CN103529653A - Method and system for storing multilayer vectorgraph as exposure data - Google Patents
Method and system for storing multilayer vectorgraph as exposure data Download PDFInfo
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- CN103529653A CN103529653A CN201310520091.7A CN201310520091A CN103529653A CN 103529653 A CN103529653 A CN 103529653A CN 201310520091 A CN201310520091 A CN 201310520091A CN 103529653 A CN103529653 A CN 103529653A
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Abstract
The invention discloses a method for storing a multilayer vectorgraph as exposure data. The method comprises the following steps: rasterizing the to-be-exposed multilayer vectorgraph; digitizing the rasterized multilayer vectorgraph; and segmenting the digitized multilayer vectorgraph by using an octree segmentation method and storing segmented multilayer vectorgraph data by using an octree data structure. Correspondingly, the invention further discloses a system for storing the multilayer vectorgraph as the exposure data. The invention has the following beneficial effects: with the method and the system for storing the multilayer vectorgraph as the exposure data, the problem that a multilayer vectorgraph cannot be accurately stored and thus cannot be accurately photoetched since the multilayer vectorgraph comprises a plurality of layers in the prior art is overcome, and low-cost and high-efficiency usage of maskless lithography technology can be realized.
Description
Technical field
The invention belongs to technical field of lithography, relate in particular to a kind of method and system that multilayer vector graphics are stored as to exposure data.
Background technology
Photoetching technique is for printing on substrate surface, to have the technology of the composition of certain feature, and above-mentioned substrate can be used as the substrate of manufacturing semiconductor devices, multiple integrated circuit, flat-panel screens (such as liquid crystal display), circuit board, biochip, micromechanics electronic chip, photoelectron circuit chip etc.The substrate often using scribbles semiconductor wafer or the glass substrate of photaesthesia medium for surface.
In photoetching process, wafer is placed in wafer station, by being in the exposure device in lithographic equipment, characteristic composition is projected to wafer surface.In conventional art, semicon industry is used Step-and-repeat formula or substep scan-type lithography tool, utilize graticule by characteristic composition in each disposable projection or scan on wafer, single exposure or scan a field, then carries out repeated exposure process by mobile wafer to next field.
Traditional photoetching technique is exposed or scanning process by repeatability, realizes the printing of the accurate characteristic composition of high production.Yet, in order to manufacture device on wafer, need a plurality of mask plates.Due to the minimizing of characteristic dimension and for the precision tolerance demand compared with small-feature-size, these mask plates cost for production is very high, consuming time very long, thereby makes to utilize the conventional wafer photolithographic fabrication cost of mask plate more and more higher, very expensive.Maskless (as directly write or digital etc.) photoetching technique is used the method for mask plate with respect to tradition, many benefits are provided aspect photoetching, maskless utilization space diagram generator (SLM) replaces mask plate, SLM mainly comprises a projector equipment, as space micro mirror array (DMD) or liquid crystal display (LCD).GDS II file is hierachical file, containing vector graphics, when layering is preserved, easily goes out active.In different mask-free photolithography systems, if parameter is incorrect, easily make mistakes (as segmentation precision, cut apart rear figure layer do not mate etc.).
Summary of the invention
The object of this invention is to provide the method and system that a kind of multilayer vector graphics is stored as exposure data, to solve in prior art because multilayer vector graphics cannot accurately be stored, thus the accurate problem of photoetching.
In order to reach object of the present invention, the invention provides a kind of method that multilayer vector graphics is stored as exposure data, comprising:
The 1st step, by multilayer vector graphics rasterizing to be exposed;
The 2nd step, by the described multilayer vector graphics digitizing after rasterizing;
The 3rd step, the described multilayer vector graphics by after digitizing, utilizes octree partition method to cut apart, and to the multilayer vector figure data after cutting apart, adopts octotree data structure to store.
Preferably, in the 1st step, described multilayer vector graphics rasterizing to be exposed is specially, the multilayer of described multilayer vector graphics is carried out respectively to the division of grid array of uniform size; In the 2nd step, described the digitizing of multilayer vector graphics is specially, the grid of the described multilayer vector graphics after rasterizing is all arranged to 0 or 1 and represent, the described grid that is positioned at exposure area arranges 1, and the described grid that is positioned at territory, non-exposed area arranges 0.
Preferably, in the 3rd step, described octree partition method, comprising:
The 1st step, sets maximum depth of recursion;
The 2nd step, finds out the full-size of described multilayer vector graphics, and sets up first cube with this size;
The 3rd step, sequentially loses identical element element into can be involved and there is no a cube of child node;
The 4th step, if do not reach maximum depth of recursion, just segments eight equal portions, then the identical element element that this cube is filled is all shared to eight sub-cubes;
The 5th step, if find, the assigned identical element number of elements of sub-cube is non-vanishing and follow father's cube is the same, this sub-cube stops segmentation.
The 6th step, repeats the 3rd step, until reach maximum depth of recursion;
Preferably, described employing octotree data structure is stored, be specially, described cube after octree partition method is cut apart is made as to node, grid on described node is labeled as to 1,2,3,4,5,6,7,8 child node successively, after storage, a record is corresponding with a node, and what in described record, describe is the characteristic value of eight child nodes of corresponding with it described node.
Preferably, described multilayer vector graphics is GDS II figure.
Correspondingly, the invention provides the system that a kind of multilayer vector graphics is stored as exposure data, comprise: rasterizing unit, digital unit, octree partition unit, Octree data storage cell, described rasterizing unit is used for multilayer vector graphics rasterizing to be exposed; Described digital unit is used for the described multilayer vector graphics digitizing after rasterizing; Described octree partition unit, for by the described multilayer vector graphics after digitizing, utilizes octree partition method to cut apart; Described Octree data storage cell, for to the multilayer vector figure data after cutting apart, adopts octotree data structure to store.
Preferably, described rasterizing unit specifically for, the multilayer of described multilayer vector graphics is carried out respectively to the division of grid array of uniform size; Described digital unit specifically for, the grid of the described multilayer vector graphics after rasterizing is all arranged to 0 or 1 and represents, the described grid that is positioned at exposure area arranges 1, the described grid that is positioned at territory, non-exposed area arranges 0.
Preferably, described octree partition unit specifically for, comprising:
The 1st step, sets maximum depth of recursion;
The 2nd step, finds out the full-size of described multilayer vector graphics, and sets up first cube with this size;
The 3rd step, sequentially loses identical element element into can be involved and there is no a cube of child node;
The 4th step, if do not reach maximum depth of recursion, just segments eight equal portions, then the identical element element that this cube is filled is all shared to eight sub-cubes;
The 5th step, if find, the assigned identical element number of elements of sub-cube is non-vanishing and follow father's cube is the same, this sub-cube stops segmentation.
The 6th step, repeats the 3rd step, until reach maximum depth of recursion;
Preferably, described Octree data storage cell specifically for, described cube after octree partition unit is cut apart is made as to node, grid on described node is labeled as to 1,2,3,4,5,6,7,8 child node successively, after storage, a record is corresponding with a node, and what in described record, describe is the characteristic value of eight child nodes of corresponding with it described node.
Preferably, described multilayer vector graphics is GDS II figure.
Beneficial effect of the present invention is, the present invention is by being stored as multilayer vector graphics the method and system of exposure data, solved in prior art because multilayer vector graphics is multilayer, thereby can not accurately store, and then the accurate problem of photoetching, make people can use low-cost, efficiently maskless photoetching technology.
Accompanying drawing explanation
Figure l is method flow diagram of the present invention;
Fig. 2 is system construction drawing of the present invention;
Fig. 3 is the logical organization schematic diagram of embodiment of the present invention multilayer GDS II file;
Fig. 4 is embodiment of the present invention multilayer GDS II file storing process schematic diagram;
The employing octree structure schematic diagram that Fig. 5 provides for the embodiment of the present invention;
The employing Octree data storage schematic diagram that Fig. 6 provides for the embodiment of the present invention;
The employing octree partition method that Fig. 7 provides for the embodiment of the present invention is stored and is realized schematic diagram.
Embodiment
In order to make object of the present invention, technical scheme and beneficial effect clearer, below in conjunction with embodiment, the present invention is further elaborated.Should be understood to specific embodiment described herein only in order to explain the present invention, be not limited to protection scope of the present invention.
The invention provides a kind of method and system that multilayer vector graphics is stored as to exposure data take and solve in prior art because multilayer vector graphics is multilayer, thereby can not accurately store, and then the accurate problem of photoetching, make people can use low-cost, efficiently maskless photoetching technology.Solve simultaneously, the accurately problem of photoetching causing much larger than the exposure accuracy of maskless lithography system due to multilayer GDS II pattern precision of the prior art, method of the present invention and can effectively and exactly multilayer vector file be converted to maskless photoetching machine exposure data, has solved the difficult problem that cannot unify storage of multilayer vector graphics.In the application, described GDS II figure is one of graph data descriptive language file layout the most frequently used in a kind of IC Layout, is binary format.
As shown in Figure 1, Figure 3, a kind of multilayer vector graphics provided by the invention is stored as the method for exposure data, comprising:
Step S11, by multilayer vector graphics rasterizing to be exposed;
A plurality of Layer of each GDS II figure.Because defined pattern precision in multilayer GDS II original is conventionally much larger than desired exposure accuracy, first will be by these GDS II figure rasterizings; Then by described in the multilayer GDS II pattern digitization of rasterizing, multilayer vector graphics rasterizing to be exposed is specially, the multilayer of described multilayer vector graphics is carried out respectively to the division of grid array of uniform size;
Step S12, by the described multilayer vector graphics digitizing after rasterizing;
As shown in Figure 4, described the digitizing of multilayer vector graphics is specially, the grid of the described multilayer vector graphics after rasterizing is all arranged to 0 or 1 and represent, the described grid that is positioned at exposure area arranges 1, and the described grid that is positioned at territory, non-exposed area arranges 0.
Step S13, the described multilayer vector graphics by after digitizing, utilizes octree partition method to cut apart, and to the multilayer vector figure data after cutting apart, adopts octotree data structure to store.
The size of the bitmap file receiving due to the space diagram generator (SLM) of maskless photoetching machine be determine (for example 800 * 600,1024 * 768,1400 * 1200), the dimension of picture of every layer is very big simultaneously, so multilayer Layer need to be adopted to octree partition method, be divided into cube.
As shown in Figure 5, described octree partition method, comprising:
The 1st step, sets maximum depth of recursion;
The 2nd step, finds out the full-size of described multilayer vector graphics, and sets up first cube with this size;
The 3rd step, sequentially loses identical element element into can be involved and there is no a cube of child node;
The 4th step, if do not reach maximum depth of recursion, just segments eight equal portions, then the identical element element that this cube is filled is all shared to eight sub-cubes;
The 5th step, if find, the assigned identical element number of elements of sub-cube is non-vanishing and follow father's cube is the same, this sub-cube stops segmentation.
The 6th step, repeats the 3rd step, until reach maximum depth of recursion;
As shown in Figure 6, described employing octotree data structure is stored, be specially, described cube after octree partition method is cut apart is made as to node, grid on described node is labeled as to 1,2,3,4,5,6,7,8 child node successively, after storage, a record is corresponding with a node, and what in described record, describe is the characteristic value of eight child nodes of corresponding with it described node.
Multilayer vector graphics described in the application's embodiment is GDS II figure.
After Octree data structures is stored, by each exposure area, be directly converted to the applicable bitmap file of maskless photoetching machine, as shown in Figure 7.
With method provided by the invention correspondingly, the invention provides the system that a kind of multilayer vector graphics is stored as exposure data, as shown in Figure 2, comprise: rasterizing unit 21, digital unit 22, octree partition unit 23, Octree data storage cell 24, described rasterizing unit is used for multilayer vector graphics rasterizing to be exposed; Described digital unit is used for the described multilayer vector graphics digitizing after rasterizing; Described octree partition unit, for by the described multilayer vector graphics after digitizing, utilizes octree partition method to cut apart; Described Octree data storage cell, for to the multilayer vector figure data after cutting apart, adopts octotree data structure to store.
Described rasterizing unit specifically for, the multilayer of described multilayer vector graphics is carried out respectively to the division of grid array of uniform size; Described digital unit specifically for, the grid of the described multilayer vector graphics after rasterizing is all arranged to 0 or 1 and represents, the described grid that is positioned at exposure area arranges 1, the described grid that is positioned at territory, non-exposed area arranges 0.
Preferably, described octree partition unit specifically for, comprising:
The 1st step, sets maximum depth of recursion;
The 2nd step, finds out the full-size of described multilayer vector graphics, and sets up first cube with this size;
The 3rd step, sequentially loses identical element element into can be involved and there is no a cube of child node;
The 4th step, if do not reach maximum depth of recursion, just segments eight equal portions, then the identical element element that this cube is filled is all shared to eight sub-cubes;
The 5th step, if find, the assigned identical element number of elements of sub-cube is non-vanishing and follow father's cube is the same, this sub-cube stops segmentation.
The 6th step, repeats the 3rd step, until reach maximum depth of recursion;
Described Octree data storage cell specifically for, described cube after octree partition unit is cut apart is made as to node, grid on described node is labeled as to 1,2,3,4,5,6,7,8 child node successively, after storage, a record is corresponding with a node, and what in described record, describe is the characteristic value of eight child nodes of corresponding with it described node.
Described multilayer vector graphics is GDS II figure.，
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some and retouching, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (10)
1. multilayer vector graphics is stored as a method for exposure data, it is characterized in that, comprising:
The 1st step, by multilayer vector graphics rasterizing to be exposed;
The 2nd step, by the described multilayer vector graphics digitizing after rasterizing;
The 3rd step, the described multilayer vector graphics by after digitizing, utilizes octree partition method to cut apart, and to the multilayer vector figure data after cutting apart, adopts octotree data structure to store.
2. multilayer vector graphics according to claim 1 is stored as the method for exposure data, it is characterized in that, in the 1st step, described multilayer vector graphics rasterizing to be exposed is specially, the multilayer of described multilayer vector graphics is carried out respectively to the division of grid array of uniform size; In the 2nd step, described the digitizing of multilayer vector graphics is specially, the grid of the described multilayer vector graphics after rasterizing is all arranged to 0 or 1 and represent, the described grid that is positioned at exposure area arranges 1, and the described grid that is positioned at territory, non-exposed area arranges 0.
3. multilayer vector graphics according to claim 2 is stored as the method for exposure data, it is characterized in that, in the 3rd step, described octree partition method, comprising:
The 1st step, sets maximum depth of recursion;
The 2nd step, finds out the full-size of described multilayer vector graphics, and sets up first cube with this size;
The 3rd step, sequentially loses identical element element into can be involved and there is no a cube of child node;
The 4th step, if do not reach maximum depth of recursion, just segments eight equal portions, then the identical element element that this cube is filled is all shared to eight sub-cubes;
The 5th step, if find, the assigned identical element number of elements of sub-cube is non-vanishing and follow father's cube is the same, this sub-cube stops segmentation.
The 6th step, repeats the 3rd step, until reach maximum depth of recursion.
4. multilayer vector graphics according to claim 3 is stored as the method for exposure data, it is characterized in that, described employing octotree data structure is stored, be specially, described cube after octree partition method is cut apart is made as to node, the grid on described node is labeled as to 1,2,3,4,5,6,7,8 child node successively, after storage, a record is corresponding with a node, and what in described record, describe is the characteristic value of eight child nodes of corresponding with it described node.
5. according to the multilayer vector graphics described in any one in claim 1-4, be stored as the method for exposure data, it is characterized in that, described multilayer vector graphics is GDS II figure.
6. a multilayer vector graphics is stored as the system of exposure data, it is characterized in that, comprise: rasterizing unit, digital unit, octree partition unit, Octree data storage cell, described rasterizing unit is used for multilayer vector graphics rasterizing to be exposed; Described digital unit is used for the described multilayer vector graphics digitizing after rasterizing; Described octree partition unit, for by the described multilayer vector graphics after digitizing, utilizes octree partition method to cut apart; Described Octree data storage cell, for to the multilayer vector figure data after cutting apart, adopts octotree data structure to store.
7. multilayer vector graphics according to claim 6 is stored as the system of exposure data, it is characterized in that, described rasterizing unit specifically for, the multilayer of described multilayer vector graphics is carried out respectively to the division of grid array of uniform size; Described digital unit specifically for, the grid of the described multilayer vector graphics after rasterizing is all arranged to 0 or 1 and represents, the described grid that is positioned at exposure area arranges 1, the described grid that is positioned at territory, non-exposed area arranges 0.
8. multilayer vector graphics according to claim 7 is stored as the system of exposure data, it is characterized in that, described octree partition unit specifically for, comprising:
The 1st step, sets maximum depth of recursion;
The 2nd step, finds out the full-size of described multilayer vector graphics, and sets up first cube with this size;
The 3rd step, sequentially loses identical element element into can be involved and there is no a cube of child node;
The 4th step, if do not reach maximum depth of recursion, just segments eight equal portions, then the identical element element that this cube is filled is all shared to eight sub-cubes;
The 5th step, if find, the assigned identical element number of elements of sub-cube is non-vanishing and follow father's cube is the same, this sub-cube stops segmentation.
The 6th step, repeats the 3rd step, until reach maximum depth of recursion.
9. multilayer vector graphics according to claim 8 is stored as the system of exposure data, it is characterized in that, described Octree data storage cell specifically for, described cube after octree partition unit is cut apart is made as to node, grid on described node is labeled as to 1,2,3,4,5,6,7,8 child node successively, after storage, a record is corresponding with a node, and what in described record, describe is the characteristic value of eight child nodes of corresponding with it described node.
10. according to the multilayer vector graphics described in any one in claim 6-9, be stored as the system of exposure data, it is characterized in that, described multilayer vector graphics is GDS II figure.
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Application publication date: 20140122 |