CN110815611B - Damping device of multi-wire cutting machine - Google Patents
Damping device of multi-wire cutting machine Download PDFInfo
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- CN110815611B CN110815611B CN201911165893.4A CN201911165893A CN110815611B CN 110815611 B CN110815611 B CN 110815611B CN 201911165893 A CN201911165893 A CN 201911165893A CN 110815611 B CN110815611 B CN 110815611B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention relates to the field of auxiliary devices of multi-wire cutting machines, in particular to a damping device of a multi-wire cutting machine, which comprises two damping components which are symmetrically arranged, a metal wire of the multi-wire cutting machine penetrates through the two damping components, and a feeding workbench matched with the metal wire is arranged between the two damping components; the damping component comprises a side supporting plate, a bottom plate seat, a telescopic cylinder, a sliding sleeve, an installation cross rod, an upper supporting roller, a lower supporting roller and a transverse and longitudinal elastic supporting component. The invention has novel structure, is convenient to control and adjust, has better combined damping and supporting effect on the metal wire, and reduces the probability of the metal wire jumping out of the guide wheel groove.
Description
Technical Field
The invention relates to the field of auxiliary devices of multi-wire cutting machines, in particular to a damping device of a multi-wire cutting machine.
Background
The multi-line cutting is a novel cutting processing method which carries grinding materials into a semiconductor processing area for grinding through the high-speed reciprocating motion of a metal wire and simultaneously cuts hard and brittle materials such as semiconductors into hundreds of thin slices at one time. The numerical control multi-wire saw has gradually replaced traditional internal circle cutting, becomes the main mode of silicon chip cutting process, but when the high-speed cutting of wire, because the vibration frequency of wire is big, the amplitude is big, so make the wire jump out from the leading wheel groove very easily, arouse friction each other between the wire to cause the broken string, consequently when the cutting to the wire, be indispensable to the damping device of wire.
The existing damping device is single in structure, traditional, inconvenient to control and adjust, incapable of carrying out good combined damping support on metal wires, and only provided with a damping mode in pressing or lifting the damping support, incapable of being freely selected and large in limitation. Therefore, in view of the above situation, there is a need to develop a damping device for a multi-wire saw to overcome the shortcomings of the prior art.
Disclosure of Invention
An object of an embodiment of the present invention is to provide a damping device for a multi-wire saw, so as to solve the problems in the background art.
In order to achieve the above purpose, the embodiments of the present invention provide the following technical solutions:
a damping device of a multi-wire cutting machine comprises two damping assemblies which are symmetrically arranged, a metal wire of the multi-wire cutting machine penetrates through the two damping assemblies, and a feeding workbench matched with the metal wire is arranged between the two damping assemblies; the damping assembly comprises side supporting plates, a bottom plate seat, telescopic cylinders, sliding sleeves, an installation cross rod, an upper supporting roller, a lower supporting roller and a transverse and longitudinal elastic supporting assembly, wherein the front side and the rear side of the top of the bottom plate seat are respectively fixedly provided with one side supporting plate, the installation cross rod is fixedly installed between the two side supporting plates and is perpendicular to the movement direction of a metal wire, the installation cross rod is provided with two sliding sleeves in a matched sliding manner, the side surfaces of the two sliding sleeves are provided with locking knobs for locking the sliding sleeves after adjustment, the top parts of the two sliding sleeves are respectively fixedly provided with one telescopic cylinder, the upper supporting roller and the lower supporting roller are fixedly supported by the two telescopic cylinders through the transverse and longitudinal elastic supporting assembly, and the metal wire penetrates through the upper supporting roller and the lower supporting roller;
the transverse and longitudinal elastic support assembly comprises a limit ring plate, a damping spring, an upper sleeve ring, a lower sleeve ring, a hinged support, a first connecting shaft, an elastic rope and a second connecting shaft, wherein an upper sleeve ring and a lower sleeve ring are respectively arranged on a telescopic rod of the telescopic cylinder in a matched and sliding manner, the limit ring plate is respectively fixedly arranged on telescopic rods of the telescopic cylinder on the upper side of the upper sleeve ring and on telescopic rods of the telescopic cylinder on the lower side of the telescopic cylinder on the upper side of the upper sleeve ring and on telescopic rods of the telescopic cylinder between the upper sleeve ring and the lower sleeve ring, and the damping springs with the same type are respectively sleeved on telescopic rods of the telescopic cylinders on the upper side; go up the backup roll and locate two go up between the lantern ring, two are located to the bottom suspension roller between the lantern ring down, the both ends of going up backup roll and bottom suspension roller are all rotated and are connected with a second connecting axle, and the other end of second connecting axle passes through stretch cord and first connecting axle fixed connection, the other end of first connecting axle articulates on the hinged-support, go up two hinged-supports at backup roll both ends and correspond respectively and be fixed in two go up on the lantern ring, two hinged-supports at bottom suspension roller both ends correspond respectively and are fixed in two on the lantern ring down.
As a further scheme of the invention: scales are arranged on the telescopic rod of the telescopic cylinder and the mounting cross rod.
As a further scheme of the invention: go up the backup roll and the bottom suspension roller is cylindrical structure, go up and still set up a plurality ofly on backup roll and the bottom suspension roller and the cyclic annular wire guide groove of wire matched with.
As a further scheme of the invention: a bearing groove is formed in each of two ends of the upper supporting roller and the lower supporting roller, and the second connecting shaft is rotatably installed in the bearing groove through a bearing.
As a further scheme of the invention: the elastic rope fixing device is characterized in that one end, opposite to the first connecting shaft and the second connecting shaft, of the first connecting shaft is provided with a splicing hole, two ends of the elastic rope are respectively dismounted in the splicing holes of the first connecting shaft and the second connecting shaft, and the first connecting shaft and the second connecting shaft are further provided with a plurality of fixing bolts for fixing the elastic rope.
Compared with the prior art, the embodiment of the invention has the beneficial effects that:
1) the two sliding sleeves can move along the appointed numerical value of the installation cross rod, and the metal wire damping requirements of different positions can be met; the height positions of the upper supporting roller and the lower supporting roller can be adjusted through the telescopic cylinder, and when the upper supporting roller is abutted against the metal wire, the metal wire can be subjected to pressing type shock absorption through the upper supporting roller; when the lower supporting roll is abutted against the metal wire, the metal wire can be subjected to lifting type shock absorption through the lower supporting roll, and the use and control are flexible and convenient; the height of the two telescopic cylinders can be controlled to be different, so that the working requirement that a plurality of metal wires are not on the same horizontal plane is met; the wire guide grooves formed in the upper supporting roller and the lower supporting roller can improve the conduction stability of the upper supporting roller and the lower supporting roller to the metal wires;
2) through the structural arrangement of the transverse and longitudinal elastic supporting components, the second connecting shaft can rotatably support the upper supporting roller and the lower supporting roller, so that the friction between the upper supporting roller and the metal wire and the friction between the lower supporting roller and the metal wire are reduced; the upper support roller and the lower support roller can be elastically supported mainly in the transverse direction through the elastic ropes, the working condition adaptation effect is good, and the hinge support can adapt to the working requirements of two telescopic cylinders with different heights; through spacing ring board and damping spring's cooperation structure setting, can carry out stable vertical elastic support to last lantern ring and lower lantern ring, promote the combination shock attenuation effect of back-up roll and bottom suspension roller to the wire.
In conclusion, this multi-wire saw damping device, novel structure conveniently controls the regulation, has the better combination shock attenuation supporting effect to the wire, reduces the probability that the wire jumped out from the guide wheel groove.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
FIG. 2 is a side view of a shock absorbing assembly according to an embodiment of the present invention.
Fig. 3 is an enlarged schematic view of a portion a in fig. 2.
Fig. 4 is a partial sectional structural view of a connection portion of the second connection shaft and the upper support roller in fig. 3.
Fig. 5 is a schematic structural view of an upper support roller in an embodiment of the present invention.
FIG. 6 is a schematic view of a partial structure of a joint of a sliding sleeve and a mounting rail according to an embodiment of the present invention.
In the figure: 1-wire, 2-damping component, 3-feeding workbench, 21-side supporting plate, 22-baseplate seat, 23-telescopic cylinder, 24-sliding sleeve, 25-locking knob, 26-installation cross rod, 27-scale, 28-upper supporting roller, 281-bearing groove, 282-wire guide groove, 29-lower supporting roller, 210-limit ring plate, 211-damping spring, 212-upper lantern ring, 213-lower lantern ring, 214-hinged support, 215-fixing bolt, 216-first connecting shaft, 217-elastic rope, 218-second connecting shaft, 2181-plug hole and 219-bearing.
Detailed Description
The technical solution of the present patent will be described in further detail with reference to the following embodiments.
Reference will now be made in detail to embodiments of the present patent, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present patent and are not to be construed as limiting the present patent.
Example 1
Referring to fig. 1-2 and 5-6, in the embodiment of the invention, the damping device of the multi-wire saw comprises two damping assemblies 2 which are symmetrically arranged, a metal wire 1 of the multi-wire saw penetrates through the two damping assemblies 2, and a feeding workbench 3 matched with the metal wire 1 is further arranged between the two damping assemblies 2; the damping component 2 comprises side supporting plates 21, a bottom plate seat 22, telescopic cylinders 23, sliding sleeves 24, an installation cross rod 26, upper supporting rollers 28, lower supporting rollers 29 and transverse and longitudinal elastic supporting components, the side supporting plates 21 are respectively installed and fixed on the front side and the rear side of the top of the bottom plate seat 22, the installation cross rod 26 is fixed between the two side supporting plates 21, scales 27 are arranged on the installation cross rod 26, the installation cross rod 26 is provided with two sliding sleeves 24 in a matched sliding manner, the side faces of the two sliding sleeves 24 are provided with locking knobs 25 used for locking the sliding sleeves 24 after adjustment, the top of the two sliding sleeves 24 are respectively installed and fixed with one telescopic cylinder 23, the two telescopic cylinders 23 are supported and fixed with the upper supporting rollers 28 and the lower supporting rollers 29 through the transverse and longitudinal elastic supporting components, and the metal wire 1 passes through the upper supporting rollers 28 and the lower supporting rollers 29, go up supporting roll 28 and bottom suspension runner 29 and be cylindrical structure, go up still seted up a plurality ofly on supporting roll 28 and the bottom suspension runner 29 with wire 1 matched with cyclic annular godet 282 for the stability of wire 1 obtains promoting.
Example 2
Referring to fig. 2 to 6, the present embodiment is different from embodiment 1 in that:
in this embodiment, the transverse and longitudinal elastic supporting component comprises a limit ring plate 210, a shock absorption spring 211, an upper ring 212, a lower ring 213, a hinge support 214, a first connecting shaft 216, an elastic rope 217 and a second connecting shaft 218, the telescopic rod of the telescopic cylinder 23 is also provided with scales 27, the telescopic rod of the telescopic cylinder 23 is respectively provided with an upper lantern ring 212 and a lower lantern ring 213 in a matching and sliding way, a limit ring plate 210 is respectively arranged and fixed on the telescopic rod of the telescopic cylinder 23 at the upper side of the upper lantern ring 212, the telescopic rod of the telescopic cylinder 23 at the lower side of the lower lantern ring 213 and the telescopic rod of the telescopic cylinder 23 between the upper lantern ring 212 and the lower lantern ring 213, the upper and lower sides of the upper and lower lantern rings 212 and 213 are sleeved with damping springs 211 with the same type, the upper collar 212 is longitudinally elastically supported by the upper two damper springs 211, and the lower collar 213 is longitudinally elastically supported by the lower two damper springs 211.
Go up the supporting roller 28 and locate two go up between the lantern ring 212, lower supporting roller 29 locates two between the lantern ring 213 down, the both ends of going up supporting roller 28 and lower supporting roller 29 are all rotated and are connected with a second connecting axle 218, and the other end of second connecting axle 218 passes through stretch cord 217 and first connecting axle 216 fixed connection, the other end of first connecting axle 216 articulates on hinged-support 214, two hinged-support 214 at last supporting roller 28 both ends correspond respectively and are fixed in two go up on the lantern ring 212, two hinged-support 214 at lower supporting roller 29 both ends correspond respectively and are fixed in two on the lantern ring 213 down.
Further, as shown in fig. 4, two ends of the upper support roller 28 and the lower support roller 29 are both provided with a bearing groove 281, the second connecting shaft 218 is rotatably installed in the bearing groove 281 through a bearing 219, one end of the first connecting shaft 216 opposite to one end of the second connecting shaft 218 is both provided with an insertion hole 2181, two ends of the elastic cord 217 are respectively disassembled and installed in the insertion holes 2181 of the first connecting shaft 216 and the second connecting shaft 218, and the first connecting shaft 216 and the second connecting shaft 218 are further provided with a plurality of fixing bolts 215 for fixing the elastic cord 217.
This multi-wire saw damping device, when practical application, has following outstanding advantage:
1) the two sliding sleeves 24 can move along the installation cross rod 26 by appointed numerical values, and the shock absorption requirements of the metal wires 1 at different positions can be met; the height positions of the upper supporting roller 28 and the lower supporting roller 29 can be adjusted through the telescopic cylinder 23, and when the upper supporting roller 28 is abutted against the metal wire 1, the metal wire 1 can be subjected to pressing type shock absorption through the upper supporting roller 28; when the lower supporting roller 29 is abutted against the metal wire 1, the metal wire 1 can be subjected to lifting type shock absorption through the lower supporting roller 29, and the use and control are flexible and convenient; the height of the two telescopic cylinders 23 can be controlled to be different, so that the working requirement that a plurality of metal wires 1 are not on the same horizontal plane is met; the conduction stability of the upper support roller 28 and the lower support roller 29 to the metal wire 1 can be improved through the wire guide grooves 282 formed in the upper support roller 28 and the lower support roller 29;
2) through the structural arrangement of the transverse and longitudinal elastic supporting components, the second connecting shaft 218 can rotatably support the upper supporting roller 28 and the lower supporting roller 29, so that the friction between the upper supporting roller 28 and the lower supporting roller 29 and the metal wire 1 is reduced; the upper supporting roller 28 and the lower supporting roller 29 can be elastically supported mainly in the transverse direction through the elastic rope 217, the working condition adaptation effect is good, and the hinge support 214 is arranged to adapt to the working requirements of the two telescopic cylinders 23 with different heights; through the cooperation structural setting of spacing ring board 210 and damping spring 211, can carry out stable vertical elastic support to last lantern ring 212 and lower lantern ring 213, promote the combination shock attenuation effect of last backup roll 28 and lower backup roll 29 to wire 1.
The above is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, it is possible to make several variations and modifications without departing from the concept of the present invention, and these should be considered as the protection scope of the present invention, which will not affect the effect of the implementation of the present invention and the utility of the patent.
Claims (5)
1. The utility model provides a multi-wire saw damping device, includes two damper (2) that the symmetry was placed, and multi-wire saw's wire (1) passes from two damper (2), still is equipped with between two damper (2) with wire (1) complex feeding table (3), its characterized in that:
the damping component (2) comprises side supporting plates (21), a bottom plate seat (22), a telescopic cylinder (23), a sliding sleeve (24), a mounting cross rod (26), an upper supporting roller (28), a lower supporting roller (29) and a transverse and longitudinal elastic supporting component;
the metal wire fixing device is characterized in that side supporting plates (21) are respectively fixedly installed on the front side and the rear side of the top of the bottom plate seat (22), an installation cross rod (26) is fixedly installed between the side supporting plates (21), the installation cross rod (26) is perpendicular to the moving direction of a metal wire (1), two sliding sleeves (24) are arranged on the installation cross rod (26) in a matched sliding mode, locking knobs (25) used for locking the sliding sleeves (24) after being adjusted are arranged on the side faces of the two sliding sleeves (24), telescopic cylinders (23) are respectively fixedly installed on the tops of the two sliding sleeves (24), upper supporting rollers (28) and lower supporting rollers (29) are fixedly supported between the two telescopic cylinders (23) through transverse and longitudinal elastic supporting components, and the metal wire (1) penetrates between the upper supporting rollers (28) and the lower supporting rollers (29);
the transverse and longitudinal elastic support assembly comprises a limit ring plate (210), a damping spring (211), an upper lantern ring (212), a lower lantern ring (213), a hinged support (214), a first connecting shaft (216), an elastic rope (217) and a second connecting shaft (218);
an upper lantern ring (212) and a lower lantern ring (213) are respectively arranged on the telescopic rod of the telescopic cylinder (23) in a matched and sliding mode, a limit ring plate (210) is respectively installed and fixed on the telescopic rod of the telescopic cylinder (23) on the upper side of the upper lantern ring (212), on the lower side of the telescopic rod of the telescopic cylinder (23) on the lower side of the lower lantern ring (213) and on the telescopic rod of the telescopic cylinder (23) between the upper lantern ring (212) and the lower lantern ring (213), and damping springs (211) with the same type are respectively sleeved on the telescopic rods of the telescopic cylinders (23) on the upper side and the lower side of the upper lantern ring (212) and the lower lantern ring (;
go up backup roll (28) and locate two go up between the lantern ring (212), lower backup roll (29) are located two between the lantern ring (213) down, the both ends of going up backup roll (28) and lower backup roll (29) are all rotated and are connected with a second connecting axle (218), and the other end of second connecting axle (218) passes through stretch cord (217) and first connecting axle (216) fixed connection, the other end of first connecting axle (216) articulates on hinged-support (214), two hinged-support (214) of going up backup roll (28) both ends correspond respectively and are fixed in two go up on the lantern ring (212), two hinged-support (214) at lower backup roll (29) both ends correspond respectively and are fixed in two down on the lantern ring (213).
2. The multi-wire saw shock absorption device according to claim 1, wherein the telescopic rod of the telescopic cylinder (23) and the mounting cross rod (26) are provided with scales (27).
3. The multi-wire saw shock absorption device according to claim 1, wherein the upper support roller (28) and the lower support roller (29) are both cylindrical structures, and a plurality of annular wire guide grooves (282) matched with the metal wires (1) are formed in the upper support roller (28) and the lower support roller (29).
4. The multi-wire saw shock absorption device as claimed in claim 1, wherein a bearing groove (281) is formed at each end of the upper support roller (28) and the lower support roller (29), and the second connecting shaft (218) is rotatably mounted in the bearing groove (281) through a bearing (219).
5. The multi-wire cutting machine damping device according to claim 4, wherein one end of each of the first connecting shaft (216) and the opposite end of the second connecting shaft (218) are provided with a plugging hole (2181), two ends of the elastic rope (217) are respectively disassembled and assembled in the plugging holes (2181) of the first connecting shaft (216) and the second connecting shaft (218), and the first connecting shaft (216) and the second connecting shaft (218) are further provided with a plurality of fixing bolts (215) for fixing the elastic rope (217).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911165893.4A CN110815611B (en) | 2019-11-25 | 2019-11-25 | Damping device of multi-wire cutting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911165893.4A CN110815611B (en) | 2019-11-25 | 2019-11-25 | Damping device of multi-wire cutting machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110815611A CN110815611A (en) | 2020-02-21 |
| CN110815611B true CN110815611B (en) | 2021-05-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911165893.4A Active CN110815611B (en) | 2019-11-25 | 2019-11-25 | Damping device of multi-wire cutting machine |
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| CN (1) | CN110815611B (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2067946B (en) * | 1980-02-14 | 1984-08-08 | Inoue Japax Res | Electrode holder-guidance assembly for wire-cut electrical machining |
| JPH1142548A (en) * | 1997-07-28 | 1999-02-16 | Tokyo Seimitsu Co Ltd | Fixed abrasive grain wire saw |
| DE112011103905B4 (en) * | 2010-11-24 | 2022-09-15 | Mitsubishi Electric Corporation | wire cut electrodischarge machining and semiconductor wafer manufacturing methods |
| DE102011084454B3 (en) * | 2011-10-13 | 2013-01-17 | Solarworld Innovations Gmbh | Wire-rod guiding roller for wire saw that is utilized for sawing e.g. silicon ingots during fabrication of wafer, has casing designed such that roller exhibits concentricity error, where concentricity error lies within specific range |
| CN209275852U (en) * | 2018-09-26 | 2019-08-20 | 康瑞电子(深圳)有限公司 | A kind of cable management device |
| CN209533888U (en) * | 2018-10-23 | 2019-10-25 | 苏州市汇峰机械设备有限公司 | A kind of multi-line cutting machine damping device |
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2019
- 2019-11-25 CN CN201911165893.4A patent/CN110815611B/en active Active
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