CN110695807A - Method for uniformly removing extra material - Google Patents

Method for uniformly removing extra material Download PDF

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CN110695807A
CN110695807A CN201910988698.5A CN201910988698A CN110695807A CN 110695807 A CN110695807 A CN 110695807A CN 201910988698 A CN201910988698 A CN 201910988698A CN 110695807 A CN110695807 A CN 110695807A
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fairing
parameter combinations
optical element
selecting
processing
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CN110695807B (en
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宋辞
石峰
田野
薛帅
林之凡
雍嘉浩
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National University of Defense Technology
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/0031—Machines having several working posts; Feeding and manipulating devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/006—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the speed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent

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  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

The invention discloses a method for uniformly removing extra materials, which comprises the following steps: (1) measuring the surface shape of an optical element to be processed; (2) selecting no more than five groups of fairing parameter combinations from a preset fairing function library to form a to-be-selected processing scheme according to the measurement result of the surface shape of the optical element to be processed, optimally calculating the minimum root mean square error value of the extra material removal amount of each to-be-selected processing scheme, selecting the minimum value from all the optimal calculation results, and outputting the fairing parameter combinations in the to-be-selected processing scheme corresponding to the value and the fairing time of each group of fairing parameter combinations; (3) and (3) smoothing the optical element to be processed by adopting the smoothing parameter combination selected in the step (2) and the smoothing time of each smoothing parameter combination. The method has simple process flow and strong operability, is based on combined fairing, and can ensure that the surface shape of the optical element is not damaged while the intermediate frequency error of the optical element after fairing is converged.

Description

Method for uniformly removing extra material
Technical Field
The invention belongs to the technical field of optical part polishing, relates to a shape-preserving fairing method for an optical element, and particularly relates to a method for uniformly removing extra materials.
Background
The control process of the different frequency band errors of the optical element is different, the low-frequency error mainly depends on the shape modification process of the small-size removal function, and different material removal is realized by generally controlling the residence time of the removal function at different positions. The control of the high-frequency error is mainly completed by means of an ultra-smooth processing technology, and the principle is that the atomic-scale material removal is realized by utilizing the interface chemical reaction between the nano abrasive and the surface of the workpiece. For the medium frequency error component on the optical element, the medium frequency error is inhibited mainly by means of a fairing process and a fairing function.
The fairing action is that a fairing disc with specific rigidity is used to generate pressure difference on an optical mirror surface, so that the removal efficiency of high-point materials and low-point materials on the mirror surface is different, and further intermediate frequency errors are converged. The mid-frequency error here refers to the front 36 Zernike (Zernike) polynomial residuals of the mirror.
In order to maintain the profile of the optical element, it is required to maintain a uniform amount of extra material removal in the fairing process. The extra material removal amount herein refers to a material removal amount excluding the medium frequency error removal amount from the total removal amount of the fairing material. The uniformity of the removal of the extra material is difficult to ensure by using a single fairing parameter, which can damage the surface shape of the optical element.
For the medium frequency error component of the optical element, there are two approaches to convergence in the prior art, the first is to use a removal function with a size smaller than the error period to perform shape modification, and the representative processing method is ion beam shape modification, but this method has high requirements on the positioning accuracy and dynamic performance of the machine tool, and the higher the frequency of the error is, the more difficult it is to implement. The other method is to introduce a smoothing process, the smoothing effect of a polishing disc is utilized to inhibit intermediate frequency errors, and the smoothing process can be divided into a small grinding head smoothing process, a stress disc smoothing process, a semi-rigid disc smoothing process and the like based on different tools. The main problem of the small grinding head is that the larger the size of the polishing disk is, the stronger the polishing disk can correct the intermediate frequency error, but the greater the degree of incompatibility of the polishing disk and the optical mirror surface is, and the intermediate frequency error can be worsened. Although the stress disc has excellent capability of inhibiting the intermediate frequency error, the capability of correcting the local error is not as good as that of a small grinding head, the surface shape precision is not easy to guarantee, and meanwhile, the structure and the process are more complex, and the manufacturing cost is higher. The semi-rigid disk fairing process has greatly reduced integral rigidity of the polishing disk owing to the flexible interlayer, so that the semi-rigid disk may exhibit powerful surface shape adaptability during machining aspheric surface, and the semi-rigid disk has relatively large relative size and may be used even in machining aspheric surface with full-caliber semi-rigid disk. The existing semi-rigid disc fairing process has the defects that the uniformity of removing extra materials is difficult to ensure, the surface shape of an optical element is damaged, and the like.
Disclosure of Invention
The technical problem to be solved by the invention is to overcome the defects of the prior art, and provide a method for uniformly removing extra materials with simple process flow and strong operability.
In order to solve the technical problems, the invention adopts the technical scheme that:
a method for uniformly removing extraneous material, comprising the steps of:
(1) measuring the surface shape of an optical element to be processed;
(2) selecting no more than five groups of fairing parameter combinations from a preset fairing function library to form a processing scheme to be selected according to the measurement result of the surface shape of the optical element to be processed, optimally calculating the minimum root mean square error value of the extra material removal amount of each processing scheme to be selected and fairing processing time corresponding to each group of fairing parameter combinations in each processing scheme to be selected, selecting the minimum value from all the minimum root mean square error values obtained by optimal calculation, and outputting the fairing parameter combinations in the processing scheme to be selected corresponding to the result and the fairing time corresponding to each group of fairing parameter combinations; the preset fairing function library comprises a plurality of sets of fairing parameter combinations and each set of lightThe fairing parameter combination of each group comprises the rotating speed ratio of the fairing disc and the workpiece to be processed and the feeding range center f of the fairing discz1And a feed range size fz2；
(3) And (3) smoothing the optical element to be processed by adopting the smoothing parameter combination selected in the step (2) and the smoothing time corresponding to each smoothing parameter combination.
The method for uniformly removing the extra material preferably further comprises, before the step (2), a step of establishing a library of fairing removal functions, wherein the detailed steps comprise: and performing fairing processing on the test optical element by adopting a fairing disc, and establishing a fairing removal function library which is processed by adopting different sets of fairing parameter combinations, wherein the fairing removal function library comprises a plurality of sets of fairing parameter combinations, fairing processing time t corresponding to each set of fairing parameter combinations and the obtained fairing removal function.
In the method for uniformly removing the extra material, preferably, the specific step of establishing a fairing removal function library which is processed by adopting different sets of fairing parameter combinations includes:
s1, determining the processing parameters, setting the rotation speed ratio of the fairing disc and the optical element to be tested, and setting the center f of the feeding range of the fairing discz1And a feed range size fz2The value range of (a);
s2, measuring the initial surface shape of the test optical element;
s3, using the rotation speed ratio of the special fairing disc and the tested optical element, the feed range center f of the fairing discz1And a feed range size fz2Performing fairing processing on the tested optical element as a group of fairing parameters, and measuring the surface shape of the optical element obtained after the fairing processing;
s4, differentiating the surface shape of the optical element after fairing processing with the initial surface shape to obtain a fairing processing removal function under specific parameters;
s5, changing the fairing parameters, and repeating the steps S1-S4 until a fairing removal function library of all the fairing parameter combinations is established.
In the method for uniformly removing the extra material, preferably, in the step (2), the flow of the optimization calculation includes:
①, selecting any one group of fairing parameter combinations from a preset fairing removal function library, optimally calculating the minimum RMS error of the extra material removal amount of the processing scheme formed by each group of fairing parameter combinations, and selecting a least square solution S1;
②, selecting any two sets of fairing parameter combinations from a preset fairing removal function library, optimally calculating the minimum RMS error of the extra material removal amount of the combined processing scheme formed by any two sets of fairing parameter combinations, and selecting a least square solution S2;
③, selecting any three sets of fairing parameter combinations from a preset fairing removal function library, optimally calculating the minimum RMS error of the extra material removal amount of the combined processing scheme formed by any three sets of fairing parameter combinations, and selecting a least square solution S3;
④, selecting any four sets of fairing parameter combinations from a preset fairing removal function library, optimally calculating the minimum RMS error of the extra material removal amount of the combined processing scheme formed by any four sets of fairing parameter combinations, and selecting a least square solution S4;
⑤, selecting any five groups of fairing parameter combinations from a preset fairing removal function library, optimally calculating the minimum RMS error of the extra material removal amount of the combined processing scheme formed by any five groups of fairing parameter combinations, and selecting a least square solution S5;
⑥ selects the minimum value from S1, S2, S3, S4 and S5, and outputs the fairing parameter combination result corresponding to the value and the fairing processing time distribution corresponding to each fairing parameter.
In the above method for uniformly removing the extra material, preferably, the flow of the optimization calculation is as follows:
selecting any three groups of fairing parameter combinations from a preset fairing removal function library, optimally calculating the minimum RMS error of the extra material removal amount of a combined processing scheme formed by any three groups of fairing parameter combinations, selecting a least square solution, and outputting fairing parameter combination results corresponding to the value and fairing processing time distribution corresponding to each group of fairing parameters.
In the method for uniformly removing the additional material, preferably, in the process of establishing the fairing removal function library, the rotating speed ratio of the fairing disc to the workpiece to be processed ranges from-2 to 2;
the center f of the feeding range of the fairing discz1The value range is 0.1-0.3 of the size of the workpiece;
the size of the feeding range fz2The value range is 0.1-0.35 of the size of the workpiece.
Compared with the prior art, the invention has the advantages that:
1. the method of the invention optimizes the processing technology by taking the uniform extra material removal amount as a target on the basis of establishing the fairing removal function library, selects a proper processing parameter combination and reasonably distributes the processing time through calculation, achieves the effect of uniformly removing extra materials, and overcomes the defect that the surface shape of an optical element is easy to damage in the existing single fairing processing.
2. The method has the advantages of simple process flow, strong operability and applicability, and capability of keeping the surface shape of the optical element while converging the intermediate frequency error of the optical element.
Drawings
Fig. 1 is a basic schematic diagram of a combined fairing using three sets of fairing processing parameters in an embodiment of the present invention.
FIG. 2 is a schematic diagram of the parameters of the smoothing process according to the embodiment of the present invention.
FIG. 3 is a schematic view of a smoothing apparatus according to an embodiment of the present invention.
FIG. 4 is an image of a removal function for a particular process parameter in an embodiment of the present invention.
Fig. 5, 6 and 7 are graphs of the smoothing removal function library in the embodiment of the present invention.
FIG. 8 is a graph of valid data points in an embodiment of the present invention.
Fig. 9(a) and 9(b) are surface diagrams before and after the fairing process, respectively, in an embodiment of the present invention.
FIG. 10 is a graph comparing the mid-frequency error before and after smoothing processing in the embodiment of the present invention.
Detailed Description
The invention will be described in further detail below with reference to the drawings and specific examples.
A method for uniform removal of extraneous material based on combined fairing comprising the steps of:
1. selecting smooth processing parameters:
as shown in fig. 2, the diameter of the fairing disc is 60mm, the diameter of the circular mirror surface of the workpiece is 100mm, the fairing pressure P is 20kPa, and the rotation speed ω of the mirror surface ismAt-32 rpm, smooth disc speed ωpAnd mirror surface rotating speed omegamThe ratio is called the rotation speed ratio wrAnd the range is-2 to 2, and the rotating speed directions of the fairing disc and the mirror surface are the same or opposite. Absolute value | ω of feed speed v and mirror surface rotation speed of fairing discmThe ratio of |, called the relative feeding speed of the fairing disc, is 15mm/r, fzIndicating the feed range of the smoothing disc, fz1Representing the center of the feeding range, and the value is 10 mm-30 mm, fz2The feeding range is 10 mm-35 mm. t represents the fairing time. At a set speed ratio wrIn the range of-2 to 2, fz1In the range of 10mm to 30mm, fz2The processing parameters are selected within the parameter range of 10 mm-35 mm.
In the fairing process, the fairing disc and the circular mirror surface rotate around respective centers, and the fairing disc makes a back-and-forth linear feeding motion along the diameter direction of the circular mirror surface, in the figure 2, a dotted line is the left limit position of the fairing disc, a solid line is the right limit position of the fairing disc, and the distance between the centers of the two limit positions and the center of a workpiece (namely the circular mirror surface) is fz1，fz1Generally taking 0.1-0.3 of the size of a workpiece; the distance between the centers of the two extreme positions of the fairing discs is fz2，fz2Generally taking the size of a workpiece to be 0.1-0.35; when the workpiece is circular, the workpiece size refers to the diameter, and when the workpiece is non-circular, the workpiece size refers to the maximum inscribed circle diameter.
When the workpiece is a circular mirror surface, the diameter dp of the fairing disc is usually 0.6-0.8 times of the diameter dm of the workpiece, and the maximum diameter is not more than 150 mm.
2. Selecting elements with the same material and the same size as test elements for establishing a fairing removal function library, and measuring the initial surface shape of the optical element;
3. smoothing processing is carried out by adopting the selected processing parameters;
starting the machine tool according to the processing parameters selected in the step 1 to carry out fairing work, as shown in fig. 3, dripping cerium oxide polishing solution on the optical mirror surface, feeding the flexible passive adaptive fairing disc back and forth along the radius of the mirror surface while rotating, and simultaneously rotating the mirror surface on the turntable, wherein the rotation direction of the mirror surface is opposite to the rotation direction of the fairing disc.
4. Measuring the surface shape of the optical element after fairing processing;
5. differentiating the surface shape of the optical element after fairing processing with the initial surface shape to obtain a fairing processing removal function under specific parameters, for example, when the specific parameters are parameters corresponding to the number 5 in the table, the obtained removal function is shown in fig. 4;
6. repeating the steps (1) to (5), and establishing a fairing removal function library under different processing parameters, wherein the function library comprises wr、fz1、fz2T, the correspondence of the material removal function to the material removal radial section, as shown in FIGS. 5-7;
7. measuring the surface shape of the optical element to be processed, wherein the optical element to be processed has the same size and material as the test element;
8. and performing optimization calculation by taking uniform extra material removal (namely, the root mean square error of the extra material removal amount is minimum) as a target, and selecting an optimal fairing parameter combination from the fairing removal function library according to a calculation result.
The minimum Root Mean Square (RMS) error of the extra material removal is the optimization objective:
Figure BDA0002237537210000051
wherein M issTarget value, M, representing the amount of extraneous material removedlRepresenting the actual amount of additional material removed for a given combined smoothing parameter processing recipe, n1 represents MlNumber of valid data points, e.g.As shown in fig. 8.
If each set of the fairing parameters in the fairing removal function library is regarded as an element, each set of fairing parameters comprises fz1、fz2And wr. All the fairing parameters can be expressed as:
PARA＝{para1,para2,…,paran2} (2)
wherein n2 is the number of sets of the optical compliance parameters in the optical compliance removal function library, preferably 16-32 sets, and 24 sets in the embodiment. Similarly, all fairing times can also be expressed as:
T＝{t1,t2,…,tn2} (3)
regarding the fairing process as a mapping f, the material removal rates corresponding to all fairing parameters form a value range of the set PARA under the mapping f, which can be expressed as:
f(PARA)＝{f(para1),f(para2),…,f(paran2)}＝{f1,f2,…,fn2} (4)
selecting any group of parameters from the fairing removal function library for combination, wherein the total combination quantity is as follows:
Figure BDA0002237537210000052
because excessive parameter combinations are used in the one-time fairing process, the continuity and the stability of processing are not facilitated, the number of the fairing parameter combinations is limited not to exceed 5, and the number of the combinations is reduced to
Figure BDA0002237537210000053
And (4) respectively. Substituting equations (3) and (4) into equation (1), the optimization problem is:
Figure BDA0002237537210000054
selecting no more than 5 elements (each element corresponding to a fairing parameter combination) in the set PARA, considering their linear combination of images in f (PARA), and solving for corresponding fairingX isjIn all combinations, the solution that minimizes the RMS value of the material removal is the final desired result. The optimization calculation process comprises the following steps: according to the measurement result of the surface shape of the optical element to be processed, no more than 5 elements are selected from a preset fairing function library set PARA to be combined to form a processing scheme to be selected, the minimum root mean square error value of the extra material removal amount of each processing scheme to be selected is optimized and calculated (the fairing processing time corresponding to each element in the processing scheme can be obtained when the minimum root mean square error value of each extra material removal amount is obtained through optimization and calculation), the minimum value is selected from the minimum root mean square error values of the extra material removal amounts obtained through optimization and the fairing parameter combinations corresponding to the result and the fairing time corresponding to each set of fairing parameter combinations are output.
The optimization calculation process can be divided into two steps: the first step is to optimally calculate the minimum root mean square error value of the removal amount of the additional material of each processing scheme to be selected. For each processing scheme to be selected, linear combinations of images of all fairing parameter combinations in f (PARA) in the processing scheme are considered, and fairing processing time x corresponding to each fairing parameter combination is solvedjAnd on the premise that the fairing processing time is not a negative value, the fairing time corresponding to each fairing parameter combination is obtained, so that the root mean square error value of the extra material removal amount is minimum, and the value is used as the minimum root mean square error of the to-be-selected processing scheme. And secondly, selecting the minimum value from the minimum root mean square error values obtained by all the processing schemes to be selected, and outputting the fairing parameter combination corresponding to the result and the fairing time corresponding to each group of fairing parameter combinations.
More specifically, for a combination scheme composed of no more than 5 elements, the calculation flow is as follows: firstly, selecting one element from n2 elements in the fairing removal function library, and optimally calculating the minimum Root Mean Square (RMS) error of the removal amount of the additional materials corresponding to different elements according to the formula (6), wherein the minimum RMS error is counted in totalSelecting a least square solution S1 as a seed result; after all elements are calculated, n2 elements in the function library are removed from the fairingOptionally selecting two elements, and optimally calculating the minimum Root Mean Square (RMS) error of the removal amount of the additional materials of the combined processing of the two different elements according to the formula (6), wherein the minimum RMS error is always calculatedSelecting a least square solution S2 as a seed result; after all elements are calculated, three elements are selected from n2 elements in the fairing removal function library, and the minimum Root Mean Square (RMS) error of the removal amount of the extra material under different three-element combinations is calculated according to the formula (6) in an optimized mannerSelecting a least square solution S3 as a seed result; after all elements are calculated, selecting four elements from n2 elements in the fairing removal function library, and optimally calculating the minimum Root Mean Square (RMS) error of the removal amount of the extra material under different four-element combinations according to a formula (6), wherein the minimum RMS error is always counted
Figure BDA0002237537210000064
Selecting a least square solution S4 as a seed result; after all elements are calculated, five elements are selected from n2 elements in the fairing removal function library, and the minimum Root Mean Square (RMS) error of the extra material removal amount under different five-element combinations is calculated according to the formula (6) in an optimized manner, wherein the minimum RMS error is always calculated
Figure BDA0002237537210000065
Selecting a least square solution S5 as a seed result; and finally, selecting the minimum value from S1, S2, S3, S4 and S5, and outputting a fairing parameter combination result corresponding to the value and fairing processing time distribution corresponding to each set of fairing parameters.
A large amount of data verification shows that the optimal effect is achieved when the three elements are selected for combined processing, not only can uniform removal be avoided when too few elements are taken out, but also the phenomenon that too many processing techniques are too complicated and the continuity and stability of processing are affected due to too many processing techniques can be avoided. The calculation flow is as follows: selecting three elements from n2 elements in the fairing removal function library, and optimally calculating different three elements according to a formula (6)Minimum Root Mean Square (RMS) error of the amount of additional material removed under the combination of elements totaledAs a result, from the obtained
Figure BDA0002237537210000072
And selecting a least square solution S from the seed result, and outputting three groups of fairing parameter combinations corresponding to the value and fairing processing time distribution corresponding to each group of fairing parameters. Aiming at the selected optical element to be processed, the finally determined processing scheme is that the fairing parameter of the number 11 is firstly selected for processing for 41.5min, and then the number 5 and the number 8 are sequentially selected for processing for 6.0min and 59.9min respectively.
9. And (4) adopting the optimal fairing combination parameters obtained in the step (8) to carry out fairing processing. The surface shapes of the optical elements before and after fairing are the same as those shown in fig. 9, and fig. 9 shows that the surface shapes of the optical elements before and after fairing are basically unchanged, and the surface shape precision is not damaged. The intermediate frequency error is shown in fig. 10. Fig. 10 shows that the intermediate frequency error before and after fairing is obviously reduced on the whole, which indicates that the process method has excellent capability of inhibiting the intermediate frequency error.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make numerous possible variations and modifications to the present invention, or modify equivalent embodiments to equivalent variations, without departing from the scope of the invention, using the teachings disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical spirit of the present invention should fall within the protection scope of the technical scheme of the present invention, unless the technical spirit of the present invention departs from the content of the technical scheme of the present invention.

Claims (7)

1. A method for uniformly removing extraneous material, comprising the steps of:
(1) measuring the surface shape of an optical element to be processed;
(2) for the measurement of the surface profile of the optical element to be machinedSelecting no more than five groups of fairing parameter combinations from a fairing function library to form a processing scheme to be selected, optimally calculating the minimum root mean square error value of the extra material removal amount of each processing scheme to be selected and fairing processing time corresponding to each group of fairing parameter combinations in each processing scheme to be selected, then selecting the minimum value from all the minimum root mean square error values obtained by optimal calculation, and outputting the fairing parameter combinations in the processing scheme to be selected corresponding to the result and the fairing time corresponding to each group of fairing parameter combinations; the preset fairing function library comprises a plurality of sets of fairing parameter combinations and mapping relations among fairing removing functions corresponding to the sets of fairing parameter combinations, and each set of fairing parameter combination comprises a rotating speed ratio of a fairing disc and a workpiece to be processed and a feeding range center f of the fairing discz1And a feed range size fz2；
(3) And (3) smoothing the optical element to be processed by adopting the smoothing parameter combination selected in the step (2) and the smoothing time corresponding to each smoothing parameter combination.
2. The method for uniformly removing extraneous material according to claim 1, further comprising, before the step (2), the step of creating a library of fairing removal functions, the detailed steps comprising: and performing fairing processing on the test optical element by adopting a fairing disc, and establishing a fairing removal function library which is processed by adopting different sets of fairing parameter combinations, wherein the fairing removal function library comprises a plurality of sets of fairing parameter combinations, fairing processing time t corresponding to each set of fairing parameter combinations and the obtained fairing removal function.
3. The method of uniformly removing extraneous material according to claim 2, wherein said step of creating a library of fairing removal functions for processing using different sets of fairing parameter combinations comprises:
s1, determining the processing parameters, setting the rotation speed ratio of the fairing disc and the optical element to be tested, and setting the center f of the feeding range of the fairing discz1And a feed range size fz2The value range of (a);
s2, measuring the initial surface shape of the test optical element;
s3, using the rotation speed ratio of the special fairing disc and the tested optical element, the feed range center f of the fairing discz1And a feed range size fz2Performing fairing processing on the tested optical element as a group of fairing parameters, and measuring the surface shape of the optical element obtained after the fairing processing;
s4, differentiating the surface shape of the optical element after fairing processing with the initial surface shape to obtain a fairing processing removal function under specific parameters;
s5, changing the fairing parameters, and repeating the steps S1-S4 until a fairing removal function library of all the fairing parameter combinations is established.
4. The method for uniformly removing the extra material according to any one of claims 1 to 3, wherein in the step (2), the flow of the optimization calculation comprises:
①, selecting any one group of fairing parameter combinations from a preset fairing removal function library, optimally calculating the minimum RMS error of the extra material removal amount of the processing scheme formed by each group of fairing parameter combinations, and selecting a least square solution S1;
②, selecting any two sets of fairing parameter combinations from a preset fairing removal function library, optimally calculating the minimum RMS error of the extra material removal amount of the combined processing scheme formed by any two sets of fairing parameter combinations, and selecting a least square solution S2;
③, selecting any three sets of fairing parameter combinations from a preset fairing removal function library, optimally calculating the minimum RMS error of the extra material removal amount of the combined processing scheme formed by any three sets of fairing parameter combinations, and selecting a least square solution S3;
④, selecting any four sets of fairing parameter combinations from a preset fairing removal function library, optimally calculating the minimum RMS error of the extra material removal amount of the combined processing scheme formed by any four sets of fairing parameter combinations, and selecting a least square solution S4;
⑤, selecting any five groups of fairing parameter combinations from a preset fairing removal function library, optimally calculating the minimum RMS error of the extra material removal amount of the combined processing scheme formed by any five groups of fairing parameter combinations, and selecting a least square solution S5;
⑥ selects the minimum value from S1, S2, S3, S4 and S5, and outputs the fairing parameter combination result corresponding to the value and the fairing processing time distribution corresponding to each fairing parameter.
5. The method for uniformly removing additional material as claimed in claim 4, wherein the flow of said optimization calculation is:
selecting any three groups of fairing parameter combinations from a preset fairing removal function library, optimally calculating the minimum RMS error of the extra material removal amount of a combined processing scheme formed by any three groups of fairing parameter combinations, selecting a least square solution, and outputting fairing parameter combination results corresponding to the value and fairing processing time distribution corresponding to each group of fairing parameters.
6. The method for uniformly removing the extra material according to claim 2 or 3, wherein in the process of establishing the fairing removal function library, the rotating speed ratio of the fairing disc to the workpiece to be processed is in the range of-2 to 2;
the center f of the feeding range of the fairing discz1The value range is 0.1-0.3 of the size of the workpiece;
the size of the feeding range fz2The value range is 0.1-0.35 of the size of the workpiece.
7. The method of uniform removal of excess material as in claim 3, wherein the test optical element has the same dimensions as the optical element to be processed.
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