipment is also reduced, the implementation cost is reduced, the stability of the equipment is higher, and the later maintenance is more convenient.
In conclusion, the contact type chip detection equipment and the contact type chip detection method solve the technical defects of complex structure, poor performance stability, low detection precision and accuracy, more detection operation working procedures, high time cost, low detection efficiency and the like in the prior art.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is an assembly schematic of the present invention;
FIG. 2 is another assembly view of the present invention;
FIG. 3 is a third assembly view of the present invention;
FIG. 4 is an assembled schematic view of a lift-up detection assembly of the present invention;
FIG. 5 is an assembly view of the jacking-sensing assembly of the present invention at another angle;
FIG. 6 is a third angle schematic view of the lift detection assembly of the present invention;
FIG. 7 is a fourth angle schematic view of the lift detection assembly of the present invention;
FIG. 8 is an assembled schematic view of the probe assembly of the present invention;
FIG. 9 is an assembled view of the probe assembly of the present invention with the probe assembly mounting base plate removed;
FIG. 10 is another assembled view of the probe assembly of the present invention with the probe assembly mounting base plate removed;
FIG. 11 is a schematic view of the assembly of a first probe module according to the present invention;
FIG. 12 is an assembled view of a multi-axis chip carrier assembly of the present invention;
FIG. 13 is an assembled view of the X-axis carrying module and the Y-axis carrying module of the present invention;
FIG. 14 is an assembled view of the rotary carrier plate module of the present invention;
FIG. 15 is a schematic view of the internal structure of the rotary carrier module according to the present invention;
FIG. 16 is an assembled view of the camera module of the present invention;
FIG. 17 is another schematic view of the camera assembly of the present invention;
FIG. 18 is a third assembled view of the camera module of the present invention;
fig. 19 is a fourth assembly schematic of the camera module of the present invention.
Detailed Description
The conception, the specific structure, and the technical effects produced by the present invention will be clearly and completely described below in conjunction with the embodiments and the accompanying drawings to fully understand the objects, the features, and the effects of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and those skilled in the art can obtain other embodiments without inventive effort based on the embodiments of the present invention, and all embodiments are within the protection scope of the present invention. In addition, all the connection/connection relations referred to in the patent do not mean that the components are directly connected, but mean that a better connection structure can be formed by adding or reducing connection auxiliary components according to specific implementation conditions. All technical characteristics in the invention can be interactively combined on the premise of not conflicting with each other; reference is made to fig. 1-19.
With specific reference to fig. 1-3, a contact chip detection device, includes frame 1 and directly or indirectly installs jacking detecting component 2, probe subassembly 3, multiaxis chip carrier assembly 4, the subassembly 5 of making a video recording in frame 1, multiaxis chip carrier assembly 4 is used for bearing and is detected chip 9, jacking detecting component 2 sets up in multiaxis chip carrier assembly 4 bottom, and jacking detecting component 2 includes that chip detection device 20 jacking detecting component 2 can drive chip detection device 20 and rise and make chip detection device 20 and the detected chip 9 contact on the multiaxis chip carrier assembly 4.
With specific reference to fig. 4-7, the jacking detection assembly 2 includes a detection assembly mounting plate 21 directly or indirectly fixed on the frame 1, a detection assembly horizontal guide rail 221 and a detection assembly horizontal cylinder 222 arranged on the detection assembly mounting plate 21, the detection assembly guide rail 221 is provided with a detection assembly horizontal sliding mounting plate 223, the output end of the detection assembly horizontal cylinder 222 is connected to the detection assembly horizontal sliding mounting plate 223 and can push the detection assembly horizontal sliding mounting plate 223 to slide on the detection assembly horizontal guide rail 221, the detection assembly horizontal sliding mounting plate 223 is provided with a detection assembly vertical mounting plate 23, the detection assembly vertical mounting plate 23 is provided with a detection assembly vertical guide rail 231, a detection assembly jacking screw nut pair 232 and a detection assembly jacking driving motor 233, the detection assembly vertical guide rail 231 is provided with a detection assembly vertical sliding mounting seat 234, the output end of the detection assembly jacking driving motor 233 is connected to one end of a screw of the detection assembly jacking screw nut pair 232, a nut of the detection assembly jacking screw nut pair 232 is connected to a detection assembly vertical sliding installation seat 234, the detection assembly vertical sliding installation seat 234 is fixedly provided with the chip detection device 20, specifically, the chip detection device 20 is an integrating sphere detection device, and a transparent glass cover 202 is arranged at an upper hole of the integrating sphere detection device;
preferably, the detection assembly horizontal cylinder 222 is fixedly mounted at the bottom of the detection assembly mounting plate 21 through a horizontal cylinder mounting seat 2221, and the output end of the detection assembly horizontal cylinder 222 is fixedly connected to the detection assembly horizontal sliding mounting plate 223 through a horizontal cylinder connecting block 2222; a horizontal sliding limiting block 2231 is arranged at the side part of the detection component horizontal sliding mounting plate 223, a horizontal sliding limiting seat 211 matched with the horizontal sliding limiting block 2231 is arranged at the bottom part of the detection component mounting plate 21, and an elastic limiting rod 212 is arranged on the horizontal sliding limiting seat 211; the detection assembly jacking driving motor 233 is mounted at the bottom of the detection assembly vertical mounting plate 23 through a jacking driving motor mounting seat 2331, and the output end of the detection assembly jacking driving motor 233 is provided with a detection assembly coupling 236 and is connected to one end of a screw rod of the detection assembly jacking screw rod nut pair 232 through the detection assembly coupling 236; a detection assembly jacking sensor 2371 is arranged on the side wall of the detection assembly vertical mounting plate 23, and a detection assembly jacking induction sheet 2372 matched with the detection assembly jacking sensor 2371 is arranged on the detection assembly vertical sliding mounting seat 234; the inspection assembly horizontal slide mounting plate 223 is mounted on the inspection assembly horizontal guide rail 221 through an inspection assembly horizontal slide 2211, and the inspection assembly vertical slide mounting seat 234 is mounted on the inspection assembly vertical guide rail 23 through an inspection assembly vertical slide 2311; the detection assembly vertical mounting plate 23 is provided with a detection assembly side reinforcing plate 238 at the side.
