CN110846616B - Head cover simulation piece for hard film deposition and adjusting device thereof - Google Patents
Head cover simulation piece for hard film deposition and adjusting device thereof Download PDFInfo
- Publication number
- CN110846616B CN110846616B CN201911311949.2A CN201911311949A CN110846616B CN 110846616 B CN110846616 B CN 110846616B CN 201911311949 A CN201911311949 A CN 201911311949A CN 110846616 B CN110846616 B CN 110846616B
- Authority
- CN
- China
- Prior art keywords
- head cover
- simulation piece
- coated
- hood
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004088 simulation Methods 0.000 title claims abstract description 32
- 230000008021 deposition Effects 0.000 title claims abstract description 12
- 230000002093 peripheral effect Effects 0.000 claims abstract description 9
- 230000007704 transition Effects 0.000 claims abstract description 4
- 230000003044 adaptive effect Effects 0.000 claims abstract description 3
- 239000004809 Teflon Substances 0.000 claims description 15
- 229920006362 Teflon® Polymers 0.000 claims description 15
- 229920001971 elastomer Polymers 0.000 claims description 11
- 229920006356 Teflon™ FEP Polymers 0.000 claims description 9
- 229920002449 FKM Polymers 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000000741 silica gel Substances 0.000 claims description 5
- 229910002027 silica gel Inorganic materials 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 2
- 238000007789 sealing Methods 0.000 abstract description 11
- 239000000376 reactant Substances 0.000 abstract description 5
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 239000000126 substance Substances 0.000 description 6
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 150000001340 alkali metals Chemical class 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 229920009441 perflouroethylene propylene Polymers 0.000 description 2
- 230000008961 swelling Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
Abstract
The invention discloses a hood simulation piece for hard film deposition and an adjusting device thereof, and mainly relates to the technical field of hard film deposition. Comprises a hood simulation piece to be coated and an adjusting chassis; the adjusting chassis comprises a head cover support and a head cover circular ring, an annular O-shaped ring is arranged between the peripheral bottom surface of the head cover simulation piece to be coated and the step top surface of the head cover support, the peripheral side surface of the head cover simulation piece to be coated, the step side surface of the head cover support and the outer side surface of the annular O-shaped ring are in adaptive contact with the inner side surface of the head cover circular ring, and continuous transition is formed between the outer cambered surface of the head cover circular ring and the circular arc surface of the head cover simulation piece to be coated. The invention has the beneficial effects that: the device can realize the sealing between the to-be-coated hood simulation piece and the adjusting chassis, avoid the reactant to diffuse to the inner surface of the to-be-coated hood simulation piece to form a film, and find that the diffraction edge disappears after the test.
Description
Technical Field
The invention relates to the technical field of hard film deposition, in particular to a hood simulation piece for hard film deposition and an adjusting device thereof.
Background
In the process of performing a film deposition test, a workpiece to be deposited is placed in a vacuum electric field environment, a film is deposited on the surface of the workpiece to be deposited, and a diffraction edge appears at the back edge of a head cover simulation piece. ( Diffraction edge: reactants enter between the head cover and the adjusting chassis through the gap where the head cover contacts with the adjusting chassis, uneven films are formed at the edge of the inner surface of the head cover, and the reflected light is colored and is similar to single-gap diffraction and is called diffraction edge )
The "diffraction edge" occurs when DLC film deposits on the edges of the inner surface of the dummy and the film thickness is uneven, which can adversely affect the imaging of the hood.
Disclosure of Invention
The invention aims to provide a hood simulation piece for hard film deposition and an adjusting device thereof, which can realize the sealing between a hood simulation piece to be coated and an adjusting chassis, prevent reactants from diffusing to the inner surface of the hood simulation piece to be coated to form a film, and find that the diffraction edge disappears after the test.
The invention aims to achieve the aim, and the aim is achieved by the following technical scheme:
the head cover simulation piece for hard film deposition and the adjusting device thereof comprise a head cover simulation piece to be coated and an adjusting chassis; the adjusting chassis comprises a head cover support and a head cover circular ring, an annular O-shaped ring is arranged between the peripheral bottom surface of the head cover simulation piece to be coated and the step top surface of the head cover support, the peripheral side surface of the head cover simulation piece to be coated, the step side surface of the head cover support and the outer side surface of the annular O-shaped ring are in adaptive contact with the inner side surface of the head cover circular ring, and continuous transition is formed between the outer cambered surface of the head cover circular ring and the circular arc surface of the head cover simulation piece to be coated.
