CN110806570A - Temperature error compensation method for laser tracker - Google Patents
Temperature error compensation method for laser tracker Download PDFInfo
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- CN110806570A CN110806570A CN201911011035.4A CN201911011035A CN110806570A CN 110806570 A CN110806570 A CN 110806570A CN 201911011035 A CN201911011035 A CN 201911011035A CN 110806570 A CN110806570 A CN 110806570A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/497—Means for monitoring or calibrating
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a temperature error compensation method for a laser tracker, which comprises a laser tracker, a reflection target ball, an integrated temperature sensing module, a signal transmission module and a computer, wherein the method comprises the steps of firstly selecting a point to be measured, then the position of the point to be measured and the laser tracker is adjusted according to the operation method of the laser tracker, then the reflection target ball is placed at the point to be measured and the light path between the reflection target ball and the laser tracker is ensured to be free from shielding, then the integrated temperature sensing module is respectively arranged near the bird nest of the laser tracker and near the reflection target ball at the point to be detected, the temperature value T2 of the reflection target ball accessory obtained by the integrated temperature sensing module and the temperature value T1 near the bird nest of the laser tracker are transmitted to the computer through the signal transmission module, and the computer calculates the compensated distance d according to the received T1 and T2 values.m。
Description
Technical Field
The invention relates to the technical field of digital measurement, in particular to the field of temperature error compensation calculation of a laser tracker.
Background
Because the divergence of laser is very small, the distance measurement precision is high, people begin to use the laser interferometer to measure the distance several decades ago, and then use the laser interferometer to measure the straightness and the angle, and especially the advantage of the laser interferometer is played in the measurement of longer distance, but the laser interferometer needs to find collimation when in use, if the interference mirror or the reflecting mirror deviates from the laser optical axis, the error occurs, the light can not be interrupted and can be resumed, even if something in the middle is the light, the application of the laser interferometer in the measurement of space coordinates is limited, on the other hand, the laser is a tool for measuring the length, and other positioning devices are needed to be found when the laser interferometer is used for space measurement.
The Laser Tracker System is a high-precision large-size measuring instrument in an industrial measuring System, integrates various advanced technologies such as a Laser interference distance measuring technology, a photoelectric detection technology, a precision mechanical technology, a computer and control technology, a modern numerical calculation theory and the like, tracks a space moving target and measures the space three-dimensional coordinate of the target in real time, has the characteristics of high precision, high efficiency, real-time tracking measurement, quick installation, simple and convenient operation and the like, and is suitable for large-size workpiece assembling measurement.
The laser tracking and measuring system is basically composed of a laser tracking head (tracker), a controller, a user computer, a reflector (target mirror), a measuring accessory and the like.
The basic principle of operation of a laser tracking and measuring system is to position a reflector at a target point, where laser light from a tracking head is directed onto the reflector and returned to the tracking head, where the tracking head adjusts the direction of the beam to target the target as it moves, and the returned beam is received by a detection system for estimating the spatial position of the target.
The measuring system error of the laser tracker mainly comes from three aspects of environmental factors, system error and operation error, wherein the environmental factors include temperature, humidity, atmospheric pressure and the like, wherein the temperature has an important influence on the measuring accuracy of the laser tracker, therefore, the field environmental temperature needs to be added to compensate the measuring distance of the laser tracker when the measuring distance is calculated, and the temperature compensation formula of the laser tracker is as follows:
dm=d(1-(T-20)×10-6)
wherein T is the ambient temperature of the measurement site, d is the distance from the center of the instrument to the center of the target ball measured before compensation, dmIs an indication at a standard gauge temperature of 20 ℃.