In specific implementation, firstly, the detection assembly horizontal cylinder 222 drives the detection assembly horizontal sliding mounting plate 223 and other components arranged on the detection assembly horizontal sliding mounting plate 223 to slide along the detection assembly horizontal guide rail 221 and slide into the position below the preset detection position of the equipment, after the detection assembly horizontal sliding mounting plate is in place, the detection assembly jacking driving motor 233 drives the detection assembly vertical sliding mounting base 234 to slide upwards along the detection assembly vertical guide rail 231 through the detection assembly jacking screw nut pair 232, so as to further enable the chip detection device 20 arranged on the detection assembly vertical sliding mounting base 234 to move upwards, during the sliding process of the chip detection device 20, the chip detection device 20 can directly contact the detected chip 9 and push the detected chip 9 upwards, so that two pole feet of the detected chip 9 are in contact with probes in the probe assembly 3, and the detected chip 9 is turned on and brighten, the light generated by the chip 9 can be detected by the chip detection device 20. Chip detection device 20 is through jacking back with being detected chip 9 direct contact, does not have interval space or interval glass between chip detection device 20 and the chip, can promote detection precision and degree of accuracy, chip detection device 20 passes through detection device mount pad 201 and installs on the vertical slip mount pad 234 of detecting component.
Referring to fig. 8 to 11, the probe assembly 3 includes a probe assembly mounting base plate 31 directly or indirectly mounted on the frame 1, the probe assembly mounting base plate 31 is provided with an opening/closing slide guide rail 311, the opening/closing slide guide rail 311 is provided with a first probe slide mounting plate 321 and a second probe slide mounting plate 322, the first probe slide mounting plate 321 is provided with at least one first probe module 33, the second probe slide mounting plate 322 is provided with a second probe module 34, the number of which matches the number of the first probe modules 33, the probe assembly mounting base plate 31 is further provided with a first opening/closing driving cylinder 351 and a second opening/closing driving cylinder 352, an output end of the first opening/closing driving cylinder 351 is connected to the first probe slide mounting plate 321 and can drive the first probe slide mounting plate 321 to slide on the opening/closing slide guide rail 311, and an output end of the second opening/closing driving cylinder 352 is connected to the second probe slide mounting plate 322 and can drive the second probe slide mounting plate The two probe slide mounting plates 322 slide on the opening/closing slide guide 311.
Preferably, the probe assembly mounting base plate 31 has a mounting recess 312, and the opening and closing slide guide rail 311, the first probe slide mounting plate 321, the second probe slide mounting plate 322, the first opening and closing driving cylinder 351 and the second opening and closing driving cylinder 352 are all disposed in the mounting recess 312; the number of the opening and closing slide guide rails 311 is two, and the first probe slide mounting plate 321 and the second probe slide mounting plate 322 are both arranged on the two opening and closing slide guide rails 311 in a crossing manner through an opening and closing slide guide rail seat 3111; a first sliding mounting plate connecting block 3211 and a second sliding mounting plate connecting block 3221 are respectively and fixedly arranged at one end of the first probe sliding mounting plate 321 and one end of the second probe sliding mounting plate 322, an output end of the first opening and closing driving cylinder 351 is connected to the first sliding mounting plate connecting block 3211 through a first cylinder joint 3511, an output end of the second opening and closing driving cylinder 352 is connected to the second sliding mounting plate connecting block 3221 through a second cylinder joint 3521, the first opening and closing driving cylinder 351 can drive the first probe sliding mounting plate 321 to slide on the opening and closing sliding guide rail 311 through the first cylinder joint 3511 and the first sliding mounting plate connecting block 3211, and the second opening and closing driving cylinder 352 can drive the second probe sliding mounting plate 322 to slide on the opening and closing sliding guide rail 311 through the second cylinder joint 3521 and the second sliding mounting plate connecting block 3221; the first probe sliding mounting plate 321 and the second probe sliding mounting plate 322 are provided with probe sliding mounting plate notches for the probes of the first probe module 33 and the second probe module 34 to pass through, and the probe assembly mounting base plate 31 is provided with base plate notches matched with the probe sliding mounting plate notches; the first probe sliding mounting plate 321 is provided with a first semicircular notch on one side close to the second probe sliding mounting plate 322, the second probe sliding mounting plate 322 is provided with a second semicircular notch on one side close to the first probe sliding mounting plate 321, the first probe sliding mounting plate 321 and the second probe sliding mounting plate 322 are close to the closed back, the first semicircular notch and the second semicircular notch jointly form a probe sliding mounting plate circular notch, the circle center of the probe sliding mounting plate circular notch is located at the closed line of the first probe sliding mounting plate 321 and the second probe sliding mounting plate 322, the first probe modules 33 are uniformly distributed around the first semicircular notch, the second probe modules 34 are uniformly distributed around the second semicircular notch, the probe module mounting plate 31 is provided with a bottom plate circular notch with the position matched with the probe sliding mounting plate circular notch, the size of the circular gap of the bottom plate is larger than or equal to that of the circular gap of the probe sliding mounting plate; the first probe module 33 comprises a probe mounting base plate 331 mounted on a first probe sliding mounting plate 321, a probe X-axis linear bearing 332 is arranged on the probe mounting base plate 331, a probe Y-axis linear bearing 333 is arranged on the probe X-axis linear bearing 332, a probe middle mounting plate 334 is arranged on the Y-axis linear bearing 333, a probe Z-axis linear bearing 335 is arranged on the side of the probe middle mounting plate 334, a probe mounting plate 336 is arranged on the side of the probe Z-axis linear bearing 335, and a chip probe 337 is arranged on the probe mounting plate 336; the probe X-axis linear bearing 332, the probe Y-axis linear bearing 333 and the probe Z-axis linear bearing 335 are respectively provided with a probe X-axis adjusting button 3321, a probe Y-axis adjusting button 3331 and a probe Z-axis adjusting button 3351, and the structure of the second probe module 34 is the same as that of the first probe module 33.