The annular O-ring is formed by combining a silica gel inner core or a Viton glue inner core, a relatively thin Teflon FEP coating or a Teflon PFA coating.
Compared with the prior art, the invention has the beneficial effects that:
1. and adding a circular O-shaped ring covered with Teflon PFA or Teflon FEP at the contact position of the to-be-coated hood simulation piece and the adjustment chassis, correspondingly modifying the structure of the adjustment chassis, realizing the sealing among the hood, the O-shaped ring and the adjustment chassis through the dead weight of the hood, avoiding the reactant from diffusing to the inner surface of the hood to form a film, and finding that the diffraction edge disappears after the test.
2. The annular O-ring combines the elasticity and the tightness of rubber with the chemical resistance of Teflon, and is formed by combining an inner core made of silica gel or Viton rubber and a relatively thin Teflon FEP or Teflon PFA coating, and the rubber Teflon sealing ring has excellent sealing performance. Rubber O-shaped rings are easy to wear, poor in chemical corrosion resistance and gas permeation resistance, and pure Telfon O-shaped rings are high in hardness, capable of resisting compression and poor in elasticity. The Teflon FEP/Teflon PFA O-ring has good swelling resistance and chemical stability (unless eroded by alkali metal, fluorine and some halides at high temperature), good elasticity near the rubber O-ring, very small friction coefficient (only 0.1-0.2) of Telfon FEP/Teflon PFA, and good gas permeation resistance, and the performances can enable the sealing ring to be truly applied in severe environment.
Drawings
FIG. 1 is an exploded view of the present invention.
Fig. 2 is an exploded view of the present invention.
Fig. 3 is a combined state diagram of the present invention.
Fig. 4 is a cross-sectional view of the present invention.
The reference numbers shown in the drawings:
1. a hood simulation piece to be coated; 2. adjusting the chassis; 3. a head cover bracket; 4. a head cover ring; 5. a peripheral bottom surface; 6. a step top surface; 7. an annular O-ring; 8. a peripheral side surface; 9. a step side; 10. an outer side surface; 11. an inner side surface; 12. an outer cambered surface; 13. an arc surface.
Detailed Description
The invention will be further illustrated with reference to specific examples. It is to be understood that these examples are illustrative of the present invention and are not intended to limit the scope of the present invention. Further, it will be understood that various changes or modifications may be made by those skilled in the art after reading the teachings of the invention, and such equivalents are intended to fall within the scope of the invention as defined herein.
The invention relates to a hood simulation piece for hard film deposition and an adjusting device thereof, wherein a main body structure comprises a hood simulation piece 1 to be coated and an adjusting chassis 2; the adjusting chassis 2 comprises a hood support 3 and a hood circular ring 4, an annular O-shaped ring 7 is arranged between the peripheral bottom surface 5 of the hood simulation piece 1 to be coated and the step top surface 6 of the hood support 3, and the annular O-shaped ring 7 is formed by combining a silica gel inner core or a Viton glue inner core, a relatively thin Teflon FEP outer cover or a Teflon PFA outer cover. The annular O-ring 7 combines the elasticity and sealing properties of rubber with the chemical resistance of Teflon, and is formed by combining a silica gel or Viton rubber inner core and a relatively thin Teflon FEP or Teflon PFA outer cover, and the rubber Teflon sealing ring has excellent sealing performance. Rubber O-shaped rings are easy to wear, poor in chemical corrosion resistance and gas permeation resistance, and pure Telfon O-shaped rings are high in hardness, capable of resisting compression and poor in elasticity. The Teflon FEP/Teflon PFA O-ring has good swelling resistance and chemical stability (unless eroded by alkali metal, fluorine and some halides at high temperature), good elasticity near the rubber O-ring, very small friction coefficient (only 0.1-0.2) of Telfon FEP/Teflon PFA, and good gas permeation resistance, and the performances can enable the sealing ring to be truly applied in severe environment.