The laser tracker station transfer measurement technology runs through the whole aircraft assembly process, provides an accurate data source for the assembly quality detection and evaluation of the aircraft, plays an important role in the subsequent maintenance of the assembly system, and under the condition that the precision of the laser tracker is good, the precision of the measurement is mainly determined by the precision of the transfer station, while the position change of ERS points and the measurement error of the measurement equipment seriously affect the accuracy of the transfer station, along with the continuous improvement of the measurement technology, the measurement error of the laser tracker is greatly reduced, the position change of the ERS points becomes a main factor affecting the accuracy of the transfer station, the ERS point position is changed remarkably due to thermal deformation, the change rule of the ERS point position along with the temperature is mastered during station transfer measurement, and the station transfer is carried out by combining the change rule of the ERS point position, so that the method has important significance for inhibiting the adverse influence of the ERS position change on the station transfer precision.
The calculation model considers a temperature compensation calculation method under a uniform temperature field, for an actual measurement field, particularly a measurement field of large-size parts, the distance between a laser tracking head and a reflection target ball can reach dozens of meters, the temperature environment of the measurement field inevitably fluctuates, the temperature difference can reach 2-3 ℃, under such a non-uniform temperature field, the refractive index of air varies temporally and spatially along the path of light propagation, if the temperature data provided by the meteorological station are only used for compensation, the uncertainty caused by the environment of the whole large-size measuring space cannot be compensated, the method compensates the calculation error caused by the uneven temperature field by introducing the temperature information of the measuring points into the model, and the compensated temperature value is used for a corrected theoretical distance calculation model of the laser tracker.
Disclosure of Invention
The invention aims to provide a temperature compensation method of a laser tracker under the condition of an uneven temperature field, aiming at a measurement site with large temperature fluctuation, the main source of measurement error is caused by the uneven temperature field.
The technical scheme of the invention is as follows:
the invention specifically provides a temperature error compensation method for a laser tracker, which uses a device comprising the following steps: the laser tracking device comprises a laser tracker, a reflection target ball, an integrated temperature sensing module, a signal transmission module and a computer, wherein the integrated temperature sensing module is placed near a bird nest of the laser tracker and near the reflection target ball and used for detecting a temperature value T1 near the bird nest of the laser tracker and a temperature value T2 near the reflection target ball, the signal transmission module can transmit detected values of T1 and T2 to the computer, and the computer calculates the compensated distance by utilizing T1 and T2
In order to better realize the invention, the position of the laser tracker is further adjusted according to the operation requirement of the laser tracker during measurement, so that the laser tracker is aligned to a point to be measured, the reflection target ball is placed at the point to be measured, and the measurement light path between the laser tracker and the reflection target ball is ensured to be free from shielding.
To better implement the invention, further, said compensated distance dmThe operation basis of (1) is as follows:
in the measurement, the measured value is an indication at a standard measurement temperature of 20 ℃, and is denoted by n (T)m) Denotes the refractive index of air, n (T) at 20 deg.Cs) Is shown at temperature TsD represents the distance calculated before compensation, then the indication of the distance d at a standard gauge temperature of 20 DEG CmCan be expressed as:
due to the fact that at the light propagation path point P1To point P2The temperature field above is a non-uniform temperature field, distance dmThe integral formula can be expressed as:
air pressure n (T) according to the empirical formula Edlens) Can be expressed as:
distance dmThe rewrite is:
according to actual experience of a production field and the fact that the temperature between two points in a non-uniform temperature field of test data basically meets linear distribution, the formula can be converted into:
wherein:
and because at about 20 ℃:
n(Tm)=1
this gives:
compared with the prior art, the invention has the following advantages and beneficial effects:
(1) the invention can be suitable for measurement in a larger environment range;
(2) the invention introduces a temperature error compensation method, and the measurement of the result is more accurate.
Drawings
FIG. 1 is a schematic diagram of a field measurement simulation;
FIG. 2 is a schematic diagram of specific measurement steps.
Wherein: 1-bird nest of laser tracker, 2-reflection target ball, 3-computer.
