CN110798957A - Water cooling device for hollow cathode discharge electrode - Google Patents
Water cooling device for hollow cathode discharge electrode Download PDFInfo
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- CN110798957A CN110798957A CN201911067234.7A CN201911067234A CN110798957A CN 110798957 A CN110798957 A CN 110798957A CN 201911067234 A CN201911067234 A CN 201911067234A CN 110798957 A CN110798957 A CN 110798957A
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- electrode
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- water
- water inlet
- water outlet
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 85
- 238000001816 cooling Methods 0.000 title claims abstract description 15
- 239000002356 single layer Substances 0.000 claims abstract description 24
- 238000007789 sealing Methods 0.000 claims abstract description 12
- 239000010410 layer Substances 0.000 claims description 10
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- -1 polytetrafluoroethylene Polymers 0.000 claims description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 abstract description 8
- 125000004122 cyclic group Chemical group 0.000 abstract description 2
- 238000003912 environmental pollution Methods 0.000 abstract description 2
- 230000007246 mechanism Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 11
- 230000008859 change Effects 0.000 description 5
- 238000004381 surface treatment Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
Abstract
The invention discloses a water cooling device for a hollow cathode discharge electrode, which comprises a hollow electrode and a box body electrode, wherein the hollow electrode is a multilayer electrode, the main body of the multilayer electrode is a multilayer electrode pipe which is encircled into a multilayer tubular structure, a water inlet II and a water outlet II are respectively arranged at two ends of the multilayer electrode pipe, sealing sleeves II are respectively sleeved on the excircles of the water inlet II and the water outlet II, water pipe joints II are respectively fixedly sleeved at the end parts of the water inlet II and the water outlet II, through holes which are matched with the water inlet II and the water outlet II are arranged on the side surface of the box body electrode, and an electrode fixing block with a block structure is arranged between the box body electrode and the side surface of the multilayer electrode; according to the invention, circulating cooling water is introduced into the single-layer electrode tube and the multilayer electrode tube, so that heat generated by electrode discharge can be taken away in time, a suitable intracavity environment can be created, the whole mechanism does not generate environmental pollution, and environment-friendly cyclic utilization can be realized.
Description
Technical Field
The invention relates to the technical field of electrode discharge devices, in particular to a water cooling device for a hollow cathode discharge electrode.
Background
Plasma surface treatment has become increasingly common in semiconductor manufacturing, microelectronic packaging, integrated circuit, and other industries. The plasma surface treatment is a process of treating the surface of a workpiece by chemical or physical action using plasma to clean, roughen, modify, and change the surface properties at a molecular level.
However, in the conventional plasma surface treatment process, the workpiece to be treated is in a plasma ionization region, and along with the physical change and chemical change processes in the treatment process, the electrode can generate great heat effect on high-energy active particles such as electrons and ions in the plasma, so that the workpiece and equipment to be treated are damaged.
Disclosure of Invention
The invention aims to provide a water cooling device for a hollow cathode discharge electrode, which is provided by the background technology and aims to solve the problem that in the conventional plasma surface treatment process, a workpiece to be treated is in a plasma ionization region, and high-energy active particles such as electrons and ions in plasma of the electrode can generate great thermal effect along with the physical change and chemical change process in the treatment process, so that the workpiece and equipment to be treated are damaged.
In order to achieve the purpose, the invention provides the following technical scheme: a water cooling device for a hollow cathode discharge electrode comprises a hollow electrode and a box body electrode, wherein the hollow electrode is a multilayer electrode, the main body of the multilayer electrode is a multilayer electrode tube which is wound into a multilayer tubular structure, a water inlet II and a water outlet II are respectively arranged at two ends of the multilayer electrode tube, sealing sleeves II are respectively sleeved on the excircles of the water inlet II and the water outlet II, and water pipe joints II are respectively fixedly sleeved at the end parts of the water inlet II and the water outlet II;
and a through hole which is matched with the water inlet II and the water outlet II in a penetrating way is formed in the side surface of the box body electrode, and an electrode fixing block with a block structure is arranged between the box body electrode and the side surface of the multilayer electrode.
