CN110819955A - Adjustable hinge device of bearing door - Google Patents
Adjustable hinge device of bearing door Download PDFInfo
- Publication number
- CN110819955A CN110819955A CN201911060177.XA CN201911060177A CN110819955A CN 110819955 A CN110819955 A CN 110819955A CN 201911060177 A CN201911060177 A CN 201911060177A CN 110819955 A CN110819955 A CN 110819955A
- Authority
- CN
- China
- Prior art keywords
- hinge
- plate
- door
- upper hinge
- fixing seat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052802 copper Inorganic materials 0.000 claims abstract description 10
- 239000010949 copper Substances 0.000 claims abstract description 10
- 238000005096 rolling process Methods 0.000 claims description 12
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Hinges (AREA)
Abstract
The invention discloses an adjustable hinge device of a bearing door, wherein a hinge fixing seat is fixedly connected with a box body, a hinge backing plate is connected with a door plate, a copper sleeve is embedded at the matching part of the hinge fixing seat and a rotating shaft, two gaskets are respectively arranged at the left side and the right side between a hinge connecting plate and the hinge fixing seat, a baffle plate is fixedly arranged at the outer side of the hinge connecting plate by screws, the left screw hole and the right screw hole of the baffle plate are connected with the hinge connecting plate by screws, the upper screw hole and the lower screw hole are connected with the rotating shaft, an adjusting shaft respectively connects a left upper hinge, the hinge connecting plate and a right upper hinge, the upper surfaces of the left upper hinge and the right upper hinge are fixed on the hinge baffle plate by screws, a first set screw abuts against the adjusting shaft, and four second set screws abut against. This novel can adjust holding screw in real time, adjust door plant inclination, make it and the sealed face of box parallel, avoid real empty room gas leakage, realize the door plant through door plant locking device and open and shut the convenience.
Description
Technical Field
The invention relates to the technical field of magnetron sputtering coating machines, in particular to an adjustable hinge device of a bearing door.
Background
In the magnetron sputtering coating machine, the cathode is often required to be placed down for technical parameter adjustment or maintenance, the door plate is inevitably slightly deformed or displaced in the using process, the condition that the door plate and the box body are not parallel can occur after being closed again, so that the door plate and the box body are not tightly sealed, and the air leakage of the vacuum chamber is caused.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides the adjustable hinge device of the bearing door, which can adjust the set screw in real time, adjust the inclination angle of the door plate to be parallel to the sealing surface of the box body, thereby avoiding the air leakage of the vacuum chamber, and simultaneously, the door plate can be opened and closed conveniently and quickly.
In order to achieve the purpose, the invention adopts the technical scheme that: an adjustable hinge device of a bearing door comprises a hinge fixing seat, a hinge backing plate and a door lock device, wherein one end of the hinge fixing seat is fixedly connected with a box body, the other end of the hinge fixing seat is fixedly connected with a rotating shaft and a hinge connecting plate in a matching mode, two gaskets are respectively arranged on the left side and the right side between the hinge connecting plate and the hinge fixing seat, a baffle plate is arranged on the outer side of the hinge connecting plate, the baffle plate is provided with two left and right screw holes and two upper and lower screw holes, a screw penetrates through the left and right screw holes to enable the baffle plate to be connected with the hinge connecting; one side of the hinge backing plate is connected with the door plate, the other side of the hinge backing plate is connected with the upper hinge, the upper hinge comprises a left upper hinge and a right upper hinge, the upper part of the hinge connecting plate is connected with an adjusting shaft and an upper hinge baffle plate, the left upper hinge, the right upper hinge and the hinge connecting plate are respectively connected by the left and the right adjusting shaft, the upper parts of the left upper hinge and the right upper hinge are fixed on the upper hinge baffle plate by screws, two first set screws and four second set screws are respectively arranged on the left upper hinge and the right upper hinge, the adjusting shaft is tightly pressed by the first set screws so as not to rotate, the upper hinge baffle plate is tightly pressed by the second set screws through screw holes on the hinge connecting plate, the inclination angles of the left upper hinge and the right upper hinge are adjusted by the force of the second set screws for tightly pressing the upper hinge baffle plate respectively, so as to achieve the parallelism between the door plate and, after the door plate and the box body are parallel, the door plate is closed, and the door plate and the box body are locked through the door plate locking device, so that the door plate is prevented from being pushed open by gas pressure in the vacuum chamber.
