CN110879205B - Spectrum measuring and imaging optical system for surface plasmon resonance of invisible light wave band - Google Patents
Spectrum measuring and imaging optical system for surface plasmon resonance of invisible light wave band Download PDFInfo
- Publication number
- CN110879205B CN110879205B CN201911087547.9A CN201911087547A CN110879205B CN 110879205 B CN110879205 B CN 110879205B CN 201911087547 A CN201911087547 A CN 201911087547A CN 110879205 B CN110879205 B CN 110879205B
- Authority
- CN
- China
- Prior art keywords
- light
- optical element
- path
- spectrum
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 166
- 238000001228 spectrum Methods 0.000 title claims abstract description 62
- 238000003384 imaging method Methods 0.000 title claims abstract description 40
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 title claims abstract description 23
- 239000002086 nanomaterial Substances 0.000 claims abstract description 27
- 238000005286 illumination Methods 0.000 claims abstract description 19
- 238000005259 measurement Methods 0.000 claims abstract description 13
- 239000006185 dispersion Substances 0.000 claims description 13
- 239000013307 optical fiber Substances 0.000 claims description 9
- 230000008033 biological extinction Effects 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 230000003595 spectral effect Effects 0.000 description 6
- 230000010287 polarization Effects 0.000 description 5
- 239000000835 fiber Substances 0.000 description 4
- 238000001847 surface plasmon resonance imaging Methods 0.000 description 4
- 241000276498 Pollachius virens Species 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000411 transmission spectrum Methods 0.000 description 2
- 238000001237 Raman spectrum Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004847 absorption spectroscopy Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N2021/217—Measuring depolarisation or comparing polarised and depolarised parts of light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N2021/258—Surface plasmon spectroscopy, e.g. micro- or nanoparticles in suspension
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention relates to a spectrum measurement and imaging optical system of surface plasmon resonance of an invisible light wave band, which comprises a laser, an objective table, a measured plasmon nano structure, a spectrum measurement main optical path, an imaging optical path and an illumination optical path.
Description
Technical Field
The invention designs a micro-nano photon spectrum measurement imaging optical system, and particularly relates to a spectrum measurement and imaging optical system for surface plasmon resonance of an invisible light wave band.
Background
The surface plasmon resonance is electromagnetic oscillation formed in the interaction process of light and a plasmon nano structure, and can break through the diffraction limit and realize the enhancement of a local electromagnetic field, so that the surface plasmon resonance is widely applied to the fields of super-resolution imaging, Raman spectrum enhancement, biosensing, organic solar cells and the like. Optical characterization of surface plasmon resonance, such as the wavelength position of the resonance peak, the full width at half maximum of the resonance peak, etc., is a prerequisite for full utilization of the resonance effect. Theoretically, optical characterization of surface plasmon resonance can utilize both the absorption and scattering spectra of plasmonic nanostructures, as well as their extinction spectra. The use of absorption spectroscopy can only characterize chemically synthesized, isotropic plasmonic nanostructures, with strong limitations. Therefore, the scattering spectrum of the plasmonic nanostructure is mostly measured by using a bright field or dark field scattering optical microscope at present. The use of bright field or dark field scattering optical microscopes has advantages in that the optical resolution is high, and disadvantages in that the cost is high, the structure is complicated, and only the surface plasmon resonance of the visible light band can be characterized.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide a simple and low-cost spectrum measuring and imaging optical system for representing surface plasmon resonance in an invisible light wave band.
The purpose of the invention is realized as follows: a spectrum measurement and imaging optical system of surface plasmon resonance of invisible light wave band comprises a laser, an object stage, a measured plasmon nanometer structure, a spectrum measurement main optical path, an imaging optical path and a lighting optical path, wherein the spectrum measurement main optical path at least comprises two confocal condensing optical elements, two beam splitting optical elements and a photoelectric detector with a dispersion function; the imaging optical path at least comprises two conjugate condensing optical elements, a light splitting optical element and an imaging element; the illumination light path at least comprises a white light source, a light splitting optical element and three light condensing optical elements.