Preferably, the hollow electrode is a single-layer electrode, the main body of the single-layer electrode is a single-layer electrode tube with an S-shaped tubular structure, a water inlet I and a water outlet I are respectively arranged at two ends of the single-layer electrode tube, sealing sleeves I are respectively sleeved on the excircles of the water inlet I and the water outlet I, and water pipe joints I are respectively fixedly sleeved on the end portions of the water inlet I and the water outlet I.
Preferably, the upper end and the lower end of the electrode fixing block are respectively provided with an upper clamping plate and a lower clamping plate which are of V-shaped groove structures, a support block of a rhombic block structure is arranged between the upper clamping plate and the lower clamping plate, screw rods penetrate through the middles of the upper clamping plate, the lower clamping plate and the support block, and nuts are screwed on the upper end of the upper clamping plate and the screw rods.
Preferably, the sealing sleeve I and the outer circle of the screw rod are both provided with an annular groove, and the annular groove is matched with the through hole in an embedded manner.
Preferably, the electrode fixing blocks are symmetrically arranged on the left side and the right side of the multilayer electrode, and the whole electrode fixing blocks are made of polytetrafluoroethylene materials.
Preferably, gaps among all layers of the multilayer electrode tube are equal, and the ring shape wound by the multilayer electrode tube is along with the inner cavity of the box electrode.
Compared with the prior art, the invention has the beneficial effects that: the invention has reasonable structure and strong functionality, and has the following advantages: the invention is superior to the traditional electrode discharge device, and can take away the heat generated by electrode discharge in time by introducing circulating cooling water into the single-layer electrode tube and the multilayer electrode tube, thereby creating a suitable intracavity environment, and the whole mechanism does not generate environmental pollution, and can realize environmental-friendly cyclic utilization.
Drawings
FIG. 1 is a top view of a multilayer electrode and case electrode assembly;
FIG. 2 is an exploded view of a multilayer electrode and case electrode assembly;
FIG. 3 is an isometric view of a multilayer electrode;
FIG. 4 is a half-sectional view of the electrode fixing block;
FIG. 5 is a top view of a single layer electrode and case electrode assembly;
FIG. 6 is an isometric view of a single layer electrode and case electrode assembly;
FIG. 7 is an isometric view of a single layer electrode.
In the figure: 1. a single layer electrode; 2. an electrode fixing block; 3. a case electrode; 4. a multilayer electrode; 101. a single-layer electrode tube; 102. a water inlet I; 103. a water outlet I; 104. sealing a sleeve I; 105. a water pipe joint I; 201. an upper clamping plate; 202. a lower clamping plate; 203. a support block; 204. a screw; 205. a nut; 301. a via hole; 401. a multilayer electrode tube; 402. a water inlet II; 403. a water outlet II; 404. a sealing sleeve II; 405. And a water pipe joint II.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 to 7, the present invention provides a technical solution: a water cooling device for a hollow cathode discharge electrode comprises a hollow electrode and a box electrode 3, wherein the hollow electrode is a multilayer electrode 4, the main body of the multilayer electrode 4 is a multilayer electrode tube 401 which is surrounded into a multilayer tubular structure, a water inlet II 402 and a water outlet II403 are respectively arranged at two ends of the multilayer electrode tube 401, sealing sleeves II 404 are respectively sleeved on the outer circles of the water inlet II 402 and the water outlet II403, and the water pipe joint II 405 is fixedly sleeved at the end parts of the water inlet II 402 and the water outlet II403, the water pipe joint II 405 is communicated with an external water pipe, when the multilayer electrode 4 and the box body electrode 3 work, cooling water enters the multilayer electrode tube 401 from the water inlet II 402 and then flows out from the water outlet II403, the whole process is circularly carried out, further, the whole working process of the multilayer electrode 4 is continuously cooled, so that the multilayer electrode 4 is prevented from being burnt due to overheating caused by continuous discharge;
the side of the box electrode 3 is provided with a through hole 301 which is matched with the water inlet II 402 and the water outlet II403 in a penetrating way, an electrode fixing block 2 with a block structure is arranged between the box electrode 3 and the side of the multilayer electrode 4, and the multilayer electrode 4 is fixed in the box electrode 3 through the electrode fixing block 2.
