CN216594776U - Microscopic angle-resolved spectrum measuring system - Google Patents
Microscopic angle-resolved spectrum measuring system Download PDFInfo
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- CN216594776U CN216594776U CN202123172592.XU CN202123172592U CN216594776U CN 216594776 U CN216594776 U CN 216594776U CN 202123172592 U CN202123172592 U CN 202123172592U CN 216594776 U CN216594776 U CN 216594776U
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Abstract
The utility model provides a microscopic angle resolution spectrum measuring system which comprises a microscopic objective and a collecting module. The sample to be measured is positioned at the focus of the microobjective, the collecting module sequentially comprises a first convex lens, a spatial filtering hole and a second convex lens, the spatial filtering hole is positioned at the common focus of the first convex lens and the second convex lens, and the effective focal length f of the microobjective1First convex lens focal length f2Diameter d of laser converged by a microscope objective1Spatial filtering hole diameter d2Satisfy f1/f2＝d1/d2. The resolution ratio of the utility model is close to the limit of the resolution ratio of the optical microscope, and the signal to noise ratio is greatly improved. The imaging system does not deflect the light path, so that a sample can be obtainedAngle resolved spectra of accurate positions. And the system component does not use an optical fiber component, so that the signal loss caused by optical fiber coupling can be avoided. The use of orthogonally configured energy splitting plates avoids measurement errors in the optical path that may occur due to the refractive effect of the optical elements.
Description
Technical Field
The utility model relates to a microscopic angle-resolved spectrum measuring system.
Background
Perovskites and certain monolayer transition metal sulfides are of great significance in the research of room temperature exciton polaritons due to the large exciton binding energy. Microscopic angle-resolved spectroscopic measurement systems are effective tools for detecting exciton polaritons. Since these materials are typically only a few microns, conventional microscopic angle-resolved systems, while having the ability to spatially resolve, do not have the ability to achieve the true optical diffraction limit. Therefore, designing a set of microscopic angle-resolved spectra with optical diffraction limit spatial resolution has important significance in the research of exciton polaritons.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a microscopic angle-resolved spectrometry system with optical diffraction limit spatial resolution. The specific scheme of the utility model is as follows.
A microscopic angle-resolved spectroscopy system comprising: the microscope objective 4 is used for converging laser to the surface of a sample to be detected so as to enable the sample to be detected to be excited to generate a fluorescence signal, or transmitting the fluorescence signal to the collection module; the collection module 31 is used for collecting fluorescence signals, and the fluorescence signals are used for analyzing and obtaining an angle-resolved spectrum of fluorescence of a sample to be detected; wherein, the sample to be measured is located at the focus of the microscope objective 4, the collecting module 31 sequentially comprises a first convex lens 311, a spatial filter hole 312 and a second convex lens 313, the spatial filter hole 312 is located at the common focus of the first convex lens 311 and the second convex lens 313, and the diameter d of the spatial filter hole 3122Satisfies the following conditions:
wherein f is1Is the effective focal length of the microscope objective 4, f2Is the focal length of the first convex lens 311, d1The diameter of the laser is the diameter of the laser after the laser is converged by the microscope objective 4.
Further, the spatial filter aperture 312 of the microscopic angle-resolved spectroscopic measurement system of the present invention is an iris diaphragm for precisely controlling the diameter of the light beam passing through the spatial filter aperture 312.
Further, the microscopic angle-resolved spectroscopy system of the present invention comprises: the energy beam splitting sheet 5 is arranged between the microscope objective 4 and the collection module 31; the laser is guided to enter the microscope objective 4 through the energy beam splitting sheet 5 and is converged to the surface of a sample to be detected; the fluorescence signal enters the collection module 31 through the microscope objective 4 and the energy beam splitter 5.
Further, the microscopic angle-resolved spectroscopy system of the present invention comprises: and the reflector 6 is used for changing the direction of the laser so that the laser with the direction changed by the reflector 6 accurately passes through the microscope objective 4 after being reflected by the energy beam splitting sheet 5 and finally is converged on the surface of the sample to be measured.
Further, in the micro angle-resolved spectroscopy system of the present invention, the number of the reflecting mirrors 6 is at least 2.
