CN110886015A - Thermal field crucible adjusting type heat preservation equipment for polycrystalline silicon - Google Patents
Thermal field crucible adjusting type heat preservation equipment for polycrystalline silicon Download PDFInfo
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- CN110886015A CN110886015A CN201911165031.1A CN201911165031A CN110886015A CN 110886015 A CN110886015 A CN 110886015A CN 201911165031 A CN201911165031 A CN 201911165031A CN 110886015 A CN110886015 A CN 110886015A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/06—Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses thermal field crucible adjusting type heat preservation equipment for polycrystalline silicon, which comprises a box body, wherein a supporting seat and a power supply box are arranged on the bottom surface of the box body, an observation window and a control panel are arranged on the front surface of the box body, a box door is arranged on one side surface of the box body, a cover plate is arranged on the top surface of the box body, a feeding pipe is arranged on the top surface of the cover plate, second electric push rods are fixedly connected to two sides of the bottom surface of the cover plate, heat preservation layers are arranged in the peripheral side walls of the box body, connecting chutes are arranged above two sides of the bottom surface of the box body, a supporting plate is arranged between the two connecting chutes, a first electric push rod is arranged at the lower end of the inner wall of one side of the box body, the movable end of the first electric push rod is fixedly. The invention has simple structure, is convenient to assemble and disassemble, effectively improves the working efficiency and improves the heat preservation effect.
Description
Technical Field
The invention relates to the technical field of semiconductor material production equipment, in particular to thermal field crucible adjusting type heat preservation equipment for polycrystalline silicon.
Background
During the production of polycrystalline silicon, a quartz crucible is used for loading polycrystalline silicon materials, a proper amount of borosilicate is added, then the borosilicate is melted, the temperature is kept for about 20 minutes after the melting, then the polycrystalline silicon ingots are injected into a graphite casting mould, and after the polycrystalline silicon ingots are slowly solidified and cooled, the polycrystalline silicon ingots are obtained.
Polycrystalline silicon need use the heat preservation equipment in process of production, and the quality of heat preservation effect is directly deciding polycrystalline silicon production quality's quality, but the heat preservation device that current crucible was used most all is fixed, and inconvenient split carries out, when the heat preservation device takes place to warp or damage because of high temperature, need maintain or change whole set of device, wastes time and energy, and working strength is big, and is with high costs moreover, and inconvenient change, get and put the crucible, is unfavorable for improving work efficiency.
Disclosure of Invention
The invention aims to solve the defects in the prior art, and provides a thermal field crucible adjusting type heat preservation device for polycrystalline silicon.
In order to achieve the purpose, the invention adopts the following technical scheme:
a thermal field crucible adjusting type heat preservation device for polycrystalline silicon comprises a box body, wherein the box body is rectangular, ladder-shaped supporting seats are fixedly connected to two sides of the bottom surface of the box body, a rectangular power box is slidably arranged on the bottom surface of the box body, an observation window is arranged in the middle of the front surface of the box body, a control panel is arranged at the upper end of the front surface of the box body, a rectangular first opening is arranged on one side surface of the box body, a rectangular box door is hinged to one side wall of the first opening, the top surface of the box body is open, a rectangular cover plate is fixedly connected to the open top surface, a circular feeding pipe is arranged in the middle of the top surface of the cover plate, second electric push rods are fixedly connected to two sides of the middle of the bottom surface of the cover plate, rectangular placing grooves are vertically and downwards concavely formed in the peripheral side walls of the box body, rectangular heat preservation layers are arranged in each placing, every equal rigid coupling in connection spout bottom surface both ends has columniform bracing piece, and the equal box of every bracing piece other end corresponds one end bottom surface rigid coupling, box bottom surface top is equipped with the backup pad of rectangle form, the backup pad both sides all with correspond and be connected spout sliding connection, box one side inner wall lower extreme is equipped with first electric putter, first electric putter expansion end and a backup pad side middle part rigid coupling, backup pad top surface rigid coupling has the circular shape and supports the groove, support the inslot and placed the crucible, support the groove outside and be equipped with the heat preservation cover of cask form, heat preservation cover both sides face all with the expansion end rigid coupling that corresponds second electric putter.
Preferably, the equal rigid coupling in power pack both sides face upper end has the support slider of rectangle form, the equal rigid coupling in box bottom surface both sides has the spacing spout of rectangle form, and every support slider all is located the spacing spout that corresponds.
Preferably, a T-shaped connecting slide rod is slidably arranged in each connecting slide groove, and two side faces of the support plate are fixedly connected with the middle of one side face of the corresponding connecting slide rod.