The plasmon to be detected nano structure is placed at the common focus of the two confocal condensing optical elements, the two light splitting optical elements are positioned at two sides of the two confocal condensing optical elements, and the photoelectric detector with the dispersion function is positioned at the tail end of the spectrum main light path along the light beam propagation direction.
The confocal light-gathering optical element in the spectrum measuring main light path comprises a first light-gathering optical element and a second light-gathering optical element, the conjugated light-gathering optical element in the imaging light path comprises a fifth light-gathering optical element and a second light-gathering optical element in the spectrum measuring main light path, and the three light-gathering optical elements in the illumination light path comprise a third light-gathering optical element, a fourth light-gathering optical element and a first light-gathering optical element in the spectrum measuring main light path.
The condensing optical element includes, but is not limited to, a lens or an objective lens.
The light splitting optical element includes but is not limited to a light splitting glass, a light splitting prism, a light splitting cube or a fiber beam splitter.
The photodetector with dispersion function includes but is not limited to monochromator, spectrometer or combination of dispersion element and oscilloscope.
The imaging element includes, but is not limited to, a conventional camera or a digital camera composed of a CCD or CMOS array, and the wavelength sensing range thereof at least includes a visible light band.
The white light source is a broad spectrum light source, and the spectrum range at least comprises a visible light wave band.
The invention has the beneficial effects that: in practical application, only transmitted light signals of a spectrum measuring main light path focus in and out of a measured plasmon nanometer structure region are measured, peak positions and full widths at half maximum of surface plasmon resonances corresponding to plasmon nanometer structures can be rapidly obtained, workload and cost for representing surface plasmon resonance optical properties are greatly reduced, and effective basis is provided for design and application of the plasmon nanometer structures in invisible light wave bands.
Drawings
FIG. 1 is a surface plasmon resonance spectroscopy and imaging optical system embodiment 1 in the invisible light band;
FIG. 2 is a surface plasmon resonance spectroscopy and imaging optical system embodiment 2 in the invisible light band;
FIG. 3 is a surface plasmon resonance spectroscopy and imaging optical system embodiment 3 in the invisible light band;
FIG. 4 is a surface plasmon resonance spectroscopy and imaging optical system embodiment 4 in the invisible light band;
FIG. 5 is preferred embodiment 1 of the collection of signals from the main optical path of surface plasmon resonance spectroscopy in the invisible light band;
FIG. 6 is a preferred embodiment 2 of the collection of the main optical path signal of the surface plasmon resonance spectroscopy of the invisible light band;
FIG. 7 is a preferred embodiment of the invisible light band surface plasmon resonance spectroscopy main optical path signal input;
FIG. 8 is a preferred embodiment for measuring surface plasmon resonances in the invisible light band at different linear polarization states.
Detailed Description
Example 1: as shown in fig. 1 to 8, a spectrum measurement and imaging optical system for surface plasmon resonance in invisible light band includes a laser, an object stage, a measured plasmon nanostructure, a spectrum measurement main light path, an imaging light path, and an illumination light path.
The laser is a laser in a visible light wave band and is used for determining an image of a focus of a main light path in an imaging light path.
The stage is a two-or three-dimensional movable stage on which a sample with plasmonic nanostructures can be fixed. The object stage is positioned at the confocal position of two confocal light-gathering optical elements in a main spectrum measuring light path, and the confocal position is the coincidence of the focal points of the two confocal light-gathering optical elements.
The main spectrum measuring light path comprises two confocal light-gathering optical elements F1 and F2, two light-splitting optical elements B1 and B2 and a photoelectric detector with a dispersion function; the imaging optical path at least comprises two conjugate condensing optical elements F2 and F5, a light splitting optical element B2 and an imaging element; the illumination light path at least comprises a white light source, a light splitting optical element B1 and three light condensing optical elements F3, F4 and F1.