Further, the microscopic angle-resolved spectroscopy system of the present invention comprises: a light source 7, a CCD camera 8 and a semi-transparent semi-reflective beam splitting sheet group 9; the transflective beam splitting sheet set 9 includes a first transflective beam splitting sheet 91 and a second transflective beam splitting sheet 92, and the first transflective beam splitting sheet 91 and the second transflective beam splitting sheet 92 are orthogonal to each other; the semi-transmitting and semi-reflecting beam splitting sheet group 9 is arranged between the energy beam splitting sheet 5 and the first convex lens 311, and the first semi-transmitting and semi-reflecting beam splitting sheet 91 and the second semi-transmitting and semi-reflecting beam splitting sheet 92 form an angle of 45 degrees with the optical axis of the first convex lens 311; the light source 7 and the CCD camera 8 are arranged at two sides of the semi-transparent semi-reflective beam splitting sheet group 9, light signals emitted by the light source 7 are reflected by the second semi-transparent semi-reflective beam splitting sheet 92 to pass through the first semi-transparent semi-reflective beam splitting sheet 91, the energy beam splitting sheet 5 and the microscope objective 4 to reach the surface of a sample to be detected, and after being reflected by the sample to be detected, the light signals pass through the microscope objective 4 and the energy beam splitting sheet 5 and are collected by the CCD camera 8 after being reflected by the first semi-transparent semi-reflective beam splitting sheet 91.
Further, the microscopic angle-resolved spectroscopy system of the present invention includes a spectrometer 32 for detecting the fluorescence signal collected by the collection module 31.
Further, the half-transmitting and half-reflecting beam splitting sheet set 9 of the microscopic angle-resolved spectroscopy measurement system of the present invention is disposed between the second convex lens 313 and the spectrometer 32.
Further, the micro-angle-resolved spectroscopy system of the present invention includes a filter disposed between the second convex lens 313 and the spectrometer 32.
Further, the microscopic angle-resolved spectroscopy measurement system of the present invention includes a filter disposed between the transflective beam splitting sheet set 9 and the first convex lens 311.
The utility model has the following beneficial effects:
(1) the spatial filter hole used by the system can obtain an angle-resolved spectrum signal at the focus of the sample to be detected through the matching with the microscope objective, the resolution ratio is close to the limit of the resolution ratio of the optical microscope, and the signal-to-noise ratio is greatly improved;
(2) the imaging system does not deflect the light path, so that the angle-resolved spectrum of the accurate position of the sample can be obtained;
(3) the system component does not use an optical fiber component, so that the signal loss caused by optical fiber coupling can be avoided;
(4) the excitation light path and the collection light path are confocal, and the measurement error possibly existing due to different reflection angles in the light path is avoided.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of another embodiment of the present invention;
FIG. 3 is a schematic structural diagram of yet another embodiment of the present invention;
fig. 4 is a schematic structural diagram of a further embodiment of the present invention.
In the figure:
1-an excitation module; 2-a sample stage; 31-a collection module; 311-a first convex lens; 312-a spatial filter aperture; 313-a second convex lens; 32-a spectrometer; 4-a microscope objective; 5-energy beam splitting slice; 6-a reflector; 7-a light source; 8-CCD camera; 9-a semi-transparent semi-reflective beam splitting slice group; 91-a first transflective beam splitting sheet; 92-a second transflective beam splitter sheet.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to specific embodiments and the accompanying drawings.
The utility model at least comprises a microscope objective 4 and a collection module 31. The microscope objective 4 is used for converging laser to the surface of a sample to be detected so as to enable the sample to be detected to be excited to generate a fluorescence signal, or transmitting the fluorescence signal to the collection module; the collection module 31 is configured to collect a fluorescence signal, and the fluorescence signal is used to analyze and obtain an angle-resolved spectrum of fluorescence of the sample to be detected.
The sample to be measured is positioned at the focus of the microscope objective 4, so that small light spots can be reserved on the surface of the sample to be measured after incident laser is converged by the microscope objective 4, and the accuracy of angle-resolved spectroscopic measurement is improved.
The power of the incident laser is adjusted to enable the laser to excite the sample to be detected and generate a fluorescence signal on the surface of the sample to be detected. The fluorescence signal is transmitted to the collection module 31 after passing through the microscope objective 4.
The collecting module 31 sequentially includes a first convex lens 311, a spatial filtering hole 312, and a second convex lens 313, wherein the spatial filtering hole 312 is located at a common focus of the first convex lens 311 and the second convex lens 313.
