CN110740612A - Vapor chamber - Google Patents

Vapor chamber Download PDF

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Publication number
CN110740612A
CN110740612A CN201810810518.XA CN201810810518A CN110740612A CN 110740612 A CN110740612 A CN 110740612A CN 201810810518 A CN201810810518 A CN 201810810518A CN 110740612 A CN110740612 A CN 110740612A
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heat
plate
cover plate
bottom plate
chamber
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谭成
陈明伟
王曼
姚志江
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Hongfujin Precision Industry Wuhan Co Ltd
Hon Hai Precision Industry Co Ltd
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Hongfujin Precision Industry Wuhan Co Ltd
Hon Hai Precision Industry Co Ltd
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2039Modifications to facilitate cooling, ventilating, or heating characterised by the heat transfer by conduction from the heat generating element to a dissipating body
    • H05K7/20509Multiple-component heat spreaders; Multi-component heat-conducting support plates; Multi-component non-closed heat-conducting structures
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2029Modifications to facilitate cooling, ventilating, or heating using a liquid coolant with phase change in electronic enclosures

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

一种均热板,用于传导并散发发热元件产生的热量,包括底板、盖板。所述盖板与所述底板扣合,所述盖板与所述底板之间形成密封且真空的腔室,所述腔室内填充有导热流体,所述底板表面设有用于与所述发热元件接触的导热区。所述均热板还包括设于所述腔室内的吸液芯,所述吸液芯内部分布有连通于所述底板及所述盖板之间的毛细孔。所述导热流体在所述导热区受热蒸发成蒸汽并扩散,蒸汽接触到盖板后放热并凝结成导热流体,凝结形成的导热流体在所述吸液芯的毛细孔的毛细作用下回流至所述导热区处,从而解决小散热设计空间和高热流密度器件的热量的均匀传导及散热。

Figure 201810810518

A soaking plate is used to conduct and dissipate the heat generated by the heating element, including a bottom plate and a cover plate. The cover plate is buckled with the bottom plate, a sealed and vacuum chamber is formed between the cover plate and the bottom plate, the chamber is filled with a heat-conducting fluid, and the surface of the bottom plate is provided with a space for connecting with the heating element. contact with the thermally conductive area. The soaking plate further includes a liquid absorbing wick arranged in the chamber, and the inside of the liquid absorbing wick is distributed with capillary holes that communicate between the bottom plate and the cover plate. The heat-conducting fluid is heated in the heat-conducting area and evaporates into steam and diffuses. After the steam contacts the cover plate, it releases heat and condenses into a heat-conducting fluid. At the heat conduction area, the uniform heat conduction and heat dissipation of the small heat dissipation design space and the high heat flux density device can be solved.

Figure 201810810518

Description

均热板Vapor chamber

技术领域technical field

本发明涉及一种均热板。The present invention relates to a soaking plate.

背景技术Background technique

随着电子芯片技术的快速发展,消费类电子设备越来越轻薄化,而产品的性能越来越强大,由于电子设备内部空间越来越狭小,其内部核心处理单元的的散热问题变得越来越重要。具体而言,电子设备内局部热流密度越来越大,热量容易在局部发生聚焦,导致局部温度过高,影响产品的性能稳定。例如,随着现代通讯设备、智能手机、太阳能和新能源汽车等行业的高速发展,热管理系统是产品技术研发中重要的组成部分。电子设备朝着高性能、多功能,小型化的方向发展,但随之而来的是电子器件的高热流密度和小散热空间。随着温度的增加,电子器件的失效率成指数增长,且整机的工作性能和稳定性受到极大的影响。因此小型且高性能的散热设备有着广泛的应用前景。With the rapid development of electronic chip technology, consumer electronic devices are becoming thinner and lighter, and the performance of products is becoming more and more powerful. As the internal space of electronic devices is getting narrower and narrower, the heat dissipation problem of the internal core processing unit becomes more and more difficult. increasingly important. Specifically, the local heat flux density in electronic equipment is increasing, and the heat is easily focused locally, resulting in excessive local temperature and affecting the performance stability of the product. For example, with the rapid development of industries such as modern communication equipment, smart phones, solar energy and new energy vehicles, thermal management systems are an important part of product technology research and development. Electronic devices are developing in the direction of high performance, multi-function and miniaturization, but with it comes the high heat flux density and small heat dissipation space of electronic devices. With the increase of temperature, the failure rate of electronic devices increases exponentially, and the working performance and stability of the whole machine are greatly affected. Therefore, small and high-performance cooling devices have broad application prospects.

