CN110919172A - Roller surface microstructure manufacturing equipment, system and method - Google Patents
Roller surface microstructure manufacturing equipment, system and method Download PDFInfo
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- CN110919172A CN110919172A CN201911370306.5A CN201911370306A CN110919172A CN 110919172 A CN110919172 A CN 110919172A CN 201911370306 A CN201911370306 A CN 201911370306A CN 110919172 A CN110919172 A CN 110919172A
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- roller
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The application discloses a roller surface microstructure manufacturing device, which comprises a laser, a processing unit and a control unit, wherein the laser is used for emitting laser beams; the laser direct writing device is used for adjusting laser beams to obtain adjusting beams distributed at a straight edge and a flat top; the focusing lens is used for focusing the adjusting light beam to obtain a focusing light beam for engraving the microstructure; and the controller is used for adjusting the distance between the focusing lens and the surface of the roller with the microstructure to be engraved to be the focal length value of the focusing lens. The utility model provides an equipment uses the focus beam to carve the micro-structure when carving to the cylinder surface, uses the laser beam after the focus to replace diamond cutter, and the light beam can work for a long time, reduces the manufacturing cost of micro-structure to focus the defect that wearing and tearing can not appear in the light beam, can guarantee the uniformity of micro-structure shape, and simultaneously, focus the facula size of light beam can be less than 1 micron, consequently can carve more meticulous micro-structure. The application also provides a roller surface microstructure manufacturing system and method with the advantages.
Description
Technical Field
The present application relates to the field of lithography, and in particular, to an apparatus, a system, and a method for manufacturing a microstructure on a surface of a roller.
Background
The optical film is widely applied to the fields of liquid crystal display equipment, energy collection photovoltaic systems, traffic warning, naked eye 3D and the like, and the surface of the optical film is provided with a large number of microstructures. The microstructure is a surface with a micro topological shape with a specific function, the characteristic dimension of the microstructure is generally not more than millimeter, the surface shape precision can reach submicron level, and the surface roughness can reach nanometer level at most.
A large number of micro-nano structures are engraved on the surface of the roller, and the processing difficulty of a large-size and high-precision roller die is very high. The commonly used processing means is to process a roller die with a surface meeting the quality requirement by a single-point diamond lathe tool on an ultra-precise lathe, and has the following defects: because the cutting time and the cutting internal length are long, the cutting edge of a sharp diamond cutter is gradually abraded, so that the depth of a microstructure is inconsistent, the shape of the microstructure is irregular, burrs at the top of a groove and plastic deformation, surface roughness deterioration and the like are easily generated, and the optical performance of a copied membrane is greatly influenced; in order to ensure the shape of the groove, the diamond cutter is required to have a very sharp and sharp tool tip, and the manufacturing cost of the roller die is greatly increased due to the high requirement on the sharpening precision of the diamond cutter; because the diamond cutter needs to keep certain structural rigidity, the sharpening of the tool nose has certain limit, and the radius of a sharp-corner arc is generally not less than 2 microns, so that the processing of a micro structure below 2 microns is limited.
Therefore, how to solve the above technical problems should be a great concern to those skilled in the art.
Disclosure of Invention
The application aims to provide a roller surface microstructure manufacturing device, a roller surface microstructure manufacturing system and a roller surface microstructure manufacturing method, so that the microstructure on the surface of a roller has high consistency, the size of the microstructure is reduced, and meanwhile, the manufacturing cost of the microstructure is reduced.
In order to solve the above technical problem, the present application provides a roller surface microstructure manufacturing apparatus, including:
a laser for emitting a laser beam;
the laser direct writing device is used for adjusting the laser beam to obtain an adjusting beam with a straight edge and a flat top;
the focusing lens is used for focusing the adjusting light beam to obtain a focusing light beam for engraving the microstructure;
and the controller is used for adjusting the distance between the focusing lens and the surface of the roller with the microstructure to be engraved to be the focal length value of the focusing lens and controlling the laser direct writing device to obtain the adjusted light beam.
