CN110806221A - MEMS sensor capable of defending resonance and resonance defending method thereof - Google Patents
MEMS sensor capable of defending resonance and resonance defending method thereof Download PDFInfo
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- CN110806221A CN110806221A CN201810883834.XA CN201810883834A CN110806221A CN 110806221 A CN110806221 A CN 110806221A CN 201810883834 A CN201810883834 A CN 201810883834A CN 110806221 A CN110806221 A CN 110806221A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/42—Devices characterised by the use of electric or magnetic means
- G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
Abstract
The invention relates to a MEMS sensor capable of defending resonance and a defending resonance method thereof, wherein the sensor comprises a variable capacitor, a variable pitch elastic element, a quantization module and a current compensation module, and further comprises an elastic element input pin and an elastic element output pin which are respectively electrically connected with two ends of the variable pitch elastic element, and a rigidity control current is received between the elastic element input pin and the elastic element output pin so as to change the rigidity of the variable pitch elastic element; the input end of the current compensation module receives the quantized value of the quantization module, and outputs the quantized value after current compensation, wherein the compensation is to perform corresponding compensation according to the current value of the rigid control current received by the variable-pitch elastic element, and output a final compensated correction value. The invention adopts the variable-pitch elastic element, can effectively prevent resonance, ensures the safety of data, and simultaneously ensures the measurement precision by adopting the current compensation module.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to an MEMS sensor capable of defending resonance and a resonance defending method thereof.
Background
The MEMS sensor has been widely applied to various control fields due to the characteristics of high precision, light weight, small size and high efficiency, for example, vehicles judge whether emergency brake collision occurs through the MEMS acceleration sensor, so that the Internet of vehicles center is automatically called to request remote rescue; the vehicle judges whether the vehicle has sharp turning through the MEMS gyroscope sensor so as to start a vehicle body stabilizing system and the like. The data output by the MEMS sensor has become an important basis for the correct implementation of many control systems. Therefore, the security of the sensor counting data is very important, and if the data output by the sensor is attacked or tampered by hackers, the functions of the control system can be started or shut down incorrectly, which causes serious security accidents.
At present, a method of attacking the MEMS sensor with a sound wave of a specific frequency to cause it to output erroneous data has appeared. The principle is to bring the frequency of the acoustic wave to the resonance frequency of the elastic element in the MEMS sensor, thereby causing resonance of the elastic element. Thus, the elastic element in the sensor can be manipulated to vibrate, and the amplitude of the elastic element can be controlled through the strength of resonance. Because the MEMS sensor is converted into a corresponding electronic measurement value by the elastic displacement of the elastic element, and then the measurement value is subjected to quantitative conversion to finish output, a hacker can completely control the data output of the sensor by using sound waves to achieve the purpose of destruction.
In order to protect the MEMS from the attack of sound waves, sound absorption materials are added on the periphery of the MEMS sensor, or a plurality of filtering algorithms are adopted in internal software to counteract the influence of the sound waves. However, the mode of adding the sound-absorbing material can only aim at sound wave attack, if other types of physical resonance sources or high-strength sound-absorbing materials cannot deal with the sound-absorbing material, and the software processing has a limited effect on resonance cancellation.
Disclosure of Invention
In view of the above problems, the present invention is directed to provide a MEMS sensor capable of preventing resonance and a method for preventing resonance thereof, which can effectively prevent resonance and ensure data security.
The specific scheme is as follows:
an MEMS sensor capable of defending resonance comprises a variable capacitor, a variable-pitch elastic element, a quantization module and a current compensation module, and further comprises an elastic element input pin and an elastic element output pin which are electrically connected with two ends of the variable-pitch elastic element respectively, wherein rigidity control current is received between the elastic element input pin and the elastic element output pin so as to change the rigidity of the variable-pitch elastic element;
the input end of the current compensation module receives the quantized value of the quantization module, and outputs the quantized value after current compensation, wherein the compensation is to perform corresponding compensation according to the current value of the rigid control current received by the variable-pitch elastic element, and output a final compensated correction value.
