CN110814432A - Ultra-precise fly-cutting machining method for micron-scale steps - Google Patents

Ultra-precise fly-cutting machining method for micron-scale steps Download PDF

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Publication number
CN110814432A
CN110814432A CN201911106048.XA CN201911106048A CN110814432A CN 110814432 A CN110814432 A CN 110814432A CN 201911106048 A CN201911106048 A CN 201911106048A CN 110814432 A CN110814432 A CN 110814432A
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fly
cutting
ultra
precise
machining
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CN110814432B (en
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阳红
张敏
戴晓静
刘有海
宋珂炜
尹承真
孙守利
杨光伟
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Institute of Mechanical Manufacturing Technology of CAEP
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Institute of Mechanical Manufacturing Technology of CAEP
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23DPLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D79/00Methods, machines, or devices not covered elsewhere, for working metal by removal of material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22Feeding members carrying tools or work
    • B23Q5/34Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/36Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission in which a servomotor forms an essential element

Abstract

The invention discloses an ultra-precise fly-cutting machining method for a micron-scale step, which is characterized in that a single-point diamond fly-cutting machine tool is used for fly-cutting a machined part, and continuous micro-scale step machining is realized by adjusting the rotating speed of a main shaft in the machining process. On the basis of the traditional ultra-precise single-point diamond fly-cutting process, the invention utilizes a single-point diamond fly-cutting machine tool to directly process a high-precision plane by using a natural single-crystal diamond cutter in a single-point cutting mode by taking an ultra-precise numerical control machine tool as a processing platform under the condition of precisely controlling a processing environment, and utilizes the fly-cutting cutter disc to generate height change of a cutting point of the single-point diamond cutter due to the action of centrifugal force under different rotating speeds of a main shaft, thereby realizing the definite quantity processing of continuous micro-scale steps. The method can realize the ultra-precise fly-cutting processing of the steps with the diameter of several microns and high gradient, and provides an effective processing method for the ultra-precise processing of the steps with the micro-scale on the surface.

Description

Ultra-precise fly-cutting machining method for micron-scale steps
Technical Field
The invention relates to the technical field of machining, in particular to a micron-scale step ultra-precise fly-cutting machining method.
Background
The continuous micro-scale steps have important application values in the fields of friction reduction, resistance reduction and photoelectric display by virtue of special physical and optical characteristics of the steps. As the special application field requires that the continuous micro-scale steps have extremely high surface appearance precision and ultra-low surface roughness value, the manufacturing technology has important strategic significance and economic value. The traditional single-point diamond fly-cutting method is only used for processing plane parts, but at present, part of optical parts require continuous micro-scale step processing, and most of the continuous micro-scale step processing is carried out on an ultra-precise numerical control machine tool by adopting a fast tool servo. The height dimension of the processed continuous micro-scale steps cannot be further reduced due to the precision of the fast cutter servo processing mechanism. In addition, the fast cutter servo cannot process a continuous micro-scale step on a plane, and the application requirements are difficult to meet.
Disclosure of Invention
The invention aims to provide a micron-scale step ultra-precise fly-cutting machining method, which can realize the ultra-precise machining of micron-to-submicron-scale steps, provides a new method for the continuous micro-scale step machining, and solves the problem that the traditional fast cutter servo machining mechanism is limited by the temperature of precision.
The invention is realized by the following technical scheme:
a micro-scale step ultra-precise fly-cutting processing method utilizes a single-point diamond fly-cutting machine to carry out fly-cutting processing on a processed part, and realizes continuous micro-scale step processing by adjusting the rotating speed of a main shaft in the processing process.
The invention relates to a single-point diamond fly-cutting machine tool, belonging to the prior art. The invention is based on the traditional ultra-precise single-point diamond fly-cutting process, the ultra-precise numerical control machine tool is used as a processing platform under the condition of precisely controlling the processing environment, the natural single-crystal diamond cutter is used for directly processing a high-precision plane in a single-point cutting mode, and the fly-cutting cutter disc is used for realizing the definite quantitative processing of continuous micro-scale steps due to the fact that the cutting point of the single-point diamond cutter generates height change under the action of centrifugal force under different rotating speeds of a main shaft. The method can realize the ultra-precise fly-cutting processing of the steps with the diameter of several microns and high gradient, and provides an effective processing method for the ultra-precise processing of the steps with the micro-scale on the surface.
Specifically; the height difference of the micro-nano size required for cutting the micro-structure steps is determined by the distance that the tool tip point of the single-point diamond tool is lifted under the comprehensive influence of centrifugal force and other forces borne by the fly-cutting tool disc under the working condition of specific rotating speed of the main shaft; the height of the continuous micro-scale steps can be accurately controlled by changing the rotating speed of the main shaft, and the position of a tool point of the single-point diamond tool can be controlled and adjusted according to different rotating speeds of the main shaft.
Compared with the traditional processing method, the method has the advantages of simple operation and high precision.
Further, the method comprises the following steps:
1) and high-precision plane single-point diamond fly-cutting processing: setting the rotating speed of the main shaft to be n1, and performing fly-cutting machining on the surface of the machined part by adopting a single-point diamond cutter;
2) and ultra-precise fly-cutting machining of continuous micro-scale steps: changing the rotation speed of the main shaft to be n2, wherein n2> n1, carrying out fly-cutting machining on the surface of the machined part by adopting a single-point diamond cutter, and simultaneously, enabling the linear motion mechanism to carry out linear feeding motion in the machining length direction.
The steps of the invention can be used independently in one processing, and the rotating speed of the main shaft can be changed for a plurality of times according to the appearance of the micro step required to be obtained, namely, the steps of the invention are used repeatedly and disorderly for a plurality of times.
When the rotating speed of the main shaft is higher, the centrifugal force generated by the fly-cutting disc is higher, the distance for the tool tip point of the single-point diamond tool to be lifted is larger, namely the tool tip of the single-point diamond tool is larger than the part to be machined, the outer diameter of the machined workpiece is larger when the rotating speed is lower than that of the machined workpiece, and the machined workpiece is machined into a step.
Further, the cutting depth of the step 1) is 1 μm to 5 μm.
Further, the feeding speed of the linear motion mechanism is 2mm/min-5 mm/min.
Further, the rotating speed of the main shaft is 100rpm/min-600 rpm/min.
Furthermore, the single-point diamond tool is arranged on a fly-cutting cutter head of the machine tool and forms a linkage system with the linear motion mechanism.
Further, the processed parts are made of metal or nonmetal materials.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1. the invention breaks through the limitation that the traditional machining of the small-size steps is limited by the precision of the fast cutter servo device, and scientifically based on the traditional ultra-precise single-point diamond fly-cutting process, the fly-cutting cutter disc can generate micro-deformation of different degrees under different rotating speed working conditions when the fly-cutting cutter disc is used for machining, so that the height of the cutter point of the single-point diamond cutter is changed to realize the machining of the small-size steps.
2. The method has the advantages of low implementation cost, simple implementation method, ingenious and reasonable conception and greatly improved machining precision of the steps with the micro structure
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
FIG. 1 is a schematic view of a high-precision planar single-point diamond fly-cutting process according to the present invention;
FIG. 2 is a schematic view of the ultra-precise fly-cutting process of the continuous micro-scale step according to the present invention;
FIG. 3 is a schematic view of a high-precision planar single-point diamond fly-cutting process for the remaining area of the present invention;
FIG. 4 is an enlarged view of the single point diamond tool of FIG. 3;
FIG. 5 is a schematic diagram illustrating the evolution of the surface topography of a workpiece in accordance with an embodiment.
Reference numbers and corresponding part names in the drawings:
1-a part to be processed, 2-a linear motion mechanism, 3-a main shaft, 4-a fly-cutting cutter head, 5-a single-point diamond cutter and 6-a cutter frame.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.
Example (b):
as shown in the figures 1-5, a horizontal ultra-precise single-point diamond fly-cutting machine tool is selected, namely the machine tool can meet the requirement of the resolution of 1-5 mu m of cutting depth, the motion speed of the ultra-precise linear motion mechanism is 2-5 mm/min, and the rotating speed range of the main shaft is 100-600 rpm/min. A circular copper workpiece having a diameter of 50mm and a thickness of 10mm was mounted on a stage serving as a linear feed unit, and the height of the step was 0.5um according to the requirement. The speed of rotation n1 is 100rpm/min, the speed of rotation n2 is 200rpm/min and the feed speed v is 3 mm/min.
Horizontal ultraprecise single-point diamond fly cutting machine includes main shaft 3, be provided with on main shaft 3 and fly cutter dish 4, the outer wall that flies cutter dish 4 is provided with knife rest 6, install single-point diamond cutter 5 on knife rest 6, still include linear motion mechanism 2, be fixed on linear motion mechanism 2's objective table by processing part 1, single-point diamond cutter 5 forms the linked system with linear motion mechanism 2. In ultra-precision machining, the part is generally stuck on the objective table.
A micron-scale step ultra-precise fly-cutting processing method comprises the following steps:
firstly, high-precision plane single-point diamond fly-cutting processing is carried out, as shown in figure 1: the method comprises the steps that a single-point diamond fly-cutting machine tool is used under the condition of accurately controlling a machining environment, an ultra-precise numerical control machine tool is used as a machining platform, a natural single-crystal diamond cutter 5 is used for directly machining a high-precision plane in a single-point cutting mode, the rotating speed of a main shaft 3 is set to be n1, n1 is 100rpm/min, the feeding speed is v, and v is 3mm/min, the fly-cutting machining process is completed, and the high-precision surface area to be machined is obtained;
secondly, ultra-precise fly-cutting machining of continuous micro-scale steps, as shown in fig. 2: after the first step is finished, the rotation speed of the main shaft 3 is reset to be n2, n2 is 200rpm/min, the feeding speed V is set according to the size of the required micro-size step, V is 3mm/min, and the step surface is machined; in this step, since the rotation speed of the spindle 3 is increased, the tip point of the single-point diamond tool 5 is raised under the centrifugal force and the comprehensive stress state of the fly-cutting disc 4, as shown in fig. 4; thereby finishing the processing of the micro-structure steps;
thirdly, performing high-precision plane single-point diamond fly-cutting processing on the residual region, as shown in fig. 3: after finishing the machining of the micro-size step, the rotation speed of the spindle 3 is readjusted to n1, where n1 is 100rpm/min, so that the position of the tip point of the single-point diamond tool 5 is restored to the height in the step one, and then the single-point diamond fly-cutting machining of the surface of the remaining part 1 to be machined is finished.
In the detailed implementation of the present invention, the surface topography of the machined part 1 changes as shown in FIG. 5.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims (7)

1. The ultra-precise fly-cutting machining method for the micron-scale steps is characterized in that a single-point diamond fly-cutting machine tool is used for fly-cutting machining of a machined part (1), and continuous micro-scale step machining is achieved by adjusting the rotating speed of a main shaft (3) in the machining process.
2. The method for ultra-precise fly-cutting machining of micron-scale steps as claimed in claim 1, characterized by comprising the following steps:
1) and high-precision plane single-point diamond fly-cutting processing: setting the rotating speed of the main shaft (3) as n1, and performing fly-cutting machining on the surface of the machined part (1) by adopting a single-point diamond cutter (5);
2) and ultra-precise fly-cutting machining of continuous micro-scale steps: changing the rotating speed of the main shaft (3) to be n2, wherein n2> n1, carrying out fly-cutting machining on the surface of the machined part (1) by using a single-point diamond cutter (5), and simultaneously, enabling the linear motion mechanism (2) to carry out linear feeding motion in the machining length direction.
3. The method for ultra-precise fly-cutting a micrometer-scale step according to claim 2, wherein the cutting depth in the step 1) is 1 μm to 5 μm.
4. The method for ultra-precise fly-cutting machining of micron-scale steps according to claim 2, characterized in that the feeding speed of the linear motion mechanism (2) is 2mm/min-5 mm/min.
5. The method for ultra-precise fly-cutting machining of micron-scale steps according to claim 1 or 2, characterized in that the rotation speed of the spindle (3) is 100-600 rpm/min.
6. The ultra-precise fly-cutting machining method for the micron-scale step according to claim 2, characterized in that the single-point diamond tool (5) is mounted on a fly-cutting cutter head (4) of a machine tool and forms a linkage system with the linear motion mechanism (2).
7. The method for ultra-precise fly-cutting machining with micron-scale steps as claimed in claim 1 or 2, wherein the part (1) to be machined is a metal or non-metal material.
CN201911106048.XA 2019-11-13 2019-11-13 Ultra-precise fly-cutting machining method for micron-scale steps Active CN110814432B (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113579262A (en) * 2021-07-30 2021-11-02 深圳大学 Fly cutter cutting assembly
CN113798930A (en) * 2021-09-23 2021-12-17 天津大学 High-precision metal mirror surface machining method based on stirring friction treatment
CN115178803A (en) * 2022-07-15 2022-10-14 哈尔滨工业大学 Fly cutter head for fly cutting microstructure element of diamond cutter

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Publication number Priority date Publication date Assignee Title
JPH0349843A (en) * 1989-06-01 1991-03-04 Pilkington Plc Single point diamond machining machine tool and machining method for the same
CN101870002A (en) * 2010-07-08 2010-10-27 哈尔滨工业大学 Flatness error control method for single-point diamond turning method machining large-sized optical elements
CN202498253U (en) * 2012-03-13 2012-10-24 顾为民 Milling cutter head
CN103234481A (en) * 2013-04-28 2013-08-07 哈尔滨工业大学 High-efficiency and high-precision detection device for circular arc roundness of cutter point of diamond cutter
CN105843171A (en) * 2016-03-31 2016-08-10 林润(天津)科技有限公司 Computer software-based surface roughness prediction method during single-point diamond machining process

Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
JPH0349843A (en) * 1989-06-01 1991-03-04 Pilkington Plc Single point diamond machining machine tool and machining method for the same
CN101870002A (en) * 2010-07-08 2010-10-27 哈尔滨工业大学 Flatness error control method for single-point diamond turning method machining large-sized optical elements
CN202498253U (en) * 2012-03-13 2012-10-24 顾为民 Milling cutter head
CN103234481A (en) * 2013-04-28 2013-08-07 哈尔滨工业大学 High-efficiency and high-precision detection device for circular arc roundness of cutter point of diamond cutter
CN105843171A (en) * 2016-03-31 2016-08-10 林润(天津)科技有限公司 Computer software-based surface roughness prediction method during single-point diamond machining process

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Title
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113579262A (en) * 2021-07-30 2021-11-02 深圳大学 Fly cutter cutting assembly
CN113798930A (en) * 2021-09-23 2021-12-17 天津大学 High-precision metal mirror surface machining method based on stirring friction treatment
CN115178803A (en) * 2022-07-15 2022-10-14 哈尔滨工业大学 Fly cutter head for fly cutting microstructure element of diamond cutter
CN115178803B (en) * 2022-07-15 2023-08-08 哈尔滨工业大学 Fly cutter disc for fly-cutting micro-structural element of diamond cutter

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