CN110751686A - Method and device for measuring eccentric angle of Hall ion source ion beam - Google Patents
Method and device for measuring eccentric angle of Hall ion source ion beam Download PDFInfo
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Abstract
The invention discloses a method and a device for measuring the eccentric angle of an ion beam of a Hall ion source, wherein a picture of a circumferential discharge channel is shot by a CCD (charge coupled device) camera when the Hall ion source works, and the picture is led into MATLAB (matrix laboratory) for processing and is converted into a picture matrix format; and MATLAB calculates the pixel value distribution in the photo image and calculates the ion beam current vector eccentricity angle. The invention effectively solves the problem that the eccentric angle of the ion beam is difficult to measure.
Description
Technical Field
The invention relates to the technical field of image processing, in particular to a method and a device for measuring an eccentric angle of a Hall ion source ion beam current.
Background
A hall ion source is a device that ionizes neutral atoms or molecules and extracts an ion beam stream therefrom. The Hall ion source ionizes gas filled in a vacuum chamber under the interaction of an electric field and a magnetic field by utilizing emitted electrons in a vacuum environment, and emits ions under the action of the electric field and the magnetic field. The Hall ion source is used as a gridless ion source, and is widely applied to the field of general auxiliary coating because of low maintenance cost. The beam current luminescence in the ion source channel can reflect the ion distribution generated by collision in the channel. When the ion source works under the ideal axial symmetry condition, the ion beam direction is coincident with the ion source axis. However, due to errors in actual machining, assembly, etc., axial symmetry is often difficult to ensure due to asymmetry in the cathode position and discharge within the annular discharge channel. Non-axial symmetry affects the flow characteristics of the plasma in the channel as well as the efficiency and lifetime of the ion source.
In the modern technology, the probe method is adopted to measure the eccentric angle of the ion beam current of the Hall ion source, namely, different circumferential positions of the ring-shaped channel beam current of the Hall ion source are scanned along the circumferential direction by using a Faraday probe. And applying negative bias voltage to the probe, working the probe in an ion saturation region, calculating the ion flux density according to the measured ion current, and calculating the ion beam current eccentricity according to the ion flux distribution. The probe method is adopted for measurement, when the design is unreasonable, the measurement error is overlarge, in addition, the probe is directly contacted with the high-speed ion flow and is easy to damage, and the measurement needs the assistance of equipment such as a bias power supply, an oscilloscope, a platform for radially driving the probe to move, and the like, so that the equipment is more, and the time consumption is long.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a method and a device for measuring the eccentric angle of the ion beam of the Hall ion source, and the problem that the eccentric angle of the ion beam is difficult to measure is effectively solved.
The invention provides a method for measuring the eccentric angle of a Hall ion source ion beam, which is improved in that a picture of a circumferential discharge channel is shot by a CCD camera when the Hall ion source works, and the picture is led into MATLAB for processing and is converted into a picture matrix format; and MATLAB calculates the pixel value distribution in the photo image and calculates the ion beam current vector eccentricity angle.
When the Hall ion source is shot by the CCD camera, the CCD camera and the Hall ion source are at the same height, perpendicular to the direction of the anode of the ion source and arranged 4.5 meters in front of the Hall ion source.
Wherein, when the Hall ion source is shot by a CCD camera, more than 2 continuous pictures are shot;
when the MATLAB calculates the pixel value distribution in the photo image, the average value of more than 2 continuous photos is taken.
Wherein, the MATLAB calculates the pixel value distribution in the photo image, calculates the ion beam current vector eccentricity angle, includes:
the MATLAB traverses the pixel values in the photo matrix, and calculates the light intensity distribution weight center:
in the formula (I), the compound is shown in the specification,
the abscissa of the pixel point is;
is the vertical coordinate of the pixel point;
is the pixel value of each point in the photo matrix;
as the abscissaPixel value center of direction;
as a ordinate
Pixel value center of direction;
calculating the circumferential eccentric distance:
in the formula (I), the compound is shown in the specification,
as the abscissaCircumferential eccentricity of direction;
、
is the geometric center of the channel;
as a ordinateCircumferential eccentricity of direction;
calculating the vector eccentricity angle of the ion beam:
in the formula (I), the compound is shown in the specification,
the distance between the ion source and the CCD camera;
is an ionAnd (5) beam current vector eccentricity angle.
The invention is based on the device of the method, and the improvement is that the device comprises:
the picture acquisition module is used for shooting and acquiring pictures of the circumferential discharge channel when the Hall ion source works;
the photo input module is used for importing the photos into MATLAB;
the RGB conversion module is used for converting the photo into an RGB three-dimensional matrix format;
the weight center calculation module is used for performing pixel value traversal calculation processing on the RGB three-dimensional matrix to obtain weight centers in the x direction and the y direction;
the eccentric distance calculating module is used for comparing the weight center with the geometric center of the channel and calculating the eccentric distance X and the eccentric distance Y of the ion beam;
and the eccentricity angle calculation module is used for calculating the eccentricity angle of the ion beam current by using the eccentricity distance and the shooting distance.
According to the technical scheme, the problem that the ion beam current eccentricity angle is difficult to measure is effectively solved, and the measuring method of the Hall ion source ion beam current eccentricity angle is enriched.
The method does not need a complex measuring instrument and device, does not need special theoretical knowledge, has quick measurement and evaluation, can evaluate the ion beam current eccentricity angle in real time if being combined with the real-time acquisition and transmission processing of a computer, and provides support for improving the design.
Drawings
FIG. 1 is a schematic diagram of an ion beam current eccentricity angle of a Hall ion source according to an embodiment of the invention; in the figure, the central point of a circular ring in a camera receiving image represents the geometric center of a channel, namely the ideal beam direction, and the other points represent beam offset;
fig. 2 is a schematic view of a placement position of a CCD camera according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings by way of examples of preferred embodiments. It should be noted, however, that the numerous details set forth in the description are merely for the purpose of providing the reader with a thorough understanding of one or more aspects of the present invention, which may be practiced without these specific details.
In the method for measuring the eccentric angle of the ion beam current of the hall ion source provided by the embodiment, as shown in a schematic diagram of fig. 1, a picture of a circumferential discharge channel of the hall ion source during operation is taken by using a CCD camera, and the picture is led into MATLAB for processing and converted into a picture matrix format; and MATLAB calculates the pixel value distribution in the photo image and calculates the ion beam current vector eccentricity angle. Specifically, as shown in fig. 2, when the hall ion source is photographed by using a CCD camera, the CCD camera and the hall ion source are at the same height, perpendicular to the direction of the anode of the ion source, and placed 4.5 meters in front of the hall ion source. When the Hall ion source is shot by a CCD camera during shooting, more than 2 continuous photos are shot, and thus the average value of the multiple photos is taken when the pixel value distribution in the photo image is calculated by MATLAB.
Specifically, the MATLAB calculates the pixel value distribution in the photo image, and calculates the ion beam current vector eccentricity angle, including:
the MATLAB traverses the pixel values in the photo matrix, and calculates the light intensity distribution weight center:
in the formula (I), the compound is shown in the specification,
the abscissa of the pixel point is;
is the vertical coordinate of the pixel point;
is the pixel value of each point in the photo matrix;
as the abscissa
Pixel value center of direction;as a ordinate
Pixel value center of direction;
calculating the circumferential eccentric distance:
in the formula (I), the compound is shown in the specification,
as the abscissaCircumferential eccentricity of direction;
、
is the geometric center of the channel;
as a ordinateCircumferential eccentricity of directionSeparating;
calculating the vector eccentricity angle of the ion beam:
in the formula (I), the compound is shown in the specification,
the distance between the ion source and the CCD camera;
is the ion beam current vector eccentricity angle.
Preferably, in order to verify the accuracy of the angle measurement in the present embodiment, a probe method may be used to measure the eccentric angle of the hall ion source ion beam, and then an error is calculated from the angle measured by the method in the present embodiment, if the error does not exceed 20%, the measurement is accurate, otherwise, the measurement method in the present embodiment is recalculated.
Correspondingly, the device for measuring the ion beam current eccentricity angle of the hall ion source provided by the embodiment includes:
the picture acquisition module is used for shooting and acquiring pictures of the circumferential discharge channel when the Hall ion source works;
the photo input module is used for importing the photos into MATLAB;
the RGB conversion module is used for converting the photo into an RGB three-dimensional matrix format;
the weight center calculation module is used for performing pixel value traversal calculation processing on the RGB three-dimensional matrix to obtain weight centers in the x direction and the y direction;
the eccentric distance calculating module is used for comparing the weight center with the geometric center of the channel and calculating the eccentric distance X and the eccentric distance Y of the ion beam;
and the eccentricity angle calculation module is used for calculating the eccentricity angle of the ion beam current by using the eccentricity distance and the shooting distance.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be construed as the protection scope of the present invention.
Claims (5)
1. A method for measuring the eccentric angle of an ion beam of a Hall ion source is characterized in that a picture of a circumferential discharge channel is shot by a CCD camera when the Hall ion source works, the picture is led into MATLAB to be processed, and the picture is converted into a picture matrix format; and MATLAB calculates the pixel value distribution in the photo image and calculates the ion beam current vector eccentricity angle.
2. The method of claim 1, wherein the hall ion source is photographed with a CCD camera at the same height as the hall ion source, perpendicular to the direction of the source anode, and positioned 4.5 meters in front of the hall ion source.
3. The method of claim 2, wherein the hall ion source is photographed with a CCD camera taking more than 2 consecutive pictures;
when the MATLAB calculates the pixel value distribution in the photo image, the average value of more than 2 continuous photos is taken.
4. The method of claim 3, wherein the MATLAB computes a distribution of pixel values in the photographic image, and wherein computing the ion beam current vector eccentricity angle comprises:
the MATLAB traverses the pixel values in the photo matrix, and calculates the light intensity distribution weight center:
in the formula (I), the compound is shown in the specification,
the abscissa of the pixel point is;
is the vertical coordinate of the pixel point;
is the pixel value of each point in the photo matrix;
as the abscissaPixel value center of direction;
as a ordinate
Pixel value center of direction;
calculating the circumferential eccentric distance:
in the formula (I), the compound is shown in the specification,
as the abscissa
Circumferential eccentricity of direction;
、
is the geometric center of the channel;
as a ordinate
Circumferential eccentricity of direction;
calculating the vector eccentricity angle of the ion beam:
in the formula (I), the compound is shown in the specification,
the distance between the ion source and the CCD camera;
is the ion beam current vector eccentricity angle.
5. An apparatus according to any one of claims 1 to 4, comprising:
the picture acquisition module is used for shooting and acquiring pictures of the circumferential discharge channel when the Hall ion source works;
the photo input module is used for importing the photos into MATLAB;
the RGB conversion module is used for converting the photo into an RGB three-dimensional matrix format;
the weight center calculation module is used for performing pixel value traversal calculation processing on the RGB three-dimensional matrix to obtain weight centers in the x direction and the y direction;
the eccentric distance calculating module is used for comparing the weight center with the geometric center of the channel and calculating the eccentric distance X and the eccentric distance Y of the ion beam;
and the eccentricity angle calculation module is used for calculating the eccentricity angle of the ion beam current by using the eccentricity distance and the shooting distance.
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Citations (6)
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| CN104765160A (en) * | 2015-04-30 | 2015-07-08 | 广州大学 | Calibration system and calibration method for optical beam orientation |
| CN107065124A (en) * | 2017-05-19 | 2017-08-18 | 广州大学 | A kind of method that the control of light beam focus feedback is realized based on LCD space light modulator |
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| KR20030082823A (en) * | 2002-04-18 | 2003-10-23 | 삼성전자주식회사 | Method and apparatus for measuring an angle of inclination of ion beam |
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| CN107065124A (en) * | 2017-05-19 | 2017-08-18 | 广州大学 | A kind of method that the control of light beam focus feedback is realized based on LCD space light modulator |
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Non-Patent Citations (3)
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| 李晓晶;安志勇;肖作江;王劲松;: "基于CCD二次成像法的激光束散角测量方法研究" * |
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