When the fluorescence signal generated by the excited sample to be detected is transmitted to the collection module 31, the fluorescence signal is converged to the focus of the first convex lens 311 through the first convex lens 311. The focus is provided with a spatial filter hole 312, and the converged fluorescent signal is filtered when passing through the spatial filter hole 312, so that only the fluorescent light beam with the same size as the spatial filter hole 312 passes through.
Diameter d of spatial filter aperture 3122Satisfies the following conditions:
wherein f is1Is the effective focal length of the microscope objective 4, f2Is the focal length of the first convex lens 311, d1The diameter of the laser is the diameter of the laser after the laser is converged by the microscope objective 4.
Effective focal length f of the microscope objective 41Focal length f of the first convex lens 3112The diameter of the spatial filter hole 312 is determined by the diameter d of the laser converged by the microscope objective 41And (4) changing. d1Usually by the numerical aperture of the microscope objective 4. For example, for 532nm laser, the spatial resolution is about 1 μm after passing through an objective lens with a numerical aperture of 0.9.
The spatial filtering hole 312 plays a role of a diaphragm, light outside the limiting hole passes through, and due to the fact that the spatial filtering hole 312 is conjugated with the focus of the microscope objective 4, only a fluorescence signal at the focus of the microscope objective 4 passes through the spatial filtering hole 312 by changing the size of the spatial filtering hole 312, and therefore the spatial resolution under the optical diffraction limit is achieved, and the size of the spatial resolution is about 1 mu m.
The diameter d of the spatial filter hole 312 is usually calculated by the present invention2Then directly selecting corresponding commercial devices. But the utility model can also adopt an iris diaphragm, and the corresponding aperture can be obtained by adjusting the iris diaphragm. The beam diameter through the spatial filter aperture (312) can be more precisely controlled using an iris.
The fluorescence signal filtered by the spatial filtering hole 312 passes through the second convex lens 313 to be converted into a Fourier space signal, and the Fourier space signal is analyzed to obtain the angle-resolved spectrum of the fluorescence of the sample to be detected.
Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
The embodiment also comprises a sample stage 2 and an excitation module 1. The sample stage 2 is used for fixing a sample to be tested, and the excitation module 1 is used for emitting laser to excite the sample to be tested so as to generate a fluorescence signal.
In this embodiment, the excitation module 1 employs a laser, and the laser wavelength emitted by the laser is adjusted according to the sample material to be measured. The laser energy should generally be greater than the optical bandgap of the sample material to be measured. When the laser emits laser to the surface of the sample to be detected, the sample to be detected is excited so as to generate a fluorescence signal.
In this embodiment, the laser emitted by the laser device is converged on the surface of the sample to be measured after passing through the microscope objective 4. The sample to be measured is located at the focus of the microscope objective 4.
The collecting module 31 is used for collecting a fluorescence signal generated by the sample to be detected due to the excitation so as to further analyze the fluorescence signal. The fluorescence signal generated by the excited sample is transmitted to the collection module 31 through the microscope objective 4.
The conventional microscopic angle-resolved spectroscopy measurement system uses a small hole which is generally 1mm, has low spatial resolution, or uses an optical fiber for optical path transmission, and the optical signal collection efficiency is reduced more at the moment. Although the conventional microscopic angle-resolved spectroscopic measurement system has a spatial resolution capability, the spatial resolution capability of the optical diffraction limit is not achieved, and the spatial resolution is low when exciton polaritons are detected.
Fig. 2 is a schematic structural diagram of another embodiment of the present invention.
In the present embodiment, an energy beam splitter 5 is used, and the energy beam splitter 5 is disposed between the microscope objective 4 and the collection module 31.
At the moment, laser emitted by the excitation module 1 is guided to enter the microscope objective 4 through the energy beam splitting sheet 5, and the microscope objective 4 converges the laser to the surface of a sample to be detected; the sample to be measured is excited to generate a fluorescence signal, the fluorescence signal passes through the microscope objective 4 and the energy beam splitter 5 and then enters the collection module 31, and the fluorescence signal is collected by the spectrometer 32 after passing through the first convex lens 311, the spatial filter hole 312 and the second convex lens 313.
