CN110561284B - Grinding tool for processing single crystal sapphire and preparation process thereof - Google Patents

Grinding tool for processing single crystal sapphire and preparation process thereof Download PDF

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CN110561284B
CN110561284B CN201910846390.7A CN201910846390A CN110561284B CN 110561284 B CN110561284 B CN 110561284B CN 201910846390 A CN201910846390 A CN 201910846390A CN 110561284 B CN110561284 B CN 110561284B
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grinding tool
parts
crystal sapphire
processing
single crystal
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CN110561284A (en
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吴喆
张玉莹
李嘉良
陈妍
刘志峰
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Hefei University of Technology
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Hefei University of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0009Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B24D3/342Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
    • B24D3/344Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent the bonding agent being organic

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  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The invention discloses a grinding tool for processing single crystal sapphire, relates to the technical field of grinding tool processing, and is provided based on the problem that the existing grinding tool is easy to generate heat damage in the sapphire processing process. The invention is mainly prepared from the following raw materials in parts by weight: 67.5 parts of silicon dioxide, 22.5 parts of modified polysaccharide binding agent and 10 parts of hydroxystearic essence. The invention also provides a preparation process of the grinding tool, and the grinding tool has the beneficial effects that: the grinding tool for processing the single crystal sapphire prepared by the invention can reduce the heat damage on the surface of the single crystal sapphire workpiece, and is beneficial to the self-sharpening of the grinding tool.

Description

Grinding tool for processing single crystal sapphire and preparation process thereof
Technical Field
The invention relates to the technical field of grinding tool processing, in particular to a grinding tool for processing single crystal sapphire and a preparation process thereof.
Background
The single crystal sapphire material can be widely applied to the fields of advanced lighting device substrates, mobile terminals, military optical windows and the like. The precise surface processing such as surface grinding and polishing, thinning and the like is an important process in the processing process of the single crystal sapphire material. With the market demand being increased dramatically, the precision surface processing capacity of sapphire wafers is also expanding sharply, and the environmental impact thereof is becoming more and more unnoticeable.
Patent CN201710163764.6 discloses a self-sharpening superhard superfine grinding tool pellet added with soluble resin material and its preparation process, wherein the grinding tool comprises, by weight, 30-70% of grinding material, 0.5-5% of wetting agent, 5-25% of "soluble" resin, 15-30% of "insoluble" resin, 0-3% of curing agent and 20-50% of filler, the "insoluble" resin acts as a main binder, and the "soluble" resin acts as an auxiliary binder.
The existing single crystal sapphire substrate material ultra-precision polishing mainly depends on a chemical mechanical polishing technology, the bonding agent adopted by the existing fixed abrasive mechanical chemical polishing grinding tool is mainly phenolic resin, the manufacturing process is based on volatile organic solvents such as phenol and formaldehyde, benzene and phenol homologues can volatilize due to thermal decomposition in the polishing process, and the grinding tool manufacturing and the dry-type polishing process can cause negative effects on the environment and the health of operators.
Meanwhile, when the phenolic resin bonding agent grinding tool uses a superfine grinding material, the surface of the grinding tool is easy to block in the processing process, so that the friction heat of a processing area is increased, the surface of sapphire is thermally damaged, the grinding tool needs to be trimmed at intervals, and the polishing efficiency is influenced.
Disclosure of Invention
The invention aims to solve the technical problem that the existing grinding tool is easy to generate heat damage in the sapphire processing process, and provides a grinding tool for processing single crystal sapphire.
The invention solves the technical problems through the following technical means:
the invention provides a grinding tool for processing single crystal sapphire, which is mainly prepared from the following raw materials in parts by weight: 67.5 parts of silicon dioxide, 22.5 parts of modified polysaccharide binding agent and 10 parts of hydroxystearic essence.