发明内容SUMMARY OF THE INVENTION

有鉴于此,有必要提供一种均热板,旨在解决小散热设计空间和高热流密度器件的热量的均匀传导及散热。In view of this, it is necessary to provide a vapor chamber, which aims to solve the uniform conduction and heat dissipation of heat in a small heat dissipation design space and a high heat flux density device.

一种均热板,用于传导并散发发热元件产生的热量,包括:A vapor chamber for conducting and dissipating heat generated by heating elements, comprising:

底板;及the bottom plate; and

盖板,所述盖板与所述底板扣合;a cover plate, the cover plate is buckled with the bottom plate;

所述盖板与所述底板之间形成密封且真空的腔室,所述腔室内填充有导热流体;所述底板表面设有用于与所述发热元件接触的导热区;A sealed and vacuum chamber is formed between the cover plate and the bottom plate, and the chamber is filled with heat-conducting fluid; the surface of the bottom plate is provided with a heat-conducting area for contacting with the heating element;

所述均热板还包括设于所述腔室内的吸液芯,所述吸液芯内部分布有连通于所述底板及所述盖板之间的毛细孔;The soaking plate further comprises a liquid absorbing wick arranged in the chamber, and the inside of the liquid absorbing wick is distributed with capillary holes connected between the bottom plate and the cover plate;

所述导热流体在所述导热区受热蒸发成蒸汽并扩散,蒸汽接触到盖板后放热并凝结成导热流体,凝结形成的导热流体在所述吸液芯的毛细孔的毛细作用下回流至所述导热区处。The heat-conducting fluid is heated in the heat-conducting area and evaporates into steam and diffuses. After the steam contacts the cover plate, it releases heat and condenses into a heat-conducting fluid. at the heat transfer zone.

作为优选,所述吸液芯的一端与所述底板接触,另一端与所述盖板接触。Preferably, one end of the absorbent core is in contact with the bottom plate, and the other end is in contact with the cover plate.

作为优选,所述腔室凹设于所述盖板一侧;所述盖板的周侧与所述底板的周侧分别设有相互匹配的密封区;Preferably, the chamber is recessed on one side of the cover plate; the peripheral side of the cover plate and the peripheral side of the bottom plate are respectively provided with mutually matching sealing areas;

所述盖板与所述底板的周侧通过所述密封区接触并密封所述腔室。The cover plate is in contact with the peripheral side of the bottom plate through the sealing area and seals the chamber.

作为优选,所述密封区为焊接区,所述盖板与所述底板的周侧通过所述焊接区焊接。Preferably, the sealing area is a welding area, and the peripheral sides of the cover plate and the bottom plate are welded through the welding area.

作为优选,所述均热板还包括与腔室连通的抽真空管;Preferably, the soaking plate further comprises an evacuated pipe communicated with the chamber;

所述抽真空管用作所述腔室的抽真空通道,且用于将导热流体填充至所述腔室内。The evacuation tube serves as an evacuation channel for the chamber and is used to fill the chamber with a thermally conductive fluid.

作为优选,底板上设有与所述抽真空管匹配并与所述腔室连通的第一注液口;盖板上设有与所述抽真空管及所述第一注液口配合并与所述腔室连通的第二注液口;Preferably, the bottom plate is provided with a first liquid injection port matched with the vacuum pipe and communicated with the chamber; the cover plate is provided with a first liquid injection port matched with the vacuum pipe and the first liquid injection port, a second liquid injection port communicating with the chamber;

所述抽真空管夹持于所述第一注液口与所述第二注液口之间。The evacuation tube is clamped between the first liquid injection port and the second liquid injection port.

作为优选,所述盖板与所述底板之间形成多个所述腔室;所述均热板还包括对应设于所述多个腔室内的多个吸液芯。Preferably, a plurality of the chambers are formed between the cover plate and the bottom plate; the soaking plate further includes a plurality of liquid-absorbing wicks corresponding to the plurality of chambers.