The plasmon to be detected nano structure is placed at the common focus of two confocal light-gathering optical elements F1 and F2, two light-splitting optical elements B1 and B2 are located on two sides of the two confocal light-gathering optical elements, and a photoelectric detector with a dispersion function is located at the tail end of a main spectrum detection light path along the propagation direction of light beams. The collimated invisible light wave band incident light is incident from a main spectrum measuring light path along the light beam propagation direction splitting optical element B1 and is finally collected by a photoelectric detector in the main spectrum measuring light path.
The confocal light-gathering optical element in the spectrum measuring main light path comprises a first light-gathering optical element F1 and a second light-gathering optical element F2, the light-gathering optical element in the imaging light path comprises a fifth light-gathering optical element F5 and a second light-gathering optical element F2 in the spectrum measuring main light path, and the three light-gathering optical elements in the illumination light path comprise a third light-gathering optical element F3, a fourth light-gathering optical element F4 and a first light-gathering optical element F1 in the spectrum measuring main light path.
The spectrum measuring main light path is used for detecting an extinction spectrum of the plasmon nano structure, and the core of the spectrum measuring main light path is a pair of confocal light-gathering optical elements F1 and F2. The light-gathering optical element is preferably a transmission or objective lens, and the plasmon nano-structure sample to be measured is placed at the common focus of the light-gathering optical element and the plasmon nano-structure sample to be measured. When measuring the spectrum, transmitted light signals T (λ), R (λ) when the focus of incident light in the invisible light band is located inside and outside the plasmon nanostructure array region can be measured respectively, and then the extinction signal E (λ) = [ R (λ) -T (λ) ]/R (λ) of the plasmon nanostructure, where λ is the light wavelength. T (lambda) is an optical signal collected by the photoelectric detector when the main spectrum measuring light path focal point is located in the plasmon nanometer structure array region, and R (lambda) is an optical signal collected by the photoelectric detector when the main spectrum measuring light path focal point is located outside the plasmon nanometer structure array region.
The imaging optical path realizes imaging and observation of the measured plasmon nanostructure array, and the core is a pair of conjugated light-gathering optical elements F2 and F5. The plasmon nanostructure array to be observed is located on the front focal surface of the light-gathering optical element F2 in the imaging optical path, and the imaging optical element is located on the back focal surface of the light-gathering optical element F5 in the imaging optical path. The first-passing condensing optical element F2 is a condensing optical element that passes first in the light beam propagation direction among two conjugate condensing optical elements of the imaging optical path; the second pass condensing optical element F5 is the second pass condensing optical element in the propagation direction of the light beam among the two confocal condensing optical elements of the main spectrum measuring path. The imaging optical path and the spectrum measuring optical path share the beam splitting optical element B2.
In order to make the whole optical system more compact, the condensing optical element in the imaging optical path is served by the condensing optical element in the main spectrum measuring optical path, i.e. F2. The imaging optical path and the main spectrum measuring optical path are connected by a light splitting optical element B2.
The illumination light path is used for providing uniform background light for the imaging light path, and the core is that a Kohler (Kohler) illumination scheme is adopted, and the illumination light path at least comprises a white light source, a light splitting optical element B1 and three light condensing optical elements F3, F4 and F1. The white light source is positioned on the front focal plane of the first passing condenser optical element F3 in the light beam propagation direction in the illumination light path, the beam splitter optical element B1 is positioned at a position in the illumination light path between the second condenser optical element F3 and the third passing condenser optical element F4 in the light beam propagation direction, and the distance between the second condenser optical element F3 and the third passing condenser optical element F4 in the light beam propagation direction in the illumination light path is the sum of the focal lengths of the two condenser optical elements. In order to make the whole optical system more compact, the last condensing optical element in the illumination optical path is served by one condensing optical element in the main spectrum measuring optical path, i.e. F1. The illumination light path and the main spectrum measuring light path are connected by a light splitting optical element B1. The illumination light path and the main spectrum measuring light path share a light splitting optical element B1.
