CN110732275A - laminated passive micromixer and its making method - Google Patents

laminated passive micromixer and its making method Download PDF

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CN110732275A
CN110732275A CN201910978675.6A CN201910978675A CN110732275A CN 110732275 A CN110732275 A CN 110732275A CN 201910978675 A CN201910978675 A CN 201910978675A CN 110732275 A CN110732275 A CN 110732275A
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pdms
layers
channels
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pdms thin
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CN110732275B (en
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章安良
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Wuyi University
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Wuyi University
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers
    • B01F33/301—Micromixers using specific means for arranging the streams to be mixed, e.g. channel geometries or dispositions
    • B01F33/3012—Interdigital streams, e.g. lamellae
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/02—Adapting objects or devices to another
    • B01L2200/026—Fluid interfacing between devices or objects, e.g. connectors, inlet details
    • B01L2200/027—Fluid interfacing between devices or objects, e.g. connectors, inlet details for microfluidic devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/10—Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0867—Multiple inlets and one sample wells, e.g. mixing, dilution
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0887—Laminated structure

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

The invention discloses an laminated passive micro-mixer and a manufacturing method thereof, the laminated passive micro-mixer comprises a plurality of PDMS thin curing layers and a plurality of spacing paper sheets, wherein the PDMS thin curing layers are provided with channels with two inlets and outlets, the rest PDMS thin curing layers are provided with channels with inlets and outlets, PDMS thin curing layers and spacing paper sheets are sequentially stacked from bottom to top to form a laminated structure, the PDMS thin curing layer with the channels with the two inlets and the outlets is arranged at the top, the positions of the upper channel and the lower channel are staggered, the spacing paper sheets are positioned between the edges of the two adjacent PDMS thin curing layers to form a micro-cavity between the central areas, the upper channel and the lower channel are communicated through the micro-cavity, the peripheral walls of the two adjacent PDMS thin curing layers are hermetically connected, the two inlets of the channel at the top are respectively used as input ports, and the outlet of the channel at the bottom is used as an output port.