The periphery side 8 of the to-be-coated hood simulation piece 1, the step side 9 of the hood support 3 and the outer side 10 of the annular O-shaped ring 7 are in fit contact with the inner side 11 of the hood ring 4, and continuous transition is formed between the outer cambered surface 12 of the hood ring 4 and the circular arc surface 13 of the to-be-coated hood simulation piece 1. A circular O-shaped ring 7 covered with Teflon PFA or Teflon FEP is added at the contact position of a to-be-coated hood simulation piece 1 and an adjusting chassis 2, the structure of the adjusting chassis 2 is correspondingly modified, the sealing among the hood, the O-shaped ring and the adjusting chassis 2 is realized through the dead weight of the hood, the reactant is prevented from diffusing to the inner surface of the hood to form a film, and the diffraction edge is found to disappear after the test.
Claims (2)
1. The head cover simulation piece for hard film deposition and the adjusting device thereof comprise a head cover simulation piece (1) to be coated and an adjusting chassis (2); the method is characterized in that: the adjusting chassis (2) comprises a head cover support (3) and a head cover circular ring (4), the head cover support (3) is an arch-shaped support, an annular O-shaped ring (7) is arranged between the peripheral bottom surface (5) of the head cover simulation piece (1) to be coated and the step top surface (6) of the head cover support (3), the peripheral side surface (8) of the head cover simulation piece (1) to be coated, the step side surface (9) of the head cover support (3), the outer side surface (10) of the annular O-shaped ring (7) and the inner side surface (11) of the head cover circular ring (4) are in adaptive contact, and continuous transition is formed between the outer side cambered surface (12) of the head cover circular ring (4) and the arc surface (13) of the head cover simulation piece (1) to be coated.
2. A head cap simulator for hard film deposition and its adjusting device according to claim 1, wherein: the annular O-shaped ring (7) is formed by combining a silica gel inner core or a Viton rubber inner core, a relatively thin Teflon FEP coating or a Teflon PFA coating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911311949.2A CN110846616B (en) | 2019-12-18 | 2019-12-18 | Head cover simulation piece for hard film deposition and adjusting device thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911311949.2A CN110846616B (en) | 2019-12-18 | 2019-12-18 | Head cover simulation piece for hard film deposition and adjusting device thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110846616A CN110846616A (en) | 2020-02-28 |
| CN110846616B true CN110846616B (en) | 2024-02-23 |
Family
ID=69609824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911311949.2A Active CN110846616B (en) | 2019-12-18 | 2019-12-18 | Head cover simulation piece for hard film deposition and adjusting device thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110846616B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114473912A (en) * | 2022-02-23 | 2022-05-13 | 安徽光智科技有限公司 | Radome fairing concave surface coating tool |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63216970A (en) * | 1987-03-04 | 1988-09-09 | Sumitomo Heavy Ind Ltd | Vacuum sealing device in vacuum deposition equipment |
| JP2007126756A (en) * | 2003-03-20 | 2007-05-24 | Ebara Corp | Electroless plating apparatus and electroless plating method |
| CN101760725A (en) * | 2008-12-25 | 2010-06-30 | 北京有色金属研究总院 | Preparation method of zinc sulphide head cap with high optical quality |
| CN103147070A (en) * | 2011-12-06 | 2013-06-12 | 长春理工大学 | Method for controlling film thickness uniformity of DLC deposited film and adjustment base plate |
| CN105839058A (en) * | 2016-04-05 | 2016-08-10 | 中国建筑材料科学研究总院 | Plating method for diamond like carbon film on surface of zinc sulfide matrix and zinc sulfide plate comprising diamond like carbon film |
| CN206580883U (en) * | 2017-01-13 | 2017-10-24 | 凯里学院 | A kind of diamond-like carbon film-coating Preparation equipment |
| CN107460445A (en) * | 2016-06-03 | 2017-12-12 | 株式会社荏原制作所 | Coating apparatus and its control method, substrate holder and storage medium |
| CN108754426A (en) * | 2018-06-20 | 2018-11-06 | 安徽省通达包装材料有限公司 | A kind of vacuum ellipsoid film coating roller aluminum film coating device and its working method |
| KR20190068149A (en) * | 2017-12-08 | 2019-06-18 | 트인로드 주식회사 | Carbon mechanical seal with DLC thin film |