Optionally, the method further includes:
the air compression device is used for compressing air to generate compressed air;
correspondingly, a through hole is formed in the center of the focusing lens and serves as an outlet of the compressed air;
correspondingly, the controller is used for adjusting the distance between the focusing lens and the surface of the roller on which the microstructure is to be engraved according to the pressure of compressed air at the through hole.
Optionally, the method further includes:
and the light path adjusting component is used for adjusting the direction of the adjusting light beam so as to enable the adjusting light beam to enter the focusing lens.
Optionally, the optical path adjusting component is a mirror.
Optionally, the laser direct writing device includes a direct writing light path unit, a focus detection light path unit, a light beam shaping and correcting light path unit, and a direct writing graph effect detection light path unit.
The application also provides a roller surface microstructure manufacturing system, which comprises a roller with a surface to-be-engraved microstructure and any one of the roller surface microstructure manufacturing devices, wherein the surface is coated with photoresist.
The application also provides a roller surface microstructure manufacturing method, which comprises the following steps:
acquiring a distance adjusting instruction, and adjusting the distance between a focusing lens and the surface of a roller with a microstructure to be engraved to be the focal length value of the focusing lens according to the distance adjusting instruction, wherein the surface is coated with photoresist;
the laser emits a laser beam;
acquiring a beam adjustment instruction, and controlling a laser direct writing device to adjust the laser beam according to the beam adjustment instruction so as to obtain an adjustment beam with a straight edge and a flat top;
and the focusing lens focuses the adjusting light beam to obtain a focused light beam, so that the focused light beam performs photoetching on the surface to obtain the photoetching roller with the microstructure on the surface.
Optionally, after obtaining the post-lithography roller with the surface having the microstructure, the method further includes:
and manufacturing a metal layer on the surface of the roller after photoetching.
Optionally, the step of manufacturing a metal layer on the surface of the roller after the photolithography includes:
and manufacturing a metal layer on the surface of the roller after photoetching by adopting an electroplating method.
Optionally, the metal layer is a nickel metal layer or a copper metal layer.
The application provides a roller surface microstructure makes equipment includes: a laser for emitting a laser beam; the laser direct writing device is used for adjusting the laser beam to obtain an adjusting beam with a straight edge and a flat top; the focusing lens is used for focusing the adjusting light beam to obtain a focusing light beam for engraving the microstructure; and the controller is used for adjusting the distance between the focusing lens and the surface of the roller on which the microstructure is to be engraved to be the focal length value of the focusing lens.
Therefore, when the roller surface microstructure manufacturing equipment provided by the application is used for engraving a microstructure on the roller surface, a focused light beam is used for engraving the microstructure, namely a focused laser beam replaces a diamond cutter, the light beam can work at normal time, the manufacturing cost of the roller surface microstructure is greatly reduced, the focused light beam cannot have the defect of abrasion, the consistency of the shape of the microstructure can be ensured, and meanwhile, the size of a light spot of the focused light beam can be smaller than 1 micrometer, so that a more fine microstructure can be engraved. In addition, the application also provides a roller surface microstructure manufacturing system and a roller surface microstructure manufacturing method with the advantages.
Drawings
For a clearer explanation of the embodiments or technical solutions of the prior art of the present application, the drawings needed for the description of the embodiments or prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of an apparatus for manufacturing a microstructure on a surface of a roller according to an embodiment of the present disclosure;
FIG. 2 is a flow chart of a method for fabricating a microstructure on a surface of a roller according to an embodiment of the present disclosure;
in the figure, 1, a laser, 2, a laser direct writing device, 3, a focusing lens, 4, a controller, 5, a reflecting mirror, 6, a roller, 7, the moving direction of the roller and 8, the rotation direction of the roller.
Detailed Description
In order that those skilled in the art will better understand the disclosure, the following detailed description will be given with reference to the accompanying drawings. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced in other ways than those specifically described and will be readily apparent to those of ordinary skill in the art without departing from the spirit of the present invention, and therefore the present invention is not limited to the specific embodiments disclosed below.