Detailed Description
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and therefore should not be considered as a limitation to the scope of protection. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
Example 1:
referring to fig. 1 and 2, a method for compensating temperature error of a laser tracker uses an apparatus including: the laser tracking device comprises a laser tracker, a reflection target ball 2, an integrated temperature sensing module, a signal transmission module and a computer 3, wherein the integrated temperature sensing module is placed near a bird nest 1 of the laser tracker and near the reflection target ball 2 and used for detecting a temperature value T1 near the bird nest 1 of the laser tracker and a temperature value T2 near the reflection target ball 2, the signal transmission module can transmit detected values of T1 and T2 to the computer 3, and the computer 3 calculates and obtains a compensated distance by utilizing T1 and T2
The working principle is as follows: firstly, a point to be measured is selected, the reflective target ball 2 is placed at the point to be measured according to the laser tracker, the target distance to be obtained can be measured through the laser tracker, but due to the fact that the distance of the point to be measured is too large, temperature difference exists in places, an integrated temperature sensing module is placed near the reflective target ball 2 and near the bird nest 1 of the laser tracker at the same time during detection, and the integrated temperature sensing module can obtain the temperature value T2 near the reflective target ball 2 and the laser temperature value T2 near the laser tracker during measurement in real timeThe temperature value T1 near the tracker bird nest 1 is substituted into the temperature compensation formula to obtain the distance d after temperature compensationm。
Example 2:
with reference to fig. 1, this embodiment is further optimized based on embodiment 1:
the method for compensating the temperature error of the laser tracker according to claim 1, wherein during the measurement, the position of the laser tracker is adjusted according to the operation requirement of the laser tracker, so that the laser tracker is aligned with the point to be measured, the reflective target ball 2 is placed at the point to be measured, and the measurement light path between the laser tracker and the reflective target ball 2 is ensured to be free from shielding.
The working principle is as follows: the working principle of the laser tracker is that a reflection target ball 2 is arranged on a target point, laser emitted by the laser tracker is emitted to the reflection target ball 2 and returns to the laser tracker, and when the target moves, the laser tracker adjusts the direction of a light beam to aim at the target. Meanwhile, the return beam is received by the detection system and used for measuring and calculating the space position of the target. Therefore, if there is a blockage in the measurement optical path between the laser tracker and the target ball 2, the laser tracker cannot perform accurate measurement, and it is necessary to ensure that there is no blockage in the optical path between the laser tracker and the target ball 2.
Other parts of this embodiment are the same as embodiment 1, and thus are not described again.
Example 3:
this example was further optimized on the basis of examples 1 and 2:
temperature value T near bird nest 1 of laser tracker collected by integrated temperature sensing module transmitted by signal transmission module as described in embodiment 11And a temperature value T near the reflective target ball 2 at the point to be measured2Calculating the compensated distanceThe calculation basis is as follows:
in the measurement, the measured value is an indication at a standard measurement temperature of 20 ℃, and is denoted by n (T)m) Denotes the refractive index of air, n (T) at 20 deg.Cs) Is shown at temperature TsD represents the distance calculated before compensation, then the indication of the distance d at a standard gauge temperature of 20 deg.CmCan be expressed as:
let the bird nest 1 position point of the laser tracker be P1The position point of the reflection target ball 2 at the point to be measured is P2Due to the fact that at the point P of the light propagation path1To point P2The temperature field above is a non-uniform temperature field, the distance d is below the standard measurement temperature of 20 DEG CmThe integral formula can be expressed as:
air pressure n (T) according to the empirical formula Edlens) Can be expressed as:
so that the distance dmThe rewrite is:
according to actual experience and test data of a production field, the temperature between two points is equivalent to linear distribution, and then the formula can be converted into:
wherein:
and because at about 20 ℃:
n(Tm)=1
this gives:
because the method utilizes the temperature correction model of the laser tracker established by the temperature T1 near the bird nest 1 of the laser tracker and the temperature T2 near the reflecting target ball 2, compared with the temperature correction model of the laser tracker established by only adopting the temperature T1 near the bird nest 1 of the laser tracker, the measurement result under the large-size uneven temperature field is more accurate through temperature compensation, and other parts of the embodiment are the same as those of the embodiment 1 and the embodiment 2, so that the description is omitted.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and all simple modifications and equivalent variations of the above embodiments according to the technical spirit of the present invention are included in the scope of the present invention.
