CN110673476A - Method and system for constructing multi-input multi-output light path real-time correction model - Google Patents
Method and system for constructing multi-input multi-output light path real-time correction model Download PDFInfo
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Abstract
The invention discloses a method and a system for constructing a multi-input multi-output optical path real-time correction model, and relates to the technical field of optical path correction. The method comprises the steps of constructing a multi-input multi-output light path; driving the first movable mirror and the second movable mirror to rotate along the X/Y axis one by one according to a set angle, and recording an angle value and a position value detected by the angle detector and the position detector respectively; constructing a relation matrix according to the relation between the rotation angle of the first movable mirror and the second movable mirror along the X/Y axis and the detected angle value and position value; and solving a resolving model from the first movable mirror and the second movable mirror to the angle detector and the position detector, constructing a control model according to the controlled system delay and the controlled movable mirror mathematical model, integrating the resolving model, and completing construction of a multi-input multi-output light path real-time correction model. The method has good applicability to the construction of the optical path correction model, and can meet the optical path correction requirements under various conditions.
Description
Technical Field
The invention relates to the technical field of optical path correction, in particular to a method and a system for constructing a multi-input multi-output optical path real-time correction model.
Background
The optical path correction system is applied to various complex optical systems, and mainly measures the Position or the direction of a light beam by using a photoelectric sensor such as a Position Sensitive Detector (PSD) and a Charge Coupled Device (CCD), feeds the measured value back to a control system, drives a moving mirror through the control system, corrects the optical path in real time, and ensures that the light beam is emitted according to a preset requirement.
At present, an optical path correction model is mainly constructed in the following way:
1. the method adopts a single-input single-output mode to construct a model only related to angles or positions, so that the model can only correct a single angle or a single position;
2. when the angle and the position are corrected simultaneously, an iteration construction mode at each step or a mode of separately constructing a model in the X direction and the Y direction of the light path is adopted at the present stage.
When the frequency component of the optical path disturbance is complex, the convergence speed of each step of iterative adjustment mode is slow, and the correction effect cannot be ensured; when the X direction or the Y direction of the movable mirror is simultaneously coupled with the X, Y direction detected by the photoelectric sensor, the adoption of the X direction and the Y direction separated correction mode can cause that the correction model is not accurate enough and the correction effect is not good.
Disclosure of Invention
The invention aims to overcome the defects of the background technology and provides a method and a system for constructing a multi-input multi-output optical path real-time correction model.
The invention provides a method for constructing a multi-input multi-output light path real-time correction model, which comprises the following steps:
step 3, constructing a relation matrix K, a rotation angle matrix M of the first movable mirror and the second movable mirror and a detected angle value and position value matrix Y according to the relation between the rotation angle of the first movable mirror and the second movable mirror along the X/Y axis and the detected angle value and position value respectively;
Y＝K*M
step 4, solving a resolving model W from the first movable mirror and the second movable mirror to the angle detector and the position detector according to the obtained relation matrix K;
in the formula: kPIs a proportionality coefficient, KIIs the integral coefficient, KDIs the differential coefficient, s is the transfer function;
and 7, integrating the calculation model W in the step 4, the control model G in the step 5 and the control algorithm in the step 6 to complete the construction of the multi-input multi-output optical path real-time correction model X, wherein X is G X W.
The preferred scheme is as follows: the method comprises the following steps of driving a first movable mirror and a second movable mirror to rotate along an X/Y axis one by one according to a set angle, and recording an angle value and a position value which are respectively detected by an angle detector and a position detector, wherein the method specifically comprises the following steps:
step 2.1, when the X/Y axes of the first movable mirror and the second movable mirror are all at zero positions, recording the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝0)；
Step 2.2, driving the first movable mirror to rotate along the X axis for full stroke at 1/10, 2/10, 3/10 and 4/10 … … 10/10 angles, and recording the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝1、2、3……10)；
And 2.3, driving the first movable mirror to rotate along the Y axis for full travel at 1/10, 2/10, 3/10 and 4/10 … … 10/10 angles, and recording the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝11、12、13……20)；
And 2.4, driving the second movable mirror to rotate along the X axis for full stroke at 1/10, 2/10, 3/10 and 4/10 … … 10/10 angles, and recording the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝21、22、23……30)；
And 2.5, driving the second movable mirror to rotate along the Y axis for full travel at 1/10, 2/10, 3/10 and 4/10 … … 10/10 angles, and recording the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝31、32、33……40)。
The preferred scheme is as follows: recording the position and the angle value detected in the step 2.1 to the step 2.5 for 2 to 5 times, solving the relation between the angle of the first movable mirror and the second movable mirror and the detected position and angle value, and obtaining the X-axis rotation angle p of the first movable mirror1First moving mirrorY-axis rotation angle q1The second movable mirror X-axis rotation angle p2The Y-axis rotation angle q of the second movable mirror2With the value gamma measured by the position detector1、δ1And the measured value gamma of the angle detector2、δ2A matrix relationship between them.