Referring to fig. 1, fig. 1 is a schematic structural diagram of an apparatus for manufacturing a surface microstructure of a roller according to an embodiment of the present disclosure, the apparatus including:
a laser 1 for emitting a laser beam;
the laser direct writing device 2 is used for adjusting the laser beam to obtain an adjusted beam with a straight edge and a flat top;
the focusing lens 3 is used for focusing the adjusting light beam to obtain a focusing light beam for engraving the microstructure;
and the controller 4 is used for adjusting the distance between the focusing lens 3 and the surface of the roller 6 on which the microstructure is to be engraved to be the focal length value of the focusing lens 3, and controlling the laser direct writing device 2 to obtain the adjusted light beam.
It should be noted that, in this embodiment, the control method for the laser beam emitted by the laser 1 is not particularly limited, and may be controlled by the controller 4 or may be controlled by a manual switch.
It should be noted that the laser 1 by default emits a laser beam having a gaussian energy distribution.
Specifically, the laser direct writing device 2 includes a direct writing light path unit, a focus detection light path unit, a light beam shaping and correcting light path unit, and a direct writing graph effect detection light path unit. The direct-writing optical path unit mainly adjusts the minimum photoetching resolution and the photoetching efficiency; the focus detection light path unit is used for positioning the minimum focus point formed by the direct writing light path unit on an exposure plane; the beam shaping and correcting light path unit is used for shaping the Gaussian laser spots into focal spots with energy distribution of straight sides and flat tops. Because the surface flatness of the roller 6 is difficult to ensure to be high, and the correction of a focusing light spot of the direct-writing light path unit is small, the focus detection light path unit needs to carry out quick focus detection and focus adjustment before each photoetching.
It should be noted that specific optical paths in the four optical path units, i.e., the direct-writing optical path unit, the focus detection optical path unit, the beam shaping and correcting optical path unit, and the direct-writing graphic effect detection optical path unit, are well known to those skilled in the art, and are consistent with the above four optical path units included in the conventional lithography machine, and will not be described in detail herein.
Further, the controller 4 is also used for controlling the roller 6 to rotate according to a set rotation direction 8 and to move in a set movement direction 7 according to the arrangement of the microstructures to be engraved on the surface of the roller 6, so as to complete the photoetching of the microstructures on the surface of the roller 6.
The purpose of controlling the distance between the focusing lens 3 and the surface of the roller 6 with the microstructure to be etched to be the focal length value of the focusing lens 3 in this embodiment is to enlarge the focal point irradiated on the surface of the roller 6 if the distance is changed, which is equivalent to the change of the focal point position, and thus the lithography precision is affected.
Optionally, the roller surface microstructure manufacturing apparatus further includes:
and an optical path adjusting member 5 for adjusting the direction of the adjustment light beam so that the adjustment light beam is incident on the focusing lens 3.
Preferably, the optical path adjusting member 5 is a mirror.
When the roller surface microstructure manufacturing equipment in the embodiment carves the surface of the roller 6, the microstructure is carved by using the focused light beam, namely, a diamond cutter is replaced by the focused laser beam, the focused light beam is not abraded and can work at normal time, the manufacturing cost of the roller 6 surface microstructure is greatly reduced, the microstructures with consistent shapes and without generating defects such as groove top burrs, plastic deformation and the like can be obtained, and meanwhile, the size of a light spot of the focused light beam can be very small and is smaller than 1 micrometer, so that a more fine microstructure can be carved.
Preferably, in an embodiment of the present application, the roller surface microstructure manufacturing apparatus further includes:
the air compression device is used for compressing air to generate compressed air;
correspondingly, a through hole is arranged in the center of the focusing lens 3 and serves as an outlet of the compressed air;
correspondingly, the controller 4 is used for adjusting the distance between the focusing lens 3 and the surface of the roller 6 of the microstructure to be engraved according to the pressure of the compressed air at the through hole.
