CN110681419A - 电渗微泵装置及电渗微泵装置组 - Google Patents
电渗微泵装置及电渗微泵装置组 Download PDFInfo
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- CN110681419A CN110681419A CN201910860201.1A CN201910860201A CN110681419A CN 110681419 A CN110681419 A CN 110681419A CN 201910860201 A CN201910860201 A CN 201910860201A CN 110681419 A CN110681419 A CN 110681419A
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- 238000005370 electroosmosis Methods 0.000 title abstract description 26
- 239000012530 fluid Substances 0.000 claims abstract description 65
- 238000005086 pumping Methods 0.000 claims abstract description 4
- 239000000758 substrate Substances 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 6
- 230000005684 electric field Effects 0.000 abstract description 10
- 230000007062 hydrolysis Effects 0.000 abstract description 3
- 238000006460 hydrolysis reaction Methods 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 4
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
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- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920000052 poly(p-xylylene) Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000012377 drug delivery Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- HWLDNSXPUQTBOD-UHFFFAOYSA-N platinum-iridium alloy Chemical compound [Ir].[Pt] HWLDNSXPUQTBOD-UHFFFAOYSA-N 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
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- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
- F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/006—Micropumps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0645—Electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/16—Surface properties and coatings
- B01L2300/161—Control and use of surface tension forces, e.g. hydrophobic, hydrophilic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
- B01L2400/0418—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic electro-osmotic flow [EOF]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Hematology (AREA)
- Clinical Laboratory Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Micromachines (AREA)
Abstract
Description
Claims (10)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910860201.1A CN110681419B (zh) | 2019-09-11 | 2019-09-11 | 电渗微泵装置及电渗微泵装置组 |
US17/642,398 US20220331794A1 (en) | 2019-09-11 | 2020-09-09 | Electroosmotic Micropump Apparatus and Electroosmotic Micropump Apparatus Group |
PCT/CN2020/114139 WO2021047529A1 (zh) | 2019-09-11 | 2020-09-09 | 电渗微泵装置及电渗微泵装置组 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910860201.1A CN110681419B (zh) | 2019-09-11 | 2019-09-11 | 电渗微泵装置及电渗微泵装置组 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110681419A true CN110681419A (zh) | 2020-01-14 |
CN110681419B CN110681419B (zh) | 2021-06-15 |
Family
ID=69109207
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910860201.1A Active CN110681419B (zh) | 2019-09-11 | 2019-09-11 | 电渗微泵装置及电渗微泵装置组 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20220331794A1 (zh) |
CN (1) | CN110681419B (zh) |
WO (1) | WO2021047529A1 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112023131A (zh) * | 2020-08-28 | 2020-12-04 | 杭州未名信科科技有限公司 | 电渗驱动模块、植入式电渗微泵装置及电引出方法 |
WO2021047529A1 (zh) * | 2019-09-11 | 2021-03-18 | 杭州未名信科科技有限公司 | 电渗微泵装置及电渗微泵装置组 |
CN113855912A (zh) * | 2021-08-13 | 2021-12-31 | 杭州未名信科科技有限公司 | 给药微泵装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7318902B2 (en) * | 2002-02-04 | 2008-01-15 | Colorado School Of Mines | Laminar flow-based separations of colloidal and cellular particles |
CN101427368A (zh) * | 2002-12-18 | 2009-05-06 | 英特尔公司 | 电渗透泵和微通道 |
CN102583231A (zh) * | 2011-11-02 | 2012-07-18 | 中国科学院力学研究所 | 一种电弹性毛细动力驱动方法 |
CN204746344U (zh) * | 2015-05-13 | 2015-11-11 | 中国科学院理化技术研究所 | 一种电渗微泵装置 |
US20170144148A1 (en) * | 2015-11-24 | 2017-05-25 | Kent State University | Liquid crystals with patterned molecular orientation as an electrolytic active medium |
CN109847817A (zh) * | 2019-01-09 | 2019-06-07 | 中国科学院半导体研究所 | 一种微流控芯片及其制备方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060137985A1 (en) * | 2004-12-23 | 2006-06-29 | Sandia National Laboratories | Microfluidic weaklink device |
JP2010216902A (ja) * | 2009-03-16 | 2010-09-30 | Kyocera Corp | 電気浸透流ポンプ、およびマイクロ化学チップ |
CN103816805B (zh) * | 2012-11-16 | 2015-12-02 | 中国科学院理化技术研究所 | 电渗微泵装置 |
CN203090949U (zh) * | 2013-02-26 | 2013-07-31 | 中国科学院理化技术研究所 | 多级驱动电渗微泵装置 |
CN205055830U (zh) * | 2015-09-18 | 2016-03-02 | 中国科学院理化技术研究所 | 一种电渗微泵装置 |
CN109529962A (zh) * | 2019-01-18 | 2019-03-29 | 江苏医联生物科技有限公司 | 基于微通道板的薄膜电渗泵及其检测压强与流速的方法 |
CN110681419B (zh) * | 2019-09-11 | 2021-06-15 | 杭州未名信科科技有限公司 | 电渗微泵装置及电渗微泵装置组 |
-
2019
- 2019-09-11 CN CN201910860201.1A patent/CN110681419B/zh active Active
-
2020
- 2020-09-09 WO PCT/CN2020/114139 patent/WO2021047529A1/zh active Application Filing
- 2020-09-09 US US17/642,398 patent/US20220331794A1/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7318902B2 (en) * | 2002-02-04 | 2008-01-15 | Colorado School Of Mines | Laminar flow-based separations of colloidal and cellular particles |
CN101427368A (zh) * | 2002-12-18 | 2009-05-06 | 英特尔公司 | 电渗透泵和微通道 |
CN102583231A (zh) * | 2011-11-02 | 2012-07-18 | 中国科学院力学研究所 | 一种电弹性毛细动力驱动方法 |
CN204746344U (zh) * | 2015-05-13 | 2015-11-11 | 中国科学院理化技术研究所 | 一种电渗微泵装置 |
US20170144148A1 (en) * | 2015-11-24 | 2017-05-25 | Kent State University | Liquid crystals with patterned molecular orientation as an electrolytic active medium |
CN109847817A (zh) * | 2019-01-09 | 2019-06-07 | 中国科学院半导体研究所 | 一种微流控芯片及其制备方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021047529A1 (zh) * | 2019-09-11 | 2021-03-18 | 杭州未名信科科技有限公司 | 电渗微泵装置及电渗微泵装置组 |
CN112023131A (zh) * | 2020-08-28 | 2020-12-04 | 杭州未名信科科技有限公司 | 电渗驱动模块、植入式电渗微泵装置及电引出方法 |
CN112023131B (zh) * | 2020-08-28 | 2023-08-18 | 杭州未名信科科技有限公司 | 电渗驱动模块、植入式电渗微泵装置及电引出方法 |
CN113855912A (zh) * | 2021-08-13 | 2021-12-31 | 杭州未名信科科技有限公司 | 给药微泵装置 |
Also Published As
Publication number | Publication date |
---|---|
CN110681419B (zh) | 2021-06-15 |
US20220331794A1 (en) | 2022-10-20 |
WO2021047529A1 (zh) | 2021-03-18 |
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Inventor after: Gao Meng Inventor before: Gao Meng Inventor before: Ye Le |
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