Further, the hollow electrode is single-layer electrode 1, and single-layer electrode 1 'S main part is single-layer electrode pipe 101 that is S type tubular structure, and be equipped with water inlet I102 and delivery port I103 respectively at the both ends of single-layer electrode pipe 101, all overlap on the excircle of water inlet I102 and delivery port I103 and be equipped with seal cover I104, and it has water pipe joint I105 all to overlap fixedly at the tip of water inlet I102 and delivery port I103, be linked together water pipe joint I105 with external water pipe, when single- layer electrode 1 and 3 work discharge of box electrode, cooling water enters into single-layer electrode pipe 101 from water inlet I102 and then flows out from delivery port I103, whole process circulation goes on, and then continuously cools off single-layer electrode 1' S whole working process, ensure that single-layer electrode 1 can not burn out because of the overheated production of continuously discharging.
Further, the upper end and the lower end of the electrode fixing block 2 are respectively provided with an upper clamping plate 201 and a lower clamping plate 202 which are of a V-shaped groove structure, a support block 203 with a rhombic block structure is arranged between the upper clamping plate 201 and the lower clamping plate 202, a screw 204 penetrates through the middle of each of the upper clamping plate 201 and the lower clamping plate 203, the upper end of the upper clamping plate 201 is screwed with a nut 205 on the screw 204, the support block 203 is clamped between the upper clamping plate 201 and the lower clamping plate 202 by screwing the nut 205, and meanwhile, the two sides of the support block 203 prop open the side walls of the upper clamping plate 201 and the lower clamping plate 202 so as to fix and tightly squeeze the multilayer electrode 4 and the box electrode 3, so that a stable electrode structure is formed between the box electrode 3 and the multilayer electrode 4.
Furthermore, the sealing sleeve I104 and the outer circle of the screw 204 are both provided with an annular groove, and the annular groove is matched with the via hole 301 in an embedding manner, so that the single-layer electrode 1 and the multi-layer electrode 4 can ensure the sealing performance of the cavity of the box electrode 3 when penetrating through the wall body of the box electrode 3.
Further, the electrode fixing blocks 2 are symmetrically arranged on the left side and the right side of the multilayer electrode 4, the whole electrode fixing blocks 2 are made of polytetrafluoroethylene materials, and the multilayer electrode 4 is fixed in the inner cavity of the box electrode 3 by adjusting the electrode fixing blocks 2.
Further, the gaps between the layers of the multilayer electrode tube 401 are equal, and the shape of the ring wound by the multilayer electrode tube 401 is matched with the inner cavity of the box electrode 3, so that the discharge distance between the multilayer electrode tube 401 and the box electrode 3 is ensured to be balanced.
The working principle is as follows: when the multilayer electrode 4 works in the box body electrode 3, the multilayer electrode 4 releases a large amount of heat due to continuous discharge, at the moment, cooling water enters the multilayer electrode tube 401 from an external water pipe through the water inlet II 402 and then flows out of the water outlet II403, so that the multilayer electrode 4 is cooled, the cooling water circularly enters and exits in the multilayer electrode 4, and the multilayer electrode 4 can be continuously cooled; when individual layer electrode 1 during operation in box electrode 3, individual layer electrode 1 can generate heat in a large number because of lasting discharge, cooling water enters into individual layer electrode 101 through water inlet I102 from external water pipe this moment and then flows out from delivery port I103, and then realize the cooling to individual layer electrode 1, and the cooling water is in the 1 inner loop business turn over of individual layer electrode, and then can last the cooling to individual layer electrode 1, whole device is comparatively simple, the preparation is convenient, can recycle, and do not cause the pollution to the environment during the use, therefore, the environmental protection characteristic that has well.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a hollow cathode discharge electrode water cooling plant, includes hollow electrode and box electrode (3), its characterized in that: the hollow electrode is a multilayer electrode (4), the main body of the multilayer electrode (4) is a multilayer electrode tube (401) which is surrounded into a multilayer tubular structure, a water inlet II (402) and a water outlet II (403) are respectively arranged at two ends of the multilayer electrode tube (401), sealing sleeves II (404) are respectively sleeved on the excircles of the water inlet II (402) and the water outlet II (403), and water pipe joints II (405) are respectively fixedly sleeved at the end parts of the water inlet II (402) and the water outlet II (403);
the side of the box electrode (3) is provided with a through hole (301) which is matched with the water inlet II (402) and the water outlet II (403) in a penetrating way, and an electrode fixing block (2) with a block structure is arranged between the box electrode (3) and the side of the multilayer electrode (4).