Has the advantages that: the grinding tool is prepared from 67.5 parts of silicon dioxide, 22.5 parts of modified polysaccharide binding agent and 10 parts of hydroxystearic acid, the hydroxystearic acid is dispersed in the grinding tool, and the friction temperature rise is increased when the surface of the grinding tool is blocked in the processing process of the single crystal sapphire. When the temperature reaches the melting point of the hydroxyl stearin, the hydroxyl stearin in the plugging layer is melted, so that the tissue of the plugging layer becomes loose, the self-sharpening of the grinding tool is facilitated, and the thermal damage to the surface of the single crystal sapphire workpiece is reduced;
the molecular structure of the hydroxystearic essence contains hydroxyl which can form hydrogen bond with the hydroxyl on the molecule of the polysaccharide material to be tightly combined, so that the mechanical strength of the grinding tool is enhanced;
the hydroxystearic acid is a food additive, is commonly used as an anti-crystallizing agent for vegetable oil, salad oil and cooking oil, can be extracted from the vegetable oil, does not depend on petroleum derivatives, and has good environmental friendliness and sustainability.
Preferably, deionized water is also added in a weight fraction of 70 parts.
Preferably, absolute ethyl alcohol is also added, and the mass of the absolute ethyl alcohol is 1-5% of the dry basis of the modified polysaccharide binding agent.
Preferably, the modified polysaccharide binder is a pregelatinized polysaccharide.
Preferably, the pregelatinized polysaccharide is a pregelatinized starch.
Preferably, the mesh number of the pregelatinized polysaccharide is 60-80 mesh.
Preferably, the particle size of the silicon dioxide is W2-W20.
Preferably, the preparation process of the grinding tool for processing the single crystal sapphire comprises the following steps:
(1) adding 22.5 parts of modified polysaccharide binder into absolute ethyl alcohol, and stirring, wherein the added mass of the absolute ethyl alcohol is 1-5% of the dry basis of the modified polysaccharide binder;
(2) adding 67.5 parts of silicon dioxide and 10 parts of hydroxystearic acid into the mixture of the modified polysaccharide binding agent and the absolute ethyl alcohol in the step (1), and mixing to obtain pre-pressed powder;
(3) under the condition of water bath, adding deionized water into the pre-pressed powder in the step (2), wherein the weight part of the added deionized water is 70 parts, and obtaining a mixture;
(4) pouring the mixture formed in the step (3) into a mould, and pressing and forming;
(5) placing the press-formed grinding tool at 2-4 deg.C for 24h, and soaking the grinding tool in alcohol for 2-30 d; taking out the soaked grinding tool from the alcohol, and drying to constant weight.
Has the advantages that: in the preparation process of the grinding tool, the hydroxystearate is added, so that the heat damage to the surface of the single crystal sapphire workpiece can be reduced, and the preparation process is simple.
Preferably, the rotation speed of the stirring in the step (1) is 600-800rpm/min, and the stirring time is 15-30 min.
Preferably, the temperature of the water bath in the step (3) is 50 ℃.
The invention aims to solve the second technical problem that the existing grinding tool is easy to generate heat damage in the sapphire processing process, and provides a preparation process of the grinding tool for processing single crystal sapphire.
The invention provides a preparation process of a grinding tool for processing single crystal sapphire, which comprises the following steps:
(1) adding 22.5 parts of modified polysaccharide binder into absolute ethyl alcohol, and stirring, wherein the added mass of the absolute ethyl alcohol is 1-5% of the dry basis of the modified polysaccharide binder;
(2) adding 67.5 parts of silicon dioxide and 10 parts of hydroxystearic acid into the mixture of the modified polysaccharide binding agent and the absolute ethyl alcohol in the step (1), and mixing to obtain pre-pressed powder;
(3) under the condition of water bath, adding deionized water into the pre-pressed powder in the step (2), wherein the weight part of the added deionized water is 70 parts, and obtaining a mixture;
(4) pouring the mixture formed in the step (3) into a mould, and pressing and forming;
(5) placing the press-formed grinding tool at 2-4 deg.C for 24h, and soaking the grinding tool in alcohol for 2-30 d; taking out the soaked grinding tool from the alcohol, and drying to constant weight.
Preferably, the temperature of the water bath in the step (3) is 50 ℃.
Preferably, the modified polysaccharide binder is a pregelatinized polysaccharide.
Preferably, the pregelatinized polysaccharide is a pregelatinized starch.
Preferably, the mesh number of the pregelatinized polysaccharide is 60-80 mesh.
Preferably, the particle size of the silicon dioxide is W2-W20.
The invention has the advantages that:
(1) in the processing process of the single crystal sapphire, when the surface of the grinding tool is blocked, the friction temperature rise is increased; when the temperature reaches the melting point of the hydroxyl stearin, the hydroxyl stearin in the plugging layer is melted, so that the tissue of the plugging layer becomes loose, the self-sharpening of the grinding tool is facilitated, and the thermal damage to the surface of the single crystal sapphire workpiece is reduced;
(2) the molecular structure of the hydroxystearic essence contains hydroxyl which can form hydrogen bond with the hydroxyl on the molecule of the polysaccharide material to be tightly combined, so that the mechanical strength of the grinding tool is enhanced;
(3) the hydroxystearic acid is a food additive, is commonly used as an anti-crystallizing agent for vegetable oil, salad oil and cooking oil, can be extracted from the vegetable oil, does not depend on petroleum derivatives, and has good environmental friendliness and sustainability.
Drawings
FIG. 1 is a graph showing the results of simultaneous thermal analysis of hydroxystearin;
FIG. 2 is a graph showing the results of simultaneous thermal analysis of a sample of the abrasive article of comparative example 1 in accordance with the present invention;
FIG. 3 is a graph showing the results of simultaneous thermal analysis of a sample of an abrasive article according to example 1 of the present invention;
fig. 4 is a graph showing temperature changes during processing of a single-crystal sapphire workpiece according to the present invention in comparative example 1, comparative example 4, and example 1.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Test materials, reagents and the like used in the following examples are commercially available unless otherwise specified.
The specific techniques or conditions not specified in the examples can be performed according to the techniques or conditions described in the literature in the field or according to the product specification.
Wherein the pregelatinized corn starch is available from Jianjie industries, Inc. of Henan.
Table 1 shows the raw material ratios of the grinding tools of comparative examples 1 to 4 and example 1. Comparative examples 1-2 are used to illustrate the effect of hydroxystearin on the abrasive quality by weight percentage on the abrasive performance; comparative examples 3-4 were used to compare the effect of polyethylene wax and hydroxystearate on abrasive performance.
Figure BDA0002195385580000061
Comparative example 1
Preparation process of grinding tool without hydroxystearyl
The raw materials are as follows:
modified polysaccharide binder: pregelatinized corn starch 22.5g, by weight on a dry basis
Grinding materials: w10 silica 67.5g
Hydroxystearin 0g
The preparation process of the grinding tool in the embodiment comprises the following steps:
(1) adding 22.5g of pregelatinized corn starch into absolute ethyl alcohol, and stirring at 600rpm/min for 30min, wherein the mass of the added absolute ethyl alcohol is 0.225 g;
(2) adding 67.5g of silicon dioxide into the mixture of the modified polysaccharide binding agent and the absolute ethyl alcohol in the step (1), and mixing to obtain pre-pressed powder;
(3) adding 70ml of deionized water into the pre-pressed powder in the step (2) under the condition of water bath at 50 ℃ to obtain a gel mixture;
(4) pouring the gel-like mixture formed in the step (3) into a mould, and pressing and forming; wherein the pressing method is the prior art;
(5) placing the press-formed grinding tool at 3 ℃ for 24h, and soaking the grinding tool in 95 wt% ethanol water for 7 d; taking out the soaked grinding tool from alcohol, and drying at 50 deg.C to constant weight.
Comparative example 2
Preparation process of grinding tool containing hydroxystearyl
The raw materials are as follows:
modified polysaccharide binder: pregelatinized corn starch 20g, its quality is calculated on dry basis
Grinding materials: w10 silica 60g
Hydroxystearin 20g
The preparation process of the grinding tool in the embodiment comprises the following steps:
(1) adding 20g of pregelatinized corn starch into absolute ethyl alcohol, and stirring at 600rpm/min for 30min, wherein the mass of the added absolute ethyl alcohol is 0.2 g;
(2) adding 60g of silicon dioxide and 20g of hydroxystearic acid into the mixture of the modified polysaccharide binding agent and the absolute ethyl alcohol in the step (1), and mixing to obtain pre-pressed powder;
(3) adding 62ml of deionized water into the pre-pressed powder in the step (2) under the condition of water bath at 50 ℃ to obtain a gel mixture;
(4) pouring the gel-like mixture formed in the step (3) into a mould, and pressing and forming; wherein the pressing method is the prior art;
(5) placing the press-formed grinding tool at 3 ℃ for 24h, and soaking the grinding tool in 95 wt% ethanol water for 7 d; taking out the soaked grinding tool from alcohol, and drying at 50 deg.C to constant weight.
Comparative example 3
Preparation process of grinding tool containing polyethylene wax
The raw materials are as follows:
modified polysaccharide binder: pregelatinized corn starch 22.5g, by weight on a dry basis
Grinding materials: w10 silica 67.5g
Polyethylene wax 10g
The preparation method of the grinding tool in the embodiment comprises the following steps:
(1) adding 22.5g of pregelatinized corn starch into absolute ethyl alcohol, stirring for 30min at 600rpm/min, adding 67.5g of silicon dioxide after stirring, wherein the added mass of the absolute ethyl alcohol is 0.45 g;
(2) adding diisooctyl sulfosuccinate sodium salt into 60ml of deionized water, and adding polyethylene wax into the deionized water containing the diisooctyl sulfosuccinate sodium salt for emulsification, wherein the addition amount of the diisooctyl sulfosuccinate sodium salt is 2 percent of the dry basis of the polyethylene wax; the sodium diisooctyl sulfosuccinate can enable the phase-change material to be uniformly dispersed in liquid, so that the dispersion uniformity of the polyethylene wax in the grinding tool tissue is improved;
(3) adding the product obtained in the step (1) into the emulsion formed in the step (2) under the condition of 50 ℃ water bath, and stirring while adding to form a gel product;
(4) pouring the gel-like product formed in the step (3) into a mould, and pressing and forming;
(5) placing the press-formed grinding tool at 3 ℃ for 24h, and soaking the grinding tool in 95% alcohol for 7 d; taking out the soaked grinding tool from the alcohol, and drying to constant weight.
Comparative example 4
Preparation process of grinding tool containing polyethylene wax
The raw materials are as follows:
binding agent: pregelatinized corn starch 19.66g, by weight on a dry basis
Grinding materials: 78.6g of W10 silica
And (3) reinforcing phase: microcrystalline cellulose 0.76g
Phase change material: polyethylene wax 0.98g
The preparation method of the grinding tool in the embodiment comprises the following steps:
(1) adding 19.66g of pregelatinized corn starch into absolute ethyl alcohol, stirring for 30min at 600rpm/min, adding 78.6g of silicon dioxide and 0.76g of microcrystalline cellulose after stirring, wherein the mass of the added absolute ethyl alcohol is 0.3932 g;
(2) adding sodium diisooctyl sulfosuccinate into 62ml of deionized water, and adding 0.98g of polyethylene wax into the deionized water containing the sodium diisooctyl sulfosuccinate for emulsification, wherein the adding amount of the sodium diisooctyl sulfosuccinate is 2 percent of the dry basis of the phase change material; the sodium diisooctyl sulfosuccinate can enable the phase-change material to be uniformly dispersed in liquid, so that the dispersion uniformity of the phase-change material in the grinding tool tissue is improved;
(3) adding the product obtained in the step (1) into the emulsion formed in the step (2) under the condition of 50 ℃ water bath, and stirring while adding to form a gel product;
(4) pouring the gel-like product formed in the step (3) into a mould, and pressing and forming;
(5) placing the press-formed grinding tool at 3 ℃ for 24h, and soaking the grinding tool in 95% alcohol for 7 d; taking out the soaked grinding tool from the alcohol, and drying to constant weight.
Example 1
Preparation process of grinding tool containing hydroxystearyl
The raw materials are as follows:
modified polysaccharide binder: pregelatinized corn starch 22.5g, by weight on a dry basis
Grinding materials: w10 silica 67.5g
Hydroxystearin 10g
The preparation process of the grinding tool in the embodiment comprises the following steps:
(1) adding 22.5g of pregelatinized corn starch into absolute ethyl alcohol, and stirring at 600rpm/min for 30min, wherein the mass of the added absolute ethyl alcohol is 1% of the dry basis of the pregelatinized corn starch, and the addition amount of the absolute ethyl alcohol is 0.225 g;
(2) adding 67.5g of silicon dioxide and 10g of hydroxystearic acid into the mixture of the modified polysaccharide binding agent and the absolute ethyl alcohol in the step (1), and mixing to obtain pre-pressed powder;
(3) adding 70ml of deionized water into the pre-pressed powder in the step (2) under the condition of water bath at 50 ℃ to obtain a gel mixture;
(4) pouring the gel-like mixture formed in the step (3) into a mould, and pressing and forming; wherein the pressing method is the prior art;
(5) placing the press-formed grinding tool at 3 ℃ for 24h, and soaking the grinding tool in 95 wt% ethanol water for 7 d; taking out the soaked grinding tool from alcohol, and drying at 50 deg.C to constant weight.
Example 2
This example is a test and processing experiment for the abrasive tools prepared in comparative examples 1-2 and example 1:
(1) bonding of the grinding tool:
and cutting the grinding tool sample subjected to mechanical characteristic detection into a plurality of small blocks, and distributing the grinding tool on the surface of the grinding wheel matrix according to the circumference by using an epoxy resin AB glue bonding process. The bonded abrasive tool was placed in a forced air drying oven set at 60 ℃ for 30 min. And after the drying is finished, the bonding of the grinding tool is finished.
Shaping of a grinding tool:
and (4) finishing the end face of the grinding tool by using a diamond grinding disc to obtain a grinding tool sample.
Testing parameters of the processing process:
the workpiece to be processed is a 0001-plane single crystal sapphire grinding sheet with the diameter of 2 inches. The grinding surface of the grinding tool and the plane of the single crystal sapphire are eccentrically arranged, and the circle center of the single crystal sapphire workpiece is positioned at the outer edge of the grinding tool. The rotating speed of the grinding tool is 566rpm/min, the single crystal sapphire workpiece is fixed, the processing load is 20N, and the processing time is 60 min.
(2) Detection of mechanical and thermal properties of abrasive tools
a. A three-point bending strength test of a grinding tool sample is detected by using an XQY-II type intelligent sand intensity tester;
b. and detecting the Shore hardness of the surface HD of the grinding tool sample by using an LXD Shore hardness tester. The surface hardness was measured at 4 points for each sample, and the arithmetic average value was taken as the surface hardness value.
c. And (3) carrying out thermal analysis on the hydroxyl-contained stearin fine grinding tool by using a NETZSCH STA 2500 synchronous thermal analyzer, wherein the analysis temperature range is 20-150 ℃, and the heating rate is 5 ℃/min.
(3) Detecting the processing characteristics of the grinding tool:
a. and in the processing process, the temperature of the single crystal sapphire workpiece is measured by an MLX90614 thermopile temperature sensor.
b. The surface roughness of the machined surface was measured using a Japanese Sanfeng CV-3200 surface profiler after the machining (evaluation Standard JIS B0601:2001, evaluation Length 0.04mm, using the root mean Square value of the contour as the roughness value, which is designated as Rq). The machined material removal efficiency was characterized by measuring the height difference (evaluation length 2.6mm) of the average of the high points of the surface profile of the machined area and the unmachined area.
(4) The result of the detection
a. The results of the mechanical characteristics of the grinding tool are shown in Table 2
Table 2 shows the results of mechanical property measurements of the grinding tools
Figure BDA0002195385580000111
It can be seen from table 2 that after adding hydroxystearyl, due to the good compatibility of hydroxystearyl with polysaccharide material, compared with comparative example 1, the surface hardness and breaking strength of the grinding tool sample prepared in example 1 are both enhanced, which indicates that the grinding tool sample added with 10% by mass of hydroxystearyl has better mechanical properties. However, when the hydroxystearic acid accounts for 20% of the mass fraction of the grinding tool (comparative example 2), although the bending strength of the grinding tool is slightly improved compared with the grinding tool sample without the hydroxystearic acid, the surface hardness of the grinding tool is obviously reduced, which indicates that excessive hydroxystearic acid affects the holding capacity of the polysaccharide binding agent on the silicon dioxide grinding tool, and further affects the processing performance of the grinding tool. Comparative example 3 after the hydroxystearin in example 1 was replaced with the same amount of polyethylene wax, the mechanical properties of the molded product were poor due to poor compatibility of the polyethylene wax with the polysaccharide binder, and the product could not be used for processing. Comparative example 4 polyethylene wax was added to the abrasive tool at 0.98% by weight and microcrystalline cellulose was added at 0.76% by weight to improve the mechanical strength of the abrasive tool. It can be seen that the abrasive of comparative example 4 has better mechanical strength, but the abrasive of comparative example 4 has still weaker mechanical strength than that of example 1 due to the poor compatibility of polyethylene wax with the polysaccharide binder.
b. Thermal property test results of abrasive tools
Fig. 1 shows the result of simultaneous thermal analysis of hydroxystearine, which shows that the melting point of hydroxystearine is 70 ℃, fig. 2 and fig. 3 show the result of simultaneous thermal analysis of the grinding tool samples in comparative example 1 and example 1, respectively, and fig. 2 and fig. 3 show an endothermic peak at 70 ℃, which proves the existence of the hydroxystearine material in the grinding tool, and also shows that the hydroxystearine is a two-phase material although the compatibility of the hydroxystearine and the polysaccharide binder is better, thereby ensuring the function of the hydroxystearine in the grinding tool.
c. Temperature measurement result of single crystal sapphire workpiece in grinding tool machining process
Since the abrasive tools of comparative examples 2 and 3 have poor mechanical strength and are not suitable for processing of single crystal sapphire, surface processing experiments of single crystal sapphire were performed using only example 1 and comparative examples 1 and 4. The temperature profile during processing of example 1 and comparative examples 1 and 4 is shown in fig. 4, with a sampling interval of 0.4 s.
It can be seen from fig. 4 that the temperature of the single crystal sapphire workpiece was gradually stabilized at 69 c during the processing of the abrasive article containing hydroxystearic acid. Compared with the grinding tool containing the hydroxystearic acid, the grinding tool containing the hydroxystearic acid material in the grinding tool has the advantages that the temperature of the single crystal sapphire workpiece is continuously increased in the processing process, the temperature reaches 79 ℃ after the processing is finished, and the temperature is obviously higher than that of the grinding tool containing the hydroxystearic acid, so that the temperature of the single crystal sapphire in the processing process can be effectively reduced, and further the thermal damage of the processing surface of the single crystal sapphire is reduced. Comparative abrasive article 4, which contains a trace amount of polyethylene wax, has a workpiece temperature of up to 76 c, lower than comparative example 1, but still significantly higher than example 1, due to the heat absorbed by the melting of polyethylene wax during processing. The compatibility of the polyethylene wax and the polysaccharide binding agent is poor compared with that of the hydroxystearin, and the mass percentage of the polyethylene wax in the grinding tool is limited, so that although the temperature of a workpiece in the processing process can be reduced by adding a trace amount of polyethylene wax, the temperature rise inhibiting effect of the polyethylene wax is lower than that of the grinding tool sample added with the hydroxystearin in the example 1.
d. The results of measuring the removal rate of the surface material of the abrasive processed single crystal sapphire are shown in Table 3
TABLE 3 surface material removal rate of abrasive tools for processing single crystal sapphire
Figure BDA0002195385580000131
As can be seen from Table 3, the single crystal sapphire surface material removal rate of the abrasive article sample with the hydroxystearyl powder added in comparative example 1 is higher than that of the abrasive article sample without the hydroxystearyl powder added in example 1, which shows that the hydroxystearyl powder can improve the self-sharpening property of the abrasive article and the material removal performance of the abrasive article. Comparative example 4 compared with comparative example 1 and example 1, the trace amount of polyethylene wax improves the self-sharpening performance of the grinding tool sample, so that the removal rate of the processing material of comparative example 4 is slightly higher than that of comparative example 1 and still lower than that of example 1, and illustrates that the mass percentage of the polyethylene wax in the grinding tool is limited due to the poor compatibility of the polyethylene wax and the polysaccharide binder compared with that of the hydroxystearin, so that the grinding tool self-sharpening performance can be improved by adding the trace amount of polyethylene wax, but the processing performance is still lower than that of the grinding tool sample added with the hydroxystearin in example 1.
In summary, the test results of comparative examples 1 to 4 and example 1 show that the addition of hydroxystearate to the grinding tool can inhibit the frictional temperature rise in the machining area while maintaining the mechanical properties and machining performance of the grinding tool. The formula of the polysaccharide binding agent grinding tool adopted by the invention is all environment-friendly and nontoxic, no adverse effect is generated on the environment in the grinding tool manufacturing and single crystal sapphire processing processes, and the green and efficient processing of the surface of the single crystal sapphire wafer can be realized.
The above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (9)

1. A grinding tool for processing single crystal sapphire is characterized in that: the material is mainly prepared from the following raw materials in parts by weight: 67.5 parts of silicon dioxide, 22.5 parts of modified polysaccharide binding agent and 10 parts of hydroxystearic essence;
the preparation process of the grinding tool for processing the single crystal sapphire comprises the following steps:
(1) adding 22.5 parts of modified polysaccharide binder into absolute ethyl alcohol, and stirring, wherein the added mass of the absolute ethyl alcohol is 1-5% of the dry basis of the modified polysaccharide binder;
(2) adding 67.5 parts of silicon dioxide and 10 parts of hydroxystearic acid into the mixture of the modified polysaccharide binding agent and the absolute ethyl alcohol in the step (1), and mixing to obtain pre-pressed powder;
(3) under the condition of water bath, adding deionized water into the pre-pressed powder in the step (2), wherein the weight part of the added deionized water is 70 parts, and obtaining a mixture;
(4) pouring the mixture formed in the step (3) into a mould, and pressing and forming;
(5) placing the press-formed grinding tool at 2-4 deg.C for 24h, and soaking the grinding tool in alcohol for 2-30 d; taking out the soaked grinding tool from the alcohol, and drying to constant weight.
2. The grinding tool for processing single crystal sapphire according to claim 1, characterized in that: the modified polysaccharide binder is a pregelatinized polysaccharide.
3. The grinding tool for processing single crystal sapphire according to claim 2, characterized in that: the pregelatinized polysaccharide is pregelatinized starch.
4. The grinding tool for processing single crystal sapphire according to claim 2, characterized in that: the mesh number of the pregelatinized polysaccharide is 60-80 meshes.
5. A process for producing the abrasive tool for single crystal sapphire processing according to claim 1, characterized by: the method comprises the following steps:
(1) adding 22.5 parts of modified polysaccharide binder into absolute ethyl alcohol, and stirring, wherein the added mass of the absolute ethyl alcohol is 1-5% of the dry basis of the modified polysaccharide binder;
(2) adding 67.5 parts of silicon dioxide and 10 parts of hydroxystearic acid into the mixture of the modified polysaccharide binding agent and the absolute ethyl alcohol in the step (1), and mixing to obtain pre-pressed powder;
(3) under the condition of water bath, adding deionized water into the pre-pressed powder in the step (2), wherein the weight part of the added deionized water is 70 parts, and obtaining a mixture;
(4) pouring the mixture formed in the step (3) into a mould, and pressing and forming;
(5) placing the press-formed grinding tool at 2-4 deg.C for 24h, and soaking the grinding tool in alcohol for 2-30 d; taking out the soaked grinding tool from the alcohol, and drying to constant weight.
6. The process for producing the grinding tool for processing crystal sapphire according to claim 5, wherein: the temperature of the water bath in the step (3) is 50 ℃.
7. The process for producing the grinding tool for processing crystal sapphire according to claim 5, wherein: the modified polysaccharide binder is a pregelatinized polysaccharide.
8. The process for producing the grinding tool for processing crystal sapphire according to claim 7, wherein: the pregelatinized polysaccharide is pregelatinized starch.
9. The process for producing the grinding tool for processing crystal sapphire according to claim 7, wherein: the mesh number of the pregelatinized polysaccharide is 60-80 meshes.
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JP3211012B2 (en) * 1992-11-27 2001-09-25 金井 宏之 Nonwoven abrasive
PL314488A1 (en) * 1993-05-12 1996-09-16 Minnesota Mining & Mfg Surface machining products and method of making them
JP4814502B2 (en) * 2004-09-09 2011-11-16 株式会社フジミインコーポレーテッド Polishing composition and polishing method using the same
CN103831741A (en) * 2014-02-11 2014-06-04 当涂县南方红月磨具磨料有限公司 Ceramic and cubic boron nitride grinding wheel containing active carbon
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CN109648487A (en) * 2019-01-04 2019-04-19 合肥工业大学 A kind of monocrystalline silicon carbide green, efficient polishing abrasive tool and its method for polishing monocrystalline silicon carbide

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