CN110917731A - Environment-friendly ash removal device for deeply cleaning filter cylinder and use method - Google Patents
Environment-friendly ash removal device for deeply cleaning filter cylinder and use method Download PDFInfo
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- CN110917731A CN110917731A CN201911410663.XA CN201911410663A CN110917731A CN 110917731 A CN110917731 A CN 110917731A CN 201911410663 A CN201911410663 A CN 201911410663A CN 110917731 A CN110917731 A CN 110917731A
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- jacking
- box body
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- assembly
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D41/00—Regeneration of the filtering material or filter elements outside the filter for liquid or gaseous fluids
- B01D41/04—Regeneration of the filtering material or filter elements outside the filter for liquid or gaseous fluids of rigid self-supporting filtering material
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
- Y02A50/2351—Atmospheric particulate matter [PM], e.g. carbon smoke microparticles, smog, aerosol particles, dust
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Abstract
The invention provides an environment-friendly ash removal device for deeply cleaning a filter cylinder, which comprises a box body, an electrical cabinet, a rotary clamping assembly and a jacking assembly, wherein the box body is provided with a plurality of vertical through holes; the rotary clamping component and the jacking component are arranged oppositely up and down to fix the filter cylinder; the electric cabinet is in signal connection with the rotary clamping assembly and the jacking assembly; wherein, the box body is provided with an access door; the electrical cabinet is fixed on the box body; the rotary clamping assembly comprises a gear reduction motor and a clamp; the jacking assembly comprises a cylinder, a cylinder bearing, a jacking supporting plate, a jacking component and a jacking shaft. According to the invention, in the closed space of the box body, the filter cylinder is clamped on the rotary clamping component through the electrical cabinet, the jacking component and the rotary clamping component, then the rotary clamping component drives the filter cylinder to rotate, dust is centrifugally thrown out, the purpose of deep cleaning is realized, and meanwhile, the dust raising phenomenon caused by dust cleaning is avoided. The invention also provides a use method of the environment-friendly ash removal device for deeply cleaning the filter cylinder.
Description
Technical Field
The invention belongs to the technical field of dust removal, and particularly relates to an environment-friendly ash removal device for deeply cleaning a filter cylinder and a using method thereof.
Background
In the existing dust removal technology in the field of dust removal, a filter cylinder is arranged on a dust remover for cleaning, the adopted mode is pulse cleaning or mechanical rapping, and the working principle of the two modes is that reverse acting force is applied from the inside of the filter cylinder to realize dust removal. However, when the adhesion of the dust is strong, or the dust is deep in the folding groove, or the filter cylinder reaches the service life and the inside is completely blocked, the pulse cleaning or the mechanical rapping cannot be effectively cleaned due to the limitation of indirect force application.
In the prior art, the filter cartridge is usually violently mechanically knocked by manpower or is cleaned by compressed air blowing for a long time, which is labor-consuming and laborious, and secondary pollution is caused to the environment by the dust generated during cleaning.
Disclosure of Invention
The invention aims to provide an environment-friendly ash removal device for deeply cleaning a filter cylinder and a using method thereof, which can deeply clean the filter cylinder and simultaneously avoid the dust flying phenomenon caused by ash removal. In order to achieve the purpose, the invention adopts the following technical scheme:
an environment-friendly ash removal device for deeply cleaning a filter cylinder comprises a box body, an electrical cabinet, a rotary clamping assembly and a jacking assembly; the rotary clamping component and the jacking component are arranged oppositely up and down to fix the filter cylinder; the electric cabinet is in signal connection with the rotary clamping assembly and the jacking assembly;
wherein, an access door for placing the filter cylinder is arranged on the box body; the electrical cabinet is fixed on the box body;
the rotary clamping assembly comprises a gear reduction motor and a clamp; the gear reduction motor is fixed on the box body; the output end of the gear reduction motor is in transmission connection with the clamp; the clamp is positioned in the box body;
the jacking assembly comprises a cylinder, a cylinder bearing, a jacking support plate, a jacking component and a jacking shaft; the jacking bearing, the jacking support plate, the jacking component and the jacking shaft are all positioned in the box body;
the cylinder bearing is fixed on the box body; a cylinder rod of the cylinder is matched with the cylinder bearing and extends into the box body; the jacking support plate is fixedly connected with the cylinder rod; the jacking bearing is fixed on the jacking supporting plate; the jacking shaft is matched with the jacking bearing; the jacking component is fixed on the jacking shaft.