Further, the compensation is to search a corresponding compensation value according to the current magnitude of the rigid control current, and perform compensation according to the corresponding compensation value.
Furthermore, a compensation table is stored in the current compensation module, and the compensation table includes two columns, namely, a current magnitude column and a compensation value column of the elastic element.
Further, each of the two columns in the compensation table corresponds to one another.
A MEMS sensor resonance defense method is based on the MEMS sensor capable of defending resonance in the first embodiment of the invention and comprises the following steps:
the method comprises the following steps: outputting a current value of a rigid control current to an elastic element input pin and an elastic element output pin which are electrically connected with two ends of the variable-pitch elastic element;
step two: the quantization module collects a capacitance value output by the variable capacitor, converts the capacitance value into a quantization value and outputs the quantization value to the current compensation module, the current compensation module compensates according to a current value of the rigid control current input between an input pin and an output pin of the variable-pitch elastic element to obtain a correction value, and the current compensation module outputs the correction value as a result.
Furthermore, a compensation table is stored in the current compensation module, the compensation table includes two columns, namely an elastic element current magnitude column and a compensation value column, and the compensation is to search a corresponding compensation value in the compensation table according to the current magnitude of the rigid control current and compensate according to the corresponding compensation value.
Further, the current value of the rigid control current output in the step one is output by randomly selecting any one of the columns of the elastic element current in the compensation table as the current value of the rigid control current.
Further, each of the two columns in the compensation table corresponds to one another.
A compensation value calculating method based on the MEMS sensor capable of defending resonance according to the first embodiment of the present invention includes: under the same external condition, calculating the difference value of the output of the MEMS sensor capable of defending resonance when no rigid control current is applied and when the rigid control current is applied, and setting the difference value as a compensation value corresponding to the current magnitude of the rigid control current.
According to the invention, by adopting the technical scheme, the variable-pitch elastic element is adopted, the rigidity of the elastic element is changed by controlling the dynamic change of the current, resonance can be effectively prevented, the data safety is ensured, and meanwhile, the measurement precision can be ensured by the adopted current compensation module.
Drawings
Fig. 1 is a schematic structural diagram of a first embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a conventional MEMS sensor.
Detailed Description
To further illustrate the various embodiments, the invention provides the accompanying drawings. The accompanying drawings, which are incorporated in and constitute a part of this disclosure, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the embodiments. Those skilled in the art will appreciate still other possible embodiments and advantages of the present invention with reference to these figures.
The invention will now be further described with reference to the accompanying drawings and detailed description.
The first embodiment is as follows:
the invention provides an MEMS sensor capable of defending resonance, and referring to FIG. 1, a broken line frame in FIG. 1 is a schematic structural diagram of the MEMS sensor capable of defending resonance, and the MEMS sensor comprises a variable capacitor 1, a variable pitch elastic element 2, a quantization module and a current compensation module, and further comprises an elastic element input pin and an elastic element output pin (not shown in the figure) which are respectively electrically connected with two ends of the variable pitch elastic element 2, and a rigidity control current is received between the elastic element input pin and the elastic element output pin so as to change the rigidity of the variable pitch elastic element 2.
A conventional MEMS sensor mainly includes a variable capacitor, an elastic element, and a quantization module, as shown in fig. 2, for example, a uniaxial acceleration sensor, which makes the elastic element, i.e., a spring, inside the MEMS sensor stretch under the action of external forces such as acceleration, directional angular velocity, and the like, so as to change the capacitance value of the variable capacitor, and quantize and output the change in the capacitance value, thereby obtaining a change value of the velocity in the X direction output by the MEMS sensor. The conventional MEMS sensor described in the present invention is a MEMS sensor, such as an acceleration sensor, which implements a sensing function by a variable capacitance and an elastic element.
Since the common elastic elements all have a fixed resonance frequency, when encountering the attack of the acoustic wave with the same frequency, the common elastic elements can cause vibration, thereby influencing the variable capacitance value, so that an attacker can manipulate the value of the finally output MEMS sensor.