Description

laminated passive micromixer and its making method
Technical Field
The invention relates to a micromixer in microfluidic chips and a manufacturing technology thereof, in particular to a laminated passive micromixer and a manufacturing method thereof.
Background
The micro-fluidic chip integrates a conventional laboratory analysis instrument unit on an small substrate to complete the biochemical analysis function of the conventional laboratory, and has the advantages of small volume, less consumption of biochemical reagents, short analysis time and higher analysis automation, so the micro-fluidic chip is valued by experts at home and abroad since the invention, is rapidly developed, gradually permeates into a plurality of subject fields, and has a lot of literature reports on the aspects of life of people every year after steps.
The microfluid mixing is an indispensable basic operation unit of the microfluidic chip, and reaction liquid must be fully mixed before the biochemical reaction is carried out for microfluidic analysis, so that reliable analysis precision can be achieved. Therefore, the micro-fluidic chip experts and scholars put a lot of effort and research the structure of the micro-mixer and the manufacturing method thereof continuously so as to reduce the manufacturing cost and improve the mixing efficiency, and invent the manufacturing method and structure of the micro-mixer with different mechanisms.
The passive micromixer has the advantages of high mixing efficiency and high mixing speed, but the conventional active micromixer mainly comprises an electromagnetic driving micromixer, a thermal expansion micromixer, an ultrasonic driving micromixer, a mechanical mixer, an electric driving micromixer and the like, and the conventional active micromixer has common defects, namely relatively complex structure, increased volume caused by external energy supply, improved analysis cost, and access to the small-size and automatic development direction of the micro-flow analysis.
The conventional passive micromixer is a cross-shaped or T-shaped micromixer, which is manufactured by a soft lithography or die casting method, microfluid to be mixed is input at two input ports, and is converged into microchannels after passing through the cross-shaped or T-shaped crossed microchannels, and the two microfluids are diffused in the same microchannels after being converged to realize passive mixing of the two microfluids, so that the structure of the micromixer is simple, but the mixing efficiency needs to be further improved .
In order to improve the mixing effect of a passive micro mixer, when a micro mixer with a T-shaped structure or a cross-shaped structure is manufactured, the length of a merged micro channel is often lengthened to ensure that the mixture is fully mixed, in addition, the length of the micro channel for mixing is increased, meanwhile, structures with different patterns are designed inside the micro channel for mixing to improve the mixing efficiency, but the mixing efficiency of the passive micro mixer is improved by changing the internal physical structure of the micro channel, so that the process cost of the micro mixer is increased.
Disclosure of Invention
The technical problem to be solved by the invention is to provide laminated passive micromixers and a manufacturing method thereof, and the laminated passive micromixer has the advantages of high mixing efficiency, simple structure, convenient process and low process cost.
laminated passive micromixer, characterized in that, it includes a plurality of PDMS thin solidified layers and a plurality of spacing paper sheets, wherein PDMS thin solidified layers are provided with channels with two inlets and outlets through the upper and lower parts, the rest PDMS thin solidified layers are provided with channels with inlets and outlets through the upper and lower parts, PDMS thin solidified layers and sheets are stacked in sequence from bottom to top to form a laminated structure, the uppermost of the laminated structure is the PDMS thin solidified layer with two inlets and outlets, the positions of the channels on two adjacent PDMS thin solidified layers are staggered, the spacing paper sheets are located between the edges of two adjacent PDMS thin solidified layers, so that micro-cavities are formed between the central areas of two adjacent PDMS thin solidified layers, the channels on two adjacent PDMS thin solidified layers are communicated through the micro-cavities, the peripheral walls of two adjacent PDMS thin solidified layers are connected in a sealing manner, the uppermost laminated structure in the laminated structure is used as the outlets of the channels on the PDMS thin solidified layers below the inlets.
The channels on the uppermost PDMS thin curing layer in the laminated structure are T-shaped or Y-shaped channels, and the channels on the rest PDMS thin curing layers are vertical through channels. Since two input ports are required for the passive micromixer, the channel on the uppermost PDMS thin cured layer has two input ports, so that the channel on the uppermost PDMS thin cured layer can be designed to be T-shaped or Y-shaped.
The pore diameter of the channel on the PDMS thin curing layer is 100-200 microns, relatively speaking, the smaller the pore diameter of the channel is, the better the mixing effect is, and the pore diameter of the channel can be designed to be 120 microns under the condition.
The channels of the thin cured PDMS layer are located at corner ends of the thin cured PDMS layer, and the channels of two adjacent thin cured PDMS layers are diagonally staggered when stacked, and the channels are located at corner ends of the thin cured PDMS layer, so that the two channels can be diagonally staggered when stacked to achieve the best mixing effect, and the path formed by the two channels is the longest when the two channels are diagonally staggered.
The spacing paper sheet is in a frame shape and is arranged between the edges of two adjacent PDMS thin curing layers, in the actual treatment process, a common A4 paper can be directly cut into the length and the width of of the PDMS thin curing layers, the middle part of the paper sheet is hollowed to form the frame-shaped spacing paper sheet, and the hollowed part is positioned between the central areas of the two adjacent PDMS thin curing layers to form a micro-cavity.