作为优选,所述吸液芯包括泡沫金属板,所述泡沫金属板包括导热部及与所述导热部连接的多个延伸部;相邻的延伸部之间形成蒸汽流道;Preferably, the absorbent core includes a foamed metal plate, and the foamed metal plate includes a heat-conducting part and a plurality of extension parts connected to the heat-conducting part; a steam flow channel is formed between the adjacent extension parts;

所述吸液芯通过所述导热部及所述延伸部与所述底板接触,所述导热流体在所述导热区受热蒸发成蒸汽并沿所述蒸汽流道扩散。The liquid-absorbing wick is in contact with the bottom plate through the heat-conducting portion and the extension portion, and the heat-conducting fluid is heated in the heat-conducting area and evaporates into steam and spreads along the steam flow channel.

作为优选,所述导热部位于所述泡沫金属板的中部,所述多个延伸部分布于所述导热部周侧。Preferably, the heat-conducting portion is located in the middle of the foam metal plate, and the plurality of extension portions are distributed on the peripheral side of the heat-conducting portion.

作为优选,所述导热部及所述多个延伸部分布于所述泡沫金属板的周侧。Preferably, the heat-conducting portion and the plurality of extending portions are distributed on the peripheral side of the foam metal plate.

上述均热板中,所述吸液芯内部分布有连通于所述底板及所述盖板之间的毛细孔;所述导热流体在所述导热区受热蒸发成蒸汽并扩散,蒸汽接触到盖板后放热并凝结成导热流体,凝结形成的导热流体在所述吸液芯的毛细孔的毛细作用下回流至所述导热区处,参与下一次循环,从而解决小散热设计空间和高热流密度器件的热量的均匀传导及散热。In the above-mentioned soaking plate, capillary holes connected between the bottom plate and the cover plate are distributed inside the liquid-absorbing core; the heat-conducting fluid is heated and evaporated into steam in the heat-conducting area and diffuses, and the steam contacts the cover. The heat is released after the plate and condenses into a heat-conducting fluid, and the condensed heat-conducting fluid flows back to the heat-conducting area under the capillary action of the capillary holes of the liquid-absorbing core, and participates in the next cycle, thereby solving the problem of small heat dissipation design space and high heat flow. Uniform conduction and dissipation of heat from density devices.

附图说明Description of drawings

图1为均热板在一较优实施例中的结构示意图。FIG. 1 is a schematic structural diagram of a vapor chamber in a preferred embodiment.

图2为图1的均热板中A部分的局部放大视图。FIG. 2 is a partial enlarged view of part A of the vapor chamber of FIG. 1 .

图3为图1的均热板的分解结构示意图。FIG. 3 is a schematic diagram of an exploded structure of the vapor chamber of FIG. 1 .

图4为均热板中泡沫金属板在一优选实施例中的结构示意图。FIG. 4 is a schematic structural diagram of a foamed metal plate in a vapor chamber in a preferred embodiment.

图5为图4的泡沫金属板对应的吸液芯的结构示意图。FIG. 5 is a schematic structural diagram of the liquid absorbent core corresponding to the foamed metal plate of FIG. 4 .

主要元件符号说明Description of main component symbols

10 底板10 Bottom plate

20 吸液芯20 wicks

30 盖板30 Cover

40 抽真空管40 Evacuation tube

50 热源50 heat source

100 均热板100 Vapor Chambers

110 第一注液口110 The first liquid injection port

201 泡沫金属板201 Foam Metal Sheet

210 导热部210 Thermal part

220 蒸汽流道220 Steam runner

230 延伸部230 Extension

310 腔室310 chamber

320 第二注液口320 Second liquid injection port

如下具体实施方式将结合上述附图进一步说明本发明。The following specific embodiments will further illustrate the present invention in conjunction with the above drawings.

具体实施方式Detailed ways

如图1至图3所示,均热板100用于传导并散发发热元件产生的热量。例如,均热板100可用用作电子设备、太阳能设备、电动汽车等领域的散热器件和热传导设备。As shown in FIGS. 1 to 3 , the vapor chamber 100 is used to conduct and dissipate the heat generated by the heating element. For example, the vapor chamber 100 can be used as a heat dissipation device and a heat conduction device in the fields of electronic equipment, solar equipment, electric vehicles, and the like.

所述均热板100包括底板10、盖板30及吸液芯20。The vapor chamber 100 includes a bottom plate 10 , a cover plate 30 and a liquid absorbing core 20 .

