CN110702301A - Film vacuum gauge - Google Patents
Film vacuum gauge Download PDFInfo
- Publication number
- CN110702301A CN110702301A CN201911136987.9A CN201911136987A CN110702301A CN 110702301 A CN110702301 A CN 110702301A CN 201911136987 A CN201911136987 A CN 201911136987A CN 110702301 A CN110702301 A CN 110702301A
- Authority
- CN
- China
- Prior art keywords
- getter
- vacuum gauge
- reference pressure
- film vacuum
- electric heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005485 electric heating Methods 0.000 claims abstract description 23
- 238000010438 heat treatment Methods 0.000 claims abstract description 19
- 239000010409 thin film Substances 0.000 claims description 22
- 238000000034 method Methods 0.000 abstract description 8
- 230000008569 process Effects 0.000 abstract description 6
- 230000003213 activating effect Effects 0.000 abstract description 3
- 238000001514 detection method Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 8
- 230000008859 change Effects 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 230000032683 aging Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 230000002035 prolonged effect Effects 0.000 description 3
- 230000004913 activation Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention provides a film vacuum gauge, which belongs to the technical field of detection equipment and comprises the following components: a housing having a reference pressure chamber therein; one end of the lead extends into the reference pressure cavity of the shell, and the other end of the lead extends out of the shell; a getter suspended within the reference pressure chamber; an electric heating element is arranged in the getter, and two ends of the electric heating element are connected with the conducting wire. According to the film vacuum gauge, the getter is suspended in the reference pressure cavity, and the getter is not contacted with other parts in the process of activating and heating the getter, so that the problem of overhigh temperature of other parts in the process of heating the getter can be avoided; in addition, the electric heating element is arranged in the getter, so that the heat of the electric heating element directly acts on the getter, the heating efficiency of the getter is higher, and in addition, the electric heating element arranged in the getter can also play a supporting role on the getter.
Description
Technical Field
The invention relates to the technical field of detection equipment, in particular to a film vacuum gauge.
Background
A vacuum gauge is an instrument for measuring a degree of vacuum or a pressure of gas, and measures a pressure of gas by using a change in a physical effect of gas under different pressures. Vacuum gauges can be classified into three main categories, which are vacuum gauges utilizing mechanical properties, aerodynamic effects and charged particle effects, according to different physical mechanisms utilized by the vacuum gauge measurement principle.
The film vacuum gauge utilizes mechanical properties, the core component of the film vacuum gauge is a piece of diaphragm in a radial radiation tensile stress state, the diaphragm separates an external pressure test pressure cavity from a reference pressure cavity, the pressure value in the reference pressure cavity is constant, the change of the pressure in the test pressure cavity can generate the change of the pressure difference of the two cavities, the change of the pressure difference can cause the deviation of the diaphragm, the deviation of the diaphragm can generate the change of a capacitance value, and the corresponding relation of the capacitance and the pressure change is formed. Thus, the air pressure in the reference pressure chamber is the basis for the calculation, and the constancy of the air pressure value directly determines the life and accuracy of the differential pressure sensor.
At present, in order to maintain the set air pressure in the reference pressure cavity of the thin film vacuum gauge, an external heating type getter is usually placed in the reference pressure cavity to maintain vacuum, the getter is heated and baked before sealing to activate the getter, and circuit assembly and debugging are performed after activation. As shown in fig. 2, a thin film vacuum gauge in the prior art needs to be provided with a mounting hole for mounting a getter on a housing, and the mounting hole is communicated with a reference pressure chamber. The getter is arranged in the getter housing 8, and the getter housing 8 is installed on the installation hole and enables the getter to communicate with the reference pressure chamber. A heater 9 is arranged outside the getter housing, and when the getter is operated, heat on the heater 9 is transmitted to the getter through the getter housing 8, so that the getter is activated, and the pressure of the getter to the reference pressure cavity is adjusted.
However, in the above scheme, the temperature of the heater is at least above 450 ℃ when the getter is activated, so that the getter can exert the best effect, and in the activation time of the getter, the shell of the sensor can locally reach at least 250 ℃ due to the action of heat transfer (conduction, radiation and convection), so that a terminal of signal output and an electrode lead wire are influenced to a certain extent.
Disclosure of Invention
Therefore, the technical problem to be solved by the invention is to overcome the defect that the thin film vacuum gauge in the prior art is easy to cause the temperature of the shell of the sensor to be overhigh when the getter is activated, so that the thin film vacuum gauge capable of activating the getter at a lower temperature is provided.
In order to solve the above-mentioned technical problem, the present invention provides a thin film vacuum gauge comprising:
a housing having a reference pressure chamber therein;
one end of the lead extends into the reference pressure cavity of the shell, and the other end of the lead extends out of the shell;
a getter suspended within the reference pressure chamber; an electric heating element is arranged in the getter, and two ends of the electric heating element are connected with the conducting wire.