The width of the frame edge of the spacing paper sheet is 1-2 mm. The rim width of the spacer sheet is defined to maximize the volume of the microcavity.
And the outer peripheral walls of the two adjacent PDMS thin curing layers are coated with gel-state PDMS, and the gel-state PDMS is cured to form a sealing ring to realize sealing connection. The effect of sealing and connecting the peripheral walls of two adjacent PDMS thin solidified layers by adopting PDMS is optimal.
And the input port and the output port are respectively led out with a thin hose.
method for manufacturing laminated passive micromixers, which is characterized by comprising the following steps:
a step of manufacturing a plurality of PDMS thin curing layers with the same size, wherein PDMS thin curing layers are provided with channels with two inlets and outlets in a way of penetrating through the upper and lower parts, and the rest PDMS thin curing layers are provided with channels with inlets and outlets in a way of penetrating through the upper and lower parts;
secondly, manufacturing a plurality of frame-shaped interval paper sheets with the size equal to of the PDMS thin curing layer and the width of the frame edge of 1-2 mm;
stacking PDMS thin curing layers and pieces of spacing paper sheets in sequence from bottom to top in an aligned mode, enabling the positions of channels on two adjacent PDMS thin curing layers to be staggered, enabling the spacing paper sheets to be located between the edges of the two adjacent PDMS thin curing layers to form a laminated structure, wherein the PDMS thin curing layers with two inlets and channels on the top in the laminated structure are communicated with the channels on the two adjacent PDMS thin curing layers through micro-cavities formed between the central areas of the two PDMS thin curing layers;
step four: coating gel-state PDMS between the peripheral walls of two adjacent PDMS thin curing layers, and curing (the curing process can be realized by using a constant temperature box) to form a sealing ring to realize sealing connection;
step five: and taking two inlets of the channel on the topmost PDMS thin curing layer in the laminated structure as input ports and leading out the thin hoses, and taking an outlet of the channel on the bottommost PDMS thin curing layer in the laminated structure as an output port and leading out the thin hoses.
The specific process of step is as follows:
the method comprises the steps of vertically placing thin metal wires with the diameter of 100-200 micrometers in containers, pouring uncured PDMS into the containers, curing the PDMS by using a constant temperature box, taking out a cured body, extracting the thin metal wires, and finally slicing the cured body according to the required size (such as the thickness of 1-2 mm) to obtain a plurality of PDMS thin cured layers with passages of inlets and outlets, wherein the passages on the PDMS thin cured layers are located at the corner ends of ;
the method comprises the steps of manufacturing a T-shaped structure or a Y-shaped structure by using a fine metal wire with the diameter of 100-200 micrometers, placing the manufactured metal wire structure into containers, pouring uncured PDMS into the containers to enable the height of the uncured PDMS to be the size (such as the thickness of 1-2 mm) required by a PDMS thin curing layer, curing by using an incubator, taking out a cured body, and extracting the fine metal wire to obtain PDMS thin curing layers with two inlets and outlets, wherein the channels on the PDMS thin curing layer are located at the corner ends of .
Compared with the prior art, the invention has the advantages that:
1) according to the laminated passive micro mixer, a plurality of PDMS thin curing layers are sequentially laminated at , and the positions of the channels on two adjacent PDMS thin curing layers are staggered, so that long micro channels are formed by micro cavities formed between all the channels and the central areas of the two adjacent PDMS thin curing layers, namely the length of the micro channels is increased in the space direction, the mixture can be fully mixed, the mixing efficiency is high, the space of the micro cavities is large, and the mixing effect is improved.
2) The laminated passive micromixer increases the length of the microchannel in the space direction, can reduce the length dimension of the passive micromixer to the minimum, and does not increase the length of the microchannel by increasing the length dimension of the passive micromixer.
3) The laminated passive micro mixer improves the mixing efficiency by increasing the length of the micro channel, avoids expensive process equipment required by manufacturing the internal physical structure of the passive micro mixer by adopting an MEMS technology, and solves the problem that a micro-flow micro mixing unit is difficult to develop because no corresponding expensive equipment is available in the common laboratory research.
4) The laminated passive micro mixer has the advantages of simple structure, convenient process and low process cost.
Drawings
Fig. 1 is a schematic structural diagram of a stacked passive micromixer of example ;
fig. 2 is a schematic view of a structure in which the uppermost 2 PDMS thin cured layers in the stacked passive micromixer of example are connected;
fig. 3 is a schematic cross-sectional structure of fig. 2.
Detailed Description
The invention is described in further detail with reference to the following embodiments of the drawings.
Example :
the laminated passive micromixer proposed in this embodiment, as shown in the figure, it includes 6 PDMS (polydimethylsiloxane) thin cured layers 1 and 5 pieces of spacing paper sheets 2, wherein PDMS thin cured layers 1 are provided with channels 3 with two inlets and outlets through the upper and lower sides, the rest PDMS thin cured layers 1 are provided with channels 3 with inlets and outlets through the upper and lower sides, the laminated structure is formed by sequentially stacking PDMS thin cured layers 1 and pieces of spacing paper sheets 2 from bottom to top, the channels 3 on the two PDMS thin cured layers 1 with two inlets and outlets are uppermost in the laminated structure, the positions of the channels 3 on the two adjacent PDMS thin cured layers 1 are staggered, the spacing paper sheets 2 are located between the edges of the two adjacent PDMS thin cured layers 1, so that microcavity 4 are formed between the central regions of the two adjacent PDMS thin cured layers 1, the channels 3 on the two adjacent PDMS thin cured layers 1 are communicated through the microcavity 4, the peripheral walls of the two adjacent PDMS thin cured layers 1 are hermetically connected, the channels 3 on the uppermost PDMS thin cured layer 1 in the laminated structure are used as the inlet 51 and the outlet 52 of the PDMS thin cured layer, respectively, and the outlet 51 is led out of the PDMS thin cured layer (not shown in the inlet 51 and the outlet 52).
