CN110819955B - Adjustable hinge device of bearing door - Google Patents

Adjustable hinge device of bearing door Download PDF

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Publication number
CN110819955B
CN110819955B CN201911060177.XA CN201911060177A CN110819955B CN 110819955 B CN110819955 B CN 110819955B CN 201911060177 A CN201911060177 A CN 201911060177A CN 110819955 B CN110819955 B CN 110819955B
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China
Prior art keywords
hinge
door
connecting plate
plate
upper hinge
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Application number
CN201911060177.XA
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CN110819955A (en
Inventor
高军政
任海滨
马文鹏
张国同
党亚军
赵学正
罗鹏
杨小合
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Nanyang Qingshui Technology Co ltd
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Nanyang Qingshui Technology Co ltd
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Priority to CN201911060177.XA priority Critical patent/CN110819955B/en
Publication of CN110819955A publication Critical patent/CN110819955A/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Hinges (AREA)

Abstract

The invention discloses an adjustable hinge device for a bearing door, which is characterized in that a hinge fixing seat is fixedly connected with a box body, a hinge base plate is connected with a door plate, copper sleeves are inlaid at the matching positions of the hinge fixing seat and a rotating shaft, two gaskets are respectively arranged at the left side and the right side between a hinge connecting plate and the hinge fixing seat, a baffle plate is fixedly arranged at the outer side of the hinge connecting plate respectively by using screws, wherein the left screw hole and the right screw hole of the baffle plate are connected with the hinge connecting plate by using screws, the upper screw hole and the lower screw hole of the baffle plate are connected with the rotating shaft, the left upper hinge, the hinge connecting plate and the upper right hinge are respectively connected by using one piece of an adjusting shaft, the upper sides of the left upper hinge and the upper right hinge are fixed on the hinge baffle plate by using screws, the first set screw is propped against the adjusting shaft, and the second set screw is propped against the upper hinge baffle plate by using screw holes on the hinge connecting plate. The utility model discloses can adjust holding screw in real time, adjust door plant inclination, make it and the sealed face of box parallel, avoid vacuum chamber gas leakage, realize through door plant locking device that the door plant opens and shuts conveniently.