In specific implementation, when the detected chip 9 is moved to the right position by the multi-axis chip bearing component 4, the first opening and closing driving cylinder 351 and the second opening and closing driving cylinder 352 respectively drive the first probe sliding mounting plate 321 and the second probe sliding mounting plate 322 to slide reversely, an area for photographing the camera exists between the first probe sliding mounting plate 321 and the second probe sliding mounting plate 322, the CCD camera 571 in the camera component 5 corresponding to the device can photograph the chip at the bottom of the probe component mounting base plate 31 through the area to mark, the area of the photographed mark is large, time can be greatly saved, detection efficiency can be improved, and operation is more convenient. After the detected chip 9 is marked by the camera, the first opening and closing driving cylinder 351 and the second opening and closing driving cylinder 352 respectively drive the first probe sliding mounting plate 321 and the second probe sliding mounting plate 322 to slide oppositely and enable the first probe sliding mounting plate 321 and the second probe sliding mounting plate 322 to be closed, so that the chip detection work in the next step is facilitated. The whole operation action is simple, and the application experience is better.
Referring to fig. 12 to 15 in particular, the multi-axis chip carrier assembly 4 includes a carrier assembly base plate 41 directly or indirectly fixed on the rack 1 and a carrier X-axis module 42 disposed on the carrier assembly base plate 41, a carrier Y-axis module 43 capable of moving along the X-axis direction is disposed at an output end of the carrier X-axis module 42, a rotary carrier disc module 44 capable of moving along the Y-axis direction is disposed at an output end of the carrier Y-axis module 43, and a chip product to be tested is carried on the rotary carrier disc module 44.
Preferably, the rotating carrier tray module 44 includes a carrier tray frame 441, a rotating carrier bearing is disposed at a central position of the carrier tray frame 441, a rotating carrier tray 442 is disposed on a movable ring of the rotating carrier bearing, and a carrier tray rotation driving device is further disposed on the carrier tray frame 441, and the carrier tray rotation driving device can drive the rotating carrier tray 442 to rotate and further drive the chips to be detected on the rotating carrier tray 442 to rotate; the bearing disc rotation driving device comprises a rotation driving motor 443, a first synchronous pulley 444 and a second synchronous pulley 445 which are fixedly mounted on a bearing disc frame 441, wherein the output end of the rotation driving motor 443 is provided with a driving synchronous pulley, a rotation driving synchronous belt 446 is wound between the driving synchronous pulley and the first synchronous pulley 444 and between the driving synchronous pulley and the second synchronous pulley 445, the outer wall surface of a part of the rotation driving synchronous belt 446, which is positioned between the first synchronous pulley 444 and the second synchronous pulley 445, is directly or indirectly in friction contact with the outer wall surface of the rotation bearing disc 442, and the rotation driving motor 443 can drive the rotation bearing disc 442 to rotate through the driving synchronous pulley, the first synchronous pulley 444, the second synchronous pulley 445 and the rotation driving synchronous belt 446; a timing belt guide wheel 447 for guiding the rotary driving timing belt 446 is arranged on the bearing disc frame 441, and the timing belt guide wheel 447 is mounted on the bearing disc frame 441 through a guide wheel mounting seat 448; a rotation sensor 4491 is arranged on the bearing disc frame 441, and a rotation sensing sheet 4492 matched with the rotation sensor 4491 is directly or indirectly fixedly arranged on the side of the rotation bearing disc 442; the tray frame 441 comprises a frame bottom shell and a frame upper shell; the bearing X-axis module 42 comprises an X-axis guide rail 421, an X-axis driving motor 422 and an X-axis screw nut pair 423 which are fixedly arranged on the bearing component bottom plate 41, wherein an X-axis sliding mounting plate 424 is arranged on the X-axis guide rail 421, the output end of the X-axis driving motor 422 is connected to one end of a screw of the X-axis screw nut pair 423 through an X-axis coupler 425, and a nut of the X-axis screw nut pair 423 is connected to the X-axis sliding mounting plate 424 and can drive the X-axis sliding mounting plate 424 to slide on the X-axis guide rail 421; the X-axis sliding mounting plate 424 is mounted on the X-axis guide rail 421 through an X-axis guide rail sliding seat 4211, the X-axis driving motor 422 is mounted on the bearing assembly bottom plate 41 through an X-axis motor mounting seat 4221, and the X-axis lead screw nut pair 423 is mounted on the bearing assembly bottom plate 41 through an X-axis lead screw nut pair mounting seat 4231; the bearing Y-axis module 43 comprises a Y-axis guide rail 431 fixedly mounted at the output end of the bearing X-axis module 42, a Y-axis driving motor 432 and a Y-axis lead screw nut pair 433, the rotary bearing disc module 44 is arranged on the Y-axis guide rail 431, the output end of the Y-axis driving motor 432 is connected to one end of a lead screw of the Y-axis lead screw nut pair 433 through a Y-axis coupler 435, and the nut of the Y-axis lead screw nut pair 433 is connected to the rotary bearing disc module 44 and can drive the rotary bearing disc module 44 to slide on the Y-axis guide rail 431; the rotary bearing disc module 44 is mounted on a Y-axis guide rail 431 through a Y-axis guide rail sliding seat 4311, the Y-axis driving motor 432 is mounted on the output end of the bearing X-axis module 42 through a Y-axis motor mounting seat 4321, and the Y-axis lead screw nut pair 433 is mounted on the output end of the bearing X-axis module 42 through a Y-axis lead screw nut pair mounting seat 4331.