Furthermore, a copper sleeve is inlaid at the matching position of the hinge fixing seat and the rotating shaft, and the copper sleeve is arranged inside the hinge fixing seat.
Furthermore, door plant locking device is two, and the longitudinal symmetry sets up on the box, guarantees to be unanimous to door plant locking force from top to bottom, prevents that the door plant warp.
Further, door plant locking device includes cylinder, piston rod, the arm of force, turning arm and antifriction bearing, the cylinder articulates on the box, the piston rod is connected to the cylinder, the arm of force is connected to the piston rod, the arm of force is articulated with the turning arm, the articulated fixing base in turning arm lower part, antifriction bearing is connected to its one end, be equipped with on the door plant with antifriction bearing complex recess. When the piston rod is extended, the connecting lever is pushed against by the force arm, so that the connecting lever moves towards the door plate, the rolling bearing rolls along the groove to advance to press the door plate, and after the door plate rolls in place, the rolling bearing presses the door plate on the box body, so that the door plate is fixed firmly, and the door plate cannot be opened under the action of gas pressure.
Compared with the prior art, the invention has the beneficial effects that: one end of the hinge fixing seat is fixedly connected with the box body, the other end of the hinge fixing seat is respectively connected with the rotating shaft and the hinge connecting plate in a matched mode, one surface of the hinge base plate is connected with the door plate, and the other surface of the hinge base plate is connected with the upper hinge, so that the hinge connecting plate can rotate relative to the hinge fixing seat through the rotating shaft; when the angle between the door plate and the box body needs to be adjusted, the first set screw is unscrewed, the adjusting shaft can rotate, the second set screw is screwed, namely, the jacking force between the second set screw and the upper hinge baffle plate is improved, and the adjusting shaft can rotate, so that the upper hinge baffle plate can slightly rotate towards the box body direction, the upper hinge is driven to incline towards the box body direction, the door plate can incline towards the box body direction, otherwise, the second set screw is unscrewed, the door plate can move towards the box body direction, the door plate and the box body are parallel, and the first set screw is screwed after the door plate and the box body are adjusted in place; meanwhile, the air cylinder drives the piston rod, the force arm, the crank arm and the rolling bearing to compress the door plate in an opening and closing mode, so that the door plate is large in locking force, the original bolt locking mode is replaced, and the door plate is more convenient and quicker. In a word, this device can adjust holding screw in real time, adjusts door plant inclination, makes it and the sealed face of box parallel to avoid real empty room gas leakage, the door plant convenient and fast that opens and shuts simultaneously.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below.
FIG. 1 is a schematic view of the present invention;
FIG. 2 is a schematic view of the structure of FIG. 1 in an opposite direction;
FIG. 3 is a schematic view of a hinge plate;
FIG. 4 shows a side view of FIG. 3;
FIG. 5 is a cross-sectional view taken along line E-E of FIG. 4;
FIG. 6 is a schematic view of a door panel locking mechanism;
fig. 7 shows a side view of fig. 6.
Detailed Description
The following will be described in detail with reference to the technical solutions in the embodiments of the present invention:
referring to fig. 1-5, an adjustable hinge device of a bearing door comprises a hinge fixing seat 4 and a hinge backing plate 3, wherein one end of the hinge fixing seat 4 is fixedly connected with a box body, the other end of the hinge fixing seat is respectively connected with a rotating shaft 10 and a hinge connecting plate 5 in a matching manner, a copper sleeve is inlaid at the matching position of the hinge fixing seat 4 and the rotating shaft 10, and is arranged inside the hinge fixing seat 4, because the rotating shaft 10 rotates for a long time, the hinge fixing seat 4 is abraded, and only the copper sleeve needs to be replaced at intervals through the additionally arranged copper sleeve; two gaskets 2 are respectively arranged on the left side and the right side between the hinge connecting plate 5 and the hinge fixing seat 4, a baffle plate 1 is arranged on the outer side of the hinge connecting plate 5, the baffle plate 1 is provided with two left and right screw holes and two upper and lower screw holes, a screw penetrates through the left and right screw holes to enable the baffle plate 1 to be connected with the hinge connecting plate 5, and the screw penetrates through the upper and lower screw holes to enable the baffle plate 1 to be connected with the rotating shaft 10; one side of the hinge backing plate 3 is connected with the door panel, the other side of the hinge backing plate is connected with the upper hinge, the upper hinge comprises a left upper hinge 6 and a right upper hinge 7, the upper part of the hinge connecting plate 5 is connected with an adjusting shaft 9 and an upper hinge baffle plate 8, the left upper hinge 6, the right upper hinge 7 and the hinge connecting plate 5 are respectively connected by the left and the right adjusting shaft 9, the upper parts of the left upper hinge 6 and the right upper hinge 7 are fixed on the upper hinge baffle plate 8 by screws, the left upper hinge 6 and the right upper hinge 7 are respectively provided with two first set screws 11 and four second set screws 12, the first set screws 11 tightly push the adjusting shaft 9 to prevent the adjusting shaft from rotating, the second set screws 12 tightly push the upper hinge baffle plate 8 through threaded holes on the hinge connecting plate 5, the second set screws 12 respectively adjust the force for tightly pushing the upper hinge baffle plate 8 to adjust the inclination angles of the left upper hinge and the right upper hinge 6, the door plate and the box body are locked through the door plate locking device, and the door plate is prevented from being pushed open by gas pressure in the vacuum chamber.
As shown in fig. 6 and 7, the two door panel locking devices are symmetrically arranged on the box body from top to bottom, so that the upper and lower locking forces of the door panels are consistent, and the door panels are prevented from deforming; the door plate locking device comprises an air cylinder 13, a piston rod 14, a force arm 15, a crank arm 16 and a rolling bearing 17, the air cylinder 13 is hinged on a box body, the air cylinder 13 is connected with the piston rod 14, the piston rod 14 is connected with the force arm 15, the force arm 15 is hinged with the crank arm 16, the lower portion of the crank arm 16 is hinged with a fixing seat 18, one end of the crank arm 16 is connected with the rolling bearing 17, a groove matched with the rolling bearing 17 is formed in the door plate, the piston rod 14 pushes the crank arm 16 through the force arm 15 when stretching out, the crank arm 16 moves towards the door plate, so that the rolling bearing 17 rolls along the groove to achieve the purpose of pressing the door plate, after the door plate rolls in place, the rolling bearing 17 presses the door plate on the box body, the door plate is fixed firmly, the door plate cannot be opened under the action of gas pressure, the friction between the two can be greatly reduced, and the problems of abnormal sound and untightening the door plate caused by abrasion of the rolling bearing 17 can be prevented.
This neotype theory of operation: the hinge fixing seat 4 is fixedly connected with the box body, the hinge backing plate 3 is connected with the door plate, a copper sleeve is inlaid at the matching part of the hinge fixing seat 4 and the rotating shaft 10, the copper sleeve is arranged inside the hinge fixing seat 4, two gaskets 2 are respectively arranged at the left side and the right side between the hinge connecting plate 5 and the hinge fixing seat 4, the outer side of the hinge connecting plate 5 is respectively fixedly provided with a baffle plate 1 by screws, wherein the left screw hole and the right screw hole of the baffle plate 1 are connected with the hinge connecting plate 5 by screws, the upper screw hole and the lower screw hole are connected with the rotating shaft 10, the left upper hinge 6, the hinge connecting plate 5 and the right upper hinge 7 are respectively connected by a left adjusting shaft 9 and a right adjusting shaft 9, the upper parts of the left upper hinge 6 and the right upper hinge 7 are fixed on the upper hinge baffle plate 8 by screws, a first set screw 11 tightly supports the adjusting shaft 9 so as not to rotate, four, four second holding screw 12 adjust the dynamics of tight hinge baffle 8 in top respectively and adjust the inclination of upper left hinge 6 and upper right hinge 7, when the angle between door plant and the box needs to be adjusted, loosen first holding screw 11, make adjusting shaft 9 can take place to rotate, tighten second holding screw 12, the dynamics of tightening of second holding screw 12 with last hinge baffle 8 has also just also been improved, because adjusting shaft 9 can rotate, so go up hinge baffle 8 and will slightly rotate to the box direction, thereby take the hinge to incline to the box direction, make the door plant to incline to the box direction, otherwise, loosen second holding screw 12, will make the door plant to box opposite direction motion, thereby in order to reach between door plant and the box parallel, the back of targetting in place, it can to tighten first holding screw 11.
The foregoing is directed to embodiments of the present application and it is understood that various modifications and enhancements may be made by those skilled in the art without departing from the principles of the application and are intended to be included within the scope of the application.
Claims (4)
1. The utility model provides an adjustable hinge means of bearing door which characterized in that: the hinge comprises a hinge fixing seat and a hinge base plate, wherein one end of the hinge fixing seat is fixedly connected with a box body, the other end of the hinge fixing seat is respectively matched and connected with a rotating shaft and a hinge connecting plate, two gaskets are respectively arranged on the left side and the right side between the hinge connecting plate and the hinge fixing seat, a baffle plate is arranged on the outer side of the hinge connecting plate, the baffle plate is provided with two left and right screw holes and two upper and lower screw holes, a screw penetrates through the left and right screw holes to enable the baffle plate to be connected with the hinge connecting plate; one side of the hinge backing plate is connected with the door plate, the other side of the hinge backing plate is connected with the upper hinge, the upper hinge comprises a left upper hinge and a right upper hinge, the upper part of the hinge connecting plate is connected with an adjusting shaft and an upper hinge baffle plate, the left upper hinge, the right upper hinge and the hinge connecting plate are respectively connected by the left and the right adjusting shaft, the upper parts of the left upper hinge and the right upper hinge are fixed on the upper hinge baffle plate by screws, two first set screws and four second set screws are respectively arranged on the left upper hinge and the right upper hinge, the adjusting shaft is tightly pressed by the first set screws so as not to rotate, the upper hinge baffle plate is tightly pressed by the second set screws through screw holes on the hinge connecting plate, the inclination angles of the left upper hinge and the right upper hinge are adjusted by the force of the second set screws for tightly pressing the upper hinge baffle plate respectively, so as to achieve the parallelism between the door plate and, after the door plate and the box body are parallel, the door plate is closed, and the door plate and the box body are locked through the door plate locking device, so that the door plate is prevented from being pushed open by gas pressure in the vacuum chamber.
2. The load-bearing door adjustable hinge assembly of claim 1, wherein: the hinge fixing seat is embedded with a copper sleeve at the matching position of the rotating shaft, and the copper sleeve is arranged inside the hinge fixing seat.
3. The load-bearing door adjustable hinge assembly of claim 1, wherein: the door plate locking devices are two and are symmetrically arranged on the box body from top to bottom, so that the vertical locking force of the door plate is ensured to be consistent, and the deformation of the door plate is prevented.
4. The load-bearing door adjustable hinge assembly of claim 1, wherein: the door plate locking device comprises an air cylinder, a piston rod, a force arm, a crank arm and a rolling bearing, the air cylinder is hinged to the box body, the air cylinder is connected with the piston rod, the piston rod is connected with the force arm, the force arm is hinged to the crank arm, the lower portion of the crank arm is hinged to the fixing seat, one end of the crank arm is connected with the rolling bearing, and a groove matched with the rolling bearing is formed in the door plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911060177.XA CN110819955B (en) | 2019-11-01 | 2019-11-01 | Adjustable hinge device of bearing door |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911060177.XA CN110819955B (en) | 2019-11-01 | 2019-11-01 | Adjustable hinge device of bearing door |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110819955A true CN110819955A (en) | 2020-02-21 |
| CN110819955B CN110819955B (en) | 2024-05-28 |
Family
ID=69551932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911060177.XA Active CN110819955B (en) | 2019-11-01 | 2019-11-01 | Adjustable hinge device of bearing door |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110819955B (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ITTO940961A0 (en) * | 1993-12-15 | 1994-11-25 | Lautenschlaeger Mepla Werke | FURNITURE HINGE. |
| DE19801635A1 (en) * | 1997-04-10 | 1998-10-15 | Bernhard Staufenbiel | Hinge for swing door |
| CN101294468A (en) * | 2007-04-27 | 2008-10-29 | 西蒙斯工厂有限公司 | Door hinge |
| CN203307420U (en) * | 2013-05-23 | 2013-11-27 | 北京北仪创新真空技术有限责任公司 | Hinge mechanism for vacuum coating equipment |
| CN204370952U (en) * | 2014-12-15 | 2015-06-03 | 宁波生久柜锁有限公司 | Locate mode inner hinge |
| CN205297114U (en) * | 2015-12-14 | 2016-06-08 | 浙江诚信医化设备有限公司 | Hinge |
| CN205778098U (en) * | 2015-12-23 | 2016-12-07 | 张栋梁 | Hinge assembly and Dewar vessel |
| WO2017054728A1 (en) * | 2015-09-29 | 2017-04-06 | 赵芬 | Angle-adjustable positioning and self-closing hinge for highly sealed door |
| CN109295432A (en) * | 2017-07-25 | 2019-02-01 | 昆山迅立光电设备有限公司 | A kind of vacuum equipment door closure closing self-regulation device |
| CN211036083U (en) * | 2019-11-01 | 2020-07-17 | 南阳清水科技有限公司 | Adjustable hinge device of bearing door |
-
2019
- 2019-11-01 CN CN201911060177.XA patent/CN110819955B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ITTO940961A0 (en) * | 1993-12-15 | 1994-11-25 | Lautenschlaeger Mepla Werke | FURNITURE HINGE. |
| US5511287A (en) * | 1993-12-15 | 1996-04-30 | Mepla-Werke Lautenschlager Gmbh & Co. Kg | Furniture hinge |
| DE19801635A1 (en) * | 1997-04-10 | 1998-10-15 | Bernhard Staufenbiel | Hinge for swing door |
| CN101294468A (en) * | 2007-04-27 | 2008-10-29 | 西蒙斯工厂有限公司 | Door hinge |
| CN203307420U (en) * | 2013-05-23 | 2013-11-27 | 北京北仪创新真空技术有限责任公司 | Hinge mechanism for vacuum coating equipment |
| CN204370952U (en) * | 2014-12-15 | 2015-06-03 | 宁波生久柜锁有限公司 | Locate mode inner hinge |
| WO2017054728A1 (en) * | 2015-09-29 | 2017-04-06 | 赵芬 | Angle-adjustable positioning and self-closing hinge for highly sealed door |
| CN205297114U (en) * | 2015-12-14 | 2016-06-08 | 浙江诚信医化设备有限公司 | Hinge |
| CN205778098U (en) * | 2015-12-23 | 2016-12-07 | 张栋梁 | Hinge assembly and Dewar vessel |
| CN109295432A (en) * | 2017-07-25 | 2019-02-01 | 昆山迅立光电设备有限公司 | A kind of vacuum equipment door closure closing self-regulation device |
| CN211036083U (en) * | 2019-11-01 | 2020-07-17 | 南阳清水科技有限公司 | Adjustable hinge device of bearing door |
Non-Patent Citations (1)
| Title |
|---|
| 应申舜等: "自动闭门组合铰链设计", 机械设计与研究, no. 02, 20 April 2013 (2013-04-20), pages 41 - 43 * |
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| Publication number | Publication date |
|---|---|
| CN110819955B (en) | 2024-05-28 |
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