When the common elastic element is changed into the variable-pitch elastic element 2, as shown in fig. 1, the MEMS sensor described in this embodiment has the following technical features:
1. the elastic element adopts a variable-pitch elastic element 2.
The variable pitch spring can effectively prevent resonance. The pitch is the axial distance between two adjacent coils of the spring, the effective coil number of the variable-pitch spring is reduced along with the doubling of the spring caused by the increase of the stress of the spring, and the process of gradually reducing the effective coil number is the process of gradually increasing the rigidity of the spring, and the variable-pitch elastic element 2 has the characteristic of variable rigidity due to the characteristic of the variable-pitch elastic element. It is known that springs deform when subjected to a force, and that springs of variable pitch are characterized by: when the stress is increased gradually, the variable-pitch arc spring is gradually tightened from the small pitch to the large pitch, and the rigidity is increased gradually.
Since the resonance frequency of the spring is determined by the rigidity of the spring, the rigidity of the sensor elastic element can be changed by adopting the variable-pitch elastic element 2, namely the resonance frequency is variable, so that an attacker is difficult to attack the sensor by using the acoustic wave resonance.
2. The rigidity controls the current.
Since the sensed quantities of the sensor are generally relatively small quantities, such as gravitational acceleration, angular velocity, etc., the sensed quantities are not large enough to force the variable-pitch elastic elements 2 to close due to the force, thereby causing the rigidity to change. In this case, it is necessary to actively change the rigidity of the variable pitch elastic element 2 by externally applying a current through the variable pitch elastic element 2. In this embodiment, the variable-pitch elastic element 2 is a spring, and when the spring is energized, the same-direction current flows through two adjacent coils, and the springs contract due to the attraction of the same-direction current, so that the rigidity is increased.
3. And a current compensation module.
Since the current control spring stiffness is introduced, the value of the sensor output will be superimposed on the current contribution for the same external quantity. In this case, it is necessary to compensate for the factors of the input rigid control current. Since the rigidity changes nonlinearly, the superposed influence of each unit current needs to be calibrated to form a compensation table of the current relative to the output value of the sensor.
The input end of the current compensation module receives the quantized value of the quantization module, and outputs the quantized value after current compensation, wherein the compensation is to perform corresponding compensation according to the current value of the rigid control current received by the variable-pitch elastic element 2, and output a final compensated correction value.
In the embodiment, the current of the input rigid control current is controlled by the external controller, and then the current is sent to the current compensation module, and the current compensation module performs corresponding compensation according to the received current sent by the external controller.
The compensation is performed by using a table lookup method in this embodiment, that is, the corresponding compensation value is found according to the table lookup method according to the current magnitude of the rigid control current, and the compensation is performed according to the corresponding compensation value, which can also be performed by using other methods in the prior art by those skilled in the art.
The specific implementation manner adopted in this embodiment is to store a compensation table in advance in a current compensation module of the sensor, where the compensation table includes two columns, namely, an elastic element current magnitude column and a compensation value column, each of the compensation value columns is a compensation value obtained after calculation, the compensation value and the elastic element current magnitude value may be in a one-to-one correspondence relationship, or may be in a relationship in which multiple items correspond to one item, and in order to make the rigidity change of the variable-pitch elastic element 2 more obvious and the anti-resonance capability stronger, it is preferable to set each of the two columns to be in one-to-one correspondence in this embodiment.
The value of each item in the column of the current magnitude of the elastic element may be a current value with the same amplification in a sequential arrangement, or an irregular current value, which is not limited herein, and in this embodiment, the current values are a current value in a sequential arrangement, that is, each current value includes 1-n unit currents. The setting of the unit current and the selection of n can be set by a person skilled in the art empirically, and it is necessary to avoid the influence of excessive current on the sensor even if the compensation value of the variable-pitch elastic element 2 is different between different unit currents.
The calculation method of the compensation value comprises the following steps: under the same external condition, calculating the difference value of the output of the MEMS sensor capable of defending resonance when no rigid control current is applied and when the rigid control current is applied, and setting the difference value as a compensation value corresponding to the current magnitude of the rigid control current.