In specific implementation, the chip 9 to be detected is firstly loaded on the rotating loading tray module 44, the rotating loading tray 442 and the chip 9 to be detected are driven to rotate to a proper angle by a loading tray rotating driving device in the rotating loading tray module 44, and the loading X-axis module 42 and the loading Y-axis module 43 respectively adjust the specific positions of the chip 9 to be detected on the rotating loading tray module 44 and the rotating loading tray module 44, so as to cooperate with the detection operation of the detection device. The whole bearing assembly is simple in structure, stable and reliable in performance and high in action efficiency, and detection efficiency is improved, and time cost is saved.
Referring to fig. 16-19 in particular, the camera module 5 includes a camera module bottom adjusting guide rail 51 directly or indirectly fixedly disposed on the frame 1 and a camera module sliding mounting seat 52 mounted on the camera module bottom adjusting guide rail 51, a camera module vertical mounting plate 53 is disposed on the camera module sliding mounting seat 52, a camera module vertical guide rail 54 and a camera module linear bearing 55 are respectively disposed on two sides of the camera module vertical mounting plate 53, a camera module vertical sliding mounting seat 56 is disposed on the camera module vertical guide rail 54, a camera module 57 is fixedly disposed on the camera module linear bearing 55, the camera module 57 includes a CCD camera 571, a lower end portion of the camera module 57 is fixedly connected with the camera module vertical sliding mounting seat 56, a camera module lifting driving cylinder 58 is directly or indirectly mounted on the camera module sliding mounting seat 52, the output end of the camera assembly lifting driving cylinder 58 is connected to the camera assembly vertical sliding mounting seat 56 and can drive the camera assembly vertical sliding mounting seat 56 to slide on the camera assembly vertical guide rail 54 and further drive the camera module 57 to slide on the camera assembly linear bearing 55.
Preferably, a lifting fine-tuning device 59 is arranged on the camera module vertical mounting plate 53, an output end of the lifting fine-tuning device 59 is directly or indirectly fixedly connected to the camera module 57, and the lifting fine-tuning device 59 is fixedly mounted on the camera module vertical mounting plate 53 through a fine-tuning device mounting seat 591; the camera module 57 further comprises a camera light source 572, and the camera light source 572 is arranged at the bottom of the CCD camera 571; a camera module connecting plate 561 is arranged at the bottom of the camera module vertical sliding mounting seat 56, a through hole is formed in the middle of the camera module connecting plate 561, a CCD camera 571 of the camera module 57 penetrates through the through hole of the camera module connecting plate 561, the lower part of the camera module 57 is fixedly connected with the camera module connecting plate 561, and a side reinforcing connecting plate 562 is arranged between the camera module connecting plate 561 and the camera module vertical sliding mounting seat 56; the camera shooting assembly vertical sliding installation seat 56 is installed on the camera shooting assembly vertical guide rail 54 through a camera shooting assembly vertical guide rail seat 541, and the output end of the camera shooting assembly lifting driving cylinder 58 is fixedly connected to the camera shooting assembly vertical sliding installation seat 56 through a camera shooting assembly cylinder connection block 581 and can drive the camera shooting assembly vertical sliding installation seat 56 to slide on the camera shooting assembly vertical guide rail 54; the camera shooting assembly sliding installation seat 52 is an inverted L-shaped installation seat, a bottom sliding seat plate 521 is fixedly arranged at the bottom of the camera shooting assembly sliding installation seat 52, and the bottom sliding seat plate 521 is installed on the camera shooting assembly bottom adjusting guide rail 51 through a camera shooting assembly bottom adjusting guide rail seat 511; the end part of the camera shooting assembly bottom adjusting guide rail 51 is provided with a camera shooting assembly bottom limiting block 512, the side part of the camera shooting assembly bottom adjusting guide rail 51 is provided with a mounting base locking limiting plate 513, and the mounting base locking limiting plate 513 is provided with a locking long groove.