Preferably, the electric heating element is a heating wire or a heating sheet.
Preferably, the heating wire is in a shape of a spiral.
Preferably, the getter is uniformly spaced from the inner wall of the housing.
Preferably, the getter is suspended in the middle of the reference pressure chamber in the up-down direction.
Preferably, the wire is a rigid wire.
Preferably, the line extends outward away from the membrane inside the reference pressure chamber.
The technical scheme of the invention has the following advantages:
1. according to the film vacuum gauge provided by the invention, the getter is suspended in the reference pressure cavity, and the getter is not contacted with other parts in the process of activating and heating the getter, so that the problem of overhigh temperature of other parts in the process of heating the getter can be avoided; in addition, the electric heating element is arranged in the getter, so that the heat of the electric heating element directly acts on the getter, the heating efficiency of the getter is higher, and in addition, the electric heating element arranged in the getter can also play a supporting role on the getter.
2. According to the film vacuum gauge provided by the invention, the lead extends out of the shell, so that the adsorbent can be conveniently activated on line for multiple times in the use process, and the service life of the vacuum gauge can be prolonged or delayed by correcting the measurement precision of the reference pressure cavity for multiple times, so that the purchase cost of a product is greatly reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a front cross-sectional view of an embodiment of a thin film vacuum gauge provided in the present invention.
FIG. 2 is a front cross-sectional view of one embodiment of a prior art thin film vacuum gauge.
Description of reference numerals:
1. a housing; 2. a reference pressure chamber; 3. heating wires; 4. a wire; 5. a getter; 6. a film sheet; 7. a pressure test chamber; 8. a getter housing; 9. a heater.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
The embodiment provides a specific implementation mode of a thin film vacuum gauge, as shown in fig. 1, comprising a housing 1, wherein the housing 1 is divided into a reference pressure cavity 2 and a pressure test cavity 7, and a sealed interval is formed between the reference pressure cavity 2 and the pressure test cavity 7 through a thin film sheet 6.
A getter 5 is suspended inside the reference pressure cavity 2, an electric heating element is arranged inside the getter 5, and two ends of the electric heating element are connected with the lead 4. The lead wire 4 passes through the shell 1 from the reference pressure cavity 2, and the other end of the lead wire extends out of the shell 1; moreover, the lead 4 extends outwards in a direction away from the thin film sheet 6 inside the reference pressure chamber 2, so that the lead 4 can be conveniently electrified when the getter 5 is activated.
The lead 4 is a rigid lead, and the rigid lead refers to a hard wire, such as a single-core 2.5 square millimeter copper column or an alloy column, and has the advantages of easiness in shape maintenance and convenience in wiring. The getter 5 can be suspended in the reference pressure chamber 2 by connecting two connecting ends of the electric heating element externally wrapped with the getter 5 with the conducting wires respectively.
In addition, as an alternative embodiment, the lead 4 may also be a non-rigid member, and another rigid member may be further disposed in the reference pressure chamber 2, so that the getter 5 is connected to the rigid member to maintain the suspension fixation of the getter 5.
The electric heating element is a heating wire 3 which keeps a spiral shape, and the heating wire 3 is arranged in the getter 5, so that the getter 5 can be supported.
In addition, as an alternative embodiment, the electric heating element may also adopt other conventional electric heating elements besides the heating wire 3, such as an electric heating plate, an electric heating belt, an electric heating disc, and the like.
Application method
The film vacuum gauge of the embodiment has the problem of inaccurate test caused by aging in the using process. The online correction can be carried out on the vacuum gauge, so that the measurement precision of the vacuum gauge is restored to the original state, and the service life of the vacuum gauge is prolonged. Specifically, the heating wire 3 suspended in the reference pressure chamber 2 is heated by electrifying the lead 4 extending out of the housing 1, so that the getter 5 wrapped and connected outside the heating wire can be activated, and the reference pressure chamber 2 is kept in a preset vacuum condition and is restored to an original state.
The precision and the service life of the thin film vacuum gauge of the embodiment are verified by an accelerated aging method, and the thin film vacuum gauge is reactivated by the getter 5 after each aging, so that the measurement precision of the vacuum gauge is restored to the original state, and the measurement can be sequentially carried out five times. Therefore, the life of the thin film vacuum gauge of the embodiment can be prolonged to at least four times of the life of the original thin film vacuum gauge.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are intended to be within the scope of the invention.