The preferred scheme is as follows: recording the position and angle values gamma detected by the position detector and the angle detector1、δ1、γ2、δ2Obtaining the output p of the real-time light path correction model after inputting the output p into the real-time light path correction model X1＇、q1＇、p2＇、q2＇；
Another aspect of the present invention provides a system for constructing a real-time calibration model of a multiple-input multiple-output optical path, including:
the first movable mirror and the second movable mirror are used for correcting the light path, the first movable mirror reflects the light beam to the second movable mirror, and the second movable mirror reflects the light beam to the spectroscope;
the beam splitter is used for splitting the light beam into two paths of light beams, one path of light beam is focused by the lens and then emitted to the angle detector, and the other path of light beam is emitted to the position detector;
an angle detector for detecting the angle of the light path X, Y;
a position detector for detecting a position of the light path X, Y;
the controller is used for driving the first movable mirror and the second movable mirror to rotate along the X/Y axis respectively and recording the angle value and the position value detected by the angle detector and the position detector respectively; constructing a relation matrix K, a rotation angle matrix M of the first movable mirror and the second movable mirror, and a detected angle value matrix Y according to the relation between the rotation angle of the first movable mirror and the second movable mirror along the X/Y axis and the detected angle value and position value;
Y＝K*M
solving a resolving model W from the first movable mirror and the second movable mirror to the angle detector and the position detector according to the obtained relation matrix K;
constructing a control model G according to the controlled system delay and the controlled moving mirror mathematical model;
in the formula: kPIs a proportionality coefficient, KIIs the integral coefficient, KDIs the differential coefficient, s is the transfer function;
discretizing the control model G to obtain an available control algorithm;
and integrating the resolving model W, the control model G and the control algorithm to complete the construction of the multi-input multi-output light path real-time correction model X, wherein X is G X W.
The preferred scheme is as follows: the first movable mirror and the second movable mirror are driven to rotate along the X/Y axis respectively, and the angle value and the position value detected by the angle detector and the position detector respectively are recorded, and the angle value and the position value comprise:
when the X/Y axes of the first movable mirror and the second movable mirror are at zero positions, the controller records the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝0)；
The controller drives the first movable mirror to rotate for 1/10, 2/10, 3/10 and 4/10 … … 10/10 degrees of full travel along the X axis, and records the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝1、2、3……10)；
The controller drives the first movable mirror to rotate along the Y axis for 1/10, 2/10, 3/10 and 4/10 … … 10/10 degrees of full travel, and records the positions detected by the position detector and the angle value gamma1,i、δ1,i、γ2,i、δ2,i(i＝11、12、13……20)；
The controller drives the second movable mirror to rotate for 1/10, 2/10, 3/10 and 4/10 … … 10/10 degrees of full travel along the X axis, and records the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝21、22、23……30)；
The controller drives the second movable mirror to rotate for 1/10, 2/10, 3/10 and 4/10 … … 10/10 degrees of full travel along the Y axis, and records the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝31、32、33……40)。
The preferred scheme is as follows: the controller records the positions and the angle values detected by the position detector and the angle detector for 2-5 times, the relation between the angle of the first movable mirror and the second movable mirror and the detected positions and angle values is solved, and the X-axis rotation angle p of the first movable mirror is obtained1The Y-axis rotation angle q of the first movable mirror1The second movable mirror X-axis rotation angle p2The Y-axis rotation angle q of the second movable mirror2With the value gamma measured by the position detector1、δ1And the measured value gamma of the angle detector2、δ2A matrix relationship between them.