Preferably, the jacking component is a tip cone; the small end of the tip cone extends into the filter cartridge.
Preferably, the clamp is a four-jaw chuck.
Preferably, the bottom of the box body is provided with a dust outlet; the dust outlet is externally connected with a dust collecting component.
Preferably, the dust collection assembly comprises a dust collection barrel, a flat filter element and a foot pad; the dust collection barrel is fixed on the dust collection opening; the flat filter element is clamped in the dust collection barrel; the bottom of the flat filter element is clamped with the pad.
Preferably, the dust collecting barrel is provided with a dust collecting opening; the dust suction port is lower than the flat filter element; the dust absorption mouth is external a fan.
Preferably, further comprises a blowing assembly; the blowing component comprises a blowing barrel, an air pipe joint, a nozzle and a drain valve;
the air pipe joint is arranged on the blowing barrel and communicated with the blowing barrel; one end of the injection cylinder extends into and is clamped on the box body;
the nozzle is positioned in the box body and is in threaded connection with a section of the jetting cylinder body extending into the box body;
the drain valve is arranged on an external pipeline of the injection cylinder.
Preferably, the device further comprises a deflector rod component; the shifting rod assembly comprises an elastic component, a shifting rod, a knob, a mounting nut and a locking nut;
the mounting nut is fixed on the outer wall of the box body; the deflector rod is matched with the mounting nut and extends into the box body;
the section of the shifting rod extending into the box body is a polished rod and is sleeved with the elastic component; one end of the deflector rod extending out of the box body is provided with a knob;
the deflector rod extends out of one section of the box body and is in threaded connection with the locking nut;
and when the knob is rotated, the elastic part can be in contact with the filter cylinder, and the locking nut is rotated to be attached to the mounting nut so as to lock the shifting rod.
Preferably, further comprises a rising foot switch and a falling foot switch; the ascending foot switch and the descending foot switch are in signal connection with the electrical cabinet.
Preferably, the gear reduction motor comprises a reduction motor and a gear transmission assembly; the input end of the gear transmission assembly is connected with the speed reducing motor; the output end of the gear transmission assembly is in transmission connection with the rotating shaft; the rotating shaft is in transmission connection with the clamp.
The invention also provides a using method of the environment-friendly ash removal device for deeply cleaning the filter cylinder, which comprises the following steps:
step S1; placing the filter cylinder on the jacking assembly from the access door, stepping on the lifting foot switch to enable the filter cylinder to lift to the top to be in contact with the four-jaw chuck, and adjusting and locking the jaws to clamp the filter cylinder;
step S2; closing the access door, rotating the deflector rod until the elastic part is contacted with the filter cylinder, screwing the locking nut, and introducing compressed air into the blowing assembly;
step S3; starting a gear reduction motor and a fan, starting a cleaning cycle, and observing the cleaning condition of the filter cartridge from an observation window in real time;
step S4; after the cleaning operation is finished, the gear reduction motor and the fan are closed, and the compressed air source is disconnected; then opening the access door, loosening the four-jaw chuck, stepping on the descending foot switch to take out the filter cylinder; the hose is pulled out, and the dust collection barrel is taken out after the hoop is loosened.
Compared with the prior art, the invention has the advantages that: the filter cylinder is clamped in the rotating assembly and the jacking assembly and rotates rapidly, dust is thrown out by centrifugal force, and deep cleaning of the filter cylinder can be achieved. Meanwhile, the whole ash cleaning process is operated in the closed space of the box body, and the raised dust cannot overflow.
Drawings
FIG. 1 is a front view of an environmentally friendly ash removal device for deep cleaning a filter cartridge according to one embodiment of the present invention;
FIG. 2 is an elevational isometric view of FIG. 1;
FIG. 3 is a rear isometric view of FIG. 1;
FIG. 4 is a diagram illustrating the operation of the lever assembly of FIG. 1 before locking;
FIG. 5 is a view of the lever assembly of FIG. 1 in a locked state;
fig. 6 is a block diagram of the dust collection assembly of fig. 1.