Defining that laser emitted by an excitation module 1 is reflected by an energy beam splitting sheet 5 and reaches the surface of a sample to be tested after passing through a microscope objective 4 to form an excitation light path; the fluorescence signal generated by the excited sample to be measured forms a collection light path through the microscope objective 4, the energy beam splitter 5, the first convex lens 311, the spatial filter hole 312, the second convex lens 313 and the spectrometer 32.
In this embodiment, the energy beam splitter 5 is adopted to focus the excitation light path and the collection light path, so that the light path in the system is not deflected, thereby avoiding the measurement error possibly existing due to different reflection angles in the light path, and obtaining the resolution spectrum of the accurate position of the sample to be measured.
Referring to fig. 3, in another embodiment of the present invention, a reflecting mirror 6 is used in the excitation light path, so that the laser light emitted by the excitation module 1 can accurately reach the energy beam splitter 5 after being reflected by the reflecting mirror 6, and the laser light is reflected and transmitted by the energy beam splitter 5, thereby completing the confocal of the excitation light path and the collection light path.
When the mirror 6 is used to adjust the direction of the excitation light path, at least two mirrors 6 are often used in combination to achieve the best adjustment effect. The embodiment of fig. 3 is the case where two mirrors 6 are used.
Still another embodiment of the present invention, as shown in fig. 4, provides an imaging system between the energy splitting sheet 5 and the first convex lens 311. The imaging system comprises a light source 7, a CCD camera 8 and a semi-transparent semi-reflective beam splitting sheet set 9, the semi-transparent semi-reflective beam splitting sheet set 9 comprises a first semi-transparent semi-reflective beam splitting sheet 91 and a second semi-transparent semi-reflective beam splitting sheet 92, and the first semi-transparent semi-reflective beam splitting sheet 91 and the second semi-transparent semi-reflective beam splitting sheet 92 are orthogonal to each other.
When the imaging system is disposed between the energy beam splitter 5 and the first convex lens 311, the transflective beam splitter sheet set 9 is disposed on the collecting light path between the energy beam splitter 5 and the first convex lens 311, and the first transflective beam splitter sheet 91 and the second transflective beam splitter sheet 92 both form an angle of 45 ° with the optical axis of the first convex lens 311. At this time, the fluorescence signal on the collecting optical path can pass through the transflective beam splitting sheet set 9 by the energy beam splitting sheet 5 to reach the first convex lens 311.
The light source 7 and the CCD camera 8 are arranged at two sides of the collecting light path, the light signal emitted by the light source 7 is reflected by the second semi-transparent semi-reflective beam splitting sheet 92, then passes through the first semi-transparent semi-reflective beam splitting sheet 91, passes through the energy beam splitting sheet 5 and the microscope objective 4, and then reaches the surface of the sample to be measured, and the sample to be measured reflects the light signal, and then is reflected to the CCD camera 8 on the first semi-transparent semi-reflective beam splitting sheet 91 through the microscope objective 4 and the energy beam splitting sheet 5.
On the other hand, the excitation module 1 emits laser, which reaches the surface of the sample to be measured through the reflector 6, the energy beam splitter 5 and the microscope objective 4 and then is reflected, and the reflected laser sequentially passes through the microscope objective 4 and the energy beam splitter 5, is transmitted to the first semi-transparent semi-reflective beam splitter sheet 91, and is reflected to the CCD camera 8 through the first semi-transparent semi-reflective beam splitter sheet 91.
At this time, two different signals emitted by the light source 7 and the excitation module 1 are captured by the CCD camera 8 at the same time, so that the position of the laser emitted to the surface of the sample to be measured can be determined. The power of the excitation module 1 is adjusted to excite the sample to be detected to generate a fluorescence signal, and after the fluorescence signal is collected by the collection light path, the collection position of the fluorescence signal on the surface of the sample to be detected can be determined by the CCD camera 8.
The imaging system of the utility model is used for optical imaging and positioning the position of a sample, and the whole imaging system can be separated from a microscopic angle-resolved spectrum measuring system according to specific conditions in the testing process. The semi-transmissive and semi-reflective beam splitting sheet set 9 can make the first semi-transmissive and semi-reflective beam splitting sheet 91 and the second semi-transmissive and semi-reflective beam splitting sheet 92 enter or separate from the collecting light path at the same time, so as to ensure that the light rays of the collecting light path are not deflected.