Preferably, a U-shaped heat conduction groove is formed in the support groove, an annular electric heating plate is arranged at the upper end of the outer wall of the heat conduction groove, and the crucible is located in the heat conduction groove and is in contact with the inner wall of the heat conduction groove.
Preferably, heat preservation cover outer wall upper end is equipped with solid fixed ring, gu fixed ring comprises two semicircle rings, rotation axis connection is passed through to two semicircle ring one ends, the equal rigid coupling of two semicircle ring other ends has through spacing bolted connection, the equal rigid coupling of solid fixed ring both sides face has the fixed plate of rectangle form, and every fixed plate top surface all is equipped with the circular shape fixed slot, every second electric putter expansion end all is located the fixed slot that corresponds, and with the fixed slot rigid coupling that corresponds, heat preservation cover top surface is equipped with circular shape fixed orifices, the rigid coupling has conical feeder hopper in the fixed orifices, the feeder hopper lower extreme is located the crucible.
Preferably, the supporting plate top surface is concavely provided with a circular sealing groove, the heat preservation cover bottom surface is provided with a circular second opening, and the outer wall of the second opening is positioned in the sealing groove.
Preferably, there is the heat preservation lid of cask form inlet pipe upper end spiral connection, the heat preservation lid inner wall is equipped with the internal thread, inlet pipe upper end outer wall is equipped with the external screw thread, the rigid coupling has corrugated hose in the inlet pipe lower extreme, the corrugated hose other end is located the feeder hopper.
Compared with the prior art, the invention has the beneficial effects that:
1. the crucible can be effectively insulated by matching the arranged insulation cover, the sealing groove, the supporting groove and the heat conducting groove with the electric heating plate, so that the insulation effect of the crucible is improved, and the problem that the insulation of the crucible is uncontrollable is solved;
2. the first electric push rod can drive the supporting groove to move inside and outside through the matching of the first electric push rod, the supporting plate, the supporting groove and the connecting slide rod with the two sliding grooves, so that the crucible is convenient to take and place and maintain, and the heat-insulating cover is convenient to mount and dismount through the matching of the arranged fixing ring and the heat-insulating cover, so that the problems of inconvenient maintenance and replacement are solved, the time-consuming and labor-consuming situations caused by maintenance are avoided, and the work efficiency is improved;
in conclusion, the heat-insulation plate is simple in structure and convenient to mount, dismount and maintain, the working efficiency is effectively improved, and the heat-insulation effect is improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:
FIG. 1 is a sectional view of a thermal field crucible regulating type heat preservation device for polycrystalline silicon according to the present invention;
FIG. 2 is a front view of a thermal field crucible regulating type heat preservation device for polycrystalline silicon according to the present invention;
FIG. 3 is a sectional view taken along line A-A in FIG. 2 of a thermal field crucible regulating type heat preservation device for polycrystalline silicon according to the present invention;
FIG. 4 is a right side view of a thermal field crucible regulating type heat preservation device for polycrystalline silicon according to the present invention;
FIG. 5 is a top view of a support plate of a thermal field crucible regulating type heat preservation device for polycrystalline silicon according to the present invention;
number in the figure: the device comprises a box body 1, a supporting seat 2, a limiting sliding groove 3, a power supply box 4, a cover plate 5, a heat preservation layer 6, a feeding pipe 7, a first electric push rod 8, a connecting sliding groove 9, a connecting sliding rod 10, a supporting plate 11, a supporting groove 12, an electric heating plate 13, a crucible 14, a heat preservation cover 15, a fixing ring 16, a second electric push rod 17, a corrugated hose 18, a feeding hopper 19, a supporting rod 20, a heat preservation cover 21, a control panel 22, a sealing groove 23, an observation window 24, a box door 25 and a heat conduction groove 26.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Example (b): referring to fig. 1-5, a thermal field crucible adjusting type thermal insulation device for polysilicon comprises a box body 1, wherein the box body 1 is rectangular, ladder-shaped supporting seats 2 are fixedly connected to two sides of the bottom surface of the box body 1, a rectangular power supply box 4 is slidably arranged on the bottom surface of the box body 1, an observation window 24 is arranged in the middle of the front surface of the box body 1, a control panel 22 is arranged at the upper end of the front surface of the box body 1, a rectangular first opening is arranged on one side surface of the box body 1, a rectangular box door 25 is hinged to one side wall of the first opening, the top surface of the box body 1 is open, a rectangular cover plate 5 is fixedly connected to the top surface of the open top, a circular feeding pipe 7 is arranged in the middle of the top surface of the cover plate 5, second electric push rods 17 are fixedly connected to two sides of the bottom surface of the cover plate 5, rectangular standing grooves are vertically and downwards arranged on the peripheral side, the material of heat preservation 6 is the carbon felt, all transversely be equipped with the connection spout 9 of rectangle form in box 1 bottom surface both sides top, every connects the equal rigid coupling in spout 9 bottom surface both ends and has columniform bracing piece 20, and the equal box 1 of every bracing piece 20 other end corresponds one end bottom surface rigid coupling, 1 bottom surface top of box is equipped with the backup pad 11 of rectangle form, 11 both sides of backup pad all with correspond and be connected spout 9 sliding connection, 1 one side inner wall lower extreme of box is equipped with first electric putter 8, 8 expansion ends of first electric putter and 11 side middle part rigid couplings of backup pad, 11 top surfaces rigid coupling of backup pad have the circular shape and support groove 12, crucible 14 has been placed in supporting groove 12, support the groove 12 outside and be equipped with the heat preservation cover 15 of cask form, heat preservation cover 15 all with the expansion end rigid coupling that corresponds second electric putter 17 both sides face.