Claims (7)
1. A thin film vacuum gauge, comprising:
a housing (1) having a reference pressure chamber (2) therein;
one end of the lead (4) extends into the reference pressure cavity (2) of the shell (1), and the other end of the lead extends out of the shell (1);
a getter (5) suspended within the reference pressure chamber (2); an electric heating element is arranged in the getter (5), and two ends of the electric heating element are connected with the conducting wire (4).
2. The thin film vacuum gauge according to claim 1, characterized in that the electric heating element is a heating wire (3) or a heating sheet.
3. The thin film vacuum gauge according to claim 2, characterized in that the heating wire (3) is in a shape of a holding helix.
4. The thin film vacuum gauge according to claim 1, wherein the getter (5) is uniformly spaced from the inner wall of the housing (1).
5. The thin film vacuum gauge according to claim 1, characterized in that the getter (5) is suspended in the middle of the reference pressure chamber (2) in the up-down direction.
6. The thin film vacuum gauge according to claim 1, characterized in that the wire (4) is a rigid wire.
7. The thin-film vacuum gauge according to claim 1, characterized in that the wire (4) projects outwards away from the thin-film piece (6) inside the reference pressure chamber (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911136987.9A CN110702301B (en) | 2019-11-19 | 2019-11-19 | Film vacuum gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911136987.9A CN110702301B (en) | 2019-11-19 | 2019-11-19 | Film vacuum gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110702301A true CN110702301A (en) | 2020-01-17 |
| CN110702301B CN110702301B (en) | 2024-11-01 |
Family
ID=69207335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911136987.9A Active CN110702301B (en) | 2019-11-19 | 2019-11-19 | Film vacuum gauge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110702301B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114001858A (en) * | 2020-07-28 | 2022-02-01 | 中微半导体设备(上海)股份有限公司 | Capacitance type film vacuum gauge, plasma reaction device and film preparation method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5920015A (en) * | 1994-04-14 | 1999-07-06 | Cecap Ab | Pressure sensor with capacitor electrodes and shield layer parallel thereto |
| US20030110865A1 (en) * | 1997-02-20 | 2003-06-19 | Staffan Johsson | Method of producing an integrated reference pressure sensor element |
| US6591687B1 (en) * | 1997-12-23 | 2003-07-15 | Inficon Gmbh | Capacitive vacuum measuring cell |
| US20090158853A1 (en) * | 2007-12-20 | 2009-06-25 | Walter Christian Berner | Diaphragm pressure measuring cell arrangement |
| US20100066380A1 (en) * | 2006-12-06 | 2010-03-18 | Wolfram Knapp | Electron source for a vacuum pressure measuring device |
| CN107843384A (en) * | 2016-09-19 | 2018-03-27 | 中国科学院微电子研究所 | Vacuum gauge tube for quartz film sheet |
| CN107843385A (en) * | 2016-09-19 | 2018-03-27 | 中国科学院微电子研究所 | Aluminum oxide film vacuum gauge pipe |
| CN210603717U (en) * | 2019-11-19 | 2020-05-22 | 川北真空科技(北京)有限公司 | Film vacuum gauge |
-
2019
- 2019-11-19 CN CN201911136987.9A patent/CN110702301B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5920015A (en) * | 1994-04-14 | 1999-07-06 | Cecap Ab | Pressure sensor with capacitor electrodes and shield layer parallel thereto |
| US20030110865A1 (en) * | 1997-02-20 | 2003-06-19 | Staffan Johsson | Method of producing an integrated reference pressure sensor element |
| US6591687B1 (en) * | 1997-12-23 | 2003-07-15 | Inficon Gmbh | Capacitive vacuum measuring cell |
| US20100066380A1 (en) * | 2006-12-06 | 2010-03-18 | Wolfram Knapp | Electron source for a vacuum pressure measuring device |
| US20090158853A1 (en) * | 2007-12-20 | 2009-06-25 | Walter Christian Berner | Diaphragm pressure measuring cell arrangement |
| CN107843384A (en) * | 2016-09-19 | 2018-03-27 | 中国科学院微电子研究所 | Vacuum gauge tube for quartz film sheet |
| CN107843385A (en) * | 2016-09-19 | 2018-03-27 | 中国科学院微电子研究所 | Aluminum oxide film vacuum gauge pipe |
| CN210603717U (en) * | 2019-11-19 | 2020-05-22 | 川北真空科技(北京)有限公司 | Film vacuum gauge |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114001858A (en) * | 2020-07-28 | 2022-02-01 | 中微半导体设备(上海)股份有限公司 | Capacitance type film vacuum gauge, plasma reaction device and film preparation method |
| CN114001858B (en) * | 2020-07-28 | 2024-04-05 | 中微半导体设备(上海)股份有限公司 | Capacitive film vacuum gauge, plasma reaction device and film preparation method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110702301B (en) | 2024-11-01 |
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