所述盖板30与所述底板10扣合,且所述盖板30与所述底板10之间形成密封且真空的腔室310。The cover plate 30 is fastened to the bottom plate 10 , and a sealed and vacuum chamber 310 is formed between the cover plate 30 and the bottom plate 10 .

所述腔室310内填充有导热流体。例如,在具体实施中,所述导热流体可为水、丁醇或水和丁醇的混合体。The cavity 310 is filled with thermally conductive fluid. For example, in specific implementations, the thermally conductive fluid may be water, butanol, or a mixture of water and butanol.

所述底板10表面设有用于与所述发热元件接触的导热区。The surface of the bottom plate 10 is provided with a heat conduction area for contacting with the heating element.

所述吸液芯20设于所述腔室310内。所述吸液芯20内部分布有连通于所述底板10及所述盖板30之间的毛细孔。The wick 20 is disposed in the chamber 310 . Capillary holes connected between the bottom plate 10 and the cover plate 30 are distributed inside the absorbent core 20 .

所述导热流体在所述底板10的所述导热区受热蒸发成蒸汽并扩散,蒸汽接触到盖板30后放热并凝结成导热流体,凝结形成的导热流体在所述吸液芯20的毛细孔的毛细作用下回流至所述导热区处。回流的导热流体可参与下一次蒸发、凝结的循环。The heat-conducting fluid is heated and evaporated into steam in the heat-conducting area of the bottom plate 10 and diffuses. After the steam contacts the cover plate 30 , it releases heat and condenses into a heat-conducting fluid. Under the capillary action of the pores, it flows back to the heat conducting zone. The returned heat transfer fluid can participate in the next cycle of evaporation and condensation.

在具体实施中,所述吸液芯20的一端与所述底板10接触,另一端与所述盖板30接触。In a specific implementation, one end of the wick 20 is in contact with the bottom plate 10 , and the other end is in contact with the cover plate 30 .

所述腔室310可凹设于所述盖板30的一侧。所述盖板30的周侧与所述底板10的周侧分别设有相互匹配的密封区。所述盖板30与所述底板10的周侧通过所述密封区接触并密封所述腔室310。The cavity 310 may be recessed on one side of the cover plate 30 . The peripheral side of the cover plate 30 and the peripheral side of the bottom plate 10 are respectively provided with mutually matching sealing areas. The cover plate 30 is in contact with the peripheral side of the bottom plate 10 through the sealing area and seals the cavity 310 .

例如,在具体实施中,所述密封区为焊接区,所述盖板30与所述底板10的周侧通过所述焊接区焊接。For example, in a specific implementation, the sealing area is a welding area, and the peripheral sides of the cover plate 30 and the bottom plate 10 are welded through the welding area.

所述均热板100还包括与腔室310连通的抽真空管40。The vapor chamber 100 further includes an evacuation pipe 40 in communication with the chamber 310 .

所述抽真空管40用作所述腔室310的抽真空通道,且所述抽真空管40用于将导热流体填充至所述腔室310内。在将所述腔室310抽完真空和充注导热流体后将所述抽真空管40焊接闭合。The evacuation tube 40 is used as an evacuation channel for the chamber 310 , and the evacuation tube 40 is used to fill the heat transfer fluid into the chamber 310 . After the chamber 310 is evacuated and filled with heat transfer fluid, the evacuated tube 40 is welded closed.

所述底板10上设有与所述抽真空管40匹配并与所述腔室310连通的第一注液口110。对应的,所述盖板30上设有与所述抽真空管40及所述第一注液口110配合并与所述腔室310连通的第二注液口320。The bottom plate 10 is provided with a first liquid injection port 110 which is matched with the evacuation tube 40 and communicates with the chamber 310 . Correspondingly, the cover plate 30 is provided with a second liquid injection port 320 which cooperates with the evacuating tube 40 and the first liquid injection port 110 and communicates with the chamber 310 .

所述抽真空管30夹持于所述第一注液口110与所述第二注液口320之间。The evacuation tube 30 is sandwiched between the first liquid injection port 110 and the second liquid injection port 320 .

在一优选实施方式中,所述盖板30与所述底板10之间可形成多个所述腔室310。对应的,所述均热板100还包括对应设于所述多个腔室310内的多个吸液芯20。In a preferred embodiment, a plurality of the chambers 310 may be formed between the cover plate 30 and the bottom plate 10 . Correspondingly, the vapor chamber 100 further includes a plurality of wicks 20 correspondingly disposed in the plurality of chambers 310 .