Wherein, 1-a fan, 2-a box body, 201-an observation window, 201-an access door, 3-an electrical cabinet, 4-a rotary clamping component, 401-a gear speed reducing motor, 402-a rotary shaft, 403-a clamp, 5-a blowing component, 501-an air pipe joint, 502-a nozzle, 503-a drain valve, 6-a jacking component, 601-a jacking component, 602-a jacking shaft, 603-a jacking bearing, 604-an air cylinder, 605-an air cylinder bearing, 606-a jacking support plate, 607-an ascending foot switch and 608-a descending foot switch,
7-dust collection assembly, 701-dust collection barrel, 702-flat filter element, 703-foot pad, 704-hoop, 705-hose, 8-deflector rod assembly, 801-elastic component, 802-deflector rod, 803-locking nut, 804-mounting nut and 805-knob.
Detailed Description
The environmentally friendly ash removal device for a deep cleaning filter cartridge of the present invention will now be described in greater detail with reference to the schematic drawings, in which preferred embodiments of the present invention are shown, it being understood that those skilled in the art may modify the invention herein described while still achieving the advantageous effects of the invention. Accordingly, the following description should be construed as broadly as possible to those skilled in the art and not as limiting the invention.
The invention provides an environment-friendly ash removal device for deeply cleaning a filter cylinder, which comprises a box body, an electrical cabinet, a rotary clamping assembly and a jacking assembly. An access door is arranged on the box body, and the rotary clamping component and the jacking component are oppositely arranged to fix the filter cylinder; the electric cabinet is connected with the rotary clamping assembly and the jacking assembly through signals. Specifically, an operator places the filter cartridge on the jacking assembly from the access door; then through the regulator cubicle start-up jacking subassembly, the jacking subassembly removes towards rotatory clamping component to will strain a section of thick bamboo card and establish on rotatory clamping component, later rotatory clamping component drives and strains a section of thick bamboo and rotate, and the dust centrifugation is thrown away, realizes the purpose of degree of depth clearance.
As shown in fig. 1 to 3, in the present embodiment, the specific structure of the environment-friendly ash removal device for deep cleaning filter cartridge is as follows: the device comprises a box body 2, an electrical cabinet 3, a rotary clamping assembly 4, a jacking assembly 6, a dust collecting assembly 7, a blowing assembly 5, a deflector rod assembly 8, a fan 1, a rising foot switch 607 and a falling foot switch 608; the ascending foot switch 607, the descending foot switch 608, the rotating clamping assembly 4 and the jacking assembly 6 are in signal connection with the electrical cabinet 3. The specific structure and the mutual position relationship of the above parts are as follows:
the box body 2 is a closed space; the back of the box body 2 is provided with an access door 201 for installation and disassembly; the front of the box body 2 is provided with an observation window 201 for observing the cleaning condition of the filter cartridge in real time. The bottom of the box body 2 is of a funnel shape; the bottom of the box body 2 is provided with a dust outlet; the dust outlet is externally connected with a dust collecting component 7. The observation window 201 is made of transparent hard plastic material, fixed on the box body 2 by bolts and nuts, and sealed cotton is padded between the observation window and the box body.
The electrical cabinet 3 is fixed on the side wall, such as the left side, of the box body 2; in other embodiments than this embodiment, the position setting of the electrical cabinet 3 is not limited. The electrical cabinet 3 is also provided with a start button and a stop button of a gear reduction motor, an operation indicator lamp of the gear reduction motor, a start and stop button of a fan, a fan operation indicator lamp, a blowing start and stop button, a blowing operation indicator lamp and a fault alarm lamp.
The rotary clamping component 4 and the jacking component 6 are arranged up and down oppositely, and two ends of the filter cylinder along the axial direction are respectively clamped on the rotary clamping component 4 and the jacking component 6; in other embodiments besides this embodiment, the rotating clamping assembly 4 and the jacking assembly 6 may be disposed opposite to each other.