Claims (3)
1. A method for compensating for temperature error in a laser tracker, the method using apparatus comprising: the laser tracker comprises a laser tracker, a reflection target ball (2), an integrated temperature sensing module, a signal transmission module and a computer (3), wherein the integrated temperature sensing module is placed near a bird nest (1) of the laser tracker and near the reflection target ball (2) and used for detecting a temperature value T1 near the bird nest (1) of the laser tracker and a temperature value T2 near the reflection target ball (2), the signal transmission module can transmit the detected values of T1 and T2 to the computer (3), and the computer (3) calculates the compensated distance by utilizing T1 and T2
2. The method for compensating the temperature error of the laser tracker according to claim 1, wherein during measurement, the position of the laser tracker is adjusted according to the operation requirement of the laser tracker, the laser tracker is aligned with a point to be measured, the reflective target ball (2) is placed at the point to be measured, and the measurement light path between the laser tracker and the reflective target ball (2) is ensured to be free from shielding.
3. The method of claim 1, wherein the compensated distance d is a distance dmThe operation method comprises the following steps:
in the measurement, the measured value is an indication at a standard measurement temperature of 20 ℃, and is denoted by n (T)m) Denotes the refractive index of air, n (T) at 20 deg.Cs) Is shown at temperature TsD represents the distance calculated before compensation, then the indication of the distance d at a standard gauge temperature of 20 DEG CmCan be expressed as:
due to the fact that at the light propagation path point P1To point P2The temperature field above is a non-uniform temperature field, distance dmThe integral formula can be expressed as:
air pressure n (T) according to the empirical formula Edlens) Can be expressed as:
distance dmThe rewrite is:
according to actual experience of a production field and the fact that the temperature between two points in a non-uniform temperature field of test data basically meets linear distribution, the formula can be converted into:
wherein:
and because at about 20 ℃:
n(Tm)=1
this gives:
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CN111458719A (en) * | 2020-04-14 | 2020-07-28 | 中国矿业大学(北京) | Method and equipment for high-precision real-time monitoring of rock erosion amount of inner wall of stone cave temple |
CN111913167A (en) * | 2020-06-17 | 2020-11-10 | 成都飞机工业(集团)有限责任公司 | Reflecting mirror for laser radar measuring system and using method thereof |
CN112083398A (en) * | 2020-07-17 | 2020-12-15 | 科沃斯机器人股份有限公司 | Measuring device, autonomous moving apparatus, cleaning robot, and measuring method |
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Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0745868A1 (en) * | 1995-06-02 | 1996-12-04 | HE HOLDINGS, INC. dba HUGHES ELECTRONICS | Temperature compensated APD detector bias and transimpedance amplifier circuitry for laser range finders |
US20020148133A1 (en) * | 2001-03-06 | 2002-10-17 | Bridges Robert E. | Scale-bar artifact and methods of use |
CN101363715A (en) * | 2008-09-26 | 2009-02-11 | 浙江大学 | Computation method for attitude of aircraft fuselage based on laser tracking instrument |
CN102003935A (en) * | 2010-11-03 | 2011-04-06 | 中国科学院光电技术研究所 | Environment compensation method in laser tracker measurement |
CN102506702A (en) * | 2011-09-29 | 2012-06-20 | 天津大学 | Large three-dimensional coordinate measuring method with laser tracking and device |
CN102768016A (en) * | 2012-07-31 | 2012-11-07 | 爱佩仪中测(成都)精密仪器有限公司 | Method and device for compensating precision of coordinate measuring machine |
CN103591891A (en) * | 2013-11-20 | 2014-02-19 | 天津大学 | Fine control field precision source-tracing method for indoor space measuring and locating system |
US20140163775A1 (en) * | 2011-04-14 | 2014-06-12 | Hexagon Technology Center Gmbh | Geodetic marking system for marking target points |
CN104865577A (en) * | 2015-05-25 | 2015-08-26 | 上海翌森信息科技有限公司 | Laser range finding system |
CN106683346A (en) * | 2016-12-10 | 2017-05-17 | 厦门恺岚方新能源有限公司 | Laser ranging geological disaster early warning device |
US20170307757A1 (en) * | 2016-04-22 | 2017-10-26 | Hexagon Technology Genter Gmbh | Dynamic expansion of a distance measuring device having a variable optical attenuation element in the transmitting channel |
-
2019
- 2019-10-23 CN CN201911011035.4A patent/CN110806570B/en active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0745868A1 (en) * | 1995-06-02 | 1996-12-04 | HE HOLDINGS, INC. dba HUGHES ELECTRONICS | Temperature compensated APD detector bias and transimpedance amplifier circuitry for laser range finders |
US20020148133A1 (en) * | 2001-03-06 | 2002-10-17 | Bridges Robert E. | Scale-bar artifact and methods of use |
CN101363715A (en) * | 2008-09-26 | 2009-02-11 | 浙江大学 | Computation method for attitude of aircraft fuselage based on laser tracking instrument |
CN102003935A (en) * | 2010-11-03 | 2011-04-06 | 中国科学院光电技术研究所 | Environment compensation method in laser tracker measurement |
US20140163775A1 (en) * | 2011-04-14 | 2014-06-12 | Hexagon Technology Center Gmbh | Geodetic marking system for marking target points |
CN102506702A (en) * | 2011-09-29 | 2012-06-20 | 天津大学 | Large three-dimensional coordinate measuring method with laser tracking and device |
CN102768016A (en) * | 2012-07-31 | 2012-11-07 | 爱佩仪中测(成都)精密仪器有限公司 | Method and device for compensating precision of coordinate measuring machine |
CN103591891A (en) * | 2013-11-20 | 2014-02-19 | 天津大学 | Fine control field precision source-tracing method for indoor space measuring and locating system |
CN104865577A (en) * | 2015-05-25 | 2015-08-26 | 上海翌森信息科技有限公司 | Laser range finding system |
US20170307757A1 (en) * | 2016-04-22 | 2017-10-26 | Hexagon Technology Genter Gmbh | Dynamic expansion of a distance measuring device having a variable optical attenuation element in the transmitting channel |
CN106683346A (en) * | 2016-12-10 | 2017-05-17 | 厦门恺岚方新能源有限公司 | Laser ranging geological disaster early warning device |
Non-Patent Citations (1)
Title |
---|
郑联语: ""大尺寸测量技术在航空制造业中的应用及关键技术"", 《航空制造技术》 * |
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---|---|---|---|---|
CN111458719A (en) * | 2020-04-14 | 2020-07-28 | 中国矿业大学(北京) | Method and equipment for high-precision real-time monitoring of rock erosion amount of inner wall of stone cave temple |
CN111913167A (en) * | 2020-06-17 | 2020-11-10 | 成都飞机工业(集团)有限责任公司 | Reflecting mirror for laser radar measuring system and using method thereof |
CN111913167B (en) * | 2020-06-17 | 2022-04-08 | 成都飞机工业(集团)有限责任公司 | Reflecting mirror for laser radar measuring system and using method thereof |
CN112083398A (en) * | 2020-07-17 | 2020-12-15 | 科沃斯机器人股份有限公司 | Measuring device, autonomous moving apparatus, cleaning robot, and measuring method |
CN112357110A (en) * | 2020-09-22 | 2021-02-12 | 成都飞机工业(集团)有限责任公司 | Aircraft taxiing lamp installation angle calibration system and method based on laser positioning principle |
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CN113405452A (en) * | 2021-05-10 | 2021-09-17 | 中航西安飞机工业集团股份有限公司 | Digital tooling aircraft coordinate system calibration method based on temperature compensation |
CN113714296A (en) * | 2021-08-17 | 2021-11-30 | 山东磐金钢管制造有限公司 | Perforating machine center line calibration method based on laser tracker |
CN113714296B (en) * | 2021-08-17 | 2023-10-20 | 山东磐金钢管制造有限公司 | Perforating machine center line calibration method based on laser tracker |
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