Specifically, the focusing lens 3 is connected with a pipeline in an air compression device, and the air pressure of compressed air sprayed from the through hole changes along with the change of the distance between the focusing lens 3 and the surface of the roller 6, so that the distance between the focusing lens 3 and the roller 6 is determined.
It is understood that the pressure of the compressed air ejected from the through hole may be measured by a pressure sensor.
The application also provides a roller surface microstructure manufacturing system, which comprises a roller with a surface to-be-engraved microstructure and any one of the roller surface microstructure manufacturing devices, wherein the surface is coated with photoresist.
The present application further provides a method for manufacturing a surface microstructure of a roller, please refer to fig. 2, the method includes:
step S101: and acquiring a distance adjusting instruction, and adjusting the distance between a focusing lens and the surface of the roller with the microstructure to be engraved to be the focal length value of the focusing lens according to the distance adjusting instruction, wherein the surface is coated with photoresist.
The surface of the roller is a cylindrical surface, and the photoresist is coated on the surface of the roller by adopting a pulling method, namely, the cylindrical roller is vertically placed at first and slowly immersed into the photoresist solution, then the cylindrical roller is vertically lifted at a constant speed, and after a solvent in the photoresist solution left on the surface of the roller is volatilized, a photoresist film layer with the thickness of hundreds of nanometers to tens of micrometers is formed on the surface of the roller.
Step S102: the laser emits a laser beam.
It should be noted that the laser emits a laser beam with a gaussian energy distribution by default.
Step S103: and acquiring a beam adjusting instruction, and controlling a laser direct writing device to adjust the laser beam according to the beam adjusting instruction so as to obtain an adjusting beam with a straight edge and a flat top.
Specifically, the laser direct writing device includes a direct writing light path unit, a focus detection light path unit, a light beam shaping and correcting light path unit, and a direct writing pattern effect detection light path unit, and specific light path structures of these four light path units are well known to those skilled in the art, and are consistent with the above four light path units included in the conventional lithography machine, and are not described in detail here.
Step S104: and the focusing lens focuses the adjusting light beam to obtain a focused light beam, so that the focused light beam performs photoetching on the surface to obtain the photoetching roller with the microstructure on the surface.
It should be noted that, in the process of engraving the microstructure, the controller further controls the roller to rotate in the set rotation direction and move in the set movement direction according to the arrangement condition of the engraved microstructure, so as to complete the photolithography of the microstructure on the surface of the roller.
It should be noted that, because it is difficult to ensure high flatness of the roller surface and the correction of the focused light spot of the direct-writing optical path unit is small, the focus detection optical path unit should perform fast focus detection and focus adjustment before each photolithography.
In the method for manufacturing the roller surface microstructure in the embodiment, when the roller surface is engraved, the microstructure is engraved by using the focused light beam, namely, the focused laser beam replaces a diamond cutter, the focused light beam is not abraded, the roller surface microstructure can work for a long time, the manufacturing cost of the roller surface microstructure is greatly reduced, the microstructures with consistent shapes and without generating defects such as groove top burrs, plastic deformation and the like can be obtained, and meanwhile, the size of a light spot of the focused light beam can be very small and smaller than 1 micrometer, so that a finer microstructure can be engraved
Preferably, after the obtaining of the post-lithography roller with the surface having the microstructure, the method further includes:
and manufacturing a metal layer on the surface of the roller after photoetching. Because the strength and the hardness of the metal layer are far higher than those of the photoresist, the chemical property is stable, the quality of the microstructure can be kept for a long time, and the service life of the roller die is prolonged.
Optionally, a metal layer is manufactured on the surface of the roller after photoetching by adopting an electroplating method.
It should be noted that, in the present embodiment, the type of the metal layer is not specifically limited, and may be determined as the case may be. For example, the metal layer is a nickel metal layer or a copper metal layer.
