CN110765476B - Method for transmitting data from upper computer to lower computer of photoetching machine - Google Patents
Method for transmitting data from upper computer to lower computer of photoetching machine Download PDFInfo
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- CN110765476B CN110765476B CN201911023344.3A CN201911023344A CN110765476B CN 110765476 B CN110765476 B CN 110765476B CN 201911023344 A CN201911023344 A CN 201911023344A CN 110765476 B CN110765476 B CN 110765476B
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F21/60—Protecting data
- G06F21/606—Protecting data by securing the transmission between two devices or processes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D10/00—Energy efficient computing, e.g. low power processors, power management or thermal management
Abstract
The invention discloses a method for transmitting data to a lower computer by an upper computer of a photoetching machine, which comprises the following specific steps: step 1: obtaining graphic information; step 2: triangulating the graphic data; step 3: rasterizing and cutting the triangulated pattern; step 4: assembling the data packets in sequence; step 5: setting the optimal number of transmitted data packets; step 6: transmitting data; step 7: whether the data is successful or not occurs; step 8: and ending the data transmission. By the method, the problem of data issuing errors and loss in actual production is solved, the requirements on smaller line width and more complex patterns can be met, the function of issuing data without loss is realized, and the upper computer can safely and completely transmit the data to the lower computer.
Description
Technical Field
The invention relates to the field of data transmission, in particular to a method for transmitting data from an upper computer to a lower computer of a photoetching machine, belonging to a realization method of semiconductor photoetching imaging software.
Background
With the high-speed development of the semiconductor industry, in the production of PCB boards and the like, the requirement on exposure precision is higher and higher, and the traditional data issuing mode of an upper computer cannot meet the requirement on smaller line width and more complex patterns. The following transmission modes are adopted for current data transmission:
(1) Vector data transmission is adopted, the current communication hardware is a gigabit network, the theoretical transmission per second is 1000 megabits, and the bottleneck can be generated when the actual medium speed reaches 800 megabits per second; when the rate reaches 800 megabits per second, the situation of losing data occurs due to irresistible factors such as network port cache and the like. The more data in unit time, the more serious the data loss condition is;
(2) With bitmap data transmission, the current exposure scheme determines that the amount of data transmitted using bitmaps is very large, and only very simple and small-sized graphics are suitable for this scheme.
Disclosure of Invention
The invention mainly solves the technical problem of providing a method for transmitting data to a lower computer by an upper computer of a photoetching machine, solves the problems of data transmission errors and loss in actual production, can meet the requirements of smaller line width and more complex patterns, realizes the function of transmitting data without loss, and can ensure the safe and complete data transmission from the upper computer to the lower computer.
In order to solve the technical problems, the invention adopts a technical scheme that: the method for transmitting data to the lower computer by the upper computer of the photoetching machine comprises the following specific steps:
step 1: obtaining graphical information
The upper computer acquires graphic data to be exposed;
step 2: triangulating graphic data
The upper computer triangulates the acquired graphic data and converts the complex graphic into a simple graphic;
step 3: rasterized and cut-to-trigonometric graphics
According to the exposure precision, rasterizing the converted simple graph, cutting the whole large graph data according to the type of the exposure machine, and obtaining the required data;
step 4: assembling data packets in sequence
Assembling the data obtained in the step 3 according to the sequence, and adding a packet header and a mark to assemble a transmitted data packet;
step 5: setting the optimal number of transmitted data packets
Setting the number of data packets sent each time according to the data quantity;
step 6: transmitting data
The upper computer sends data to the lower computer through the gigabit network;
step 7: whether or not the occurrence data is successful
The current data is successfully sent, and the next batch of data is continuously sent; the data transmission fails, and the current data is retransmitted;
step 8: end of data transmission
All data transmission is successful, and the data transmission is completed.
In a preferred embodiment of the present invention, the graphic data is GDS graphic data or vector graphic data.