The condensing optical elements include, but are not limited to, lenses and objective lenses.
The beam splitting optical element includes but is not limited to a beam splitting glass, a beam splitting prism, a beam splitting cube and a fiber beam splitter.
The photodetector with dispersion function includes but is not limited to monochromators, spectrometers, and combinations of dispersive elements and oscilloscopes.
The imaging element includes, but is not limited to, a conventional camera and a digital camera composed of a CCD or CMOS array, and the wavelength sensing range of the imaging element at least includes a visible light band.
The white light source is a broad spectrum light source, and the spectrum range at least comprises a visible light wave band.
The method comprises the following specific operation steps:
(1) constructing and collimating a light path according to any of figures 1-4, the imaging element preferably being a digital video camera and connected to a display;
(2) fixing a sample with a plasmon nanostructure array on a three-dimensional movable objective table, placing the objective table at a common focus of a main light path of a spectrum measurement, and moving the sample back and forth along an optical axis direction (Z direction) until a clear image of the sample is observed on a display;
(3) in order to find an image of a focus in a main spectrum measuring path, parallel incident light in the main spectrum measuring path firstly selects visible light band laser, finds the image of the focus on a display and marks the position of the image;
(4) the visible light band laser is changed into invisible light band incident light, and the invisible light band comprises but is not limited to ultraviolet and infrared light bands. The incident light needs to be collimated, namely the incident light entering the main light path of the spectrum measurement is approximate to ideal plane light;
(5) moving the sample on the XY plane through the objective table so that the focal point is located outside the area of the plasmon nanostructure array, and measuring a transmission spectrum signal R (lambda);
(6) measuring a transmission spectrum signal T (λ) by moving the sample on the XY plane through the stage such that the focal point is within a region of the plasmonic nanostructure array;
(7) and (3) an extinction spectrum E (lambda) = [ R (lambda) -T (lambda) ]/R (lambda) corresponding to the to-be-detected plasmon nano structure array.
Example 2:
the four optical paths in fig. 1-4 are equivalent, and preferably, 2 preferred embodiments of spectral main optical path signal collection are illustrated in the embodiment shown in fig. 1.
Scheme 1: if the photodetector with dispersion function has a fiber input interface, the transmitted light signal is coupled into the fiber with a collimator at a position behind the spectral main path splitting optical element B2 in the beam propagation direction, as shown in fig. 5. The working wavelength of the collimating mirror is matched with the working wavelength of the invisible light wave band light source and the working wavelength of the photoelectric detector, and the NA value of the collimating mirror is matched with the NA value of the optical fiber. The collimating mirror can effectively collect the transmitted parallel optical signals and provide a switching function for coupling free space light into the optical fiber.
Scheme 2: if the photodetector with dispersion function has no optical fiber input interface, a light-condensing element F6 is added to the intermediate optical path between the beam-splitting optical element B2 and the photodetector with dispersion function, and the back focal plane of F6 coincides with the light-receiving surface of the photodetector with dispersion function, as shown in FIG. 6. The light-condensing element F6 can improve the utilization rate of the transmission signal, thereby improving the signal-to-noise ratio of the whole optical system.
Example 3:
the four optical paths in fig. 1-4 are equivalent, and preferably, the preferred embodiment of the input of the main spectral measurement optical path is illustrated in the embodiment shown in fig. 1.
If the invisible light waveband light source is provided with an optical fiber output interface, a collimator is arranged at a certain position in front of the spectral optical element B1 of the main spectral path of the measured spectrum along the propagation direction of the light beam. The collimator is coupled to the optical fiber to output the signal of the invisible light band light source as parallel light, as shown in fig. 7. The working wavelength of the collimating mirror is matched with that of the invisible light waveband light source, and the NA value of the collimating mirror is matched with that of the optical fiber. The collimating lens can effectively collect optical signals in the optical fiber and provides an effective path for outputting the optical signals in the optical fiber to parallel light.
