CN110644057A - Monocrystalline silicon texturing additive formula containing alkyl glycoside and use method - Google Patents

Monocrystalline silicon texturing additive formula containing alkyl glycoside and use method Download PDF

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CN110644057A
CN110644057A CN201910966020.7A CN201910966020A CN110644057A CN 110644057 A CN110644057 A CN 110644057A CN 201910966020 A CN201910966020 A CN 201910966020A CN 110644057 A CN110644057 A CN 110644057A
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monocrystalline silicon
texturing
silicon wafer
deionized water
solution
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阎建辉
邓小梅
卢建红
张丽
杨海华
陈婉君
刘云芳
陈文明
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Hunan Institute of Science and Technology
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    • C30B33/00After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/08Etching
    • C30B33/10Etching in solutions or melts
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    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
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    • H01L31/0236Special surface textures
    • H01L31/02363Special surface textures of the semiconductor body itself, e.g. textured active layers
    • HELECTRICITY
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    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
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    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract

The invention relates to an additive of monocrystalline silicon piece texturing solution containing alkyl glycoside, which comprises the following components: alkyl glycoside, disaccharide, organic sodium salt, inorganic salt, sodium silicate and the balance of water. The invention also discloses a texturing method of the monocrystalline silicon wafer, which comprises the following steps: 1) preparing a texturing additive; 2) preparing a texturing solution; 3) putting the monocrystalline silicon wafer into the texturing solution prepared in the step 2) for texturing, wherein the temperature of the texturing solution is 75-90 ℃, and the texturing time is 7-15 min; 4) and cleaning the monocrystalline silicon wafer subjected to the texturing solution by using mixed acid, cleaning the monocrystalline silicon wafer by using deionized water, and drying the monocrystalline silicon wafer to obtain the product. The texture surface pyramid has excellent texture effect, the size of the texture surface pyramid after texture surface is small, the distribution is narrow, and the reflection of light can be effectively reduced, so that the photoelectric conversion efficiency of the solar cell can be improved.

