CN110681560A - 具有亥姆霍兹谐振腔的mems超声定位传感器 - Google Patents
具有亥姆霍兹谐振腔的mems超声定位传感器 Download PDFInfo
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- CN110681560A CN110681560A CN201910851350.1A CN201910851350A CN110681560A CN 110681560 A CN110681560 A CN 110681560A CN 201910851350 A CN201910851350 A CN 201910851350A CN 110681560 A CN110681560 A CN 110681560A
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- piezoelectric
- ultrasonic
- resonant cavity
- mems
- positioning sensor
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- 239000000758 substrate Substances 0.000 claims abstract description 44
- 238000003475 lamination Methods 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 abstract description 4
- 230000005540 biological transmission Effects 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 238000002604 ultrasonography Methods 0.000 description 4
- 229910052681 coesite Inorganic materials 0.000 description 3
- 229910052906 cristobalite Inorganic materials 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910052682 stishovite Inorganic materials 0.000 description 3
- 229910052905 tridymite Inorganic materials 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000005355 Hall effect Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004556 laser interferometry Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0603—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a piezoelectric bender, e.g. bimorph
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/50—Application to a particular transducer type
- B06B2201/55—Piezoelectric transducer
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Micromachines (AREA)
Abstract
Description
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CN201910851350.1A CN110681560B (zh) | 2019-09-10 | 2019-09-10 | 具有亥姆霍兹谐振腔的mems超声定位传感器 |
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CN201910851350.1A CN110681560B (zh) | 2019-09-10 | 2019-09-10 | 具有亥姆霍兹谐振腔的mems超声定位传感器 |
Publications (2)
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CN110681560A true CN110681560A (zh) | 2020-01-14 |
CN110681560B CN110681560B (zh) | 2020-11-03 |
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CN201910851350.1A Active CN110681560B (zh) | 2019-09-10 | 2019-09-10 | 具有亥姆霍兹谐振腔的mems超声定位传感器 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112871612A (zh) * | 2020-12-19 | 2021-06-01 | 复旦大学 | 具有多压电层的压电微机械超声换能器 |
CN114160399A (zh) * | 2021-12-02 | 2022-03-11 | 中国科学院苏州纳米技术与纳米仿生研究所 | 同频异构的压电超声波换能器及其制备方法 |
CN115532572A (zh) * | 2022-10-14 | 2022-12-30 | 浙江大学 | 一种多频压电微机械超声换能器及制备方法 |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3819879A (en) * | 1971-12-20 | 1974-06-25 | Ibm | Electro-acoustic transducer housing adapted for telephonic pcm communication systems |
CN1523754A (zh) * | 2003-02-21 | 2004-08-25 | Lg | 具有薄膜腔声谐振器的双工滤波器及其半导体封装 |
CN2712888Y (zh) * | 2004-06-08 | 2005-07-27 | 清华大学 | 用于超声定位与测距的微声学器件 |
CN101650412A (zh) * | 2009-08-28 | 2010-02-17 | 中国科学院电工研究所 | 一种核磁共振射频微线圈及其制作方法 |
WO2012085334A1 (en) * | 2010-12-21 | 2012-06-28 | Teknologian Tutkimuskeskus Vtt | Method for manufacturing an ultrasonic sensor |
US20130155817A1 (en) * | 2011-12-19 | 2013-06-20 | Samsung Electronics Co., Ltd. | Cell, element of ultrasonic transducer, ultrasonic transducer including the same, and method of manufacturing cell of ultrasonic transducer |
CN104836473A (zh) * | 2014-02-07 | 2015-08-12 | 北京纳米能源与系统研究所 | 采集声音能量的发电机和声音传感器 |
US20160167956A1 (en) * | 2013-10-15 | 2016-06-16 | Invensense, Inc. | Integrated cmos back cavity acoustic transducer and the method of producing the same |
CN108566174A (zh) * | 2018-04-17 | 2018-09-21 | 武汉大学 | 预设空腔防护墙型薄膜体声波谐振器及制备方法 |
CN108807442A (zh) * | 2018-07-10 | 2018-11-13 | 京东方科技集团股份有限公司 | 图像距离传感器及其制备方法、倒车图像测距装置 |
CN109643378A (zh) * | 2018-11-20 | 2019-04-16 | 深圳市汇顶科技股份有限公司 | 超声换能器件及电子装置 |
CN208890682U (zh) * | 2018-11-15 | 2019-05-21 | 大连海事大学 | 收集声波能量的摩擦纳米发电机 |
-
2019
- 2019-09-10 CN CN201910851350.1A patent/CN110681560B/zh active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3819879A (en) * | 1971-12-20 | 1974-06-25 | Ibm | Electro-acoustic transducer housing adapted for telephonic pcm communication systems |
CN1523754A (zh) * | 2003-02-21 | 2004-08-25 | Lg | 具有薄膜腔声谐振器的双工滤波器及其半导体封装 |
CN2712888Y (zh) * | 2004-06-08 | 2005-07-27 | 清华大学 | 用于超声定位与测距的微声学器件 |
CN101650412A (zh) * | 2009-08-28 | 2010-02-17 | 中国科学院电工研究所 | 一种核磁共振射频微线圈及其制作方法 |
WO2012085334A1 (en) * | 2010-12-21 | 2012-06-28 | Teknologian Tutkimuskeskus Vtt | Method for manufacturing an ultrasonic sensor |
US20130155817A1 (en) * | 2011-12-19 | 2013-06-20 | Samsung Electronics Co., Ltd. | Cell, element of ultrasonic transducer, ultrasonic transducer including the same, and method of manufacturing cell of ultrasonic transducer |
US20160167956A1 (en) * | 2013-10-15 | 2016-06-16 | Invensense, Inc. | Integrated cmos back cavity acoustic transducer and the method of producing the same |
CN104836473A (zh) * | 2014-02-07 | 2015-08-12 | 北京纳米能源与系统研究所 | 采集声音能量的发电机和声音传感器 |
CN108566174A (zh) * | 2018-04-17 | 2018-09-21 | 武汉大学 | 预设空腔防护墙型薄膜体声波谐振器及制备方法 |
CN108807442A (zh) * | 2018-07-10 | 2018-11-13 | 京东方科技集团股份有限公司 | 图像距离传感器及其制备方法、倒车图像测距装置 |
CN208890682U (zh) * | 2018-11-15 | 2019-05-21 | 大连海事大学 | 收集声波能量的摩擦纳米发电机 |
CN109643378A (zh) * | 2018-11-20 | 2019-04-16 | 深圳市汇顶科技股份有限公司 | 超声换能器件及电子装置 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112871612A (zh) * | 2020-12-19 | 2021-06-01 | 复旦大学 | 具有多压电层的压电微机械超声换能器 |
CN114160399A (zh) * | 2021-12-02 | 2022-03-11 | 中国科学院苏州纳米技术与纳米仿生研究所 | 同频异构的压电超声波换能器及其制备方法 |
CN114160399B (zh) * | 2021-12-02 | 2022-12-02 | 中国科学院苏州纳米技术与纳米仿生研究所 | 同频异构的压电超声波换能器及其制备方法 |
CN115532572A (zh) * | 2022-10-14 | 2022-12-30 | 浙江大学 | 一种多频压电微机械超声换能器及制备方法 |
CN115532572B (zh) * | 2022-10-14 | 2024-05-07 | 浙江大学 | 一种多频压电微机械超声换能器及制备方法 |
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CN110681560B (zh) | 2020-11-03 |
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Effective date of registration: 20220823 Address after: No.01, 4th floor, building D7, phase 3, Wuhan Software New Town, No.9 Huacheng Avenue, Donghu New Technology Development Zone, Wuhan City, Hubei Province, 430000 Patentee after: Wuhan Minsheng New Technology Co.,Ltd. Address before: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province Patentee before: Ningbo Huazhang enterprise management partnership (L.P.) |