CN110791764A

CN110791764A - Cleaning jig

Info

Publication number: CN110791764A
Application number: CN201810869019.8A
Authority: CN
Inventors: 卢芳万
Original assignee: Himax Technologies Ltd
Current assignee: Himax Technologies Ltd
Priority date: 2018-08-02
Filing date: 2018-08-02
Publication date: 2020-02-14

Abstract

A cleaning jig comprises a base, a pressing piece and a sealing piece. The base is provided with a placing area for placing a piece to be cleaned. The pressing piece is arranged on the base and used for pressing the piece to be cleaned in the placing area and forming a cleaning area on the piece to be cleaned. The sealing element is arranged below the pressed piece and contacts the piece to be cleaned when the pressed piece presses the piece to be cleaned, so that a closed state is formed between the pressed piece and the piece to be cleaned, and the cleaning liquid is injected into the cleaning area to clean the piece to be cleaned. The cleaning jig provided by the invention can prevent the cleaning liquid from flowing to the edge of the piece to be cleaned in the cleaning process to cause damage to the piece to be cleaned.

Description

Cleaning jig

Technical Field

The present invention relates to a cleaning tool, and more particularly to a cleaning tool.

Background

In the nanoimprint process, a metal mold is generally used for imprinting. The metal mold includes a substrate (e.g., made of quartz) and an imprinting layer (e.g., made of metal) disposed on the substrate, and the imprinting layer has a metal pattern (e.g., nickel) as an imprinting pattern, such that the imprinting pattern can be transferred to a workpiece to be imprinted through the metal mold. However, as the number of times of use increases, the imprint pattern on the imprint layer is prone to generate black spots, which affect the imprint pattern and further affect the result of imprinting by the metal mold, resulting in a decrease in yield of the imprint process. If the metal mold is directly replaced, the cost is greatly increased. Therefore, it is currently practiced to soak and clean the metal mold through, for example, a cleaning liquid having a strong basicity in order to remove the black spots on the imprint layer. However, the metal mold is usually cleaned by directly immersing the entire metal mold in the cleaning solution or by directly washing the surface of the metal mold with the cleaning solution. In this case, if the washing liquid having strong basicity flows to the edge of the metal mold, it easily penetrates from the joint between the substrate and the imprint layer, and the imprint layer may be peeled off from the substrate.

Disclosure of Invention

The invention provides a cleaning jig which can prevent a cleaning liquid from flowing to the edge of a piece to be cleaned in a cleaning process to cause damage to the piece to be cleaned.

The cleaning jig comprises a base, a pressing piece and a sealing piece. The base is provided with a placing area for placing a piece to be cleaned. The pressing piece is arranged on the base and used for pressing the piece to be cleaned in the placing area and forming a cleaning area on the piece to be cleaned. The sealing element is arranged below the pressed piece and contacts the piece to be cleaned when the pressed piece presses the piece to be cleaned, so that a closed state is formed between the pressed piece and the piece to be cleaned, and the cleaning liquid is injected into the cleaning area to clean the piece to be cleaned.

In an embodiment of the invention, the to-be-cleaned object includes a pattern region and an edge region surrounding the pattern region. The pressing piece presses the edge area of the piece to be cleaned, and a cleaning area is formed on the pattern area of the piece to be cleaned, so that cleaning liquid injected into the cleaning area cleans the pattern area.

In an embodiment of the invention, the pressing member is a pressing ring, and is correspondingly pressed on an edge area of the member to be cleaned.

In an embodiment of the invention, the sealing member contacts an edge region of the member to be cleaned when the pressing member presses the member to be cleaned.

In an embodiment of the invention, the sealing element is a sealing ring, and correspondingly contacts an edge region of the member to be cleaned.

In an embodiment of the invention, the cleaning fixture further includes a plurality of fixing members disposed on the base and surrounding the pressing member to fix the pressing member when the pressing member presses the to-be-cleaned member placed in the placement area.