Example 4:
the four optical paths in fig. 1-4 are equivalent, and preferably, a preferred embodiment of the non-visible light band plasmon resonance spectroscopy and imaging optical system for measuring different linear polarization states is illustrated in the embodiment shown in fig. 1.
As shown in fig. 8, a polarizer and a half-wave plate are disposed at a position in front of the spectral main beam splitting optical element B1 in the light beam propagation direction. The polarizer changes the incident light of the invisible light wave band without specific polarization state into linearly polarized light, and the polarization direction of the incident light can be quantitatively changed by utilizing the half-wave plate. Specifically, by rotating the half-wave plate by an angle θ, the polarization direction of the incident light is rotated by 2 θ.
The above examples are only preferred embodiments of the present invention, and are not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art without departing from the spirit and the principle of the present invention, and any modifications, equivalents, improvements, etc. made within the scope of the present invention should be considered as being included in the protection scope of the present invention.
Claims (5)
1. The utility model provides a survey spectrum and formation of image optical system of invisible light wave band surface plasmon resonance, includes laser instrument, objective table, surveyed plasmon nanostructure, surveys spectrum main light path, formation of image light path and illumination light path, its characterized in that:
the main spectrum measuring light path comprises two confocal light-gathering optical elements, two light-splitting optical elements and a photoelectric detector with a dispersion function; the plasmon to be detected nano structure is placed at the common focus of the two confocal condensing optical elements, the two light splitting optical elements are positioned at two sides of the two confocal condensing optical elements, and the photoelectric detector with the dispersion function is positioned at the tail end of a spectrum detection main light path along the propagation direction of light beams; the confocal light-gathering optical element in the spectrum measuring main light path comprises a first light-gathering optical element and a second light-gathering optical element;
the imaging optical path comprises two conjugate condensing optical elements, a light splitting optical element and an imaging element; the conjugated light-gathering optical element in the imaging light path comprises a light-gathering optical element five and a light-gathering optical element two in the spectrum measurement main light path;
the illumination light path comprises a white light source, a light splitting optical element and three condensing optical elements; the three condensing optical elements in the illumination light path comprise a third condensing optical element, a fourth condensing optical element and a first condensing optical element in the spectrum measuring main light path;
the two light splitting optical elements of the spectrum measuring main optical path are one light splitting optical element in an imaging optical path and one light splitting optical element in an illumination optical path;
when the spectrum is measured, transmitted light signals T (lambda) and R (lambda) when the focal point of incident light of an invisible light waveband is located in a plasmon nano structure array region and outside the plasmon nano structure region are measured respectively, then extinction signals E (lambda) = [ R (lambda) -T (lambda) ]/R (lambda) of the plasmon nano structure are measured, wherein lambda is the light wavelength, T (lambda) is the light signal collected by the photoelectric detector when the focal point of a main spectrum detection light path is located in the plasmon nano structure array region, and R (lambda) is the light signal collected by the photoelectric detector when the focal point of the main spectrum detection light path is located outside the plasmon nano structure array region.
2. The system of claim 1, wherein the system comprises: the condensing optical element comprises a lens or an objective lens.
3. The system of claim 1, wherein the system comprises: the light splitting optical element comprises a light splitting glass slide, a light splitting prism, a light splitting cube or an optical fiber beam splitter.
4. The system of claim 1, wherein the system comprises: the imaging element comprises a digital video camera composed of a CCD or CMOS array, and the wavelength sensing range of the imaging element comprises a visible light wave band.