Description

Adjustable hinge device of bearing door
Technical Field
The invention relates to the technical field of magnetron sputtering coating machines, in particular to an adjustable hinge device of a bearing door.
Background
In magnetron sputtering coating machine the negative pole often needs to put down and carries out technical parameter adjustment or maintenance, the door plant is in the slight deformation of unavoidable emergence or shift of use, the door plant can take place the condition that door plant and box are nonparallel after reclosing, thereby cause door plant and box's sealed not tight, lead to vacuum chamber gas leakage, often need to tear down the door plant in prior art, install after repositioning, change even and take place the door plant, not only work amount of labour is big, moreover influence production efficiency, simultaneously because the door plant is closed when the box, need lock to close, avoid vacuum chamber gas pressure to jack up the door plant, so in the prior art, often behind the door plant is closed the box, lock with the bolt, like this the door plant is in the switching process, just relatively wasted time and energy, consequently how to solve above-mentioned problem and become the problem of attack of prior art.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides the adjustable hinge device for the bearing door, which can adjust the set screw in real time to adjust the inclination angle of the door plate to be parallel to the sealing surface of the box body, thereby avoiding air leakage of the vacuum chamber, and simultaneously, the door plate is convenient and quick to open and close.
In order to achieve the above purpose, the invention adopts the following technical scheme: the utility model provides an adjustable hinge device of bearing door, includes hinge fixing base, hinge backing plate and door lock device, hinge fixing base one end and box hookup are motionless, and the other end is respectively with pivot, hinge connecting plate cooperation hookup, hinge connecting plate and hinge fixing base between the left and right sides respectively be equipped with two piece respectively of gasket, and the hinge connecting plate outside is equipped with the baffle, the baffle is equipped with two left and right screw holes and two upper and lower screw holes, and the screw passes left and right screw hole and makes baffle and hinge connecting plate hookup, and the screw passes upper and lower screw hole and makes baffle and pivot hookup; the upper hinge comprises a left upper hinge and a right upper hinge, the upper part of the hinge connecting plate is connected with an adjusting shaft and an upper hinge baffle, the left upper hinge, the right upper hinge and the hinge connecting plate are respectively connected by a left upper hinge and a right upper hinge, the upper surfaces of the left upper hinge and the right upper hinge are fixed on the upper hinge baffle by screws, the left upper hinge and the right upper hinge are respectively provided with two first set screws and four second set screws, the first set screws are tightly propped against the adjusting shaft to prevent the adjusting shaft from rotating, the second set screws are tightly propped against the upper hinge baffle by threaded holes in the hinge connecting plate, the second set screws are respectively used for adjusting the inclination angles of the left upper hinge and the right upper hinge so as to achieve parallelism between the door plate and the box, the door plate is tightly locked by the door plate locking device after the door plate and the box are parallel, and the door plate is prevented from being opened by the air pressure in a vacuum chamber.
Furthermore, copper sleeves are inlaid at the matching positions of the hinge fixing base and the rotating shaft, and the copper sleeves are arranged in the hinge fixing base.
Further, the number of the door plate locking devices is two, the door plate locking devices are arranged symmetrically up and down on the box body, the door plate locking forces are ensured to be consistent up and down, and the door plate is prevented from deforming.
Further, the door plant locking device includes cylinder, piston rod, arm of force, turning arm and antifriction bearing, the cylinder articulates on the box, the piston rod is connected to the cylinder, the arm of force is connected to the piston rod, the arm of force is articulated with the turning arm, turning arm lower part articulates the fixing base, antifriction bearing is connected to its one end, be equipped with on the door plant with antifriction bearing complex recess. When the piston rod stretches out, the crank arm is propped against the crank arm through the force arm, so that the crank arm moves towards the door plate, the rolling bearing rolls forwards along the groove, the purpose of compacting the door plate is achieved, after rolling in place, the door plate is compacted on the box body through the rolling bearing, the door plate is fixed firmly, and therefore the door plate cannot be opened under the action of gas pressure.
Compared with the prior art, the invention has the beneficial effects that: one end of the hinge fixing seat is fixedly connected with the box body, the other end of the hinge fixing seat is respectively connected with the rotating shaft and the hinge connecting plate in a matched manner, one surface of the hinge base plate is connected with the door plate, and the other surface of the hinge base plate is connected with the upper hinge, so that the hinge connecting plate can rotate relative to the hinge fixing seat through the rotating shaft; when the angle between the door plate and the box body is required to be adjusted, the first set screw is unscrewed, so that the adjusting shaft can rotate, the second set screw is screwed, namely, the jacking force between the second set screw and the upper hinge baffle plate is improved, because the adjusting shaft can rotate, the upper hinge baffle plate can slightly rotate towards the box body direction, so that the upper hinge is carried to incline towards the box body direction, the door plate can incline towards the box body direction, otherwise, the second set screw is unscrewed, the door plate can reversely move towards the box body, so that parallelism between the door plate and the box body is achieved, and after the adjusting shaft is adjusted in place, the first set screw is screwed; meanwhile, the cylinder drives the piston rod, the force arm, the crank arm and the rolling bearing to compress the door plate in an opening and closing mode, so that the door plate is high in locking force, replaces the original bolt locking mode, and is more convenient and quicker. In a word, this device can adjust holding screw in real time, adjusts door plant inclination, makes it and the sealed face parallel of box to avoid vacuum chamber gas leakage, the door plant opens and shuts convenient and fast simultaneously.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below.
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic view of the reverse structure of FIG. 1;
FIG. 3 is a schematic view of a hinge connection plate;
FIG. 4 is a side view of FIG. 3;
FIG. 5 is a cross-sectional view of FIG. 4;
FIG. 6 is a schematic view of a door panel locking mechanism;
Fig. 7 is a side view of fig. 6.
Detailed Description
The following will describe the technical scheme in the embodiment of the present invention in detail:
Referring to fig. 1-5, an adjustable hinge device for a load-bearing door comprises a hinge fixing seat 4 and a hinge base plate 3, wherein one end of the hinge fixing seat 4 is fixedly connected with a box body, the other end of the hinge fixing seat is respectively connected with a rotating shaft 10 and a hinge connecting plate 5 in a matched manner, copper sleeves are inlaid at the matched positions of the hinge fixing seat 4 and the rotating shaft 10, and are arranged in the hinge fixing seat 4, and because the rotating shaft 10 rotates for a long time, abrasion can be caused on the hinge fixing seat 4, and only the copper sleeves need to be replaced for a certain period of time through additionally arranging the copper sleeves; two gaskets 2 are respectively arranged on the left side and the right side between the hinge connecting plate 5 and the hinge fixing seat 4, a baffle plate 1 is arranged on the outer side of the hinge connecting plate 5, the baffle plate 1 is provided with two left and right screw holes and two upper and lower screw holes, a screw penetrates through the left and right screw holes to enable the baffle plate 1 to be connected with the hinge connecting plate 5, and the screw penetrates through the upper and lower screw holes to enable the baffle plate 1 to be connected with a rotating shaft 10; the door plate is characterized in that one face of the hinge base plate 3 is connected with the door plate, the other face of the hinge base plate is connected with an upper hinge, the upper hinge comprises an upper left hinge 6 and an upper right hinge 7, the upper part of the hinge connecting plate 5 is connected with an adjusting shaft 9 and an upper hinge baffle 8, the upper left hinge 6, the upper right hinge 7 and the hinge connecting plate 5 are respectively connected by a left piece and a right piece of the adjusting shaft 9, the upper left hinge 6 and the upper right hinge 7 are fixed on the upper left hinge baffle 8 by screws, two first set screws 11 and four second set screws 12 are respectively arranged on the upper left hinge 6 and the upper right hinge 7, the first set screws 11 are tightly propped against the adjusting shaft 9 to prevent the upper hinge baffle 8 from rotating, the second set screws 12 are tightly propped against the upper hinge baffle 8 by threaded holes in the hinge connecting plate 5, the second set screws 12 are respectively adjusted to tightly prop against the upper left hinge and the upper right hinge 7, so that the door plate and the box body are parallel, and finally the door plate and the box body are closed, and the door plate and the indoor air pressure are prevented from being propped against the door plate.
As shown in fig. 6 and 7, two door plate locking devices are symmetrically arranged on the upper and lower sides of the box body, so that the upper and lower locking forces on the door plate are consistent, and the door plate is prevented from being deformed; the door plate locking device comprises an air cylinder 13, a piston rod 14, a force arm 15, a crank arm 16 and a rolling bearing 17, wherein the air cylinder 13 is hinged to a box body, the air cylinder 13 is connected with the piston rod 14, the piston rod 14 is connected with the force arm 15, the force arm 15 is hinged to the crank arm 16, a fixed seat 18 is hinged to the lower portion of the crank arm 16, one end of the fixed seat is connected with the rolling bearing 17, a groove matched with the rolling bearing 17 is formed in the door plate, when the piston rod 14 is stretched out, the crank arm 16 is propped against the force arm 15, the crank arm 16 moves towards the door plate direction, so that the rolling bearing 17 rolls along the groove to achieve the purpose of pressing the door plate, after rolling in place, the rolling bearing 17 presses the door plate on the box body, the door plate is fixed firmly, and therefore the door plate can not be opened under the action of gas pressure because of rolling friction between the rolling bearing 17 and the door plate, friction between the two is greatly reduced, and the problem of abnormal sound and pressure of the rolling bearing 17 is prevented.
The working principle of the novel: the hinge fixing seat 4 is fixedly connected with the box body, the hinge backing plate 3 is fixedly connected with the door plate, copper sleeves are inlaid at the matching positions of the hinge fixing seat 4 and the rotating shaft 10, the copper sleeves are arranged inside the hinge fixing seat 4, two gaskets 2 are respectively arranged at the left side and the right side between the hinge connecting plate 5 and the hinge fixing seat 4, the baffle plate 1 is fixedly arranged at the outer side of the hinge connecting plate 5 by bolts, wherein the left screw hole and the right screw hole of the baffle plate 1 are connected with the hinge connecting plate 5 by bolts, the upper screw hole and the lower screw hole are connected with the rotating shaft 10, the left upper hinge 6, the hinge connecting plate 5 and the right upper hinge 7 are respectively connected by one piece of the adjusting shaft 9, the upper left upper hinge 6 and the right upper hinge 7 are fixed on the upper hinge baffle plate 8 by bolts, the first fastening bolt 11 fastens the adjusting shaft 9 to enable the adjusting shaft to not rotate, the second fastening bolt 12 fastens the four bolts to fasten the hinge baffle plate 8 by the threaded holes on the hinge connecting plate 5, the four second set screws 12 respectively adjust the force of propping up the upper hinge baffle plate 8 to adjust the inclination angles of the upper left hinge 6 and the upper right hinge 7, when the angle between the door plate and the box body needs to be adjusted, the first set screw 11 is unscrewed to enable the adjusting shaft 9 to rotate, the second set screw 12 is screwed up, namely the propping up force of the second set screw 12 and the upper hinge baffle plate 8 is improved, because the adjusting shaft 9 can rotate, the upper hinge baffle plate 8 slightly rotates towards the box body direction, and accordingly the upper hinge is carried to incline towards the box body direction, the door plate is inclined towards the box body direction, otherwise, the second set screw 12 is unscrewed to enable the door plate to move towards the box body reverse direction, so that the door plate is parallel to the box body, and after the adjustment is in place, the first set screw 11 is screwed up.
The foregoing is merely exemplary of the application and it should be noted that modifications and variations can be made by those skilled in the art without departing from the principles of the application, which is also considered to be within the scope of the application.