In specific implementation, the specific positions of the setting module 57 and the CCD camera 571 on the camera module 57 are adjusted by the camera module bottom adjusting guide rail 51, the camera module vertical guide rail 54, the camera module linear bearing 55 and the camera module lifting driving cylinder 58 to adapt to different detection positions; further, the position of the CCD camera 571 is finely adjusted by the camera assembly linear bearing 55 and the lifting fine-adjustment device 59, so that the camera precision and the camera effect are good, the detection precision and the detection accuracy are favorably improved, the application flexibility is high, the universality is strong, and the use experience is good.
The invention also provides a contact chip detection method, which comprises the following steps:
adopting a multi-axis chip bearing component 4 to bear the detected chip 9 and moving the detected chip 9 to a preset position;
after the camera shooting assembly 5 is adopted to complete the camera shooting marking of the detected chip 9, the marking information is recorded;
the jacking detection assembly 2 is adopted to move to the bottom of the detected chip 9 and jack the chip detection device 20, the chip detection device 20 is directly contacted with the bottom of the detected chip 9 after being jacked and drives the detected chip 9 to move upwards slightly, two electrodes of the detected chip 9 are contacted with the probe of the probe assembly 3 after moving upwards slightly and are electrically conducted, and the conducted detected chip 9 emits light and is detected by the chip detection device 20 contacted with the detected chip 9.
When the chip detection device is implemented, the chip detection device 20 can be driven to be in direct contact with the detected chip 9 through the jacking detection assembly 2, so that the space or the glass interval between the chip detection device 20 and the detected chip 9 is eliminated, the detection accuracy can be greatly improved, the influence of the surrounding environment on the detection is reduced, and the detection result is better; in addition, the probe assembly 3 can open a space for the camera assembly 5 to shoot the detected chip 9, so that the camera assembly 5 can rapidly complete the camera work of the detected chip 9, the action steps of the whole equipment are fewer, the detection efficiency is improved, the time cost is saved, the structural complexity of the equipment is also reduced, the implementation cost is reduced, the stability of the equipment is higher, and the later maintenance is more convenient.
While the preferred embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (10)

1. A contact chip detection device is characterized in that: including frame (1) and directly or indirectly install jacking determine module (2), probe subassembly (3), multiaxis chip carrier assembly (4) in frame (1), subassembly (5) of making a video recording, multiaxis chip carrier assembly (4) are used for bearing and are detected chip (9), jacking determine module (2) set up in multiaxis chip carrier assembly (4) bottom, and jacking determine module (2) include that chip detection device (20) jacking determine module (2) can drive chip detection device (20) and rise and make on chip detection device (20) and multiaxis chip carrier assembly (4) detected chip (9) contact.
2. The contact chip inspection apparatus according to claim 1, wherein: the jacking detection assembly (2) comprises a detection assembly mounting plate (21) directly or indirectly fixed on the rack (1), a detection assembly horizontal guide rail (221) and a detection assembly horizontal cylinder (222) which are arranged on the detection assembly mounting plate (21), wherein the detection assembly horizontal sliding mounting plate (223) is arranged on the detection assembly guide rail (221), the output end of the detection assembly horizontal cylinder (222) is connected to the detection assembly horizontal sliding mounting plate (223) and can push the detection assembly horizontal sliding mounting plate (223) to slide on the detection assembly horizontal guide rail (221), a detection assembly vertical mounting plate (23) is arranged on the detection assembly horizontal sliding mounting plate (223), a detection assembly vertical guide rail (231), a detection assembly jacking screw nut pair (232) and a detection assembly jacking driving motor (233) are arranged on the detection assembly vertical mounting plate (23), be provided with the vertical sliding mounting seat of determine module (234) on the vertical guide rail of determine module (231), the output of determine module jacking driving motor (233) is connected to the lead screw one end of the vice (232) of determine module jacking screw-nut, the nut of the vice (232) of determine module jacking screw-nut is connected to on the vertical sliding mounting seat of determine module (234), fixed mounting is gone up in the vertical sliding mounting seat of determine module (234) has chip detection device (20).
3. The contact chip inspection apparatus according to claim 2, wherein: the chip detection device (20) is an integrating sphere detection device, and a transparent glass cover (202) is arranged at an upper hole of the integrating sphere detection device;
the detection assembly horizontal cylinder (222) is fixedly arranged at the bottom of the detection assembly mounting plate (21) through a horizontal cylinder mounting seat (2221), and the output end of the detection assembly horizontal cylinder (222) is fixedly connected to the detection assembly horizontal sliding mounting plate (223) through a horizontal cylinder connecting block (2222);
a horizontal sliding limiting block (2231) is arranged at the side part of the horizontal sliding mounting plate (223) of the detection assembly, a horizontal sliding limiting seat (211) matched with the horizontal sliding limiting block (2231) for use is arranged at the bottom part of the detection assembly mounting plate (21), and an elastic limiting rod (212) is arranged on the horizontal sliding limiting seat (211);
the detection assembly jacking driving motor (233) is installed at the bottom of the detection assembly vertical installation plate (23) through a jacking driving motor installation seat (2331), and the output end of the detection assembly jacking driving motor (233) is provided with a detection assembly coupler (236) and is connected to one end of a screw rod of the detection assembly jacking screw nut pair (232) through the detection assembly coupler (236);
a detection assembly jacking sensor (2371) is arranged on the side wall of the detection assembly vertical mounting plate (23), and a detection assembly jacking induction sheet (2372) matched with the detection assembly jacking sensor (2371) is arranged on the detection assembly vertical sliding mounting seat (234);
the detection assembly horizontal sliding installation plate (223) is installed on the detection assembly horizontal guide rail (221) through a detection assembly horizontal sliding seat (2211), and the detection assembly vertical sliding installation seat (234) is installed on the detection assembly vertical guide rail (23) through a detection assembly vertical sliding seat (2311);
and a detection assembly side reinforcing plate (238) is arranged at the side part of the detection assembly vertical mounting plate (23).
4. The contact chip inspection apparatus according to claim 1, wherein: the probe assembly (3) comprises a probe assembly mounting base plate (31) directly or indirectly mounted on a rack (1), an opening and closing sliding guide rail (311) is arranged on the probe assembly mounting base plate (31), a first probe sliding mounting plate (321) and a second probe sliding mounting plate (322) are arranged on the opening and closing sliding guide rail (311), at least one first probe module (33) is arranged on the first probe sliding mounting plate (321), a second probe module (34) with the number matched with that of the first probe module (33) is arranged on the second probe sliding mounting plate (322), a first opening and closing driving cylinder (351) and a second opening and closing driving cylinder (352) are further arranged on the probe assembly mounting base plate (31), the output end of the first opening and closing driving cylinder (351) is connected to the first probe sliding mounting plate (321) and can drive the first probe sliding mounting plate (321) to slide on the opening and closing sliding guide rail (311), the output end of the second opening and closing driving cylinder (352) is connected to the second probe sliding mounting plate (322) and can drive the second probe sliding mounting plate (322) to slide on the opening and closing sliding guide rail (311).
5. The contact chip inspection apparatus according to claim 4, wherein: the probe assembly mounting base plate (31) is provided with a mounting concave position (312), and the opening and closing sliding guide rail (311), the first probe sliding mounting plate (321), the second probe sliding mounting plate (322), the first opening and closing driving cylinder (351) and the second opening and closing driving cylinder (352) are all arranged in the mounting concave position (312);
the two opening and closing sliding guide rails (311) are arranged, and the first probe sliding installation plate (321) and the second probe sliding installation plate (322) are arranged on the two opening and closing sliding guide rails (311) in a crossing manner through an opening and closing sliding guide rail seat (3111);
one end of the first probe sliding mounting plate (321) and one end of the second probe sliding mounting plate (322) are respectively and fixedly provided with a first sliding mounting plate connecting block (3211) and a second sliding mounting plate connecting block (3221), the output end of the first opening and closing driving cylinder (351) is connected to the first sliding mounting plate connecting block (3211) through a first cylinder joint (3511), the output end of the second opening and closing driving cylinder (352) is connected to the second sliding mounting plate connecting block (3221) through a second cylinder joint (3521), the first opening and closing driving cylinder (351) can drive the first probe sliding mounting plate (321) to slide on the opening and closing sliding guide rail (311), and the second opening and closing driving cylinder (352) can drive the second probe sliding mounting plate (322) to slide on the opening and closing sliding guide rail (311) through the second cylinder joint (3521) and the second sliding mounting plate (3221) ) Upward sliding;
the first probe sliding mounting plate (321) and the second probe sliding mounting plate (322) are provided with probe sliding mounting plate notches for the probes of the first probe module (33) and the second probe module (34) to pass through, and the probe assembly mounting base plate (31) is provided with a base plate notch matched with the probe sliding mounting plate notch;
the first probe sliding mounting plate (321) is provided with a first semicircular notch on one side of the first probe sliding mounting plate (321) close to the second probe sliding mounting plate (322), the second probe sliding mounting plate (322) is provided with a second semicircular notch on one side of the second probe sliding mounting plate (321), the first probe sliding mounting plate (321) and the second probe sliding mounting plate (322) are close to the closed back, the first semicircular notch and the second semicircular notch jointly form a probe sliding mounting plate circular notch, the circle center of the probe sliding mounting plate circular notch is positioned at the closed line of the first probe sliding mounting plate (321) and the second probe sliding mounting plate (322), the first probe modules (33) are uniformly distributed around the first semicircular notch, the second probe modules (34) are uniformly distributed around the second semicircular notch, the probe assembly mounting base plate (31) is provided with a base plate circular notch with the position matched with the probe sliding mounting plate circular notch, the size of the circular gap of the bottom plate is larger than or equal to that of the circular gap of the probe sliding mounting plate;
the first probe module (33) comprises a probe mounting base plate (331) arranged on a first probe sliding mounting plate (321), a probe X-axis linear bearing (332) is arranged on the probe mounting base plate (331), a probe Y-axis linear bearing (333) is arranged on the probe X-axis linear bearing (332), a probe middle mounting plate (334) is arranged on the Y-axis linear bearing (333), a probe Z-axis linear bearing (335) is arranged on the side of the probe middle mounting plate (334), a probe mounting plate (336) is arranged on the side of the probe Z-axis linear bearing (335), and a chip probe (337) is arranged on the probe mounting plate (336); the probe X-axis linear bearing (332), the probe Y-axis linear bearing (333) and the probe Z-axis linear bearing (335) are respectively provided with a probe X-axis adjusting button (3321), a probe Y-axis adjusting button (3331) and a probe Z-axis adjusting button (3351), and the structure of the second probe module (34) is the same as that of the first probe module (33).
