CN110682204A - Unloading device and chemical mechanical polishing auxiliary equipment - Google Patents
Unloading device and chemical mechanical polishing auxiliary equipment Download PDFInfo
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- CN110682204A CN110682204A CN201911140007.2A CN201911140007A CN110682204A CN 110682204 A CN110682204 A CN 110682204A CN 201911140007 A CN201911140007 A CN 201911140007A CN 110682204 A CN110682204 A CN 110682204A
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- 238000005498 polishing Methods 0.000 title claims abstract description 25
- 239000000126 substance Substances 0.000 title claims abstract description 13
- 239000007921 spray Substances 0.000 claims abstract description 71
- 230000007246 mechanism Effects 0.000 claims abstract description 63
- 238000011084 recovery Methods 0.000 claims abstract description 61
- 238000005507 spraying Methods 0.000 claims abstract description 58
- 239000007788 liquid Substances 0.000 claims abstract description 30
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 16
- 238000005192 partition Methods 0.000 claims description 32
- 230000001681 protective effect Effects 0.000 claims description 12
- 230000000903 blocking effect Effects 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims 6
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 17
- 230000008569 process Effects 0.000 abstract description 13
- 238000004140 cleaning Methods 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 18
- 230000005540 biological transmission Effects 0.000 description 8
- 239000002245 particle Substances 0.000 description 5
- 239000000356 contaminant Substances 0.000 description 3
- 230000002452 interceptive effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002923 metal particle Substances 0.000 description 3
- 238000004064 recycling Methods 0.000 description 3
- 238000001311 chemical methods and process Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000003344 environmental pollutant Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 231100000719 pollutant Toxicity 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
- B24B37/345—Feeding, loading or unloading work specially adapted to lapping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention relates to the technical field of auxiliary polishing equipment, in particular to an unloading device and auxiliary chemical mechanical polishing equipment. The unloading device provided by the invention comprises a throwing disc, a spraying mechanism, a recovery mechanism, a conveying mechanism and an unloading mechanism, wherein the spraying mechanism comprises a spraying groove and a plurality of groups of spray heads, the recovery mechanism comprises a recovery film box, the conveying mechanism comprises a conveying belt, and the unloading mechanism comprises an unloading platform and a high-pressure water spray head. According to the unloading device, the throwing disc is placed on the conveying belt in the spraying groove, the spray head sprays protection liquid onto the throwing disc in the process that the conveying belt can convey the throwing disc to the unloading opening, when the conveying belt conveys the throwing disc to the unloading opening, the unloading platform moves upwards to lift the throwing disc and separate the throwing disc from the conveying belt, the throwing disc is opposite to the opening of the recovery sheet box, the high-pressure water spray head sprays products on the throwing disc into the recovery sheet box, the effect that the products on the throwing disc are always in a wet state in the unloading process is achieved, and the subsequent cleaning operation of the products is facilitated.
Description
Technical Field
The invention relates to the technical field of auxiliary polishing equipment, in particular to an unloading device and auxiliary chemical mechanical polishing equipment.
Background
Chemical Mechanical Polishing (CMP) processes smooth wafers or other substrate materials during processing by Chemical etching and Mechanical forces. The method comprises a chemical process and a physical process, wherein the chemical process is that chemicals in grinding fluid and the surface of a wafer are subjected to chemical reaction to generate substances which are easy to remove; the physical process is that abrasive grains in the grinding fluid and the surface material of the wafer generate mechanical and physical friction to remove substances generated by chemical reaction.
The surface defects of the wafer, which generally include scratches, residues and surface contamination, are inevitably caused after the CMP process, so that the wafer must be effectively cleaned after the CMP process to realize the process advantages of the CMP, and the cleaning process can effectively clean the surface defects of the wafer on the premise that the surface of the wafer after the CMP process is always kept in a wet and non-dry state, otherwise, the wafer cannot be cleaned completely, and the product is unqualified. The existing unloading device can not ensure that the wafer is in a wet state while the wafer is unloaded.
Therefore, there is a need for an unloading apparatus that can ensure that the wafer is in a wet state after polishing.
Disclosure of Invention
An object of the present invention is to provide an unloading apparatus to solve the problems of the prior art, which can ensure the wet state of the polished product.
Another object of the present invention is to provide a chemical mechanical polishing auxiliary device, which can ensure the polished product to be in a wet state by using the unloading device, so as to facilitate cleaning of the product and improve the product quality.
In order to realize the purpose, the following technical scheme is provided:
an unloading device comprising a parabolic dish configured for placement of a product, the unloading device further comprising:
the spraying mechanism comprises a spraying groove and a plurality of groups of spray heads, wherein the spraying groove is provided with an unloading opening, and the plurality of groups of spray heads are arranged and suspended above the spraying groove along the horizontal direction and can spray protective liquid into the spraying groove;
the recovery mechanism comprises a recovery sheet box, and an opening of the recovery sheet box is opposite to the unloading opening;
the conveying mechanism comprises a conveying belt, the conveying belt is partially arranged in the spraying groove, the throwing disc is arranged on the conveying belt, and the conveying belt can convey the throwing disc to the unloading port;
the unloading mechanism comprises an unloading platform and a high-pressure water spray head, the unloading platform can push and lift the throwing disc on the conveying belt and separate from the conveying belt, and the high-pressure water spray head can shoot products on the throwing disc into the recovery film box.
Further, each group of spray heads comprises at least two nozzles, the spray angle of each nozzle is alpha, the diameter of each throwing disk is D, and the distance L from each spray head to each throwing disk1Not less than 0.5D (0.5 alpha), and the distance L between two adjacent nozzles2≤0.25D。
Furthermore, the spraying mechanism further comprises a spraying pipeline, the spraying pipeline is arranged above the spraying groove, and the plurality of groups of spray heads are communicated with the spraying pipeline.
Further, the uninstallation device still includes and separates fender mechanism, it includes the baffle to separate fender mechanism, it dodges the groove to be provided with on the bottom in groove to spray, the baffle wears to establish dodge the inslot, the baffle can remove along vertical direction, in order to block throw the dish along the conveyer belt removes or allows throw the dish along the conveyer belt removes.
Further, the number of the partition plates is multiple, and the distance L between every two adjacent partition plates3In the range of D < L3＜2D。
Further, the baffle mechanism further comprises a baffle driver, an output end of the baffle driver is connected with the baffle, and the baffle driver can drive the baffle to move along the vertical direction.
Further, an opening for the products to enter and exit is formed in the throwing disc, the unloading mechanism further comprises an unloading driver, and the unloading driver can drive the unloading table to move in the vertical direction and rotate in the horizontal plane, so that the opening of the throwing disc and the opening of the recovery wafer box are arranged oppositely.
Further, be provided with a plurality of draw-in grooves in retrieving the spool box, retrieve the spool box and can follow vertical direction and remove to make one a product is accomodate to the draw-in groove.
Further, retrieve the mechanism and still including being provided with the recovery platform of protection liquid, retrieve the setting of spool box and be in retrieve the bench, just product in retrieving the spool box can submerge in the protection liquid.
A chemical mechanical polishing auxiliary device comprises the unloading device.
Compared with the prior art, the invention has the beneficial effects that:
the unloading device provided by the invention comprises a throwing disc, a spraying mechanism, a recovery mechanism, a conveying mechanism and an unloading mechanism, wherein the spraying mechanism comprises a spraying groove and a plurality of groups of spray heads, the recovery mechanism comprises a recovery film box, the conveying mechanism comprises a conveying belt, and the unloading mechanism comprises an unloading platform and a high-pressure water spray head. According to the unloading device, the throwing disc is placed on the conveying belt in the spraying groove, the spray head sprays the protective liquid onto the throwing disc in the process that the conveying belt can convey the throwing disc to the unloading opening, when the conveying belt conveys the throwing disc to the unloading opening, the unloading platform moves upwards to lift the throwing disc and separate the throwing disc from the conveying belt, the throwing disc is opposite to the opening of the recovery sheet box, the high-pressure water spray head sprays products on the throwing disc into the recovery sheet box, and the effect that the products on the throwing disc are always in a wet state in the unloading process is achieved.
According to the chemical mechanical polishing auxiliary equipment provided by the invention, the unloading device is applied, so that a polished product can be ensured to be in a wet state, the product is convenient to clean, and the product quality is improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the contents of the embodiments of the present invention and the drawings without creative efforts.
Fig. 1 is a front view schematically illustrating an unloading apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic top view of an unloading apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic view of a spray tank and a partition according to an embodiment of the present invention;
fig. 4 is a schematic view of another state of the spray tank and the partition according to the embodiment of the present invention.
Reference numerals:
100-throwing a disc;
11-a spray tank; 111-an unloading port; 112-avoiding groove; 12-a spray head; 13-a spray line; 14-a control valve;
21-recovery box; 22-a recovery station;
31-a conveyor belt; 32-a transmission wheel;
41-unloading station; 42-high pressure water jet; 43-unload drive;
51-a separator; 52-diaphragm drive.
Detailed Description
In order to make the technical solutions of the present invention better understood by those skilled in the art, the technical solutions of the present invention are further described below by way of specific embodiments with reference to the accompanying drawings.
In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or orientations or positional relationships conventionally laid out when the product is used, and are only for convenience of description of the present invention, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection or a removable connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
As shown in fig. 1 to 4, the present embodiment provides an unloading apparatus including a throwing disk 100, a spraying mechanism, a recovering mechanism, a conveying mechanism, and an unloading mechanism, wherein the throwing disk 100 is configured to place a product; the spraying mechanism is used for spraying protective liquid to the product to enable the product to be in a wet state; the recovery mechanism is used for storing the polished products; the conveying mechanism is used for conveying the throwing disc 100 and products on the throwing disc to the unloading mechanism, so that the unloading mechanism unloads the products on the throwing disc 100 into the recovery mechanism. This uninstallation device can make the product be in moist state always through spraying the mechanism, can unload the product to recovery mechanism in through transport mechanism and uninstallation mechanism, can realize spraying protection liquid to the product at the in-process of product uninstallation, makes the product be in moist state.
It should be noted that the product may be a wafer or other optical element. In the present embodiment, the product refers to a polished wafer.
Preferably, as shown in fig. 1, the spraying mechanism includes a spraying tank 11 and a plurality of groups of spray heads 12, an unloading opening 111 is opened on the spraying tank 11, and the plurality of groups of spray heads 12 are arranged and suspended above the spraying tank 11 along a horizontal direction and can spray a protection liquid into the spraying tank 11, so as to ensure that the product is in a wet state, and thus, the product can be cleaned conveniently. The recovery mechanism comprises a recovery sheet box 21, and an opening of the recovery sheet box 21 is arranged opposite to the unloading opening 111 so as to unload the products in the spraying groove 11 into the recovery sheet box 21. The conveying mechanism comprises a conveyor belt 31, the conveyor belt 31 is partially arranged in the spraying groove 11, the throwing disk 100 is placed on the conveyor belt 31, and the conveyor belt 31 can convey the throwing disk 100 to the unloading opening 111. The unloading mechanism comprises an unloading table 41 and a high-pressure water spray head 42, the unloading table 41 can push and lift the polishing disc 100 on the conveyor belt 31 to be separated from the conveyor belt 31, and the high-pressure water spray head 42 can flush the product on the unloading table 41 into the recovery sheet box 21.
Specifically, as shown in fig. 1 and fig. 3, the throwing disk 100 is disposed on the conveyor belt 31 in the spray tank 11, and in the process that the conveyor belt 31 can convey the throwing disk 100 to the unloading port 111, the spray head 12 sprays the protective liquid onto the throwing disk 100 to wet the product on the throwing disk 100. When the conveyor belt 31 conveys the polishing disc 100 to the unloading port 111, the unloading stage 41 moves upward to lift up the polishing disc 100 and separate from the conveyor belt 31, and when the polishing disc 100 is opposed to the opening of the recovery sheet cartridge 21, the high-pressure water jet 42 jets the product on the polishing disc 100 into the recovery sheet cartridge 21.
Preferably, each set of nozzles 12 comprises at least two nozzles, the nozzles having an angle of ejection α, a diameter D of the parabolic dish 100 and a distance L from the nozzle 12 to the parabolic dish 1001Not less than 0.5D (0.5 alpha), and the distance L between two adjacent nozzles2Less than or equal to 0.25D. The spray head 12 designed according to this formula ensures that the protective liquid sprayed from the spray nozzle can completely cover the product in the polishing disc 100.
Further, the spraying mechanism further comprises a spraying pipeline 13, the spraying pipeline 13 is arranged above the spraying groove 11, and the plurality of groups of spray heads 12 are communicated with the spraying pipeline 13.
Optionally, as shown in fig. 1-2, the spray mechanism further comprises a support bar that supports the spray pipe 13 above the spray trough 11. The spraying mechanism further comprises a control valve 14, and the control valve 14 is arranged on the spraying pipeline 13 and used for controlling the on-off of the spray head 12.
Illustratively, the size of the spray groove 11 is also designed according to the diameter D of the throwing disk 100, the span of the spray groove 11 is larger than the diameter D, and preferably, the width of the spray groove 11 is 1.25D-1.5D, so that the spray groove 11 can effectively place the throwing disk 100, and the volume of the spray groove 11 can be reduced, thereby saving the manufacturing cost.
Preferably, as shown in fig. 1, the transmission mechanism further comprises a transmission wheel 32 and a motor, the motor can drive the transmission wheel 32 to rotate, and the transmission belt 31 is wound on the transmission wheel 32, so that the transmission wheel 32 drives the transmission belt 31 to move.
In order to ensure that the conveyor belt 31 is able to convey the polishing disc 100, while avoiding interference of the conveyor belt 31 with the unloading station 41. Preferably, two conveying mechanisms are provided, so that the two conveying belts 31 are arranged in parallel at intervals, and the unloading station 41 is arranged between the two conveying belts 31, so that the polishing disk 100 can be conveyed while the unloading station 41 can move in the vertical direction to jack up or place the polishing disk 100 on the conveying belts 31 without interfering with the conveying belts 31.
Illustratively, as shown in fig. 1, in one transfer mechanism, four driving wheels 32 are arranged in two rows and two columns, two driving wheels 32 positioned above partially extend into the spray tank 11 so that the conveyor belt 31 is partially positioned in the spray tank 11, two driving wheels 32 positioned below are close to the ground, and a motor is connected with two driving wheels 32 positioned below so that the gravity center of the unloading device is close to the ground, so that the unloading device is more stable.
Alternatively, the throwing disk 100 is provided with an opening for the product to enter and exit, and the product in the throwing disk 100 can enter the recovery sheet cartridge 21 only when the opening of the throwing disk 100 is opposite to the opening of the recovery sheet cartridge 21 under the impact of the high pressure water jet head 42.
Preferably, as shown in fig. 1, the unloading mechanism further includes an unloading driver 43, and the unloading driver 43 can drive the unloading table 41 to move in a vertical direction and rotate in a horizontal plane so that the opening of the throwing disk 100 is opposite to the opening of the recovery sheet box 21, so that the product in the throwing disk 100 can enter the recovery sheet box 21.
Illustratively, in the present embodiment, the unloading driver 43 includes a linear cylinder for driving the unloading stage 41 to move in the vertical direction and a rotary motor for driving the unloading stage 41 to rotate in the horizontal plane. Specifically, the output end of the linear cylinder is provided with a mounting table, the rotating motor is arranged on the mounting table, and the output end of the rotating motor is connected with the unloading table 41, so that the unloading table 41 can be driven to lift, and the unloading table 41 can be driven to rotate.
Further, the spraying angle of the high pressure water spray 42 can be adjusted to adjust the direction of the force of the high pressure water spray 42 on the product on the throwing disk 100, so that the product enters the recovery tank 21.
Illustratively, the size of the unloading station 41 is also designed according to the diameter D of the polishing disc 100, and it is necessary to ensure that the unloading station 41 can be raised and lowered within the spray tank 11.
In order to facilitate the control of the conveying frequency of the conveyor belt 31, preferably, as shown in fig. 3 to 4, the unloading device further includes a blocking mechanism, the blocking mechanism includes a partition plate 51, an avoiding groove 112 is provided on the bottom of the spraying groove 11, the partition plate 51 is inserted into the avoiding groove 112, and the partition plate 51 can move in a vertical direction to block the throwing disk 100 from moving along with the conveyor belt 31 or allow the throwing disk 100 to move along with the conveyor belt 31.
In short, the partition plate 51 can extend into the spraying groove 11, so that the throwing disk 100 is abutted against the partition plate 51, and the purpose of preventing the conveyor belt 31 from conveying the throwing disk 100 is achieved; the partition 51 can also be withdrawn to the outside of the spray tank 11 or to a position below the conveyor belt 31, so as to avoid the partition 51 interfering with the conveyor belt 31 conveying the throwing disk 100.
In order to prevent the protective liquid in the shower tank 11 from leaking from the avoiding groove 112, it is preferable to provide a step on the circumferential side of the avoiding groove 112 to step up the avoiding groove 112. In addition, a special liquid outlet needs to be arranged in the spraying groove 11, and the liquid outlet is arranged at a lower position in the spraying groove 11 so that the protective liquid can be conveniently gathered at the liquid outlet. Preferably, the liquid outlet may be communicated with the spraying pipeline 13 through a pipeline, so that the protection liquid discharged from the liquid outlet can be re-ejected from the spray head 12 through the spraying pipeline 13, thereby improving the utilization rate of the protection liquid and saving the cost.
Further, in order to prevent the partition plate 51 from interfering with the conveyor belt 31, an open slot is formed in the partition plate 51, and the width of the open slot is greater than that of the conveyor belt 31, so that the partition plate 51 is ensured to avoid the conveyor belt 31 during up-and-down movement, and the interference between the partition plate 51 and the conveyor belt 31 is avoided.
Preferably, the number of the partition plates 51 is plural, adjacent to each otherDistance L between two partition plates 513In the range of D < L3< 2D, so as to ensure that only one throwing disk 100 can be accommodated between the two partition plates 51 and avoid the mutual interference of the two throwing disks 100 under the action of the conveyor belt 31. It should be noted that fig. 3-4 only show the case that the number of the partition plates 51 is two, in other embodiments, the number of the partition plates 51 may also be three, four, five, etc., and the number of the partition plates 51 may be designed according to the relationship between the length of the spray tank 11 and the diameter D of the throwing disk 100, which is not illustrated herein.
Specifically, when the partition plate 51 extends into the spray tank 11 and can block the movement of the throwing disk 100, the spray tank 11 can be divided into a plurality of accommodating cavities, and each accommodating cavity accommodates one throwing disk 100. Correspondingly, a group of spray heads 12 are correspondingly arranged above each containing cavity, and the center line of each containing cavity on the horizontal plane is collinear with the center line of each group of spray heads 12, so that the protection liquid sprayed by each group of spray heads 12 can completely cover the products on the corresponding throwing disk 100.
Further, the blocking mechanism further comprises a partition driver 52, an output end of the partition driver 52 is connected with the partition 51, and the partition driver 52 can drive the partition 51 to move in the vertical direction. Illustratively, the diaphragm drive 52 is a linear air cylinder or a linear motor.
Preferably, the recovery mechanism further comprises a recovery platform 22 provided with a protection liquid, the recovery sheet box 21 is arranged on the recovery platform 22, and the product in the recovery sheet box 21 can be immersed in the protection liquid, so that the product can be immersed in the protection liquid before being taken away, the product is in a wet state, and the subsequent cleaning operation on the product is facilitated. In addition, the direct contact between the product and the air can be reduced, and the adsorption of particle pollutants on the surface of the product is reduced to the maximum extent.
To improve the accommodation amount of the recovery sheet cassette 21 while preventing the products in the recovery sheet cassette 21 from being stacked one on another to scratch the surface of the products. Optionally, be provided with a plurality of draw-in grooves in the recovery film box 21, the draw-in groove is used for fixed product, and recovery film box 21 can remove along vertical direction to make a draw-in groove accomodate a product. In short, the order of collecting the products in the recycling sheet box 21 is from the bottom to the top, and after the recycling sheet box 21 collects a product, the recycling sheet box 21 moves downwards to displace a clamping groove unit, so that the last clamping groove faces the unloading opening 111 of the spraying groove 11, so that the high-pressure water nozzle 42 sprays the product into the clamping groove corresponding to the unloading opening 111, and the like in sequence, and the layered collection of a plurality of products is realized.
In addition, by adjusting the height of the recovery sheet box 21, the products in the recovery sheet box 21 can be ensured to be immersed in the protective liquid on the recovery table 22, the direct contact between the products and the air is reduced, and the adsorption of particle pollutants on the surfaces of the products is reduced to the maximum extent. In this embodiment, retrieve a draw-in groove of the below of film box 21 and be in protection liquid submergence state, after the product is unloaded and enters into the draw-in groove, retrieve film box 21 along the displacement of a draw-in groove unit of vertical direction downstream, make next draw-in groove be in by the state of protection liquid submergence, then after the product is unloaded to this draw-in groove in, retrieve film box 21 and remove downwards again, analogize in proper order, guarantee that all products that get into in retrieving film box 21 can both be by the effective submergence of protection liquid.
Illustratively, the recovery mechanism further includes a recovery driver capable of driving the recovery sheet cassette 21 to move in the vertical direction. The recovery drive may be a linear cylinder or a linear motor.
During actual manufacturing, the size of the unloading device can be flexibly designed according to the proportion according to the requirement, and the unloading device has the advantages of simple manufacture, low price, convenient use, obvious spraying effect and strong universality.
Table 1 shows a comparison table of metal particles and particle contaminants remaining on the surface of the cleaned wafer, and it can be seen from table 1 that, in the method of cleaning the wafer after the maintenance unloading device provided by the present invention is used to form a continuous non-dry aqueous protective film on the surface of the wafer, the remaining amount of the metal particles and particle contaminants is greatly reduced compared to the method of directly cleaning without the maintenance unloading device.
TABLE 1 comparative table of metal particles and particle contaminant residues on the surface of the cleaned wafer
The embodiment also provides chemical mechanical polishing auxiliary equipment which comprises the unloading device, and the unloading device can ensure that the polished product is in a wet state, is convenient to clean and improves the product quality.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (10)
1. An unloading device comprising a throwing disk (100), said throwing disk (100) being configured for placing a product, characterized in that it further comprises:
the spraying mechanism comprises a spraying groove (11) and a plurality of groups of spray heads (12), wherein unloading openings (111) are formed in the spraying groove (11), and the plurality of groups of spray heads (12) are arranged and suspended above the spraying groove (11) along the horizontal direction and can spray protective liquid into the spraying groove (11);
the recovery mechanism comprises a recovery box (21), and an opening of the recovery box (21) is arranged opposite to the unloading opening (111);
the conveying mechanism comprises a conveying belt (31), the conveying belt (31) is partially arranged in the spraying groove (11), the throwing disc (100) is arranged on the conveying belt (31), and the conveying belt (31) can convey the throwing disc (100) to the unloading opening (111);
the unloading mechanism comprises an unloading platform (41) and a high-pressure water spray head (42), the unloading platform (41) can push and lift the throwing disk (100) on the conveying belt (31) and separate from the conveying belt (31), and the high-pressure water spray head (42) can flush the products on the throwing disk (100) into the recovery wafer box (21).
2. Unloading device according to claim 1, wherein each group of spray heads (12) comprises at least two nozzles, the nozzles having a spray angle α, the throwing disk (100) having a diameter D, the spray heads (12) being at a distance L from the throwing disk (100)1Not less than 0.5D (0.5 alpha), and the distance L between two adjacent nozzles2≤0.25D。
3. Unloading device according to claim 2, wherein the spraying mechanism further comprises a spraying pipe (13), the spraying pipe (13) being arranged above the spraying trough (11), the groups of spray heads (12) being in communication with the spraying pipe (13).
4. Unloading device according to claim 2, wherein the unloading device further comprises a blocking mechanism comprising a partition plate (51), an avoiding groove (112) is provided on the bottom of the spray tank (11), the partition plate (51) is arranged in the avoiding groove (112) in a penetrating manner, the partition plate (51) can move in a vertical direction to block the throwing disk (100) from moving along with the conveyor belt (31) or allow the throwing disk (100) to move along with the conveyor belt (31).
5. Unloading device according to claim 4, wherein the number of partitions (51) is multiple, the distance L between two adjacent partitions (51) being such that3In the range of D < L3＜2D。
6. Unloading device according to claim 5, wherein the barrier means further comprise a barrier drive (52), the output of the barrier drive (52) being connected to the barrier (51), the barrier drive (52) being able to drive the barrier (51) in a vertical direction.
7. Unloading device according to any one of claims 1-6, wherein the polishing plate (100) is provided with an opening for the product to enter and exit, the unloading mechanism further comprising an unloading drive (43), the unloading drive (43) being capable of driving the unloading station (41) to move in a vertical direction and to rotate in a horizontal plane, so that the opening of the polishing plate (100) is disposed opposite to the opening of the recovery cassette (21).
8. Unloading device according to any one of claims 1-6, wherein a plurality of pockets are provided in the recovery magazine (21), the recovery magazine (21) being movable in a vertical direction so that one pocket receives one product.
9. Unloading device according to claim 8, wherein the recovery mechanism further comprises a recovery station (22) provided with a protective liquid, the recovery cassettes (21) being arranged on the recovery station (22) and the products inside the recovery cassettes (21) being able to be immersed in the protective liquid.
10. A chemical mechanical polishing auxiliary apparatus, characterized by comprising the unloading device according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911140007.2A CN110682204B (en) | 2019-11-20 | 2019-11-20 | Unloading device and chemical mechanical polishing auxiliary equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113353330A (en) * | 2021-05-18 | 2021-09-07 | 东莞市思榕智能装备有限公司 | Transfer device for box with film and automatic packaging equipment |
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| CN110682204B (en) | 2024-05-17 |
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Address after: 201616 No. 1-15, Lane 150, dingsong Road, Songjiang District, Shanghai Applicant after: Shanghai Chaosi Semiconductor Co.,Ltd. Applicant after: CHONGQING ADVANCED SILICON TECHNOLOGY Co.,Ltd. Address before: No.158, Lane 258, Shuangjin Road, Shihudang Town, Songjiang District, Shanghai, 201617 Applicant before: SHANGHAI ADVANCED SILICON TECHNOLOGY Co.,Ltd. Applicant before: CHONGQING ADVANCED SILICON TECHNOLOGY Co.,Ltd. |
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