具有单腔室310的均热板100有其最佳的尺寸大小限制,具有多个腔室310的均热板100可以突破此限制,增加单块均热板100的最大尺寸限制,保证其快速均热性能的同时扩大均热板100的设计应用范围。The vapor chamber 100 with a single chamber 310 has its optimal size limit. The vapor chamber 100 with multiple chambers 310 can break through this limitation and increase the maximum size limit of a single vapor chamber 100 to ensure its rapidity. The design and application range of the heat soaking plate 100 is expanded while the heat soaking performance is increased.

在具体实施中,所述吸液芯20包括泡沫金属板201。所述泡沫金属板201包括导热部210及与所述导热部210连接的多个延伸部230。例如,在具体实施中,所述泡沫金属板201可为泡沫铜板。所述泡沫铜板的孔隙度可为80%~95%。In a specific implementation, the absorbent core 20 includes a foamed metal plate 201 . The foamed metal plate 201 includes a heat conducting portion 210 and a plurality of extending portions 230 connected to the heat conducting portion 210 . For example, in a specific implementation, the foamed metal plate 201 may be a foamed copper plate. The porosity of the foamed copper plate may be 80%-95%.

相邻的延伸部230之间形成蒸汽流道220。Steam flow channels 220 are formed between adjacent extension parts 230 .

所述吸液芯20通过所述导热部210及所述延伸部230与所述底板10接触。所述导热流体在所述导热区受热蒸发成蒸汽并沿所述蒸汽流道220扩散。The wick 20 is in contact with the bottom plate 10 through the heat conducting portion 210 and the extending portion 230 . The heat-conducting fluid is heated in the heat-conducting region and evaporates into steam and diffuses along the steam flow channel 220 .

借助导热流体的蒸发扩散,可提升热传导效率,将热量快速传导到大的散热区域,实现均热板100的快速均热,使热量可以充分利用外部的散热鳍片等导出,提高散热系统整体性能。By means of the evaporation and diffusion of the heat transfer fluid, the heat conduction efficiency can be improved, the heat can be quickly transferred to a large heat dissipation area, and the rapid heat distribution of the vapor chamber 100 can be realized, so that the heat can be fully exported by the external heat dissipation fins, etc., and the overall performance of the heat dissipation system can be improved. .

同时参阅图3至图5所示,在具体实施中,所述导热部210可位于所述泡沫金属板201的中部,所述多个延伸部230分布于所述导热部210的周侧(如图3所示),这种分布可用于热源50较分散的情境。Referring to FIGS. 3 to 5 at the same time, in a specific implementation, the heat-conducting portion 210 may be located in the middle of the foam metal plate 201 , and the plurality of extension portions 230 are distributed on the peripheral side of the heat-conducting portion 210 (eg, 3), this distribution can be used in a situation where the heat sources 50 are more dispersed.

在另一实施方式中,所述导热部210及所述多个延伸部230可分布于所述泡沫金属板201的周侧(如图4所示)。参阅图5所示,这种分布可适用于热源50较集中的情境。In another embodiment, the heat conducting portion 210 and the plurality of extending portions 230 may be distributed on the peripheral side of the foam metal plate 201 (as shown in FIG. 4 ). Referring to FIG. 5 , this distribution can be applied to a situation where the heat sources 50 are concentrated.

通过热源50的不同发热位置设计腔室310内泡沫金属板201的形状,增大蒸汽流通的空间,降低蒸汽流动的阻力,且在泡沫金属板201的边缘可设置连通的通道,提高蒸汽的流通性。The shape of the foam metal plate 201 in the chamber 310 is designed by different heating positions of the heat source 50 to increase the space for steam circulation and reduce the resistance of steam flow, and a communication channel can be provided on the edge of the foam metal plate 201 to improve the circulation of steam sex.

泡沫金属板201不仅提供了导热流体回流的通道,而且能支撑底板10和盖板30形成所述腔室310。The foamed metal plate 201 not only provides a channel for backflow of the heat transfer fluid, but also supports the bottom plate 10 and the cover plate 30 to form the cavity 310 .