The imaging system of the present invention may also be disposed between the second convex lens 313 and the spectrometer 32.
Still other embodiments of the present invention may include a filter between the energy beam splitter 5 and the first convex lens 311, or between the second convex lens 313 and the spectrometer 32. The laser light used to prevent inelastic scattering causes overexposure of the spectrometer 32. When an imaging system is provided in the system, a filter may be provided between the imaging system and the first convex lens 311.
Referring to fig. 4, a specific operation of this embodiment is given below.
Laser is emitted by an excitation module 1, namely a laser, and enters an energy beam splitting sheet 5 after being reflected by a reflector 6, and the laser in the energy beam splitting sheet 5 is reflected to a microscope objective 4 and is converged to the surface of a sample to be detected fixed on a sample table 2 through the microscope objective 4. At this time, the laser projected on the surface of the sample to be measured enters the microscope objective 4 after being reflected by the sample to be measured, a part of the laser passes through the energy beam splitting sheet 5 and then is reflected by the first transflective beam splitting sheet 91 to enter the CCD camera 8 and then is captured by the CCD camera 8, the other part of the laser passes through the second transflective beam splitting sheet 92 and then enters the collection module 31, and the laser passes through the first convex lens 311, the spatial filter hole 312 and the second convex lens 313 in the collection module 31 and then is collected by the spectrometer 32, so as to be further analyzed.
Meanwhile, the light source 7 emits white light, the white light is reflected to the first transflective beam splitter sheet 91 through the second transflective beam splitter sheet 92, passes through the first transflective beam splitter sheet 91 and then sequentially passes through the energy beam splitter 5 and the microscope objective 4, and is converged to the surface of a sample to be measured fixed on the sample stage 2 through the microscope objective 4, the white light is reflected to the microscope objective 4 by the sample to be measured, a part of the white light after passing through the energy beam splitter 5 is reflected by the first transflective beam splitter sheet 91 to enter the CCD camera 8 and then is captured by the CCD camera 8, and a part of the white light passes through the first transflective beam splitter sheet 91 and the second transflective beam splitter sheet 92 and then enters the collection module 31. The CCD camera 8 captures the laser light and the white light reflected by the sample to be measured at the same time, and thus the position of the laser light projected onto the surface of the sample to be measured can be determined. And calibrating the position of the laser spot on the surface of the sample to be detected on CCD camera software.
At the location of the spatial filter aperture 312, the aperture of the spatial filter aperture 312 is such that only laser light passes through the spatial filter aperture 312 and white light cannot pass through. And (3) turning off the light source 7, and increasing the laser power of the laser 1, so that the sample to be detected is excited to generate a fluorescence signal when the laser is projected to the surface of the sample to be detected.
The fluorescence signal enters the collection module 31 after passing through the microscope objective 4, the energy beam splitter 5, the first transflective beam splitter sheet 91 and the second transflective beam splitter sheet 92. At this time, the first convex lens 311 converges the fluorescence signal to the focus of the first convex lens 311, the spatial filter hole 312 limits the passage of the fluorescence signal outside the hole, the fluorescence signal passing through the hole passes through the second convex lens 313, is converted into a fourier spatial signal, and is collected by the spectrometer 32, so that the fluorescence angle-resolved spectrum of the sample to be measured is obtained.
The essential part of the utility model is a spatial filter aperture 312, which is dependent on the effective focal length f of the microscope objective 41Focal length f of the first convex lens 3112Diameter d of laser converged by microscope objective 41The diameter of the spatial filter hole 312 can be accurately calculated, so that an angle-resolved spectrum signal at the focus of the sample to be detected can be obtained, the resolution is close to the limit of the resolution of the optical microscope, and the signal-to-noise ratio is greatly improved. And the imaging system does not deflect the light path, so that the angle-resolved spectrum of the accurate position of the sample can be obtained. In addition, the system component of the utility model can avoid signal loss caused by optical fiber coupling because the optical fiber component is not used. In some embodiments of the utility model, an energy beam splitter 5 is used to couple the excitation light path withThe collection light path is confocal, and the measurement error possibly existing in the light path due to different reflection angles is avoided.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention, and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A microscopic angle-resolved spectroscopic measurement system, comprising:
the microscope objective (4) is used for converging laser to the surface of a sample to be detected so as to enable the sample to be detected to be excited to generate a fluorescence signal, or transmitting the fluorescence signal to the collection module (31);
a collecting module (31) for collecting the fluorescence signal, wherein the fluorescence signal is used for analyzing to obtain an angle-resolved spectrum of the fluorescence of the sample to be detected; wherein, the first and the second end of the pipe are connected with each other,
the sample to be measured is positioned at the focus of the microscope objective (4),
the collection module (31) sequentially comprises a first convex lens (311), a spatial filtering hole (312) and a second convex lens (313), the spatial filtering hole (312) is located at the common focus of the first convex lens (311) and the second convex lens (313),
the diameter d of the spatial filter aperture (312)2Satisfies the following conditions:
wherein f is1Is the effective focal length of the microscope objective (4), f2Is the focal length of the first convex lens (311), d1The diameter of the laser is the diameter of the laser after the laser is converged by the microscope objective (4).