6. The contact chip inspection apparatus according to claim 1, wherein: the multi-axis chip bearing component (4) comprises a bearing component bottom plate (41) directly or indirectly fixed on the rack (1) and a bearing X-axis module (42) arranged on the bearing component bottom plate (41), wherein a bearing Y-axis module (43) capable of moving along the X-axis direction is arranged at the output end of the bearing X-axis module (42), a rotating bearing disc module (44) capable of moving along the Y-axis direction is arranged at the output end of the bearing Y-axis module (43), and a chip product to be detected is borne on the rotating bearing disc module (44).
7. The contact chip inspection apparatus according to claim 6, wherein: the rotary bearing disc module (44) comprises a bearing disc frame (441), a rotary bearing is arranged at the central position of the bearing disc frame (441), a rotary bearing disc (442) is arranged on a movable ring of the rotary bearing, a bearing disc rotary driving device is also arranged on the bearing disc frame (441), and the bearing disc rotary driving device can drive the rotary bearing disc (442) to rotate and further drive the chips to be detected on the rotary bearing disc (442) to rotate;
the bearing disc rotary driving device comprises a rotary driving motor (443), a first synchronous pulley (444) and a second synchronous pulley (445) which are fixedly mounted on a bearing disc frame (441), a driving synchronous pulley is arranged at the output end of the rotary driving motor (443), a rotary driving synchronous belt (446) is wound between the driving synchronous pulley and the first synchronous pulley (444) and between the driving synchronous pulley and the second synchronous pulley (445), the rotary driving synchronous belt (446) is positioned between the first synchronous pulley (444) and the second synchronous pulley (445), and part of the outer wall surface of the rotary driving synchronous belt (443) is directly or indirectly in friction contact with the outer wall surface of the rotary bearing disc (442), and the rotary driving motor (443) can drive the rotary bearing disc (442) to rotate through the driving synchronous pulley, the first synchronous pulley (444), the second synchronous pulley (445) and the rotary driving synchronous belt (446);
a synchronous belt guide wheel (447) for guiding the rotary driving synchronous belt (446) is arranged on the bearing disc frame (441), and the synchronous belt guide wheel (447) is mounted on the bearing disc frame (441) through a guide wheel mounting seat (448); a rotary sensor (4491) is arranged on the bearing disc frame (441), and a rotary sensing sheet (4492) matched with the rotary sensor (4491) is directly or indirectly fixedly arranged at the side part of the rotary bearing disc (442); the bearing plate frame (441) comprises a frame bottom shell and a frame upper shell;
the bearing X-axis module (42) comprises an X-axis guide rail (421), an X-axis driving motor (422) and an X-axis screw nut pair (423), wherein the X-axis guide rail (421) is fixedly mounted on a bearing component bottom plate (41), an X-axis sliding mounting plate (424) is arranged on the X-axis guide rail (421), the output end of the X-axis driving motor (422) is connected to one end of a screw rod of the X-axis screw nut pair (423) through an X-axis coupler (425), and a nut of the X-axis screw nut pair (423) is connected to the X-axis sliding mounting plate (424) and can drive the X-axis sliding mounting plate (424) to slide on the X-axis guide rail (421);
the X-axis sliding mounting plate (424) is mounted on an X-axis guide rail (421) through an X-axis guide rail sliding seat (4211), the X-axis driving motor (422) is mounted on a bearing component bottom plate (41) through an X-axis motor mounting seat (4221), and the X-axis screw rod nut pair (423) is mounted on the bearing component bottom plate (41) through an X-axis screw rod nut pair mounting seat (4231);
the bearing Y-axis module (43) comprises a Y-axis guide rail (431), a Y-axis driving motor (432) and a Y-axis lead screw nut pair (433), the Y-axis guide rail (431), the Y-axis driving motor (432) and the Y-axis lead screw nut pair (433) are fixedly installed at the output end of the bearing X-axis module (42), the rotating bearing disc module (44) is arranged on the Y-axis guide rail (431), the output end of the Y-axis driving motor (432) is connected to one end of a lead screw of the Y-axis lead screw nut pair (433) through a Y-axis coupler (435), and a nut of the Y-axis lead screw nut pair (433) is connected to the rotating bearing disc module (44) and can drive the rotating bearing disc module (44) to;
rotatory bear set of module (44) and install on Y axle guide rail (431) through Y axle guide rail slide (4311), Y axle driving motor (432) are installed on the output that bears X axle module (42) through Y axle motor mount pad (4321), the vice mount pad (4331) of Y axle lead screw nut (433) are installed on the output that bears X axle module (42) through the vice mount pad of Y axle lead screw nut (4331).
