CN110676028B

CN110676028B - Transformer device

Info

Publication number: CN110676028B
Application number: CN201810717238.4A
Authority: CN
Inventors: 颜孝璁
Original assignee: Realtek Semiconductor Corp
Current assignee: Realtek Semiconductor Corp
Priority date: 2018-07-03
Filing date: 2018-07-03
Publication date: 2021-08-03
Anticipated expiration: 2038-07-03
Also published as: CN110676028A

Abstract

The transformer device comprises a plurality of first conductive line segments, a plurality of second conductive line segments and a plurality of third conductive line segments. The plurality of second line segments comprise a plurality of second conductive line segments and a plurality of first crossover line segments. The plurality of first crossover line segments are used for connecting the first conductive line segments to form a first inductor. The plurality of third conductive segments comprise a plurality of second crossover segments, wherein the third conductive segments are used for connecting the second conductive segments to form a second inductor. The first inductor is located on the second inductor, the first crossover line segments and the first conductive line segments form a plurality of first staggered parts in a first direction, the second crossover line segments and the second conductive line segments form a plurality of second staggered parts in a second direction, and the first direction is different from the second direction.

Description

Transformer device

Technical Field

The present disclosure relates to a transformer device, and more particularly, to a transformer device using stacked inductors.

Background

Inductors are common passive components of circuitry. The inductor may be used for filtering, energy storage or wireless coupling, depending on the actual requirements. For example, a transformer may be implemented using two inductors coupled to each other.

In integrated circuit applications, stacked inductors are commonly used to reduce the area occupied by the inductors. However, the prior art arrangement results in an inductor with a lower quality factor.

Disclosure of Invention

In order to solve the above problems, one aspect of the present disclosure provides a transformer device including a plurality of first conductive line segments, a plurality of second line segments, and a plurality of third conductive line segments. A plurality of first conductive line segments are formed on a first metal layer. The plurality of second line segments are formed on a second metal layer and comprise a plurality of second conductive line segments and a plurality of first cross-connection line segments, wherein the first cross-connection line segments are used for connecting the first conductive line segments to form a first inductor. The plurality of third conductive segments are formed on a third metal layer and comprise a plurality of second cross-connection segments, wherein the third conductive segments are used for connecting the second conductive segments to form a second inductor. The first inductor is located on the second inductor, the first crossover line segments and the first conductive line segments form a plurality of first staggered parts in a first direction, the second crossover line segments and the second conductive line segments form a plurality of second staggered parts in a second direction, and the first direction is different from the second direction.

In summary, the present disclosure connects the conductive line segments of different layers by the crossover line segments in different directions to form an inductor. Therefore, the quality factor of the inductor can be effectively improved in unit area, and the efficiency of the transformer device is further improved.

Drawings

The drawings attached to this document are described as follows:

fig. 1A is a schematic diagram of a transformer apparatus according to some embodiments of the disclosure;

FIG. 1B is a schematic diagram of a plurality of conductive line segments shown in FIG. 1A according to some embodiments of the disclosure;

FIG. 1C is a schematic view of a portion of a conductive line segment of FIG. 1A according to some examples herein;

fig. 1D is a schematic diagram illustrating an inductor formed by the plurality of conductive lines of fig. 1B-1C according to some embodiments of the present disclosure;

FIG. 1E is a schematic view of a portion of a conductive line segment of FIG. 1A according to some embodiments of the present disclosure;

FIG. 1F is a schematic diagram illustrating the arrangement of a plurality of conductive line segments shown in FIG. 1A according to some examples herein;

FIG. 1G is a schematic diagram illustrating an arrangement of an inductor formed by the plurality of conductive segments shown in FIGS. 1E and 1F according to some embodiments of the present disclosure;

FIG. 1H is a schematic diagram illustrating an arrangement of a plurality of conductive line segments shown in FIGS. 1C and 1E according to some embodiments of the present disclosure;

FIG. 2 is a measurement result of the transformer apparatus of FIG. 1A according to some embodiments of the disclosure;

FIG. 3 is a schematic diagram of another arrangement of the transformer apparatus of FIG. 1A according to some embodiments of the disclosure;

FIG. 4 is a schematic diagram illustrating another arrangement of conductive segments of FIG. 1A according to some embodiments of the present disclosure; and

fig. 5 is a schematic diagram illustrating another arrangement of a plurality of conductive line segments of fig. 1A according to some embodiments of the disclosure.

100. 300, and (2) 300: transformer device

V12, V23: through hole

A2: second region

P1-2, P2-2: the second port

C1-A to C1-G: breaking part

110. 120: inductance

C2-A to C2-F: breaking part

C2-G: breaking part

V23-3, V23-4: through hole

102-1, 102-2: outer ring line segment

CR 1: interlaced part

L1, L2: inductance curve

101-103: conducting wire segment

A1: first region

P1-1, P2-1: the first port

P1-3, P2-3: the third port

102A to 102G: cross-connection line segment

103A to 103S: cross-connection line segment

C2-J to C2-O: breaking part

V23-1, V23-2: through hole

V12-1, V12-2: through hole

X, Y: direction of rotation

CR2-1, CR 2-2: interlaced part

Q1, Q2: quality factor

Detailed Description

For ease of understanding, like elements in the following figures will be designated with the same reference numerals.

Referring to fig. 1A, fig. 1A is a schematic diagram of a transformer apparatus 100 according to some embodiments of the disclosure.

In some embodiments, the transformer apparatus 100 includes a plurality of conductive segments 101-103 and a plurality of VIAs (VIA) V12 and V23, wherein the VIA V23 is located under the plurality of conductive segments 101 (as shown in fig. 1G). The plurality of conductive segments 101-103 and the plurality of vias V12 and V23 can be used to form two stacked inductors (e.g., the inductor 110 in FIG. 1D and the inductor 120 in FIG. 1G).

In some embodiments, the plurality of

conductive line segments

101, 102, and 103 are implemented by different metal layers. In some embodiments, the plurality of

conductive line segments

101 and 102 may be implemented by two metal layers with the lowest resistance in the manufacturing process, so as to improve the performance of the transformer apparatus 100. For example, the plurality of conductive segments 101 are implemented by an ultra-thick metal (UTM) layer, the plurality of conductive segments 102 are implemented by a redistribution layer (RDL), and the plurality of conductive segments 103 are implemented by a metal layer M6, wherein the UTM layer, the RDL and the metal layer M6 belong to a top metal layer in a manufacturing process, a resistance value of the UTM layer is lower than that of the RDL, and a resistance value of the RDL is lower than that of the metal layer M6. Furthermore, the UTM layer is stacked on the RDL, and the RDL is stacked on the metal layer M6. In some embodiments, the vias V12 or V23 may be implemented by Via structures, Via arrays, or Through-Silicon vias (Through-Silicon Via). Vias V12 or V23 may be implemented with various conductive materials to connect different conductive line segments.

The above-mentioned implementation manners and numbers of the conductive segments 101-103 and the vias V12-V23 are only examples, and other various metal layers/conductive materials suitable for implementing the conductive segments 101-103 and the vias V12-V23 are also within the scope of the present disclosure. For example, the metal layer M6 may be any collection of metal layers, such as a plurality of metal layers M4-M6 connected in parallel.

The plurality of vias V12 are used to couple at least one corresponding one of the plurality of conductive segments 101 to at least one corresponding one of the plurality of conductive segments 102. The plurality of vias V23 are disposed under the plurality of conductive segments 101 and are used to couple at least one corresponding one of the plurality of conductive segments 102 to at least one corresponding one of the plurality of conductive segments 103. The arrangement will be described later.

Referring to fig. 1A to 1D, fig. 1B is a schematic diagram of a plurality of conductive lines 101 in fig. 1A according to some embodiments of the disclosure, fig. 1C is a schematic diagram of a portion of the conductive line 102 in fig. 1A according to some embodiments of the disclosure, and fig. 1D is a schematic diagram of an inductor 110 formed by the plurality of

conductive lines

101 and 102 in fig. 1B to 1C according to some embodiments of the disclosure.

The plurality of conductive segments 101 in fig. 1B are arranged corresponding to the plurality of crossover segments 102A-102E (i.e., portions of conductive segments 102) in fig. 1C. As shown in fig. 1D, a plurality of jumper segments 102A-102G are disposed corresponding to the plurality of open portions C1-a-C1-G between the plurality of conductive line segments 101 of fig. 1B, respectively, wherein the plurality of conductive line segments 101 are stacked on the plurality of jumper segments 102A-102G. The plurality of vias V12 are disposed corresponding to two ends of the plurality of jumper segments 102A-102G to couple the plurality of jumper segments 102A-102G to the plurality of conductive line segments 101.

In some embodiments, the plurality of conductive line segments 101 of fig. 1B and the plurality of jumper segments 102A-102G of fig. 1C are coupled to each other via a plurality of vias V12 to form the inductor 110. For example, the plurality of conductive segments 101 in the first area a1 are disposed from the first port P1-1 of the inductor 110 sequentially through the outer periphery of the first area a1 and the plurality of

cross-connect segments

102A, 102F, and 102B, and are coupled to the outer periphery of the first area a1 near the second area a 2. The plurality of conductive segments 101 in the second area a2 are sequentially disposed from the outer periphery of the first area a1 through the outer periphery of the second area a2, the third port P1-3 of the inductor 110 and the

cross-connection segments

102E, 102G, 102D and 102C, and are coupled to the second port P1-2 of the inductor 110. In some embodiments, the first port P1-1 and the second port P1-2 may operate as input/output ports, and the third port P1-3 may operate as a center tap.

In some embodiments, the plurality of conductive line segments 101 form two spiral coils with multiple turns in the first region a1 and the second region a2, respectively, to form the 8-shaped inductor 110. For example, as shown in fig. 1D, the plurality of conductive line segments 101 in the first area a1 are arranged clockwise from the outer turn to the inner turn to form a helical coil. The plurality of conductive line segments 101 in the second area a2 are laid out counterclockwise from the outer turn to the inner turn to form another spiral coil. The two coils may form a figure 8 inductor 110. By the above arrangement, if the two spiral coils receive the signal and generate magnetic fields respectively, the magnetic field directions of the two magnetic fields are opposite and can be cancelled out. Thus, noise coupling (e.g., electromagnetic interference (EMI)) may be reduced.

In addition, as shown in fig. 1D, a plurality of vias V12 are disposed at the innermost circle of the inductor 110 to couple the lower conductive line segments 102F-102G (as shown in fig. 1C). By this stacking, the quality factor of the inductor 110 can be further adjusted.

Referring to fig. 1A and 1E to 1H, fig. 1E is a schematic diagram illustrating arrangement of a part of the conductive line segment 102 in fig. 1A according to some embodiments of the present disclosure, fig. 1F is a schematic diagram illustrating arrangement of a plurality of conductive line segments 103 in fig. 1A according to some embodiments of the present disclosure, fig. 1G is a schematic diagram illustrating arrangement of an inductor 120 formed by the plurality of

conductive line segments

102 and 103 in fig. 1E and 1F according to some embodiments of the present disclosure, and fig. 1H is a schematic diagram illustrating arrangement of all the conductive line segments 102 in fig. 1C and 1E according to some embodiments of the present disclosure.

The plurality of conductive line segments 102 in fig. 1E are arranged corresponding to the plurality of crossover line segments 103A to 103O (i.e., the plurality of conductive line segments 103) in fig. 1F. For ease of understanding, fig. 1G shows the arrangement of the plurality of conductive line segments 102 of fig. 1E, the jumper segments 102C of fig. 1D, and the plurality of vias V23, and fig. 1H shows only the arrangement of all of the conductive line segments 102 of fig. 1A.

As shown in FIG. 1G, a plurality of jumper segments 103A-103F and 103J-103O are disposed corresponding to a plurality of break portions C2-A-C2-F and C2-J-C2-O, respectively, between the plurality of conductive line segments 102 of FIG. 1E, and a plurality of jumper segments 103G-103I and jumper segment 102C of FIG. 1D are disposed corresponding to break portion C2-G between the plurality of conductive line segments 102 of FIG. 1E. The plurality of conductive line segments 102 are stacked on the plurality of crossover line segments 103A-103O. In some embodiments, a portion of the plurality of

jumper segments

103B, 103E, 103K, and 103N are stacked under the

jumper segments

102F and 102G of fig. 1C (as shown in fig. 1C) to increase the coupling between the inductor 110 and the inductor 120.

The plurality of vias V23 are disposed corresponding to two ends of the plurality of jumper segments 103A-103O to couple the plurality of jumper segments 103A-103O to the plurality of conductive line segments 102. Specifically, the jumper segment 103I is disposed between the vias V23-1 and V23-2 (adjacent to the via V12-1 in FIG. 1D) to couple the outer lane of the second region A2 to the jumper segment 102C. Similarly, the jumper segment 103H is disposed between vias V23-3 (adjacent to via V12-2 of FIG. 1D) and V23-4, respectively, to couple the jumper segment 102C to the outer lane of the first zone A1. In other words, in some embodiments, the jumper segment 102C may be used to bridge both the inductor 110 of fig. 1D and the inductor 120 of fig. 1G.

In some embodiments, the plurality of conductive line segments 102 of fig. 1H and the plurality of cross-connection segments 103A-103O of fig. 1F are coupled to each other via a plurality of vias V23 to form the inductor 120. For example, as shown in fig. 1G, the plurality of conductive segments 102 are disposed from the first port P2-1 of the inductor 120 through the outer circle of the second region a2, the jumper segment 103I, the jumper segment 102C, the jumper segment 103H, the outer circle of the first region a1, the plurality of

jumper segments

103D, 103A, and 103E, the inner circle of the first region a1, and the plurality of

jumper segments

103B, 103C, 103F, and 103A (and/or the outer circle segment 102-1 of the first region a 1), the third port P2-3 of the inductor 120, the jumper segment 103G, and coupled to the second region a2 adjacent to the outer circle of the first region a1 in this order. Then, the plurality of conductive segments 102 are disposed from the outer edge of the second region a2 through the plurality of

cross-connection segments

103M, 103O, 103K, the inner edge of the second region a2 and the plurality of

cross-connection segments

103N, 103L and 103J, 103O (and/or the outer edge segment 102-2 of the second region a 2), and are coupled to the second port P2-2. In some embodiments, the first port P2-1 and the second port P2-2 may operate as input/output ports, and the third port P2-3 may operate as a center tap.

In some embodiments, the inductor 120 may operate without using the outer circle segment 102-1 of the first area a1 and the outer circle segment 102-2 of the second area a2, under which condition the outer circle of the inductor 120 may be connected to the right side of the crossover segment 103A and the right side of the crossover segment 103O through an additional via V23 (not shown), wherein the left side and the right side of the crossover segment 103A are not connected and the left side and the right side of the crossover segment 103O are not connected. Compared to the above example, as shown in fig. 1G, since the resistance of RDL is lower than that of metal layer M6, by disposing outer circle segments 102-1 and 102-2, the resistance of the trace of inductor 120 can be further reduced, so as to enhance the performance of inductor 120.

In some embodiments, the conductive line segments 102 of fig. 1E and the jumper segment 102C of fig. 1C form a plurality of spiral coils in the first region a1 and the second region a2 to form an 8-shaped inductor. For example, as shown in fig. 1G, the plurality of conductive line segments 102 in the first area a1 are laid clockwise from outer turns to inner turns to form a helical coil. The plurality of conductive line segments 102 in the second region a2 are laid out counterclockwise from the outer turn to the inner turn to form another helical coil. The two coils form an 8-shaped inductor 120, and the directions of the magnetic fields generated by the two coils are opposite to each other, as described above, this arrangement can reduce noise coupling, so as to improve the performance of the inductor 120.

Accordingly, the transformer apparatus 100 of fig. 1A can be formed by the inductor 110 of fig. 1D and the inductor 120 of fig. 1G, wherein the inductor 110 is stacked on the inductor 120. In this example, the transformer apparatus 100 is formed by two

inductors

110 and 120 which are not symmetrical. In some embodiments, the plurality of cross-connect segments 102F-102G are used only for the stacked inductor 110. In this example, the inductor 110 is two 4-turn helical coils, and the inductor 120 is substantially two 3-turn helical coils. In some embodiments, the inductance ratio between the inductor 110 and the inductor 120 is substantially 3:2 due to the effect of mutual inductance.

The transformer apparatus 100 using asymmetric inductance is merely an example, and the present disclosure is not limited thereto. The transformer apparatus 100 may also be implemented with two inductors that are symmetrical according to different applications.

In some related art, transformer devices formed using two spiral inductor stacks typically require at least four metal layers to implement. Because the resistance values of the metal layers are different, if the number of the used metal layers is more, the symmetry between the inductors is possibly reduced, and the quality factor is reduced. In addition, as the number of metal layers used is larger, more area may be required to improve the symmetry of the inductor.

Compared to the related art, as described above, the inductor 110 is formed by the plurality of conductive segments 101 disposed on the first layer (e.g., UTM layer) and the partial conductive segment 102 disposed on the second layer (e.g., RDL), and the inductor 120 is formed by the plurality of conductive segments 102 disposed on the second layer and the partial conductive segment 103 disposed on the third layer. The disconnected portion of the inductor 110 may be connected by a plurality of cross-connection segments 102A-102G of the second layer, and the disconnected portion of the inductor 120 may be connected by a plurality of cross-connection segments 103A-103O of the third layer.

As shown in fig. 1D, a plurality of conductive line segments 101 connected by the outer turns to the inner turns and a plurality of jumper segments 102A to 102G form a plurality of interleaved portions CR1 in the X direction. For example, the jumper segment 102A is used to connect one turn of the spiral inductor located in the first region a1 to another turn and is disposed to intersect with the conductive line segment 101, thereby forming an intersection CR 1. And so on, the inductor 110 has a plurality of interleaved portions CR1 in the X direction. As shown in FIG. 1G, the plurality of conductive line segments 102 and the plurality of

crossover line segments

103C, 103D, 103L and 103M connected from the outer turns to the inner turns form a plurality of interleaved sections CR2-1 and CR2-2 in the Y direction, where the X direction is different from the Y direction. For example, jumper segment 103C is used to connect one turn of the spiral inductor located in first region A1 to another turn and is interleaved with conductive line segment 102 to form part of interleaved portion CR 2-1. And so on, inductor 120 has multiple interleaved sections CR2-1 and CR2-2 in the Y-direction. By the above arrangement, the crossed portions of the inductor 110 and the inductor 120 can be staggered with each other. Thus, the

inductors

110 and 120 can be formed by using two metal layers (e.g., UTM layer and RDL) with the lowest resistance densely in a unit area, thereby improving the performance of the transformer apparatus 100.

In the foregoing embodiments, the square inductor is used as an example, but the disclosure is not limited thereto. Inductors of various shapes (e.g., hexagonal, octagonal, etc.) can be adapted to the above arrangement, and are therefore also covered by the present disclosure. In the square inductor embodiment, the X direction and the Y direction may be two mutually perpendicular directions. In embodiments with differently shaped inductors, the X-direction is different from the Y-direction.

Referring to fig. 2, fig. 2 is a measurement result of the transformer apparatus 100 of fig. 1A according to some embodiments of the disclosure. As previously described, the transformer apparatus 100 is formed using

asymmetric inductors

110 and 120. As shown in fig. 2, the inductance curve L1 and the quality factor Q1 of the inductor 110 are different from the inductance curve L2 and the quality factor Q2 of the inductor 120. As shown in fig. 2, the quality factor of the stacked inductor can be effectively improved by the arrangement of the present invention. For example, as shown in fig. 2, when applied to a frequency of 2.4G, the inductance value of the inductor 110 is about 4.93 nehenrys (nH) and has a quality factor of about 6.06. The inductance value of the inductor 120 is about 3.2nH and has a quality factor of about 3.69. The above values are merely examples, and the present disclosure is not limited to the above values.

Referring to fig. 3, fig. 3 is a schematic diagram illustrating another arrangement of the transformer apparatus 300 of fig. 1A according to some embodiments of the disclosure.

In contrast to fig. 1A, in this example, the plurality of conductive segments 101 form two 3-turn helical coils, and the plurality of conductive segments 102 form two 4-turn helical coils, so as to form a transformer apparatus 300 with an inductance ratio of 3: 2. In various embodiments, the number of turns of the inductor 110 and the number of turns of the inductor 120 may be adjusted according to actual requirements. Therefore, the inductor 110 and the inductor 120 with various turns are covered by the present disclosure. In various embodiments, the number of turns of the

conductive segments

101 and 102 or the need to provide the vias V12 at the innermost turn thereof may be adjusted according to the capacitance between the inductors and/or the quality factor.

Referring to fig. 4, fig. 4 is a schematic view illustrating another arrangement of the plurality of

conductive line segments

101 and 102 of fig. 1A according to some embodiments of the present disclosure.

Compared to FIG. 1A, in this example, the first port P1-1 and the second port 1-2 of the inductor 110 are disposed in the second region A2, and the first port P2-1 and the second port P2-2 of the inductor 120 are disposed in the first region A1. In various embodiments, the positions of the first port P1-1 and the second port 1-2 of the inductor 110 and the first port P2-1 and the second port P2-2 of the inductor 120 may be adjusted according to actual requirements.

In some embodiments, if a center tap is required, a center tap port (e.g., the third port P1-3) may be disposed in the middle of the signal path between the first port P1-1 and the second port P1-2, and another center tap port (e.g., the third port P2-3) may be disposed in the middle of the signal path between the first port P2-1 and the second port P2-2.

Referring to fig. 5, fig. 5 is a schematic diagram illustrating another arrangement of the plurality of

conductive line segments

102 and 103 of fig. 1A according to some embodiments of the present disclosure.

In this example, the plurality of conductive segments 103 further includes cross-connection segments 103P-103S. Both ends of the cross-connection segment 103P are respectively provided with a through hole V23 for coupling the first port P2-1 to one end of the inner circle of the second region A2. A through hole V23 is disposed on each end of the cross-connection segment 103Q to couple the second port P2-2 to the other end of the inner loop of the second area A2. Through holes V23 are disposed at both ends of the

cross-connection segments

103R and 103S to couple the third port P2-3 to the inner circumference of the first region A1.

As shown in fig. 1G, the plurality of conductive line segments 102 of the inductor 120 are arranged from the outer circle to the inner circle in the first area a1, and further arranged from the outer circle to the inner circle in the second area a 2. Compared to fig. 1G, in this example, half of the windings of the plurality of conductive line segments 102 are sequentially disposed from the inner winding to the outer winding in the second area a2, all the windings are disposed in the first area a1, and the remaining windings are disposed back to the second area a2 to form an inductor.

For ease of illustration, the multiple turns of the coil are, in order from outside to inside, a first turn, a second turn, a third turn, and a fourth turn, wherein the fourth turn is configured to be coupled to the third turn via a conductive line segment 103. As shown in fig. 5, the plurality of

conductive line segments

102 and 103 are disposed from the first port P2-1 sequentially through the cross-connection segment 103P, a portion of the multi-turn winding of the second zone a2 (including the left half of the third turn, the right half of the second turn, and the left half of the first turn), the multi-turn winding of the first zone a1, another portion of the multi-turn winding of the second zone a2 (including the right half of the first turn, the left half of the second turn, and the left half of the third turn), and the cross-connection segment 103Q, and are coupled to the second port P2-2. With this arrangement, when operating in common mode (i.e., the first port P2-1 and the second port P2-2 receive currents in the same direction), the signal received from the first port P2-1 and the signal received from the second port P2-2 have opposite current directions in the inductor 120. Thus, the common mode inductance of the inductor 120 can be made lower.

The above-mentioned arrangement is only described by taking the inductor 120 as an example. In other embodiments, the inductor 110 may be configured similarly. That is, the first port P1-1, the second port P1-2 and the third port P1-3 extend from the inner circle via additional segments, wherein the plurality of conductive segments 101 are sequentially routed from the inner circle to the outer circle in the first area A1, then routed in the second area A2, and then returned to the first area A1 to provide the remaining paths. In some embodiments, the additional line segments can be implemented by the conductive line segment 102. The arrangement manner here is similar to that described in connection with fig. 5, and therefore, the description thereof is not repeated here.

In summary, the inductor is formed by connecting the conductive line segments of different layers by the crossover line segments arranged in different directions. Therefore, the quality factor of the inductor can be effectively improved in unit area, and the efficiency of the transformer device is further improved.

Although the present disclosure has been described with reference to particular embodiments, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the disclosure, and therefore, the scope of the disclosure should be limited only by the terms of the appended claims.

Claims

1. A transformer apparatus, comprising:

a plurality of first conductive line segments formed on a first metal layer;

a plurality of second line segments formed on a second metal layer and including a plurality of second conductive line segments and a plurality of first cross-connection line segments, wherein the first cross-connection line segments are used for connecting the first conductive line segments to form a first inductor; and

a plurality of third conductive segments formed on a third metal layer and including a plurality of second jumper segments, wherein the second metal layer is on the third metal layer, and the second jumper segments are used to connect the second conductive segments to form a second inductor,

the first inductor is located on the second inductor, the first crossover sections and the first conductive line sections form a plurality of first staggered parts in a first direction, the second crossover sections and the second conductive line sections form a plurality of second staggered parts in a second direction, and the first direction is different from the second direction.

2. The transformer apparatus of claim 1, wherein the first conductive wire segments form a first spiral coil in a first region and a second spiral coil in a second region, the first spiral coil and the second spiral coil each having a plurality of windings, and the first spiral coil and the second spiral coil are configured to form the first inductor.

3. The transformer apparatus of claim 2, wherein the first inductor comprises a first port, a second port and a third port, the first conductive segments are disposed from the outer circumference of the first spiral coil to the inner circumference of the first spiral coil in the first region and coupled from the first port to the outer circumference of the second spiral coil through a portion of the first crossover segments, and the first conductive segments are disposed from the outer circumference of the second spiral coil to the inner circumference of the second spiral coil in the second region and coupled from the third port to the second port through another portion of the first crossover segments.

4. The transformer device of claim 2, wherein one of the first crossover segments connects a first turn of the first helical coil to a second turn of the first helical coil and is interleaved with one of the first conductive segments to form one of the first interleaved portions.

5. The transformer apparatus of claim 1, wherein the second conductive wire segments form a first helical coil in a first region and a second helical coil in a second region, the first and second helical coils each having a plurality of windings, and the first and second helical coils forming the second inductor.

6. The transformer apparatus of claim 5, wherein the second inductor comprises a first port, a second port and a third port, the second conductive segments are disposed from the outer circumference of the first spiral coil to the inner circumference of the first spiral coil in the first region and coupled to the outer circumference of the second spiral coil through a portion of the second jumper segments, and the second conductive segments are disposed from the outer circumference of the second spiral coil to the inner circumference of the second spiral coil in the second region and coupled to the second port through another portion of the second jumper segments.

7. The transformer device of claim 5, wherein one of the second crossover segments is for connecting a first turn of the first helical coil to a second turn of the first helical coil and is interleaved with one of the second conductive segments to form one of the second interleaved portions.

8. The transformer apparatus of claim 1, wherein the first conductive segments or the second conductive segments form a first helical coil in a first region and a second helical coil in a second region, and the first helical coil and the second helical coil each have a plurality of turns, wherein the first conductive segments or the second conductive segments are arranged to sequentially form a portion of the turns of the first helical coil, the turns of the second helical coil, and a remainder of the turns of the first helical coil.

9. The transformer apparatus of claim 8, wherein the first conductive segments or the second conductive segments are disposed from the inner turn of the first helical coil to the outer turn of the first helical coil in the first region, and the first conductive segments or the second conductive segments are disposed from the inner turn of the second helical coil to the outer turn of the second helical coil in the second region.

10. The transformer apparatus of claim 1, further comprising:

the first through holes are correspondingly arranged at the tail ends of the first cross-connection sections so as to couple the first cross-connection sections to the first conductive line sections; and

and a plurality of second through holes which are correspondingly arranged at a plurality of tail ends of the third conductive line segments so as to couple the second jumper line segments to the second conductive line segments.