上述均热板100中,所述吸液芯20内部分布有连通于所述底板10及所述盖板30之间的毛细孔。所述导热流体在所述导热区受热蒸发成蒸汽并扩散,蒸汽接触到盖板30后放热并凝结成导热流体,凝结形成的导热流体在所述吸液芯20的毛细孔的毛细作用下回流至所述导热区处,参与下一次循环,从而解决小散热设计空间和高热流密度器件的热量的均匀传导及散热。In the above-mentioned vapor chamber 100 , capillary holes connected between the bottom plate 10 and the cover plate 30 are distributed inside the liquid absorbing core 20 . The heat-conducting fluid is heated in the heat-conducting area and evaporates into steam and diffuses. After the steam contacts the cover plate 30 , it releases heat and condenses into a heat-conducting fluid. Return to the heat conduction area to participate in the next cycle, so as to solve the uniform conduction and heat dissipation of the small heat dissipation design space and the high heat flux density device.

以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention shall be included in the protection of the present invention. within the range.

Claims (10)

  1. A vapor chamber of the type for conducting and dissipating heat generated by a heat-generating component, comprising:
    a base plate; and
    the cover plate is buckled with the bottom plate;
    a sealed and vacuum cavity is formed between the cover plate and the bottom plate, and a heat-conducting fluid is filled in the cavity; the surface of the bottom plate is provided with a heat conduction area used for being in contact with the heating element;
    the vapor chamber is characterized by also comprising a liquid absorbing core arranged in the chamber, and capillary holes communicated between the bottom plate and the cover plate are distributed in the liquid absorbing core;
    the heat-conducting fluid is heated and evaporated in the heat-conducting area to form steam and the steam is diffused, the steam is contacted with the cover plate to release heat and is condensed to form the heat-conducting fluid, and the heat-conducting fluid formed by condensation flows back to the heat-conducting area under the capillary action of the capillary pores of the liquid absorption core.
  2. 2. The vapor chamber of claim 1, wherein said wick is in contact with said bottom plate at end and said cover plate at end .
  3. 3. The soaking plate according to claim 1, wherein the chamber is concavely arranged on the side of the cover plate , and mutually matched sealing zones are respectively arranged on the peripheral side of the cover plate and the peripheral side of the bottom plate;
    the cover plate contacts and seals the chamber with the peripheral side of the base plate via the sealing region.
  4. 4. The soaking plate according to claim 3, wherein: the sealing area is a welding area, and the peripheral sides of the cover plate and the bottom plate are welded through the welding area.
  5. 5. The soaking plate according to claim 4, wherein: the soaking plate also comprises a vacuumizing pipe communicated with the cavity;
    the evacuation tube serves as an evacuation passage of the chamber and is used to fill a heat transfer fluid into the chamber.
  6. 6. The soaking plate according to claim 5, wherein the bottom plate is provided with a th liquid injection port matched with the vacuum tube and communicated with the chamber, the cover plate is provided with a second liquid injection port matched with the vacuum tube and the th liquid injection port and communicated with the chamber;
    the vacuum tube is clamped between the th liquid injection port and the second liquid injection port.
  7. 7. The soaking plate according to claim 1, wherein: a plurality of the chambers are formed between the cover plate and the bottom plate; the vapor chamber also comprises a plurality of wicks correspondingly arranged in the chambers.
  8. 8. The soaking plate according to claim 7, wherein: the wick comprises a metal foam plate, and the metal foam plate comprises a heat conducting part and a plurality of extending parts connected with the heat conducting part; a steam flow channel is formed between the adjacent extension parts;
    the liquid absorbing core is contacted with the bottom plate through the heat conducting part and the extending part, and the heat conducting fluid is heated and evaporated into steam in the heat conducting area and is diffused along the steam flow channel.
  9. 9. The soaking plate according to claim 8, wherein: the heat conducting part is located in the middle of the foam metal plate, and the plurality of extending parts are distributed on the periphery of the heat conducting part.
  10. 10. The soaking plate according to claim 8, wherein: the heat conducting part and the plurality of extending parts are distributed on the periphery of the foam metal plate.
CN201810810518.XA 2018-07-20 2018-07-20 Vapor chamber Pending CN110740612A (en)

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CN115528532A (en) * 2022-09-16 2022-12-27 深圳市佑明光电有限公司 Combined white light laser light source module based on diode and fluorescent powder film

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