The embodiments are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same or similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The detailed description is given above to the device and method for manufacturing the roller surface microstructure provided by the present application. The principles and embodiments of the present application are explained herein using specific examples, which are provided only to help understand the method and the core idea of the present application. It should be noted that, for those skilled in the art, it is possible to make several improvements and modifications to the present application without departing from the principle of the present application, and such improvements and modifications also fall within the scope of the claims of the present application.
Claims (10)
1. An apparatus for making a microstructure on a surface of a roller, comprising:
a laser for emitting a laser beam;
the laser direct writing device is used for adjusting the laser beam to obtain an adjusting beam with a straight edge and a flat top;
the focusing lens is used for focusing the adjusting light beam to obtain a focusing light beam for engraving the microstructure;
and the controller is used for adjusting the distance between the focusing lens and the surface of the roller with the microstructure to be engraved to be the focal length value of the focusing lens and controlling the laser direct writing device to obtain the adjusted light beam.
2. The apparatus for making microstructures on the surface of a roll according to claim 1, further comprising:
the air compression device is used for compressing air to generate compressed air;
correspondingly, a through hole is formed in the center of the focusing lens and serves as an outlet of the compressed air;
correspondingly, the controller is used for adjusting the distance between the focusing lens and the surface of the roller on which the microstructure is to be engraved according to the pressure of compressed air at the through hole.
3. The apparatus for making microstructures on the surface of a roll according to claim 1, further comprising:
and the light path adjusting component is used for adjusting the direction of the adjusting light beam so as to enable the adjusting light beam to enter the focusing lens.
4. The apparatus for making microstructures on the surface of a roller according to claim 3, wherein the light path adjusting member is a mirror.
5. The apparatus for making microstructures on the surface of a roller according to claim 1, wherein the laser direct writing device comprises a direct writing light path unit, a focus detection light path unit, a beam shaping and correcting light path unit, and a direct writing pattern effect detection light path unit.
6. A roller surface microstructure manufacturing system is characterized by comprising a roller with a surface to be micro-structured and the roller surface microstructure manufacturing equipment as claimed in any one of claims 1 to 5, wherein the surface is coated with photoresist.
7. A method for manufacturing a roller surface microstructure is characterized by comprising the following steps:
acquiring a distance adjusting instruction, and adjusting the distance between a focusing lens and the surface of a roller with a microstructure to be engraved to be the focal length value of the focusing lens according to the distance adjusting instruction, wherein the surface is coated with photoresist;
the laser emits a laser beam;
acquiring a beam adjustment instruction, and controlling a laser direct writing device to adjust the laser beam according to the beam adjustment instruction so as to obtain an adjustment beam with a straight edge and a flat top;
and the focusing lens focuses the adjusting light beam to obtain a focused light beam, so that the focused light beam performs photoetching on the surface to obtain the photoetching roller with the microstructure on the surface.
8. The method for manufacturing a microstructure on a surface of a roller according to claim 7, wherein after the step of obtaining the post-lithography roller having the microstructure on the surface, the method further comprises the following steps:
and manufacturing a metal layer on the surface of the roller after photoetching.
9. The method for manufacturing the roller surface microstructure according to claim 8, wherein the step of manufacturing the metal layer on the surface of the roller after photoetching comprises the following steps:
and manufacturing a metal layer on the surface of the roller after photoetching by adopting an electroplating method.
10. The method for manufacturing a roller surface microstructure according to claim 9, wherein the metal layer is a nickel metal layer or a copper metal layer.
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| CN201911370306.5A CN110919172B (en) | 2019-12-26 | 2019-12-26 | Roller surface microstructure manufacturing equipment, system and method |
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| CN201911370306.5A CN110919172B (en) | 2019-12-26 | 2019-12-26 | Roller surface microstructure manufacturing equipment, system and method |
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| CN110919172A true CN110919172A (en) | 2020-03-27 |
| CN110919172B CN110919172B (en) | 2021-04-02 |
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