In an embodiment of the invention, the cleaning fixture further includes a plurality of limiting members disposed on the base and surrounding the pressed member, so as to limit the pressed member when the pressed member is pressed against the member to be cleaned in the placement area.

In an embodiment of the invention, the pressing member has a liquid discharging groove, and the liquid discharging groove connects the cleaning region to the outside when the pressing member presses the to-be-cleaned member placed in the placement region, so that the cleaning liquid flows out of the cleaning region through the liquid discharging groove.

In an embodiment of the invention, the cleaning fixture further includes a liquid discharge channel disposed on the base and communicated with the liquid discharge groove when the pressing member presses the member to be cleaned placed in the placement region.

In an embodiment of the invention, the pressing member has a liquid supply tank, and the liquid supply tank communicates the cleaning area to the outside when the pressing member presses the to-be-cleaned member placed in the placement area, so that the cleaning liquid flows into the cleaning area through the liquid supply tank.

Based on the above, the cleaning jig of the invention presses the to-be-cleaned member placed in the placing region by the pressed member, and forms the cleaning region on the to-be-cleaned member, and the sealing member disposed below the pressed member contacts the to-be-cleaned member when the pressed member presses the to-be-cleaned member, so that a closed state is formed between the pressed member and the to-be-cleaned member. Thus, the cleaning jig can clean the to-be-cleaned part by injecting the cleaning liquid into the cleaning area, and the cleaning liquid cannot flow to the edge of the to-be-cleaned part from the cleaning area between the to-be-cleaned part and the pressed part. Therefore, compared with the method that the piece to be cleaned is directly soaked in the cleaning liquid or the piece to be cleaned is directly washed by the cleaning liquid, the cleaning jig can prevent the cleaning liquid from flowing to the edge of the piece to be cleaned in the cleaning process to cause damage to the piece to be cleaned.

In order to make the aforementioned and other features and advantages of the invention more comprehensible, embodiments accompanied with figures are described in detail below.

Drawings

Fig. 1 is a perspective view of a cleaning jig according to an embodiment of the invention.

Fig. 2 is a side view of the cleaning fixture of fig. 1 in another state.

Detailed Description

Fig. 1 is a perspective view of a cleaning jig according to an embodiment of the invention. Fig. 2 is a side view of the cleaning fixture of fig. 1 in another state. Referring to fig. 1 and fig. 2, in the present embodiment, the cleaning fixture 100 includes a base 110, a pressing member 120, a sealing member 130 (shown in fig. 2), a plurality of limiting members 140, a plurality of fixing members 150, and a liquid drainage channel 160 (shown in fig. 1), but the invention is not limited to the above-mentioned components.

Specifically, the base 110 has a placing area 112 for placing the object C to be cleaned. The object C to be cleaned is, for example, a metal mold used in a nanoimprint process, and includes a substrate (e.g., made of quartz) and an imprint layer (e.g., made of metal) disposed on the substrate. More specifically, the object C to be cleaned includes a pattern region C1 and an edge region C2 surrounding the pattern region C1, wherein a metal pattern (e.g., nickel, not shown) as a stamping pattern is disposed in the pattern region C1, and the edge region C2 is an inactive region in the stamping process. Therefore, the to-be-cleaned area of the to-be-cleaned object C is the pattern area C1 provided with the metal pattern as the imprint pattern. However, the present invention is not limited to the above embodiment.