2. The microscopic angle-resolved spectroscopic measurement system of claim 1, wherein the spatial filter aperture (312) is an iris diaphragm for precisely controlling the beam diameter passing through the spatial filter aperture (312).
3. The microscopic angle-resolved spectroscopic measurement system of claim 1, comprising:
an energy beam splitting sheet (5) arranged between the microscope objective (4) and the collection module (31);
the laser is guided by the energy beam splitting sheet (5) to enter the microscope objective (4) and is converged on the surface of the sample to be detected;
the fluorescence signal enters the collection module (31) through the microscope objective (4) and the energy beam splitting sheet (5).
4. A microscopic angle-resolved spectroscopic measurement system as set forth in claim 3 comprising:
and the reflector (6) is used for changing the direction of the laser so that the laser with the direction changed by the reflector (6) accurately passes through the microscope objective (4) after being reflected by the energy beam splitting sheet (5) and finally is converged on the surface of the sample to be detected.
5. Microscopic angle-resolved spectroscopic measurement system according to claim 4, characterized in that the number of mirrors (6) is at least 2.
6. Microscopic angle-resolved spectrometry system according to claim 3 or 4, comprising:
a light source (7), a CCD camera (8) and a semi-transparent semi-reflective beam splitting thin plate group (9); wherein the content of the first and second substances,
the semi-transparent semi-reflective beam splitting sheet set (9) comprises a first semi-transparent semi-reflective beam splitting sheet (91) and a second semi-transparent semi-reflective beam splitting sheet (92), and the first semi-transparent semi-reflective beam splitting sheet (91) and the second semi-transparent semi-reflective beam splitting sheet (92) are orthogonal to each other;
the semi-transmitting and semi-reflecting beam splitting sheet group (9) is arranged between the energy beam splitting sheet (5) and the first convex lens (311), and the first semi-transmitting and semi-reflecting beam splitting sheet (91) and the second semi-transmitting and semi-reflecting beam splitting sheet (92) form an angle of 45 degrees with the optical axis of the first convex lens (311);
light source (7), CCD camera (8) set up in semi-transparent semi-reflecting beam splitting thin-plate group (9) both sides, the light signal of light source (7) transmission passes through second semi-transparent semi-reflecting beam splitting thin-plate (92) reflection first semi-transparent semi-reflecting beam splitting thin-plate (91), energy beam splitting piece (5), micro objective (4) reachs the sample surface that awaits measuring, the warp sample that awaits measuring passes behind the reflection micro objective (4), energy beam splitting piece (5), the warp quilt behind first semi-transparent semi-reflecting beam splitting thin-plate (91) reflection CCD camera (8) are gathered.
7. The microscopic angle-resolved spectroscopic measurement system of claim 6, comprising:
a spectrometer (32) for detecting the fluorescence signal collected by the collection module (31).
8. The microscopic angle-resolved spectroscopic measurement system of claim 7, wherein the set of half-transparent and half-reflective beam splitting sheets (9) is disposed between the second convex lens (313) and the spectrometer (32).
9. The microscopic angle-resolved spectroscopic measurement system of claim 7, comprising:
and the filter is arranged between the second convex lens (313) and the spectrometer (32).
10. The microscopic angle-resolved spectroscopic measurement system of claim 9, wherein the filter is disposed between the transflective beam splitting sheet set (9) and the first convex lens (311).
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