In the invention, rectangular supporting slide blocks are fixedly connected to the upper ends of two side surfaces of the power supply box 4, rectangular limiting slide grooves 3 are fixedly connected to two sides of the bottom surface of the box body 1, and each supporting slide block is positioned in the corresponding limiting slide groove 3.
In the invention, a T-shaped connecting slide bar 10 is arranged in each connecting slide groove 9 in a sliding manner, and two side surfaces of the supporting plate 11 are fixedly connected with the middle part of one side surface of the corresponding connecting slide bar 10.
In the invention, a U-shaped heat conduction groove 26 is arranged in the support groove 12, an annular electric heating plate 13 is arranged at the upper end of the outer wall of the heat conduction groove 26, the crucible 14 is positioned in the heat conduction groove 26 and is contacted with the inner wall of the heat conduction groove 26, and the heat conduction groove 26 is made of metal with good heat conduction performance.
In the invention, a fixing ring 16 is arranged at the upper end of the outer wall of the heat-insulating cover 15, the fixing ring 16 is composed of two semicircular rings, one ends of the two semicircular rings are connected through a rotating shaft, the other ends of the two semicircular rings are fixedly connected through a limiting bolt, rectangular fixing plates are fixedly connected to two side faces of the fixing ring 15, a circular fixing groove is formed in the top face of each fixing plate, the movable end of each second electric push rod 17 is located in the corresponding fixing groove and fixedly connected with the corresponding fixing groove, a circular fixing hole is formed in the top face of the heat-insulating cover 15, a conical feed hopper 19 is fixedly connected in the fixing hole, the lower end of the feed hopper 19 is located in the crucible 14, and the heat-insulating cover is made of.
In the invention, a circular sealing groove 23 is concavely arranged on the top surface of the supporting plate 11, a circular second opening is arranged on the bottom surface of the heat-insulating cover 15, and the outer wall of the second opening is positioned in the sealing groove 23.
In the invention, the upper end of the feeding pipe 7 is spirally connected with a cylindrical heat-insulating cover 21, the inner wall of the heat-insulating cover 21 is provided with internal threads, the outer wall of the upper end of the feeding pipe 7 is provided with external threads, a corrugated hose 18 is fixedly connected in the lower end of the feeding pipe 7, and the other end of the corrugated hose 18 is positioned in a feeding hopper 19.
In the invention, a temperature controller, a first electric push rod control switch, a second electric push rod control switch and a power switch are arranged on the control panel 22, a storage battery is placed in the power box 4, the storage battery is connected with the power switch through a lead, the first electric push rod control switch is connected in series between the power switch and the first electric push rod 8 through a lead, the second electric push rod control switch is connected in series between the power switch and the second electric push rod 17 through a lead, a temperature controller is connected in series between the power switch and the electric heating plate 13 through a lead, the model of the temperature controller is SIN-1100, a temperature sensor is arranged on the heat conducting groove, the model of the temperature sensor is WZP-PT100, the information output end of the temperature detection sensor is connected with the temperature controller, a display screen is arranged on the temperature controller, and the temperature value can be displayed in real time, the temperature controller can set up the protection temperature value in advance, and when temperature sensor detected the temperature around the heat conduction groove 26 and is less than the protection temperature value, the relay contact closed of temperature controller, electric plate 13 circular telegram heating, when temperature sensor detected the temperature around the heat conduction groove 26 and is higher than the protection temperature value, the relay contact of temperature controller opened, and electric plate 13 outage.