Furthermore, the pressing member 120 is disposed on the base 110 for pressing the to-be-cleaned member C disposed in the disposing area 112. The sealing member 130 is disposed below the pressed member 120, and contacts the member C to be cleaned when the pressed member 120 presses the member C to be cleaned, so that a closed state is formed between the pressed member 120 and the member C to be cleaned. More specifically, the pressing member 120 is a pressing ring corresponding to the edge region C2 (i.e., dead zone) of the member to be cleaned C, and the sealing member 130 is a sealing ring, such as a waterproof strip, corresponding to the edge region C2 (i.e., dead zone) of the member to be cleaned C when the pressing member 120 presses the member to be cleaned C. In this manner, the pressing member 120 and the sealing member 130 are disposed in such a manner as to avoid damaging the embossed pattern on the pattern area C1 of the article C to be cleaned. And, since the pressed piece 120 has a thickness, when pressing the edge region C2 of the piece C to be cleaned, the pressed piece 120 forms a space corresponding to the pattern region C1 of the piece C to be cleaned between the inner wall thereof and the piece C to be cleaned, and the space is the region to be cleaned. In this way, the pressing member 120 forms a cleaning region on the pattern region C1 of the member C to be cleaned, and a cleaning solution (not shown) is injected into the cleaning region to clean the pattern region C1 of the member C to be cleaned, for example, the cleaning region is stored to soak the imprinted pattern of the pattern region C1, or the cleaning solution flows into the cleaning region to wash the imprinted pattern of the pattern region C1, but the invention is not limited to the specific content of the cleaning method.

In addition, the limiting member 140 is disposed on the base 110, for example, disposed at the periphery of the placing region 112 and surrounding the pressing member 120, so as to limit the pressing member 120 when the pressing member 120 presses the to-be-cleaned member C placed in the placing region 112. More specifically, the position-limiting members 140 are, for example, position-limiting columns, and are disposed at equal intervals on the periphery of the placing region 112, and when the pressing member 120 is disposed in the region surrounded by the position-limiting members 140, the pressing member 120 corresponds to the placing region 112 by the position-limiting members 140, and further presses the to-be-cleaned member C placed in the placing region 112. However, the number, position and arrangement of the position-limiting members 140 are not limited in the present invention, and can be adjusted according to the requirement.

In addition, the fixing member 150 is disposed on the base 110, for example, disposed at the periphery of the placing region 112, and surrounds the pressing member 120, so as to fix the pressing member 120 when the pressing member 120 presses the to-be-cleaned member C placed in the placing region 112. More specifically, the fixing elements 150 are, for example, fasteners, and are disposed at equal intervals on the periphery of the placing region 112 (for example, but not limited to, staggered with the limiting elements 140), and when the pressing element 120 is disposed in the region surrounded by the fixing elements 150, the pressing element 120 is stably pressed on the to-be-cleaned element C placed in the placing region 112 by the fixing elements 150 (for example, the dotted line state is changed to the solid line state in fig. 2). However, the present invention does not limit the number, position and arrangement of the position-limiting members 150, and can be adjusted according to the requirement. For example, the fixing may be vacuum fixing, for example, a vacuum channel is disposed on the base and connected to the pressing member, and a vacuum device is used to perform vacuum absorption on the pressing member through the vacuum channel, so as to fix the pressing member on the base. Alternatively, other fixing means such as magnetic attraction, engaging structure, etc. which do not affect the cleaning step can be applied to the cleaning fixture according to the requirement, but the invention is not limited thereto.

Furthermore, in the present embodiment, the cleaning step is to place the object C to be cleaned in the placing area 112 of the base 110, and then place the pressing member 120 and the sealing member 130 on the base 110 corresponding to the placing area 112, so that the pressing member 120 presses the edge area C2 of the object C to be cleaned placed in the placing area 112 and the sealing member 130 contacts the edge area C2 of the object C to be cleaned, and the pattern area C1 of the object C to be cleaned is exposed from the pressing member 120, i.e. the pattern area C1 is located in the cleaning area. And, the fixing member 150 is fastened to the pressing member 120 to increase the stability of the pressing member 120 pressing the member to be cleaned C and the sealability of the sealing member 130. Thus, the cleaning solution can be manually injected into the cleaning region by an operator, or can be automatically injected into the cleaning region by an injection device (not shown), and the pressing member 120 can also be provided with a solution supply tank (not shown), so that the cleaning region is communicated with the outside when the pressing member 120 presses the to-be-cleaned member C placed in the placement region 112, and the cleaning solution flows into the cleaning region through the solution supply tank.