In the present embodiment, the channels 3 on the uppermost PDMS thin cured layer 1 in the stacked structure are Y-shaped channels, and the channels 3 on the remaining PDMS thin cured layers 1 are vertical through channels. Since two input ports 51 are required for the passive micromixer, the channel 3 on the uppermost PDMS thin cured layer 1 has two input ports, so that the channel 3 on the uppermost PDMS thin cured layer 1 can be designed into a Y-shaped structure, a T-shaped structure, or the like.
In the present embodiment, the pore diameter of the channel 3 on the PDMS thin cured layer 1 is 100 to 200 micrometers, and relatively speaking, the smaller the pore diameter of the channel 3, the better the mixing effect, and the pore diameter of the channel 3 can be designed to be 120 micrometers.
In this embodiment, the channels 3 of the thin cured PDMS layer 1 are located at corners of the thin cured PDMS layer 1, and the channels 3 of two adjacent thin cured PDMS layers 1 are diagonally staggered when stacked, and the channels 3 are located at corners of the thin cured PDMS layer 1, so that the two upper and lower channels 3 can be diagonally staggered when stacked, and the path formed by the two upper and lower channels 3 is the longest when diagonally staggered, for the best mixing effect.
In the present embodiment, the spacing paper sheet 2 is in a frame shape, and the spacing paper sheet 2 is disposed between the edges of two adjacent PDMS thin cured layers 1. in actual processing, a common a4 paper can be directly cut into pieces equal to the length and width of the PDMS thin cured layers 1, and then the middle portion of the piece is hollowed out to form the frame-shaped spacing paper sheet 2, and the hollowed-out portion is located between the central areas of two adjacent PDMS thin cured layers 1 to form the micro-cavity 4.
In the present embodiment, the width W of the frame edge of the spacing paper piece 2 is 1-2 mm, for example, 1.5 mm, and the width W of the frame edge of the spacing paper piece 2 is defined to maximize the volume of the micro-cavity 4.
In this embodiment, the outer peripheral walls of two adjacent PDMS thin cured layers 1 are coated with gel-state PDMS, and the gel-state PDMS is cured to form the sealing ring 6 to achieve sealing connection. The effect of sealing and connecting the peripheral walls of two adjacent PDMS thin solidified layers 1 by PDMS is optimal.
When the laminated passive micro mixer is used, microfluid to be mixed enters a sample through two input ports 51 respectively, the microfluid enters a 1 st micro cavity after passing through a 1 st channel, passive mixing is realized while transportation, the microfluid reaches a 2 nd micro cavity through a 2 nd channel, transportation and mixing are realized in each channel and each micro cavity, and finally, the microfluid is transported to a subsequent operation unit of a microfluidic analysis device through a 6 th channel to an output port 52 for microfluidic operation, so that microfluidic analysis is completed.
Example two:
this example proposes methods of making the stacked passive micromixer of example , which includes the steps of:
and , manufacturing a plurality of PDMS thin curing layers with the same size, wherein PDMS thin curing layers are provided with channels with two inlets and outlets in a penetrating manner from top to bottom, and the rest PDMS thin curing layers are provided with channels with inlets and outlets in a penetrating manner from top to bottom.
Here, the specific process of step is:
thin metal wires with the diameter of 100-200 microns are vertically placed in containers, uncured PDMS is poured into the containers, the containers are cured by using an incubator, the cured body is taken out, the thin metal wires are extracted, and finally the cured body is sliced according to the required size (such as the thickness of 1-2 mm) to obtain a plurality of PDMS thin cured layers with inlets and outlets, wherein the channels on the PDMS thin cured layers are located at the corner ends of .
The method comprises the steps of manufacturing a Y-shaped structure by using fine metal wires with the diameter of 100-200 micrometers, placing the manufactured metal wire structure in containers, pouring uncured PDMS into the containers to enable the height of the uncured PDMS to be the size (such as the thickness of 1-2 mm) required by the PDMS thin curing layer, curing by using a constant temperature box, taking out a cured body, and extracting the fine metal wires to obtain PDMS thin curing layers with two inlets and outlets, wherein the channels on the PDMS thin curing layer are located at the corner end .
And step two, manufacturing a plurality of frame-shaped interval paper sheets with the size equal to of the PDMS thin curing layer and the width of the frame edge of 1-2 mm.
And thirdly, sequentially aligning and stacking PDMS thin curing layers and pieces of spacing paper sheets from bottom to top, staggering the positions of the channels on the two adjacent PDMS thin curing layers, and enabling the spacing paper sheets to be positioned between the edges of the two adjacent PDMS thin curing layers to form a laminated structure, wherein the PDMS thin curing layers with two inlets and channels at the top in the laminated structure are communicated with the channels on the two adjacent PDMS thin curing layers through micro-cavities formed between the central areas of the two PDMS thin curing layers.
Step four: and coating gel-state PDMS between the peripheral walls of two adjacent PDMS thin curing layers, curing (the curing process can be realized by using a constant temperature box), and forming a sealing ring to realize sealing connection.
Step five: and taking two inlets of the channel on the topmost PDMS thin curing layer in the laminated structure as input ports and leading out the thin hoses, and taking an outlet of the channel on the bottommost PDMS thin curing layer in the laminated structure as an output port and leading out the thin hoses.