In a preferred embodiment of the present invention, the simple pattern is quadrilateral.
In a preferred embodiment of the present invention, in the retransmission in step 7, if the retransmission of the same batch of data fails multiple times, a network link problem is prompted.
The beneficial effects of the invention are as follows: the method for transmitting data to the lower computer by the upper computer of the photoetching machine solves the problems of data transmission errors and loss in actual production, can meet the requirements on smaller line width and more complex patterns, realizes the function of transmitting data without loss, and can ensure the upper computer to safely and completely transmit the data to the lower computer.
Drawings
For a clearer description of the technical solutions of the embodiments of the present invention, the drawings that are needed in the description of the embodiments will be briefly introduced below, it being obvious that the drawings in the description below are only some embodiments of the present invention, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art, wherein:
FIG. 1 is a flow chart of a method for transmitting data from a host computer to a lower computer in a lithography machine according to a preferred embodiment of the present invention;
FIG. 2 is a schematic diagram of data reorganization.
Description of the embodiments
The following description of the technical solutions in the embodiments of the present invention will be clear and complete, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1, an embodiment of the present invention includes:
a method for transmitting data to a lower computer by an upper computer of a photoetching machine comprises the following specific steps:
step 1: obtaining graphical information
The upper computer acquires graphic data to be exposed;
step 2: triangulating graphic data
The upper computer triangulates the acquired graphic data and converts the complex graphic into a simple graphic;
step 3: rasterized and cut-to-trigonometric graphics
According to the exposure precision, rasterizing the converted simple graph, cutting the whole large graph data according to the type of the exposure machine, and obtaining the required data;
step 4: assembling data packets in sequence
Assembling the data obtained in the step 3 according to the sequence, and adding a packet header and a mark to assemble a transmitted data packet;
step 5: setting the optimal number of transmitted data packets
Setting the number of data packets sent each time according to the data quantity;
step 6: transmitting data
The upper computer sends data to the lower computer through the gigabit network;
step 7: whether or not the occurrence data is successful
The current data is successfully sent, and the next batch of data is continuously sent; the data transmission fails, and the current data is retransmitted;
step 8: end of data transmission
All data transmission is successful, and the data transmission is completed.
In the above description, the graphic data is GDS graphic data or vector graphic data; the simple graph is quadrilateral.
Further, in the step 7, if the retransmission of the same batch of data fails, the network link problem is prompted.
The method for transmitting data from the upper computer to the lower computer of the photoetching machine solves the problems of data issuing errors and data loss in the following actual production:
(1) The upper computer data set is required to be sent to the lower computer in a short time;
(2) The upper computer has large data volume and needs to be sent to the lower computer for a long time.
The specific process is as follows:
the first step:
processing data of an upper computer:
(1) Cutting and partitioning the graph (vector graph) obtained by the upper computer according to the exposure requirement;
(2) Because the lower computer needs to change the complex graph into a regular quadrangle, the complex graph is triangulated;
(3) The triangulated data is rasterized and then cut, and the cutting format is related to an exposure scanning mode.
And a second step of:
data assembly (as shown in fig. 2):
(1) Adding a spatial index to the cut data;
(2) The data of each data packet (frame) is found out through a spatial index algorithm, the data packets are spliced, and the transmission sequence of the data required by the lower computer cannot be disordered according to the formulated transmission format protocol.
Wherein, the established transmission format protocol adopts TCP transmission protocol.
And a third step of:
data packet (frame) transmission:
(1) Setting the optimal data packet (frame) number sent each time according to the space index and the identification data required by the lower computer;
(2) The data size is large, the optimal time is calculated according to the network card bottleneck, and the data is transmitted in a delayed mode;
(3) Data packets (frames) are sent.
Fourth step:
failure to send, resend:
(1) If the currently transmitted data fails (network failure or data loss), the data which is currently required to be transmitted is retransmitted.