Specifically, in this embodiment, for the same sensor input, for example, under the same acceleration environment, the output value y1 of the sensor when no current is applied to the variable-pitch elastic element 2 is calculated, and the output value y2 of the sensor when a unit current of x (1 ≦ x ≦ n) is calculated, and the difference between the two is the compensation value of the unit current.
The calculation process of the compensation table is the design process of the sensor, and after the compensation table is calculated, the compensation table is stored in the current compensation module for calling in the subsequent use.
The compensation table format set in this embodiment is shown in table 1, where Δ a is a unit current, Δ a is 0.001 ampere in this embodiment, and Δ Xn is a calculated compensation value.
TABLE 1
| Magnitude of current in elastic element | Compensation value |
| ΔA | ΔX1 |
| 2ΔA | ΔX2 |
| 3ΔA | ΔX3 |
| …… | …… |
| nΔA | ΔXn |
The working principle of the sensor in the embodiment is as follows: the variable-pitch elastic element 2 receives currents input from an elastic element input pin and an elastic element output pin, the current compensation module inquires a compensation value corresponding to the current according to the current input between the elastic element input pin and the elastic element output pin from a compensation table, and then the compensation value is used for compensating the capacitance value of the variable capacitor 1 converted by the quantization module.
Since the fundamental principle of attack on the sensor is the elastic element resonance, the resonant frequency of each element is usually fixed, which facilitates the attack. According to the embodiment of the invention, the rigidity property of the variable-pitch elastic element 2 is actively and dynamically changed in the use process of the sensor, the change of the rigidity of an object can cause the change of the resonant frequency of the variable-pitch elastic element 2, and the resonant frequency of the variable-pitch elastic element 2 in the MEMS sensor can be randomly changed. Since the resonance frequency is no longer fixed but randomly varied, it is difficult for an external attacking frequency source to match the resonance frequency, and even if the frequency source is momentarily and occasionally matched, the resonance frequency of the sensor is actively and randomly varied, so that the resonance is immediately lost. Therefore, the resonance source can not control the elastic element of the sensor for a long time, and the MEMS sensor has the capability of defending the resonance source attack. Because the rigidity of the variable-pitch elastic element 2 is changed, the accuracy of a measuring result of the sensor can be influenced, and the compensation module of the invention carries out compensation correction on the influence of sensor data by calibrating the magnitude of input rigidity control current, thereby ensuring the accuracy of a sensor output value.
Example two:
the invention also provides a resonance defense method of the MEMS sensor, which is based on the MEMS sensor capable of defending resonance in the first embodiment and comprises the following steps:
the method comprises the following steps: outputting a current value of a rigid control current to an elastic element input pin and an elastic element output pin which are electrically connected with two ends of the variable-pitch elastic element;
step two: the quantization module collects a capacitance value output by the variable capacitor, converts the capacitance value into a quantization value and outputs the quantization value to the current compensation module, the current compensation module compensates according to a current value of the rigid control current input between an input pin and an output pin of the variable-pitch elastic element to obtain a correction value, and the current compensation module outputs the correction value as a result.
And the compensation is to search a corresponding compensation value according to the current magnitude of the rigid control current and compensate according to the corresponding compensation value. The specific method adopted in this embodiment is to store a compensation table in a current compensation module of the sensor, where the compensation table includes two columns, namely an elastic element current magnitude column and a compensation value column, each of the compensation value columns is a compensation value obtained after calculation, the compensation value and the elastic element current magnitude value may be in a one-to-one correspondence relationship, or may be in a relationship in which multiple items correspond to one item, and in order to make the rigidity change of the variable-pitch elastic element more obvious and the anti-resonance capability stronger, it is preferable to set each of the two columns to be in a one-to-one correspondence in this embodiment.