When the crucible box is used, firstly, a power switch is turned on, then a box door 25 is opened, the second electric push rod 17 is controlled to retract, the second electric push rod 17 drives the heat preservation cover 15 to move upwards, the heat preservation cover 15 drives the feed hopper 19 to move upwards, the feed hopper 19 compresses the corrugated hose 18 until the lower end of the heat preservation cover 15 is positioned above the support groove 12, then the first electric push rod 8 is controlled to extend, the first electric push rod 8 drives the support plate 11 to move outwards, the support plate 11 drives the connecting slide rod 10 to move outwards along the connecting slide groove 9, the support plate 11 drives the support groove 12 to move outwards, the support groove 12 drives the heat conduction groove 26 to move outwards, when the heat conduction groove 26 moves out of the box body 1, the first electric push rod 8 is controlled to stop extending, then the crucible 14 is placed into the heat conduction groove 26, then the first electric push rod 8 is controlled to retract, the first electric push rod 8 drives the support plate 11 to, the supporting groove 12 drives the heat conducting groove 26 to move inwards, the heat conducting groove 26 drives the crucible 14 to move inwards, when the heat conducting groove 26 moves to the middle part of the box body 1, the first electric push rod 8 is controlled to stop retracting, then the box door 25 is closed, then the second electric push rod 17 is controlled to extend, the second electric push rod 17 drives the fixing ring 16 to move downwards, the fixing ring 16 drives the protective cover 15 to move downwards, the protective cover 15 drives the feed hopper 19 to move downwards, the corrugated hose 18 extends until the lower end of the protective cover 15 is positioned in the sealing groove 23, at the moment, the feed hopper 19 is positioned in the crucible 14, then the temperature controller switch is turned on, the electric heating plate 13 starts to heat, the electric heating plate 13 transmits heat to the heat conducting groove 26, the heat conducting groove 26 transmits heat to the crucible 14, the heat insulating cover 15 can reduce the heat emission rate, the temperature controller, when the temperature around the heat conduction groove 26 is lower than the protection temperature value, the temperature controller controls the electric heating plate 13 to heat, when feeding is needed, the heat preservation cover 21 is rotated in the forward direction, the heat preservation cover 21 is separated from the feeding pipe 7, then required materials are added into the feeding pipe 7, the materials enter the crucible 14 through the corrugated hose 18 and the feeding hopper 19, and when the heat preservation cover 15 is damaged, the limiting bolt is loosened, so that the heat preservation cover is convenient to maintain and replace.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (7)
1. A thermal field crucible adjusting type heat preservation equipment for polycrystalline silicon comprises a box body (1), and is characterized in that: the box body (1) is rectangular, ladder-shaped supporting seats (2) are fixedly connected to two sides of the bottom surface of the box body (1), a rectangular power box (4) is slidably arranged on the bottom surface of the box body (1), an observation window (24) is arranged in the middle of the front surface of the box body (1), a control panel (22) is arranged at the upper end of the front surface of the box body (1), a rectangular first opening is formed in one side surface of the box body (1), a rectangular box door (25) is hinged to one side wall of the first opening, the top surface of the box body (1) is open, a rectangular cover plate (5) is fixedly connected to the top surface of the cover plate (5), a circular feeding pipe (7) is arranged in the middle of the top surface of the cover plate (5), a second electric push rod (17) is fixedly connected to two sides of the bottom surface of the cover plate (5), and rectangular standing grooves are, a rectangular heat preservation layer (6) is arranged in each placing groove, rectangular connecting chutes (9) are transversely arranged above two sides of the inner bottom surface of the box body (1), cylindrical support rods (20) are fixedly connected to two ends of the bottom surface of each connecting chute (9), the other end of each support rod (20) is fixedly connected to the bottom surface of the corresponding end of the box body (1), a rectangular support plate (11) is arranged above the bottom surface of the box body (1), two sides of the support plate (11) are slidably connected with the corresponding connecting chutes (9), a first electric push rod (8) is arranged at the lower end of the inner wall of one side of the box body (1), the movable end of the first electric push rod (8) is fixedly connected to the middle of one side of the support plate (11), a circular support groove (12) is fixedly connected to the top surface of the support plate (11), a crucible (14) is arranged in the support groove (12), and a barrel-shaped heat, two side surfaces of the heat preservation cover (15) are fixedly connected with the movable end of the corresponding second electric push rod (17).