Description

Monocrystalline silicon texturing additive formula containing alkyl glycoside and use method
Technical Field
The invention belongs to the technical field of solar cell monocrystalline silicon wafers, and particularly relates to an influence of alkyl glycoside type and content on texturing of a monocrystalline silicon wafer.
Background
One of two important problems faced by the sustainable development of modern society is the energy problem, and the rapid development of the world economy brings benefits to human beings and is accompanied with a plurality of disadvantages, namely the excessive consumption of energy, which undoubtedly leads the human society to be in the situation of resource shortage, and then leads to the ecological environment problem. In order to protect the earth's home upon which humans rely for survival, the development of clean energy is at hand. The solar energy is the most important renewable energy source due to the huge storage amount, high feasibility of utilization, environmental protection and no pollution. People are continuously exploring the manufacturing process of the solar cell, the improvement of the photoelectric conversion efficiency of the solar cell is a target which is always pursued by people, the reduction of the loss of sunlight on the surface of monocrystalline silicon as far as possible is a main purpose of texturing of the monocrystalline silicon, and is also a main method for improving the photoelectric conversion efficiency. In the solar cell production process, the surface treatment plays a crucial role, and monocrystalline silicon without surface treatment only can utilize a part of light when sunlight irradiates the surface of a silicon wafer, and the other part of the light is directly reflected out and lost, and the loss amount is directly related to the surface texturing effect. Various methods for surface treatment of single crystal silicon have been explored, and among them, the chemical etching method is relatively inexpensive, cost-effective, simple in process, and has been widely used.
After the surface of the single crystal silicon is corroded (textured), an uneven textured surface which is similar to a pyramid with a certain size is formed on the surface, and the textured surface plays a great role because the textured surface can reflect light irradiated to the surface of the silicon wafer for many times, can greatly increase the transmittance of the light, and has the effect called as flame light efficiency. The optical efficiency of the flame enables the optical path of incident light on the silicon surface to be extended, the reflection loss of light is reduced, more photon-generated carriers are generated, the photoelectric conversion efficiency is further improved, and the cost performance of the cell is improved. The research of related documents finds that people develop various novel texturing processes and formulas, and the methods have various defects while obtaining better texturing effect.
The forming of the monocrystalline silicon suede is influenced by various factors, the type and concentration of the alkali solution, the original state of the silicon wafer, the texturing time and temperature, the components of the texturing formula and the like. The alkaline solution in the reagent required by the texture making is a main component, Isopropanol (IPA) is commonly used as an additive in the industry at present and is also a surfactant, and the addition of the IPA can increase the lubrication degree of the surface of the silicon wafer, reduce the surface tension of liquid and enable the generated hydrogen to be quickly separated from the surface of the silicon wafer without hindering the reaction process. However, IPA has a high toxicity and a high cost, and it is not preferable to use IPA in a large amount for industrial production. Therefore, a low-cost, high-efficiency and environmentally friendly chemical etching texturing method is always the best choice for the photovoltaic world.
The invention mainly researches the influence of the type and content of alkyl glycoside and other auxiliary additives on texturing of the surface of the monocrystalline silicon. Alkyl glycoside (APG) can be synthesized from glucose and fatty alcohol, and complex glycoside compound has sugar unit of 2 or more, and is also called Alkyl Polyglycoside. APG is white solid powder or light yellow oily liquid at normal temperature, has high solubility in water and is difficult to dissolve in common organic solvents. The alkyl glycoside has the advantages of low surface tension, no cloud point, adjustable HLB value, strong wetting power, strong detergency, rich and fine foam, strong compatibility, no toxicity, no harm, no stimulation to skin, rapid and thorough biodegradation, capability of being compounded with any type of surfactant and obvious synergistic effect. The alkyl glycoside has strong broad-spectrum antibacterial activity, obvious thickening effect, easy dilution, no gel phenomenon, convenient use, strong alkali resistance, strong acid resistance, hard water resistance and strong salt resistance. It can be used as emulsifying dispersant for food, pesticide and silicone oil; synergists for pesticides, herbicides; agricultural film antifogging agents, plastic additives; and can also be used in various fields such as medicine, biological engineering, industrial cleaning, fire-fighting agents, textile auxiliary agents, coating, photosensitive materials, leather making, oil extraction, mineral processing, rubber and plastic, energy sources and the like. APG has advantages in product safety, mildness and antibacterial property, and is the mainstream surfactant for replacing the existing petroleum-based surfactant.
Disclosure of Invention
The invention provides an additive of monocrystalline silicon piece texturing solution and a using method thereof, which are characterized in that when the monocrystalline silicon piece for a solar cell is subjected to surface texturing, the additive is added into alkaline texturing solution to achieve an excellent texturing effect. The size of the suede pyramid is small after the texturing, the distribution is narrow, the reflection of light can be obviously reduced, and therefore the photoelectric conversion efficiency of the assembled solar cell can be improved.
The invention provides an additive for a monocrystalline silicon piece texturing solution, which comprises the following components: alkyl glycoside, disaccharide, organic sodium salt, inorganic salt, sodium silicate and the balance of water, wherein the water is deionized water.
Based on the scheme, the alkyl glycoside in the additive is one or a mixture of more of APG0810, APG1214, APG0814, APG0816 and APG1216, and the weight ratio of the alkyl glycoside to water is 0.5-1.5: 100.
On the basis of the scheme, the disaccharide in the additive is one or a mixture of more of maltose, cellobiose, sucrose and lactose, and the weight ratio of sugar to water is 1.0-2.0: 100.
On the basis of the scheme, the organic sodium salt in the additive is one or a mixture of more of sodium acetate, sodium oxalate, sodium benzoate, sodium phenylacetate and sodium isophthalate, and the weight ratio of the organic sodium salt to water is 0.1-1.0: 100.
On the basis of the scheme, the inorganic salt in the additive is NaCl, KCl and Na2SO4、K2SO4、CaCl2One or more of the above components, and the weight ratio of inorganic salt to water is 0.1-1.0: 100.
On the basis of the scheme, the weight ratio of the sodium silicate to the water in the additive is 0.2-1.2: 100.
The invention also provides a preparation method of the texture surface preparation agent for the surface treatment of the monocrystalline silicon piece, which comprises a texture surface preparation method of the monocrystalline silicon piece.
(1) Adding 20.0-40.0mL of NaOH solution with the weight percentage concentration of 30% into 1L of deionized water, and adding 10.0-20.0mL of the additive to obtain the alkaline wool making solution.
(2) And (2) placing the cut monocrystalline silicon wafer into a precleaning liquid at 65 ℃ for cleaning for 2-8min, then cleaning with deionized water, and immersing the monocrystalline silicon wafer into the wool making liquid in the step (1) for wool making, wherein the wool making liquid temperature is 75-90 ℃, and the wool making time is 7-15 min.
(3) And (3) soaking the textured monocrystalline silicon wafer obtained in the step (2) in deionized water at room temperature, cleaning for 1.5 min, and then performing mixed acid cleaning for 5-10 min.
(4) And soaking the acid-washed monocrystalline silicon piece in deionized water for washing for 1.5 min, then soaking the monocrystalline silicon piece in the deionized water at 85 ℃ for slowly pulling out, and drying the monocrystalline silicon piece in a drying box at 65 ℃ for 3 h.
On the basis of the scheme, the formula of the pre-cleaning liquid in the step (2) is as follows: 8 to 18mL of NaOH solution with the weight percentage concentration of 30 percent and 0.5 to 1.5mol of inorganic oxidant are added into 1L of deionized water, wherein the inorganic oxidant is K2MnO4、H2O2、KClO3、KCr2O7And NaNO3One or a mixture of several of them.
On the basis of the scheme, the mixed acid in the step (3) is HF, HCl and H2SiO3、H3PO4、H2SO4And HNO3The concentration of the mixed acid of two or more of the above two or more is 1.0-3.0 mol/L.
After the silicon wafer surface is subjected to texturing by adopting the additive and the using method, the size of a pyramid formed on the silicon wafer surface is less than 5 microns, the whole surface of the silicon wafer is uniform in color, the average reflectivity of a visible light area is lower than 10%, and the etched silicon wafer amount is less than 5%.
The invention has the advantages that: compared with the additive without additive or with IPA as additive, the additive and the use method can reduce the wool making time and obviously improve the wool making effect. The size of the textured pyramid is smaller, the distribution is more uniform, and the reflectivity of the silicon wafer is obviously reduced. The method also has beneficial effects on the finally obtained battery piece, and the yield of the battery piece is improved. In addition, the additive of the invention has no toxicity, no corrosiveness, no irritation, no combustion and explosion hazard, and no harm to human body and environment.
Drawings
FIG. 1 is a scanning electron microscope image of a textured surface of a monocrystalline silicon wafer obtained by an optimal additive formula and an optimal texturing method.
FIG. 2 is a scanning electron micrograph of a side of a single crystal silicon wafer obtained with an optimal additive formulation and an optimal texturing process.
FIG. 3 is a reflection spectrum of a textured surface of a single crystal silicon wafer obtained by an optimal additive formula and an optimal texturing method.
Detailed Description
The present invention will be described in further detail with reference to the following examples, which are provided only for illustrating the present invention and are not to be construed as limiting the present invention.
Example 1
1) Preparing an additive: 100mL of deionized water is taken as a solvent, and APG08101.0 g, 1.2g of maltose, 0.2g of sodium isophthalate, 0.3g of NaCl and 0.4g of sodium silicate are added and fully dissolved; 2) preparing a texturing solution: adding 30.0mL of NaOH solution with the weight percentage concentration of 30% into 1L of deionized water, and adding 15.0mL of additive to obtain alkaline wool making solution; 3) preparing a precleaning liquid: 10mL of NaOH solution with the weight percentage concentration of 30 percent is added into 1L of deionized water, K2MnO40.8mol, fully dissolving; 4) preparing a mixed acid solution: preparing mixed acid with the concentration of 1.5 mol/L by HF and HCl in a molar ratio of 1: 2; 5) placing the cut monocrystalline silicon piece in a precleaning solution at 65 ℃ for 5min, cleaning the monocrystalline silicon piece with deionized water, and immersing the monocrystalline silicon piece in a texturing solution at the temperature of 80 ℃ for 14 min; 6) immersing the textured monocrystalline silicon wafer in deionized water for cleaning for 1.5 min, and cleaning with mixed acidWashing for 6 min; 7) soaking the acid-washed monocrystalline silicon piece in deionized water, cleaning for 1.5 min, soaking in deionized water at 85 ℃ and slowly pulling out, and drying the finished product in a drying oven at 65 ℃ for 3 h; as can be seen from the scanning electron microscope image of the obtained texture surface of the monocrystalline silicon wafer, the size of the formed pyramid is 2-5 μm, the distribution is uniform, the reflectivity of the texture surface of the silicon wafer is low, the minimum reflectivity is 7.5%, and the etched silicon wafer amount is 4.1%.
Example 2
1) Preparing an additive: 100mL of deionized water is taken as a solvent, and 0.2g of APG12141.2g, 1.5g of cane sugar, 0.1g of sodium benzoate, 0.2g of KCl and 0.2g of sodium silicate are added and fully dissolved; 2) preparing a texturing solution: adding 35.0mL of NaOH solution with the weight percentage concentration of 30% into 1L of deionized water, and adding 12.0mL of additive to obtain alkaline wool making solution; 3) preparing a precleaning liquid: 12mL of NaOH solution with the weight percentage concentration of 30 percent is added into 1L of deionized water, and H2O21.0mol, fully dissolving; 4) preparing a mixed acid solution: HF and H are reacted3PO4Preparing mixed acid with the concentration of 2.0 mol/L according to the molar ratio of 1: 1; 5) placing the cut monocrystalline silicon piece in a precleaning solution at 65 ℃ for cleaning for 8min, then cleaning with deionized water, and then immersing the monocrystalline silicon piece in a texturing solution, wherein the texturing solution temperature is 84 ℃, and the texturing time is 12 min; 6) soaking the textured monocrystalline silicon wafer in deionized water for cleaning for 1.5 min, and then cleaning for 10min by mixing with acid; 7) and soaking the monocrystalline silicon wafer after acid washing in deionized water, washing for 1.5 min, soaking in deionized water at 85 ℃, slowly pulling out, and drying in a drying oven at 65 ℃ for 3h to obtain the textured monocrystalline silicon wafer.
Example 3
1) Preparing an additive: 100mL of deionized water is used as a solvent, and APG08141.4g, lactose 1.8g, sodium phenylacetate 0.3g and Na are added2SO40.1g of sodium silicate and 0.3g of sodium silicate are fully dissolved; 2) preparing a texturing solution: adding 25.0mL of NaOH solution with the weight percentage concentration of 30% into 1L of deionized water, and adding 15.0mL of additive to obtain alkaline wool making solution; 3) preparing a precleaning liquid: adding 15mL of 30 weight percent NaOH solution and KClO into 1L of deionized water31.4mol, fully dissolving; 4) preparing a mixed acid solution: HF and HNO3In moleThe concentration of the mixed acid is 1.8 mol/L according to the ratio of 2: 1; 5) placing the cut monocrystalline silicon piece in a precleaning solution at 65 ℃ for cleaning for 8min, then cleaning with deionized water, and then immersing the monocrystalline silicon piece in a texturing solution, wherein the temperature of the texturing solution is 88 ℃, and the texturing time is 10 min; 6) soaking the textured monocrystalline silicon wafer in deionized water for cleaning for 1.5 min, and then cleaning for 15min by mixing with acid; 7) and soaking the monocrystalline silicon wafer after acid washing in deionized water, washing for 1.5 min, soaking in deionized water at 85 ℃, slowly pulling out, and drying in a drying oven at 65 ℃ for 3h to obtain the textured monocrystalline silicon wafer.

Claims (7)

1. An additive for a monocrystalline silicon piece texturing solution, which is characterized by comprising the following components: the weight ratio of the alkyl glycoside to the water is 0.5-1.5:100, the weight ratio of the disaccharide to the water is 1.0-2.0:100, the weight ratio of the organic sodium salt to the water is 0.1-1.0:100, the weight ratio of the inorganic salt to the water is 0.1-1.0:100, and the weight ratio of the sodium silicate to the water is 0.2-1.2: 100.
2. The alkyl glycoside of claim 1, wherein the alkyl glycoside is one or more of APG0810, APG1214, APG0814, APG0816 and APG 1216; the disaccharide is one or more of maltose, cellobiose, sucrose and lactose; the organic sodium salt is one or a mixture of more of sodium acetate, sodium oxalate, sodium benzoate, sodium phenylacetate and sodium isophthalate; the inorganic salt is NaCl, KCl, Na2SO4、K2SO4、CaCl2One or a mixture of several of them.
3. A preparation method of a texturing solution for the surface of a monocrystalline silicon wafer is characterized in that 20.0-40.0mL of NaOH solution with the weight percentage concentration of 30% is added into 1L of deionized water, and 10.0-20.0mL of additive is added to obtain an alkaline texturing solution.
4. A method for texturing the surface of a monocrystalline silicon wafer comprises the following steps:
(1) cleaning the cut monocrystalline silicon wafer in a precleaning solution at 65 ℃ for 2-8min, then cleaning the monocrystalline silicon wafer with deionized water, and immersing the monocrystalline silicon wafer in the alkaline wool making solution of claim 3 for wool making, wherein the wool making temperature is 75-90 ℃, and the wool making time is 7-15 min;
(2) soaking the textured monocrystalline silicon wafer obtained in the step (1) in deionized water at room temperature, cleaning for 1.5 min, and then performing mixed acid cleaning for 5-10 min;
(3) and soaking the acid-washed monocrystalline silicon piece in deionized water, washing for 1.5 min, soaking in deionized water at 85 ℃ and slowly pulling out, and drying the textured monocrystalline silicon piece in a drying box at 65 ℃ for 3 h.
5. On the basis of the scheme, the formula of the pre-cleaning liquid in the step (1) is as follows: 8 to 18mL of NaOH solution with the weight percentage concentration of 30 percent and 0.5 to 1.5mol of inorganic oxidant are added into 1L of deionized water, wherein the inorganic oxidant is K2MnO4、H2O2、KClO3、KCr2O7And NaNO3One or a mixture of several of them.
6. On the basis of the scheme, the mixed acid in the step (2) is HF, HCl and H2SiO3、H3PO4、H2SO4And HNO3The concentration of the mixed acid of two or more of the above two or more is 1.0-3.0 mol/L.
7. Based on the claims 1-6, after the additive and the using method are adopted, the pyramid size formed on the surface of the monocrystalline silicon piece is averagely less than 4 μm, the color of the whole surface of the silicon piece is uniform, the average reflectivity is less than 10 percent, and the etched silicon piece amount is less than 5 percent.
CN201910966020.7A 2019-10-12 2019-10-12 Monocrystalline silicon texturing additive formula containing alkyl glycoside and use method Pending CN110644057A (en)

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CN112466995A (en) * 2020-11-23 2021-03-09 宁波尤利卡太阳能股份有限公司 Monocrystalline texturing method of PERC battery
CN113981543A (en) * 2021-11-02 2022-01-28 常州君合科技股份有限公司 Texturing additive with liquid crystal structure and preparation method and application thereof
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CN111663186A (en) * 2020-06-30 2020-09-15 常州时创能源股份有限公司 Additive for texturing of diamond wire cut monocrystalline silicon wafer and application thereof
CN112466995A (en) * 2020-11-23 2021-03-09 宁波尤利卡太阳能股份有限公司 Monocrystalline texturing method of PERC battery
CN113981543A (en) * 2021-11-02 2022-01-28 常州君合科技股份有限公司 Texturing additive with liquid crystal structure and preparation method and application thereof
CN113981543B (en) * 2021-11-02 2024-04-12 常州君合科技股份有限公司 Texturing additive with liquid crystal structure and preparation method and application thereof
CN114284388A (en) * 2021-12-16 2022-04-05 中节能太阳能科技(镇江)有限公司 Rapid, efficient and accurate preparation method of single-crystal PERC (polyether-modified carbon) suede
CN114182356A (en) * 2021-12-23 2022-03-15 江苏捷捷半导体新材料有限公司 Low-reflectivity monocrystalline silicon wafer texturing additive, preparation method and application thereof

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