The current value of the output rigid control current in the step one may be input by selecting the current magnitude according to a certain rule, or may be input by randomly selecting the current magnitude, and in order to better prevent resonance and avoid manual disruption, it is preferable to adopt random selection, that is, to randomly select any one of the columns of the current magnitudes of the elastic elements in the compensation table as the current value of the rigid control current to output.
In this embodiment, a value m is randomly selected from 1 to n as a unit multiple of the input current of the elastic element, and the current of m units is input to the elastic element.
In this case, the variable-pitch elastic element in this embodiment is subjected to a current to generate a certain contraction, which results in a change in rigidity.
In this embodiment, the correction value is quantized value-compensation value.
Step three: and returning to the step one, continuously inputting the magnitude of the current randomly, and ensuring that the rigidity of the elastic element is changed continuously to resist the sound wave resonance attack.
While the invention has been particularly shown and described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. A MEMS sensor that is resistant to resonance, characterized by: the variable-pitch flexible circuit comprises a variable capacitor, a variable-pitch flexible element, a quantization module and a current compensation module, and further comprises a flexible element input pin and a flexible element output pin which are electrically connected with two ends of the variable-pitch flexible element respectively, wherein rigidity control current is received between the flexible element input pin and the flexible element output pin so as to change the rigidity of the variable-pitch flexible element;
the input end of the current compensation module receives the quantized value of the quantization module, and outputs the quantized value after current compensation, wherein the compensation is to perform corresponding compensation according to the current value of the rigid control current received by the variable-pitch elastic element, and output a final compensated correction value.
2. The resonance-defensible MEMS sensor of claim 1 wherein: and the compensation is to search a corresponding compensation value according to the current magnitude of the rigid control current and compensate according to the corresponding compensation value.
3. The resonance-defensible MEMS sensor of claim 2 wherein: the current compensation module is stored with a compensation table, and the compensation table comprises two columns, namely an elastic element current magnitude column and a compensation value column.
4. The resonance-defensible MEMS sensor of claim 3 wherein: each of the two columns in the compensation table corresponds one-to-one.
5. A MEMS sensor resonance defense method based on the resonance defense MEMS sensor of claim 1, characterized in that: the method comprises the following steps:
the method comprises the following steps: outputting a current value of a rigid control current to an elastic element input pin and an elastic element output pin which are electrically connected with two ends of the variable-pitch elastic element;
step two: the quantization module collects a capacitance value output by the variable capacitor, converts the capacitance value into a quantization value and outputs the quantization value to the current compensation module, the current compensation module compensates according to a current value of the rigid control current input between an input pin and an output pin of the variable-pitch elastic element to obtain a correction value, and the current compensation module outputs the correction value as a result.
6. The MEMS sensor resonance defense method of claim 5, wherein: and the compensation is to search a corresponding compensation value according to the current magnitude of the rigid control current and compensate according to the corresponding compensation value.
7. The MEMS sensor resonance defense method of claim 6, wherein: the compensation module is stored with a compensation table, the compensation table comprises two columns, namely an elastic element current magnitude column and a compensation value column, and the compensation is to search the corresponding compensation value in the compensation table according to the current magnitude of the rigid control current and compensate according to the corresponding compensation value.
8. The MEMS sensor resonance defense method according to claim 7, wherein: in the step one, the current value of the rigid control current is output by randomly selecting any one of the columns of the current magnitude of the elastic element in the compensation table as the current value of the rigid control current.
9. The MEMS sensor resonance defense method according to claim 7, wherein: each of the two columns in the compensation table corresponds one-to-one.
10. A compensation value calculation method based on the resonance-defensible MEMS sensor of any one of claims 1 to 4, wherein: the method comprises the following steps: under the same external condition, calculating the difference value of the output of the MEMS sensor capable of defending resonance when no rigid control current is applied and when the rigid control current is applied, and setting the difference value as a compensation value corresponding to the current magnitude of the rigid control current.
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| CN108267701A (en) * | 2017-12-27 | 2018-07-10 | 中国船舶重工集团公司第七0研究所 | A kind of environment magnetic disturbance Active Compensation system for magnetic field reproduction coil |
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