Fifth step:
prompting the problems:
(1) The data of the same batch is failed to be retransmitted for a plurality of times, and the problem of a network link is prompted.
In summary, the method for transmitting data to the lower computer by the upper computer of the photoetching machine solves the problems of data transmission errors and loss in actual production, can meet the requirements on smaller line width and more complex patterns, realizes the function of transmitting data without loss, and can ensure that the upper computer safely and completely transmits the data to the lower computer.
The foregoing description is only illustrative of the present invention and is not intended to limit the scope of the invention, and all equivalent structures or equivalent processes or direct or indirect application in other related arts are included in the scope of the present invention.
Claims (4)
1. The method for transmitting data to the lower computer by the upper computer of the photoetching machine is characterized by comprising the following specific steps:
step 1: obtaining graphical information
The upper computer acquires graphic data to be exposed;
step 2: triangulating graphic data
The upper computer triangulates the acquired graphic data and converts the complex graphic into a simple graphic;
step 3: rasterized and cut-to-trigonometric graphics
According to the exposure precision, rasterizing the converted simple graph, cutting the whole large graph data according to the type of the exposure machine, and obtaining the required data;
step 4: assembling data packets in sequence
Assembling the data obtained in the step 3 according to the sequence, and adding a packet header and a mark to assemble a transmitted data packet;
step 5: setting the optimal number of transmitted data packets
Setting the number of data packets sent each time according to the data quantity;
step 6: transmitting data
The upper computer sends data to the lower computer through the gigabit network;
step 7: whether or not the transmission of data is successful
The current data is successfully sent, and the next batch of data is continuously sent; the data transmission fails, and the current data is retransmitted;
step 8: end of data transmission
All data transmission is successful, and the data transmission is completed.
2. The method for transmitting data from a host computer to a lower computer of a lithography machine according to claim 1, wherein the graphic data is vector graphic data.
3. The method for transmitting data from a host computer to a lower computer of a lithography machine according to claim 1, wherein the simple pattern is a quadrilateral.
4. The method for transmitting data from a host computer to a lower computer of a lithography machine according to claim 1, wherein the step 7 is characterized in that if the retransmission of the same batch of data fails, a network link problem is prompted.
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| CN201911023344.3A CN110765476B (en) | 2019-10-25 | 2019-10-25 | Method for transmitting data from upper computer to lower computer of photoetching machine |
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| CN110765476B true CN110765476B (en) | 2023-05-26 |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101826127A (en) * | 2010-04-07 | 2010-09-08 | 芯硕半导体（中国）有限公司 | Method for converting GDSII file into maskless photoetching machine exposure data |
| CN104660627A (en) * | 2013-11-18 | 2015-05-27 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Communication method and communication system for upper computer and lower computer |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100374605B1 (en) * | 2000-10-25 | 2003-03-04 | 삼성전자주식회사 | A apparatus and method for transmitting optical signal of graphic signal |
| CN102914949B (en) * | 2012-09-17 | 2015-12-09 | 天津芯硕精密机械有限公司 | A kind of data processing method exposed for scanning maskless photoetching machine inclination SLM |
| CN103529653A (en) * | 2013-10-29 | 2014-01-22 | 天津芯硕精密机械有限公司 | Method and system for storing multilayer vectorgraph as exposure data |
| CN104408759A (en) * | 2014-11-19 | 2015-03-11 | 江苏影速光电技术有限公司 | Vectorgraph rasterizing method for digital micromirror display |
| CN105741337B (en) * | 2016-02-03 | 2019-02-05 | 合肥亚歌半导体科技合伙企业（有限合伙） | A kind of triangle fill method for litho machine Grid of vector data |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101826127A (en) * | 2010-04-07 | 2010-09-08 | 芯硕半导体（中国）有限公司 | Method for converting GDSII file into maskless photoetching machine exposure data |
| CN104660627A (en) * | 2013-11-18 | 2015-05-27 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Communication method and communication system for upper computer and lower computer |
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