8. The contact chip inspection apparatus according to claim 1, wherein: the camera shooting assembly (5) comprises a camera shooting assembly bottom adjusting guide rail (51) directly or indirectly fixedly arranged on the rack (1) and a camera shooting assembly sliding installation seat (52) arranged on the camera shooting assembly bottom adjusting guide rail (51), a camera shooting assembly vertical installation plate (53) is arranged on the camera shooting assembly sliding installation seat (52), a camera shooting assembly vertical guide rail (54) and a camera shooting assembly linear bearing (55) are respectively arranged on two sides of the camera shooting assembly vertical installation plate (53), a camera shooting assembly vertical sliding installation seat (56) is arranged on the camera shooting assembly vertical guide rail (54), a camera shooting module (57) is fixedly arranged on the camera shooting assembly linear bearing (55), the camera shooting module (57) comprises a CCD camera (571), and the lower end part of the camera shooting module (57) is fixedly connected with the camera shooting assembly vertical sliding installation seat (56), the camera shooting assembly lifting driving cylinder (58) is directly or indirectly installed on the camera shooting assembly sliding installation seat (52), the output end of the camera shooting assembly lifting driving cylinder (58) is connected to the camera shooting assembly vertical sliding installation seat (56) and can drive the camera shooting assembly vertical sliding installation seat (56) to slide on the camera shooting assembly vertical guide rail (54) and further drive the camera shooting module (57) to slide on the camera shooting assembly linear bearing (55).
9. The contact chip inspection apparatus of claim 8, wherein: the camera shooting assembly vertical mounting plate (53) is provided with a lifting fine adjustment device (59), the output end of the lifting fine adjustment device (59) is directly or indirectly fixedly connected to the camera shooting module (57), and the lifting fine adjustment device (59) is fixedly mounted on the camera shooting assembly vertical mounting plate (53) through a fine adjustment device mounting seat (591);
the camera module (57) further comprises a camera light source (572), and the camera light source (572) is arranged at the bottom of the CCD camera (571);
a camera module connecting plate (561) is arranged at the bottom of the camera module vertical sliding mounting seat (56), a through hole is formed in the middle of the camera module connecting plate (561), a CCD camera (571) of the camera module (57) penetrates through the through hole of the camera module connecting plate (561), the lower part of the camera module (57) is fixedly connected with the camera module connecting plate (561), and a side reinforcing connecting plate (562) is arranged between the camera module connecting plate (561) and the camera module vertical sliding mounting seat (56);
the camera shooting assembly vertical sliding installation seat (56) is installed on a camera shooting assembly vertical guide rail (54) through a camera shooting assembly vertical guide rail seat (541), and the output end of the camera shooting assembly lifting driving cylinder (58) is fixedly connected to the camera shooting assembly vertical sliding installation seat (56) through a camera shooting assembly cylinder connection block (581) and can drive the camera shooting assembly vertical sliding installation seat (56) to slide on the camera shooting assembly vertical guide rail (54);
the camera shooting assembly sliding installation seat (52) is an inverted L-shaped installation seat, a bottom sliding seat plate (521) is fixedly arranged at the bottom of the camera shooting assembly sliding installation seat (52), and the bottom sliding seat plate (521) is installed on a camera shooting assembly bottom adjusting guide rail (51) through a camera shooting assembly bottom adjusting guide rail seat (511);
the camera shooting assembly bottom adjusting guide rail (51) is provided with a camera shooting assembly bottom limiting block (512) at the end part, a mounting seat locking limiting plate (513) is arranged at the side part of the camera shooting assembly bottom adjusting guide rail (51), and a locking long groove is formed in the mounting seat locking limiting plate (513).
10. A contact chip detection method is characterized in that:
a multi-axis chip bearing component (4) is adopted to bear the detected chip (9) and move the detected chip (9) to a preset position;
after the camera shooting component (5) is adopted to complete the camera shooting marking of the detected chip (9), the marking information is recorded;
the jacking detection assembly (2) is adopted to move to the bottom of the detected chip (9) and jack the chip detection device (20), the chip detection device (20) is directly contacted with the bottom of the detected chip (9) after being jacked and drives the detected chip (9) to move upwards slightly, two electrodes of the detected chip (9) are contacted with a probe of the probe assembly (3) and are electrically conducted after moving upwards slightly, and the conducted detected chip (9) emits light and is detected by the chip detection device (20) contacted with the detected chip (9).
CN201911216429.3A 2019-12-02 2019-12-02 Contact type chip detection equipment and method Pending CN110927557A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201911216429.3A CN110927557A (en) 2019-12-02 2019-12-02 Contact type chip detection equipment and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201911216429.3A CN110927557A (en) 2019-12-02 2019-12-02 Contact type chip detection equipment and method

Publications (1)

Publication Number Publication Date
CN110927557A true CN110927557A (en) 2020-03-27

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ID=69847163

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201911216429.3A Pending CN110927557A (en) 2019-12-02 2019-12-02 Contact type chip detection equipment and method

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Country Link
CN (1) CN110927557A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111413576A (en) * 2020-04-14 2020-07-14 江苏量为石科技股份有限公司 Detection apparatus for distribution equipment for distribution network of low-voltage line equipment
CN112687563A (en) * 2020-12-09 2021-04-20 深圳市盛世智能装备有限公司 Chip detection equipment
CN112904186A (en) * 2021-03-31 2021-06-04 深圳市泰克光电科技有限公司 Lifting type chip detection equipment and method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111413576A (en) * 2020-04-14 2020-07-14 江苏量为石科技股份有限公司 Detection apparatus for distribution equipment for distribution network of low-voltage line equipment
CN111413576B (en) * 2020-04-14 2023-08-15 江苏量为石科技股份有限公司 Detection device of distribution equipment for low-voltage line equipment distribution network
CN112687563A (en) * 2020-12-09 2021-04-20 深圳市盛世智能装备有限公司 Chip detection equipment
CN112904186A (en) * 2021-03-31 2021-06-04 深圳市泰克光电科技有限公司 Lifting type chip detection equipment and method

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