2. The thermal field crucible conditioning heat preservation apparatus for polysilicon as recited in claim 1, wherein: the power pack is characterized in that the upper ends of two side faces of the power pack (4) are fixedly connected with rectangular supporting sliding blocks, the two sides of the bottom face of the box body (1) are fixedly connected with rectangular limiting sliding grooves (3), and each supporting sliding block is located in the corresponding limiting sliding groove (3).
3. The thermal field crucible conditioning heat preservation apparatus for polysilicon as recited in claim 1, wherein: all slide in every connection spout (9) and be equipped with the connection slide bar (10) of T shape, backup pad (11) both sides face all with correspond connection slide bar (10) a side middle part rigid coupling.
4. The thermal field crucible conditioning heat preservation apparatus for polysilicon as recited in claim 1, wherein: a U-shaped heat conduction groove (26) is formed in the support groove (12), an annular electric heating plate (13) is arranged at the upper end of the outer wall of the heat conduction groove (26), and the crucible (14) is located in the heat conduction groove (26) and is in contact with the inner wall of the heat conduction groove (26).
5. The thermal field crucible conditioning heat preservation apparatus for polysilicon as recited in claim 1, wherein: keep warm and cover (15) outer wall upper end and be equipped with solid fixed ring (16), gu fixed ring (16) comprises two semicircle rings, the rotation axis connection is passed through to two semicircle ring one ends, two equal rigid couplings of semicircle ring other end have through spacing bolted connection, gu the equal rigid coupling of solid fixed ring (15) both sides face has the fixed plate of rectangle form, every fixed plate top surface all is equipped with the circular shape fixed slot, every second electric putter (17) expansion end all is located the fixed slot that corresponds, and with the fixed slot rigid coupling that corresponds, it is equipped with the circular shape fixed orifices to keep warm cover (15) top surface, the rigid coupling has conical feeder hopper (19) in the fixed slot, feeder hopper (19) lower extreme is located crucible (14).
6. The thermal field crucible conditioning heat preservation apparatus for polysilicon as recited in claim 1, wherein: the supporting plate (11) top surface is equipped with circular shape seal groove (23) in a concave way, heat preservation cover (15) bottom surface is equipped with circular shape second opening, second opening outer wall is located seal groove (23).
7. The thermal field crucible conditioning heat preservation apparatus for polysilicon as recited in claim 1, wherein: inlet pipe (7) upper end spiral connection has heat preservation lid (21) of cask form, heat preservation lid (21) inner wall is equipped with the internal thread, inlet pipe (7) upper end outer wall is equipped with the external screw thread, the rigid coupling has corrugated hose (18) in inlet pipe (7) lower extreme, corrugated hose (18) other end is located feeder hopper (19).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911165031.1A CN110886015A (en) | 2019-11-25 | 2019-11-25 | Thermal field crucible adjusting type heat preservation equipment for polycrystalline silicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911165031.1A CN110886015A (en) | 2019-11-25 | 2019-11-25 | Thermal field crucible adjusting type heat preservation equipment for polycrystalline silicon |
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| CN110886015A true CN110886015A (en) | 2020-03-17 |
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|---|---|---|---|
| CN201911165031.1A Pending CN110886015A (en) | 2019-11-25 | 2019-11-25 | Thermal field crucible adjusting type heat preservation equipment for polycrystalline silicon |
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| CN (1) | CN110886015A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111926392A (en) * | 2020-07-06 | 2020-11-13 | 大同新成新材料股份有限公司 | Semiconductor graphite crucible with automatic dumping function and dumping method thereof |
| CN111981842A (en) * | 2020-07-08 | 2020-11-24 | 大同新成新材料股份有限公司 | Semiconductor graphite thermal field heat preservation device and heat preservation method thereof |
| CN112595762A (en) * | 2020-12-24 | 2021-04-02 | 郑州轻冶科技股份有限公司 | Aluminum electrolysis cell simulation test device and aluminum electrolysis cell simulation test system |
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| CN111926392A (en) * | 2020-07-06 | 2020-11-13 | 大同新成新材料股份有限公司 | Semiconductor graphite crucible with automatic dumping function and dumping method thereof |
| CN111981842A (en) * | 2020-07-08 | 2020-11-24 | 大同新成新材料股份有限公司 | Semiconductor graphite thermal field heat preservation device and heat preservation method thereof |
| CN112595762A (en) * | 2020-12-24 | 2021-04-02 | 郑州轻冶科技股份有限公司 | Aluminum electrolysis cell simulation test device and aluminum electrolysis cell simulation test system |
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Application publication date: 20200317 |
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