2. The water cooling device for the hollow cathode discharge electrode according to claim 1, wherein: the hollow electrode is a single-layer electrode (1), the main body of the single-layer electrode (1) is a single-layer electrode tube (101) with an S-shaped tubular structure, a water inlet I (102) and a water outlet I (103) are respectively arranged at two ends of the single-layer electrode tube (101), a sealing sleeve I (104) is sleeved on the outer circles of the water inlet I (102) and the water outlet I (103), and a water pipe joint I (105) is fixedly sleeved on the end portions of the water inlet I (102) and the water outlet I (103).
3. The water cooling device for the hollow cathode discharge electrode according to claim 1, wherein: the electrode fixing block is characterized in that an upper clamping plate (201) and a lower clamping plate (202) of a V-shaped groove structure are arranged at the upper end and the lower end of the electrode fixing block (2) respectively, a supporting block (203) of a diamond-shaped block structure is arranged between the upper clamping plate (201) and the lower clamping plate (202), a screw rod (204) penetrates through the middle of the upper clamping plate (201), the lower clamping plate (202) and the supporting block (203), and a nut (205) is screwed on the upper end of the upper clamping plate (201) and the screw rod (204).
4. The water cooling device for the hollow cathode discharge electrode according to claim 1, wherein: and annular grooves are arranged on the outer circles of the sealing sleeve I (104) and the screw rod (204), and are matched with the through holes (301) in an embedded mode.
5. The water cooling device for the hollow cathode discharge electrode according to claim 1, wherein: the electrode fixing blocks (2) are symmetrically arranged on the left side and the right side of the multilayer electrodes (4), and the whole electrode fixing blocks (2) are made of polytetrafluoroethylene materials.
6. The water cooling device for the hollow cathode discharge electrode according to claim 1, wherein: gaps among all layers of the multilayer electrode tubes (401) are equal, and the shape of the ring wound by the multilayer electrode tubes (401) is the same as that of the inner cavity of the box body electrode (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911067234.7A CN110798957A (en) | 2019-11-04 | 2019-11-04 | Water cooling device for hollow cathode discharge electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911067234.7A CN110798957A (en) | 2019-11-04 | 2019-11-04 | Water cooling device for hollow cathode discharge electrode |
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| Publication Number | Publication Date |
|---|---|
| CN110798957A true CN110798957A (en) | 2020-02-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911067234.7A Pending CN110798957A (en) | 2019-11-04 | 2019-11-04 | Water cooling device for hollow cathode discharge electrode |
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| CN (1) | CN110798957A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01197950A (en) * | 1988-02-03 | 1989-08-09 | Ulvac Corp | Hollow cathode type ion source |
| KR101456464B1 (en) * | 2014-06-02 | 2014-10-31 | 주식회사 경동냉열산업 | Condenser with treatment device of cooling water using plasma |
| CN105990080A (en) * | 2015-02-02 | 2016-10-05 | 苏州爱特维电子科技有限公司 | Plasma processing device |
| CN206181522U (en) * | 2016-11-30 | 2017-05-17 | 武汉天和技术股份有限公司 | Cover is pressed from both sides to uniform flow field water -cooling |
-
2019
- 2019-11-04 CN CN201911067234.7A patent/CN110798957A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01197950A (en) * | 1988-02-03 | 1989-08-09 | Ulvac Corp | Hollow cathode type ion source |
| KR101456464B1 (en) * | 2014-06-02 | 2014-10-31 | 주식회사 경동냉열산업 | Condenser with treatment device of cooling water using plasma |
| CN105990080A (en) * | 2015-02-02 | 2016-10-05 | 苏州爱特维电子科技有限公司 | Plasma processing device |
| CN206181522U (en) * | 2016-11-30 | 2017-05-17 | 武汉天和技术股份有限公司 | Cover is pressed from both sides to uniform flow field water -cooling |
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