Claims (4)

1. An adjustable hinge device for a load-bearing door, characterized in that: the hinge fixing seat is fixedly connected with the box body, the other end of the hinge fixing seat is respectively matched and connected with the rotating shaft and the hinge connecting plate, two gaskets are respectively arranged at the left side and the right side between the hinge connecting plate and the hinge fixing seat, a baffle is arranged at the outer side of the hinge connecting plate, the baffle is provided with two left and right screw holes and two upper and lower screw holes, a screw penetrates through the left and right screw holes to enable the baffle to be connected with the hinge connecting plate, and the screw penetrates through the upper and lower screw holes to enable the baffle to be connected with the rotating shaft; the upper hinge comprises a left upper hinge and a right upper hinge, the upper part of the hinge connecting plate is connected with an adjusting shaft and an upper hinge baffle, the left upper hinge, the right upper hinge and the hinge connecting plate are respectively connected by a left upper hinge and a right upper hinge, the upper surfaces of the left upper hinge and the right upper hinge are fixed on the upper hinge baffle by screws, the left upper hinge and the right upper hinge are respectively provided with two first set screws and four second set screws, the first set screws are tightly propped against the adjusting shaft to prevent the adjusting shaft from rotating, the second set screws are tightly propped against the upper hinge baffle by threaded holes in the hinge connecting plate, the second set screws are respectively used for adjusting the inclination angles of the left upper hinge and the right upper hinge so as to achieve parallelism between the door plate and the box, the door plate is tightly locked by the door plate locking device after the door plate and the box are parallel, and the door plate is prevented from being opened by the air pressure in a vacuum chamber.
2. An adjustable hinge assembly for a load bearing door as claimed in claim 1, wherein: copper sleeves are inlaid at the matching positions of the hinge fixing base and the rotating shaft, and the copper sleeves are arranged in the hinge fixing base.
3. An adjustable hinge assembly for a load bearing door as claimed in claim 1, wherein: the door plate locking devices are arranged in two, are arranged symmetrically up and down on the box body, ensure that the locking force is consistent up and down on the door plate, and prevent the door plate from deforming.
4. An adjustable hinge assembly for a load bearing door as claimed in claim 1, wherein: the door plate locking device comprises a cylinder, a piston rod, a force arm, a crank arm and a rolling bearing, wherein the cylinder is hinged to the box body, the piston rod is connected to the cylinder, the force arm is connected to the piston rod, the force arm is hinged to the crank arm, the lower portion of the crank arm is hinged to a fixing seat, one end of the crank arm is connected to the rolling bearing, and a groove matched with the rolling bearing is formed in the door plate.
CN201911060177.XA 2019-11-01 2019-11-01 Adjustable hinge device of bearing door Active CN110819955B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201911060177.XA CN110819955B (en) 2019-11-01 2019-11-01 Adjustable hinge device of bearing door

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201911060177.XA CN110819955B (en) 2019-11-01 2019-11-01 Adjustable hinge device of bearing door

Publications (2)

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CN110819955A CN110819955A (en) 2020-02-21
CN110819955B true CN110819955B (en) 2024-05-28

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CN201911060177.XA Active CN110819955B (en) 2019-11-01 2019-11-01 Adjustable hinge device of bearing door

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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5511287A (en) * 1993-12-15 1996-04-30 Mepla-Werke Lautenschlager Gmbh & Co. Kg Furniture hinge
DE19801635A1 (en) * 1997-04-10 1998-10-15 Bernhard Staufenbiel Hinge for swing door
CN101294468A (en) * 2007-04-27 2008-10-29 西蒙斯工厂有限公司 Door hinge
CN203307420U (en) * 2013-05-23 2013-11-27 北京北仪创新真空技术有限责任公司 Hinge mechanism for vacuum coating equipment
CN204370952U (en) * 2014-12-15 2015-06-03 宁波生久柜锁有限公司 Locate mode inner hinge
CN205297114U (en) * 2015-12-14 2016-06-08 浙江诚信医化设备有限公司 Hinge
CN205778098U (en) * 2015-12-23 2016-12-07 张栋梁 Hinge assembly and Dewar vessel
WO2017054728A1 (en) * 2015-09-29 2017-04-06 赵芬 Angle-adjustable positioning and self-closing hinge for highly sealed door
CN109295432A (en) * 2017-07-25 2019-02-01 昆山迅立光电设备有限公司 A kind of vacuum equipment door closure closing self-regulation device
CN211036083U (en) * 2019-11-01 2020-07-17 南阳清水科技有限公司 Adjustable hinge device of bearing door

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5511287A (en) * 1993-12-15 1996-04-30 Mepla-Werke Lautenschlager Gmbh & Co. Kg Furniture hinge
DE19801635A1 (en) * 1997-04-10 1998-10-15 Bernhard Staufenbiel Hinge for swing door
CN101294468A (en) * 2007-04-27 2008-10-29 西蒙斯工厂有限公司 Door hinge
CN203307420U (en) * 2013-05-23 2013-11-27 北京北仪创新真空技术有限责任公司 Hinge mechanism for vacuum coating equipment
CN204370952U (en) * 2014-12-15 2015-06-03 宁波生久柜锁有限公司 Locate mode inner hinge
WO2017054728A1 (en) * 2015-09-29 2017-04-06 赵芬 Angle-adjustable positioning and self-closing hinge for highly sealed door
CN205297114U (en) * 2015-12-14 2016-06-08 浙江诚信医化设备有限公司 Hinge
CN205778098U (en) * 2015-12-23 2016-12-07 张栋梁 Hinge assembly and Dewar vessel
CN109295432A (en) * 2017-07-25 2019-02-01 昆山迅立光电设备有限公司 A kind of vacuum equipment door closure closing self-regulation device
CN211036083U (en) * 2019-11-01 2020-07-17 南阳清水科技有限公司 Adjustable hinge device of bearing door

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
自动闭门组合铰链设计;应申舜等;机械设计与研究;20130420(02);第41-43页 *

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