Then, the cleaning liquid flows into the cleaning area to soak the imprint pattern on the pattern area C1 of the piece C to be cleaned. At this time, since the pressing member 120 presses the edge region C2 of the to-be-cleaned member C and the sealing member 130 contacts the edge region C2 of the to-be-cleaned member C to form a closed state between the pressing member 120 and the to-be-cleaned member C, the cleaning liquid is only present in the cleaning region to soak the pattern region C1, and does not flow from the edge between the pressing member 120 and the to-be-cleaned member C, i.e., the edge region C2. Thus, damage to the member to be cleaned, such as peeling of the edge of the imprinting layer from the substrate due to the cleaning liquid flowing to the edge of the member to be cleaned C, can be avoided. In other words, the pressing member 120 and the sealing member 130 can effectively block the cleaning liquid to prevent the cleaning liquid from flowing to the edge of the member C to be cleaned, i.e., the edge region C2, besides pressing the member C to be cleaned and forming the cleaning region thereon.

Furthermore, in the present embodiment, the pressing member 120 has a liquid draining groove 122 (shown in fig. 1), the liquid draining groove 122 is, for example, a strip-shaped groove that is formed on the surface of the pressing ring of the pressing member 120 and is concave inward and communicates the inner wall and the outer wall of the pressing ring, and the C communicates the cleaning region to the outside when the pressing member 120 presses the to-be-cleaned member placed in the placing region 112. Furthermore, a drainage channel 160 (shown in fig. 1) is disposed on the base 110 and communicates with the drainage groove 122 when the pressing member 120 presses the to-be-cleaned member C placed in the placing region 112. Thus, after the step of soaking the pattern region C1 in the cleaning region is completed, the cleaning solution flows out of the cleaning region through the drainage channel 122 and is drained or recovered through the drainage channel 160 (for example, the drainage channel 160 is further connected to a not-shown water tank or a recovery bucket). In this way, the cleaning liquid is prevented from flowing to the edge of the member to be cleaned C, i.e., the edge region C2, during the discharge process. However, the present invention is not limited to the implementation and arrangement of the drainage groove 122 and the drainage channel 160, and may be adjusted according to the requirement.

Further, at the same time as or after the cleaning liquid is discharged out of the cleaning area, the pattern area C1 located in the cleaning area is further rinsed by pure water to completely remove the cleaning liquid remaining on the pattern area C1. The pure water may be supplied to the cleaning region by referring to the supply manner of the cleaning solution, for example, the pure water is manually injected by an operator, or the pure water is automatically flowed in through a not-shown liquid supply tank, and the pure water injected into the cleaning region is further discharged through the discharging manner (such as the liquid discharging tank 122 and the liquid discharging passage 160) after the pattern region C1 is cleaned, but the invention is not limited thereto.

In addition, after the cleaning solution to be cleaned and the pure water for washing the cleaning solution are discharged from the cleaning area, the pattern area C1 of the cleaning solution C is dried by nitrogen gas. The nitrogen gas may be supplied to the pattern area C1 by an operator manually operating a nitrogen gas nozzle (not shown), or may be supplied to the pattern area C1 by an automatic nitrogen gas nozzle (not shown). After the pattern area C1 of the object C to be cleaned is dried (i.e. no residual cleaning solution or pure water is left), the fixing state between the fixing member 150 and the pressing member 120 can be released (e.g. the fixing member 150 in fig. 2 is moved to the state shown by the dotted line), the pressing member 120 and the sealing member 130 are removed from the base 110, and the object C to be cleaned, which is completely cleaned, is taken out from the placing area 112 and stored in a storage box (e.g. a nitrogen box) not shown. However, the above-mentioned cleaning step is only one embodiment of the present invention, and the cleaning step may be a single step or multiple steps, and may be adjusted according to the kind of the object C to be cleaned or the characteristics of the cleaning solution, and the present invention is not limited thereto.