5. The system of claim 1, wherein the system comprises: the white light source is a wide spectrum light source, and the spectrum range of the white light source comprises a visible light wave band.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911087547.9A CN110879205B (en) | 2019-11-08 | 2019-11-08 | Spectrum measuring and imaging optical system for surface plasmon resonance of invisible light wave band |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911087547.9A CN110879205B (en) | 2019-11-08 | 2019-11-08 | Spectrum measuring and imaging optical system for surface plasmon resonance of invisible light wave band |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110879205A CN110879205A (en) | 2020-03-13 |
CN110879205B true CN110879205B (en) | 2022-01-11 |
Family
ID=69729349
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201911087547.9A Active CN110879205B (en) | 2019-11-08 | 2019-11-08 | Spectrum measuring and imaging optical system for surface plasmon resonance of invisible light wave band |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN110879205B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111982823A (en) * | 2020-08-05 | 2020-11-24 | 电子科技大学 | Magnetic field bias chiral molecular sensing device |
CN114002806B (en) * | 2021-11-10 | 2022-07-15 | 苏州天准科技股份有限公司 | Measuring device and measuring method based on spectrum confocal rapid focusing |
CN114734138A (en) * | 2022-04-24 | 2022-07-12 | 中国科学院重庆绿色智能技术研究院 | Method for enhancing laser energy absorption efficiency of spatial additive manufacturing wire |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6091075A (en) * | 1997-06-04 | 2000-07-18 | Hitachi, Ltd. | Automatic focus detection method, automatic focus detection apparatus, and inspection apparatus |
TWI498540B (en) * | 2013-05-30 | 2015-09-01 | Univ Nat Cheng Kung | Localized surface plasmon resonance detection system having asymmetric particle shape |
CN107991233B (en) * | 2017-11-02 | 2020-03-17 | 宁波大学 | Extinction spectrum measuring device for noble metal nano array and sensing detection method thereof |
CN109373910B (en) * | 2018-12-03 | 2024-08-09 | 中国科学技术大学 | Nanometer displacement measurement device and method based on surface plasmon asymmetric excitation |
-
2019
- 2019-11-08 CN CN201911087547.9A patent/CN110879205B/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN110879205A (en) | 2020-03-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110879205B (en) | Spectrum measuring and imaging optical system for surface plasmon resonance of invisible light wave band | |
CN109477955B (en) | Interference scattering microscope | |
JP5520036B2 (en) | Optical displacement meter | |
KR101819006B1 (en) | Optical measuring apparatus | |
US7102746B2 (en) | Raman spectroscope | |
US7439483B2 (en) | Real-time confocal microscope using the dispersion optics | |
CN103278093B (en) | Differential-motion double-area confocal axial measuring equipment | |
CN102519909B (en) | Air-space low-interference phase microscope based on liquid crystal tunable filter | |
CN110441235A (en) | A kind of Multiple modes coupling original position microspectrum imaging system | |
CN103884659B (en) | Angular resolution micro-nano spectral analysis device | |
US6853455B1 (en) | Apparatus and methods for fourier spectral analysis in a scanning spot microscope | |
CN102735620A (en) | Near field spectrum correlation imaging apparatus | |
JP4312775B2 (en) | Real-time confocal microscope using dispersive optics | |
CN108132026A (en) | Infrared visible ray dual wavelength transmission-type interference testing device in semiconductor | |
CN113960010A (en) | Dark field confocal Raman polarization spectrum measuring device and method based on vortex light beams | |
CN112504456A (en) | Micro-area differential reflection type spectrum measurement system and method | |
CN111220573B (en) | Nonlinear optical absorption cross section measuring method | |
See et al. | Design and characterization of a plasmonic Doppler grating for azimuthal angle-resolved surface plasmon resonances | |
CN111208072A (en) | Spectrum system for detecting trace gas concentration | |
CN101382456B (en) | Optical fiber Fourier transform imaging spectrometer apparatus | |
JP2934715B2 (en) | Optical waveguide device and confocal laser scanning differential interference microscope using the same | |
WO2021033177A1 (en) | Scanning hyperspectral camera and method | |
US20140185052A1 (en) | Fourier-transform spectrometer and method | |
CN110879204B (en) | Polarization-resolved surface plasmon resonance optical measurement system | |
CN101782433A (en) | Static all-optical interference imaging spectrum full-polarization detection method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |