CN203413136U - Vacuum chamber flap valve of continuous vacuum coating line - Google Patents
Vacuum chamber flap valve of continuous vacuum coating line Download PDFInfo
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- CN203413136U CN203413136U CN201320486781.0U CN201320486781U CN203413136U CN 203413136 U CN203413136 U CN 203413136U CN 201320486781 U CN201320486781 U CN 201320486781U CN 203413136 U CN203413136 U CN 203413136U
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- valve plate
- valve
- connecting rod
- pin
- vacuum chamber
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Abstract
The utility model discloses a vacuum chamber flap valve of a continuous vacuum coating line. The vacuum chamber flap valve of the continuous vacuum coating line is characterized by comprising a valve port, a valve plate, a main transmission shaft, a connecting rod, a pivot, an inclination angle adjusting device and a rotation driving mechanism, wherein the main transmission shaft is rotationally supported on the wall surface of the vacuum chamber; a first end of the connecting rod is fixedly connected with the main transmission shaft and a second end of the connecting rod extends to the back side of the valve plate; the pivot is used for connecting the valve plate with the second end of the connecting rod in a pivoting manner; the inclination angle adjusting device at least consists of a pair of lifting pin mechanisms, each lifting pin mechanism comprises a pin hole, a sliding pin, an elastic element and a bolt, the pin hole is formed in the second end of the connecting rod, the sliding pin is arranged in the pin hole in a penetrating manner, the elastic element is arranged on one end of the sliding pin facing to the back of the valve plate and the bolt is arranged on the other end and supports against the sliding pin, the elastic element at the end part of the sliding pin props against the back of the valve plate, and two lifting pin mechanisms in the pair of lifting pin mechanisms are respectively arranged on two sides of the pivot in the length direction of the connecting rod; the rotation driving mechanism is used for driving the main transmission shaft to rotate. The vacuum chamber flap valve of the continuous vacuum coating line is rapid in opening and closing speed and reliable in work, and the sealing effect of the vacuum chamber flap valve of the continuous vacuum coating line is ensured.
Description
Technical field
The utility model relates to plated film manufacturing machine field, is specifically related to the material import and export Flap valve on a kind of vacuum chamber of continuous vacuum coating production line.
Background technique
The continuous vacuum magnetron sputtering plating glass production line of take is example, its coating chamber must be the state of high vacuum, glass substrate need to pass in and out coating chamber rapidly, be that glass substrate will switch fast between atmospheric conditions-high vacuum state-atmospheric conditions, to realize the High-efficient Production rate of magnetron sputtering production technology.The method now conventionally adopting is: at forward and backward 2 ~ 3 vacuum chambers all arranging serial connection of coating chamber, one-level level ground increases/reduces degree of vacuum, for example: in three true chambers before coating chamber, the pressure controlled desired value of first order vacuum chamber is set as 10Pa, and the pressure controlled desired value of second level vacuum chamber is set as 0.1Pa; The pressure controlled desired value of third level vacuum chamber is set as 1 * 10
-3pa.These vacuum chambers independently pressure regulate, therefore need to design valve between each chamber, cut apart and seal, and when valve open, before and after it, chamber is communicated with, and glass substrate is one-level chamber from previous stage chamber is transported to rapidly; While closing, can carry out pressure adjusting to single chamber.The sealing effect of valve is directly connected to the formation of vacuum gradient between the degree of vacuum of each chamber and each chamber, thereby have influence on, can between each chamber, carry fast the stability of glass substrate and coating chamber degree of vacuum, have influence on the most at last manufacturing efficiency and the coating quality of whole line.
In prior art, valve has multiple, but for above-mentioned occasion, need to consider emphatically the sealability of valve, secondly also will consider valve opening and closing speed and convenience, and current ready-made conventional valve is not on the market very applicable.
Summary of the invention
The utility model object is to provide a kind of vacuum chamber Flap valve of continuous vacuum coating line, to meet the needs of cutting apart and sealing between the vacuum chambers at different levels of continuous vacuum coating production line.
For achieving the above object, the technical solution adopted in the utility model is: a kind of vacuum chamber Flap valve of continuous vacuum coating line, comprising:
One valve port, this valve port is that the material being opened on vacuum chamber wall transmits mouth;
One valve plate, just to face valve port and to be covered on valve port, is circumferentially with seal ring around valve port between valve plate front and vacuum chamber wall;
One main drive shaft, rotating support, on vacuum chamber wall, and is positioned at by the side of valve plate;
One connecting rod, its first end is fixedly connected with main drive shaft, and its second end extends the back side of valve plate;
One pivot, its axis parallels with the axis of main drive shaft, and by this pivot, valve plate is connected with the second end pivoting of connecting rod, so that valve plate can pivot;
One dip angle regulating device, is comprised of at least one pair of lifting pin mechanism, and described each lifting pin mechanism comprises pin-and-hole, sliding pin, elastic element and screw; Described pin-and-hole is opened on the second end of connecting rod towards the back side of valve plate, described sliding pin slides and is located in pin-and-hole, it establishes elastic element on the one end at the valve plate back side, its the other end place establishes described screw, screw is threaded with pin-and-hole, with this screw jacking sliding untie-sell, make the elastic element of sliding pin end compress the back side of valve plate; And two lifting pin mechanism in described a pair of lifting pin mechanism are respectively in the both sides of pivot in length of connecting rod direction;
One rotary drive mechanism, drives main drive shaft rotation.
Related content in technique scheme is explained as follows:
1, in such scheme, described valve port is rectangle, and valve port is arranged with long edge substantially horizontal; Described valve plate also corresponds to rectangle; The long limit that described main drive shaft is parallel to rectangle valve port is arranged at the top of valve plate, with this valve plate, spins upside down and opens.
2,, in such scheme, described seal ring is embedded on valve plate front.
3, in such scheme, described rotary drive mechanism is comprised of cylinder and connecting rod, and crank end and the main drive shaft of described connecting rod are fixed, and cylinder drives main drive shaft rotation through connecting rod.
4, in such scheme, described elastic element is rubber press, and sliding pin is offered an endoporus on the one end at the valve plate back side, and rubber press is embedded in this endoporus, and the end nipple of rubber press is for endoporus.
5, in such scheme, on the whole outer circumferential face of described screw, be equipped with outside thread and become a screw shaped, at screw, protrude from the nut that has been threaded on the head of pin-and-hole.
Because technique scheme is used, the utility model compared with prior art has following advantages:
Valve plate of the present utility model is opened and is closed in the mode of upset, simple in structure, opens the quick action of closing.And, because the utility model is provided with dip angle regulating device, after Flap valve installation adjustment puts in place substantially, can utilize dip angle regulating device that valve plate is adjusted to the state parallel with sealing surface, make that on seal ring, decrement is consistent everywhere, take into account gap and these two important parameters of parallelism between valve plate and sealed, guaranteed sealing effect.Dip angle regulating device can also effectively make up the seal failure that the machining error of cavity and valve plate and sealed ring deformation or wearing and tearing cause, and guarantees the sealing effect of the long-term frequent movement of Flap valve.
Accompanying drawing explanation
Fig. 1 is that the utility model example structure master looks schematic diagram;
Fig. 2 is the A-A cross-sectional schematic of Fig. 1, the figure shows the state before valve plate is adjusted;
Fig. 3 is the B-B cross-sectional schematic of Fig. 1, the figure shows the state before valve plate is adjusted.
In above accompanying drawing: 1, valve port; 2, vacuum chamber wall; 3, valve plate; 4, seal ring; 5, main drive shaft; 6, connecting rod; 7, pivot; 8, dip angle regulating device; 9, lifting pin mechanism; 10, pin-and-hole; 11, sliding pin; 12, elastic element; 13, screw; 14, endoporus; 15, nut; 16, bearing support; 17, auxiliary connecting rod.
Embodiment
Below in conjunction with drawings and Examples, the utility model is further described:
Embodiment: shown in Fig. 1-Fig. 3:
A vacuum chamber Flap valve for line, comprises valve port 1, valve plate 3, main drive shaft 5, connecting rod 6, pivot 7, dip angle regulating device 8 and rotary drive mechanism.
Shown in Fig. 1-Fig. 3, described valve port 1, for the material being opened on vacuum chamber wall 2 transmits mouth.Described valve plate 3, just to face valve port 1 and to be covered on valve port 1, is circumferentially with seal ring 4 around valve port 1 between valve plate 3 fronts and vacuum chamber wall 2, is preferably seal ring 4 is embedded on valve plate front.
Shown in Fig. 1-Fig. 3, described main drive shaft 5, and is positioned at by the side of valve plate 3 by bearing support 16 rotating supports on vacuum chamber wall 2, is exemplified as the upside of being located at valve plate on figure.
Shown in Fig. 1-Fig. 3, described connecting rod 6, its first end (being depicted as upper end on figure) is fixedly connected with bolt with main drive shaft 5, and its second end (being depicted as lower end on figure) extends the back side of valve plate 3.The axis of described pivot 7 parallels with the axis of main drive shaft 5, and by this pivot 7, valve plate 3 is connected with the second end pivoting of connecting rod 6, so that valve plate 3 can rotate around pivot 7.
Specifically, as shown in Figure 1, connecting rod 6 is to be located at bearing support 16 sides, at the opposite side of bearing support 16, be symmetrical in connecting rod 6 and be also provided with an auxiliary connecting rod 17, the upper end of this auxiliary connecting rod 17 is also fixedly connected with bolt with main drive shaft 5, the middle part of pivot 7 is the rectangular block shape body between connecting rod 6 and auxiliary connecting rod 17, and the two ends of pivot 7 are placed through on connecting rod 6 and auxiliary connecting rod 17, and the rectangular block shape Ti center of pivot 7 is established bolt and is fixedly connected with valve plate 3.
Shown in Fig. 1-Fig. 3, described dip angle regulating device 8 is comprised of at least one pair of lifting pin mechanism 9 being arranged on connecting rod 6, and described each lifting pin mechanism 9 comprises pin-and-hole 10, sliding pin 11, elastic element 12 and screw 13; Described pin-and-hole 10 is opened on the second end of connecting rod 6 towards the back side of valve plate 3, described sliding pin 11 slides and is located in pin-and-hole 10, it establishes described elastic element 12 on the one end at valve plate 3 back sides, its the other end place establishes described screw 13, screw 13 is connected with the end thread of pin-and-hole 10, with these screw 13 jacking sliding untie-sells 11, make the elastic element 12 of sliding pin 11 ends compress the back side of valve plate 3.And two lifting pin mechanism 9 in described a pair of lifting pin mechanism 9 are respectively in the both sides (being as shown upper and lower both sides) of pivot 7 on connecting rod 6 length directions; Described rotary drive mechanism drives main drive shaft rotation, can drive valve plate 3 upsets to open or close.
Specifically, see shown in Fig. 1-Fig. 3, described valve port 1 is rectangle, and valve port 1 is arranged with long edge substantially horizontal, described valve plate 3 also corresponds to rectangle, and the long limit that described main drive shaft 5 is parallel to rectangle valve port 1 is arranged at the top of valve plate 3, with this valve plate 3, spins upside down and opens.When the length of valve plate 3 is longer, just need on valve plate 3, arrange the mechanism (this mechanism connecting rod 6, auxiliary connecting rod 17, bearing 16, pivot 7 and dip angle regulating device 8 consist of) of many covers as shown on Fig. 1, such mechanism need be uniform on the length direction of valve plate 3.
Specifically, see shown in Fig. 1-Fig. 3, on the whole outer circumferential face of described screw 13, be equipped with outside thread and become a screw shaped, at screw 13, protrude from the nut 15 that has been threaded on the head of pin-and-hole 10, with nut 15 lock screws 13, prevent that screw 13 from opening in the movement process of closing because of vibrations loose shift at valve plate 8.
Seeing shown in Fig. 2-Fig. 3, can be helical spring, spring sheet in described elastic element 12 reality, can be also cylinder of elastic material etc.Preferred version is that elastic element 12 is rubber press, and sliding pin 11 is offered an endoporus 14 on the one end at valve plate 3 back sides, and rubber press is embedded in this endoporus 14, and the end nipple of rubber press is for endoporus 14, to act on the back side of valve plate 3.
Described rotary drive mechanism, can be the existing various driving mechanism that rotating force is provided, and as direct employing one motor, or adopts cylinder to add the driving mechanism of straight line-rotation conversion.Preferred version is, rotary drive mechanism is comprised of cylinder and connecting rod, and the crank end of described connecting rod and main drive shaft 5 are fixing, and cylinder drives main drive shaft 5 rotations through connecting rod.
When the utility model install to be adjusted, first initial adjustment, adjusts the rotation angle range of main drive shaft 5, the sealed face of valve plate 3 conflict vacuum chamber wall 2(while making to close), then fine tuning, by position and the angle of dip angle regulating device 8 fine tuning valve plates 3.The concrete tune method of dip angle regulating device 8 is: finely tune two lifting pin mechanism 9, turn screw 13, screw 13 compresses valve plate 3 by sliding pin 11 and elastic element 12, coordinating and adjusting two lifting pin mechanism 9 can make valve plate 3 rotations, until valve plate 3 is adjusted to the state parallel with sealing surface, while making on seal ring 4 that decrement is consistent everywhere, can reach best sealing effect.
The valve plate of the present embodiment is opened and is closed in the mode of upset, simple in structure, open the quick action of closing, and, after Flap valve install to be adjusted and substantially to be put in place, can utilize dip angle regulating device that valve plate is adjusted to the state parallel with sealing surface, make that on seal ring, decrement is consistent everywhere, take into account gap and these two important parameters of parallelism between valve plate and sealed, guaranteed sealing effect.And dip angle regulating device can also effectively make up the seal failure that the machining error of cavity and valve plate and sealed ring deformation or wearing and tearing cause, guarantee the sealing effect of the long-term frequent movement of Flap valve.
Above-described embodiment is only explanation technical conceive of the present utility model and feature, and its object is to allow person skilled in the art can understand content of the present utility model and implement according to this, can not limit protection domain of the present utility model with this.All equivalences of doing according to the utility model Spirit Essence change or modify, within all should being encompassed in protection domain of the present utility model.
Claims (6)
1. a vacuum chamber Flap valve for continuous vacuum coating line, is characterized in that: comprising:
One valve port (1), this valve port (1) is for being opened in the material transmission mouthful on vacuum chamber wall (2);
One valve plate (3), upper just to face valve port (1) and to be covered in valve port (1), between valve plate (3) front and vacuum chamber wall (2), around valve port (1), be circumferentially with seal ring (4);
One main drive shaft (5), rotating support is upper in vacuum chamber wall (2), and is positioned at by the side of valve plate (3);
One connecting rod (6), its first end is fixedly connected with main drive shaft (5), and its second end extends the back side of valve plate (3);
One pivot (7), its axis parallels with the axis of main drive shaft (5), and by this pivot (7), valve plate (3) is connected with the second end pivoting of connecting rod (6), so that valve plate (3) can rotate around pivot (7);
One dip angle regulating device (8), is comprised of at least one pair of lifting pin mechanism (9), and described each lifting pin mechanism (9) comprises pin-and-hole (10), sliding pin (11), elastic element (12) and screw (13); Described pin-and-hole (10) is opened on the second end of connecting rod (6) towards the back side of valve plate (3), described sliding pin (11) slides and is located in pin-and-hole (10), it establishes described elastic element (12) on the one end at valve plate (3) back side, its the other end place establishes described screw (13), screw (13) is threaded with pin-and-hole (10), with this screw (13) jacking sliding untie-sell (11), make the elastic element (12) of sliding pin (11) end compress the back side of valve plate (3); And two lifting pin mechanism (9) in described a pair of lifting pin mechanism (9) are respectively in the both sides of pivot (7) in length of connecting rod direction;
One rotary drive mechanism, drives main drive shaft rotation.
2. the vacuum chamber Flap valve of continuous vacuum coating line according to claim 1, is characterized in that: described valve port (1) is rectangle, and valve port (1) is arranged with long edge substantially horizontal; Described valve plate (3) also corresponds to rectangle; The long limit that described main drive shaft (5) is parallel to rectangle valve port (1) is arranged at the top of valve plate (3), with this valve plate (3), spins upside down and opens.
3. the vacuum chamber Flap valve of continuous vacuum coating line according to claim 1, is characterized in that: described seal ring (4) is embedded on valve plate front.
4. the vacuum chamber Flap valve of continuous vacuum coating line according to claim 1, it is characterized in that: described rotary drive mechanism is comprised of cylinder and connecting rod, the crank end of described connecting rod and main drive shaft (5) are fixing, and cylinder drives main drive shaft (5) rotation through connecting rod.
5. the vacuum chamber Flap valve of continuous vacuum coating line according to claim 1, it is characterized in that: described elastic element (12) is rubber press, sliding pin (11) is offered an endoporus (14) on the one end at valve plate (3) back side, rubber press is embedded in this endoporus (14), and the end nipple of rubber press is for endoporus (14).
6. the vacuum chamber Flap valve of continuous vacuum coating line according to claim 1, it is characterized in that: on the whole outer circumferential face of described screw (13), be equipped with outside thread and become a screw shaped, at screw (13), protrude from the nut (15) that has been threaded on the head of pin-and-hole (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320486781.0U CN203413136U (en) | 2013-08-09 | 2013-08-09 | Vacuum chamber flap valve of continuous vacuum coating line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320486781.0U CN203413136U (en) | 2013-08-09 | 2013-08-09 | Vacuum chamber flap valve of continuous vacuum coating line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203413136U true CN203413136U (en) | 2014-01-29 |
Family
ID=49976025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320486781.0U Withdrawn - After Issue CN203413136U (en) | 2013-08-09 | 2013-08-09 | Vacuum chamber flap valve of continuous vacuum coating line |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203413136U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103470789A (en) * | 2013-08-09 | 2013-12-25 | 中建材光电装备（太仓）有限公司 | Vacuum chamber flap valve of continuous type vacuum film plating line |
| CN104819307A (en) * | 2015-05-20 | 2015-08-05 | 胜利阀门有限公司 | Two-way leakage-free high-life rotary ball valve |
-
2013
- 2013-08-09 CN CN201320486781.0U patent/CN203413136U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103470789A (en) * | 2013-08-09 | 2013-12-25 | 中建材光电装备（太仓）有限公司 | Vacuum chamber flap valve of continuous type vacuum film plating line |
| CN103470789B (en) * | 2013-08-09 | 2015-11-11 | 中建材光电装备（太仓）有限公司 | A kind of vacuum chamber Flap valve of continuous vacuum coating line |
| CN104819307A (en) * | 2015-05-20 | 2015-08-05 | 胜利阀门有限公司 | Two-way leakage-free high-life rotary ball valve |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20140129 Effective date of abandoning: 20151111 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |