CN110571339A - Organic light emitting display device and method of fabricating the same - Google Patents

Organic light emitting display device and method of fabricating the same Download PDF

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Publication number
CN110571339A
CN110571339A CN201910762176.3A CN201910762176A CN110571339A CN 110571339 A CN110571339 A CN 110571339A CN 201910762176 A CN201910762176 A CN 201910762176A CN 110571339 A CN110571339 A CN 110571339A
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CN
China
Prior art keywords
light
layer
emitting
emitting portion
emitting layer
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CN201910762176.3A
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Inventor
杜中辉
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Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Priority to CN201910762176.3A priority Critical patent/CN110571339A/en
Publication of CN110571339A publication Critical patent/CN110571339A/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • H10K50/125OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers specially adapted for multicolour light emission, e.g. for emitting white light
    • H10K50/13OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers specially adapted for multicolour light emission, e.g. for emitting white light comprising stacked EL layers within one EL unit
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30Devices specially adapted for multicolour light emission
    • H10K59/35Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

An organic light emitting display device includes a substrate, a hole layer, an organic light emitting layer, an electron layer, and a first electrode layer. The cavity layer is disposed on the substrate. The organic light emitting layer is arranged on the cavity layer. The organic light emitting layer includes a first light emitting layer including a first light emitting portion and a first non-light emitting portion. The first non-light-emitting part is used for receiving ultraviolet light irradiation. The electron layer is arranged on the organic luminescent layer, and the first electrode layer is arranged on the electron layer. The light-transmitting ultraviolet light is matched with the use of an ultraviolet light photomask and irradiates the organic light-emitting material, so that the organic light-emitting display device can be manufactured without using a precise metal mask plate.

Description

Organic light emitting display device and method of fabricating the same
[ technical field ] A method for producing a semiconductor device
The present disclosure relates to display technologies, and in particular, to an organic light emitting display device and a method for manufacturing the same.
[ background of the invention ]
Among organic light-emitting diode (OLED) technologies, a mask technology for vacuum evaporation is an important technology. A mask (or called a photomask) for OLED evaporation usually uses a precision metal mask (FMM), which is used for evaporating a light-emitting layer material.
Currently commercialized OLED panels are large in size, and usually achieve full color by matching a light emitting layer structure and a Color Filter (CF). And the small-size OLED light-emitting panel adopts a precise metal mask plate technology to carry out evaporation of red, green and blue light-emitting materials. The traditional precise metal mask plate has a thin plate (10-100 microns), a minimum opening size of about 20 microns, and a positioning precision of about 3 microns. That is, the FMM has high requirements for processing accuracy, and is likely to fail during processing, resulting in defective products. In addition, as the size of the FMM increases, the middle portion of the FMM is also easily deformed, which causes misalignment of the evaporation material, and eventually causes misalignment and color mixing of the electroluminescent layer and failure in covering the metal via hole. It is therefore clear that FMM is difficult to achieve a large area of deposition, and that its low weight, low thermal expansion coefficient, etc. all affect its processing accuracy. Furthermore, the FMM needs to be cleaned periodically after being evaporated for several times, otherwise the FMM is easy to block, which affects the evaporation quality and increases the manufacturing cost virtually.
[ summary of the invention ]
The present application is directed to an organic light emitting display device and a method for fabricating the same, which does not require a precise metal mask plate or a color filter, and can reduce the processing precision and the fabrication cost.
To achieve the above object, the present application provides an organic light emitting display device, comprising: a substrate; a hole layer disposed on the substrate; the organic light-emitting layer is arranged on the cavity layer and comprises a first light-emitting layer which comprises a first light-emitting part and a first non-light-emitting part, and the first non-light-emitting part is used for receiving ultraviolet light irradiation; the electron layer is arranged on the organic light-emitting layer; and a first electrode layer disposed on the electron layer.
Furthermore, the organic light emitting display device further includes a second light emitting layer disposed on the first light emitting layer, and the second light emitting layer includes a second light emitting portion and a second non-light emitting portion, wherein the second light emitting portion is disposed on the first non-light emitting portion, and the second non-light emitting portion is configured to receive ultraviolet light.
The organic light emitting layer further includes a third light emitting layer disposed on the second light emitting layer, and the third light emitting layer includes a third light emitting portion and a third non-light emitting portion, wherein the third light emitting portion is disposed on the second non-light emitting portion and the first non-light emitting portion, and the third non-light emitting portion is configured to receive ultraviolet light.
Further, the first light-emitting layer defines a central area and two side areas adjacent to the central area, the first light-emitting portion is disposed corresponding to one of the two side areas, and the first non-light-emitting portion is disposed corresponding to the central area and the other side area.
Furthermore, the substrate comprises a thin film transistor module and a second electrode layer arranged on the thin film transistor module, the hole layer comprises a hole injection layer and a hole transport layer which are sequentially stacked on the substrate, and the electron layer comprises an electron transport layer and an electron injection layer which are sequentially stacked on the organic light emitting layer.
The present application further provides a method for manufacturing an organic light emitting display device, including: evaporating a cavity layer on the substrate; evaporating an organic light-emitting layer including a first light-emitting layer on the cavity layer; shielding part of the first light-emitting layer by using an ultraviolet light mask, and irradiating the ultraviolet light mask and the first light-emitting layer by using an ultraviolet light source for a preset time to enable the first light-emitting layer to form a first light-emitting part and a first non-light-emitting part, wherein the first light-emitting part corresponds to the ultraviolet light mask; evaporating an electron layer on the organic light-emitting layer; and forming a first electrode layer on the electron shells.
Further, a second light emitting layer is deposited on the first light emitting layer, an ultraviolet light mask is used for shielding part of the second light emitting layer, and the ultraviolet light mask and the second light emitting layer are irradiated by an ultraviolet light source for a preset time, so that the second light emitting layer forms a second light emitting part and a second non-light emitting part, wherein the second light emitting part is formed on the first non-light emitting part in an opposite mode, and the second non-light emitting part is formed by ultraviolet light irradiation.
Further, a third light emitting layer is deposited on the second light emitting layer, an ultraviolet light mask is used to shield a portion of the third light emitting layer, and the ultraviolet light mask and the third light emitting layer are irradiated with ultraviolet light for a predetermined time, so that the third light emitting layer forms a third light emitting portion and a third non-light emitting portion, wherein the third light emitting portion is formed on the second non-light emitting portion and the first non-light emitting portion in an opposite manner, and the third non-light emitting portion is formed by irradiation of ultraviolet light.
Further, the first light-emitting layer defines a central area and two side areas adjacent to the central area, the first light-emitting part is formed opposite to one of the two side areas, and the first non-light-emitting part is formed opposite to the central area and the other side area.
Furthermore, the substrate comprises thin film transistor modules arranged in an array and a second electrode layer arranged on the thin film transistor modules, the hole layer comprises a hole injection layer and a hole transport layer which are sequentially evaporated on the substrate, and the electron layer comprises an electron transport layer and an electron injection layer which are sequentially evaporated on the organic light emitting layer.
The organic light-emitting display device utilizes the cooperation of the ultraviolet light photomask and the ultraviolet light source to respectively irradiate three layers of organic light-emitting materials, and the three layers of organic light-emitting materials are irradiated by ultraviolet light for light passing through to form a patterned light-emitting layer, so that the use of the traditional precise metal mask plate is replaced, the defects of easy blockage, difficult processing and high cost caused by the traditional precise metal mask plate can be effectively overcome, and the organic light-emitting display device and the manufacturing method thereof can reduce the production finished products, reduce the processing difficulty and do not need to use the precise metal mask plate and the color filter.
[ description of the drawings ]
FIG. 1 is a schematic diagram of an organic light emitting display device according to an embodiment of the present disclosure
Fig. 2 is an exploded view illustrating a light emitting layer of the organic light emitting display device of fig. 1.
FIG. 3 is a flowchart illustrating a method for fabricating an organic light emitting display device according to an embodiment of the present disclosure
Fig. 4 is an exploded view of an organic light emitting display device according to an embodiment of the present disclosure.
[ detailed description ] embodiments
The following description of the various embodiments refers to the accompanying drawings, which illustrate specific embodiments that can be used to practice the present application. In the present application, directional terms such as "up", "down", "front", "back", "left", "right", "inner", "outer", "side", and the like are merely referring to the directions of the attached drawings. Accordingly, the directional terminology is used for purposes of illustration and understanding, and is in no way limiting.
The present application discloses an organic light-emitting display device and a method for fabricating the same, wherein the organic light-emitting display device particularly refers to an organic light-emitting diode (OLED) display device, but the present application is also applicable to other organic electroluminescent material light-emitting display devices. Fig. 1 is a schematic structural diagram of an organic light emitting display device according to an embodiment of the present disclosure. As shown in fig. 1, an organic light emitting display device 100 of the present application includes a substrate 1, a hole layer 2, an organic light emitting layer 3, an electron layer 4, a first electrode layer 5, an encapsulation layer 6, and a sealant 7 sealed between the substrate 1 and the encapsulation layer 6. With the above structure, under the action of an applied electric field, electrons and holes are injected into the organic light emitting material from the positive and negative electrodes, respectively, and thus migrate, recombine, and attenuate in the organic light emitting material to emit light. Specifically, the hole layer 2 includes a hole injection layer 21 and a hole transport layer 22 sequentially stacked on the substrate 1, and the electron layer 4 includes an electron transport layer 41 and an electron injection layer 42 sequentially stacked on the organic light emitting layer 3. In addition, the substrate 1 includes a thin film transistor module 10 and a second electrode layer 11 (as shown in fig. 1) disposed on the thin film transistor module 10, wherein the first electrode layer 5 serves as a cathode and the second electrode layer 11 serves as an anode.
Fig. 2 is an exploded view of the organic light emitting layer 3 of the organic light emitting display device of fig. 1. The organic light-emitting layer 3 is made of an organic light-emitting material, has a light-permeable property, and contains an ultraviolet initiator component. As shown in fig. 2, the organic light-emitting layer 3 includes a first light-emitting layer 31, a second light-emitting layer 32, and a third light-emitting layer 33. In this embodiment, the first light-emitting layer 31 is a green light-emitting layer, the second light-emitting layer 32 is a red light-emitting layer, and the third light-emitting layer 33 is a blue light-emitting layer. Specifically, the first light-emitting layer 31 includes a first light-emitting portion 311 and a first non-light-emitting portion 312, and the first light-emitting layer defines a central area and two side areas adjacent to the central area (as shown in fig. 2), wherein the first light-emitting portion 311 is disposed corresponding to one of the two side areas, and the first non-light-emitting portion 312 is disposed corresponding to the central area and the other side area.
please refer to fig. 2. The second light-emitting layer 32 includes a second light-emitting portion 321 and a second non-light-emitting portion 322. The third light-emitting layer 33 includes a third light-emitting portion 331 and a third non-light-emitting portion 332. Specifically, the second light-emitting portion 321 is disposed opposite to the first non-light-emitting portion 312 (i.e., the central region), and the second non-light-emitting portion 322 is disposed opposite to the first light-emitting portion 311 and the other side region of the first light-emitting layer 31. The third light emitting portion 331 is disposed opposite to the second non-light emitting portion 322 and on the first non-light emitting portion 312 in the side area.
Specifically, when the organic light emitting layer 3 of the present application is manufactured, it is not necessary to pattern the light emitting layer by using a conventional precise metal mask plate, but an ultraviolet light mask 30 (as shown in fig. 2) is used to cooperate with three times of ultraviolet light irradiation to destroy the first non-light emitting portion 312, the second non-light emitting portion 322, and the third non-light emitting portion 332, respectively, but the first light emitting portion 311, the second light emitting portion 321, and the third light emitting portion 331 are retained, so as to form a patterned structure, and form an organic light emitting layer 3 including three stacked layers and arranged adjacent to each other in sequence.
fig. 3 is a flowchart illustrating a method for fabricating an organic light emitting display device according to an embodiment of the present disclosure. Fig. 4 is an exploded view of an organic light emitting display device according to an embodiment of the present disclosure. Fig. 3 is a schematic diagram of fig. 4 and fig. 2, which illustrate a method for fabricating an organic light emitting display device according to the present invention. As shown in FIG. 3, the method for fabricating an organic light emitting display device of the present application includes steps S10-S50, which are described in detail below.
step S10: a hole layer 2 is vapor-deposited on a substrate 1 (step S101), wherein the hole layer 2 includes a hole injection layer 31 and a hole transport layer 32 sequentially vapor-deposited on the substrate 1 (steps S101 and S102).
Step S20: an organic light emitting layer 3 including a first light emitting layer 31 is vapor-deposited on the hole layer 2 (step S201).
Step S30: a portion of the first light emitting layer 31 is shielded by an ultraviolet light mask 30, and the ultraviolet light mask 30 and the first light emitting layer 31 are irradiated with an ultraviolet light source for a predetermined time (step S301), so that the first light emitting layer 31 forms a first light emitting portion 311 and a first non-light emitting portion 312, where the first light emitting portion 311 corresponds to the ultraviolet light mask 30, and the first non-light emitting portion 312 directly receives the ultraviolet light irradiation (as shown in fig. 2). In this embodiment, the wavelength, illumination and irradiation time of the ultraviolet light are adjusted according to the light emitting effect of the light emitting layer, for example, the wavelength of the ultraviolet light is 254nm, the illumination is 28mW/cm2, and the processing time is 600 seconds.
Similarly, as shown in fig. 4, a second light emitting layer 32 is deposited on the first light emitting layer 31 (step S202), a portion of the second light emitting layer 32 is shielded by an ultraviolet light mask 30, and the ultraviolet light mask 30 and the second light emitting layer 32 are irradiated with ultraviolet light for a predetermined time (step S302), so that the second light emitting layer 32 forms a second light emitting portion 321 and a second non-light emitting portion 322, wherein the second light emitting portion 321 is formed on the first non-light emitting portion 312, and the second non-light emitting portion 322 is formed by irradiation with ultraviolet light (as shown in fig. 2).
Similarly, as shown in fig. 4, a third light emitting layer 33 is deposited on the second light emitting layer 32 (step S203), a portion of the third light emitting layer 33 is shielded by an ultraviolet light mask 30, and the ultraviolet light mask 30 and the third light emitting layer 33 are irradiated with an ultraviolet light source for a predetermined time (step S303), so that the third light emitting layer 33 forms a third light emitting portion 331 and a third non-light emitting portion 332, wherein the third light emitting portion 331 is formed on the second non-light emitting portion 322 and the first non-light emitting portion 312, and the third non-light emitting portion 332 is formed by irradiation of ultraviolet light. In particular, the order of deposition of the red, green, and blue three-layer light emitting materials in the present application should satisfy the material level matching requirement, and is not limited to the above-described order of deposition.
Step S40: an electron layer 4 is deposited on the organic light emitting layer 3, wherein the electron layer 4 includes an electron transport layer 41 and an electron injection layer 42 sequentially deposited on the organic light emitting layer 3 (steps S401 and S402).
Step S50: a first electrode layer 5 is formed on the electron shells 4, and serves as a cathode.
In addition, the method for manufacturing the organic light emitting display device of the present application includes step S60: the first electrode layer 5 is formed with an encapsulation layer 6 by a metal film encapsulation (TFE) technique, so as to prevent external water and oxygen from entering the device.
To sum up, the organic light emitting display device of the application utilizes the cooperation of the ultraviolet light mask and the ultraviolet light source to irradiate three layers of organic light emitting materials respectively, and the three times of ultraviolet light irradiation of the light is conducted to form the graphical light emitting layer, so that the use of the traditional precise metal mask plate is replaced, the defects of easy blockage, difficult processing and high cost caused by the traditional use of the precise metal mask plate can be effectively overcome, and the organic light emitting display device and the manufacturing method thereof which can reduce the production finished products, reduce the processing difficulty and do not need to use the precise metal mask plate and the color filter can be further provided.
Although the present application has been described with reference to the preferred embodiments, the above description is not intended to limit the present application, and those skilled in the art can make various changes and modifications without departing from the scope of the present application, so that the scope of the present application is defined by the appended claims.

Claims (10)

1. An organic light emitting display device, comprising:
A substrate;
a hole layer disposed on the substrate;
the organic light-emitting layer is arranged on the cavity layer and comprises a first light-emitting layer which comprises a first light-emitting part and a first non-light-emitting part, and the first non-light-emitting part is used for receiving ultraviolet light irradiation;
The electron layer is arranged on the organic light-emitting layer; and
And the first electrode layer is arranged on the electronic layer.
2. The organic light-emitting display device according to claim 1, wherein the organic light-emitting layer further comprises a second light-emitting layer disposed on the first light-emitting layer and including a second light-emitting portion and a second non-light-emitting portion, wherein the second light-emitting portion is disposed opposite to the first non-light-emitting portion, and the second non-light-emitting portion is configured to receive ultraviolet light.
3. the organic light-emitting display device of claim 2, wherein the organic light-emitting layer further comprises a third light-emitting layer disposed on the second light-emitting layer and comprising a third light-emitting portion and a third non-light-emitting portion, wherein the third light-emitting portion is disposed opposite to the second non-light-emitting portion and the first non-light-emitting portion, and the third non-light-emitting portion is configured to receive ultraviolet light.
4. the organic light-emitting display device according to claim 3, wherein the first light-emitting layer defines a central area and two side areas adjacent to the central area, the first light-emitting portion is provided corresponding to one of the two side areas, and the first non-light-emitting portion is provided corresponding to the central area and the other of the side areas.
5. The organic light emitting display device of claim 1, wherein the substrate comprises a thin film transistor module and a second electrode layer disposed on the thin film transistor module, and the hole layer comprises a hole injection layer and a hole transport layer sequentially stacked on the substrate, and the electron layer comprises an electron transport layer and an electron injection layer sequentially stacked on the organic light emitting layer.
6. a method of fabricating an organic light emitting display device, comprising:
Evaporating a cavity layer on the substrate;
Evaporating an organic light-emitting layer including a first light-emitting layer on the cavity layer;
Shielding part of the first light-emitting layer by using an ultraviolet light mask, and irradiating the ultraviolet light mask and the first light-emitting layer by using an ultraviolet light source for a preset time to enable the first light-emitting layer to form a first light-emitting part and a first non-light-emitting part, wherein the first light-emitting part corresponds to the ultraviolet light mask;
Evaporating an electron layer on the organic light-emitting layer; and
A first electrode layer is formed on the electron shells.
7. The method according to claim 6, wherein a second light-emitting layer is deposited on the first light-emitting layer, a portion of the second light-emitting layer is masked with an ultraviolet mask, and the ultraviolet mask and the second light-emitting layer are irradiated with ultraviolet light for a predetermined time to form a second light-emitting portion and a second non-light-emitting portion in the second light-emitting layer, wherein the second light-emitting portion is formed on the first non-light-emitting portion in an opposed manner, and the second non-light-emitting portion is formed by irradiation with ultraviolet light.
8. The method according to claim 7, wherein a third light-emitting layer is deposited on the second light-emitting layer, a portion of the third light-emitting layer is masked with an ultraviolet mask, and the ultraviolet mask and the third light-emitting layer are irradiated with ultraviolet light for a predetermined time to form a third light-emitting portion and a third non-light-emitting portion in the third light-emitting layer, wherein the third light-emitting portion is formed on the second non-light-emitting portion and the first non-light-emitting portion in opposition to each other, and the third non-light-emitting portion is formed by irradiation with ultraviolet light.
9. The method of manufacturing an organic light-emitting display device according to claim 6, wherein the first light-emitting layer defines a central region and two side regions adjacent to the central region, the first light-emitting portion is formed opposite to one of the two side regions, and the first non-light-emitting portion is formed opposite to the central region and the other of the two side regions.
10. the method of claim 6, wherein the substrate comprises a plurality of thin film transistor modules arranged in an array, and a second electrode layer disposed on the thin film transistor modules, and the hole layer comprises a hole injection layer and a hole transport layer sequentially deposited on the substrate, and the electron layer comprises an electron transport layer and an electron injection layer sequentially deposited on the organic light emitting layer.
CN201910762176.3A 2019-08-19 2019-08-19 Organic light emitting display device and method of fabricating the same Pending CN110571339A (en)

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Cited By (1)

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CN113611730A (en) * 2021-08-27 2021-11-05 昆山梦显电子科技有限公司 Silicon-based micro-display and preparation method thereof

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CN106356463A (en) * 2016-10-11 2017-01-25 深圳市华星光电技术有限公司 Production method of QLED (Quantum Dot Light Emitting Diode) display device
US20170136490A1 (en) * 2015-11-17 2017-05-18 Commissariat à l'énergie atomique et aux énergies alternatives Method of manufacturing a layer containing quantum dots
CN109904335A (en) * 2019-03-26 2019-06-18 京东方科技集团股份有限公司 The patterning method of quantum dot layer, quantum dot device and preparation method thereof

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Publication number Priority date Publication date Assignee Title
CN1960024A (en) * 2006-01-23 2007-05-09 邓先宇 Method for manufacturing true color display of electroluminescence polymer
US20170136490A1 (en) * 2015-11-17 2017-05-18 Commissariat à l'énergie atomique et aux énergies alternatives Method of manufacturing a layer containing quantum dots
CN106356463A (en) * 2016-10-11 2017-01-25 深圳市华星光电技术有限公司 Production method of QLED (Quantum Dot Light Emitting Diode) display device
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Publication number Priority date Publication date Assignee Title
CN113611730A (en) * 2021-08-27 2021-11-05 昆山梦显电子科技有限公司 Silicon-based micro-display and preparation method thereof
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Application publication date: 20191213