The preferred scheme is as follows: the controller records the positions and the angle values gamma detected by the position detector and the angle detector1、δ1、γ2、δ2Obtaining the output p of the real-time light path correction model after inputting the output p into the real-time light path correction model X1＇、q1＇、p2＇、q2＇；
On the basis of the technical scheme, compared with the prior art, the invention has the following advantages:
according to the method and the system for constructing the multi-input multi-output optical path real-time correction model, the relation between the X direction of the first movable mirror and the photoelectric detector X, Y and the relation between the Y direction of the first movable mirror and the second movable mirror and the position detector and the angle detector X, Y are calibrated, and the multi-input multi-output optical path real-time correction model is constructed after the control model is added. The model construction mode can be adopted to simultaneously correct the position and angle value input detected by the position detector and the angle detector. The influence of X, Y directional coupling on the correction effect can be eliminated by adopting the model construction mode; the model construction mode can be used for correcting the optical path under the complex disturbance frequency component. The method has good applicability to the construction of the optical path correction model, and can meet the optical path correction requirements under various conditions.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of the present invention;
FIG. 2 is a flow diagram of a method of an embodiment of the invention;
fig. 3 is a control block diagram of an embodiment of the present invention.
Reference numerals: 1-a first movable mirror, 2-a second movable mirror, 3-a spectroscope, 4-a lens, 5-an angle detector and 6-a position detector.
Detailed Description
The invention is described in further detail below with reference to the figures and the embodiments.
Example 1
Referring to fig. 1 to 3, an embodiment of the present invention provides a method for constructing a multiple-input multiple-output optical path real-time calibration model, including the following steps:
And 3, driving the first movable mirror 1 to rotate for full travel along the X axis at 1/10, 2/10, 3/10 and 4/10 … … 10/10 angles (namely, the first movable mirror 1 rotates and moves along the X axis deflection range), and recording the positions detected by the position detector 6 and the angle detector 5 and an angle value gamma1,i、δ1,i、γ2,i、δ2,i(i＝1、2、3……10)。
And 4, driving the first movable mirror 1 to rotate along the Y axis for full travel at 1/10, 2/10, 3/10 and 4/10 … … 10/10 angles (namely, the first movable mirror 1 rotates along the Y axis deflection range), and recording the positions and the angle values gamma detected by the position detector 6 and the angle detector 51,i、δ1,i、γ2,i、δ2,i(i＝11、12、13……20)。
And 5, driving the second movable mirror 2 to rotate for full travel along the X axis at 1/10, 2/10, 3/10 and 4/10 … … 10/10 angles (namely, the second movable mirror 2 rotates along the X axis deflection range), and recording the positions detected by the position detector 6 and the angle detector 5 and an angle value gamma1,i、δ1,i、γ2,i、δ2,i(i＝21、22、23……30)。
And 6, driving the second movable mirror to rotate along the Y axis for full travel at 1/10, 2/10, 3/10 and 4/10 … … 10/10 angles (namely, the second movable mirror 2 rotates along the Y axis deflection range), and recording the positions and the angle values gamma detected by the position detector 6 and the angle detector 51,i、δ1,i、γ2,i、δ2,i(i＝31、32、33……40)。
And 7, recording the position and the angle value detected in the steps 2 to 6 for 2 to 5 times, solving the relation between the angle of the first movable mirror 1 and the second movable mirror 2 and the detected position and angle value, and obtaining the X-axis rotation angle p of the first movable mirror 11The Y-axis rotation angle q of the first movable mirror 11The X-axis rotation angle p of the second movable mirror 22The Y-axis rotation angle q of the second movable mirror 22With the value gamma measured by the position detector 61、δ1And the value gamma measured by the angle detector 52、δ2And constructing a relation matrix K, a rotation angle matrix M of the first movable mirror and the second movable mirror, and a detected angle value and position value matrix Y, wherein Y is K.
And 8, solving a resolving model W from the first movable mirror and the second movable mirror to the angle detector and the position detector according to the obtained relation matrix K.
Step 9, constructing a control model G according to the controlled system delay and the controlled mirror mathematical model;
in the formula: kPIs a proportionality coefficient, KIIs the integral coefficient, KDIs the differential coefficient and s is the transfer function.
And step 10, discretizing the control model G to obtain an available control algorithm.
And 11, integrating the calculation model W in the step 8, the control model G in the step 9 and the control algorithm in the step 10 to complete the construction of the multi-input multi-output optical path real-time correction model X, wherein X is G X W.
Step 12, recording the positions and the angle values gamma detected by the position detector and the angle detector1、δ1、γ2、δ2Obtaining the output p of the real-time light path correction model after inputting the output p into the real-time light path correction model X1＇、q1＇、p2＇、q2＇；
Example 2
Referring to fig. 1 to 3, another aspect of the embodiments of the present invention provides a system for constructing a multiple-input multiple-output optical path real-time calibration model, including:
the first movable mirror 1 and the second movable mirror 2 are used for correcting the light path, the first movable mirror 1 reflects the light beam to the second movable mirror 2, and the second movable mirror 2 reflects the light beam to the spectroscope 3.
And the beam splitter 3 is used for splitting the light beam into two paths of light beams, wherein one path of light beam is focused by the lens 4 and then emitted to the angle detector 5, and the other path of light beam is emitted to the position detector 6.
And an angle detector 5 for detecting the angle of the light path X, Y.
And a position detector 6 for detecting the position of the light path X, Y.
Controller forWhen the X/Y axes of the first movable mirror 1 and the second movable mirror 2 are at zero positions, the positions and the angle values gamma detected by the position detector 6 and the angle detector 5 are recorded1,i、δ1,i、γ2,i、δ2,i(i＝0)；
The controller drives the first movable mirror 1 to rotate for 1/10, 2/10, 3/10 and 4/10 … … 10/10 degrees (namely, the first movable mirror 1 rotates in the X-axis deflection range) of a full stroke along the X axis, and records the positions detected by the position detector 6 and the angle detector 5 and the angle value gamma1,i、δ1,i、γ2,i、δ2,i(i＝1、2、3……10)。
The controller drives the first movable mirror 1 to rotate for 1/10, 2/10, 3/10 and 4/10 … … 10/10 degrees (namely, the first movable mirror 1 rotates in a deflection range of the Y axis) along the full stroke of the Y axis, and records the positions detected by the position detector 6 and the angle detector 5 and the angle value gamma1,i、δ1,i、γ2,i、δ2,i(i＝11、12、13……20)。
The controller drives the second movable mirror 2 to rotate for 1/10, 2/10, 3/10 and 4/10 … … 10/10 degrees (namely, the second movable mirror 2 rotates in the X-axis deflection range) of a full stroke along the X axis, and records the positions detected by the position detector 6 and the angle detector 5 and the angle value gamma1,i、δ1,i、γ2,i、δ2,i(i＝21、22、23……30)；
The controller drives the second movable mirror 2 to rotate for 1/10, 2/10, 3/10 and 4/10 … … 10/10 degrees of full travel along the Y axis (namely, the second movable mirror 2 rotates along the Y axis deflection range), and records the positions detected by the position detector 6 and the angle detector 5 and the angle value gamma1,i、δ1,i、γ2,i、δ2,i(i＝31、32、33……40)。
The controller records the positions and the angle values detected by the position detector 6 and the angle detector 5 for 2-5 times, the relation between the angles of the first movable mirror 1 and the second movable mirror 2 and the detected positions and angle values is solved, and the X-axis rotation angle p of the first movable mirror 1 is obtained1The Y-axis rotation angle q of the first movable mirror 11The X-axis rotation angle p of the second movable mirror 22The Y-axis rotation angle of the second movable mirror 2Degree q of2With the value gamma measured by the position detector 61、δ1And the value gamma measured by the angle detector 52、δ2And constructing a relation matrix K, a rotation angle matrix M of the first movable mirror 1 and the second movable mirror 2, and a detected angle value and position value matrix Y, wherein Y is K.
The controller solves a resolving model W from the first movable mirror 1 and the second movable mirror 2 to the angle detector 5 and the position detector 6 according to the obtained relation matrix K;
the controller constructs a control model G according to the controlled system delay and the controlled movable mirror mathematical model;
in the formula: kPIs a proportionality coefficient, KIIs the integral coefficient, KDIs the differential coefficient and s is the transfer function.
And discretizing the control model G by the controller to obtain a usable control algorithm.
The controller integrates the resolving model W, the control model G and the control algorithm to complete the construction of the multi-input multi-output light path real-time correction model X, wherein X is G W.
The controller records the positions and the angle values gamma detected by the position detector 6 and the angle detector 51、δ1、γ2、δ2Obtaining the output p of the real-time light path correction model after inputting the output p into the real-time light path correction model X1＇、q1＇、p2＇、q2＇；
Various modifications and variations of the embodiments of the present invention may be made by those skilled in the art, and they are also within the scope of the present invention, provided they are within the scope of the claims of the present invention and their equivalents.
What is not described in detail in the specification is prior art that is well known to those skilled in the art.
Claims (8)
1. A construction method of a multi-input multi-output optical path real-time correction model is characterized by comprising the following steps:
step 1, building a multi-input multi-output light path, wherein a light beam is emitted to a first movable mirror and then reflected to a second movable mirror by the first movable mirror, the light beam is reflected to a spectroscope by the second movable mirror, the light beam is divided into two paths of light beams by the spectroscope, one path of light beam is focused by a lens and then emitted to an angle detector, and the other path of light beam is emitted to a position detector;
step 2, driving the first movable mirror and the second movable mirror to rotate along the X/Y axis one by one according to a set angle, and recording an angle value and a position value which are respectively detected by the angle detector and the position detector;
step 3, constructing a relation matrix K, a rotation angle matrix M of the first movable mirror and the second movable mirror and a detected angle value and position value matrix Y according to the relation between the rotation angle of the first movable mirror and the second movable mirror along the X/Y axis and the detected angle value and position value respectively;
Y＝K*M
step 4, solving a resolving model W from the first movable mirror and the second movable mirror to the angle detector and the position detector according to the obtained relation matrix K;
step 5, constructing a control model G according to the controlled system delay and the controlled moving mirror mathematical model;
in the formula: kPIs a proportionality coefficient, KIIs the integral coefficient, KDIs the differential coefficient, s is the transfer function;
step 6, discretizing the control model G to obtain an available control algorithm;
and 7, integrating the calculation model W in the step 4, the control model G in the step 5 and the control algorithm in the step 6 to complete the construction of the multi-input multi-output optical path real-time correction model X, wherein X is G X W.
2. The method for constructing the multiple-input multiple-output optical path real-time correction model according to claim 1, wherein:
the method comprises the following steps of driving a first movable mirror and a second movable mirror to rotate along an X/Y axis one by one according to a set angle, and recording an angle value and a position value which are respectively detected by an angle detector and a position detector, wherein the method specifically comprises the following steps:
step 2.1, when the X/Y axes of the first movable mirror and the second movable mirror are all at zero positions, recording the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝0)；
Step 2.2, driving the first movable mirror to rotate along the X axis for full stroke at 1/10, 2/10, 3/10 and 4/10 … … 10/10 angles, and recording the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝1、2、3……10)；
And 2.3, driving the first movable mirror to rotate along the Y axis for full travel at 1/10, 2/10, 3/10 and 4/10 … … 10/10 angles, and recording the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝11、12、13……20)；
And 2.4, driving the second movable mirror to rotate along the X axis for full stroke at 1/10, 2/10, 3/10 and 4/10 … … 10/10 angles, and recording the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝21、22、23……30)；
And 2.5, driving the second movable mirror to rotate along the Y axis for full travel at 1/10, 2/10, 3/10 and 4/10 … … 10/10 angles, and recording the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝31、32、33……40)。
3. The method for constructing the multiple-input multiple-output optical path real-time correction model according to claim 2, wherein:
record for 2-5 times2.1-2.5, obtaining the relation between the angle of the first movable mirror and the second movable mirror and the detected position and angle value, and obtaining the X-axis rotation angle p of the first movable mirror1The Y-axis rotation angle q of the first movable mirror1The second movable mirror X-axis rotation angle p2The Y-axis rotation angle q of the second movable mirror2With the value gamma measured by the position detector1、δ1And the measured value gamma of the angle detector2、δ2A matrix relationship between them.
4. The method for constructing the multiple-input multiple-output optical path real-time correction model according to claim 3, wherein:
recording the position and angle values gamma detected by the position detector and the angle detector1、δ1、γ2、δ2Obtaining the output p of the real-time light path correction model after inputting the output p into the real-time light path correction model X1＇、q1′、p2′、q2′；
5. A construction system of a multi-input multi-output optical path real-time correction model is characterized by comprising the following components:
the first movable mirror and the second movable mirror are used for correcting the light path, the first movable mirror reflects the light beam to the second movable mirror, and the second movable mirror reflects the light beam to the spectroscope;
the beam splitter is used for splitting the light beam into two paths of light beams, one path of light beam is focused by the lens and then emitted to the angle detector, and the other path of light beam is emitted to the position detector;
an angle detector for detecting the angle of the light path X, Y;
a position detector for detecting a position of the light path X, Y;
the controller is used for driving the first movable mirror and the second movable mirror to rotate along the X/Y axis respectively and recording the angle value and the position value detected by the angle detector and the position detector respectively; constructing a relation matrix K, a rotation angle matrix M of the first movable mirror and the second movable mirror, and a detected angle value matrix Y according to the relation between the rotation angle of the first movable mirror and the second movable mirror along the X/Y axis and the detected angle value and position value;
Y＝K*M
solving a resolving model W from the first movable mirror and the second movable mirror to the angle detector and the position detector according to the obtained relation matrix K;
constructing a control model G according to the controlled system delay and the controlled moving mirror mathematical model;
in the formula: kPIs a proportionality coefficient, KIIs the integral coefficient, KDIs the differential coefficient, s is the transfer function;
discretizing the control model G to obtain an available control algorithm;
and integrating the resolving model W, the control model G and the control algorithm to complete the construction of the multi-input multi-output light path real-time correction model X, wherein X is G X W.
6. The system for constructing the multiple-input multiple-output optical path real-time correction model according to claim 5, wherein:
the first movable mirror and the second movable mirror are driven to rotate along the X/Y axis respectively, and the angle value and the position value detected by the angle detector and the position detector respectively are recorded, and the angle value and the position value comprise:
when the X/Y axes of the first movable mirror and the second movable mirror are at zero positions, the controller records the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝0)；
The controller drives the first movable mirror to rotate for 1/10, 2/10, 3/10 and 4/10 … … 10/10 degrees of full travel along the X axis, and records the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝1、2、3……10)；
The controller drives the first movable mirror to rotate along the Y axis for 1/10, 2/10, 3/10 and 4/10 … … 10/10 degrees of full travel, and records the positions detected by the position detector and the angle value gamma1,i、δ1,i、γ2,i、δ2,i(i＝11、12、13……20)；
The controller drives the second movable mirror to rotate for 1/10, 2/10, 3/10 and 4/10 … … 10/10 degrees of full travel along the X axis, and records the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝21、22、23……30)；
The controller drives the second movable mirror to rotate for 1/10, 2/10, 3/10 and 4/10 … … 10/10 degrees of full travel along the Y axis, and records the positions and the angle values gamma detected by the position detector and the angle detector1,i、δ1,i、γ2,i、δ2,i(i＝31、32、33……40)。
7. The system for constructing the multiple-input multiple-output optical path real-time correction model according to claim 6, wherein:
the controller records the positions and the angle values detected by the position detector and the angle detector for 2-5 times, the relation between the angle of the first movable mirror and the second movable mirror and the detected positions and angle values is solved, and the X-axis rotation angle p of the first movable mirror is obtained1The Y-axis rotation angle q of the first movable mirror1The second movable mirror X-axis rotation angle p2The Y-axis rotation angle q of the second movable mirror2With the value gamma measured by the position detector1、δ1And the measured value gamma of the angle detector2、δ2A matrix relationship between them.
8. The system for constructing the multiple-input multiple-output optical path real-time correction model according to claim 7, wherein:
the controller records the positions and the angle values gamma detected by the position detector and the angle detector1、δ1、γ2、δ2Obtaining the output p of the real-time light path correction model after inputting the output p into the real-time light path correction model X1＇、q1＇、p2＇、q2＇；
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