In summary, the cleaning fixture 100 of the present invention uses the pressing member 120 to press the edge region C2 of the to-be-cleaned object C placed in the placing region 112, and forms the cleaning region on the to-be-cleaned object C, and the sealing member 130 disposed under the pressing member 120 contacts the edge region C2 of the to-be-cleaned object C when the pressing member 120 presses the to-be-cleaned object C, so that a sealed state is formed between the pressing member 120 and the to-be-cleaned object C, and the pattern region C1 of the to-be-cleaned object C is exposed to the cleaning region. In this way, the cleaning tool 100 can clean the pattern region C1 of the piece C to be cleaned by injecting the cleaning solution into the cleaning region, and the cleaning solution does not flow from the cleaning region between the piece C to be cleaned and the pressing piece 120 to the edge region C2 of the piece C to be cleaned. Therefore, compared with directly soaking the to-be-cleaned part C in the cleaning solution or directly washing the to-be-cleaned part C with the cleaning solution, the cleaning fixture 100 of the present invention can prevent the cleaning solution from flowing to the edge of the to-be-cleaned part C in the cleaning process to cause damage to the to-be-cleaned part C.

Although the present invention has been described with reference to the above embodiments, it should be understood that various changes and modifications can be made therein by those skilled in the art without departing from the spirit and scope of the invention.

Description of reference numerals:

100: cleaning jig

110: base seat

112: placement area

120: pressed article

122: liquid discharge groove

130: sealing element

140: position limiting piece

150: fixing piece

160: liquid discharge channel

C: to-be-cleaned part

C1: pattern area

C2: an edge region.

Claims

1. The utility model provides a cleaning jig, its characterized in that includes base, pressfitting and sealing member, wherein:

the base is provided with a placing area for placing a piece to be cleaned;

the pressing piece is arranged on the base and used for pressing the piece to be cleaned in the placing area and forming a cleaning area on the piece to be cleaned; and

the sealing element is arranged below the pressed piece and contacts the piece to be cleaned when the pressed piece presses the piece to be cleaned, so that a closed state is formed between the pressed piece and the piece to be cleaned, and cleaning liquid is injected into the cleaning area to clean the piece to be cleaned.

2. The cleaning fixture according to claim 1, wherein the workpiece to be cleaned includes a pattern area and an edge area surrounding the pattern area, the pressing member presses the edge area of the workpiece to be cleaned and forms the cleaning area on the pattern area of the workpiece to be cleaned, so that the cleaning solution injected into the cleaning area cleans the pattern area.

3. The cleaning fixture according to claim 2, wherein the pressing member is a pressing ring correspondingly pressed on the edge region of the member to be cleaned.

4. The cleaning fixture according to claim 2, wherein the sealing member contacts the edge region of the member to be cleaned when the pressing member presses the member to be cleaned.

5. The cleaning fixture according to claim 4, wherein the sealing member is a sealing ring correspondingly contacting the edge region of the member to be cleaned.

6. The cleaning fixture of claim 1, further comprising:

the fixing pieces are arranged on the base and surround the pressed piece, so that the pressed piece is fixed when the pressed piece is pressed and placed in the to-be-cleaned piece in the placing area.

7. The cleaning fixture of claim 1, further comprising:

the limiting parts are arranged on the base and surround the pressed part, so that the pressed part is limited when the pressed part is pressed and placed in the placing area and the part to be cleaned.

8. The cleaning jig according to claim 1, wherein the pressing member has a drain groove for communicating the cleaning region to the outside when the pressing member presses the member to be cleaned placed in the placement region, so that the cleaning liquid flows out of the cleaning region through the drain groove.

9. The cleaning jig according to claim 8, further comprising:

and the liquid drainage channel is arranged on the base and is communicated with the liquid drainage groove when the pressed piece is pressed and placed in the to-be-cleaned piece in the placing area.

10. The cleaning tool according to claim 1, wherein the pressing member has a liquid supply tank, and the liquid supply tank communicates the cleaning region to the outside when the pressing member presses the member to be cleaned placed in the placement region, so that the cleaning liquid flows into the cleaning region through the liquid supply tank.