| CN211005579U (en) * | 2019-12-18 | 2020-07-14 | 杨永亮 | Hood simulation piece for hard film deposition and adjusting device thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9404174B2 (en) * | 2011-12-15 | 2016-08-02 | Applied Materials, Inc. | Pinned target design for RF capacitive coupled plasma |
-
2019
- 2019-12-18 CN CN201911311949.2A patent/CN110846616B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63216970A (en) * | 1987-03-04 | 1988-09-09 | Sumitomo Heavy Ind Ltd | Vacuum sealing device in vacuum deposition equipment |
| JP2007126756A (en) * | 2003-03-20 | 2007-05-24 | Ebara Corp | Electroless plating apparatus and electroless plating method |
| CN101760725A (en) * | 2008-12-25 | 2010-06-30 | 北京有色金属研究总院 | Preparation method of zinc sulphide head cap with high optical quality |
| CN103147070A (en) * | 2011-12-06 | 2013-06-12 | 长春理工大学 | Method for controlling film thickness uniformity of DLC deposited film and adjustment base plate |
| CN105839058A (en) * | 2016-04-05 | 2016-08-10 | 中国建筑材料科学研究总院 | Plating method for diamond like carbon film on surface of zinc sulfide matrix and zinc sulfide plate comprising diamond like carbon film |
| CN107460445A (en) * | 2016-06-03 | 2017-12-12 | 株式会社荏原制作所 | Coating apparatus and its control method, substrate holder and storage medium |
| CN206580883U (en) * | 2017-01-13 | 2017-10-24 | 凯里学院 | A kind of diamond-like carbon film-coating Preparation equipment |
| KR20190068149A (en) * | 2017-12-08 | 2019-06-18 | 트인로드 주식회사 | Carbon mechanical seal with DLC thin film |
| CN108754426A (en) * | 2018-06-20 | 2018-11-06 | 安徽省通达包装材料有限公司 | A kind of vacuum ellipsoid film coating roller aluminum film coating device and its working method |
| CN211005579U (en) * | 2019-12-18 | 2020-07-14 | 杨永亮 | Hood simulation piece for hard film deposition and adjusting device thereof |
Non-Patent Citations (2)
| Title |
|---|
| 多波段红外增透与保护膜技术的研究;付秀华等;兵工学报(第10期);第35-37页 * |
| 大面积头罩上类金刚石薄膜均匀性研究;付秀华等;红外与激光工程(第01期);第187-190页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110846616A (en) | 2020-02-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110846616B (en) | Head cover simulation piece for hard film deposition and adjusting device thereof | |
| JP5842814B2 (en) | Camera mount | |
| US9468114B2 (en) | Housing and electronic device using the same | |
| CN110777335B (en) | Temperature resistant carbon coating | |
| CN211005579U (en) | Hood simulation piece for hard film deposition and adjusting device thereof | |
| TW201309836A (en) | Diamond like carbon film and method of fabricating the same | |
| JP2022109981A (en) | piston ring | |
| CN107217259A (en) | The preparation method of infrared chalcogenide glass surface coating diamond-like film | |
| TW200716899A (en) | Outer ring and clamp-type joint for vacuum apparatus | |
| JP2002097573A (en) | Sliding member | |
| CN110922064A (en) | Wear-resistant glass and preparation method thereof | |
| CN107419228A (en) | A kind of Titanium doped diamond film and preparation method thereof | |
| JP2014111948A (en) | Cylinder head gasket | |
| JP6278315B2 (en) | Plasma CVD equipment | |
| CN110879430A (en) | Infrared chalcogenide glass lens and preparation method thereof | |
| CN105039917A (en) | Glass lens with sapphire surface layer and preparation method thereof | |
| US10461452B2 (en) | Process for making corrosion-resistant electrical contacts in a wide range of colors | |
| CN112230311A (en) | Anti-dazzle light-shading sheet | |
| JP2003342752A (en) | Heat resistant and corrosion resistant member for vacuum use, vacuum apparatus having parts obtained by using the same member and coating method therefor | |
| CN206692718U (en) | A kind of UV resistance saves hydrophobic plating filmed metals base material | |
| JP2000080465A (en) | Stain preventive vapor depositing material and reflection preventive member using this | |
| CN206470430U (en) | A kind of resistant to sea water plated film lens | |
| JPH02116837A (en) | Light shield blade | |
| KR100445752B1 (en) | A method for coating chromium carbide on a metal material | |
| JP2006153062A (en) | Metallic seal material |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20231226 Address after: 237000 Yueliang Island, yunluqiao West, Lu'an City, Anhui Province Applicant after: WEST ANHUI University Applicant after: KAILI University Address before: No.3 Kaiyuan Avenue, Kaili Economic Development Zone, Qiandongnan Miao and Dong Autonomous Prefecture, Guizhou Province Applicant before: Yang Yongliang |
|
| TA01 | Transfer of patent application right | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |