CN110687327A - Probe selection system and method - Google Patents
Probe selection system and method Download PDFInfo
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- CN110687327A CN110687327A CN201810730474.XA CN201810730474A CN110687327A CN 110687327 A CN110687327 A CN 110687327A CN 201810730474 A CN201810730474 A CN 201810730474A CN 110687327 A CN110687327 A CN 110687327A
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- probe
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07392—Multiple probes manipulating each probe element or tip individually
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Abstract
The invention discloses a probe selection system and a probe selection method, wherein the system comprises a micro control unit, an array switch, a four-probe scanning tunnel microscope, a current meter and a voltmeter; the array switch is respectively and electrically connected with the output end of the four-probe scanning tunnel microscope, the input/output end of the ammeter and the input/output end of the voltmeter, and the micro control unit is electrically connected with the array switch and controls the array switch to act so as to realize the selection of the probes through the switching of the array switch and realize the circuit switching of the four-probe transport test system; through the control of the control software, the probe circuit can be switched quickly and effectively, and the measurement stability is improved.
Description
Technical Field
The invention belongs to the field of transport test equipment, and particularly relates to a probe selection system and a probe selection method for transport test.
Background
With the rapid development of semiconductor technology, the degree of integration is becoming higher and higher, the circuit size in electronic devices is becoming smaller and smaller, the line width has been reduced from micron level to submicron level, the performance of many electronic devices is affected by the resistivity of semiconductor material, and by measuring the resistivity of semiconductor material, not only can the information such as the doping concentration of the material be obtained, but also other important performances of the device can be known. Therefore, the resistivity of the semiconductor material in the device must be very accurate, especially the micro-area sheet resistance, and its uniformity and electrical characteristics have received much attention, and most important parameters in the device have a close relationship with the sheet resistance.
Compared with a semiconductor material, the sheet resistance is smaller and the material is fragile, the existing Four-Probe resistance test equipment cannot meet the measurement requirement, the traditional Four-Probe conductivity tester can measure the micro-area sheet resistance, but the measurement range is generally millimeter magnitude, and the main means for measuring the micro-scale or even nanometer micro-area resistance is a Four-Probe Scanning Tunneling microscope (4P-STM for short). The four-probe Scanning tunnel Microscope adopts an ultra-fine STM (Scanning Electron Microscope) tip as an electrode, and uses an SEM (Scanning Electron Microscope) to carry out accurate positioning, so that the measurement of the resistance of a single domain region and a multi-domain region of a single crystal film can be realized.
Currently, a transport test system of 4P-STM generally uses a dual electrical measurement combination method, as shown in fig. 1, two test electrodes are selected as input voltage or current, and the other two test electrodes are selected as output voltage or current. The double electrical measurement combination method is based on the thin layer principle, does not need size correction, and is more suitable for resistance measurement of small-size thin layer samples, but because the 4P-STM tests micro-area resistance, signals are very weak, and the double electrical measurement combination method needs to frequently exchange the input and output functions of voltage or current of electrodes in the test process, so that tests of different point positions and directions are performed. This operation of frequently switching the circuit connection is not only very inconvenient, but also affects the stability of the measurement. At present, the main method for solving the problem is to design a circuit switching circuit, realize automatic switching of circuit connection by matching with a data acquisition card, and usually adopt a silicon controlled rectifier as a switch, but the silicon controlled rectifier as the switch has the problem of closing leakage current crosstalk.
Disclosure of Invention
The present invention provides a probe selection system and method for controlling the programmed switching, selection and pairing of probe electrodes.
In order to achieve the purpose, the invention adopts the following technical scheme:
in one general aspect, there is provided a probe selection system comprising a micro control unit, an array switch, a four-probe scanning tunneling microscope, an ammeter, and a voltmeter; array switch one end with four output electric connection of four probe scanning tunnel microscope, the other end with four test end electric connection of four probe scanning tunnel microscope, four output of four probe scanning tunnel microscope respectively with four probe electric connection, four test end of four probe scanning tunnel microscope respectively with the ampere meter with the input and the output electric connection of voltmeter, little the control unit with array switch electric connection for control array switch's break-make state.
Preferably, the intelligent control system further comprises a main control unit, wherein the main control unit is electrically connected with the micro control unit, and the micro control unit is used for controlling the on-off of the array switch according to an instruction of the main control unit.
Preferably, the array switch comprises a G6E-134P-US relay switch.
Preferably, the micro control unit comprises an ATMEGA64 microprocessor.
Preferably, the array switch comprises 16 relay switches arranged in four rows and four columns side by side, four row lead wires and four column lead wires, the relay switches comprise first pins and second pins, the first pins of each row are mutually and electrically connected to the same row lead wire, and the second pins of each column are mutually and electrically connected to the same column lead wire.
Preferably, four output ends of the four-probe scanning tunneling microscope are electrically connected with four row leads of the array switch respectively, and input ends and output ends of the ammeter and the voltmeter are electrically connected with four column leads of the array switch respectively.
Or, the four output ends of the four-probe scanning tunneling microscope are electrically connected with the four column leads of the array switch respectively, and the input ends and the output ends of the ammeter and the voltmeter are electrically connected with the four row leads of the array switch respectively.
Preferably, the connection serial port of the main control unit is an RS232 interface, and the input and output interfaces are BNC interfaces.
In another general aspect, there is provided a method for selecting a probe, a selection system using the probe, comprising the steps of:
s01, inputting an on-off instruction of the array switch;
s02, the micro control unit controls the on and off of the corresponding switch in the array switch according to the on and off instruction;
and S03, reading data through the current meter and the voltage meter.
The invention provides a probe selection system and a method capable of controlling programmed switching, selection and pairing of probe electrodes, which realize quick and effective switching of probe circuits of a four-probe transport test system through switching of an array switch, improve the stability of measurement, effectively avoid crosstalk of leakage current, reduce errors in the test process, particularly errors in measurement of weak signals in a micro-nano region, and improve the accuracy of measurement.
Drawings
FIG. 1 is a schematic diagram of a transport test system for a 4P-STM;
FIG. 2 is a schematic diagram of the hardware connections of the probe selection system of the present invention;
fig. 3 is a schematic diagram of an array switch structure according to the present invention.
Detailed Description
To facilitate an understanding of the present invention, prior to describing in detail embodiments thereof, reference is made to the prior art noted in the background section, which is illustrated in the accompanying drawings.
As shown in fig. 1, four probes are vertically pressed on the surface of a sample to be tested with a certain pressure, two test electrodes are selected as input voltage or current, and the other two test electrodes are selected as output voltage or current. After voltage and current data are measured, according to different measurement modes and different sizes of samples, the resistivity of the samples can be respectively calculated according to different formulas, in the test process, a plurality of groups of data need to be obtained to analyze the resistivity of the samples, and the input and output functions of the voltage or the current of the electrodes are exchanged, so that the test of different point positions and directions is carried out. During the operation of exchanging the electrodes, crosstalk of leakage current may be generated during switching, and measurement errors may be introduced.
The invention aims to solve the problems that when the input and output functions of the voltage or current of the exchange electrode are improved, the circuit is inconvenient to switch and measurement errors are easy to generate. Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
As shown in fig. 2, the selection system of the probe of the present embodiment includes a micro control unit 2, an array switch 3, a four-probe scanning tunneling microscope 4, an ammeter 5 and a voltmeter 6; the four-probe scanning tunnel microscope 4 is provided with an I + test end connected with an input end of an ammeter 5, an I-test end connected with an output end of the ammeter 5, a V + test end connected with an input end of a voltmeter 6, a V-test end connected with an output end of the voltmeter 6, and output ends 01, 02, 03 and 04 electrically connected with probes, one end of the array switch 3 is electrically connected with the four test ends I +, I-, V + and V-of the four-probe scanning tunnel microscope 4, the other end of the array switch 3 is electrically connected with the output ends 01, 02, 03 and 04 on the four-probe scanning tunnel microscope 4, the micro control unit 2 is electrically connected with the array switch 3, and the micro control unit 2 can control the array switch 3 to perform corresponding opening and closing actions to switch the connection circuits of the probes with the ammeter 5 and the voltmeter 6, to effect probe selection.
As a preferred embodiment, the selection system of the probe of this embodiment further includes a main control unit 1, the main control unit 1 includes a computer, the computer is electrically connected to the micro control unit 2, a Windows operating system is loaded on the computer and operating software of the micro control unit 2 is run on the computer, and the micro control unit 2 controls the array switch 3 to perform corresponding actions by receiving instructions of the operating software on the computer.
In a preferred embodiment, the micro-control unit 2 is composed of a circuit with an ATMEGA64 microprocessor as a core, and ATmega64 is a low-power-consumption 8-bit CMOS microcontroller based on an enhanced AVR RISC structure. Due to the advanced instruction set and the single-clock-cycle instruction execution time, the data throughput rate of the ATmega64 is as high as 1MIPS/MHz, so that the switching of an array switch and the selection of a probe can be completed quickly and effectively.
In a preferred embodiment, the array switch 3 comprises a G6E-134P-US relay switch, and the G6E-134P-US relay switch is a signal relay switch, has high sensitivity, and can quickly complete the switching of the switch after receiving an instruction from a microcontroller.
As shown in fig. 3, the array switch 3 of this embodiment includes four rows and four columns of 16 relay switches arranged side by side, four row leads and four column leads, the relay switches include a first pin and a second pin, the first pin of each row of relay switches is electrically connected to the same row lead, the second pin of each column of relay switches is electrically connected to the same column lead, the first pin is connected to the input end of the ammeter 5, the second pin is connected to the output end of the ammeter 5, the third pin is connected to the input end of the voltmeter 6, the fourth pin is connected to the output end of the voltmeter 6, and the four column pins are electrically connected to the four output ends 01, 02, 03 and 04 of the four-probe scanning tunneling microscope 4 respectively, in such a way that when any one relay switch is closed, except that the pins at both ends of the relay switch pass current, and no current passes through all the other lines, and the influence of series current is avoided.
In a preferred embodiment, the serial port of the system is designed as an RS232 interface, and the input and output interfaces are BNC interfaces, which are universal interfaces and can be interfaced with different devices, so that the array switch 3 can be operated by the different devices.
The method for selecting the probe is applied to the system for selecting the probe, and comprises the following steps:
s01, inputting an on-off instruction of the array switch;
s02, the micro control unit 2 controls the on and off of the corresponding switch in the array switch 3 according to the on and off instruction;
and S03, reading data through the ammeter 5 and the voltmeter 6.
As a preferred embodiment, the step S01 includes:
s1.1, initializing an application program in the main control unit 1;
s1.2, selecting a key corresponding to the probe in a probe selection window;
s1.3, the main control unit 1 sends a key selection instruction to the micro control unit 2;
as a preferred embodiment, when the program window selects the corresponding key, after any key is selected, the keys in the same row and column become in the non-selectable state, so that the adverse effect on the experimental result caused by the communication of the circuits in the same row and column in the array switch can be avoided.
As another embodiment of the present invention, different from the first embodiment, the main control unit 1 in the selection system of the probe of the present embodiment may use other control circuits, such as a dial switch control circuit, to input a control signal to the micro control unit 2 by closing a dial switch, and the micro control unit 2 controls the corresponding array switch to be closed and opened according to the state of closing and opening the dial switch. Correspondingly, the selection method of the probe comprises the following steps:
s01, pressing a dial switch to send a switching-on/off instruction to the micro control unit 2;
s02, the micro control unit 2 controls the on and off of the corresponding switch in the array switch 3 according to the on and off instruction;
and S03, reading data through the ammeter 5 and the voltmeter 6.
As another embodiment of the present invention, different from the first embodiment, in this embodiment, a first column pin is connected to an input end of the ammeter 5, a second column pin is connected to an output end of the ammeter 5, a third column pin is connected to an input end of the voltmeter 6, a fourth column pin is connected to an output end of the voltmeter 6, and four rows of pins are electrically connected to four output ends 01, 02, 03, and 04 of the four-probe scanning tunnel microscope 4, respectively.
The invention provides a probe selection system and a method capable of controlling programmed switching, selection and pairing of probe electrodes, wherein the circuit switching of a four-probe transport test system is realized through the switching of an array switch; through controlling software or hardware circuit's control, can realize more that probe circuit is quick effectual to be switched over, improve the stability of measuring.
The foregoing is directed to embodiments of the present application and it is noted that numerous modifications and adaptations may be made by those skilled in the art without departing from the principles of the present application and are intended to be within the scope of the present application.
Claims (8)
1. The probe selection system is characterized by comprising a micro-control unit (2), an array switch (3), a four-probe scanning tunneling microscope (4), an ammeter (5) and a voltmeter (6); array switch (3) one end with four output electric connection of four probe scanning tunnel microscope (4), the other end with four test end electric connection of four probe scanning tunnel microscope (4), four output of four probe scanning tunnel microscope (4) respectively with four probe electric connection, four test end of four probe scanning tunnel microscope (4) respectively with ampere meter (5) with the input and the output electric connection of voltmeter (6), little the control unit (2) with array switch (3) electric connection for the break-make state of control array switch (3).
2. The probe selection system according to claim 1, further comprising a main control unit (1), wherein the main control unit (1) is electrically connected to the micro control unit (2), and the micro control unit (2) is configured to control on/off of the array switch (3) according to an instruction of the main control unit (1).
3. The selection system of probes according to claim 2, characterized in that said array switch (3) comprises a G6E-134P-US relay switch.
4. The system for selecting probes according to claim 2, characterized in that said micro-control unit (2) comprises an ATMEGA64 microprocessor.
5. The probe selection system according to claim 2, wherein the array switch (3) comprises 16 relay switches and 8 leads, the 8 leads are respectively connected with four test terminals and four output terminals, the relay switches comprise a first pin and a second pin, the first pin and the second pin of each relay are respectively electrically connected with two different leads, and each lead is simultaneously electrically connected with four first pins or four second pins.
6. The system for selecting probes according to claim 5, wherein the leads comprise four parallel row leads and four column leads perpendicular to the row leads, the four output terminals are electrically connected to the four row leads respectively, and the four test terminals are electrically connected to the four column leads respectively.
7. The system for selecting probes according to claim 2, characterized in that the serial connection port of the main control unit (1) is an RS232 interface and the input and output interfaces are BNC interfaces.
8. A method for selecting a probe, using the system for selecting a probe according to any one of claims 1 to 7, comprising the steps of:
s01, inputting an on-off instruction of the array switch;
s02, the micro control unit (2) controls the on-off of a corresponding switch in the array switch (3) according to the on-off instruction;
s03, reading data through the ammeter (5) and the voltmeter (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810730474.XA CN110687327A (en) | 2018-07-05 | 2018-07-05 | Probe selection system and method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810730474.XA CN110687327A (en) | 2018-07-05 | 2018-07-05 | Probe selection system and method |
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| CN110687327A true CN110687327A (en) | 2020-01-14 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111897762A (en) * | 2020-08-06 | 2020-11-06 | 深圳市信锐网科技术有限公司 | Terminal equipment, line connection method and device and storage medium |
| CN113484396A (en) * | 2021-06-24 | 2021-10-08 | 中国电建集团华东勘测设计研究院有限公司 | Corrosion monitoring sensor, monitoring device and monitoring method for coupling four-probe potential drop measurement and tow electrode technology |
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| CN101241153A (en) * | 2008-03-07 | 2008-08-13 | 华中科技大学 | Thin film electric resistivity automatic measuring instruments |
| CN202649398U (en) * | 2011-11-11 | 2013-01-02 | 旺矽科技股份有限公司 | Needle pressure detection circuit and point measurement system using same |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111897762A (en) * | 2020-08-06 | 2020-11-06 | 深圳市信锐网科技术有限公司 | Terminal equipment, line connection method and device and storage medium |
| CN113484396A (en) * | 2021-06-24 | 2021-10-08 | 中国电建集团华东勘测设计研究院有限公司 | Corrosion monitoring sensor, monitoring device and monitoring method for coupling four-probe potential drop measurement and tow electrode technology |
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Application publication date: 20200114 |