The rotary clamping assembly 4 comprises a gear reduction motor 401, a rotary shaft 402 and a clamp 403; gear motor 401 includes a gear motor and a gear assembly; the input end of the gear transmission assembly is connected with a speed reducing motor; the output end of the gear transmission component is in transmission connection with the rotating shaft; the rotating shaft is in transmission connection with the clamp 403. The clamp 403 is located within the case 2. The speed reducing motor is fixed on the top of the box body 2 through bolts and nuts, and the input end and the output end of the gear transmission assembly are respectively connected with the speed reducing motor and the rotating shaft 402; the rotating shaft 402 is in transmission connection with the clamp 403; the clamp 403 and the rotating shaft 402 transmit torque to each other through the flat spline. In this embodiment, the clamp 403 is a four-jaw chuck.
The jacking assembly 6 comprises a cylinder 604, a cylinder bearing 605, a jacking bearing 603, a jacking support plate 606, a jacking part 601 and a jacking shaft 602. The jacking bearing 603, the jacking support plate 606, the jacking part 601 and the jacking shaft 602 are all positioned in the box body 2; the cylinder bearing 605 is fixed at the bottom of the box body 2 and is a linear bearing; the cylinder rods of the cylinders 604 are matched with the cylinder bearings 605 and extend into the box body 2, and the number of the cylinders 604 is 2, and the cylinders are symmetrically arranged on the racks on the two sides of the box body 2; round holes are formed in two ends of the jacking support plate 606 and fixedly connected with the air cylinder rod through nuts, and the jacking support plate 606 is horizontally arranged; the jacking bearing 603 is fixed on the jacking support plate 606, the middle part of the jacking support plate 606 is a cylindrical bearing sleeve, and the jacking bearing 603 is arranged in the bearing sleeve; the jacking shaft 602 is inserted into the jacking bearing 603 to be matched with the jacking bearing 603; the bottom of the jacking shaft 602 is locked on the jacking bearing 603 through bolts and nuts, and the jacking component 601 is fixed at the upper end of the jacking shaft 602 through bolts.
The blowing component 5 comprises a blowing cylinder, an air pipe joint 501, a nozzle 502 and a drain valve 503; the air pipe joint 501 is arranged on the blowing cylinder and communicated with the blowing cylinder, one end of the blowing cylinder extends into and is clamped on the box body 2, and the air pipe joint 501 is used for externally connecting a compressed air source; one end of the nozzle 502 is communicated with the blowing cylinder, is positioned in the box body 2, and is connected with a section of the blowing cylinder extending into the box body 2 through screw threads. A sealing ring is arranged between the nozzle 502 and the box body 2; the drain valve 503 is installed on the external connection line of the blowing cylinder and is used for discharging the compressed air and precipitating water. Wherein, the nozzle 502 is flared at the end extending into the box body 2, which is convenient for the diffusion of compressed gas.
As shown in fig. 4-5, the shift lever assembly 8 includes an elastic member 801, a shift lever 802, a lock nut 803, a mounting nut 804 and a knob 805; the mounting nut 804 is fixed (welded) on the outer wall of the box body 2; the deflector rod 802 is matched with the mounting nut 804 and extends into the box body 2; the section of the deflector rod 802 extending into the box body 2 is a polished rod and is sleeved with an elastic component 801; one end of the driving lever 802 extending out of the box body 2 is provided with a knob 805; one section of the shifting rod 802 extending out of the box body is in threaded connection with a locking nut 803; the elastic member may be brought into contact with the cartridge by rotating knob 805, and then rotating locking nut 803 to abut mounting nut 804 to lock lever 803. When the filter cartridge rotates, the friction force of the filter cartridge touches the deflector 803 to rotate the deflector 803, which may cause the length of the deflector to change or may cause the deflector to break. A locking nut 803 is provided to prevent the rod 803 from following the cartridge rotation. Wherein, the elastic component 801 is a rubber.
As shown in fig. 6, the dust collecting assembly 7 includes a dust collecting barrel 701, a flat filter element 702 and a foot pad 703; the dust collection barrel 701 is fixed on a dust collection port, and the dust collection barrel 701 is connected with the bottom of the box body 2 through a hoop 704; the flat filter element 702 is clamped in the dust collection barrel 701; the bottom of the flat filter element 702 is clamped with a foot pad 703. The dust collecting barrel 701 is provided with a dust collecting port; the suction opening is lower than the flat filter element 702; the suction opening is connected to the inlet of the fan 1 by a hose 705. The flat filter element 702 is circular, and the outer diameter of the flat filter element is larger than the inner diameter of the dust collection barrel 701. The foot pad 703 is higher than the upper edge of the dust suction opening. The flat filter element 702 is pressed into the dust collection barrel 701 and is tightly attached to the pad foot 703 to separate the fan 1 and a dust source, so that dust cannot be sucked by the fan 1, and the purpose of meeting the requirement of environmental protection can be realized.
The fan 1 adopts a backward inclined centrifugal fan 1, the air quantity is selected according to the volume of the box body 2, and the air pressure is selected according to 2000 Pa. In the clearance process, fan 1 constantly follows 7 bottoms convulsions that gather dust of subassembly, and the negative pressure that forms in the intracavity can be fast with raise dust collection bucket 701 in.
In this embodiment, the jacking component 601 is a tip cone; the small end of the nose cone extends into the filter cartridge.
The invention also provides a use method of the environment-friendly ash removal device for deeply cleaning the filter cylinder, which comprises the following steps:
1) the operator places the cartridge on the jacking assembly 6 from the access door 201, depresses the lift foot switch 607 to raise the cartridge to the top to contact the four-jaw chuck, and adjusts and locks the jaws to grip the cartridge.
2) The access door 201 is closed, the lever 802 is rotated until the elastic member 801 comes into contact with the filter cartridge, and the lock nut 803 is tightened to introduce the compressed air into the blowing assembly 5.
3) After the installation process is finished, the gear reduction motor 401 and the fan 1 are started, a cleaning cycle is started, and an operator observes the cleaning condition of the filter cartridge from the observation window 201 in real time.
4) After the cleaning operation is finished, the gear reduction motor 401 and the fan 1 are turned off, and the compressed air source is disconnected. The access door 201 is then opened, the four-jaw chuck is released, and the drop foot switch 608 is depressed to remove the filter cartridge. The hose 705 is pulled out, and the dust collection barrel 701 can be taken out after the hoop 704 is loosened.
To sum up, in the environment-friendly ash removal device of a degree of depth clearance filter cylinder that this embodiment provided, strain a cartridge dress clamp and rotate fast in rotating assembly and jacking subassembly 6, the centrifugal force of formation throws away the dust, strains a cartridge surface contact driving lever 802 during rotatory simultaneously, vibrates to make and strains stubborn dust in a groove and drops, in addition compressed air's sweeping, can realize straining a deep clearance of a section of thick bamboo.
The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any way. It will be understood by those skilled in the art that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. An environment-friendly ash removal device for deeply cleaning a filter cylinder is characterized by comprising a box body, an electrical cabinet, a rotary clamping assembly and a jacking assembly; the rotary clamping component and the jacking component are arranged oppositely up and down to fix the filter cylinder; the electric cabinet is in signal connection with the rotary clamping assembly and the jacking assembly;
wherein, an access door for placing the filter cylinder is arranged on the box body; the electrical cabinet is fixed on the box body;
the rotary clamping assembly comprises a gear reduction motor and a clamp; the gear reduction motor is fixed on the box body; the output end of the gear reduction motor is in transmission connection with the clamp; the clamp is positioned in the box body;
the jacking assembly comprises a cylinder, a cylinder bearing, a jacking support plate, a jacking component and a jacking shaft; the jacking bearing, the jacking support plate, the jacking component and the jacking shaft are all positioned in the box body;
the cylinder bearing is fixed on the box body; a cylinder rod of the cylinder is matched with the cylinder bearing and extends into the box body; the jacking support plate is fixedly connected with the cylinder rod; the jacking bearing is fixed on the jacking supporting plate; the jacking shaft is matched with the jacking bearing; the jacking component is fixed on the jacking shaft.
2. The environment-friendly ash removal device for deeply cleaning filter cartridges as recited in claim 1, wherein the jacking member is a tip cone; the small end of the tip cone extends into the filter cartridge.
3. The environment friendly ash removal device for deep cleaning filter cartridges as defined in claim 1, wherein the clamp is a four jaw chuck.
4. The environment-friendly ash removal device for deeply cleaning the filter cartridge as recited in claim 1, wherein a dust outlet is formed at the bottom of the box body; the dust outlet is externally connected with a dust collecting component.
5. The environment-friendly ash removal device for deep cleaning filter cartridges as claimed in claim 4, wherein the dust collection assembly comprises a dust collection barrel, a flat filter element and a foot pad; the dust collection barrel is fixed on the dust collection opening; the flat filter element is clamped in the dust collection barrel; the bottom of the flat filter element is clamped with the pad.
6. The environment-friendly ash removal device for deeply cleaning the filter cartridge as recited in claim 5, wherein the dust collection barrel is provided with a dust collection port; the dust suction port is lower than the flat filter element; the dust absorption mouth is external a fan.
7. The environment-friendly ash removal device for deep cleaning of filter cartridges as defined in claim 1, further comprising a blowing assembly; the blowing component comprises a blowing barrel, an air pipe joint, a nozzle and a drain valve;
the air pipe joint is arranged on the blowing barrel and communicated with the blowing barrel; one end of the injection cylinder extends into and is clamped on the box body;
the nozzle is positioned in the box body and is in threaded connection with a section of the jetting cylinder body extending into the box body;
the drain valve is arranged on an external pipeline of the injection cylinder.
8. The environment-friendly ash removal device for deep cleaning filter cartridges as recited in claim 1, further comprising a deflector rod assembly; the shifting rod assembly comprises an elastic component, a shifting rod, a knob, a mounting nut and a locking nut;
the mounting nut is fixed on the outer wall of the box body; the deflector rod is matched with the mounting nut and extends into the box body;
the section of the shifting rod extending into the box body is a polished rod and is sleeved with the elastic component; one end of the deflector rod extending out of the box body is provided with a knob;
the deflector rod extends out of one section of the box body and is in threaded connection with the locking nut;
and when the knob is rotated, the elastic part can be in contact with the filter cylinder, and the locking nut is rotated to be attached to the mounting nut so as to lock the shifting rod.
9. The environment-friendly ash removal device for deeply cleaning the filter cartridge according to any one of claims 1 to 8, further comprising a rising foot switch and a falling foot switch; the ascending foot switch and the descending foot switch are in signal connection with the electrical cabinet.
10. The use method of the environment-friendly ash removal device for deeply cleaning the filter cylinder is characterized by comprising the following steps of:
step S1; placing the filter cylinder on the jacking assembly from the access door, stepping on the lifting foot switch to enable the filter cylinder to lift to the top to be in contact with the four-jaw chuck, and adjusting and locking the jaws to clamp the filter cylinder;
step S2; closing the access door, rotating the deflector rod until the elastic part is contacted with the filter cylinder, screwing the locking nut, and introducing compressed air into the blowing assembly;
step S3; starting a gear reduction motor and a fan, starting a cleaning cycle, and observing the cleaning condition of the filter cartridge from an observation window in real time;
step S4; after the cleaning operation is finished, the gear reduction motor and the fan are closed, and the compressed air source is disconnected; then opening the access door, loosening the four-jaw chuck, stepping on the descending foot switch to take out the filter cylinder; the hose is pulled out, and the dust collection barrel is taken out after the hoop is loosened.
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CN114470974A (en) * | 2022-01-25 | 2022-05-13 | 恒达富士电梯有限公司 | Filter element recovery method and device for elevator cooperative production line |
CN115648118A (en) * | 2022-12-27 | 2023-01-31 | 华芯半导体研究院(北京)有限公司 | Maintenance device for filter for epitaxial growth of compound semiconductor material |
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CN114470974A (en) * | 2022-01-25 | 2022-05-13 | 恒达富士电梯有限公司 | Filter element recovery method and device for elevator cooperative production line |
CN115648118A (en) * | 2022-12-27 | 2023-01-31 | 华芯半导体研究院(北京)有限公司 | Maintenance device for filter for epitaxial growth of compound semiconductor material |
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