Claims (10)

  1. The laminated passive micromixer is characterized by comprising a plurality of PDMS thin cured layers and a plurality of spacing paper sheets, wherein channels with two inlets and outlets are arranged on PDMS thin cured layers in a penetrating manner from top to bottom, channels with inlets and outlets are arranged on the rest of the PDMS thin cured layers in a penetrating manner from top to bottom, a laminated structure is formed by sequentially stacking PDMS thin cured layers and spacing paper sheets from bottom to top, the uppermost PDMS thin cured layer in the laminated structure is the PDMS thin cured layer with the channels with the two inlets and the outlets, the positions of the channels on the two adjacent PDMS thin cured layers are staggered, the spacing paper sheets are positioned between the edges of the two adjacent PDMS thin cured layers, so that micro-cavities are formed between the central areas of the two adjacent PDMS thin cured layers, the channels on the two adjacent PDMS thin cured layers are communicated through the micro-cavities, the peripheral walls of the two adjacent PDMS thin cured layers are hermetically connected, the two inlets on the uppermost PDMS thin cured layers in the laminated structure are respectively used as the outlets of the PDMS thin cured layers in the PDMS thin structures below the PDMS outlets.
  2. 2. The laminated passive micromixer according to claim 1, wherein the channels on the uppermost PDMS thin cured layer in the laminated structure are T-shaped or Y-shaped channels, and the channels on the rest of PDMS thin cured layers are vertical through channels.
  3. 3. The laminated passive micromixer according to claim 2, wherein the pore size of the channels on the PDMS thin cured layer is 100-200 μm.
  4. 4. The stacked passive micromixer according to any of claims 1-3, wherein the channels in said thin cured layers of PDMS are located at the corner ends of said thin cured layers of PDMS, and when stacked, the channels in two adjacent thin cured layers of PDMS are diagonally offset.
  5. 5. The laminated passive micromixer according to claim 1, wherein said spacing paper sheet is in the form of frame, and said spacing paper sheet is placed between the edges of two adjacent said thin solidified layers of PDMS.
  6. 6. The laminated passive micromixer according to claim 5, wherein the width of the rim of said spacing paper sheet is 1-2 mm.
  7. 7. The laminated passive micromixer of claim 1, wherein the outer peripheral walls of two adjacent PDMS thin cured layers are coated with gel-state PDMS, which is cured to form a sealing ring for sealing connection.
  8. 8. The laminated passive micromixer of claim 1, wherein said input port and said output port have respective thin flexible tubes extending therefrom.
  9. The manufacturing method of the 9 and laminated passive micromixer is characterized by comprising the following steps:
    a step of manufacturing a plurality of PDMS thin curing layers with the same size, wherein PDMS thin curing layers are provided with channels with two inlets and outlets in a way of penetrating through the upper and lower parts, and the rest PDMS thin curing layers are provided with channels with inlets and outlets in a way of penetrating through the upper and lower parts;
    secondly, manufacturing a plurality of frame-shaped interval paper sheets with the size equal to of the PDMS thin curing layer and the width of the frame edge of 1-2 mm;
    stacking PDMS thin curing layers and pieces of spacing paper sheets in sequence from bottom to top in an aligned mode, enabling the positions of channels on two adjacent PDMS thin curing layers to be staggered, enabling the spacing paper sheets to be located between the edges of the two adjacent PDMS thin curing layers to form a laminated structure, wherein the PDMS thin curing layers with two inlets and channels on the top in the laminated structure are communicated with the channels on the two adjacent PDMS thin curing layers through micro-cavities formed between the central areas of the two PDMS thin curing layers;
    step four: coating gel-state PDMS between the peripheral walls of two adjacent PDMS thin curing layers, and curing to form a sealing ring to realize sealing connection;
    step five: and taking two inlets of the channel on the topmost PDMS thin curing layer in the laminated structure as input ports and leading out the thin hoses, and taking an outlet of the channel on the bottommost PDMS thin curing layer in the laminated structure as an output port and leading out the thin hoses.
  10. 10. The method for fabricating stacked passive micromixers as claimed in claim 9, wherein said step is specifically performed by:
    the method comprises the steps of vertically placing fine metal wires with the diameter of 100-200 micrometers in containers, pouring uncured PDMS into the containers, curing the PDMS by using a constant temperature box, taking out a cured body, extracting the fine metal wires, slicing the cured body according to the required size to obtain a PDMS thin cured layer with a plurality of channels with inlets and outlets, wherein the channels on the PDMS thin cured layer are located at corner ends;
    the method comprises the steps of manufacturing a T-shaped structure or a Y-shaped structure by using a fine metal wire with the diameter of 100-200 microns, placing the manufactured metal wire structure into containers, pouring uncured PDMS into the containers to enable the height of the uncured PDMS to be the size required by a PDMS thin curing layer, curing by using a constant temperature box, taking out a cured body, and extracting the fine metal wire to obtain PDMS thin curing layers with two inlets and outlets, wherein the channels on the PDMS thin curing layer are located at the corner end .
CN201910978675.6A 2019-10-15 Laminated passive micro-mixer and manufacturing method thereof Active CN110732275B (en)

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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19927556A1 (en) * 1999-06-16 2000-12-28 Inst Mikrotechnik Mainz Gmbh Static micro mixer for producing emulsions and gas-liquid dispersions has a housing with fluid inlets, a fluid outlet and plates stacked in the housing
US20040145967A1 (en) * 2001-05-28 2004-07-29 Yamatake Corporation Micro-mixer
KR20090089065A (en) * 2008-02-18 2009-08-21 주식회사 올메디쿠스 Vertical lamination micromixer
CN101708439A (en) * 2009-11-05 2010-05-19 浙江大学 Chaotic microfluidic chip mixer and mixing method thereof
CN102500266A (en) * 2011-11-04 2012-06-20 华中科技大学 Quick micro-mixing device for high-viscosity solution
CN205042493U (en) * 2015-08-25 2016-02-24 辽宁中医药大学 A micro -fluidic chip that is used for not having and is interrupted structure of switching over microfluid and has this structure
CN206743646U (en) * 2017-05-02 2017-12-12 奥士康精密电路（惠州）有限公司 A kind of PCB laminate structures for controlling lamination
CN207446126U (en) * 2017-09-11 2018-06-05 海南大学 A kind of passive type micro-mixer
CN108159975A (en) * 2017-12-29 2018-06-15 厦门大学 Stacked micro-mixer
CN109622954A (en) * 2017-08-30 2019-04-16 株式会社沙迪克 Styling apparatus is laminated and the manufacturing method of moulder is laminated

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19927556A1 (en) * 1999-06-16 2000-12-28 Inst Mikrotechnik Mainz Gmbh Static micro mixer for producing emulsions and gas-liquid dispersions has a housing with fluid inlets, a fluid outlet and plates stacked in the housing
US20040145967A1 (en) * 2001-05-28 2004-07-29 Yamatake Corporation Micro-mixer
KR20090089065A (en) * 2008-02-18 2009-08-21 주식회사 올메디쿠스 Vertical lamination micromixer
CN101708439A (en) * 2009-11-05 2010-05-19 浙江大学 Chaotic microfluidic chip mixer and mixing method thereof
CN102500266A (en) * 2011-11-04 2012-06-20 华中科技大学 Quick micro-mixing device for high-viscosity solution
CN205042493U (en) * 2015-08-25 2016-02-24 辽宁中医药大学 A micro -fluidic chip that is used for not having and is interrupted structure of switching over microfluid and has this structure
CN206743646U (en) * 2017-05-02 2017-12-12 奥士康精密电路（惠州）有限公司 A kind of PCB laminate structures for controlling lamination
CN109622954A (en) * 2017-08-30 2019-04-16 株式会社沙迪克 Styling apparatus is laminated and the manufacturing method of moulder is laminated
CN207446126U (en) * 2017-09-11 2018-06-05 海南大学 A kind of passive type micro-mixer
CN108159975A (en) * 2017-12-29 2018-06-15 厦门大学 Stacked micro-mixer

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